阅读说明：本技术 一种压电器件及其制作方法、电子装置及控制方法 (Piezoelectric device and manufacturing method thereof, electronic device and control method ) 是由 陈右儒 侯帅 于 2020-05-15 设计创作，主要内容包括：本发明提供了一种压电器件及其制作方法、电子装置及控制方法,涉及压电器件技术领域,该压电器件具有弯折性,能够弯曲。一种压电器件包括：柔性衬底、以及设置在所述柔性衬底上呈阵列排布的多个压电单元；各所述压电单元包括：依次层叠设置在所述柔性衬底上的第一电极、压电部和第二电极；所述压电部的材料为刚性材料。本发明适用于压电器件的制作。(The invention provides a piezoelectric device, a manufacturing method thereof, an electronic device and a control method, and relates to the technical field of piezoelectric devices. A piezoelectric device comprising: the piezoelectric actuator comprises a flexible substrate and a plurality of piezoelectric units arranged on the flexible substrate in an array manner; each of the piezoelectric units includes: a first electrode, a piezoelectric portion, and a second electrode which are sequentially stacked over the flexible substrate; the piezoelectric part is made of rigid material. The invention is suitable for manufacturing the piezoelectric device.)

1. A piezoelectric device, comprising: the piezoelectric actuator comprises a flexible substrate and a plurality of piezoelectric units arranged on the flexible substrate in an array manner;

each of the piezoelectric units includes: a first electrode, a piezoelectric portion, and a second electrode which are sequentially stacked over the flexible substrate; the piezoelectric part is made of rigid material.

2. A piezoelectric device according to claim 1,

the first electrode comprises a planar electrode;

the second electrode includes: a first comb electrode and a second comb electrode; the first comb electrode includes: a plurality of first broach electrodes that parallel arranged and connect a plurality ofly first comb handle electrode of first broach electrode, the second comb electrode includes: the comb comprises a plurality of second comb-tooth electrodes arranged in parallel and a second comb handle electrode connected with the plurality of second comb-tooth electrodes, wherein the plurality of first comb-tooth electrodes and the plurality of second comb-tooth electrodes are arranged in a mutually crossed mode.

3. A piezoelectric device according to claim 1 or 2, wherein the material of the piezoelectric portion is a piezoelectric ceramic.

4. An electronic device, comprising: a plurality of switching cells and the piezoelectric device of any one of claims 1-3;

the plurality of switch units are electrically connected in one-to-one correspondence with a plurality of piezoelectric units of the piezoelectric device, and configured to control voltages of the piezoelectric units.

5. The electronic device of claim 4, further comprising: the signal line array comprises a plurality of first signal lines arranged in parallel along a first direction, and a plurality of second signal lines and a plurality of third signal lines arranged in parallel along a second direction respectively, wherein the first direction is vertical to the second direction;

the plurality of second signal lines and the plurality of third signal lines are respectively in one-to-one correspondence with the plurality of rows of piezoelectric units arranged along the second direction; the plurality of first signal lines correspond to the piezoelectric units arranged in the first direction in a one-to-one manner;

each of the switch units includes a thin film transistor; the thin film transistor includes: a source, a drain and a gate;

the piezoelectric unit includes: a first electrode, a piezoelectric portion, and a second electrode which are sequentially stacked over the flexible substrate; the first electrode comprises a planar electrode; the second electrode includes: a first comb electrode and a second comb electrode;

the drain electrode of each thin film transistor is electrically connected with the first comb-shaped electrode of the corresponding second electrode, the gate electrode of each thin film transistor is electrically connected with the corresponding first signal line, and the source electrode of each thin film transistor is electrically connected with the corresponding second signal line;

the second comb-shaped electrode of each second electrode is electrically connected to the corresponding third signal line.

6. The electronic device according to claim 5, wherein one of the first signal lines is provided on a same side of each of the rows of the piezoelectric units arranged in the first direction;

and two sides of each row of the piezoelectric units arranged along the second direction are respectively provided with one second signal line and one third signal line.

7. The electronic device of claim 5, wherein each of the first electrodes is grounded.

8. A method of fabricating a piezoelectric device according to any one of claims 1 to 3, the method comprising:

manufacturing a first substrate; the first substrate comprises a flexible substrate and a plurality of first electrodes arranged on the flexible substrate;

manufacturing a second substrate; the second substrate includes a rigid substrate, and a plurality of piezoelectric portions and a plurality of second electrodes which are sequentially stacked on the rigid substrate; the piezoelectric part is made of rigid material;

peeling the plurality of piezoelectric portions and the plurality of second electrodes of the second substrate;

and binding the plurality of peeled piezoelectric parts and the plurality of second electrodes to the first substrate to obtain a plurality of piezoelectric units arranged in an array.

9. The method of manufacturing according to claim 8, wherein the manufacturing of the second substrate includes:

forming a plurality of the piezoelectric portions on the rigid substrate;

a plurality of the second electrodes are formed on a plurality of the piezoelectric portions.

10. The method according to claim 9, wherein a material of the piezoelectric portion is a piezoelectric ceramic;

the forming a plurality of the piezoelectric portions on the rigid substrate includes:

forming a piezoelectric ceramic film on the rigid substrate by adopting a sol-gel process;

patterning the piezoelectric ceramic film to form a plurality of piezoelectric parts arranged in an array.

11. The method according to claim 9, wherein the forming of the plurality of second electrodes on the plurality of piezoelectric portions comprises:

forming a metal electrode film covering the plurality of piezoelectric portions;

patterning the metal electrode film to form a plurality of second electrodes arranged in an array.

12. A method of controlling an electronic device according to claim 7, the method comprising:

inputting a first signal to each first signal line to enable the thin film transistor corresponding to each first signal line to be in a conducting state;

inputting a second signal to each second signal line, so that the thin film transistor corresponding to each second signal line inputs the second signal to the first comb-shaped electrode of the electrically connected second electrode;

inputting a third signal to each third signal line so that a third signal is input to a second comb-shaped electrode of the second electrode to which each third signal line is electrically connected;

wherein the second signal and the third signal are different in magnitude.

Technical Field

The present invention relates to the field of piezoelectric devices, and in particular, to a piezoelectric device, a method for manufacturing the same, an electronic apparatus, and a control method.

Background

The piezoelectric device is a device manufactured by using the piezoelectric effect of a material, and has a very wide application range. At present, piezoelectric materials in piezoelectric devices are mostly made of piezoelectric ceramics. The piezoelectric ceramic has excellent piezoelectric performance, but has no flexibility, and cannot form a flexible piezoelectric device.

Disclosure of Invention

Embodiments of the present invention provide a piezoelectric device that has bendability and is bendable, a method of manufacturing the same, an electronic apparatus, and a control method.

In order to achieve the above purpose, the embodiment of the invention adopts the following technical scheme:

in one aspect, there is provided a piezoelectric device including: the piezoelectric actuator comprises a flexible substrate and a plurality of piezoelectric units arranged on the flexible substrate in an array manner;

each of the piezoelectric units includes: a first electrode, a piezoelectric portion, and a second electrode which are sequentially stacked over the flexible substrate; the piezoelectric part is made of rigid material.

Optionally, the first electrode comprises a planar electrode;

the second electrode includes: a first comb electrode and a second comb electrode; the first comb electrode includes: a plurality of first broach electrodes that parallel arranged and connect a plurality ofly first comb handle electrode of first broach electrode, the second comb electrode includes: the comb comprises a plurality of second comb-tooth electrodes arranged in parallel and a second comb handle electrode connected with the plurality of second comb-tooth electrodes, wherein the plurality of first comb-tooth electrodes and the plurality of second comb-tooth electrodes are arranged in a mutually crossed mode.

Optionally, the piezoelectric portion is made of piezoelectric ceramic.

An embodiment of the present invention provides a piezoelectric device including: the piezoelectric actuator comprises a flexible substrate and a plurality of piezoelectric units arranged on the flexible substrate in an array manner; each of the piezoelectric units includes: a first electrode, a piezoelectric portion, and a second electrode which are sequentially stacked over the flexible substrate; the piezoelectric part is made of rigid material. The piezoelectric device comprises a plurality of piezoelectric units which are arranged on a flexible substrate in an array manner; therefore, when the piezoelectric device is bent, the stress can be well dispersed by the piezoelectric units arranged in the array, so that the risk of breakage of the piezoelectric units during bending is greatly reduced; meanwhile, the flexible substrate is also beneficial to bending, and the tensile force and the stress generated by bending can be further reduced, so that the piezoelectric device has bending property and can be bent.

In another aspect, an electronic device is provided, including: a plurality of switching units and the piezoelectric device described above;

the plurality of switch units are electrically connected in one-to-one correspondence with a plurality of piezoelectric units of the piezoelectric device, and configured to control voltages of the piezoelectric units.

Optionally, the electronic device further includes: the signal line array comprises a plurality of first signal lines arranged in parallel along a first direction, and a plurality of second signal lines and a plurality of third signal lines arranged in parallel along a second direction respectively, wherein the first direction is vertical to the second direction;

the plurality of second signal lines and the plurality of third signal lines are respectively in one-to-one correspondence with the plurality of rows of piezoelectric units arranged along the second direction; the plurality of first signal lines correspond to the piezoelectric units arranged in the first direction in a one-to-one manner;

each of the switch units includes a thin film transistor; the thin film transistor includes: a source, a drain and a gate;

the piezoelectric unit includes: a first electrode, a piezoelectric portion, and a second electrode which are sequentially stacked over the flexible substrate; the first electrode comprises a planar electrode; the second electrode includes: a first comb electrode and a second comb electrode;

the drain electrode of each thin film transistor is electrically connected with the first comb-shaped electrode of the corresponding second electrode, the gate electrode of each thin film transistor is electrically connected with the corresponding first signal line, and the source electrode of each thin film transistor is electrically connected with the corresponding second signal line;

the second comb-shaped electrode of each second electrode is electrically connected to the corresponding third signal line.

Optionally, one first signal line is respectively disposed on the same side of each row of the piezoelectric units arranged along the first direction;

and two sides of each row of the piezoelectric units arranged along the second direction are respectively provided with one second signal line and one third signal line.

Optionally, each of the first electrodes is grounded.

An embodiment of the present invention provides an electronic apparatus, including: a plurality of switching units and the piezoelectric device described above; the plurality of switch units are electrically connected in one-to-one correspondence with a plurality of piezoelectric units of the piezoelectric device, and configured to control voltages of the piezoelectric units. The electronic device can control the piezoelectric units through the switch units respectively, so that accurate control is realized. The electronic device has strong controllability and high accuracy.

In a further aspect, there is provided a method of manufacturing a piezoelectric device as described above, the method comprising:

manufacturing a first substrate; the first substrate comprises a flexible substrate and a plurality of first electrodes arranged on the flexible substrate;

manufacturing a second substrate; the second substrate includes a rigid substrate, and a plurality of piezoelectric portions and a plurality of second electrodes which are sequentially stacked on the rigid substrate; the piezoelectric part is made of rigid material;

peeling the plurality of piezoelectric portions and the plurality of second electrodes of the second substrate;

and binding the plurality of peeled piezoelectric parts and the plurality of second electrodes to the first substrate to obtain a plurality of piezoelectric units arranged in an array.

Optionally, the manufacturing the second substrate includes:

forming a plurality of the piezoelectric portions on the rigid substrate;

a plurality of the second electrodes are formed on a plurality of the piezoelectric portions.

Optionally, the piezoelectric portion is made of piezoelectric ceramic;

the forming a plurality of the piezoelectric portions on the rigid substrate includes:

forming a piezoelectric ceramic film on the rigid substrate by adopting a sol-gel process;

patterning the piezoelectric ceramic film to form a plurality of piezoelectric parts arranged in an array.

Optionally, the forming of the plurality of second electrodes on the plurality of piezoelectric portions includes:

forming a metal electrode film covering the plurality of piezoelectric portions;

patterning the metal electrode film to form a plurality of second electrodes arranged in an array.

The embodiment of the invention provides a manufacturing method of a piezoelectric device, which is simple and easy to realize; the piezoelectric device formed by the manufacturing method has flexibility and can be bent.

In still another aspect, a method of controlling an electronic apparatus is provided, the method including: inputting a first signal to each first signal line to enable the thin film transistor corresponding to each first signal line to be in a conducting state;

inputting a second signal to each second signal line, so that the thin film transistor corresponding to each second signal line inputs the second signal to the first comb-shaped electrode of the electrically connected second electrode;

inputting a third signal to each third signal line so that a third signal is input to a second comb-shaped electrode of the second electrode to which each third signal line is electrically connected;

wherein the second signal and the third signal are different in magnitude.

The embodiment of the invention provides a control method of an electronic device, which can enable a first comb-shaped electrode and a second comb-shaped electrode of each second electrode to have different voltages, so that an electric field is generated between the adjacent first comb-shaped electrode and the second comb-shaped electrode; at the same time, an electric field is also present between the first and second electrodes. The piezoelectric part between the first electrode and the second electrode generates piezoelectric effect under the action of the two electric fields; compared with the action of a single electric field, the piezoelectric efficiency is better. The control method of the electronic device is simple and easy to implement and strong in operability.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a piezoelectric device according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view taken along direction ab of FIG. 1;

FIG. 3 is a schematic diagram of piezoelectric constants;

FIG. 4 is a schematic diagram of the piezoelectric device after power is applied;

fig. 5 is a schematic structural diagram of a second electrode according to an embodiment of the present invention;

fig. 6 is a schematic diagram of two electric fields formed in a piezoelectric device according to an embodiment of the present invention;

fig. 7 is a schematic structural diagram of an electronic device according to an embodiment of the invention;

fig. 8 is a schematic structural diagram of another electronic device according to an embodiment of the invention;

fig. 9 is a schematic structural diagram of another electronic device according to an embodiment of the invention;

fig. 10 is a schematic view of a manufacturing process of a piezoelectric device according to an embodiment of the present invention;

fig. 11 is a schematic structural diagram of a first electrode according to an embodiment of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the embodiments of the present invention, the terms "first", "second", "third", and the like are used for distinguishing identical items or similar items having substantially the same functions and actions, and are used only for clearly describing technical solutions of the embodiments of the present invention, and are not understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features.