在玻璃中进行快速激光钻孔的方法和由其制备的产品

文档序号:1635153 发布日期:2020-01-17 浏览:15次 >En<

阅读说明:本技术 在玻璃中进行快速激光钻孔的方法和由其制备的产品 (Method for rapid laser drilling in glass and products made therefrom ) 是由 S·马加诺维克 G·A·皮切 C·A·蓬西珀曼 S·尚穆加姆 S·楚达 Z·瓦尔加 R· 于 2014-12-16 设计创作,主要内容包括:本申请涉及在玻璃中进行快速激光钻孔的方法和由其制备的产品。在材料(1)中形成孔包含将脉冲激光束(2)聚焦成沿着束传播方向取向并引导进入材料的激光束聚焦线(2b),所述激光束聚焦线(2b)在材料(1)之内产生诱导吸收,该诱导吸收在材料(1)之内产生沿着激光束聚焦线(2b)的缺陷线条,以及使得材料(1)和激光束(2)相对于彼此平移,由此在材料中形成多个缺陷线条,以及在酸溶液中蚀刻材料,以通过放大材料中的缺陷线条来产生直径大于1微米的孔。玻璃制品包含玻璃基材的堆叠件,其具有形成的延伸穿过堆叠件的直径为1-100微米的孔。(The present application relates to methods of rapid laser drilling in glass and products made therefrom. Forming a hole in a material (1) comprises focusing a pulsed laser beam (2) into a laser beam focal line (2b) oriented along a beam propagation direction and directed into the material, the laser beam focal line (2b) producing an induced absorption within the material (1) that produces a defect line along the laser beam focal line (2b) within the material (1), and translating the material (1) and the laser beam (2) relative to each other, thereby forming a plurality of defect lines in the material, and etching the material in an acid solution to produce a hole having a diameter greater than 1 micron by amplifying the defect lines in the material. The glass article comprises a stack of glass substrates having pores formed extending through the stack having a diameter of 1 to 100 microns.)

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