阅读说明：本技术 一种led芯片及其制作方法 (LED chip and manufacturing method thereof ) 是由 刘伟 李俊贤 刘英策 蔡和勋 邬新根 于 2019-09-11 设计创作，主要内容包括：本申请实施例提供了一种LED芯片及其制作方法,该LED芯片包括：衬底；位于衬底的第一表面的外延结构,外延结构包括第一氮化镓层、有源层、第二氮化镓层,第一氮化镓层与第二氮化镓层的掺杂类型不同；位于第二氮化镓层背离衬底一侧预设区域的电流阻挡层；位于电流阻挡层背离第二氮化镓层一侧,覆盖第二氮化镓层的复合膜层,复合膜层包括层叠的欧姆接触层、绝缘点阵层、第一导电层,其中,绝缘点阵层包括多个不连续的绝缘单元；与第一氮化镓层背离衬底的一侧电连接第一电极；与复合膜层背离第二氮化镓层的一侧电连接第二电极。该LED芯片具有较高的电流横向扩展能力和较高的发光亮度。(The embodiment of the application provides an LED chip and a manufacturing method thereof, wherein the LED chip comprises: a substrate; the epitaxial structure is positioned on the first surface of the substrate and comprises a first gallium nitride layer, an active layer and a second gallium nitride layer, and the doping types of the first gallium nitride layer and the second gallium nitride layer are different; the current blocking layer is positioned in a preset area on one side, away from the substrate, of the second gallium nitride layer; the composite film layer is positioned on one side, away from the second gallium nitride layer, of the current blocking layer and covers the second gallium nitride layer, the composite film layer comprises an ohmic contact layer, an insulating dot matrix layer and a first conducting layer which are stacked, and the insulating dot matrix layer comprises a plurality of discontinuous insulating units; the side of the first gallium nitride layer, which is far away from the substrate, is electrically connected with the first electrode; and the side of the composite film layer, which is far away from the second gallium nitride layer, is electrically connected with the second electrode. The LED chip has high current lateral expansion capability and high luminous brightness.)

1. An LED chip, comprising:

A substrate;

The epitaxial structure is positioned on the first surface of the substrate and comprises a first gallium nitride layer, an active layer and a second gallium nitride layer, and the doping types of the first gallium nitride layer and the second gallium nitride layer are different;

the current blocking layer is positioned in a preset area on one side, away from the substrate, of the second gallium nitride layer;

the composite film layer is positioned on one side, away from the second gallium nitride layer, of the current blocking layer and covers the second gallium nitride layer, the composite film layer comprises an ohmic contact layer, an insulating lattice layer and a first conducting layer which are stacked, and the insulating lattice layer comprises a plurality of discontinuous insulating units;

a first electrode is electrically connected with one side of the first gallium nitride layer, which is far away from the substrate;

and the side of the composite film layer, which is far away from the second gallium nitride layer, is electrically connected with a second electrode.

2. The LED chip of claim 1, wherein the thickness of the ohmic contact layer ranges from 80 angstroms to 200 angstroms, inclusive; the light transmittance of the ohmic contact layer is more than 85%; the range of the resistivity of the ohmic contact layer is not more than 3.0 x 10^-4Ωcm；

The thickness of the insulating lattice layer is less than 100 angstroms;

The thickness of the first conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive; the resistivity of the first conductive layer has a value range of 1.0 x 10^-4Ωcm～2.0*10^-4Ω cm, inclusive.

3. the LED chip of claim 1, wherein said ohmic contact layer has a refractive index less than a refractive index of said second gallium nitride layer and greater than a refractive index of said first conductive layer.

4. The LED chip of claim 3, wherein the ohmic contact layer has a refractive index value in the range of 2.05-2.2, inclusive; the value range of the refractive index of the insulation dot matrix layer is 1.45-2.0, including the endpoint value; the refractive index value range of the first conducting layer is 1.85-1.95, inclusive.

5. the LED chip of any of claims 1-4, wherein the composite film further comprises a second conductive layer disposed between the insulating lattice layer and the first conductive layer, wherein the second conductive layer has a resistivity value in a range of7.0*10^-4～8.0*10^-4Ω cm, inclusive.

6. The LED chip of claim 5, wherein the refractive index of the second conductive layer is less than the refractive index of the ohmic contact layer and greater than the refractive index of the first conductive layer.

7. The LED chip of claim 6, wherein the thickness of said second conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive; the refractive index value range of the second conducting layer is 1.95-2.05.

8. The LED chip of claim 5, wherein the resistivity of the second conductive layer gradually decreases along a predetermined direction, wherein the predetermined direction is perpendicular to the plane of the second gallium nitride layer.

9. The LED chip of claim 8, wherein said predetermined direction is directed from said ohmic contact layer to said first conductive layer.

10. a manufacturing method of an LED chip is characterized by comprising the following steps:

Forming an epitaxial structure on a first surface of a substrate, wherein the epitaxial structure comprises a first gallium nitride layer, an active layer and a second gallium nitride layer, and the doping types of the first gallium nitride layer and the second gallium nitride layer are different;

Forming a current blocking layer in a preset area on one side of the second gallium nitride layer, which is far away from the substrate;

forming a composite film layer covering the second gallium nitride layer on one side, away from the second gallium nitride layer, of the current blocking layer, wherein the composite film layer comprises an ohmic contact layer, an insulating lattice layer and a first conducting layer which are stacked, and the insulating lattice layer comprises a plurality of discontinuous insulating units;

Forming a first electrode electrically connected with the first gallium nitride layer on one side of the first gallium nitride layer, which is far away from the substrate;

And forming a second electrode which is electrically connected with the first conductive layer in the composite film layer on one side of the composite film layer, which is far away from the second gallium nitride layer.

11. The method according to claim 10, wherein forming a composite film layer overlying the second gallium nitride layer on a side of the current blocking layer facing away from the second gallium nitride layer comprises:

Forming an ohmic contact layer covering the second gallium nitride layer on one side, away from the second gallium nitride layer, of the current blocking layer;

Forming an insulating lattice layer on one side of the ohmic contact layer, which is far away from the second gallium nitride layer, wherein the insulating lattice layer comprises a plurality of discontinuous insulating units;

And forming a first conductive layer on one side of the insulating lattice layer, which is far away from the ohmic contact layer.

12. The method of claim 11, wherein forming an ohmic contact layer overlying the second gallium nitride layer on a side of the current blocking layer facing away from the second gallium nitride layer comprises:

depositing an ohmic contact layer on one side of the current blocking layer, which is far away from the second gallium nitride layer, by adopting a magnetron sputtering process, wherein the ohmic contact layer covers one side surface, which is far away from the active layer, of the second gallium nitride layer;

Using an annealing furnace at O₂/N₂And annealing the ohmic contact layer in the atmosphere to form good ohmic contact between the ohmic contact layer and the second gallium nitride layer.

13. The method of claim 11, wherein forming an insulating lattice layer on a side of the ohmic contact layer facing away from the second gallium nitride layer comprises:

And (3) growing an oxide film on the surface of the ohmic contact layer on the side away from the second gallium nitride layer in an island shape by adopting a magnetron sputtering process to form a discontinuous lattice film so as to form a plurality of discontinuous insulation units, thus preparing the insulation lattice layer.

14. The method of claim 11, wherein forming a first conductive layer on a side of the insulating lattice layer facing away from the ohmic contact layer comprises:

Forming a first conducting layer on one side, away from the ohmic contact layer, of the insulation dot matrix layer by adopting a magnetron sputtering process, wherein the first conducting layer covers the surface of one side, away from the ohmic contact layer, of the insulation dot matrix layer and fills gaps among a plurality of insulation units in the insulation dot matrix layer;

using an annealing furnace at O₂/N₂And annealing the first conductive layer in the atmosphere to reduce the resistivity of the first conductive layer.

15. The method of claim 11, further comprising, before forming the first conductive layer on a side of the insulating lattice layer facing away from the ohmic contact layer:

And a second conducting layer is formed on one side, deviating from the ohmic contact layer, of the insulating dot matrix layer, the second conducting layer covers the insulating dot matrix layer and fills gaps between adjacent insulating units in the insulating dot matrix layer, and the first conducting layer is formed on the surface of one side, deviating from the ohmic contact layer, of the second conducting layer.

Technical Field

The application relates to the field of semiconductor light-emitting devices, in particular to an LED chip and a manufacturing method thereof.

Background

With the rapid development of the LED technology and the gradual improvement of the LED lighting effect, the application of the LED is more and more extensive, and people pay more attention to the development prospect of the LED in the lighting market. The LED chip is used as a core component of the LED lamp and has the function of converting electric energy into light energy, specifically, the LED chip comprises a P-type semiconductor layer, an N-type semiconductor layer and an active layer positioned between the N-type semiconductor layer and the P-type semiconductor layer, when current passes through the LED chip, holes in the P-type semiconductor and electrons in the N-type semiconductor move to the active layer and are combined in the active layer, and therefore the LED chip emits light. However, the brightness of the existing LED chip is to be improved.

Disclosure of Invention

In view of this, the embodiment of the present application provides an LED chip and a manufacturing method thereof, so as to improve the lateral current spreading capability in the LED chip and improve the light emitting brightness of the LED chip.

In order to achieve the above purpose, the embodiments of the present application provide the following technical solutions:

An LED chip, comprising:

A substrate;

The epitaxial structure is positioned on the first surface of the substrate and comprises a first gallium nitride layer, an active layer and a second gallium nitride layer, and the doping types of the first gallium nitride layer and the second gallium nitride layer are different;

the current blocking layer is positioned in a preset area on one side, away from the substrate, of the second gallium nitride layer;

The composite film layer is positioned on one side, away from the second gallium nitride layer, of the current blocking layer and covers the second gallium nitride layer, the composite film layer comprises an ohmic contact layer, an insulating lattice layer and a first conducting layer which are stacked, and the insulating lattice layer comprises a plurality of discontinuous insulating units;

a first electrode is electrically connected with one side of the first gallium nitride layer, which is far away from the substrate;

And the side of the composite film layer, which is far away from the second gallium nitride layer, is electrically connected with a second electrode.

Optionally, the thickness of the ohmic contact layer ranges from 80 angstroms to 200 angstroms, inclusive; the light transmittance of the ohmic contact layer is more than 85%; the range of the resistivity of the ohmic contact layer is not more than 3.0 x 10^-4Ωcm；

The thickness value of the insulating dot matrix layer is less than 100 angstroms;

the thickness of the first conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive; the resistivity of the first conductive layer has a value range of 1.0 x 10^-4Ωcm～2.0*10^-4Ω cm, inclusive.

Optionally, the refractive index of the ohmic contact layer is smaller than the refractive index of the second gallium nitride layer and larger than the refractive index of the first conductive layer.

Optionally, the refractive index value range of the ohmic contact layer is 2.05-2.2, inclusive; the value range of the refractive index of the insulation dot matrix layer is 1.45-2.0, including the endpoint value; the refractive index value range of the first conducting layer is 1.85-1.95, inclusive.

Optionally, the composite film further includes a second conductive layer located between the insulating lattice layer and the first conductive layer, and a resistivity of the second conductive layer ranges from 7.0 × 10^-4～8.0*10^-4Ω cm, inclusive.

optionally, the refractive index of the second conductive layer is smaller than that of the ohmic contact layer and larger than that of the first conductive layer

Optionally, the thickness of the second conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive; the refractive index value range of the second conducting layer is 1.95-2.05.

optionally, the resistivity of the second conductive layer gradually decreases along a preset direction, wherein the preset direction is perpendicular to the plane of the second gallium nitride layer.

Optionally, the preset direction is directed to the first conductive layer from the ohmic contact layer.

the second aspect of the present application provides a method for manufacturing an LED chip, including:

Forming an epitaxial structure on a first surface of a substrate, wherein the epitaxial structure comprises a first gallium nitride layer, an active layer and a second gallium nitride layer, and the doping types of the first gallium nitride layer and the second gallium nitride layer are different;

forming a current blocking layer in a preset area on one side of the second gallium nitride layer, which is far away from the substrate;

Forming a composite film layer covering the second gallium nitride layer on one side, away from the second gallium nitride layer, of the current blocking layer, wherein the composite film layer comprises a laminated ohmic contact layer, an insulating lattice layer and a first conducting layer, and the insulating lattice layer comprises a plurality of discontinuous insulating units;

forming a first electrode electrically connected with the first gallium nitride layer on one side of the first gallium nitride layer, which is far away from the substrate;

And forming a second electrode which is electrically connected with the first conductive layer in the composite film layer on one side of the composite film layer, which is far away from the second gallium nitride layer.

optionally, forming a composite film layer covering the second gallium nitride layer on a side of the current blocking layer away from the second gallium nitride layer, where the side is located, includes:

Forming an ohmic contact layer covering the second gallium nitride layer on one side, away from the second gallium nitride layer, of the current blocking layer;

Forming an insulating lattice layer on one side of the ohmic contact layer, which is far away from the second gallium nitride layer, wherein the insulating lattice layer comprises a plurality of discontinuous insulating units;

Forming a first conductive layer on one side of the insulating lattice layer, which is far away from the ohmic contact layer;

Optionally, forming an ohmic contact layer covering the second gallium nitride layer on a side of the current blocking layer facing away from the second gallium nitride layer includes:

Depositing an ohmic contact layer on one side of the current blocking layer, which is far away from the second gallium nitride layer, by adopting a magnetron sputtering process, wherein the ohmic contact layer covers one side surface, which is far away from the active layer, of the second gallium nitride layer;

Using an annealing furnace at O₂/N₂And annealing the ohmic contact layer in the atmosphere to form good ohmic contact between the ohmic contact layer and the second gallium nitride layer.

Optionally, forming an insulating lattice layer on a side of the ohmic contact layer facing away from the second gallium nitride layer includes:

And (3) growing an oxide film on the surface of the ohmic contact layer on the side away from the second gallium nitride layer in an island shape by adopting a magnetron sputtering process to form a discontinuous lattice film so as to form a plurality of discontinuous insulation units, thus preparing the insulation lattice layer.

Optionally, forming a first conductive layer on a side of the insulating dot matrix layer facing away from the ohmic contact layer includes:

forming a first conducting layer on one side, away from the ohmic contact layer, of the insulation dot matrix layer by adopting a magnetron sputtering process, wherein the first conducting layer covers the surface of one side, away from the ohmic contact layer, of the insulation dot matrix layer and fills gaps among a plurality of insulation units in the insulation dot matrix layer;

using an annealing furnace at O₂/N₂And annealing the first conductive layer in the atmosphere to reduce the resistivity of the first conductive layer.

Optionally, before forming the first conductive layer on a side of the insulating dot matrix layer facing away from the ohmic contact layer, the method further includes:

and a second conducting layer is formed on one side, deviating from the ohmic contact layer, of the insulating dot matrix layer, the second conducting layer covers the insulating dot matrix layer and fills gaps between adjacent insulating units in the insulating dot matrix layer, and the first conducting layer is formed on the surface of one side, deviating from the ohmic contact layer, of the second conducting layer.

Compared with the prior art, in the LED chip provided in the embodiment of the present application, the second gallium nitride layer and the second electrode not only have the current blocking layer therebetween, but also have the composite film layer covering the surface of the second gallium nitride layer facing away from the active layer, wherein the composite film layer includes the ohmic contact layer, the insulating lattice layer and the first conductive layer which are stacked, so that when the first electrode and the second electrode are applied with voltage, the first conductive layer can be utilized to increase the current spreading capability of the LED chip along the second direction, the insulating lattice layer and the current blocking layer are utilized to reduce the current spreading capability of the LED chip along the first direction, the ohmic contact layer is utilized to enable the composite film layer and the second gallium nitride layer to have good ohmic contact performance, and further on the basis of not weakening the electrical connection performance between the second electrode and the second gallium nitride layer, the current below the second electrode in the LED chip provided by the embodiment of the application is reduced, the current in the light emitting area in the LED chip is increased, the light utilization rate in the LED chip is improved, and therefore the brightness of the LED chip is improved.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic diagram of a prior art LED chip;

Fig. 2 is a schematic structural diagram of an LED chip according to an embodiment of the present application;

FIG. 3 is a top view of an insulating lattice layer in an LED chip according to an embodiment of the present application;

Fig. 4 is a schematic structural diagram of an LED chip according to another embodiment of the present application;

Fig. 5 is a schematic structural diagram of an LED chip according to another embodiment of the present application;

fig. 6 is a flowchart of a method for manufacturing an LED chip according to an embodiment of the present application;

Fig. 7 to 14 are schematic structural diagrams after completion of each process step in a method for manufacturing an LED chip according to an embodiment of the present application.

Detailed Description

the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

As described in the background art, the brightness of the existing LED chip is to be improved.

As shown in fig. 1, the conventional LED chip includes, from bottom to top: the GaN-based light-emitting diode comprises a substrate 101, an N-type GaN layer 102, an active layer 103, a P-type GaN layer 104, a current expansion layer 105 electrically connected with the P-type GaN layer, a current blocking layer 106 positioned on the surface of the current expansion layer 105, a P electrode 107 covering the current blocking layer 106 and electrically connected with the current expansion layer 105, and an N electrode 108 electrically connected with the N-type GaN layer 102.

The inventor researches and discovers that the existing LED chip generally utilizes Indium Tin Oxide (ITO) as a current spreading layer to enable the current spreading layer to have good light transmittance and form good ohmic contact with a P-type GaN layer on the basis of expanding injected current and improving the brightness of the LED chip, and simultaneously utilizes silicon dioxide as a current blocking layer to block the vertical transmission of current in the LED chip so as to improve the brightness of the LED chip.

however, since the lateral expansion capability of the current expansion layer on the surface of the P-type gallium nitride layer is far inferior to the vertical expansion capability between the P-type gallium nitride layer and the N-type gallium nitride layer, even if the current blocking layer is arranged below the P-type electrode, the current injection path in the LED chip can only be changed from the a path to the B path, so that the improvement of the lateral expansion of the current of the LED chip is limited, and the light below the P electrode in the LED chip cannot be effectively utilized, which results in the limitation of the improvement of the brightness of the LED chip.

In view of the above, the present application provides an LED chip and a method for manufacturing the same. The LED chip and the manufacturing method thereof provided by the embodiments of the present application are described below with reference to the accompanying drawings.

Referring to fig. 2, an LED chip provided in an embodiment of the present application includes: substrate 1, epitaxial structure 2, current barrier layer 3, compound rete 4, first electrode 5, second electrode 6, wherein, epitaxial structure 2 includes: a first gallium nitride layer 21, an active layer 22, and a second gallium nitride layer 23, which are stacked, wherein the first gallium nitride layer 21 and the second gallium nitride layer 23 have different doping types; in particular, the method comprises the following steps of,

The substrate 1 is a base layer of the LED chip, and optionally, the substrate 1 is a sapphire substrate;

the first gallium nitride layer 21 is positioned on the first surface of the substrate 1;

The active layer 22 is positioned on the surface of one side of the first gallium nitride layer 21, which faces away from the substrate 1;

The second gallium nitride layer 23 is positioned on the surface of one side of the active layer 22, which faces away from the first gallium nitride layer 21;

The current blocking layer 3 is located in a preset area on one side of the second gallium nitride layer 23, which is far away from the active layer 22, and optionally, the current blocking layer 3 is SiO₂a thin film layer;

The composite film layer 4 is positioned on the surface of one side, away from the second gallium nitride layer 23, of the current blocking layer 3, and covers the second gallium nitride layer 23, wherein the composite film layer 4 comprises an ohmic contact layer 41, an insulating lattice layer 42 and a first conducting layer 43 which are stacked, and the insulating lattice layer 42 comprises a plurality of discontinuous insulating units;

the first electrode 5 is electrically connected with one side of the first gallium nitride layer 21, which is far away from the substrate 1;

And the second electrode 6 is electrically connected with one side of the composite film layer 4, which is far away from the second gallium nitride layer 23.

It should be noted that, in the embodiment of the present application, the orthographic projection of the second electrode 6 on the surface of the second gallium nitride layer 23 completely covers the orthographic projection of the current blocking layer 3 on the surface of the second gallium nitride layer 23, and the orthographic projection of the current blocking layer 3 on the surface of the second gallium nitride layer 23 is smaller than the orthographic projection of the second electrode 6 on the surface of the second gallium nitride layer 23, so as to ensure the electrical connection between the second electrode 6 and the second gallium nitride layer 23 on the basis of the current blocking effect achieved by the current blocking layer 3.

in addition to any of the above embodiments, in an embodiment of the present application, the first gallium nitride layer is an N-type gallium nitride layer, and the second gallium nitride layer is a P-type gallium nitride layer, but the present application is not limited thereto. The LED chip provided in the embodiment of the present application is described below by taking the first gallium nitride layer as an N-type gallium nitride layer and the second gallium nitride layer as a P-type gallium nitride layer as an example.

When the LED chip works specifically, voltage is applied to two ends of the first electrode and the second electrode, current flowing out of the second electrode enters the first conducting layer and expands along a first direction and a second direction, because the plane where the first conducting layer is located is all a conducting medium, the insulating lattice layer located below the first conducting layer comprises a plurality of insulating units, and the positions of the insulating units cannot pass current, so that after the current flowing out of the second electrode enters the first conducting layer, the expansion capacity along the second direction in the composite layer is larger than the expansion capacity along the first direction in the composite layer, after the current flowing out of the composite layer, the current located in a light-emitting area directly enters the second gallium nitride layer through an ohmic contact layer which has good ohmic contact with the second gallium nitride layer, and after the current located right below the second electrode passes through the ohmic contact layer, and the current blocking layer is used for secondary blocking and expanding along the second direction, so that the current expanding capability of the LED chip along the first direction is further reduced, and the current expanding capability of the LED chip along the second direction is improved. The first direction is perpendicular to the plane where the first conducting layer is located, and the second direction is parallel to the plane where the first conducting layer is located.

It can be seen that, in the LED chip according to the embodiment of the present application, not only the current blocking layer is disposed between the second gallium nitride layer and the second electrode, but also the composite film layer covering a surface of the second gallium nitride layer facing away from the active layer is disposed, wherein the composite film layer includes an ohmic contact layer, an insulating lattice layer and a first conductive layer, which are stacked, so that when a voltage is applied to the first electrode and the second electrode, the first conductive layer can be used to increase a current spreading capability of the LED chip along a second direction, the insulating lattice layer and the current blocking layer can be used to reduce a current spreading capability of the LED chip along a first direction, the ohmic contact layer can be used to make the composite film layer and the second gallium nitride layer have a good ohmic contact performance, and thus the electrical connection performance between the second electrode and the second gallium nitride layer is not reduced, the current below the second electrode in the LED chip provided by the embodiment of the application is reduced, the current in the light emitting area in the LED chip is increased, the light utilization rate in the LED chip is improved, and therefore the brightness of the LED chip is improved.

On the basis of the above embodiments, in an embodiment of the present application, the material of the ohmic contact layer is a low-resistance high-transmittance material, and optionally, the light transmittance of the ohmic contact layer is greater than 85%; the range of the resistivity of the ohmic contact layer is not more than 3.0 x 10^-4omega cm. Optionally, the light transmittance of the ohmic contact layer is greater than 96%, but this is not limited in this application, as the case may be. The light transmittance of the ohmic contact layer refers to the light transmittance of the ohmic contact layer in the visible light wavelength range; denotes multiplication.

specifically, in an embodiment of the present application, the material of the ohmic contact layer is ITO, ZnO, IWO, IMO, or the like, which is not limited in the present application, as the case may be.

Optionally, on the basis of any of the above embodiments, in an embodiment of the present application, a forming process of the ohmic contact layer is a magnetron sputtering process, and no O is introduced during the forming process of the ohmic contact layer₂To lowerThe resistivity of the ohmic contact layer is low.

in an embodiment of the present application, based on any one of the embodiments, the resistivity of the ohmic contact layer ranges from 2.0 x 10^-4Ωcm～3.0*10^-4Ω cm, inclusive; the refractive index of the ohmic contact layer is 2.05-2.2 inclusive.

On the basis of any one of the above embodiments, in an embodiment of the present application, a thickness of the ohmic contact layer ranges from 80 angstroms to 200 angstroms, inclusive, so as to avoid that the thickness of the ohmic contact layer is too small to form ohmic contact with the second gallium nitride layer, and at the same time, to avoid that the thickness of the ohmic contact layer is too large to affect the light transmittance of the LED chip.

On the basis of any one of the above embodiments, the insulating dot matrix layer is made of an oxide with high resistance and high transmittance, and specifically, in an embodiment of the present application, the insulating dot matrix layer is made of SiO₂、Al₂O₃、HfO₂Or VO₂The present application is not limited to these examples, as appropriate.

on the basis of the above embodiment, in an embodiment of the present application, the thickness of the insulating dot matrix layer is less than 100 angstroms, optionally, the thickness of the insulating dot matrix layer ranges from 30 angstroms to 80 angstroms, inclusive, so as to avoid that the conductivity of the composite film layer is affected by too large thickness of the insulating dot matrix layer, and at the same time, to avoid that the current blocking effect cannot be achieved by too small thickness of the insulating dot matrix layer; the value range of the refractive index of the insulation lattice layer is 1.45-2.0, including the endpoint value.

on the basis of any of the above embodiments, in an embodiment of the present application, as shown in fig. 3, the insulating lattice layer is an insulating island-shaped lattice structure, wherein the shape of the insulating unit may be a sphere, a cylinder, a cone, and the like, which is not limited in the present application as long as there is no discontinuity between adjacent insulating units.

on the basis of any one of the above embodiments, in an embodiment of the present application, the material of the first conductive layer is a low-resistance high-penetration material, and optionally, the material of the first conductive layer is metal-doped indium oxide (IWO) to reduce the resistivity of the first conductive layer, and optionally, the mass ratio of the metal element in the first conductive layer ranges from 1% to 5%, including an end point value, so as to avoid that the mass ratio of the metal element is too low and affects the conductivity of the first conductive layer, and at the same time, avoid that the mass ratio of the metal element is too high and affects the penetration of the LED chip, and specifically, the metal doped in the first conductive layer may be tungsten, molybdenum, silver, aluminum, and the like.

On the basis of the above embodiments, in an embodiment of the present application, a forming process of the first conductive layer is a magnetron sputtering process, and during the forming process of the first conductive layer, no O is introduced₂To reduce the resistivity of the first conductive layer. In particular, in one embodiment of the present application, the resistivity of the first conductive layer is less than 3.0 x 10^-4Ω cm, optionally, the resistivity of the first conductive layer ranges from 1.0 × 10^-4Ωcm～2.0*10^-4Ω cm, inclusive.

On the basis of the above embodiments, in an embodiment of the present application, a thickness of the first conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive, so as to avoid that the thickness of the first conductive layer is too small, so that the resistivity of the first conductive layer is relatively large, and at the same time, to avoid that the thickness of the first conductive layer is too large, which affects the light transmittance of the LED chip; the value range of the refractive index of the first conducting layer is 1.85-1.95.

On the basis of any one of the above embodiments, in an embodiment of the present application, the refractive index of the ohmic contact layer is smaller than the refractive index of the second gallium nitride layer, so as to achieve a light antireflection effect on the contact surface between the ohmic contact layer and the second gallium nitride layer, and increase the amount of light entering the ohmic contact layer from the second gallium nitride layer.

on the basis of any of the foregoing embodiments, in an embodiment of the present application, a refractive index of the first conductive layer is smaller than a refractive index of the ohmic contact layer, so as to achieve a light antireflection effect on a contact surface of the first conductive layer and the ohmic contact layer, and increase an amount of light entering the first conductive layer by the ohmic contact layer.

on the basis of any of the above embodiments, in an embodiment of the present application, as shown in fig. 4, the composite film layer 4 further includes: the second conducting layer 44 is located between the insulating dot matrix layer 42 and the first conducting layer 43, the second conducting layer 44 covers the insulating dot matrix layer 42, gaps between adjacent insulating units in the insulating dot matrix layer 42 are filled, the first conducting layer 43 is formed on the surface of the second conducting layer 44 on the side away from the ohmic contact layer 41, and optionally, the resistivity of the second conducting layer 44 is greater than that of the first conducting layer 43.

In this embodiment of the application, the resistivity of the second conductive layer is greater than the resistivity of the first conductive layer, so that the rate of transmission of the current in the first conductive layer to the second conductive layer is reduced, the time of transverse transmission of the current in the first conductive layer is further increased, the current spreading capability of the LED chip in the second direction is improved, and the light emitting efficiency of the LED chip is further increased.

It should be noted that, in the embodiment of the present application, the material of the second conductive layer is a high-resistance and high-transmittance material, and optionally, the material of the second conductive layer is ITO.

on the basis of any one of the above embodiments, in an embodiment of the present application, a forming process of the second conductive layer is a magnetron sputtering process, and O is introduced during the forming process of the second conductive layer₂and the resistivity of the second conducting layer is increased, and the expansion rate of the current flowing out of the first conducting layer after entering the second conducting layer is reduced. Specifically, in one embodiment of the present application, the resistivity of the second conductive layer ranges from 7.0 x 10^-4～8.0*10^-4Ω cm, inclusive. However, the present application is not limited thereto, as the case may be.

optionally, in an embodiment of the present application, during the forming of the second conductive layer, O is introduced₂The quantity changes gradually, so that the resistivity of the second conducting layer is reduced gradually along the preset direction, the resistivity in the composite film layer changes smoothly, the uniformity of light emitting of the LED chip is improved, and the phenomenon that the current expansion effect of the LED chip is influenced due to the fact that the resistivity in the composite film layer changes greatly is avoided.

On the basis of the above embodiment, in an embodiment of the present application, the preset direction is from the ohmic contact layer to the first conductive layer, so that in the formation process of the second conductive layer, the resistivity of the second conductive layer is gradually reduced, so that the resistivity variation trends among the insulation dot matrix layer, the second conductive layer and the first conductive layer in the composite film layer are the same, and the influence on the current spreading effect of the composite film layer due to different resistivity variation trends among the film layers in the composite film layer is avoided.

On the basis of the above embodiments, in an embodiment of the present application, during the formation of the second conductive layer, O is introduced₂The amount is gradually decreased from 50sccm to 5sccm, but the present application is not limited thereto, as the case may be.

On the basis of any of the foregoing embodiments, in an embodiment of the present application, a thickness of the second conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive, and may be 600 angstroms to 1000 angstroms, inclusive, so as to avoid that the thickness of the second conductive layer is too large, which affects a light transmission effect of the LED chip, and at the same time, avoid that the thickness of the second conductive layer is too small, which affects a blocking effect of the second conductive layer on a current flowing out of the first conductive layer along the first direction; the value range of the refractive index of the first conducting layer is 1.95-2.05, and the value range does not include the endpoint value.

Compared with the ITO conductive layer of the second conductive layer, the crystallization temperature of the first conductive layer is lower, so that the resistivity of the first conductive layer can be effectively reduced, the resistivity of the second conductive layer is not excessively reduced, the current expansion capability of the composite film layer along the second direction is effectively improved, and the current expansion capability of the LED chip along the second direction is finally improved.

on the basis of any one of the foregoing embodiments, in an embodiment of the present application, when the composite film layer includes a second conductive layer, a refractive index of the second conductive layer is smaller than a refractive index of the ohmic contact layer, so as to achieve a light antireflection effect on a contact surface between the second conductive layer and the ohmic contact layer, and increase an amount of light entering the second conductive layer by the ohmic contact layer.

similarly, the refractive index of the second conductive layer is greater than that of the first conductive layer, so that light antireflection effect is achieved on the contact surface of the second conductive layer and the first conductive layer, and the quantity of light entering the first conductive layer from the second conductive layer is increased.

On the basis of any one of the above embodiments, in an embodiment of the present application, the first electrode is formed by one or more of metals such as Ni, Cr, Al, Ti, Pt, Au, and Ag; similarly, the second electrode is formed by one or more of metals such as Ni, Cr, Al, Ti, Pt, Au and Ag; the present application is not limited thereto, as the case may be.

On the basis of any of the above embodiments, in an embodiment of the present application, as shown in fig. 5, the LED chip further includes: a passivation layer 7 covering the composite film layer 4 and the first gallium nitride layer 2, the passivation layer 7 having a first opening and a second opening, wherein the first opening exposes the first electrode 5, and the second opening exposes the second electrode 6, so that the LED chip is electrically connected to other structures through the first electrode 5 and the second electrode 6.

specifically, in one embodiment of the invention, the passivation layer is a1₂O₃And the refractive index of the passivation layer ranges from 1.63 to 1.77 inclusive. However, the present application is not limited thereto, as the case may be.

continuing with fig. 5, fig. 5 shows a current transmission path diagram in the LED chip provided in the embodiment of the present application, and it can be seen from the diagram that, in the LED chip provided in the embodiment of the present application, most of the current is transmitted downward in the light emitting region between the first electrode 5 and the second electrode 6, and the current distribution in the light emitting region is relatively uniform, so that not only the light emitting brightness of the light emitting region of the LED chip can be improved, but also the uniformity of the emergent light of the light emitting region of the LED chip can be improved.

To sum up, in the LED chip provided in the embodiment of the present application, the second gallium nitride layer 23 and the second electrode 6 not only have the current blocking layer 3 therebetween, but also have the composite film layer 4 covering the second gallium nitride layer 23 deviating from the surface of one side of the active layer 22, so that when the first electrode 5 and the second electrode 6 apply voltage, the composite film layer 4 can be utilized to increase the lateral power expansion capability of the LED chip, weaken the longitudinal expansion capability of the LED chip, increase the probability that the current in the LED chip is transmitted downwards in the light emitting region of the LED chip, improve the light emitting efficiency and the light emitting brightness of the light emitting region of the LED chip, and further block the current under the second electrode 6 from being transmitted downwards by utilizing the current blocking layer 3, so that the current is transmitted transversely to the light emitting region of the LED chip, and reduce the light loss under the second electrode 6, and improving the light utilization rate of the LED chip, and finally improving the luminous brightness of the LED chip.

Correspondingly, an embodiment of the present application further provides a manufacturing method of an LED chip, which is used for manufacturing the LED chip provided in any of the above embodiments, optionally, the LED chip is a GaN-based large-size LED chip, but the present application does not limit this, and the method is specifically determined according to the circumstances.

Specifically, as shown in fig. 6, a method for manufacturing an LED chip provided in the embodiment of the present application includes:

S201: forming an epitaxial structure on a first surface of a substrate, wherein the epitaxial structure comprises a first gallium nitride layer, an active layer and a second gallium nitride layer, and the doping types of the first gallium nitride layer and the second gallium nitride layer are different; optionally, the substrate is a sapphire substrate, but the present application does not limit this, as the case may be.

specifically, in one embodiment of the present application, forming an epitaxial structure on a first surface of a substrate includes:

Referring to fig. 7, a first gallium nitride layer 21 is formed on a first surface of the substrate 1, an active layer 22 is formed on a side of the first gallium nitride layer 21 facing away from the substrate 1, and a second gallium nitride layer 23 is formed on a side of the active layer 22 facing away from the first gallium nitride layer 21;

referring to fig. 8, a first region of the second gallium nitride layer 23 and the active layer 22 is etched to expose the first gallium nitride layer 21, wherein the first region is used for forming a first electrode later.

It should be noted that, in this embodiment of the application, the etching depth of the first region may be the sum of the thicknesses of the second gallium nitride layer and the active layer, or may be greater than the sum of the thicknesses of the second gallium nitride layer and the active layer, and less than the sum of the thicknesses of the second gallium nitride layer, the active layer, and the first gallium nitride layer, which is not limited in this application, as long as the portion of the first gallium nitride layer located in the first region is exposed, so as to be formed subsequently on the first electrode electrically connected to the first gallium nitride layer.

optionally, in an embodiment of the present application, etching the second gallium nitride layer and the first region of the active layer includes: in another embodiment of the present application, the etching the second gallium nitride layer and the first region of the active layer by using a photolithography process includes: and etching the second gallium nitride layer and the first region of the active layer by using an Inductively Coupled Plasma (ICP) etching process, which may also be performed by using other processes in other embodiments of the present application, and this is not limited in this application, and is specifically determined according to the circumstances.

In addition to any of the above embodiments, in an embodiment of the present application, the first gallium nitride layer is an N-type gallium nitride layer, and the second gallium nitride layer is a P-type gallium nitride layer, but the present application is not limited thereto.

the method for manufacturing the LED chip according to the embodiment of the present application is described below by taking the first gallium nitride layer as an N-type gallium nitride layer and the second gallium nitride layer as a P-type gallium nitride layer as an example.

s202: referring to fig. 9, a current blocking layer 3 is formed in a predetermined region of the second gallium nitride layer 23 on a side facing away from the substrate 1.

It should be noted that, in this embodiment of the application, the current blocking layer 3 is used to block the current injected from the side of the current blocking layer 3 departing from the second gallium nitride layer 23 from being transmitted to the second gallium nitride layer 23, so as to weaken the current spreading capability of the LED chip along the first direction, reduce the current under the current blocking layer 3, that is, reduce the current under the second electrode formed subsequently, thereby reduce the light loss in the area where the second electrode is located, and improve the light utilization rate of the LED chip.

Specifically, in an embodiment of the present application, the forming a current blocking layer in a predetermined region of a side of the second gallium nitride layer facing away from the substrate includes:

Forming a preset current blocking layer on one side of the second gallium nitride layer, which is far away from the active layer, wherein optionally, the forming process of the preset current blocking layer is a PECVD (plasma enhanced chemical vapor deposition) process;

And etching the preset current blocking layer, and reserving only the part of the preset current blocking layer positioned in the preset area to form the current blocking layer.

it should be noted that, in the embodiment of the present application, the preset region is located in a region where the second electrode is subsequently formed, and an area of the preset region is smaller than an area of the region where the second electrode is subsequently formed.

optionally, the current blocking layer is SiO₂The present application is not limited to this, and the film layer may be used as appropriate.

s203: referring to fig. 10, on the side of the current blocking layer 3 facing away from the second gallium nitride layer 23, a composite film layer 4 is formed covering the second gallium nitride layer 23; the composite film layer 3 comprises an ohmic contact layer 41, an insulating lattice layer 42 and a first conducting layer 43 which are laminated; wherein the insulation lattice layer 42 includes a plurality of discontinuous insulation units.

Specifically, in an embodiment of the present application, forming the composite film layer 4 covering the second gallium nitride layer 23 on a side of the current blocking layer 3 facing away from the second gallium nitride layer 23 includes:

S2031: on the side of the current blocking layer 3 facing away from the second gallium nitride layer 23, an ohmic contact layer 41 is formed covering the second gallium nitride layer 23.

it should be noted that, in the embodiment of the present application, the material of the ohmic contact layer is a low-resistance high-transmittance material, and optionally, the light transmittance of the ohmic contact layer is greater than 85%; the range of the resistivity of the ohmic contact layer is not more than 3.0 x 10^-4Omega cm. Optionally, the light transmittance of the ohmic contact layer is greater than 96%, but this is not limited in this application, as the case may be. The light transmittance of the ohmic contact layer refers to the light transmittance of the ohmic contact layer in the visible light wavelength range.

Specifically, in an embodiment of the present application, the material of the ohmic contact layer is ITO, ZnO, IWO, IMO, or the like, which is not limited in the present application, as the case may be.

Optionally, in an embodiment of the present application, forming an ohmic contact layer 41 covering the second gallium nitride layer 23 on a side of the current blocking layer 3 facing away from the second gallium nitride layer 23 includes:

Depositing an ohmic contact layer 41 on the side, away from the second gallium nitride layer 23, of the current blocking layer 3 by adopting a magnetron sputtering process, wherein the ohmic contact layer 41 covers the surface of the side, away from the active layer 22, of the second gallium nitride layer 23;

By means of an annealing furnace (e.g. a flash annealing furnace) in O₂/N₂In atmosphere pairAnd annealing the ohmic contact layer to form good ohmic contact between the ohmic contact layer and the second gallium nitride layer, wherein the annealing temperature is selected from the range of 530-570 ℃ inclusive.

Specifically, in an embodiment of the present application, when an ohmic contact layer is deposited on a side of the current blocking layer away from the second gallium nitride layer by using a magnetron sputtering process, process parameters include: the DC power value range is 60W-250W, including the endpoint value; the RF power range is 180W-750W, including the endpoint value; the distance between the target and the epitaxial structure ranges from 100mm to 200mm, including end points; the value range of the introduced Ar gas flow is 70 sccm-120 sccm, including endpoint values; the rotating speed of a wafer carrying disc for carrying the substrate is less than 0.2 m/min; background vacuum of 3.0E-6 mbar; the deposition temperature of the ohmic contact layer ranges from 0 ℃ to 180 ℃, inclusive.

It is noted that O is not introduced when the magnetron sputtering process is adopted to deposit the ohmic contact layer on the side of the current barrier layer away from the second gallium nitride layer₂To reduce the resistivity of the ohmic contact layer. Optionally, the ohmic contact layer has a resistivity of less than 5.0 x 10 before annealing^-4Ω cm, and a resistivity of less than 3.0 × 10-4 Ω cm after annealing, and in one embodiment of the present application, the resistivity of the ohmic contact layer before annealing ranges from 4.0 × 10^-4Ωcm～5.0*10^-4Omega cm, including end point values, the range of resistivity after annealing is 2.0 x 10^-4Ωcm～3.0*10^-4Ω cm, inclusive.

On the basis of the above embodiments, in an embodiment of the present application, a thickness of the ohmic contact layer ranges from 80 angstroms to 200 angstroms, inclusive, so as to avoid that the thickness of the ohmic contact layer is too small to form ohmic contact with the second gallium nitride layer, and at the same time, to avoid that the thickness of the ohmic contact layer is too large to affect the light transmittance of the LED chip; the refractive index of the ohmic contact layer is 2.05-2.2.

S2032: an insulating lattice layer 42 is formed on the side of the ohmic contact layer 41 facing away from the second gallium nitride layer 4, and the insulating lattice layer 42 includes a plurality of discontinuous insulating units.

it should be noted that, in the embodiment of the present application, the insulating dot matrix layer is made of an oxide with high resistance and high transmittance, and specifically, in an embodiment of the present application, the material of the insulating dot matrix layer is SiO₂、Al₂O₃、HfO₂Or VO₂the present application is not limited to these examples, as appropriate.

optionally, in an embodiment of the present application, forming the insulating lattice layer 42 on a side of the ohmic contact layer 41 facing away from the second gallium nitride layer 23 includes: and (3) growing an oxide film on the surface of the ohmic contact layer on the side away from the second gallium nitride layer in an island shape by adopting a magnetron sputtering process to form a discontinuous lattice film so as to form a plurality of discontinuous insulation units, thus preparing the insulation lattice layer. Specifically, a magnetron sputtering process is adopted, an oxide film grows in an island shape on the surface of one side, away from the second gallium nitride layer, of the ohmic contact layer at a high deposition rate, a discontinuous lattice film is formed, a plurality of discontinuous insulation units are formed, and the insulation lattice layer is manufactured. However, the present application is not limited thereto, and in other embodiments of the present application, the formation process of the insulating lattice layer may also be a chemical vapor deposition process, as the case may be.

Optionally, the process parameters when the insulating lattice layer is formed include: the distance from the target to the surface of the ohmic contact layer ranges from 100mm to 200mm, including the end point values; the rotating speed of a slide glass disc bearing the substrate is more than 2 m/min; background vacuum of 3.0E-6 mbar; the DC power value range is 100W-500W including end point value, the RF power value range is 300W-1500W including end point value, and the deposition rate is larger than 10A/s; the deposition temperature ranges from 120 ℃ to 260 ℃, inclusive.

On the basis of the above embodiment, in an embodiment of the present application, the thickness of the insulating dot matrix layer is less than 100 angstroms, optionally, the thickness of the insulating dot matrix layer ranges from 30 angstroms to 80 angstroms, inclusive, so as to avoid that the conductivity of the composite film layer is affected by too large thickness of the insulating dot matrix layer, and at the same time, to avoid that the current blocking effect cannot be achieved by too small thickness of the insulating dot matrix layer; the refractive index value range of the insulation lattice layer is 1.45-2.0, including the end points.

S2033: a first conductive layer 43 is formed on the side of the insulating dot matrix layer 42 facing away from the ohmic contact layer 41.

It should be noted that, in this embodiment of the application, the material of first conducting layer is the material of low resistance high transmissivity, and is optional, the material of first conducting layer is indium oxide (IWO) of doping metal to reduce the resistivity of first conducting layer, and is optional, the mass ratio value range of metallic element in the first conducting layer is 1% ~ 5%, including the endpoint value, in order to avoid metallic element's mass ratio is too low, influences the electric conductivity of first conducting layer, simultaneously, avoids metallic element's mass ratio is too high, influences the penetrability of LED chip, and is specific, the metal of doping in the first conducting layer can be tungsten, molybdenum, silver, aluminium etc..

optionally, in an embodiment of the present application, forming the first conductive layer 43 on a side of the insulating dot matrix layer 42 facing away from the ohmic contact layer 41 includes:

forming a first conducting layer on one side, away from the ohmic contact layer, of the insulation dot matrix layer by adopting a magnetron sputtering process, wherein the first conducting layer covers the surface of one side, away from the ohmic contact layer, of the insulation dot matrix layer and fills gaps among a plurality of insulation units in the insulation dot matrix layer;

By means of an annealing furnace (e.g. a flash annealing furnace) in O₂/N₂and annealing the first conducting layer in the atmosphere to reduce the resistivity of the first conducting layer and obtain the first conducting layer with lower resistivity, wherein the annealing temperature is selected from the range of 200-450 ℃ inclusive.

Specifically, in an embodiment of the present application, when a magnetron sputtering process is used to form the first conductive layer on the side of the insulating dot matrix layer away from the ohmic contact layer, the process parameters include: the DC power value range is 150W-450W, including the endpoint value; the range of the RF power is 450W-1350W, including the endpoint value; the distance between the target and the insulation dot matrix layer ranges from 70mm to 200mm, including the end point values; the value range of the introduced Ar gas flow is 100 sccm-180 sccm, including endpoint values; the rotating speed of a slide plate for bearing the substrate is less than 0.2 m/min; background vacuum of 3.0E-6 mbar; the deposition temperature of the first conductive layer ranges from 0 ℃ to 180 ℃, inclusive.

It is noted that O is not introduced when the magnetron sputtering process is adopted to form the first conducting layer on the side of the insulating dot matrix layer departing from the ohmic contact layer₂To reduce the resistivity of the first conductive layer. Optionally, the resistivity of the first conductive layer before annealing is less than 5.0 x 10^-4Ω cm, inclusive, and a post-anneal resistivity of less than 3.0 × 10-4 Ω cm, inclusive, and in particular, in one embodiment of the present application, the first conductive layer has a pre-anneal resistivity in a range of 3.0 × 10^-4Ωcm～4.0*10^-4Omega cm, including end point values, the range of resistivity after annealing is 1.0 x 10^-4Ωcm～2.0*10^-4Ω cm, inclusive.

On the basis of the above embodiments, in an embodiment of the present application, a thickness of the first conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive, so as to avoid that the thickness of the first conductive layer is too small, so that the resistivity of the first conductive layer is relatively large, and at the same time, to avoid that the thickness of the first conductive layer is too large, which affects the light transmittance of the LED chip; the refractive index of the first conducting layer ranges from 1.85 to 1.95 inclusive.

On the basis of any one of the above embodiments, in an embodiment of the present application, the refractive index of the ohmic contact layer is smaller than the refractive index of the second gallium nitride layer, so as to achieve a light antireflection effect on the contact surface between the ohmic contact layer and the second gallium nitride layer, and increase the amount of light entering the ohmic contact layer from the second gallium nitride layer.

On the basis of any of the foregoing embodiments, in an embodiment of the present application, a refractive index of the first conductive layer is smaller than a refractive index of the ohmic contact layer, so as to achieve a light antireflection effect on a contact surface of the first conductive layer and the ohmic contact layer, and increase an amount of light entering the first conductive layer by the ohmic contact layer.

On the basis of any of the above embodiments, in an embodiment of the present application, before forming the first conductive layer 43 on the side of the insulating dot matrix layer 42 facing away from the ohmic contact layer 41, the method further includes:

as shown in fig. 11, a second conductive layer 44 is formed on a side of the insulating dot matrix layer 42 away from the ohmic contact layer 41, the second conductive layer 44 covers the insulating dot matrix layer 42 and fills gaps between adjacent insulating units in the insulating dot matrix layer 42, and the first conductive layer 43 is formed on a side surface of the second conductive layer 44 away from the ohmic contact layer 41. It should be noted that, in the embodiment of the present application, the material of the second conductive layer is a high-resistance and high-transmittance material, and optionally, the material of the second conductive layer is ITO.

Optionally, in an embodiment of the present application, forming a second conductive layer on a side of the insulating dot matrix layer facing away from the ohmic contact layer includes:

And forming a second conducting layer on one side of the insulating dot matrix layer, which deviates from the ohmic contact layer, by adopting a magnetron sputtering process, covering the surface of one side of the insulating dot matrix layer, which deviates from the ohmic contact layer, and filling gaps among a plurality of insulating units in the insulating dot matrix layer.

specifically, in an embodiment of the present application, when a magnetron sputtering process is used to form the second conductive layer on the side of the insulating dot matrix layer away from the ohmic contact layer, the process parameters include: the DC power value range is 0.5 kW-1.5 kW, including the endpoint value; the RF power value range is 1.5kW to 4.5kW, inclusive; the distance between the target and the insulation dot matrix layer ranges from 50mm to 100mm, including the end point values; the value range of the introduced Ar gas flow is 100 sccm-200 sccm, including end point values; the rotating speed of a wafer carrying disc for carrying the substrate is more than 0.2 m/min; background vacuum of 3.0E-6 mbar; the deposition temperature of the second conductive layer ranges from 50 ℃ to 180 ℃, inclusive.

It is noted that O is introduced when a magnetron sputtering process is adopted to form a second conducting layer on the side of the insulation dot matrix layer departing from the ohmic contact layer₂and the resistivity of the second conducting layer is increased, and the expansion rate of the current flowing out of the first conducting layer after entering the second conducting layer is reduced. Specifically, in one embodiment of the present application, the resistivity of the second conductive layer has a value in a range of 7 × 10^-4Ωcm～8*10^-4Ω cm, inclusive, but this is not a limitation of the present application, as the case may be.

optionally, in this embodiment, in the forming process of the second conductive layer, O is introduced₂The quantity gradually changes, so that the resistivity of the second conducting layer is gradually reduced along the preset direction, the resistivity in the composite film layer changes smoothly, the uniformity of light emitting of the LED chip is improved, and the phenomenon that the current expansion effect of the LED chip is influenced due to the fact that the resistivity in the composite film layer changes greatly is avoided.

On the basis of the above embodiment, in an embodiment of the present application, the preset direction is from the ohmic contact layer to the first conductive layer, so that in the formation process of the second conductive layer, the resistivity of the second conductive layer is gradually reduced, so that the resistivity variation trends among the insulation dot matrix layer, the second conductive layer and the first conductive layer in the composite film layer are the same, and the influence on the current spreading effect of the composite film layer due to different resistivity variation trends among the film layers in the composite film layer is avoided.

on the basis of the above embodiments, in an embodiment of the present application, during the formation of the second conductive layer, O is introduced₂the amount is gradually decreased from 50sccm to 5sccm, but the present application is not limited thereto, as the case may be.

on the basis of any of the foregoing embodiments, in an embodiment of the present application, a thickness of the second conductive layer ranges from 200 angstroms to 1000 angstroms, inclusive, and may be 600 angstroms to 1000 angstroms, inclusive, so as to avoid that the thickness of the second conductive layer is too large, which affects a light transmission effect of the LED chip, and at the same time, avoid that the thickness of the second conductive layer is too small, which affects a blocking effect of the second conductive layer on a current flowing out of the first conductive layer along the first direction; the value range of the refractive index of the second conducting layer is 1.95-2.05, and the value range does not include the endpoint value.

compared with the ITO conductive layer of the second conductive layer, the crystallization temperature of the first conductive layer is lower, so that the resistivity of the first conductive layer can be effectively reduced, the resistivity of the second conductive layer is not excessively reduced, the current expansion capability of the composite film layer along the second direction is effectively improved, and the current expansion capability of the LED chip along the second direction is finally improved.

on the basis of any one of the foregoing embodiments, in an embodiment of the present application, when the composite film layer includes a second conductive layer, a refractive index of the second conductive layer is smaller than a refractive index of the ohmic contact layer, so as to achieve a light antireflection effect on a contact surface between the second conductive layer and the ohmic contact layer, and increase an amount of light entering the second conductive layer by the ohmic contact layer.

Similarly, the refractive index of the second conductive layer is greater than that of the first conductive layer, so that light antireflection effect is achieved on the contact surface of the second conductive layer and the first conductive layer, and the quantity of light entering the first conductive layer from the second conductive layer is increased.

S204: referring to fig. 12, a first electrode 5 electrically connected to the first gallium nitride layer 21 is formed on a side of the first gallium nitride layer 21 facing away from the substrate 1.

Specifically, in an embodiment of the present application, forming the first electrode 5 electrically connected to the first gallium nitride layer 21 on a side of the first gallium nitride layer 21 away from the substrate 1 includes:

By utilizing a yellow light process, photoresist is homogenized on one side of the first gallium nitride layer, which is far away from the substrate, so as to form photoresist, and the photoresist is exposed and developed, so as to form a mask plate;

Evaporating a first electrode electrically connected with the first gallium nitride layer on one side of the first gallium nitride layer, which is far away from the substrate, by taking the mask plate as a mask;

And removing the mask.

Optionally, in an embodiment of the present application, the first electrode is formed of one or more of Ni, Cr, Al, Ti, Pt, Au, and Ag; the present application is not limited thereto, as the case may be.

S205: referring to fig. 13, a second electrode 6 electrically connected to the first conductive layer 43 in the composite film layer 4 is formed on a side of the composite film layer 4 facing away from the second gallium nitride layer 23.

Specifically, in one embodiment of the present application, the forming of the second electrode 6 electrically connected to the first conductive layer 43 in the composite film layer 4 on the side of the composite film layer 4 away from the second gallium nitride layer 23 includes:

By utilizing a yellow light process, glue is uniformly distributed on one side of the first conducting layer, which is far away from the second gallium nitride layer, so that photoresist is formed, and the photoresist is exposed and developed to form a mask;

Evaporating a second electrode electrically connected with the first conductive layer on one side, away from the second gallium nitride layer, of the first conductive layer by taking the mask plate as a mask;

and removing the mask.

Optionally, in an embodiment of the present application, the second electrode is formed of one or more of Ni, Cr, Al, Ti, Pt, Au, and Ag; the present application is not limited thereto, as the case may be.

On the basis of any of the above embodiments, in an embodiment of the present application, the first electrode and the second electrode are formed in the same process to simplify a manufacturing method of the LED chip, but the present application does not limit this method, as the case may be.

S206: referring to fig. 14, a passivation layer 7 is formed to cover the composite film layer 4 and the first gallium nitride layer 21, and the passivation layer has a first opening and a second opening, wherein the first opening exposes the first electrode 5, and the second opening exposes the second electrode 6, so that the LED chip is electrically connected to other structures through the first electrode 5 and the second electrode 6.

Specifically, in an embodiment of the present application, forming a passivation layer 7 covering the composite film layer 4 and the first gallium nitride layer 21, where the passivation layer 7 has a first opening and a second opening, where the first opening exposes the first electrode 5, and the second opening exposes the second electrode 6 includes:

Forming a passivation layer on one side of the second electrode, which faces away from the composite film layer, wherein the passivation layer covers the composite film layer, the second gallium nitride layer, the first electrode and the second electrode;

And etching the passivation layer to form a first opening and a second opening, wherein the first opening exposes the first electrode, and the second opening exposes the second electrode.

optionally, in an embodiment of the invention, forming a passivation layer on a side of the second electrode facing away from the composite film layer includes:

And forming a passivation layer on one side of the second electrode, which is far away from the composite film layer, by adopting an electron beam evaporation process and an ion beam assisted evaporation process. Specifically, in one embodiment of the invention, the passivation layer is a1₂O₃And passivating, wherein the refractive index of the passivation layer ranges from 1.63 to 1.77 inclusive.

in the LED chip manufactured by the method for manufacturing an LED chip provided in the embodiment of the present application, the second gallium nitride layer and the second electrode not only have a current blocking layer therebetween, but also have a composite film layer covering a surface of the second gallium nitride layer facing away from a side of the active layer, so that when a voltage is applied to the first electrode and the second electrode, the composite film layer can be used to increase a lateral current spreading capability of the LED chip, reduce a longitudinal spreading capability of the LED chip, increase a probability that a current in the LED chip is transmitted downward in a light emitting region of the LED chip, improve a light emitting efficiency and a light emitting luminance of the light emitting region of the LED chip, further block the current under the second electrode from being transmitted downward by using the current blocking layer, so that the current is transmitted laterally to the light emitting region of the LED chip, and reduce light loss under the second electrode, and improving the light utilization rate of the LED chip, and finally improving the luminous brightness of the LED chip.

The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, as for the method embodiment, since it is basically similar to the composition structure embodiment, the description is simple, and the relevant points can be referred to the partial description of the composition structure embodiment. Wherein, some or all of the modules can be selected according to actual needs to achieve the purpose of the scheme of the embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.

the previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.