阅读说明：本技术 利用飞秒激光在碳基聚合物表面加工微电路的系统和方法 (System and method for processing microcircuit on surface of carbon-based polymer by femtosecond laser ) 是由 姜澜 闫剑锋 郭恒 黄辰潇 于 2020-12-22 设计创作，主要内容包括：发明提出了一种利用飞秒激光在碳基聚合物表面加工微电路的系统和方法,属于飞秒激光应用技术领域。本发明结合运用了飞秒激光器的不同出光模式进行加工,先利用振荡级激光对碳基聚合物进行碳化,获得可以导电的碳化层,再利用放大级激光精准去除多余的碳化层,从而加工电路元件。利用本发明提出的系统和方法,可以快速、精准地在碳基聚合物表面加工出碳基微电路,使用柔性碳基聚合物时,可以成功制备柔性电路。本发明的系统具有调节方便、切换灵活、适应性强的优势,利用本发明提出的方法,可以克服振荡级激光碳化直写加工的缺陷,加工出的微电路之间毛刺被有效抑制,电路元件之间的距离缩小,降低微电路发生短路故障的风险,有利于电路的微型化和提高电路的集成度。本发明具有加工精度高、可加工材料多、可加工电路元件形状灵活等优点,为制备碳基柔性微电路提供了一种可行的方案。(The invention provides a system and a method for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser, belonging to the technical field of femtosecond laser application. The invention combines different light emitting modes of a femtosecond laser for processing, firstly uses an oscillating-level laser to carbonize a carbon-based polymer to obtain a conductive carbonized layer, and then uses an amplifying-level laser to accurately remove the redundant carbonized layer, thereby processing a circuit element. By utilizing the system and the method provided by the invention, the carbon-based microcircuit can be rapidly and accurately processed on the surface of the carbon-based polymer, and when the flexible carbon-based polymer is used, the flexible circuit can be successfully prepared. The system has the advantages of convenient adjustment, flexible switching and strong adaptability, and by utilizing the method provided by the invention, the defect of oscillation-level laser carbonization direct-writing processing can be overcome, burrs between the processed microcircuits are effectively inhibited, the distance between circuit elements is reduced, the risk of short-circuit fault of the microcircuits is reduced, the miniaturization of the microcircuits is facilitated, and the integration level of the microcircuits is improved. The invention has the advantages of high processing precision, more processable materials, flexible shapes of processable circuit elements and the like, and provides a feasible scheme for preparing the carbon-based flexible microcircuit.)

1. A system for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser is characterized by comprising a femtosecond laser, a first reflector, a first diaphragm, a first attenuation sheet, a first light barrier, a second reflector, a second diaphragm, a second attenuation sheet, a second light barrier, a first semi-transparent semi-reflective mirror, a third light barrier, an electric control shutter, a dichroic mirror, a processing objective, a polymer sample, a six-dimensional translation stage, a second semi-transparent semi-reflective mirror, a charge coupling element, a lighting lamp and a computer; the femtosecond laser is provided with two light outlets of an oscillation stage and an amplification stage and respectively outputs femtosecond lasers in two modes, wherein the femtosecond lasers output by the oscillation stage are sequentially reflected by a first reflector, the diameter of a light spot is adjusted through a first diaphragm, the laser power is adjusted through a first attenuation sheet, and the on-off of a light path is controlled by a first light barrier; the femtosecond laser output by the amplification stage is reflected by the second reflector in sequence, the diameter of a light spot is adjusted by the second diaphragm, the laser power is adjusted by the second attenuation sheet, and the second light blocking plate controls the on-off of a light path; the oscillation-level femtosecond laser and the amplification-level femtosecond laser are transmitted and reflected by the first half mirror respectively and then pass through the electric control shutter, and the third light blocking plate is used for absorbing light leakage; femtosecond laser passing through an electric control shutter is reflected by a dichroic mirror, enters a processing objective lens, is focused by the processing objective lens and reaches the surface of a polymer sample, and the polymer sample is placed on a six-dimensional translation stage and moves along with the translation stage; the second semi-transparent semi-reflecting mirror, the charge coupling element and the illuminating lamp form an imaging observation system to realize real-time observation of the processing process; the femtosecond laser, the electric control shutter and the six-dimensional translation stage charge coupling element illuminating lamp are connected with a computer through signal lines and controlled by the computer.

2. A method for processing microcircuits on the surface of a carbon-based polymer by using femtosecond laser is characterized by comprising the following steps:

(1) the system for processing the microcircuit on the surface of the carbon-based polymer by using the femtosecond laser according to claim 1 is constructed and comprises the femtosecond laser, a first reflector, a first diaphragm, a first attenuation sheet, a first light barrier, a second reflector, a second diaphragm, a second attenuation sheet, a second light barrier, a first half-mirror, a third light barrier, an electric control shutter, a dichroic mirror, a processing objective, a polymer sample, a six-dimensional translation stage, a second half-mirror, a charge coupling element, a lighting lamp and a computer; the femtosecond laser is provided with two light outlets of an oscillation stage and an amplification stage and respectively outputs femtosecond lasers in two modes, wherein the femtosecond lasers output by the oscillation stage are sequentially reflected by a first reflector, the diameter of a light spot is adjusted through a first diaphragm, the laser power is adjusted through a first attenuation sheet, and the on-off of a light path is controlled by a first light barrier; the femtosecond laser output by the amplification stage is reflected by the second reflector in sequence, the diameter of a light spot is adjusted by the second diaphragm, the laser power is adjusted by the second attenuation sheet, and the second light blocking plate controls the on-off of a light path; the oscillation-level femtosecond laser and the amplification-level femtosecond laser are transmitted and reflected by the first half mirror respectively and then pass through the electric control shutter, and the third light blocking plate is used for absorbing light leakage; femtosecond laser passing through an electric control shutter is reflected by a dichroic mirror, enters a processing objective lens, is focused by the processing objective lens and reaches the surface of a polymer sample, and the polymer sample is placed on a six-dimensional translation stage and moves along with the translation stage; the second semi-transparent semi-reflecting mirror, the charge coupling element and the illuminating lamp form an imaging observation system to realize real-time observation of the processing process; the femtosecond laser, the electric control shutter and the six-dimensional translation stage charge coupling element illuminating lamp are connected with the computer 20 through signal lines and controlled by the computer;

(2) debugging the femtosecond laser processing system: starting a femtosecond laser, blocking an oscillation level laser light path by using a light barrier, outputting an amplification level laser, adjusting the diameter of a light spot before laser focusing to be 5mm, and adjusting the power of the femtosecond laser to realize the processing effect on the surface of the carbon-based polymer sample; adjusting the height of the six-dimensional translation stage to minimize the line width generated by scanning the femtosecond laser on the surface of the carbon-based polymer sample under fixed power, and focusing the femtosecond laser on the surface of the carbon-based polymer sample through a processing objective lens;

(3) blocking the light path of the amplification-level laser by using a second light blocking plate, controlling an electric control shutter to output oscillation-level laser, focusing by a processing objective lens, adjusting the translation path of a six-dimensional translation stage according to the overall outline of the microcircuit to be processed, and controlling the laser power to enable the oscillation-level laser to generate a carbonization processing effect on the surface of a carbon-based polymer sample to form a carbonization area containing a microcircuit area;

(4) the method comprises the steps of blocking an oscillation-level laser light path by using a first light barrier, controlling an electric control shutter to output amplification-level laser, focusing by a processing objective lens, adjusting a translation path of a six-dimensional translation stage according to the shape of a microcircuit to be processed, controlling laser flux, enabling an amplification-level laser focus to sequentially scan a gap region between microcircuit elements or between electrodes, removing a carbonized layer between the microcircuit elements or on the gap region between the electrodes, and finishing processing of the microcircuit on the surface of the carbon-based polymer.

Technical Field

The invention belongs to the technical field of femtosecond laser application, and particularly relates to a system and a method for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser.

Background

The flexible circuit is a special circuit formed by mounting circuit elements on a flexible substrate, and has the advantages of flexibility, light weight, small thickness, wearability and the like, and carbon-based polymers are often used as the flexible circuit substrate. In the traditional processing mode of the flexible circuit, the etching method is not beneficial to environmental protection and sustainable development, and the circuit board processed by the spraying method is likely to have bonding failure. The laser is used for directly writing and processing the microcircuit on the surface of the flexible substrate, and the method is a novel method for preparing the flexible circuit.

The femtosecond laser has two output modes of an oscillation stage and an amplification stage. The peak power of the oscillation-level laser is low, but the repetition frequency is high, so that the material can be continuously heated to a higher temperature during processing. The repetition frequency of the amplification laser is low, the peak power is high, the heat affected zone is small, and the laser is suitable for removing materials by ablation.

When the oscillation level of a femtosecond laser is utilized to carry out direct-writing processing on the carbon-based polymer, the carbon-based polymer cannot be ablated because the peak power of the laser is lower than the ablation threshold of the carbon-based polymer, but the energy accumulation of the laser can increase the temperature of the carbon-based polymer, some carbon-based polymers can be carbonized, for example, benzene rings in a Polyimide (PI) molecular structure can be subjected to cracking reaction to generate a carbon structure when being heated, Polydimethylsiloxane (PDMS) can be subjected to heating to generate a graphite and silicon carbide composite structure, the structures can enable the areas irradiated by the laser to have conductivity, and by utilizing the method, micro-circuit elements such as direct-writing electrodes, capacitors and the like can be carbonized on the surface of the carbon-.

The research surface is influenced by material properties, the linewidth of the electrode subjected to carbonization processing is large, and the integral size of the device cannot be further reduced. Meanwhile, the precision of the carbonization processing is not high, and tiny burrs exist at the edge of the carbonization area. In microcircuits, the distance between the elements is very small, in particular the distance between the two electrodes of a supercapacitor, the dimensions of which are close to those of a burr. The components processed by the oscillating-level laser direct writing processing can be connected through burrs, so that the components are short-circuited and cannot work normally. In order to avoid the burr to conduct and lose the two elements or the electrodes, the distance between the elements or between the electrodes can be only increased, but the integration level of the microcircuit is influenced, the capacitance of the super capacitor is reduced, and the expected use requirement of the microcircuit is difficult to meet.

When the carbon-based polymer is processed by using the amplified femtosecond laser amplified by pulse chirp, the carbon-based polymer material and a carbonized layer on the surface of the carbon-based polymer material can be ablated and removed due to high instantaneous power of the laser, so that the separation of a target area and surrounding materials or the fine processing of the shape of a carbonized conductive area can be realized.

The super capacitor is a capacitor with strong charge storage capacity, and has the advantages of short charge-discharge time, long service life, good temperature characteristic, energy conservation, environmental protection and the like. The super capacitor is composed of two separated electrodes and an electrolyte between the electrodes, the capacitance of the super capacitor is influenced by factors such as electrode area, distance between the electrodes, electrolyte performance and the like, and the distance between the electrodes is shortened, so that the performance of the super capacitor is improved. Common shapes of the super capacitor include a flat plate shape, a circular shape, an interdigital shape and the like.

Disclosure of Invention

The invention aims to provide a system and a method for processing a microcircuit on the surface of a carbon-based polymer by using a femtosecond laser, wherein the processing is carried out by combining an oscillation-level laser and an amplification-level laser which use the femtosecond laser. The whole outline of the microcircuit is firstly processed by carbonizing the surface of the carbon-based polymer by using oscillation-level laser, and then the redundant carbonized layer is removed by using amplification-level laser ablation, so that the shape of the microcircuit is accurately processed, and the purpose of preparing the flexible carbon-based microcircuit is achieved.

The invention provides a system for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser, which comprises a femtosecond laser, a first reflector, a first diaphragm, a first attenuation sheet, a first light barrier, a second reflector, a second diaphragm, a second attenuation sheet, a second light barrier, a first semi-transparent semi-reflective mirror, a third light barrier, an electric control shutter, a dichroic mirror, a processing objective, a polymer sample, a six-dimensional translation stage, a second semi-transparent semi-reflective mirror, a charge coupling element, a lighting lamp and a computer, wherein the femtosecond laser is used for processing the microcircuit on the surface of the carbon-based polymer; the femtosecond laser is provided with two light outlets of an oscillation stage and an amplification stage and respectively outputs femtosecond lasers in two modes, wherein the femtosecond lasers output by the oscillation stage are sequentially reflected by a first reflector, the diameter of a light spot is adjusted through a first diaphragm, the laser power is adjusted through a first attenuation sheet, and the on-off of a light path is controlled by a first light barrier; the femtosecond laser output by the amplification stage is reflected by the second reflector in sequence, the diameter of a light spot is adjusted by the second diaphragm, the laser power is adjusted by the second attenuation sheet, and the second light blocking plate controls the on-off of a light path; the oscillation-level femtosecond laser and the amplification-level femtosecond laser are transmitted and reflected by the first half mirror respectively and then pass through the electric control shutter, and the third light blocking plate is used for absorbing light leakage; femtosecond laser passing through an electric control shutter is reflected by a dichroic mirror, enters a processing objective lens, is focused by the processing objective lens and reaches the surface of a polymer sample, and the polymer sample is placed on a six-dimensional translation stage and moves along with the translation stage; the second semi-transparent semi-reflecting mirror, the charge coupling element and the illuminating lamp form an imaging observation system to realize real-time observation of the processing process; the femtosecond laser, the electric control shutter and the six-dimensional translation stage charge coupling element illuminating lamp are connected with the computer 20 through signal lines and controlled by the computer.

The invention provides a method for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser, which comprises the following steps:

(1) the system for processing the microcircuit on the surface of the carbon-based polymer by using the femtosecond laser according to claim 1 is constructed and comprises the femtosecond laser, a first reflector, a first diaphragm, a first attenuation sheet, a first light barrier, a second reflector, a second diaphragm, a second attenuation sheet, a second light barrier, a first half-mirror, a third light barrier, an electric control shutter, a dichroic mirror, a processing objective, a polymer sample, a six-dimensional translation stage, a second half-mirror, a charge coupling element, a lighting lamp and a computer; the femtosecond laser is provided with two light outlets of an oscillation stage and an amplification stage and respectively outputs femtosecond lasers in two modes, wherein the femtosecond lasers output by the oscillation stage are sequentially reflected by a first reflector, the diameter of a light spot is adjusted through a first diaphragm, the laser power is adjusted through a first attenuation sheet, and the on-off of a light path is controlled by a first light barrier; the femtosecond laser output by the amplification stage is reflected by the second reflector in sequence, the diameter of a light spot is adjusted by the second diaphragm, the laser power is adjusted by the second attenuation sheet, and the second light blocking plate controls the on-off of a light path; the oscillation-level femtosecond laser and the amplification-level femtosecond laser are transmitted and reflected by the first half mirror respectively and then pass through the electric control shutter, and the third light blocking plate is used for absorbing light leakage; femtosecond laser passing through an electric control shutter is reflected by a dichroic mirror, enters a processing objective lens, is focused by the processing objective lens and reaches the surface of a polymer sample, and the polymer sample is placed on a six-dimensional translation stage and moves along with the translation stage; the second semi-transparent semi-reflecting mirror, the charge coupling element and the illuminating lamp form an imaging observation system to realize real-time observation of the processing process; the femtosecond laser, the electric control shutter and the six-dimensional translation stage charge coupling element illuminating lamp are connected with a computer through signal lines and controlled by the computer;

(2) debugging the femtosecond laser processing system: starting a femtosecond laser, blocking an oscillation level laser light path by using a first light barrier, outputting amplification level laser, adjusting the diameter of a light spot before laser focusing to be 5mm, and adjusting the power of the femtosecond laser to realize the processing effect on the surface of the carbon-based polymer sample; adjusting the height of the six-dimensional translation stage to minimize the line width generated by scanning the femtosecond laser on the surface of the carbon-based polymer sample under fixed power, and focusing the femtosecond laser on the surface of the carbon-based polymer sample through a processing objective lens;

(3) blocking the light path of the amplification-level laser by using a second light blocking plate, controlling an electric control shutter to output oscillation-level laser, focusing by a processing objective lens, adjusting the translation path of a six-dimensional translation stage according to the overall outline of the microcircuit to be processed, and controlling the laser power to enable the oscillation-level laser to generate a carbonization processing effect on the surface of a carbon-based polymer sample to form a carbonization area containing a microcircuit area;

(4) the method comprises the steps of blocking an oscillation-level laser light path by using a first light barrier, controlling an electric control shutter to output amplification-level laser, focusing by a processing objective lens, adjusting a translation path of a six-dimensional translation table according to the shape of a microcircuit to be processed, controlling laser flux, enabling an amplification-level laser focus to sequentially scan a gap region between microcircuit elements or between electrodes, removing a carbonized layer in the gap region between the microcircuit elements or between the electrodes, and finishing processing of the microcircuit on the surface of the carbon-based polymer.

The system and the method for processing the microcircuit on the surface of the carbon-based polymer by using the femtosecond laser have the advantages that:

1. the system for processing the microcircuit on the surface of the carbon-based polymer by using the femtosecond laser can be used for processing by combining different light emitting modes of the femtosecond laser, carbonizing the polymer by using the oscillation-level laser to obtain a conductive carbonized layer, accurately removing the redundant carbonized layer by using the amplification-level laser, controlling and adjusting the oscillation-level laser and the amplification-level laser respectively, and being not mutually influenced and convenient for processing mode switching.

2. The method for processing the microcircuit on the surface of the carbon-based polymer by using the femtosecond laser can simply, quickly and accurately process the carbon-based microcircuit on the surface of the carbon-based polymer. When using flexible carbon-based polymers, flexible circuits can be successfully prepared.

3. The method for processing the microcircuit on the surface of the carbon-based polymer by using the femtosecond laser overcomes the defect of low precision of the microcircuit processed by the oscillation-level laser carbonization, the burrs at the edge of the processed microcircuit are inhibited, the processed electrode gap is reduced, the distance between circuit elements is reduced, the risk of conducting faults of the microcircuit is reduced, and the method is favorable for the miniaturization of the microcircuit and the improvement of the integration level of the microcircuit.

Drawings

FIG. 1 is a diagram of the optical path of a system for processing microcircuits on the surface of a carbon-based polymer by using a femtosecond laser according to the present invention.

FIG. 2 is a schematic view of a processing procedure and a processing result of example 1 of the present invention.

Fig. 3 is a schematic view of a processing procedure and a processing result of example 2 of the present invention.

FIG. 4 is a schematic view of a processing procedure and a processing result of example 3 of the present invention.

In fig. 1, 1 is a femtosecond laser, 2 is a first mirror, 3 is a first diaphragm, 4 is a first attenuation plate, 5 is a first light barrier, 6 is a second mirror, 7 is a second diaphragm, 8 is a second attenuation plate, 9 is a second light barrier, 10 is a first half mirror, 11 is a third light barrier, 12 is an electrically controlled shutter, 13 is a dichroic mirror, 14 is a processing objective, 15 is a polymer sample, 16 is a six-dimensional translation stage, 17 is a second half mirror, 18 is a charge-coupled device, 19 is an illumination lamp, and 20 is a computer.

Detailed Description

The invention provides a system for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser, the structural schematic diagram of which is shown in figure 1, the processing system comprises a femtosecond laser 1, a first reflector 2, a first diaphragm 3, a first attenuation sheet 4, a first light barrier 5, a second reflector 6, a second diaphragm 7, a second attenuation sheet 8, a second light barrier 9, a first half-mirror 10, a third light barrier 11, an electric control shutter 12, a dichroic mirror 13, a processing objective 14, a polymer sample 15, a six-dimensional translation stage 16, a second half-mirror 17, a charge coupling element 18, a lighting lamp 19 and a computer 20; the femtosecond laser 1 is provided with two light outlets of an oscillation stage and an amplification stage and respectively outputs femtosecond lasers in two modes, wherein the femtosecond lasers output by the oscillation stage are reflected by a first reflector 2 in sequence, the diameter of a light spot is adjusted through a first diaphragm 3, the laser power is adjusted through a first attenuation sheet 4, and the on-off of a light path is controlled through a first light barrier 5; the femtosecond laser output by the amplification stage is reflected by the second reflector 6 in sequence, the diameter of a light spot is adjusted by the second diaphragm 7, the laser power is adjusted by the second attenuation sheet 8, and the second light blocking plate 9 controls the on-off of a light path; the oscillation-level femtosecond laser and the amplification-level femtosecond laser are transmitted and reflected by the first half mirror 10 respectively, and then pass through the electric control shutter 12, and the third light blocking plate 11 is used for absorbing light leakage; the femtosecond laser passing through the electric control shutter 12 is reflected by the dichroic mirror 13, enters the processing objective lens 14, is focused by the processing objective lens and reaches the surface of the polymer sample 15, and the polymer sample is placed on the six-dimensional translation stage 16 and moves along with the translation stage; the second half-transmitting half-reflecting mirror 17, the charge coupling element 18 and the illuminating lamp 19 form an imaging observation system to realize the real-time observation of the processing process; the femtosecond laser 1, the electrically controlled shutter 12, the six-dimensional translation stage 16, the charge-coupled device 18 and the illuminating lamp 19 are connected with a computer 20 through signal lines and controlled by the computer.

The invention provides a method for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser, which comprises the following steps:

(1) building a system for processing a microcircuit on the surface of a carbon-based polymer by using femtosecond laser as shown in figure 1;

(2) debugging the femtosecond laser processing system: starting the femtosecond laser 1, blocking an oscillation level laser light path by using a first light barrier 5, outputting an amplification level laser, adjusting the diameter of a light spot before laser focusing to be 5mm, and adjusting the power of the femtosecond laser to realize the processing effect on the surface of the carbon-based polymer sample; adjusting the height of the six-dimensional translation stage 16 to minimize the line width generated by scanning the femtosecond laser on the surface of the carbon-based polymer sample under fixed power, wherein the femtosecond laser is focused on the surface of the carbon-based polymer sample 15 through the processing objective lens 14;

(3) blocking the light path of the amplification-level laser by using a second light blocking plate 9, controlling an electric control shutter 12 to output oscillation-level laser, focusing the oscillation-level laser through a processing objective lens 14, adjusting the translation path of a six-dimensional translation stage 16 according to the overall outline of the microcircuit to be processed, and controlling the laser power to enable the oscillation-level laser to generate a carbonization processing effect on the surface of a carbon-based polymer sample so as to form a carbonization area containing a microcircuit area;

(4) the first light barrier 5 is used for blocking the light path of the oscillation-level laser, the electronic control shutter 12 is controlled to output amplification-level laser, the amplification-level laser is focused through the processing objective 14, the translation path of the six-dimensional translation stage 16 is adjusted according to the shape of the microcircuit to be processed, the laser flux is controlled, the focal point of the amplification-level laser sequentially scans the gap area between microcircuit elements or between electrodes, a carbonized layer between the microcircuit elements or on the gap area between the electrodes is removed, and the processing of the microcircuit on the surface of the carbon-based polymer is completed.

In the embodiment of the present invention, the femtosecond laser used is an Astrella type femtosecond laser manufactured by cohenent corporation, and the main parameters thereof are as follows: the center wavelength is 800nm, the repetition frequency of an amplification stage is 1000Hz, the repetition frequency of an oscillation stage is 80MHz, and the pulse width is 35 fs. The CCD 18 used is manufactured by MEIRIN, under the product model DMK23ux 236.

The invention is further described with reference to the accompanying drawings and examples.

Example 1

Processing a circular super capacitor electrode on the surface of a carbon-based polymer, firstly opening a femtosecond laser 1 to generate femtosecond laser, adjusting the diameter of an oscillation-level laser spot to be 5mm by a first diaphragm 3, adjusting the power of the oscillation-level laser to be 20mW by a first attenuation sheet 4, adjusting the diameter of an amplification-level laser spot to be 5mm by a second diaphragm 7, and adjusting the flux of the amplification-level laser to be 1.2J/cm by a second attenuation sheet 8²The height of translation stage 16 is adjusted to focus the femtosecond laser on the surface of carbon-based polymer sample 15, and the imaging system is adjusted to image it clearly. Setting the translation speed of the translation stage 16 to be 1000 mu m/s, blocking the light path of the amplification laser by using a second light blocking plate 9, controlling the electric control shutter 12 to output oscillation laser, designing the translation path of the electric control shutter according to the overall outline of the circular electrode, enabling the laser focus to sequentially sweep the outline area of the electrode, and carbonizing the surface of the carbon-based polymer sample to form a circular carbonization area containing the circular electrode; setting the translation speed of the translation stage 16 to be 100 mu m/s, blocking the optical path of the oscillation level laser by using the first light barrier 5, controlling the electrically controlled shutter 12 to output the amplification level laser, controlling the translation stage 16 to translate, enabling the laser focus to scan along the path of the electrode gap in the carbonized region, ablating the scanned position and removing the carbonized layer, thereby machining the gap between the electrodes and removing the redundant outline part, and separating the two electrodes. The schematic view of the processing flow and the optical mirror image of the processing result of this example are shown in fig. 2.

As can be seen from the example 1 and fig. 2, the entire profile of the microelectrode is processed by carbonizing the surface of the carbon-based polymer with the oscillation-level laser, and then the redundant carbonized layer is removed with the amplification-level laser, so that the gap between the two electrodes is processed, the microelectrode of the super capacitor can be rapidly and accurately processed, and the two electrodes are not connected by burrs. The method provided by the invention can successfully prepare the flexible circuit on the surface of flexible carbon-based polymers, such as polyimide, polydimethylsiloxane and other materials.

Example 2

Processing an interdigital supercapacitor electrode on the surface of a carbon-based polymer, firstly opening a femtosecond laser 1 to generate femtosecond laser, adjusting the diameter of an oscillation-level laser spot to be 5mm by a first diaphragm 3, adjusting the power of the oscillation-level laser to be 20mW by a first attenuation sheet 4, adjusting the diameter of an amplification-level laser spot to be 5mm by a second diaphragm 7, and adjusting the flux of the amplification-level laser to be 1.2J/cm by a second attenuation sheet 8²The height of translation stage 16 is adjusted to focus the femtosecond laser on the surface of carbon-based polymer sample 15, and the imaging system is adjusted to image it clearly. Setting the translation speed of a translation stage 16 to be 1000 mu m/s, blocking the light path of the amplification laser by using a second light blocking plate 9, controlling an electric control shutter 12 to output oscillation laser, designing a translation path according to the whole outline of the interdigital electrode, enabling the laser focus to sequentially sweep the outline area of the electrode, and carbonizing the surface of a carbon-based polymer sample to form a square carbonization area containing the interdigital electrode; setting the translation speed of the translation stage 16 to be 100 mu m/s, blocking the optical path of the oscillation level laser by using the first light barrier 5, controlling the electrically controlled shutter 12 to output the amplification level laser, controlling the translation stage 16 to translate, enabling the laser focus to scan along the path of the electrode gap in the carbonized region, ablating the scanned position and removing the carbonized layer, thereby machining the gap between the electrodes and removing the redundant outline part, and separating the two electrodes. The schematic view of the processing flow and the optical mirror image of the processing result of this example are shown in fig. 3.

As can be seen from example 2 and fig. 3, according to the processing method provided by the present invention, two light-emitting modes of the femtosecond laser processing system are combined to process microelectrodes with more complicated shapes and structures and various types on the surface of the carbon-based polymer.

Example 3

Processing a micro parallel resistor on the surface of a carbon-based polymer, firstly opening a femtosecond laser 1 to generate femtosecond laser, adjusting the diameter of an oscillation level laser spot to be 5mm through a first diaphragm 3, adjusting the power of the oscillation level laser to be 20mW through a first attenuation sheet 4, adjusting the diameter of an amplification level laser spot to be 5mm through a second diaphragm 7, and adjusting the flux of the amplification level laser to be 1.2J/cm through a second attenuation sheet 8²The height of translation stage 16 is adjusted to focus the femtosecond laser on the surface of carbon-based polymer sample 15, and the imaging system is adjusted to image it clearly. Setting the translation speed of the translation stage 16 to be 1000 mu m/s, blocking the light path of the amplification laser by using a second light blocking plate 9, controlling the electric control shutter 12 to output oscillation laser, and designing the translation path according to the overall outline of the parallel resistor, so that the laser focus sequentially scans the resistor outline area, and carbonizing the surface of the carbon-based polymer sample to form a square carbonization area containing the parallel resistor; setting the translation speed of the translation stage 16 to be 100 mu m/s, blocking the optical path of the oscillation level laser by using the first light barrier 5, controlling the electrically controlled shutter 12 to output the amplification level laser, controlling the translation stage 16 to translate, enabling the laser focus to scan along the paths of the resistor profile and the gap in the carbonized area, ablating the scanned position and removing the carbonized layer, thereby machining the gap between the resistors and removing the redundant profile part to separate the resistors. The schematic view of the processing flow and the optical mirror image of the processing result of this example are shown in fig. 4.

As can be seen from the embodiment 3 and fig. 4, the method provided by the present invention for processing a microcircuit on a carbon-based polymer surface can reduce the distance between microcircuit elements, and simultaneously, it is ensured that the elements are not short-circuited due to the burr connection, which is beneficial to improving the integration level of the microcircuit.

The above embodiments are preferred embodiments of the present invention, but the present invention is not limited to the above embodiments, and any other changes, modifications, substitutions, combinations, and simplifications which do not depart from the spirit and principle of the present invention should be construed as equivalents thereof, and all such changes, modifications, substitutions, combinations, and simplifications are intended to be included in the scope of the present invention.