阅读说明：本技术 一种激光-超声振动复合辅助切削加工装置 (Laser-ultrasonic vibration composite auxiliary cutting device ) 是由 林洁琼 刘思洋 谷岩 周岩 赵慧博 徐梓苏 贾茹 吴爽 付兴豹 周伟东 于 2021-07-07 设计创作，主要内容包括：本发明公开了一种激光-超声振动复合辅助切削加工装置,属于超精密加工领域。该装置主要由激光发射装置、超声车削系统和检测装置以及机床本体组成。其中,激光发射装置通过螺栓与机床的XZ轴移动导轨连接,超声车削系统通过螺栓与检测装置中的测力计和机床的XZ轴移动导轨连接。其余检测装置均通过三脚架放置在机床本体的一侧。优点是在加工过程中由于激光加热与超声振动的复合作用,使工件材料的去除方式由脆性去除转变为塑性去除,降低了刀具磨损,提高了加工效率。同时,检测装置实现了对切削过程中的切削力、切削热以及切削状态的实时监测。有利于获得切削区域内的温度分布情况同时观察该切削过程是否稳定。(The invention discloses a laser-ultrasonic vibration composite auxiliary cutting machining device, and belongs to the field of ultra-precision machining. The device mainly comprises a laser emitting device, an ultrasonic turning system, a detection device and a machine tool body. The laser emitting device is connected with an XZ axis moving guide rail of the machine tool through a bolt, and the ultrasonic turning system is connected with a dynamometer in the detection device and the XZ axis moving guide rail of the machine tool through a bolt. The rest detection devices are placed on one side of the machine tool body through a tripod. The method has the advantages that due to the combined action of laser heating and ultrasonic vibration in the machining process, the removal mode of workpiece materials is changed from brittle removal to plastic removal, the abrasion of a cutter is reduced, and the machining efficiency is improved. Meanwhile, the detection device realizes real-time monitoring of cutting force, cutting heat and cutting state in the cutting process. The temperature distribution condition in the cutting area can be obtained, and whether the cutting process is stable or not can be observed.)

1. The laser-ultrasonic vibration composite auxiliary cutting machining device is characterized in that: the ultrasonic turning machine comprises a laser emitting device, an ultrasonic turning system and a machine tool body, wherein the machine tool body comprises a spindle driving assembly and a feeding assembly, the spindle driving assembly and the feeding assembly are used for clamping a workpiece and driving the workpiece, the ultrasonic turning system and the laser emitting device are mounted on the feeding assembly, and the ultrasonic turning system and the laser emitting device can synchronously perform feeding action so as to perform laser processing on the workpiece while the ultrasonic turning system performs ultrasonic cutting on the workpiece.

2. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 1, characterized in that: the laser emission device comprises a pulse laser, a focusing mirror, an oxygen conduit and a clamping and rotating mechanism, wherein the clamping and rotating mechanism is installed on the feeding assembly, the pulse laser, the focusing mirror and the oxygen conduit are all installed at the rotating end of the clamping and rotating mechanism, the focusing mirror is installed in front of the emission end of the pulse laser to focus light emitted by the pulse laser, and the oxygen outlet end of the oxygen conduit is adjacent to the emergent end of the focusing mirror.

3. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 2, characterized in that: centre gripping slewing mechanism includes manual rotation displacement platform, mounting panel one, manual linear displacement platform and mounting panel two, and wherein the bottom of manual rotation displacement platform is installed on feeding the subassembly, but the rotation end level of manual rotation displacement platform rotates, and a mounting panel fixed mounting rotates the end at the top of manual rotation displacement platform, the pedestal mounting of manual linear displacement platform is at the top surface of mounting panel one, the slip end at manual linear displacement platform is installed to mounting panel two, pulse laser, focusing mirror and oxygen pipe are all installed on mounting panel two.

4. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 3, characterized in that: and the second mounting plate is provided with a dovetail groove guide rail which is horizontally arranged, the moving direction of the moving end of the manual linear displacement table is three-dimensional, and the pulse laser and the focusing mirror are arranged on the dovetail groove guide rail through a dovetail groove guide rail sliding block in a sliding manner.

5. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 4, characterized in that: and a connecting rod support is arranged on the dovetail groove guide rail sliding block and is perpendicular to the mounting plate II, the pulse laser and the focusing mirror are connected with a connecting rod, the connecting rod can be rotated and positioned and is inserted in the connecting rod support, and the rotating axis of the pulse laser and the rotating axis of the focusing mirror are perpendicular to the mounting plate II.

6. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 3, characterized in that: and a connecting rod support is arranged on the second mounting plate and is perpendicular to the second mounting plate, the oxygen guide pipe is connected with a connecting rod, the connecting rod is rotatably and fixedly inserted in the connecting rod support, and the rotating axis of the oxygen guide pipe is perpendicular to the second mounting plate.

7. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 2, characterized in that: the pulse laser, the focusing mirror and the oxygen conduit are all provided with clamping mechanisms outside, the clamping mechanisms are provided with grooves which are linearly formed, and the pulse laser, the focusing mirror and the oxygen conduit can move and be positioned in the grooves along the extending direction of the grooves.

8. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 1, characterized in that: the feeding assembly comprises an XZ-axis moving guide rail, the laser emitting device and the ultrasonic turning system are both arranged on the XZ-axis moving guide rail, and the XZ-axis moving guide rail can drive the laser emitting device and the ultrasonic turning system to move along the direction of the rotation center of the workpiece and move perpendicular to the direction of the rotation center of the workpiece.

9. The laser-ultrasonic vibration composite auxiliary cutting device according to claim 1, characterized in that: the side surface of the machine tool body is also provided with a high-speed camera and a thermal infrared imager for monitoring the processing state of the workpiece.

10. The laser-ultrasonic vibration composite auxiliary cutting device according to any one of claims 1 to 9, characterized in that: the ultrasonic turning system comprises a flange rotary table, a protective shell, a piezoelectric transducer, an ultrasonic amplitude transformer and a diamond cutter, wherein the flange rotary table is installed on the feeding assembly through a platform type dynamometer, the protective shell is installed at the lifting end of the flange rotary table, the piezoelectric transducer is arranged in the protective shell, the tail end of the ultrasonic amplitude transformer is installed at the output end of the piezoelectric transducer, the diamond cutter is installed at the front end of the ultrasonic amplitude transformer, an arc groove is formed in the position, close to the front end, of the ultrasonic amplitude transformer, the curvature radius of the arc groove is 5mm, the arc groove enables waves of longitudinal vibration in the ultrasonic amplitude transformer to be decomposed at the arc groove and divided into longitudinal vibration and bending vibration, and composite elliptical ultrasonic vibration is formed at the diamond cutter so that the cutting mode of the diamond cutter is converted from continuous cutting to intermittent cutting.

Technical Field

The invention relates to the technical field of machining, in particular to a laser-ultrasonic vibration composite auxiliary cutting machining device.

Background

The ultrasonic vibration auxiliary processing is a non-traditional processing method, which uses an energy converter (piezoelectric ceramic) to convert high-frequency electric energy into high-frequency mechanical vibration energy, and micron-scale amplitude with certain frequency is applied to a processing cutter so as to realize that the relative position of the cutter and a workpiece is periodically changed, thereby not only reducing cutting force, but also improving the surface roughness of parts, prolonging the service life of the cutter and effectively inhibiting regeneration chatter vibration. The laser-assisted machining technique reduces cutting force, surface roughness, and tool wear by locally heating the surface of a workpiece to soften the material, thereby improving the machining characteristics of difficult-to-machine materials.

The laser-ultrasonic composite processing is a novel hybrid processing technology, a high-power laser beam is focused on the surface of a workpiece in front of a tool nose, and the local surface is heated to high temperature in a short time, so that the workpiece material is softened. Meanwhile, oxygen is conveyed from the nozzle to the laser irradiation area, oxidation reaction is carried out, and a loose and porous oxide layer is formed. Then the cutter applies ultrasonic vibration in the tangential direction and the radial direction at the same frequency, ultrasonic elliptical vibration cutting is realized, long-time friction between the rear cutter face of the cutter and the surface of the machined workpiece is avoided, and the damage of the cutter and the negative influence of the damage on the surface quality of the workpiece are reduced.

The requirement of small amplitude during ultrasonic vibration is easy to cause low processing efficiency, and for hard and brittle materials, the microcosmic impact action of a cutter and a workpiece causes the cutter to generate tipping damage; the laser-assisted cutting technology increases the critical plastic-brittle transition depth and improves the material removal rate by heating the softened material with laser. However, the continuous larger laser heating easily causes subsurface damage to the surface of the workpiece, so that the surface integrity is reduced; therefore, a processing device which can realize intermittent cutting, process hard and brittle materials by laser assistance and ensure the surface quality of a workpiece is urgently needed to solve the problems.

Disclosure of Invention

In order to solve the problems, the invention provides a laser-ultrasonic vibration composite auxiliary cutting device which can solve the problems mentioned in the background technology and is suitable for processing brittle and high-hardness materials such as engineering ceramics, composite materials and the like.

In order to achieve the purpose, the invention adopts the technical scheme that:

the laser-ultrasonic vibration composite auxiliary cutting machining device comprises a laser emitting device, an ultrasonic turning system and a machine tool body, wherein the machine tool body comprises a spindle driving assembly and a feeding assembly, the spindle driving assembly and the feeding assembly are used for clamping a workpiece and driving the workpiece, the ultrasonic turning system and the laser emitting device are mounted on the feeding assembly, and the ultrasonic turning system and the laser emitting device can synchronously perform feeding action so as to perform laser machining on the workpiece while the ultrasonic turning system performs ultrasonic cutting machining on the workpiece.

Preferably, the laser emission device comprises a pulse laser, a focusing mirror, an oxygen conduit and a clamping rotating mechanism, the clamping rotating mechanism is installed on the feeding assembly, the pulse laser, the focusing mirror and the oxygen conduit are all installed at a rotating end of the clamping rotating mechanism, the focusing mirror is installed in front of an emission end of the pulse laser to focus light emitted by the pulse laser, and an oxygen outlet end of the oxygen conduit is adjacent to an emergent end of the focusing mirror.

Preferably, the clamping and rotating mechanism comprises a manual rotary displacement table, a first mounting plate, a manual linear displacement table and a second mounting plate, wherein the bottom of the manual rotary displacement table is mounted on the feeding assembly, the rotating end of the manual rotary displacement table can horizontally rotate, the first mounting plate is fixedly mounted at the rotating end of the top of the manual rotary displacement table, the base of the manual linear displacement table is mounted on the top surface of the first mounting plate, the second mounting plate is mounted at the sliding end of the manual linear displacement table, and the pulse laser, the focusing mirror and the oxygen guide tube are mounted on the second mounting plate.

Preferably, the second mounting plate is provided with a dovetail groove guide rail, the dovetail groove guide rail is horizontally arranged, the moving direction of the moving end of the manual linear displacement table is three-dimensional movement, and the pulse laser and the focusing mirror are slidably mounted on the dovetail groove guide rail through a dovetail groove guide rail sliding block.

Preferably, a connecting rod support is arranged on the dovetail groove guide rail sliding block and is perpendicular to the second mounting plate, the pulse laser and the focusing mirror are connected with a connecting rod, the connecting rod is rotatably and fixedly inserted into the connecting rod support, and the rotating axes of the pulse laser and the focusing mirror are perpendicular to the second mounting plate.

Preferably, a connecting rod support is arranged on the second mounting plate and is perpendicular to the second mounting plate, the oxygen guide pipe is connected with a connecting rod, the connecting rod is rotatably and fixedly inserted into the connecting rod support, and the rotating axis of the oxygen guide pipe is perpendicular to the second mounting plate.

Preferably, clamping mechanisms are arranged outside the pulse laser, the focusing mirror and the oxygen conduit, grooves which are linearly formed are formed in the clamping mechanisms, and the pulse laser, the focusing mirror and the oxygen conduit can move and be positioned in the grooves along the extending direction of the grooves.

Preferably, the feeding assembly comprises an XZ-axis moving guide rail, the laser emitting device and the ultrasonic turning system are both mounted on the XZ-axis moving guide rail, and the XZ-axis moving guide rail can drive the laser emitting device and the ultrasonic turning system to move along the direction of the rotation center of the workpiece and move perpendicular to the direction of the rotation center of the workpiece.

Preferably, the side surface of the machine tool body is also provided with a high-speed camera and a thermal infrared imager for monitoring the processing state of the workpiece.

Preferably, the ultrasonic turning system comprises a flange rotary table, a protective shell, a piezoelectric transducer, an ultrasonic horn and a diamond cutter, wherein the flange rotary table is arranged on the feeding assembly through a platform type dynamometer, the protective shell is arranged at the lifting end of the flange rotary table, the piezoelectric transducer is arranged in the protective shell, the tail end of the ultrasonic amplitude transformer is arranged at the output end of the piezoelectric transducer, the diamond cutter is arranged at the front end of the ultrasonic amplitude transformer, an arc groove is arranged at the position of the ultrasonic amplitude transformer close to the front end, the curvature radius of the arc groove is 5mm, the arc groove enables the wave of longitudinal vibration in the ultrasonic amplitude transformer to be decomposed at the arc groove and divided into longitudinal vibration and bending vibration, composite elliptical ultrasonic vibration is formed at the diamond cutter, thereby converting the cutting mode of the diamond cutter from continuous cutting to intermittent cutting.

The beneficial effects of the invention are as follows:

1. the ultrasonic vibration cutting designed by the invention is a cutting processing method for improving cutting performance by applying a vibration effect of ultrasonic frequency to a cutter in the cutting process. The ultrasonic vibration assisted cutting technique can effectively reduce cutting force. The separation characteristic is beneficial to smooth chip discharge, so that the service life of the cutter is prolonged, the cutter is in discontinuous contact with a workpiece, and the cutting edge has a period of heat dissipation time during machining, so that the cutting temperature in the cutting process is reduced and can be kept to room temperature. Meanwhile, burrs in the machining process are effectively inhibited, and the machining precision of the workpiece is improved. Based on the advantages, the efficient and high-quality processing of the hard and brittle materials by using the common cutter is possible. In addition, ultrasonic vibration cutting has advantages that self-excited vibration of the machine itself can be reduced or eliminated, formation of attachments on the tool surface can be suppressed, brittle cracks are not generated when a brittle material is machined, and the like.

2. The invention combines the laser heating technology and the ultrasonic vibration auxiliary cutting technology to realize laser-ultrasonic composite auxiliary cutting processing. In the process, the heat radiated by the laser firstly softens the material to be processed, so that the brittle material is transformed from brittleness to plasticity, the cutting process is smoother, and meanwhile, oxygen is introduced into a laser irradiation area, so that a loose and porous oxide layer is formed on the surface of a workpiece, and the brittle fission of the material at the to-be-processed part is avoided. On the premise of not influencing heating softening, the cutting performance of the hard and brittle material is further improved by an ultrasonic vibration cutting technology, and the aims of reducing the abrasion of a cutter, reducing the surface roughness of a workpiece and reducing the edge fragmentation are fulfilled.

3. According to the invention, the arc groove with the radius of 5mm is formed in the ultrasonic amplitude transformer, so that the longitudinal vibration wave in the ultrasonic amplitude transformer is decomposed at the arc groove and divided into longitudinal vibration and bending vibration, and composite elliptical ultrasonic vibration is formed at the diamond tool, so that a continuous cutting mode is converted into intermittent cutting. Compared with the traditional continuous cutting machining, after the cutter finishes machining one position, the cutter rear cutter face is far away from the machined position due to the elliptical vibration, and scraping between the cutter rear cutter face and the machined surface in the moving process is avoided.

Drawings

Fig. 1 is a schematic structural diagram of a laser-ultrasonic vibration combined auxiliary cutting device according to the present invention.

Fig. 2 is a schematic structural diagram of a laser emitting device in the laser-ultrasonic vibration combined auxiliary cutting device according to the present invention.

Fig. 3 is a schematic structural diagram of a connecting plate in a laser emitting device in the laser-ultrasonic vibration combined auxiliary cutting device according to the present invention.

Fig. 4 is a schematic structural diagram of an ultrasonic turning system in the laser-ultrasonic vibration combined auxiliary cutting device of the present invention.

Fig. 5 is a schematic structural diagram of a load cell in the detection device of the laser-ultrasonic vibration combined auxiliary cutting processing device.

Fig. 6 is a schematic structural diagram of a high-speed camera in the detection device of the laser-ultrasonic vibration combined auxiliary cutting processing device.

FIG. 7 is a schematic structural diagram of a thermal infrared imager in the detection device of the laser-ultrasonic vibration combined auxiliary cutting device according to the present invention.

Fig. 8 is an assembly view of an ultrasonic turning system and a force gauge in the laser-ultrasonic vibration combined auxiliary cutting device of the present invention.

Fig. 9 is a schematic structural view of a machine tool body in the laser-ultrasonic vibration combined auxiliary cutting machining apparatus of the present invention.

The reference numerals include:

1-laser emitting device, 2-ultrasonic turning system, 3-detection device, 4-machine body, 5-workpiece, 101-pulse laser, 102-focusing mirror, 103-oxygen conduit, 104-clamping rotation mechanism, 105-backing plate, 10401-manual rotation displacement table, 10402-mounting plate I, 10403-manual linear displacement table, 10404-mounting plate II, 10405-clamping mechanism I, 10406-clamping mechanism II, 10407-clamping mechanism III, 10408-dovetail groove guide rail, 10409-dovetail groove guide rail slide block I, 10410-dovetail groove guide rail slide block II, 1040501-extension rod support I, 1040502-extension rod I, 1040503-clamp I, 201-flange turntable, 202-protection shell, 203-piezoelectric transducer, 204-ultrasonic amplitude transformer, 205-arc groove, 206-diamond cutter, 301-dynamometer, 302-high-speed camera, 303-thermal infrared imager, 401-lathe bed, 402-spindle driving assembly and 403-XZ axis moving guide rail.

Detailed Description

In order to make the purpose, technical solution and advantages of the present technical solution clearer, the present technical solution is further described in detail below with reference to specific embodiments. It should be understood that the description is intended to be exemplary only, and is not intended to limit the scope of the present teachings.

As shown in fig. 1-9, the present embodiment provides a laser-ultrasonic vibration composite auxiliary cutting device, which includes a laser emitting device 1, an ultrasonic turning system 2 and a machine tool body 4, wherein the machine tool body 4 includes a spindle driving assembly 402 for clamping a workpiece 5 and driving the workpiece 5 to rotate, a feeding assembly and a machine tool body 401, the ultrasonic turning system 2 and the laser emitting device 1 are mounted on the feeding assembly, and the ultrasonic turning system 2 and the laser emitting device 1 can synchronously perform feeding actions so as to perform laser processing on the workpiece 5 while the ultrasonic turning system 2 performs ultrasonic cutting processing on the workpiece 5. The laser emitting device 1 comprises a pulse laser 101, a focusing mirror 102, an oxygen conduit 103 and a clamping rotating mechanism 104, wherein the clamping rotating mechanism 104 is installed on a feeding assembly, the pulse laser 101, the focusing mirror 102 and the oxygen conduit 103 are all installed at a rotating end of the clamping rotating mechanism 104, the focusing mirror 102 is installed in front of an emitting end of the pulse laser 101 to focus light emitted by the pulse laser 101, and an oxygen outlet end of the oxygen conduit 103 is adjacent to an emitting end of the focusing mirror 102.

The clamping and rotating mechanism 104 comprises a manual rotating and displacing table 10401, a first mounting plate 10402, a manual linear displacing table 10403 and a second mounting plate 10404, wherein the bottom of the manual rotating and displacing table 10401 is mounted on the feeding assembly, the rotating end of the manual rotating and displacing table 10401 can horizontally rotate, the first mounting plate 10402 is fixedly mounted at the top rotating end of the manual rotating and displacing table 10401, the base of the manual linear displacing table 10403 is mounted on the top surface of the first mounting plate 10402, the second mounting plate 10404 is mounted at the sliding end of the manual linear displacing table 10403, and the pulse laser 101, the focusing mirror 102 and the oxygen guide tube 103 are mounted on the second mounting plate 10404.

A dovetail groove guide rail 10408 is arranged on the second mounting plate 10404, the dovetail groove guide rail 10408 is horizontally arranged, the moving direction of the moving end of the manual linear displacement table 10403 is perpendicular to the projection of the extending direction of the main body of the dovetail groove guide rail 10408 on the horizontal plane, and the pulse laser 101 and the focusing mirror 102 are slidably mounted on the dovetail groove guide rail 10408 through a slider of the dovetail groove guide rail 10408.

And a connecting rod support is arranged on the dovetail groove guide rail 10408 sliding block and is perpendicular to the second mounting plate 10404, the pulse laser 101 and the focusing mirror 102 are connected with a connecting rod, the connecting rod is rotatably and fixedly inserted into the connecting rod support, and the rotating axes of the pulse laser 101 and the focusing mirror 102 are perpendicular to the second mounting plate 10404.

A connecting rod support is arranged on the second mounting plate 10404 and is perpendicular to the second mounting plate 10404, the oxygen guide pipe 103 is connected with a connecting rod, the connecting rod is rotatably and fixedly inserted into the connecting rod support, and the rotating axis of the oxygen guide pipe 103 is perpendicular to the second mounting plate 10404.

The pulse laser 101, the focusing mirror 102 and the oxygen conduit 103 are all provided with clamping mechanisms outside, the clamping mechanisms are provided with grooves which are linearly formed, and the pulse laser 101, the focusing mirror 102 and the oxygen conduit 103 can move and be positioned in the grooves along the extending direction of the grooves.

Specifically, taking the pulse laser 101 as an example, one end of the connecting rod bracket i 1040501 is connected to the dovetail groove guide rail slider i 10409, the connecting rod i 1040502 is rotatably and positionally installed in the connecting rod bracket i 1040501, the clamp holder i 1040503 is installed on the connecting rod i 1040502, and the pulse laser 101 is installed in a groove of the clamp holder i 1040503. The focusing mirror 102 and the oxygen conduit 103 are mounted in a similar manner to the pulsed laser 101 and will not be described in detail.

The feeding assembly comprises an XZ-axis moving guide rail 403, the laser emitting device 1 and the ultrasonic turning system 2 are both arranged on the XZ-axis moving guide rail 403, and the XZ-axis moving guide rail 403 can drive the laser emitting device 1 and the ultrasonic turning system 2 to move along the direction of the rotation center of the workpiece 5 and move perpendicular to the direction of the rotation center of the workpiece 5.

The machine tool body 4 also has a high-speed camera 302 and an infrared thermal imager 303 for monitoring the processing state of the workpiece 5 on the side.

The ultrasonic turning system 2 comprises a flange turntable 201, a protective shell 202, a piezoelectric transducer 203, an ultrasonic horn 204 and a diamond cutter 206, wherein the flange turntable 201 is arranged on the feeding assembly through a platform type dynamometer 301, the protective shell 202 is arranged at the lifting end of the flange turntable 201, the piezoelectric transducer 203 is arranged in the protective shell 202, the tail end of the ultrasonic amplitude transformer 204 is arranged at the output end of the piezoelectric transducer 203, the diamond cutter 206 is arranged at the front end of the ultrasonic amplitude transformer 204, and the position of the ultrasonic amplitude transformer 204 close to the front end is provided with an arc groove 205, the curvature radius of the arc groove 205 is 4mm-6mm, the arc groove 205 enables the wave of longitudinal vibration in the ultrasonic horn 204 to be decomposed at the arc groove 205 and divided into longitudinal vibration and bending vibration, composite elliptical ultrasonic vibration is generated at the diamond tool 206, thereby converting the cutting pattern of the diamond tool 206 from continuous cutting to intermittent cutting.

Specifically, the laser emitting device 1 is mounted on an XZ axis moving guide 403 of the machine tool by a bolt, and the ultrasonic turning system 2 is connected with a dynamometer 301 in the detection device 3 and the XZ axis moving guide 403 of the machine tool by a bolt. The thermal infrared imager 303 and the high-speed camera 302 in the detection device 3 are both placed on one side of the machine tool body 4 through a tripod. The pulse laser 101, the laser focusing mirror 102 and the oxygen conduit 103 are respectively clamped on the first clamping mechanism 10405, the second clamping mechanism 10406 and the third clamping mechanism 10407, and the clamping rotating mechanism 104 is connected with the backing plate 105 through bolts.

The clamp rotating mechanism 104 includes: a manual rotary displacement table 10401, a first mounting plate 10402, a manual linear displacement table 10403, a second mounting plate 10404, a first clamping mechanism 10405, a second clamping mechanism 10406, a third clamping mechanism 10407, a dovetail groove guide rail 10408, a first dovetail groove guide rail slider 10409, a second dovetail groove guide rail slider 10410, the first mounting plate 10402 is connected with the manual rotary displacement table 10401 through a bolt, the manual linear displacement table 10403 is connected with the first mounting plate 10402 through a bolt, the second mounting plate 10404 is connected with the manual linear displacement table 10403 through a bolt, the third clamping mechanism 10407 is installed on the second mounting plate 10404 through a bolt, the dovetail groove guide rail 10408 is connected with the second mounting plate 10404 through a bolt, the first dovetail groove guide rail slider 10409 and the second dovetail groove guide rail slider 10410 are installed on the dovetail groove guide rail 10408 through a pretightening screw and a clamping structure, and the first clamping mechanism 10405 and the second clamping mechanism 10406 are connected with the first dovetail groove guide rail slider 10409 and the second dovetail groove guide rail slider 10410 through bolts respectively.

The ultrasonic turning system 2 comprises a flange turntable 201, a protective shell 202, a piezoelectric transducer 203, an ultrasonic horn 204, a circular arc groove 205 and a diamond cutter 206. The bottom of the protective shell 202 is connected with the flange turntable 201 through a double-nut structure, so that on one hand, the ultrasonic turning system 2 can be heightened within a small range to meet the consideration of tool setting of a machine tool spindle, and on the other hand, the rotation function of the ultrasonic turning system 2 around the axis of the flange turntable 201 can be realized to explore the influence of different angles on the processing effect. The piezoelectric transducer 203 is connected with the ultrasonic horn 204, and the diamond cutter 206 is installed in the diamond groove of the ultrasonic horn 204 through a screw.

The detection device 3 comprises a dynamometer 301, a high-speed camera 302 and a thermal infrared imager 303, wherein the dynamometer 301 is connected with the ultrasonic turning system 2 through bolts and is jointly placed on an XZ-axis moving guide rail 403 of the machine tool, and the high-speed camera 302 and the thermal infrared imager 303 are placed on one side of the machine tool body 4 through a tripod.

The workpiece 5 is fixed on a three-jaw chuck of the spindle box, the XZ-axis moving guide rail 403 drives the laser emitting device 1 and the ultrasonic turning system 2 to move from right to left, the laser emitting device 1 emits laser to the end face of the workpiece 5, and the ultrasonic turning system 2 turns the end face of the workpiece 5. During cutting, the laser emitted from the pulse laser 101 is focused by the focusing lens 102, and then the rotating superhard material is heated in front of the machining point for a suitable heating time and energy density, thereby improving the machining characteristics of the material difficult to machine. The piezoelectric transducer 203 transmits mechanical vibration to the ultrasonic amplitude transformer 204, and the wave of longitudinal vibration generated by the ultrasonic amplitude transformer 204 is decomposed at the arc groove 205 and divided into longitudinal vibration and bending vibration, so that composite elliptical ultrasonic vibration is formed at the diamond cutter 206. Under the combined action of laser heating and ultrasonic vibration assistance, the removal mode of the superhard material is changed from brittle removal to plastic removal, so that the cutting force is reduced, the abrasion of a cutter is reduced, and the processing efficiency is improved.

Laser emission device 1 can realize being 25 mm's removal at X, Y, the three direction stroke of Z, and the removal precision can reach 10um for adjust the position and the height of laser incidence. Meanwhile, the whole-circle rotation with the precision of 0.02 degree can be realized, so that the incident angle of the laser can be adjusted.

The average power of the laser emitting device 1 is more than 50W, the repetition frequency of the pulse laser beam is 100-500KHZ, and the incident angle is 30-90 degrees.

The oxygen conduit 103 delivers oxygen to the laser irradiation area, and an oxidation reaction occurs to form a loose and porous oxide layer. Compared with the hard and brittle aluminum-based silicon carbide, the hardness of the oxide layer is greatly reduced, and the processing performance is effectively improved.

The ultrasonic horn 204 is provided with an arc groove 205 with the radius of 5mm, so that the wave of longitudinal vibration in the ultrasonic horn 204 can be decomposed at the arc groove 205 and divided into longitudinal vibration and bending vibration, and composite elliptical ultrasonic vibration is formed at the diamond cutter 206, so that the cutting mode is converted from continuous cutting to intermittent cutting.

The piezoelectric transducer 203 enables the vibration frequency of the cutter to be not less than 20kHz, and the vibration amplitude to be 1-10 um.

The foregoing is only a preferred embodiment of the present invention, and many variations in the specific embodiments and applications of the invention may be made by those skilled in the art without departing from the spirit of the invention, which falls within the scope of the claims of this patent.