阅读说明：本技术 一种真空冷却系统的焊接加工方法及用途 (Welding processing method and application of vacuum cooling system ) 是由 姚力军 潘杰 昝小磊 鲍伟江 王学泽 周建军 于 2021-09-17 设计创作，主要内容包括：本发明提供了一种真空冷却系统的焊接加工方法及用途,所述焊接加工方法包括：将两件产品的焊接面朝外,非焊接面相互贴合固定,对焊接面进行焊接,待产品冷却去除内部应力解除固定,检测产品的平面度并去除加工余量。在本发明中,提供一种新型的焊接加工方法,在保证冷却系统焊接后变形可控,成品壁厚均匀性达到技术要求的同时,又能够去除加工余量且保证产品的平面度,可操作性强,使用简便,适于推广。(The invention provides a welding processing method and application of a vacuum cooling system, wherein the welding processing method comprises the following steps: the welding surfaces of the two products face outwards, the non-welding surfaces are mutually attached and fixed, the welding surfaces are welded, internal stress is removed after the products are cooled, the products are released and fixed, the flatness of the products is detected, and machining allowance is removed. The invention provides a novel welding processing method, which can remove the processing allowance and ensure the flatness of a product while ensuring that the deformation of a cooling system is controllable after welding and the wall thickness uniformity of the finished product meets the technical requirement, and has the advantages of strong operability, simple and convenient use and suitability for popularization.)

1. A welding process method for a vacuum cooling system, the welding process method comprising:

the welding surfaces of the two products face outwards, the non-welding surfaces are mutually attached and fixed, the welding surfaces are welded, internal stress is removed after the products are cooled, the products are released and fixed, the flatness of the products is detected, and machining allowance is removed.

2. The welding process of claim 1, wherein said product is a sheet material;

preferably, the plate is made of stainless steel;

preferably, the stainless steel is 316L stainless steel.

3. The welding process of claim 1 or 2, wherein the fixing is by partial welding.

4. The welding process of any one of claims 1 to 3 wherein the welding is argon arc welding.

5. The welding process of any of claims 1-4, wherein the internal stress is removed by vibration or heat treatment.

6. The welding process according to any one of claims 1 to 5, wherein the acceleration of the vibration is 5 to 15G.

7. The welding process according to any one of claims 1 to 6, wherein the temperature of the heat treatment process is 450 to 550 ℃.

8. The welding processing method according to any one of claims 1 to 7, wherein the heat treatment process is carried out for a holding time of 2.5 to 3.5 hours;

preferably, the cooling mode of the heat treatment process is natural cooling.

9. The welding process of any of claims 1-8, wherein the means of removing the process margin is machining;

preferably, the reserved cutting amount of the plate in the process of removing the machining allowance is 1-2 mm.

10. Use of the soldering process according to any one of claims 1 to 9 in the field of semiconductor IC manufacturing equipment.

Technical Field

The invention belongs to the technical field of equipment processing for manufacturing a semiconductor IC, relates to a welding processing method, and particularly relates to a welding processing method and application of a vacuum cooling system.

Background

The metal composite plate has functionalized performance, lower cost and wide application range, and improves the development potential of the traditional metal material. The rare metal composite board still has a high growth speed, the application of the non-ferrous metal composite board in electric power flue gas desulfurization equipment is continuously increased along with the enhancement of the implementation strength of the national environmental protection industrial policy, the investment localization degree of the chemical industry is greatly increased, a good development opportunity is provided for the development of non-ferrous metal materials, and a wide space is provided for the development of the industry by the support of the national industrial policy, the high technical barrier and the requirement pulling of the industry upgrading. However, as the number of components using the composite plate is gradually increased, the problem of welding the composite plate needs to be solved.

CN108907415A discloses a welding method, which is applied to welding an evaporation source base flange and a joint, wherein the evaporation source base flange is provided with a through hole, and after the joint is inserted into the through hole, a gap is formed between an outer wall of the joint and an inner wall of the through hole, the welding method includes: the outer wall of joint with carry out argon tungsten-arc welding between the fenestrate inner wall, argon tungsten-arc welding is from melting argon tungsten-arc welding or adds wire formula argon tungsten-arc welding. The method can better weld and form when welding the flange and the joint of the evaporation source base, can more conveniently carry out welding operation in the welding process, reduces the construction difficulty, has no defects of cracks, incomplete fusion, surface pores and the like on the welding surface, and obviously improves the welding qualification rate.

CN103785962B discloses a full-penetration welding method for titanium steel composite plates. Vanadium is used as a middle transition layer of a composite interface of the titanium steel composite plate, so that the titanium steel composite plate is completely welded. The welding process of the titanium steel composite plate comprises the steps of cleaning a steel base layer, welding the steel base layer, cleaning and inspecting a welding seam of the steel base layer, cleaning a groove of an intermediate transition layer, welding the intermediate transition layer, cleaning and inspecting a welding seam of the intermediate transition layer, cleaning a titanium coating before welding, welding the titanium coating, cleaning and inspecting the titanium coating after welding, and testing the mechanical property of a welding seam joint. The method can be used for testing the full penetration welding of the titanium steel composite plate, the welding seam joint has no fusion phenomenon, the welding seam quality is good, the welding seam is attractive in shape, and the problem that the full penetration welding cannot be realized during the welding of the titanium steel composite plate is solved.

CN105665892B discloses an exhaust casing assembly argon arc welding method, which comprises the following steps: machining the to-be-welded part of the exhaust support to set a buffer transition section, so that the to-be-welded part of the exhaust support has a wall thickness: the wall thickness of the to-be-welded part of the outer ring of the exhaust section is 0.9-1.1: 0.9 to 1.1. And (4) after the exhaust support and the outer ring of the exhaust section are clamped, performing positioning welding by adopting an argon tungsten-arc welding method. And continuously welding the to-be-welded positions of the outer ring of the exhaust support and the exhaust section under the conditions that the diameter of a tungsten electrode is 3.2 millimeters, the welding current is 80-95A, the pulse frequency is 3.5Hz, the pulse width is 27%, the argon flow at the front side of the welding is 30-50L/min, and the argon flow at the back side of the welding is 20-40L/min. According to the argon arc welding method for the exhaust machine box assembly, through improvement of the form of the welding joint and optimization of continuous welding conditions, good welding seam forming can be guaranteed, welding cracks can be avoided, and the problem of low part qualified rate is solved.

When a plate deforms due to external factors (stress, humidity, temperature field change and the like), interaction internal force is generated among all parts in the plate to resist the effect of the external factors, and the plate tries to recover from the deformed position to the position before deformation.

Disclosure of Invention

Aiming at the defects in the prior art, the invention aims to provide a welding processing method and application of a vacuum cooling system.

In order to achieve the purpose, the invention adopts the following technical scheme:

in a first aspect, the present invention provides a welding processing method of a vacuum cooling system, the welding processing method comprising:

the welding surfaces of the two products face outwards, the non-welding surfaces are mutually attached and fixed, the welding surfaces are welded, internal stress is removed after the products are cooled, the products are released and fixed, the flatness of the products is detected, and machining allowance is removed.

The invention provides a novel welding processing method, which can remove the processing allowance and ensure the flatness of a product while ensuring that the deformation of a cooling system is controllable after welding and the wall thickness uniformity of the finished product meets the technical requirement, and has the advantages of strong operability, simple and convenient use and suitability for popularization.

As a preferable technical scheme of the invention, the product is a plate.

Preferably, the plate is made of stainless steel.

Preferably, the stainless steel is 316L stainless steel.

It should be noted that the present invention does not specifically require and specially limit the structural features of the product, such as size, shape, material, etc., and the product in the present invention functions to provide a welded product, and can be made of steel or other metal materials, and the material that deforms during the welding process can be used, so it can be understood that other products that can achieve such functions can be used in the present invention, and those skilled in the art can adaptively adjust the size, shape, and material of the product according to the use scenario and the test conditions.

As a preferred technical solution of the present invention, the fixing manner is a local welding.

It should be noted that the fixing manner of the present invention is not specifically required or limited, and the local welding is selected in the fixing manner because only the positioning point is set in the middle of the product, which is more convenient for welding the product, so it can be understood that other fixing manners capable of implementing such functions can be used in the present invention, and those skilled in the art can adaptively adjust the fixing manner according to the use scenario and the test condition.

As a preferred technical scheme of the invention, the welding mode is argon arc welding.

It should be noted that the present invention does not specifically require and specially limit the welding manner, and in the present invention, only one of the welding manners is provided, and other welding manners can be performed by using a manner that the welding surface faces outward, and the other surface is attached and fixed, and then welded, so it can be understood that other welding manners capable of achieving such functions can be used in the present invention, and those skilled in the art can adaptively adjust the welding manner according to the use scenario and the test condition.

As a preferred embodiment of the present invention, the internal stress is removed by vibration or heat treatment.

It should be noted that, the manner of removing the internal stress is not specifically required or limited, and the manner of removing the internal stress in the present invention is to reduce the degree of deformation of the product after welding, so that the product has better flatness and better appearance.

In a preferred embodiment of the present invention, the acceleration of the vibration is 5 to 15G, and may be, for example, 5G, 6G, 7G, 8G, 9G, 10G, 11G, 12G, 13G, 14G, or 15G, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range are also applicable.

In a preferred embodiment of the present invention, the temperature of the heat treatment process is 450 to 550 ℃, and may be, for example, 450 ℃, 460 ℃, 470 ℃, 480 ℃, 490 ℃, 500 ℃, 510, 520, 530, 540, 550, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned value range are also applicable.

In a preferred embodiment of the present invention, the heat-preserving time in the heat treatment process is 2.5 to 3.5 hours, for example, 2.5 hours, 2.6 hours, 2.7 hours, 2.8 hours, 2.9 hours, 3.0 hours, 3.1 hours, 3.2 hours, 3.3 hours, 3.4 hours, and 3.5 hours, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.

Preferably, the cooling mode of the heat treatment process is natural cooling.

It should be noted that the reason why the cooling method of the present invention is selected to be natural cooling is that if water cooling or other rapid cooling methods are used, the stress of the product cannot be reduced, and the natural cooling can make the product have a buffering time and slowly consume the internal stress, so it can be understood that other cooling methods capable of achieving such functions can be used in the present invention, and those skilled in the art can adaptively adjust the cooling method according to the use scenario and the test condition.

As a preferable aspect of the present invention, the mode of removing the machining allowance is machining.

Preferably, the reserved cutting amount of the plate in the process of removing the machining allowance is 1-2 mm, for example, 1mm, 1.1mm, 1.2mm, 1.3mm, 1.4mm, 1.5mm, 1.6mm, 1.7mm, 1.8mm, 1.9mm, 2mm, but is not limited to the enumerated values, and other non-enumerated values in the numerical value range are also applicable.

In a second aspect, the present invention provides a use of the soldering process according to the first aspect in the field of semiconductor IC manufacturing equipment.

Compared with the prior art, the invention has the beneficial effects that:

the invention provides a novel welding processing method, which can remove the processing allowance and ensure the flatness of a product while ensuring that the deformation of a cooling system is controllable after welding and the wall thickness uniformity of the finished product meets the technical requirement, and has the advantages of strong operability, simple and convenient use and suitability for popularization.

Drawings

FIG. 1 is a schematic flow diagram of a welding process for a vacuum cooling system according to an embodiment of the present invention;

FIG. 2 is a product placement diagram of a welding process for a vacuum cooling system according to an embodiment of the present invention;

wherein, 1-product; 2-anchor point.

Detailed Description

It is to be understood that in the description of the present invention, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be taken as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

It should be noted that, in the description of the present invention, unless otherwise explicitly specified or limited, the terms "disposed," "connected" and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

It should be understood by those skilled in the art that the present invention necessarily includes necessary piping, conventional valves and general pump equipment for achieving the complete process, but the above contents do not belong to the main inventive points of the present invention, and those skilled in the art can select the layout of the additional equipment based on the process flow and the equipment structure, and the present invention is not particularly limited to this.

The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.

In one embodiment, the present invention provides a welding process method of a vacuum cooling system, as shown in fig. 1, the welding process method comprising:

the welding surfaces of the two products 1 face outwards, the non-welding surfaces are mutually attached and fixed, the welding surfaces are welded, after the products 1 are cooled and the internal stress is removed, the products are released and fixed, the flatness of the products 1 is detected, and the machining allowance is removed.

The invention provides a novel welding processing method, which can remove the processing allowance and ensure the flatness of the product 1 while ensuring that the deformation of a cooling system is controllable after welding and the wall thickness uniformity of the finished product meets the technical requirement, and has the advantages of strong operability, simple and convenient use and suitability for popularization.

The product 1 is a plate made of stainless steel, specifically, the stainless steel is 316L stainless steel. The invention does not make specific requirements and special limitations on the structural characteristics of the product 1 such as size, shape, material and the like, the product 1 has the function of providing the welded product 1, steel materials can be made of other metal materials, and materials which can deform in the welding process can be used, so that the invention can understand that other products 1 which can realize the functions can be used in the invention, and technicians in the field can carry out adaptive adjustment on the size, the shape and the materials of the product 1 according to use scenes and test conditions.

The fixing mode is local welding. The fixing mode is not specifically required and limited, and the local welding is selected in the fixing mode because the positioning point 2 is only arranged in the middle of the product 1, so that the product 1 can be more conveniently welded, therefore, the invention can understand that other fixing modes capable of realizing the functions can be used in the invention, and a person skilled in the art can adaptively adjust the fixing mode according to a use scene and a test condition.

The welding mode is argon arc welding. The welding mode is not specifically required and limited, but only one welding mode is provided in the invention, and other welding modes can be performed in a mode that the welding surface faces outwards, and the other surface is attached, fixed and then welded, so that the invention can understand that other welding modes capable of realizing the functions can be used in the invention, and a person skilled in the art can adaptively adjust the welding mode according to the use scene and the test condition.

The internal stress is removed by vibration or heat treatment. The method for removing the internal stress is not particularly required and limited, and the method for removing the internal stress has the advantages that the deformation degree of the product 1 after welding is reduced, the product 1 has better flatness and is more attractive, so that other methods for removing the internal stress capable of realizing the functions can be used in the method, and a person skilled in the art can adaptively adjust the method for removing the internal stress according to a use scene and a test condition.

The vibration acceleration is 5-15G, the temperature in the heat treatment process is 450-550 ℃, the heat preservation time in the heat treatment process is 2.5-3.5 h, and the reserved cutting amount of the plate in the process of removing the machining allowance is 1-2 mm.

The cooling mode in the heat treatment process is natural cooling, and further, the mode of removing the machining allowance is mechanical machining. The reason why the cooling mode is naturally cooled is that if water cooling or other rapid cooling modes are used, the stress of the product 1 cannot be reduced, and the natural cooling can lead the product 1 to have buffering time and slowly consume the internal stress, so that other cooling modes capable of realizing the functions can be used in the invention, and a person skilled in the art can adaptively adjust the cooling mode according to a use scene and a test condition.

In another embodiment, the present invention provides a use of the soldering process according to one embodiment in the field of semiconductor IC manufacturing equipment.

Application example 1

According to an embodiment, a welding processing method of a vacuum cooling system is provided, as shown in fig. 2, specifically including:

reserving cutting quantities of 8 positioning points 2 and 2mm products 1 in the middle of the products 1, enabling welding surfaces of the two products 1 to face outwards, enabling non-welding surfaces to be mutually attached, welding and fixing the positioning points 2, welding the welding surfaces, carrying out heat treatment on the products 1 after the welding is finished, wherein the temperature of the heat treatment is 500 ℃, the heat preservation time of the heat treatment process is 3h, removing internal stress and removing the fixation after the products 1 are naturally cooled along with the furnace temperature, detecting the planeness of the products 1, and removing machining allowance.

The applicant declares that the above description is only a specific embodiment of the present invention, but the scope of the present invention is not limited thereto, and it should be understood by those skilled in the art that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are within the scope and disclosure of the present invention.