阅读说明：本技术 用于高功率激光切割头实现全闭环调焦的控制系统 (Control system for realizing full closed-loop focusing of high-power laser cutting head ) 是由 康浪 李海军 刘德军 于 2019-11-29 设计创作，主要内容包括：本发明公开了一种用于高功率激光切割头实现全闭环调焦的控制系统,其包括伺服驱动器、伺服电机、丝杆、准直镜组、光栅尺组件、单片机主控板、与单片机主控板通过ADS接口连接的上位机系统,伺服驱动器与ADS接口通过总线电气连接,伺服电机内设置有检测伺服电机速度的编码器；光栅尺组件的信号分为两路,一路将焦点位置信息传输给单片机主控板,另一路将位置信息反馈给伺服驱动器；编码器提供伺服电机的速度信息反馈给伺服驱动器,伺服驱动器再控制伺服电机的运转驱动准直镜组的位置调节从而实现全闭环控制。本发明采用光栅尺监测镜筒组件的实时位置,再反馈给驱动电机进行位置补偿命令,实现全闭环高精度调焦控制,使切割头的切割工艺更加稳定可靠。(The invention discloses a control system for realizing full closed-loop focusing of a high-power laser cutting head, which comprises a servo driver, a servo motor, a screw rod, a collimating lens group, a grating ruler assembly, a singlechip main control board and an upper computer system, wherein the upper computer system is connected with the singlechip main control board through an ADS (automatic dependent Surveillance) interface; the signal of the grating ruler component is divided into two paths, one path transmits the focus position information to the singlechip main control board, and the other path feeds back the position information to the servo driver; the encoder provides speed information of the servo motor to the servo driver, and the servo driver controls the operation of the servo motor to drive the position adjustment of the collimating lens group, so that full closed-loop control is realized. The invention adopts the grating ruler to monitor the real-time position of the lens cone assembly and feeds back the real-time position to the driving motor to carry out a position compensation command, thereby realizing the full closed-loop high-precision focusing control and leading the cutting process of the cutting head to be more stable and reliable.)

1. The utility model provides a control system that is used for high power laser cutting head to realize full closed-loop focusing which characterized in that: the automatic collimator comprises a servo driver, a servo motor controlled by the servo driver, a screw rod controlled by the servo motor, a collimating lens group arranged on the screw rod, a grating ruler component for feeding back the position of the collimating lens group, a single-chip microcomputer main control board electrically connected with the grating ruler component, and an upper computer system connected with the single-chip microcomputer main control board through an ADS interface, wherein the servo driver is electrically connected with the ADS interface through a bus, an encoder for detecting the speed of the servo motor is arranged in the servo motor, and the encoder is electrically connected with the servo driver;

the signal of the grating ruler component is divided into two paths, one path transmits the focal position information to the singlechip main control board, and the other path feeds back the position information to the servo driver; the encoder provides speed information of the servo motor to be fed back to the servo driver, and the servo driver controls the operation of the servo motor to drive the position adjustment of the collimating lens group, so that full closed-loop control is realized.

2. The control system for achieving full closed-loop focusing for a high power laser cutting head of claim 1, wherein: the device also comprises an intracavity temperature sensor, a collimating mirror temperature sensor, a focusing mirror temperature sensor, a lower protective mirror temperature sensor, an intracavity pressure sensor, a cutting air pressure sensor, a lower protective mirror missing infrared sensor and a lower protective mirror in-place sensor which are electrically connected with the main control board of the single chip microcomputer.

3. The control system for achieving full closed-loop focusing for a high power laser cutting head of claim 1, wherein: the control device is used for controlling a collimation and focusing driving module in the laser cutting head, and the collimation and focusing driving module comprises an auxiliary machine body, a collimation lens group, a grating ruler component, a nut bracket, a first supporting seat, a lead screw, a limit switch, a fixed seat, a coupler, a front cover plate, a servo motor and a guide rail;

the collimating lens group is internally provided with collimating lenses and is fixed on the auxiliary machine body through crossed roller guide rails; the servo motor, the fixed seat and the first support seat are all fixed on the auxiliary machine body, one side surface of the nut support is connected with the nut of the lead screw, and the other side surface of the nut support is connected with the collimating lens group;

the screw rod is supported by the fixed seat and the first supporting seat, and the coupler is arranged between the screw rod and the servo motor, so that the coaxial error between the servo motor and the screw rod is eliminated;

the limit switches are arranged on two sides of the inner part of the auxiliary machine body part, and two ends of the nut support part can sense the position of the limit switches.

4. The control system for achieving full closed-loop focusing for a high power laser cutting head of claim 3, wherein: the grating ruler component comprises a reading head, a grating ruler and a second supporting seat, the reading head is supported on the second supporting seat and fixed on the auxiliary machine body, the grating ruler is connected with the collimating lens group, and the reading head can adjust the height and the left and right positions between the reading head and the grating ruler on the second supporting seat so as to achieve the optimal sensing position;

and the reading head reads and identifies the real-time position of the grating ruler and feeds back the real-time position to the upper computer system.

5. The control system for achieving full closed-loop focusing for a high power laser cutting head of claim 1, wherein: the main control board of the single chip is provided with a Bluetooth communication module which can carry out data transmission with the mobile communication equipment.

[ technical field ] A method for producing a semiconductor device

The invention belongs to the technical field of automatic focusing, and particularly relates to a control system for realizing full closed-loop focusing of a high-power laser cutting head.

[ background of the invention ]

In the field of laser cutting, the cutting speed and the cutting quality mainly depend on whether the selected cutting parameters are appropriate, and the cutting parameters include laser power, cutting speed, focus position, cutting air pressure and the like. The precision control of the focus position is very critical, and the focusing mode of the cutting head designed by the conventional cutting head manufacturer on the market can be divided into two modes, namely a servo motor, a coupler, a screw rod, a guide rail and a direct current motor, a steel belt and the guide rail, which are used for respectively driving a lens barrel assembly to move up and down to adjust the focus position. At present, the two traditional adjusting modes are both open-loop control, and a certain amount of clearance values exist in a transmission mechanism, so that the actual focus position of the cutting head cannot be monitored and fed back in real time.

Therefore, there is a need to provide a new control system for a high power laser cutting head to achieve full closed loop focusing to solve the above problems.

[ summary of the invention ]

The invention mainly aims to provide a control system for realizing full-closed-loop focusing of a high-power laser cutting head, which realizes full-closed-loop high-precision focusing control and enables the cutting process of the cutting head to be more stable and reliable.

The invention realizes the purpose through the following technical scheme: a control system for realizing full-closed-loop focusing of a high-power laser cutting head comprises a servo driver, a servo motor controlled by the servo driver, a screw rod controlled by the servo motor, a collimating lens group arranged on the screw rod, a grating ruler assembly for feeding back the position of the collimating lens group, a single-chip microcomputer main control board electrically connected with the grating ruler assembly, and an upper computer system connected with the single-chip microcomputer main control board through an ADS interface, wherein the servo driver is electrically connected with the ADS interface through a bus;

the signal of the grating ruler component is divided into two paths, one path transmits the focal position information to the singlechip main control board, and the other path feeds back the position information to the servo driver; the encoder provides speed information of the servo motor to be fed back to the servo driver, and the servo driver controls the operation of the servo motor to drive the position adjustment of the collimating lens group, so that full closed-loop control is realized.

Further, the device also comprises an intracavity temperature sensor, a collimating mirror temperature sensor, a focusing mirror temperature sensor, a lower protective mirror temperature sensor, an intracavity pressure sensor, a cutting air pressure sensor, a lower protective mirror missing infrared sensor and a lower protective mirror in-place sensor which are electrically connected with the main control board of the single chip microcomputer.

Furthermore, the control device is used for controlling a collimation and focusing driving module in the laser cutting head, and the collimation and focusing driving module comprises an auxiliary machine body, a collimation lens group, a grating ruler assembly, a nut bracket, a first supporting seat, the lead screw, a limit switch, a fixed seat, a coupler, a front cover plate, the servo motor and a guide rail;

the collimating lens group is internally provided with collimating lenses and is fixed on the auxiliary machine body through crossed roller guide rails; the servo motor, the fixed seat and the first support seat are all fixed on the auxiliary machine body, one side surface of the nut support is connected with the nut of the lead screw, and the other side surface of the nut support is connected with the collimating lens group;

the screw rod is supported by the fixed seat and the first supporting seat, and the coupler is arranged between the screw rod and the servo motor, so that the coaxial error between the servo motor and the screw rod is eliminated;

the limit switches are arranged on two sides of the inner part of the auxiliary machine body part, and two ends of the nut support part can sense the position of the limit switches.

Furthermore, the grating scale assembly comprises a reading head, a grating scale and a second support seat, the reading head is supported on the second support seat and fixed on the auxiliary machine body, the grating scale is connected with the collimating mirror group, and the reading head can adjust the height and the left and right positions between the reading head and the grating scale on the second support seat so as to achieve the optimal sensing position;

and the reading head reads and identifies the real-time position of the grating ruler and feeds back the real-time position to the upper computer system.

Furthermore, a Bluetooth communication module is arranged in the main control panel of the single chip microcomputer and can transmit data with the mobile communication equipment.

Compared with the prior art, the control system for realizing full closed-loop focusing of the high-power laser cutting head has the advantages that: the real-time position of the lens cone assembly is monitored by adopting a high-precision grating ruler, and the position information is fed back to the driving motor to carry out a position compensation command, so that full-closed-loop high-precision focusing control is realized, and the cutting process of the cutting head is more stable and reliable. Automatic accurate focusing and rapid cutting are realized, and the focus positioning precision reaches 1um by adopting a mode of combining encoder feedback of a servo motor and a second feedback magnetic grid; meanwhile, the system has a real-time detection function, various states of the cutting head can be read and configured by configuring a wireless transmission technology through a mobile phone APP or upper computer software, so that a client can know working states of the temperature and pollution condition of a protective lens of the cutting head, the internal air pressure of the cutting head and the like in time and effectively use the working states; the intelligent cutting head has the advantages of powerful functions, high integration level, flexible module superposition, full-digital bus control and the like.

[ description of the drawings ]

FIG. 1 is a schematic diagram of a framework of an embodiment of the invention;

FIG. 2 is a schematic diagram of a frame principle of a main control board of a single chip microcomputer in the embodiment of the invention;

FIG. 3 is an exploded view of a focus drive assembly according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a grating assembly according to an embodiment of the present invention.

[ detailed description ] embodiments