Reversible actuator, method for manufacturing the same, and apparatus including the same

文档序号:1415199 发布日期:2020-03-10 浏览:27次 中文

阅读说明:本技术 可逆致动器、用于制造该可逆致动器的方法和包括该可逆致动器的装置 (Reversible actuator, method for manufacturing the same, and apparatus including the same ) 是由 全真汉 苏永兴 于 2019-09-02 设计创作,主要内容包括:本发明涉及一种可逆致动器,其包括致动器基板,所述致动器基板包括与第一和第二电极接触的电活性层,所述电活性层被构造成响应于施加到所述电极的电信号而改变形状,其中所述致动器基板包括中心和多个径向槽,多个径向槽从中心径向延伸并且设有扩大孔和突出部分,多个径向槽的相邻槽之间的部分限定多个区段。本发明还涉及一种用于制造可逆致动器的方法,其包括提供包括电活性层的致动器基板;从致动器基板中激光切割出多个径向槽;将致动器基板的一部分热压成突出部分。本发明还涉及一种交互装置,其包括设置在共同致动器基板上的可逆致动器,并且可逆致动器可电联接到控制电路,从而使得电信号可以独立地施加到多个可逆致动器件中的每一个。(The present invention relates to a reversible actuator comprising an actuator substrate comprising an electroactive layer in contact with first and second electrodes, the electroactive layer being configured to change shape in response to an electrical signal applied to the electrodes, wherein the actuator substrate comprises a center and a plurality of radial slots extending radially from the center and provided with enlarged holes and protruding portions, portions between adjacent ones of the plurality of radial slots defining a plurality of segments. The invention also relates to a method for manufacturing a reversible actuator comprising providing an actuator substrate comprising an electroactive layer; laser cutting a plurality of radial slots from an actuator substrate; a portion of the actuator substrate is thermally compressed into a protruding portion. The invention also relates to an interaction device comprising a reversible actuator disposed on a common actuator substrate, and the reversible actuator is electrically coupleable to a control circuit such that an electrical signal can be independently applied to each of a plurality of reversible actuation means.)

1. A reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) comprising an actuator substrate (102), the actuator substrate (102) comprising an electroactive layer (104) in contact with a first electrode (106) and a second electrode (108), characterized in that the electroactive layer (104) is configured to change shape in response to an electrical signal applied to the first electrode (106) and the second electrode (108), and wherein the actuator substrate comprises a center (130, 330) and a plurality of radial slots (140, 340, 440, 540.1, 540.2) extending radially from the center (130, 330, 430, 530.1, 530.2), wherein an actuator substrate portion between two adjacent slots of the plurality of radial slots (140, 340, 440, 540.1, 540.2) defines a plurality of segments (150, 350, 450, 550.1, 550.2, 1050, 1150).

2. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 1, characterized in that at least some of the plurality of radial slots (140, 340, 440, 540.1, 540.2) terminate in enlarged holes (160, 360, 460, 560.1, 560.2).

3. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 1 or 2, characterized in that the segments of the plurality of segments (150, 350, 450, 550.1, 550.2, 1050, 1150) are connected to each other at a portion (132) remote from the center (130, 330, 430, 530.1, 530.2).

4. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 3, characterized in that the segments of the plurality of segments (150, 350, 450, 550.1, 550.2, 1050, 1150) are not connected to each other at a center (130, 330, 430, 530.1, 530.2).

5. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 4, characterized in that the electroactive layer (104) comprises an electroactive polymer.

6. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 5, characterized in that the shape variation of the electroactive layer is constrained in a radial direction (114) with respect to the plurality of segments (150, 350, 450, 550.1, 550.2, 1050, 1150).

7. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 6, characterized in that the reversible actuator further comprises a center piece (470) located at the center (430), and preferably wherein the shape change of the electroactive layer in the radial direction (114) is constrained by the center piece (470).

8. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 7, further comprising an elastic membrane (490), the elastic membrane (490) being superposed on the actuator substrate and being configured to be elastically deformable in the event of an action of a force applied to the centerpiece.

9. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 8, further comprising an active fulcrum ring (1051), wherein the active fulcrum ring comprises an electro-active material.

10. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 9, characterized in that it further comprises radial and/or arc-shaped slits (1120, 1121, 1122).

11. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 10, characterized in that the plurality of segments (150, 350, 450, 550.1, 550.2, 1050) are arranged to form a protruding portion (110, 310, 410, 510.1, 510.2), the protruding portion (110, 310, 410, 510.1, 510.2) protruding to a surface of the actuator substrate (102).

12. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 11, wherein the protruding portion (110, 310, 410, 510.1, 510.2) has a height (112), and further comprises a first structure and a second structure, wherein the height (112) of the first structure is different from the height of the second structure.

13. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 12, further configured such that the height (112) is adjustable in response to an electrical signal.

14. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to claim 12 or 13, characterized in that the first structure is a dwell structure.

15. The reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 12 to 14, characterized in that the protruding portion is configured to transform from the first configuration to the second configuration under the effect of a load.

16. A method for manufacturing a reversible actuator (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 11 to 15, characterized in that it comprises:

providing an actuator substrate (102) comprising the electroactive layer (104);

laser cutting a plurality of radial slots (140, 340, 440, 540.1, 540.2) from an actuator substrate (102);

thermally pressing a portion of the actuator substrate (102) into a protruding portion (110, 310, 410, 510.1, 510.2).

17. An interaction device comprising a plurality of reversible actuators (100, 300, 400, 500, 800, 901, 1000, 1100) according to any one of claims 1 to 15, wherein the plurality of reversible actuators (100, 300, 400, 500, 800, 901, 1000, 1100) are disposed on a common actuator substrate and are electrically coupleable to a control circuit such that an electrical signal can be independently applied by the control circuit to each of the plurality of reversible actuators (100, 300, 400, 500, 800, 901, 1000, 1100).

Technical Field

The present invention relates to a reversible actuator, a method for manufacturing the reversible actuator, and also to a device using the reversible actuator, such as an interactive device comprising a plurality of reversible actuators, such as a touch interactive interface comprising a plurality of reversible actuators.

Background

Haptic applications for touch display interactive devices such as Consumer Electronics (CE) and automobile dashboards are increasing. Haptic feedback conveys information to the user by providing mechanical force, pressure, or vibration, thereby reproducing haptic sensations in the user interaction device. In particular, haptic actuators are a primary component of haptic systems that provide mechanical actuation to deliver haptic sensations to enhance the user experience.

Today's smartphones, touch tablets, and touch screen displays have primarily vibrotactile feedback driven by inertial type actuators such as inertial rotating mass (ERM) and Linear Resonant Actuators (LRA). These actuators only provide vibration of the entire device and in particular have many limitations such as being bulky, lacking real feedback and complex mechanical design.

Accordingly, there is a need to provide improved haptic actuators.

Disclosure of Invention

It is therefore an object of the present invention to provide an improved reversible actuator, an improved method for manufacturing the reversible actuator and an improved touch interactive interface comprising the reversible actuator.

A reversible actuator is disclosed according to various embodiments. The reversible actuator may also be referred to as a haptic reversible actuator or a surface-covering haptic reversible actuator. The reversible actuator may include an actuator substrate. The actuator substrate may comprise an electroactive layer, which may be in contact with the first and second electrodes. The electroactive layer can be configured to change shape in response to an electrical signal applied to the first and second electrodes. The actuator base plate may include a center and a plurality of radial slots extending radially from the center, and may also include a plurality of segments. The actuator base plate portion between two adjacent slots of the plurality of radial slots may define a plurality of segments. For example, each segment of the plurality of segments may be formed by an actuator base plate portion between two adjacent slots of the plurality of radial slots.

Methods for fabricating the reversible actuator according to various embodiments may include providing an actuator substrate, wherein the actuator substrate may include an electroactive layer. The method may include laser cutting a plurality of radial slots from an actuator substrate. The method may include forming a portion of the actuator substrate into a protruding portion, for example, hot pressing a portion of the actuator substrate into a protruding portion.

An interaction device according to various embodiments may include a plurality of reversible actuators. The plurality of reversible actuators may be disposed on a common actuator substrate. The plurality of reversible actuators may be electrically coupled to the control circuit such that the electrical signal may be applied by the control circuit to each of the plurality of reversible actuators independently, or to the plurality of reversible actuators in their entirety. The plurality of reversible actuators may be electrically coupled to the control circuit.

Drawings

In the following description, various embodiments of the present invention are described with reference to the following drawings, in which:

fig. 1 illustrates a schematic diagram of an exemplary reversible actuator 100, in accordance with various embodiments.

Fig. 2 shows a schematic view of an exemplary layered structure of an actuator substrate 102 according to various embodiments.

FIG. 3 illustrates, in perspective view, a schematic diagram of an exemplary reversible actuator 300, in accordance with various embodiments;

FIG. 4A illustrates, in an upper view, a schematic view of an exemplary reversible actuator 400, wherein segments of a plurality of segments 450 are not connected to each other at a portion near center 430, in accordance with various embodiments; a cross-section of the reversible actuator 400 is shown in the middle view, and a top view and a perspective line drawing of an exemplary embodiment of the actuator are shown in the bottom view;

fig. 4B shows a schematic view of an exemplary reversible actuator 400 in an upper view, further including a center piece 470, in accordance with various embodiments; a cross-section of the reversible actuator 400 is shown in the middle view, and a line drawing of a perspective view of an exemplary embodiment of the actuator is shown in the lower view;

fig. 5A shows a schematic view of an exemplary reversible actuator 500.1, wherein at least some of the plurality of radial slots 540.1 terminate in enlarged apertures, such as square enlarged aperture 560.1, in accordance with various embodiments;

fig. 5B illustrates a schematic view of an exemplary reversible actuator 500.2, wherein at least some of the plurality of radial slots 540.2 terminate in enlarged holes, such as trapezoidal enlarged holes 560.2, in accordance with various embodiments;

fig. 6A illustrates a schematic diagram of a cross-section of the exemplary reversible actuator 400, as illustrated in fig. 4B, wherein the reversible actuator further includes an elastic membrane 490, in accordance with various embodiments;

FIG. 6B illustrates a cross-section of the reversible actuator 400 shown in FIG. 6A, with the reversible actuator in a raised position;

FIG. 7A shows three different configurations for a reversible actuator, and shows a graph 700 of corresponding load-deflection curves;

FIG. 7B shows a graph 710 of load-deflection curves for reversible actuators having different height/thickness ratios;

fig. 8A shows a petal-shaped reversible actuator 800;

FIG. 8B shows a graph 801 with a plot of voltage versus time signal 810 applied to reversible actuator 800 and a corresponding plot of force versus time response 820;

fig. 9A shows a reversible actuator 901 in which a plurality of segments are arranged to form a projection, and in which at least some of a plurality of radial slots terminate in an enlarged aperture, according to various embodiments;

fig. 9B shows a graph 900 with a plot of a voltage-time signal 910 applied to the reversible actuator 901 and a corresponding plot of a force-time response 920.

Fig. 10 shows a reversible actuator 1000 that includes an active fulcrum ring 1051.

Fig. 11 shows a reversible actuator 1100 that also includes slits 1120 and/or spacers 1130 for reducing the effective length of each segment, thereby generating a greater actuation force.

Detailed Description

The following detailed description describes specific details and embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments may be utilized and changes may be made without departing from the scope of the present invention. The various embodiments are not necessarily mutually exclusive, as some embodiments may be combined with one or more other embodiments to form new embodiments.

Features described in the context of an embodiment may correspondingly apply to the same or similar features in other embodiments, and features described in the context of an embodiment may correspondingly apply to other embodiments, even if not explicitly described in these other embodiments. Furthermore, additions and/or combinations and/or alternatives as described for features in the context of an embodiment may be applied correspondingly for the same or similar features in other embodiments.

The invention illustratively described herein suitably may be practiced in the absence of any element, limitation, not specifically disclosed herein. Thus, for example, the terms "having", "including", "containing", and the like are to be construed broadly and not limited. Thus, the word "comprising" or variations such as "comprises" or "comprising" will be understood to imply the inclusion of a stated integer or group of integers but not the exclusion of any other integer or group of integers. Additionally, the terms and expressions which have been employed herein are used as terms of description and not of limitation, and there is no intention in the use of such terms and expressions of excluding any equivalents of the features shown and described or portions thereof, it being recognized that various modifications are possible within the scope of the invention claimed. Thus, it should be understood that although the present invention has been specifically disclosed by exemplary embodiments and optional features, modification and variation of the inventions herein disclosed may be resorted to by those skilled in the art, and that such modifications and variations are considered to be within the scope of this invention.

As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The inclusion of reference signs in parentheses in the claims is intended to aid understanding of the present invention and does not limit the scope of the claims.

According to various embodiments, the term "electroactive layer" may denote a layer that undergoes a shape change in response to an applied electric field. The electroactive layer can include an electroactive material, such as an electroactive polymer. In the context of the present disclosure and according to various embodiments, an electroactive material (e.g., an electroactive polymer EAP) is a material that undergoes a shape change in response to an applied electric field (the material is a polymer in the case where the electroactive material is an EAP).

According to various embodiments, when describing an element comprising an electroactive layer, such as a segment, the term "shaped" may denote, for example, a bend, a change in at least one dimension (such as length), a change in volume, a change in conformation, or a combination thereof. For example, a change in the shape of a segment of the plurality of segments may mean that the segment (as an example) bends to one side.

Fig. 1 illustrates a schematic diagram of an exemplary reversible actuator 100, in accordance with various embodiments. The top view is a top view of the reversible actuator 100. The lower view is a cross-sectional view 101. The reversible actuator 100 may include an actuator substrate 102. The actuator base plate may include a center 130 and a plurality of radial slots 140 may extend radially from the center 130. The portion of the actuator substrate between two adjacent ones of the plurality of radial slots may define a plurality of segments 150. In fig. 1, reference numerals are provided only in some of the plurality of grooves and the plurality of segments, but it should be understood that the term "plurality" within the meaning of the various embodiments may mean two or more, e.g. all grooves and/or all segments. A section of the plurality of sections may include a portion 134, such as an end proximate the center 130 and a portion 132 distal from the center 130. The actuator substrate may comprise, for example, a protruding portion 110, such as the portion shown in the form of cross-sectional section 101. For illustrative purposes, the protruding portion 110 is shown protruding from the plane of the actuator substrate, e.g., to the surface of the actuator substrate 102. The protruding portion may include a shaft 136 and may also include rotational symmetry with respect to the shaft 136. The central portion raises a height 112 that decreases to substantially zero in a radial direction 114.

Within the meaning of the various embodiments, the term "protruding portion", also referred to as "protrusion", may denote that a central portion of the actuator substrate is at a height from the surrounding actuator substrate plane, e.g. a segment portion of the plurality of segments near the center is at a height from the actuator substrate plane. The actuator substrate plane may be defined as a plane intersecting a portion of the actuator substrate that does not include the protruding portion. For example, the plane of the actuator substrate may be a plane intersecting a distal end portion, away from the center, of a segment portion of the plurality of segments. The protruding portion may be, for example, a dome with a circular base, a dome with a regular convex polygonal base, a cone, or a frustum of the aforementioned structure. The protruding portion may comprise an axis and may further comprise rotational symmetry with respect to the axis.

According to various embodiments, the protruding portion may be a first structure, e.g. the reversible actuator is in a rest position in the protruding portion. The protruding portion may be produced by arranging a section of the plurality of sections to conform to a desired shape, for example by stamping, pressing or hot pressing the actuator substrate into the desired shape.

According to various embodiments, the segments of the plurality of segments may be connected to each other at a portion remote from the center 130. As shown in fig. 1, the segments, which may also be referred to as actuating fingers, may extend toward the center 130. According to various embodiments, the segments may be radially slotted segments, which are also referred to as radially slotted actuation fingers. For example, the segments of the plurality of segments may be connected to each other only at portions remote from the center 130. Each of plurality of segments 150, such as each of all of plurality of segments 150, may not be connected to an adjacent segment, such as to all other segments of plurality of segments 150 at portion 134 near center 130. A central opening may be formed at the center 130.

According to various embodiments, and for illustrative purposes as shown in the cross-sectional view of fig. 1, the projection 110 may also have a height 112, and may further include a first structure and a second structure, wherein the height 112 of the first structure is different than the height of the second structure. For example, the first structure may be a dwell structure for which no load is applied and the second structure may be a loaded structure. The height may be adjusted in response to an electrical signal applied to at least one of the segments, for example, in response to electrical signals applied to all of the plurality of segments. The electrical signal may cause an electrical stimulus across the plurality of zones, for example a bleed air electrical stimulus across the electroactive layer, and thus cause a change in the shape of the respective zone, for example a change in the shape of all of the plurality of zones.

Within the meaning of the various embodiments, the term "load", e.g. in "external load" or "applied load", may denote a force applied to the plurality of segments by the electroactive polymer or may denote an external force applied to the plurality of segments (which external force may be applied, for example, by a user), or may denote both. The expression "external load" may be used when it is simply referred to as an external force applied to the plurality of segments (e.g., applied by a user). The external load may be applied to the plurality of segments indirectly, for example via the centerpiece and/or via the elastic membrane.

According to various embodiments, the actuator may comprise an elastic membrane superposed on an actuator substrate of the reversible actuator. Alternatively or additionally, the actuator substrate may comprise an elastomeric cover layer.

Fig. 2 shows a schematic view of the actuator substrate 102. The actuator substrate 102 may comprise a support layer 103. The actuator substrate 102 may further comprise an electroactive layer 104 between the first electrode 106 and the second electrode 108, which may be included on the entire actuator substrate or only on parts of the actuator substrate, e.g. only on protruding parts. The first electrode 106 may be disposed on the support layer 103. The actuator substrate may further comprise an elastic cover layer 109. An elastic cover layer 109 may be disposed on the second electrode layer 108. The electroactive layer may include an electroactive polymer (EAP). Examples of electroactive polymers may include: dielectric eap (dieap), ferroelectric polymer (FerroEAP), ionic eap (ieap).

The ion eap (ieap) can be used to produce large bending deformations at low drive voltages (<5V) and is therefore a good soft actuator technology especially for surface covering haptic actuator applications. Some of the advantages of the ioap are low voltage drive mechanism, fast response, reliability, substantial dynamics and out-of-plane (protrusion) deformation. Furthermore, the penetrable and bi-stable mechanisms may be applied to the design of reversible actuators, such as snap-fit iEAP based cantilever actuators according to various embodiments.

Fig. 3 illustrates a perspective view of an example reversible actuator 300, in accordance with various embodiments. The actuator base plate may include a center 330 on the shaft 336, and a plurality of radial slots 340 may extend radially from the center 330. The portion of the actuator base plate between two adjacent ones of the plurality of radial slots 340 may define a plurality of segments 350. Enlarged holes may be provided in the actuator substrate at the ends of the slots 340 remote from the center 330.

According to various embodiments, at least some of the plurality of radial slots may terminate in an enlarged bore. For example, enlarged holes may be provided at the ends of each slot. The enlarged holes may be continuously connected with the plurality of radial slots, e.g. each enlarged hole may form a continuous slot opening having a respective slot of the plurality of radial slots. The enlarged holes, e.g. all enlarged holes, may be e.g. square, rectangular, circular, trapezoidal, D-shaped. As used herein, an enlarged aperture may also be referred to as a slot end aperture.

According to various embodiments, the protruding portion comprises a height, and further comprises a first structure and a second structure, wherein the first structure height is different from the second structure. For example, the height in the second structure may be less than the height in the first structure. In another example, the height in the second structure may be greater than the height in the first structure.

According to various embodiments, the reversible actuator may be manufactured by a hot pressing and laser cutting process to achieve specific design parameters, such as at least one of actuator substrate thickness, length of segments in a plurality of segments, shape of enlarged holes, height of protrusions in a dwell structure. For example, the ionic electroactive polymers may be processed using a hot pressing and/or laser cutting process.

The upper diagram of fig. 4A shows a schematic view of an exemplary reversible actuator 400 in which segments of the plurality of segments 450 are not connected to each other at a portion near the center 430, according to various embodiments. In other words, the segments are radially slotted actuation fingers that may include a tab portion, and wherein each slot may include a slot end hole (enlarged hole). The middle part illustrates a cross section of the reversible actuator 400 and in the lower part a line drawing of a perspective view of an exemplary embodiment of the actuator is shown. The key design parameters may include at least one of the following parameters: actuator substrate thickness (t), protrusion height (h), open area (a), angle (θ) and segment length (l). The following characteristics of the reversible actuator can be adjusted by configuring the design parameters: protrusion motion, force under electrical excitation, release mechanism, elastic restoring force. Based on the diaphragm spring design with radially slotted actuating fingers, a fast, large and reversible protrusive deformation movement in the range of 1.5< h/t (height to thickness ratio) can be produced. Thus, large reversible deformations can be produced with a suitable h/t range at reduced external loads (small electrical excitations). For example, where the membrane layer thickness is in the range of 0.7-1.0mm, the membrane height may be in the range of 1.2-1.4 mm.

The upper view of fig. 4B shows a schematic view of an exemplary reversible actuator 400, which also includes a center piece 470, in accordance with various embodiments. The middle view shows a cross-section of the reversible actuator 400, and the lower view shows a line drawing of a perspective view of an exemplary embodiment of the actuator. The reversible actuator in fig. 4B includes a center piece 470, such as a center plate or pad, located at the center 430.

According to various embodiments, the centerpiece may be positioned on and/or interconnected at the central aperture of the reversible actuator. The centerpiece may be configured to interact with some or all of the plurality of segments, for example to constrain the shape change of the plurality of segments due to the shape change of the electroactive layer. The centerpiece may have rotational symmetry. The central piece may be, for example, a rotating body. The centerpiece may include one or two end plates that, for example, constrain movement in the axial direction. The centerpiece is capable of combining actuation and balancing motions of the plurality of segments, for example, all of the plurality of segments, to produce greater protrusion and deflection motions.

Fig. 5A shows a schematic view of an exemplary reversible actuator 500.1, wherein at least some of the plurality of radial slots 540.1 terminate in enlarged apertures, such as square enlarged aperture 560.1, according to various embodiments. For illustrative purposes, reversible actuator 500.1 has 12 slots 540.1 and 12 segments 510.1. More slots and more sections, or fewer slots and fewer sections may be provided.

According to various embodiments, the plurality of segments may comprise at least 2, at least 3, at least 4, at least 5, or at least 6 segments. According to various embodiments, the expression "plurality of segments" may denote a plurality of segments functioning according to the invention, and other segments having other functions not described herein may not necessarily be included in the "plurality of segments". Also, according to various embodiments, one or some of the "plurality of segments", e.g., an electroactive segment, may refer to some of the plurality of segments, each or all of the plurality of segments.

Fig. 5B illustrates a schematic view of an example reversible actuator 500.2, wherein at least some of the plurality of radial slots 540.2 terminate in enlarged holes, such as trapezoidal enlarged holes 560.2, in accordance with various embodiments. For illustrative purposes, reversible actuator 500.2 has 12 slots 540.2 and 12 segments 510.2. More slots and more sections, or fewer slots and fewer sections may be provided.

Fig. 6A and 6B show schematic diagrams of cross-sections of two configurations of an exemplary reversible actuator, which for illustrative purposes is a cross-section of the reversible actuator shown in fig. 4B. According to various embodiments, the reversible actuator may further include an elastic membrane 490 overlying the actuator substrate of the reversible actuator. The elastic membrane 490 may be configured to elastically deform when a force is applied to the center piece 470, e.g., the force may be applied to the elastic membrane 490 through a segment of the plurality of segments of the projection 410.

The reversible actuator may include a first structure and a second structure, and optionally also other structures. For example, in a first configuration, as shown in fig. 6A, the projections 410 have a first height such that the central member 470 is in a first position relative to the elastic membrane 490. For example, in a second configuration, as shown in fig. 6B, the projections 410 have a second height that is less than the first height, and the center piece 470 exerts a force on the elastic membrane 490. This results in deformation of the elastic membrane 490. In this case, the centerpiece 470 plays a relevant role in allowing the deforming motion to produce sharp-edged deformation (as shown in fig. 6A and 6B).

According to various embodiments, the elastic membrane may be, for example, an integrated protective outer coating with elastic properties, which is integrated on top of the iEAP membrane button. The elastic membrane is capable of mechanical deformation with sharp edges. The sharp edges can conceptually be achieved by a vertical movement of the central piece, which is caused by a deforming movement under the actuating section. Such a sharp edge deformation is beneficial because it further enhances the tactile perception of the user operating the reversible actuator, for example, operating the reversible actuator in a haptic interaction device.

According to various embodiments, the reversible actuator may be configured to operate in various modes, such as at least one of the foregoing or a combination thereof:

a) touch sensor mode: upon application of an external load, a corresponding electrical signal may be measured. In particular, when the structure is changed due to a change in an applied external load, an electrical signal can be measured as an indication of the structural change. An external load is applied to a segment of the plurality of segments and thus to the electroactive layer, which can provide a corresponding electrical signal due to a change in the external load. Corresponding circuitry may be provided for sensing the electrical signal. In one example, the touch sensor mode can be a button mode;

b) haptic feedback mode 1: upon application of an electrical signal to the electroactive layer, the resulting load may be sufficient, for example, to change the reversible actuator from a first configuration to a second configuration, where the height in the first configuration (h1) is less than the height in the second configuration (h2), and may be sufficient to change the reversible actuator from the second configuration to another configuration. Thus, for example, if the user touches the reversible actuator, e.g., with a finger, he may feel that the reversible actuator snaps away from the finger. In another example, the user may sense that the reversible actuator is vibrating in a direction toward and away from the finger;

c) haptic feedback mode 2: upon application of an electrical signal to the electroactive layer, the resulting load may be sufficient, for example, to change the reversible actuator from a first configuration to a second configuration, where the height in the first configuration (h1) is greater than the height in the second configuration (h 2). Thus, for example, if a user is touching the reversible actuator, e.g., with a finger, he may sense the deformation of the reversible actuator towards the finger. In another example, the user may sense vibration of the reversible actuator in a direction toward and away from the finger.

According to various embodiments, modes a), b) and c) may be combined in the same reversible actuator. For example, the actuator may be configured to set modes a) and b). In another example, the actuator may be configured to set modes a) and c). In yet another example, the actuator may be configured to set modes b) and c). In yet another example, the actuator can be configured to provide modes a), b), and c).

According to various embodiments, the actuator may be a haptic feedback actuator.

Fig. 7A shows three different configurations (i) - (iii) for a reversible actuator on the right side and a graph 700 of the corresponding load-deflection curves for the three configurations on the left side. In the first structure (i), no load or only a load too small for structural change is applied. The reversible actuator may change from the first configuration (i) to the second configuration (ii) when a load of sufficient force is applied. In the second configuration (ii), the reversible actuator may change from the second configuration (ii) to the third configuration (iii) upon application of a load of sufficient force. Several protruding actuation/deformation behaviors of the reversible actuator are shown. The exact curve (e.g., shown in curve 700) may depend on specific design parameters, such as diaphragm thickness (t) and height (h).

According to various embodiments, the applied load may be due to actuation of a segment of the plurality of segments under electrical stimulation, e.g., a lateral force due to actuation of an electroactive layer (e.g., an iEAP layer). Under an applied load, for example, due to actuation of the segments, the reversible actuator may experience various protruding deformation states as shown in fig. 7A. Fig. 7B shows a graph 710 showing load-deflection curves for reversible actuators having different height/thickness ratios. Such a protruding deformation based on the reversible actuator can generate a large thrust. Furthermore, due to the release mechanism and the elastic restoring force of the reversible actuator according to various embodiments, for example due to a curved diaphragm spring design (tapering), a fast and reliable bi-directional movement (snap buckling behavior) may be achieved. Also, the plurality of segments may include a central aperture (e.g., the segments may be short, so as not to extend to the center) to allow for good distribution of concentrated stresses generated during actuation of the plurality of segments. As shown in fig. 7B, the snap-in behavior of the reversible actuator may be achieved by a height-to-thickness ratio (h/t) in the range of, for example, 1.5< h/t < 2.5. H/t can be used to create large protruding deformations under reduced load (e.g. small electrical excitations).

Fig. 8A shows a reversible actuator 800 that is petal-shaped and includes an iEAP layer having 8 slotted sections in the form of cantilevered fingers to generate a load that can result in, for example, a protruding deformation actuation. Fig. 8B shows a graph 801, graph 801 including a plot 810 of applied voltage 803 (in volts) as a function of time 804 (in seconds), and further including a plot 820 of force 802 (in gf-gram force) as a function of time (in seconds). As shown in fig. 8B, the generated force was 1.25gf, and the response time was greater than 20s to reach the maximum force.

Fig. 9A shows a reversible actuator 901 in which a plurality of segments are arranged to form a protruding portion. The reversible actuator in fig. 9A also includes an iEAP layer and has an improved actuation force of 1.75gf and a rapid deformation time of less than 5s as shown in fig. 9B. Fig. 9B shows a graph 900 that includes a plot 910 of applied voltage 903 (in volts) as a function of time 904 (in seconds), and also includes a plot 920 of force 902 (in gf) as a function of time 904 (in seconds). The response time and force of a reversible actuator 901 with a curved diaphragm spring design (conical shape) is improved over a reversible actuator with a normal petal diaphragm shown in figure 8A, the reversible actuator 901 having a slot end hole and a protrusion. This improvement is due to the good distribution of the forces of the segments, for example during actuation, and to the release mechanism of the protruding part, which means an elastic restoring force.

Fig. 10 illustrates a reversible actuator 1000 in accordance with various embodiments. Reversible actuator 1000 may include a plurality of segments 1050 arranged to form a protruding portion and an active fulcrum ring 1051. The active fulcrum ring may include an electroactive material, and thus the active fulcrum ring may be implemented as an electroactive fulcrum ring. By actuating the active ring, the actuation of the reversible actuator may be improved, e.g. providing a faster actuation. According to various embodiments, the electroactive fulcrum ring may be configured to produce a shape change under electrical stimulation, for example a shape change in at least one dimension such as a length, a volume change, a conformational change, or a combination thereof. For example, a change in shape of the fulcrum ring may mean that the fulcrum ring contracts or expands.

Fig. 11 shows a reversible actuator 1100 in which a plurality of segments 1150 are arranged to form a protruding portion. One or more of the plurality of segments may include a slit 1120. The direction, size (width, length), number and location of which can affect the actuation performance of the improved reversible actuator. For example, the slots may be arcuate structures 1121 and/or radial structures 1122. The arc-shaped slit may form an arc with the cavity pointing towards the center of the actuator substrate, e.g. the arc-shaped slit may be a circular arc-shaped slit with a circle center being the same as the circle center of the actuator substrate. The radial slits may be radial segments of a radius, for example, originating from the center of the actuator. The slits may help reduce bending stiffness, resulting in greater displacement and faster actuation response.

According to various embodiments, the reversible actuator may include a spacer that may be configured to reduce the effective length of each segment. A reduction in the effective length of the segments may result in a greater actuation force. One example of such a spacer is shown in fig. 11, where the actuator 1100 includes a spacer 1130. The combination of slits and spacers may further enhance the actuation force by varying the effective length and bending stiffness of each segment. The slit position after the use of the spacer may be 1/3 for the active section length, this 1/3 being located away from the center of the actuator substrate.

According to various embodiments, the interaction device may comprise a plurality of reversible actuators. The plurality of reversible actuators may be arranged according to a predetermined pattern, for example, a matrix structure. The interaction means may be, for example, a keyboard, a part of a touch screen or a part of a display. For example, the display may include an interactive interface. In another example, the touch screen may include an interactive interface. Multiple reversible actuators may be positioned, for example, above or below the display layer.

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