阅读说明：本技术 激光打标设备 (Laser marking device ) 是由 欧阳耀河 吴烈 陶灵慧 王兴开 齐向前 石德龙 褚彦博 胡东明 沈明 曾金策 高 于 2020-06-17 设计创作，主要内容包括：本发明公开了一种激光打标设备,包括机架、第一定位机构和定位打标机构,第一定位机构包括定位基板、夹紧定位板和夹紧驱动件,所述定位基板连接于所述机架,所述定位基板上设有镂空区,所述镂空区用于露出衬底上的产品；所述夹紧驱动件连接于所述夹紧定位板,且用于驱动所述夹紧定位板沿第一方向靠近或者远离所述定位基板；定位打标机构设置于所述定位基板远离所述夹紧定位板的一侧,所述定位打标机构包括视觉定位组件和激光打标组件,所述视觉定位组件用于对所述镂空区的产品进行视觉定位,所述激光打标组件与所述视觉定位组件信号连接,且用于对所述镂空区的产品进行激光打标。本发明的激光达标设备能够提高打标精度。(The invention discloses laser marking equipment which comprises a rack, a first positioning mechanism and a positioning and marking mechanism, wherein the first positioning mechanism comprises a positioning base plate, a clamping and positioning plate and a clamping and driving piece, the positioning base plate is connected with the rack, and a hollowed-out area is arranged on the positioning base plate and used for exposing a product on a substrate; the clamping driving piece is connected to the clamping positioning plate and used for driving the clamping positioning plate to approach or depart from the positioning substrate along a first direction; positioning and marking mechanism set up in the location base plate is kept away from press from both sides one side of tight locating plate, positioning and marking mechanism includes vision positioning component and laser marking subassembly, vision positioning component is used for right the product in fretwork area carries out the vision location, laser marking subassembly with vision positioning component signal connection, and be used for right the product in fretwork area carries out laser marking. The laser standard-reaching equipment can improve marking precision.)

1. A laser marking apparatus, comprising:

a frame;

the first positioning mechanism comprises a positioning base plate, a clamping positioning plate and a clamping driving piece, wherein the positioning base plate is connected to the rack, and a hollowed-out area is arranged on the positioning base plate and used for exposing a product on the substrate; the clamping driving piece is connected to the clamping positioning plate and used for driving the clamping positioning plate to approach or depart from the positioning substrate along a first direction; and

the positioning and marking mechanism is arranged on the positioning substrate and is far away from one side of the clamping and positioning plate, the positioning and marking mechanism comprises a visual positioning component and a laser marking component, the visual positioning component is used for carrying out visual positioning on the product in the hollow area, and the laser marking component is in signal connection with the visual positioning component and is used for carrying out laser marking on the product in the hollow area.

2. The laser marking device as claimed in claim 1, wherein the first positioning mechanism further comprises a material blocking driving part and a material blocking part, the material blocking driving part is connected to the material blocking part and used for driving the material blocking part to be close to or far away from the positioning base plate along the first direction, and the material blocking part is used for being abutted against the substrate.

3. The laser marking apparatus as claimed in claim 2 wherein the first positioning mechanism further includes a material sensor in signal communication with the clamping drive, the material sensor being capable of detecting a substrate when the substrate abuts the stop to generate and transmit a clamping signal to the clamping drive.

4. The laser marking apparatus as claimed in claim 1, further comprising a conveying mechanism, a loading mechanism and a unloading mechanism, wherein the conveying mechanism is configured to convey a substrate in a second direction, the loading mechanism and the unloading mechanism are respectively disposed at two opposite ends of the conveying mechanism in the second direction, the first positioning mechanism is disposed between the loading mechanism and the unloading mechanism, and an included angle is formed between the second direction and the first direction.

5. The laser marking device as claimed in claim 4, wherein the feeding mechanism includes a feeding module and a drawing module, the feeding module includes a first moving assembly, a second moving assembly and a placing base, the first moving assembly is connected to the placing base and is configured to drive the placing base to move along a third direction, the second moving assembly is connected to the placing base and is configured to drive the placing base to move along the first direction, and the third direction has an included angle with the first direction and the second direction respectively; the placing base is provided with a plurality of material box mounting positions for placing material boxes, the material boxes are used for containing a plurality of substrates, and the material box mounting positions are sequentially arranged along the third direction; the material pulling module is used for moving the substrate in the material box to the conveying mechanism from the material pulling position.

6. The laser marking device as claimed in claim 5, wherein the feeding module further comprises a substrate sensor and a plurality of magazine sensors, the magazine sensors are all arranged on the placing base and are respectively arranged in one-to-one correspondence with the magazine mounting positions, the magazine sensors are used for detecting whether magazines exist in the magazine mounting positions, and the magazine sensors are in signal connection with the first moving assembly; the substrate sensor is connected to the rack and used for detecting whether a substrate exists in the pulling material position, and the substrate sensor is in signal connection with the second moving assembly.

7. The laser marking device as claimed in claim 5, wherein the material pulling module is disposed between the feeding module and the first positioning mechanism, and includes a third moving assembly, a fourth moving assembly and a clamping assembly, the third moving assembly is connected to the clamping assembly and is configured to drive the clamping assembly to move along the second direction, the fourth moving assembly is connected to the clamping assembly and is configured to drive the clamping assembly to move along the first direction, and the clamping assembly is configured to clamp a substrate.

8. The laser marking device as claimed in claim 4, wherein the conveying mechanism includes a fixed vertical plate, a movable vertical plate, a conveying assembly and an adjusting assembly, the fixed vertical plate and the movable vertical plate are arranged in parallel at intervals to form a conveying channel, the conveying assembly is arranged in the conveying channel and used for conveying a substrate, and the adjusting assembly is connected to the movable vertical plate and used for driving the movable vertical plate to be close to or far away from the fixed vertical plate.

9. The laser marking device as claimed in claim 4, further comprising an identification mechanism disposed between the feeding mechanism and the first positioning mechanism, the identification mechanism being configured to read product information on a substrate and to transmit the product information to the positioning marking mechanism.

10. The laser marking device as claimed in claim 1, further comprising a second positioning mechanism and a visual detection mechanism, wherein the second positioning mechanism has the same structure as the first positioning mechanism and is spaced from the first positioning mechanism, and the second positioning mechanism is used for positioning a laser marked product; the visual detection mechanism is used for detecting the products on the second positioning mechanism.

Technical Field

The invention relates to the technical field of laser marking, in particular to laser marking equipment.

Background

In recent years, the semiconductor industry has been rapidly developed, and the demand for IC processing equipment has been increasing. Most of the IC products are small in size, one IC product is about 1.8mm by 2.8mm, and in order to improve the conveying and processing efficiency of the IC products, a plurality of IC products are usually distributed on a thin substrate, so that the IC processing equipment can simultaneously perform corresponding processing operations on a plurality of IC products on one substrate.

The IC product needs to be positioned before laser marking, and in the existing IC processing equipment, visual positioning systems are adopted for positioning the IC product, and can collect images of the IC products in a horizontal plane so as to position the IC products. However, since the substrate for carrying the IC product is thin, the substrate is easily deformed during the product conveying process, so that the heights of the ICs on the same substrate are different, the visual positioning system is influenced to accurately position the ICs, and the marking precision is insufficient.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the utility model provides a laser marking equipment can pinpoint and beat the mark to a plurality of products on the substrate, improves precision up to standard.

In order to solve the technical problems, the invention adopts the technical scheme that:

a laser marking apparatus, comprising:

a frame;

the first positioning mechanism comprises a positioning base plate, a clamping positioning plate and a clamping driving piece, wherein the positioning base plate is connected to the rack, and a hollowed-out area is arranged on the positioning base plate and used for exposing a product on the substrate; the clamping driving piece is connected to the clamping positioning plate and used for driving the clamping positioning plate to approach or depart from the positioning substrate along a first direction; and

the positioning and marking mechanism is arranged on the positioning substrate and is far away from one side of the clamping and positioning plate, the positioning and marking mechanism comprises a visual positioning component and a laser marking component, the visual positioning component is used for carrying out visual positioning on the product in the hollow area, and the laser marking component is in signal connection with the visual positioning component and is used for carrying out laser marking on the product in the hollow area.

The embodiment of the invention has the following beneficial effects:

in the laser marking equipment, when the substrate is positioned between the positioning base plate and the clamping positioning plate, the clamping driving piece drives the clamping positioning plate to move towards the direction close to the positioning base plate, so that the substrate is clamped in the first direction, the substrate is tightly attached to the positioning base plate, the substrate is prevented from deforming, all products on the substrate are ensured to be positioned in the same plane, and the focal plane positions of all products on the same substrate during laser marking are consistent; meanwhile, products on the substrate can be exposed outside through the hollow area so as to be positioned and marked by a positioning and marking mechanism through laser; after the first positioning mechanism clamps the substrate, the visual positioning assembly can perform visual positioning on the products in the hollow area, so that the positions of the products are identified in a plane perpendicular to the first direction, and the focal plane positions of the products can be kept consistent during laser marking, so that the marking precision is higher.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Wherein:

FIG. 1 is a schematic view of the overall structure of the laser marking apparatus of the present invention;

FIG. 2 is a schematic view of the overall structure of another perspective of the laser marking apparatus of the present invention;

FIG. 3 is a schematic structural diagram of a first positioning mechanism of the present invention;

FIG. 4 is a schematic structural diagram of a loading module according to the present invention;

FIG. 5 is a schematic structural diagram of a drawing module according to the present invention;

FIG. 6 is a schematic structural diagram of a material pushing module according to the present invention;

FIG. 7 is a schematic structural view of a conveying mechanism of the present invention;

FIG. 8 is a schematic view of the visual inspection mechanism of the present invention;

description of reference numerals:

10. a frame;

20. a first positioning mechanism; 21. positioning the substrate; 211. a hollow-out area; 22. clamping the positioning plate; 23. clamping the driving member; 24. a material blocking driving part; 25. a material blocking part; 26. a material sensor;

30. positioning a marking mechanism; 31. a visual positioning assembly; 32. a laser marking assembly; 321. a first translation assembly; 322. a second translation assembly; 323. a laser;

40. a dust removal mechanism; 41. a blowing assembly; 42. a dust collection assembly;

50. a feeding mechanism; 51. a feeding module; 511. a first moving assembly; 512. a second moving assembly; 513. placing a base; 514. a substrate sensor; 515. a cartridge sensor; 52. a material pulling module; 521. a third moving assembly; 522. a fourth moving assembly; 523. a gripping assembly;

60. a blanking mechanism; 61. a blanking module; 62. a material pushing module; 621. a fifth moving assembly; 622. a sixth moving assembly; 623. pushing the material piece;

70. a conveying mechanism; 71. fixing the vertical plate; 72. a movable vertical plate; 73. a delivery assembly; 731. a drive motor; 732. a first synchronizing wheel; 733. a second synchronizing wheel; 734. a synchronous belt; 74. an adjustment assembly; 741. an adjustment wheel; 742. adjusting the screw rod; 743. a feed screw nut; 75. a guide rail;

80. an identification mechanism;

90. a second positioning mechanism;

91. a visual detection mechanism; 911. a seventh moving assembly; 912. an eighth moving assembly; 913. a visual inspection assembly.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the descriptions related to "first", "second", etc. in the present invention are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.

Referring to fig. 1, 2 and 3, the present invention provides a laser marking device, which includes a frame 10, and a first positioning mechanism 20 and a positioning marking mechanism 30 fixed on the frame 10, wherein the first positioning mechanism 20 includes a positioning substrate 21, a clamping positioning plate 22 and a clamping driving member 23, the positioning substrate 21 is connected to the frame 10, a hollow area 211 is provided on the positioning substrate 21, and the hollow area 211 is used for exposing a product on a substrate; the clamping driving member 23 is connected to the clamping positioning plate 22 and is used for driving the clamping positioning plate 22 to approach or separate from the positioning base plate 21 in the first direction. Positioning marking mechanism 30 sets up in the one side of keeping away from clamping positioning plate 22 of location base plate 21, and positioning marking mechanism 30 includes vision positioning component 31 and laser marking component 32, and vision positioning component 31 is used for carrying out the vision positioning to the product of fretwork area 211, and laser marking component 32 and vision positioning component 31 signal connection, and are used for carrying out laser marking to the product of fretwork area 211. In particular, the visual positioning component 31 may employ a CCD camera.

In one embodiment, the first direction is parallel to the Z-axis shown in fig. 1, the clamping and positioning plate 22 is located below the positioning substrate 21, and the vision positioning assembly 31 and the laser marking assembly 32 are both located above the positioning substrate 21.

In the laser marking device, when a substrate is positioned between the positioning base plate 21 and the clamping and positioning plate 22, the clamping and driving part 23 drives the clamping and positioning plate 22 to move towards the direction close to the positioning base plate 21, so that the substrate is clamped in the Z-axis direction, the substrate is enabled to be attached to the positioning base plate 21, the substrate is prevented from deforming, all products on the substrate are ensured to be positioned in the same plane, and the focal planes of all products on the same substrate during laser marking are enabled to be consistent in height; meanwhile, the product on the substrate can be exposed outside through the hollow-out area 211, so that the positioning and marking mechanism 30 can perform positioning and laser marking on the product; after the first positioning mechanism 20 clamps the substrate, the visual positioning component 31 can perform visual positioning on the products in the hollow area 211, so that the positions of the products are identified in the horizontal plane, and the focal plane heights of the products can be kept consistent during laser marking, so that the marking precision is higher.

As shown in fig. 3, the first positioning mechanism 20 further includes a material blocking driving member 24 and a material blocking member 25, the material blocking driving member 24 is connected to the material blocking member 25 and is used for driving the material blocking member 25 to approach or leave the positioning base plate 21 along the first direction, and the material blocking member 25 is used for abutting against the substrate. Along the direction of delivery of substrate, keep off material 25 and set up in the low reaches of location base plate 21, when a substrate moved to between location base plate 21 and the clamp locating plate 22, keep off material 25 can with this substrate butt to fix a position the substrate in the direction of delivery of substrate, guarantee that the product on the substrate can aim at the fretwork district 211 of location base plate 21, make the product on the substrate can expose from fretwork district 211. After the substrate is clamped by the positioning base plate 21 and the clamping positioning plate 22, the material blocking driving part 24 drives the material blocking part 25 to move in a first direction (namely, the Z-axis direction in fig. 1) to be away from the positioning base plate 21, so that the material blocking part 25 is prevented from blocking the substrate, and the substrate can continue to move forwards in the conveying direction after the laser marking is completed; after the substrate passes over the material blocking member 25, the material blocking driving member 24 drives the material blocking member 25 to move toward the direction close to the positioning base plate 21 again, so that the material blocking member 25 can abut and position the next substrate.

Further, the first positioning mechanism 20 further comprises a material sensor 26, and the material sensor 26 is in signal connection with the clamping driving member 23. When the substrate abuts against the material blocking member 25, the material sensor 26 can detect the substrate to generate a clamping signal and transmit the clamping signal to the clamping driving member 23, and the clamping driving member 23 can drive the clamping positioning plate 22 to move towards the direction close to the positioning base plate 21 after receiving the clamping signal, so as to complete the clamping action of the substrate. It will be appreciated that the material sensor 26 may be attached to the dam 25 or to the frame 10.

The laser marking assembly 32 includes a first translation assembly 321, a second translation assembly 322, and a laser 323, wherein the first translation assembly 321 is connected to the laser 323 for driving the laser 323 to move along a first direction (Z-axis direction), so as to adjust a focusing plane of the laser 323. The second translation assembly 322 is connected to the laser 323 and configured to drive the laser 323 to move along a second direction, where an included angle is formed between the second direction and the first direction. Preferably, in one embodiment, the second direction is perpendicular to the first direction, and the second direction is parallel to the X-axis shown in fig. 1. The laser 323 comprises a laser square head, a laser field lens and a laser reflection lens which are sequentially connected, and the marking content is small, in one embodiment, the laser 323 adopts a F100 short-focus laser field lens, the working distance of the F100 short-focus laser field lens is short, the marking range is small, the requirement of a small line width can be met, and therefore the good effect is obtained when small characters and two-dimensional codes are marked.

The laser marking device further comprises a dust removing mechanism 40, wherein the dust removing mechanism 40 comprises a blowing assembly 41 and a dust sucking assembly 42, and the blowing assembly 41 and the dust sucking assembly 42 are respectively arranged on two opposite sides of the positioning substrate 21. The laser marking device has the advantages that smoke dust can be generated in the laser marking process, the blowing assembly 41 can blow the smoke dust away from a marking station, the dust absorption assembly 42 can absorb the smoke dust on the marking station, the blowing assembly 41 and the dust absorption assembly 42 are arranged oppositely to form convection, and the laser marking device has a good dust removal effect.

The dust suction assembly 42 has an adsorption passage for adsorbing the dust, the adsorption passage includes a first end disposed close to the positioning substrate 21 and a second end disposed far from the positioning substrate 21, and a cross section of the adsorption passage gradually increases from the first end to the second end. The port of the first end of the adsorption channel is small, so that the use occasion of a small space can be met, meanwhile, the size of the part, far away from the positioning substrate 21, of the adsorption channel is large, the fluid resistance in dust collection can be reduced, and meanwhile, large suction can be formed at the port of the first end.

As shown in fig. 1 and 2, the laser marking apparatus of the present invention includes a conveying mechanism 70, a feeding mechanism 50, and a discharging mechanism 60, the conveying mechanism 70 being configured to convey a substrate in an X-axis direction. The feeding mechanism 50 and the blanking mechanism 60 are respectively arranged at two opposite ends of the conveying mechanism 70 in the X-axis direction, the first positioning mechanism 20 is arranged between the feeding mechanism 50 and the blanking mechanism 60, the feeding mechanism 50 is used for bearing a plurality of substrates and can send the substrates into the conveying mechanism 70 one by one, and after products on the substrates are marked by laser, the blanking mechanism 60 can take in and store the substrates one by one from the conveying mechanism 70. The laser marking equipment can automatically complete a series of actions of feeding, conveying, positioning, marking, blanking and the like of the substrate, can reduce manual participation and improve the production efficiency.

Specifically, the feeding mechanism 50 includes a feeding module 51 and a pulling module 52, the feeding module 51 is used for storing a plurality of substrates, and the pulling module 52 is used for moving the substrates in the feeding module 51 to the conveying mechanism 70 one by one.

As shown in fig. 4, the feeding module 51 includes a first moving component 511, a second moving component 512 and a placing base 513, the first moving component 511 is connected to the placing base 513 and is used for driving the placing base 513 to move along a third direction, the second moving component 512 is connected to the placing base 513 and is used for driving the placing base 513 to move along the first direction, and an included angle is formed between the third direction and the first direction and the second direction respectively. In one embodiment, the third direction is perpendicular to the first and second directions, respectively, and the third direction is parallel to the Y-axis shown in fig. 1.

It is to be understood that in some embodiments, there may be a sequential connection between first moving assembly 511, second moving assembly 512, and placement base 513; in other embodiments, the second moving assembly 512, the first moving assembly 511, and the placing base 513 may be connected in sequence, and it is only necessary to ensure that the placing base 513 can move along the Y axis and the Z axis under the action of the first moving assembly 511 and the second moving assembly 512.

The placing base 513 is provided with a plurality of material box mounting positions for placing material boxes, and the material box mounting positions are sequentially arranged along the Y-axis direction. Each magazine is used for containing a plurality of substrates, and when the substrates are fed, the substrates are stacked in the magazine along the Z-axis direction. In an embodiment, the number of the magazine mounting positions is five, twenty substrates can be placed in each magazine, that is, one hundred substrates can be simultaneously stored in one feeding on the feeding module 51, so that the requirement of one-hour feeding beat can be met, and continuous feeding is not needed like the prior art.

Further, the feeding module 51 further includes a substrate sensor 514 and a plurality of magazine sensors 515, the magazine sensors 515 are all disposed on the placement base 513, and the magazine sensors 515 are disposed in one-to-one correspondence with the magazine mounting positions. The material box sensor 515 is in signal connection with the first moving component 511 and is used for detecting whether a material box exists in the corresponding material box installation position, and the system can know the material loading position of the material box according to the information of each material box sensor 515 so as to accurately control the movement of the placement base 513 of the subsequent first moving component 511, so that the material box can be aligned to the material pulling module 52. A substrate sensor 514 is coupled to the frame 10, the substrate sensor 514 in signal communication with the second movable assembly 512, the substrate sensor 514 for detecting the presence of a substrate at the draw position. In an embodiment, the substrate sensor 514 is fixedly disposed, the substrate sensor 514 and the pull module 52 are both located directly above the conveying mechanism 70, the substrate sensor 514 and the pull module 52 are respectively disposed on two opposite sides of the feeding module 51 in the X-axis direction, a position directly opposite to the substrate sensor 514 is a pull position, and the pull module 52 needs to pull the substrate out of the pull position onto the conveying mechanism 70.

When material needs to be taken from the feeding module 51, firstly, the first moving assembly 511 can move the placing base 513 according to a sensing signal of the material box sensor 515, so that one material box is opposite to the material pulling module 52, then the substrate sensor 514 can detect whether a substrate exists at the material taking position, if the substrate sensor 514 detects that the material taking position has a substrate, the material pulling module 52 directly pulls out the substrate at the material taking position to the conveying mechanism 70, and if the substrate sensor 514 detects that the material taking position has no substrate, the second moving assembly 512 can drive the placing base 513 to move in the Z-axis direction until the substrate sensor 514 detects that the material taking position has a substrate; after the substrate in one magazine is taken out, the first moving assembly 511 moves the placing base 513 again, so that the next magazine on the placing base 513 is opposite to the material pulling module 52, and thus the substrate can be intelligently taken out.

The material pulling module 52 is disposed between the feeding module 51 and the first positioning mechanism 20, as shown in fig. 5, the material pulling module 52 includes a third moving component 521, a fourth moving component 522 and a clamping component 523, the third moving component 521 is connected to the clamping component 523 and is used for driving the clamping component 523 to move along the X-axis direction, the fourth moving component 522 is connected to the clamping component 523 and is used for driving the clamping component 523 to move along the Z-axis direction, and the clamping component 523 is used for clamping the substrate. It is understood that in some embodiments, there may be a sequential connection between the third moving assembly 521, the fourth moving assembly 522 and the gripping assembly 523; in other embodiments, the fourth moving assembly 522, the third moving assembly 521 and the gripping assembly 523 may be connected in sequence, and it is only necessary to ensure that the gripping assembly 523 can move along the X axis and the Z axis under the action of the third moving assembly 521 and the fourth moving assembly 522.

The clamping assembly 523 includes a clamping driving member 23 and a clamping jaw, the clamping driving member 23 is connected to the clamping jaw for driving the clamping jaw to open and close for clamping the substrate. In one embodiment, the clamp driving member 23 is a clamp cylinder. When a substrate is taken from the feeding module 51, the third moving assembly 521 drives the clamping assembly 523 to approach the material taking position, the clamping driving member 23 drives the clamping jaw to close so as to clamp the substrate, then the third moving assembly 521 drives the clamping assembly 523 to move along the X axis towards the direction far away from the feeding module 51, so that the substrate can be separated from the material box, and the substrate can be positioned on the conveying mechanism 70.

Unloading mechanism 60 includes unloading module 61 and pushes away material module 62, and unloading module 61 is used for depositing the substrate that the processing was accomplished, pushes away material module 62 and is arranged in the substrate propelling movement unloading module 61 on with conveying mechanism 70. The structure of the blanking module 61 is substantially the same as that of the feeding module 51, and the structure of the blanking module 61 is not described herein again.

As shown in fig. 6, the material pushing module 62 includes a fifth moving assembly 621, a sixth moving assembly 622 and a material pushing member 623, the fifth moving assembly 621 is connected to the material pushing member 623 and is configured to drive the material pushing member 623 to move along the X-axis direction, the sixth moving assembly 622 is connected to the material pushing member 623 and is configured to drive the material pushing member 623 to move along the Z-axis direction, and the material pushing member 623 is configured to push the substrate. It is understood that in some embodiments, the fifth moving assembly 621, the sixth moving assembly 622 and the pushing member 623 may be connected in sequence; in other embodiments, the sixth moving assembly 622, the fifth moving assembly 621 and the pushing element 623 may be connected in sequence, and it is only necessary to ensure that the pushing element 623 can move along the X axis and the Z axis under the action of the fifth moving assembly 621 and the sixth moving assembly 622. After the substrate is processed, the pushing element 623 can be made to abut against one end of the substrate, then under the action of the fifth moving assembly 621, the substrate can be pushed into the blanking module 61 to realize blanking of the substrate, after blanking of one substrate is completed, the pushing element 623 returns to the initial position and moves downwards along the Z axis under the action of the sixth moving assembly 622, the pushing element 623 is prevented from blocking the next substrate, and after the next substrate crosses the pushing element 623, the sixth moving assembly 622 drives the pushing element 623 to move upwards, so that the pushing element 623 carries out blanking of the next substrate.

As shown in fig. 7, the conveying mechanism 70 includes a fixed vertical plate 71, a movable vertical plate 72 and a conveying assembly 73, the fixed vertical plate 71 and the movable vertical plate 72 are arranged in parallel at intervals to form a conveying channel, and the conveying assembly 73 is arranged in the conveying channel and is used for conveying the substrate. The width of the conveying channel (i.e. the distance between the fixed vertical plate 71 and the movable vertical plate 72) is matched with the width of the substrate, so that the substrate is prevented from greatly shaking in the conveying process, and the subsequent positioning of the substrate is facilitated.

The transport assembly 73 includes a driving motor 731, a first synchronous wheel 732, a second synchronous wheel 733, and a synchronous belt 734, the driving motor 731 is connected to the first synchronous wheel 732, the first synchronous wheel 732 is connected to the second synchronous wheel 733 through the synchronous belt 734, and the substrate can be placed on the synchronous belt 734 for transport.

The conveying mechanism 70 further comprises an adjusting assembly 74, and the adjusting assembly 74 is connected to the movable vertical plate 72 and is used for driving the movable vertical plate 72 to approach or depart from the fixed vertical plate 71. When substrates with different sizes are used, the width of the conveying channel needs to be adjusted accordingly, and at this time, the position of the movable vertical plate 72 can be adjusted by using the adjusting assembly 74, so that the movable vertical plate 72 is close to or far away from the fixed vertical plate 71, thereby changing the width of the conveying channel. Specifically, the movable vertical plate 72 is slidably disposed on the guide rail 75, the adjusting assembly 74 includes an adjusting wheel 741, an adjusting screw 742 and a screw nut 743, the adjusting wheel 741 is connected to the adjusting screw 742 for driving the adjusting screw 742 to rotate, and the screw nut 743 is fixed to the movable vertical plate 72 and is matched with the adjusting screw 742. The adjustment wheel 741 is rotated to move the movable vertical plate 72, so as to adjust the width of the conveying passage.

Further, as shown in fig. 1, the laser marking device further includes an identification mechanism 80, the identification mechanism 80 is disposed between the material pulling module 52 and the first positioning mechanism 20, and the identification mechanism 80 is configured to read product information on the substrate and transmit the product information to the positioning and marking mechanism 30. The recognition mechanism 80 may be a scanner, a vision camera, or the like, and is capable of recognizing the two-dimensional code information or other information on the substrate, and the positioning and marking mechanism 30 is capable of correspondingly processing the product according to the product information acquired by the recognition mechanism 80.

The laser marking device further comprises a second positioning mechanism 90 and a visual detection mechanism 91, and the structure of the second positioning mechanism 90 is the same as that of the first positioning mechanism 20, and is not described herein again. The second positioning mechanism 90 is spaced apart from the first positioning mechanism 20 and is located downstream of the first positioning mechanism 20. After the laser marking of the product is finished, the conveying mechanism 70 continuously conveys the product forward to the second positioning mechanism 90, and the second positioning mechanism 90 can position the laser marked product; the visual inspection mechanism 91 is used for performing character recognition or code reading detection on the product on the second positioning mechanism 90.

Specifically, as shown in fig. 8, the vision inspection mechanism 91 includes a vision moving module and a vision inspection module 913, and the vision moving module is connected to the vision inspection module 913 and is used to drive the vision inspection module 913 to move in the XY plane. The vision moving module includes a seventh moving component 911 and an eighth moving component 912, wherein the seventh moving component 911 is connected to the vision detecting component 913 for driving the vision detecting component 913 to move along the X-axis direction, and the eighth moving component 912 is connected to the vision detecting component 913 for driving the vision detecting component 913 to move along the Y-axis direction. Because the characters or the two-dimensional codes to be detected on the product are tiny, the vision detection component 913 adopts a CCD camera and a telecentric CCD lens with a small visual field and is provided with a CCD light source, so that high-definition imaging can be realized. Because a plurality of IC products are uniformly distributed on one substrate, the vision inspection mechanism 91 performs photographing detection in a flying photographing mode, that is, the seventh mobile component 911 and the eighth mobile component 912 move the vision inspection component 913 at a constant speed, so that the vision inspection component 913 can photograph in a constant-speed moving state, and efficient and accurate detection is achieved.

The laser marking equipment provided by the invention can integrate multiple processes of feeding, identifying, conveying, positioning, marking, detecting and discharging, and can greatly improve the automation degree of laser marking of IC products and improve the marking efficiency of the IC products.

The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all equivalent changes made by using the contents of the present specification and the drawings, or applied directly or indirectly to the related technical fields, are included in the scope of the present invention.