阅读说明：本技术 一种激光功率调节装置 (Laser power adjusting device ) 是由 李军 沈华明 蔡健杰 陈冬冬 于 2020-12-13 设计创作，主要内容包括：本发明公开了一种激光功率调节装置,其技术方案的要点是包括有与激光器相连的声光调制器,在声光调制器的输出端设有用于分光的第二分束镜,第二分束镜电性连接有用于测量从第二分束镜反射过来的激光能量的第二光电二级管,第二光电管二极管电性连接有用于采集第二光电二极管数值并反馈给声光调制器的第二数据采集和处理系统。本发明用声光调制器作为激光器的快速调节开关,在包括零至额定功率范围以内可以非常快速的调节激光功率,使得激光在加工柔性电路板上的盲孔时,激光器可以一直保持开启状态,一直开启状态下的激光器,其内部的温度、湿度等都相对稳定,输出的激光功率也就很稳定,避免了激光器开关瞬间功率波动较大的问题。(The invention discloses a laser power adjusting device which is characterized by comprising an acousto-optic modulator connected with a laser, wherein the output end of the acousto-optic modulator is provided with a second beam splitter for splitting light, the second beam splitter is electrically connected with a second photodiode for measuring laser energy reflected by the second beam splitter, and the second photodiode is electrically connected with a second data acquisition and processing system for acquiring the value of the second photodiode and feeding back the value to the acousto-optic modulator. The invention uses the acousto-optic modulator as the fast adjusting switch of the laser, and can very fast adjust the laser power within the range from zero to rated power, so that when the laser is used for processing the blind hole on the flexible circuit board, the laser can be always kept in the open state, the temperature, humidity and the like in the laser in the always open state are relatively stable, the output laser power is very stable, and the problem of large power fluctuation of the laser switch at the moment is avoided.)

1. A laser power adjustment device, characterized in that: the device comprises an acousto-optic modulator (8) connected with a laser (7), wherein a second beam splitter (9) used for splitting light is arranged at the output end of the acousto-optic modulator (8), the second beam splitter (9) is electrically connected with a second photodiode (10) used for measuring laser energy reflected from the second beam splitter (9), and the second photodiode (10) is electrically connected with a second data acquisition and processing system (11) used for acquiring the value of the second photodiode (10) and feeding back the value to the acousto-optic modulator (2).

2. The laser power adjustment apparatus according to claim 1, characterized in that: the frequency of the acousto-optic modulator (8) is more than 100M.

3. The laser power adjustment apparatus according to claim 1, characterized in that: the laser emitted by the laser (7) is linearly polarized.

[ technical field ] A method for producing a semiconductor device

The invention relates to a laser power adjusting device.

[ background of the invention ]

When the laser is used for drilling the blind holes on the multilayer circuit board, the power of the laser is required to be stable, and the blind holes cannot fluctuate greatly, otherwise, the drilled holes may not meet the requirements, so that a set of laser power adjusting device is added on the laser equipment to monitor and adjust the output power of the laser.

The optical path block diagram of the conventional laser power adjusting device is shown in fig. 1, and the conventional laser power adjusting device comprises a hollow rotating motor 1, a wave plate 2 coaxial with the hollow rotating motor 1 is arranged on the hollow rotating motor 1, a polarization device 3 such as a beam splitter and a first beam splitter 4 are further sequentially arranged in the optical path direction, and after laser irradiates the polarization device 3, part of the laser can be transmitted out of the polarization device 3, and part of the laser can be shielded. The laser angle that shoots onto polarisation device 3 is different, and the laser energy who transmits away from polarisation device 3 is just different, drives wave plate 2 through hollow rotating electrical machines 1 and rotates, changes the angle of wave plate 2, just can change the laser angle of launching on polarisation device 3, and then changes the laser energy who transmits away from polarisation device 3.

After the laser light emitted from the polarizer 3 is incident on the first beam splitter 4, generally 99% of the laser light can be transmitted from the first beam splitter 4 for processing, another 1% of the laser light can be reflected, wherein the reflectance is a design value, and a first photodiode 5 for measuring the reflected laser energy and a first data acquisition and processing system 6 are provided on the reflected light path, the first data acquisition and processing system 6 functions to acquire data measured by the first photodiode 5, if the first data acquisition and processing system 6 finds that the acquired reflected laser pulse energy fluctuates significantly, then the signal is fed back to the hollow rotating motor 1, the hollow rotating motor 1 drives the wave plate 2 to rotate to a proper angle, the laser energy output from the first beam splitter 4 is adjusted by adjusting the laser energy output from the polarization device 3, so as to achieve the effect of stabilizing the laser output power.

After the device is used for a long time, the laser device is aged, the output laser power fluctuates greatly, and the first data acquisition and processing system 6 feeds back the fluctuation to the hollow rotating motor 1 for adjustment to achieve the effect of stabilizing the output power.

The adjusting mode can solve the problem of power fluctuation after the laser is used for a long time. However, when the laser is used for processing the blind holes of the flexible circuit board, due to the fact that the distance exists between the blind holes, the laser is switched on and off when needed, the internal environment of the laser is unstable when the laser is switched on and off, the output laser power can fluctuate instantaneously, the adjusting mode cannot respond quickly, and the problem of instantaneous fluctuation of the laser cannot be solved.

[ summary of the invention ]

The invention aims to overcome the defect that the prior art cannot solve the instantaneous fluctuation of laser power, and provides a laser power regulating device.

The invention is realized by the following technical scheme:

a laser power adjustment device, characterized in that: the device comprises an acousto-optic modulator 8 connected with a laser 7, wherein a second beam splitter 9 used for splitting light is arranged at the output end of the acousto-optic modulator 8, the second beam splitter 9 is electrically connected with a second photodiode 10 used for measuring laser energy reflected from the second beam splitter 9, and the second photodiode 10 is electrically connected with a second data acquisition and processing system 11 used for acquiring the numerical value of the second photodiode 10 and feeding the numerical value back to the acousto-optic modulator 2.

The laser power adjusting apparatus as described above, characterized in that: the frequency of the acousto-optic modulator 8 is 100M or more.

The laser power adjusting apparatus as described above, characterized in that: the laser light emitted by the laser 7 is linearly polarized light.

Compared with the prior art, the invention has the following advantages:

1. the invention uses the acousto-optic modulator as the fast adjusting switch of the laser, and can very fast adjust the laser power within the range from zero to rated power, so that when the laser is used for processing the blind hole on the flexible circuit board, the laser can be always kept in the open state, the temperature, humidity and the like in the laser in the always open state are relatively stable, the output laser power is very stable, and the problem of large power fluctuation of the laser switch at the moment is avoided.

[ description of the drawings ]

FIG. 1 is a block diagram of the optical path of a prior art laser power adjustment apparatus;

fig. 2 is a block diagram of the optical path of the laser power adjustment apparatus of the present invention.

In the figure: 1 is a hollow rotating motor; 2 is a wave plate; 3 is a polarizing device; 4 is a first beam splitter; 5 is a first photodiode; 6 is a first data acquisition and processing system; 7 is a laser; 8 is an acousto-optic modulator; 9 is a second beam splitter; 10 is a second photodiode diode; and 11 is a second data acquisition and processing system.

[ detailed description ] embodiments

The technical features of the present invention will be described in further detail with reference to the accompanying drawings so that those skilled in the art can understand the technical features.

A laser power adjusting device is shown in fig. 2, and comprises an acousto-optic modulator 8 connected with a laser 7, wherein the output end of the acousto-optic modulator 8 is provided with a second beam splitter 9 for splitting light, the second beam splitter 9 is electrically connected with a second photodiode 10 for measuring laser energy reflected from the second beam splitter 9, and the second photodiode 10 is electrically connected with a second data acquisition and processing system 11 for acquiring the value of the second photodiode 10 and feeding back the value to the acousto-optic modulator 2.

The light emitted by the laser 7 is linearly polarized light, the laser of the main optical path passes through the second beam splitter 9, generally, the laser of the second beam splitter 9 can be transmitted out from the second beam splitter 9 for processing, 1% of the laser can be emitted, the reflectance thereof is a design value, therefore, a second photocell diode 10 and a second data acquisition and processing system 11 for measuring the energy of the reflected laser are arranged on the reflected optical path, the second data acquisition and processing system 11 is used for acquiring the data measured by the second photocell diode 10, and if the second data acquisition and processing system 11 finds that the pulse energy fluctuation of the acquired reflected laser is large, the laser power can be fed back to the acousto-optic modulator 8 to adjust the laser power.

The acoustic-optical modulator 8 is called AOM for short in English, the acoustic-optical modulator 8 is used for replacing a hollow rotating motor, a wave plate and a polarizing device in the prior art, the laser power can be adjusted within the range from zero to rated power, and the adjusting speed is very high because the frequency of the acoustic-optical modulator 8 is more than 100M, so that the output laser power can be quickly adjusted to a designed value when blind holes on a multilayer flexible circuit board are processed; when the blind hole is added and moved to another blind hole, the power of the laser can be adjusted to zero through the acousto-optic modulator 8, which is equivalent to turning off the laser. This eliminates the need to switch the laser 7 on and off, and the laser 7 can be kept on all the time. The problem of large instantaneous fluctuation of the output power when the laser 7 is switched on and switched off is avoided.

The embodiment of the present invention is described only for the preferred embodiment of the present invention, and not for the purpose of limiting the spirit and scope of the invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the design concept of the present invention shall fall within the protection scope of the present invention.