Tin alloy electroplating compositions containing leveling agents
阅读说明：本技术 包含流平剂的锡合金电镀组合物 (Tin alloy electroplating compositions containing leveling agents ) 是由 A·弗鲁格尔 J-P·B·林德纳 M·阿诺德 于 2018-05-28 设计创作，主要内容包括：本发明涉及包含锡离子,任选地选自银、铜、铟和铋离子的其他合金金属离子以及至少一种包含含有式L1的结构单元的线性或支化聚咪唑<Image he="67" wi="71" file="DDA0002292867210000012.GIF" imgContent="drawing" imgFormat="GIF" orientation="portrait" inline="no"></Image>化合物的添加剂的含水组合物在沉积含锡或锡合金层中的用途,以及在基板上沉积锡合金层的方法。<Image he="347" wi="560" file="DDA0002292867210000011.GIF" imgContent="drawing" imgFormat="GIF" orientation="portrait" inline="no"></Image>(The invention relates to other alloy metal ions comprising tin ions, optionally selected from silver, copper, indium and bismuth ions, and at least one linear or branched polyimidazole comprising a structural unit containing the formula L1 The use of an aqueous composition of an additive to a compound for depositing a tin-or tin-alloy-containing layer, and a method for depositing a tin-alloy layer on a substrate.)
1. An aqueous composition comprising tin ions, alloying metal ions selected from the group consisting of silver, indium and bismuth ions and at least one linear or branched polyimidazole comprising a structural unit comprising the formula L1
wherein
R1、R2、R3Each independently selected from H atoms and organic groups having 1 to 20 carbon atoms,
X1is selected from
(a) Straight, branched or cyclic C4-C20Alkanediyl, which may be unsubstituted or substituted, which may optionally be interrupted by O, S and NR10And is substituted by aryl and may comprise polyimidazoles
(b) group-Y2-Y1-Y2-，
With the proviso that X1Containing no hydroxyl group in the alpha or beta position relative to the nitrogen atom of the imidazole ring,
Y1is C5-C12Carbocyclic or heterocyclic aromatic moieties which may comprise polyimidazoles
Y2independently selected from straight or branched C1-C6Alkanediyl which may optionally be interrupted by O, S and NR10And is substituted by aryl, and it may comprise polyimidazole
R10is H or C1-C6An alkyl group, a carboxyl group,
n is an integer of 2 to 5000.
2. The composition according to claim 1, wherein R1And R2Is an H atom.
3. A composition according to any one of the preceding claims, wherein R3Is H atom or methyl, ethyl or propyl.
4. A composition according to any preceding claim, wherein X1Does not contain any hydroxyl groups.
5. A composition according to any preceding claim, wherein X1Is straight-chain or branched C4-C14Alkanediyl, preferably straight-chain C4-C12An alkanediyl group.
6. The composition according to any one of claims 1 to 4, wherein X1Is a cyclic alkanediyl radical of the formula
Wherein
X2Independently selected from C1-C4Alkanediyl which may be interrupted by a group selected from O and NR4One or both of, and
X3independently selected from (a) a chemical bond or (b) C1-C4Alkanediyl which may be interrupted by O or NR4，
And wherein X2、X3Or X2And X3Both may comprise a polyimidazole
7. The composition according to any one of claims 1 to 6, wherein Y is1Selected from phenyl, naphthyl, pyridyl, pyrimidyl and furyl, and Y2Independently selected from methanediyl, ethanediyl, 1, 3-propanediyl, and 1, 4-butanediyl.
8. The composition according to any one of the preceding claims, wherein at least one additive comprises a counterion Y selected from chloride, sulfate or acetateo-Wherein o is a positive integer.
9. A composition according to any of the preceding claims, wherein the pH of the composition is less than 4, preferably less than 3, most preferably less than 2.
10. A composition according to any preceding claim wherein the polyimidazole
11. A composition according to any preceding claim wherein the polyimidazole
12. A composition according to any one of the preceding claims wherein the additive is preparable by reacting:
-alpha-dicarbonyl compound R1-CO-CO-R2，
-aldehyde R3-CHO，
At least one amino compound (NH)2-)mX1，
-protic acid (H)+)oYo-，
Wherein R is1、R2、R3、R4Y and o have the indicated meanings.
13. The composition according to claim 12, wherein the amino compound is an aliphatic or aromatic diamine, triamine, polyamine having more than 3 amino groups, or mixtures thereof.
14. A composition according to any one of the preceding claims further comprising other additives selected from one or more surfactants and one or more grain refiners.
15. Linear or branched polyimidazoles comprising structural units comprising the formula L1
wherein
R1、R2、R3Each independently selected from H atoms and organic groups having 1 to 20 carbon atoms,
X1is selected from
(a) Straight, branched or cyclic C4-C20Alkanediyl, which may be unsubstituted or substituted, which may optionally be interrupted by O, S and NR10And is substituted by aryl and may comprise polyimidazoles
(b) group-Y2-Y1-Y2-，
With the proviso that X1Containing no hydroxyl group in the alpha or beta position relative to the nitrogen atom of the imidazole ring,
Y1is C5-C12Carbocyclic or heterocyclic aromatic moieties which may comprise polyimidazoles
Y2independently selected from straight or branched C1-C6Alkanediyl which may optionally be interrupted by O, S and NR10And is substituted by aryl, and it may comprise polyimidazole
R10is H or C1-C6Alkyl, and
n is an integer of 2 to 5000.
16. Use according to claim 15, wherein the deposited tin alloy layer has an alloy metal content of 0.1 to 5 wt.%.
17. Method for depositing tin alloy layer on substrate
a) Contacting a tin alloy electroplating bath comprising a composition comprising tin ions, other alloying metal ions selected from silver, copper, indium and bismuth ions and at least one linear or branched polyimidazole comprising a structural unit comprising the formula L1 with a substrate
wherein
R1、R2、R3Each independently selected from H atoms and organic groups having 1 to 20 carbon atoms,
X1is selected from
(a) Straight, branched or cyclic C4-C20Alkanediyl, which may be unsubstituted or substituted, which may optionally be interrupted by O, S and NR10And is substituted by aryl and may comprise polyimidazolesOne or more branched continuations of the compound, and
(b) group-Y2-Y1-Y2-，
With the proviso that X1Containing no hydroxyl group in the alpha or beta position relative to the nitrogen atom of the imidazole ring,
Y1is C5-C12Carbocyclic or heterocyclic aromatic moieties which may comprise polyimidazoles
Y2independently selected from linear or branchedC1-C6Alkanediyl which may optionally be interrupted by O, S and NR10And is substituted by aryl, and it may comprise polyimidazoleOne or more branched extensions of the compound,
R10is H or C1-C6An alkyl group, a carboxyl group,
n is an integer of 2 to 5000, and
b) applying a current density to the substrate for a time sufficient to deposit a tin alloy layer on the substrate, wherein the deposited tin alloy has an alloying metal content of 0.01 to 10 wt.%.
18. The method of claim 17, wherein the substrate comprises micron-sized features and the depositing is performed to fill the micron-sized features.
19. A method according to claim 18, wherein the micron-sized features have a size of 1-200 microns, preferably 3-100 microns.
Background
The present invention relates to a tin or tin alloy electroplating composition comprising a leveling agent, its use and a tin or tin alloy electroplating method.
Metals and metal alloys are of commercial importance, particularly in the electronics industry where they are commonly used as electrical contacts, final finishes and solders.
Lead-free solders such as tin, tin-silver, tin-copper, tin-bismuth, tin-silver-copper, and the like are common metals used in solders. These solders are typically deposited on the semiconductor substrate by means of a metal plating bath.
Typical tin electroplating solutions contain sufficient dissolved tin ions, water, an acidic electrolyte such as methane sulfonic acid in an amount sufficient to render the bath conductive, antioxidants, and special additives to improve the uniformity of the electroplating and the quality of the metal deposit in terms of surface roughness and void formation. Such additives typically include, inter alia, surfactants and grain refiners.
Certain applications for lead-free solder plating present challenges in the electronics industry. For example, when used as a capping layer on a copper pillar, a relatively small amount of lead-free solder, such as tin-silver solder, is deposited on top of the copper pillar. When electroplating such small amounts of solder, it is often difficult to electroplate a solder composition of uniform height on the top of each post, both within the mold and on the wafer. The use of known solder plating baths also results in deposits having a relatively rough surface morphology.
US 3,577,328 discloses a tin electroplating composition comprising besides tin and sulphate an imidazoline derivative as surfactant, optionally in combination with a condensate of an alkylphenol with an alkylene oxide.
US 7,357,853B 2 discloses a composition and a method of selectively electroplating tin or a tin alloy on a composite substrate having a metal portion and a ceramic portion without losing adhesion between the metal portion and the ceramic portion. The composition may also contain imidazole
US 8,083,922B 2 relates to a tin electrolytic plating method using a tin electrolytic plating solution comprising a nonionic surfactant alone or together with a suitably selected cationic surfactant and/or a suitably selected alkyl imidazole.
US 2012/0132530 a1 relates to a tin electroplating solution comprising a source of tin ions, at least one nonionic surfactant, an imidazoline dicarboxylate and a1, 10-phenanthroline.
US 2013/068626A relates to a metal, in particular comprising a polyimidazole
JP 09-272995A discloses a tin or tin-lead alloy electroplating composition which may contain a polyimidazole in addition to a complexing agent and alkali and/or alkaline earth metal ions and ammonium and/or organic amine ions in a molar ratio of 1/5-5/1
However, in the electronics industry there is still interest in pure tin or tin alloy electroplating baths that result in reduced roughness and improved high uniformity (also known as Coplanarity (COP)) of the solder deposit.
It is an object of the present invention to provide a tin or tin alloy electroplating additive having good leveling properties, in particular a leveling agent capable of providing a substantially flat tin or tin alloy layer and filling micron-scale features through a tin or tin alloy electroplating bath without substantially forming defects such as, but not limited to, voids. It is another object of the present invention to provide a tin or tin alloy electroplating bath that provides a uniform and flat tin or tin alloy deposit, particularly in features having a width of 1-200 microns.
Summary of The Invention
The invention provides a further alloy metal ion comprising tin ions, optionally selected from silver, copper, indium and bismuth ions, and at least one linear or branched polyimidazole comprising a structural unit comprising the formula L1
wherein
R1、R2、R3Each independently selected from H atoms and organic groups having 1 to 20 carbon atoms, X1Selected from (a) straight, branched or cyclic C4-C20Alkanediyl, which may be unsubstituted or substituted, which may optionally be interrupted by O, S and NR10And is substituted by aryl and may comprise the imidazole
With the proviso that X1Containing no hydroxy groups in the alpha or beta position relative to the nitrogen atom of the imidazole ring, Y1Is C5-C12A carbocyclic or heterocyclic aromatic moiety which may comprise the imidazole
Y2independently selected from straight or branched C1-C6Alkanediyl which may optionally be interrupted by O, S and NR10And is substituted by aryl, and which may comprise the imidazole
n is an integer of 2 to 5000.
Another embodiment of the present invention is an imidazole as described herein
Yet another embodiment of the present invention is a method of depositing a tin alloy layer on a substrate by:
a) contacting a tin alloy electroplating bath comprising a composition as described herein with a substrate, and
b) applying a current density to the substrate for a time sufficient to deposit a tin alloy layer onto the substrate, wherein the alloy metal content of the deposited tin alloy is from 0.01 wt.% to 10 wt.%.
The agent/additive according to the invention can be advantageously used in bonding techniques (e.g. the manufacture of tin or tin alloy bumps with a height and width typically of 1-200 microns, preferably 3-100 microns, most preferably 5-50 microns for bump processes), circuit board techniques or packaging processes for electronic circuits. In a particular embodiment, the substrate comprises micron-sized features, and the deposition is performed to fill the micron-sized features, wherein the micron-sized features have a size of 1-200 microns, preferably 3-100 microns.
Brief Description of Drawings
Fig. 1 shows an SEM image of a tin bump plated according to comparative example 2.1;
fig. 2 shows an SEM image of a tin bump plated according to comparative example 2.2;
FIG. 3 shows an SEM image of electroplated tin bumps according to example 2.3;
fig. 4 shows an SEM image of a tin bump plated according to example 2.4;
fig. 5 shows an SEM image of a tin bump plated according to example 2.5;
fig. 6 shows an SEM image of a tin-copper alloy bump plated according to comparative example 3.1;
FIG. 7 shows an SEM image of electroplated Sn-Cu alloy bumps according to example 3.2;
fig. 8 shows an SEM image of a tin-silver alloy bump plated according to comparative example 4.1;
fig. 9 shows SEM images of plated sn-ag bumps according to example 4.2.
Detailed Description
Levelling agent according to the invention
Hereinafter, the terms "leveling agent", "imidazole", and "leveling agent" are used synonymously herein
In general R1And R2May be a H atom or an organic group having 1 to 20 carbon atoms. The free radical may be branched or unbranched, or comprise a functional group which may, for example, assist in polymerizing the imidazole
In general R3May be a H atom or an organic group having 1 to 20 carbon atoms. Preferably, R3Is a H atom or a methyl, ethyl or propyl group. Most preferably, R3Is an H atom.
Usually X1Can be selected from C4-C20Straight-chain, branched or cyclic aliphatic diyl groups of alkanediyl, C4-C20The alkanediyl group may comprise imidazole
As used herein, "polyimidazole
In a first embodiment, X1Is C4-C14Alkanediyl, most preferably C4-C12Alkanediyl, which may be unsubstituted OR substituted, in particular by OR4、NR4 2And SR4Is substituted in which R4Is C1-C4An alkyl group. Optionally, X1May be separated by O, S and NR10And is substituted by aryl and may contain one or more imidazoles
Especially preferred radicals X1Selected from the group consisting of straight-chain OR branched butanediyl, pentanediyl, hexanediyl, heptanediyl, octanediyl, nonanediyl, decanediyl, undecanediyl and dodecanediyl, which may be absent OR be present via OR4、NR4And (4) substitution. Especially preferred radicals X1Selected from the group consisting of linear butanediyl, hexanediyl and octanediyl.
In a second embodiment, the group X1May be a cyclic alkanediyl group of the formula:
wherein
X2Independently selected from C1-C4Alkanediyl which may be interrupted by a group selected from O and NR4One or two of (a) and X3Independently selected from (a) a chemical bond or (b) C1-C4Alkanediyl which may be interrupted by O or NR4Wherein R is4Is C1-C4An alkyl group.
As used herein, "chemical bond" means that the corresponding moiety is not present but adjacent moieties are bridged so that a direct chemical bond is formed between these adjacent moieties. For example, if in X-Y-Z, moiety Y is a bond, adjacent moieties X and Z together form a group X-Z.
X2Or X3Or X2And X3Both of which may comprise imidazole
In this second embodiment, most preferably, one X2Selected from methanediyl and another X2Selected from propanediyl, or two X2Selected from ethanediyl. Particularly preferably, the group X1Selected from the group consisting of isophoronediamine, dicyclohexyldiaminomethane and Methylcyclohexyldiamine (MDACH).
In a third embodiment, X1Can be selected from Y2-Y1-Y2(hetero) arylalkyl diyl. In this context, Y1Can be C5-C20Aryl, and Y2May be independently selected from straight or branched C1-C6An alkanediyl group. Herein, Y1And Y2And may each further comprise an imidazole
Preferred radicals Y1Selected from phenyl, naphthyl, pyridinyl, pyrimidinyl and furanyl, most preferably from phenyl. Preferred radicals Y2Selected from straight-chain or branched C1-C4Alkanediyl, preferably selected from methanediyl, ethanediyl, 1, 3-propanediyl and 1, 4-butanediyl.
Organic radical X1It may contain not only carbon and hydrogen but also heteroatoms such as oxygen, nitrogen, sulfur or halogens, for example in the form of functional groups, for example hydroxyl, ether, amide, aromatic heterocycles, primary, secondary or tertiary amino or imino groups.
In particular organic radicals X1Can be a hydrocarbondiyl group which can be substituted with or interrupted by a functional group comprising a heteroatom, in particular an ether group. If substituted, then X1Preferably without any hydroxyl groups.
n may generally be an integer from 2 to about 5000, preferably from about 5 to about 3000, even more preferably from about 8 to about 1000, even more preferably from about 10 to about 300, even more preferably from about 15 to about 250, most preferably from about 25 to about 150.
Mass average molecular weight M of the additivewGenerally, it may be 500-1,000,000g/mol, preferably 1000-500,000g/mol, more preferably 1500-100,000g/mol, even more preferably 2,000-50,000g/mol, even more preferably 3,000-40,000g/mol, most preferably 5,000-25,000 g/mol.
Preferably, at least one additive comprises a counterion Yo-Where o is a positive integer selected such that the overall additive is electrically neutral. Preferably, o is 1,2 or 3. Most preferably, the counterion Yo-Selected from chloride, sulfate, methane sulfonate or acetate.
Preferably, polymeric imidazoles
Preferably, polymeric imidazoles
Preferably, the composition according to the invention is prepared by reacting:
-alpha-dicarbonyl compound R1-CO-CO-R2，
-aldehyde R3-CHO，
At least one amino compound (NH)2-)mX1
-protic acid (H)+)oYo-，
-wherein R is1、R2、R3、X1Y and o have the indicated meanings.
Herein, the amino compound is an aliphatic or aromatic diamine, triamine, polyamine having more than 3 amino groups or mixtures thereof.
As used herein, "feature" refers to a recess or opening in a substrate, such as, but not limited to, a recess in a developed photoresist in which bump metal will be plated. "deposition" and "plating" are used interchangeably throughout this specification. The term "alkyl" means C1-C30Alkyl, including straight, branched and cyclic alkyl, wherein CxWherein x represents the number of carbon atoms. "substituted alkyl" means substituted with another substituent (such as, but not limited to, cyano, hydroxy, halo, (C)1-C6) Alkoxy group, (C)1-C6) Alkylthio, thiol, nitro, etc.) replacing one or more hydrogens on the alkyl group. As used herein, "aryl" includes both carbocyclic and heterocyclic aromatic systems. "substituted aryl" means substituted with one or more substituents (such as, but not limited to, cyano, hydroxy, halo, (C)1-C6) Alkoxy group, (C)1-C6) Alkyl, (C)2-C6) Alkenyl, (C)1-C6) Alkylthio, thiol, nitro, etc.) replaces one or more hydrogens on the aryl ring. As used herein, "polymer" or "polymerization" generally means any compound comprising at least two monomer units, i.e., the term polymer includes dimers, trimers, etc. oligomers toAnd a high molecular weight polymer.
The additive according to the invention can be prepared by any preparation method.
A preferred preparation process is carried out by reacting with each other: (a) an α -dicarbonyl compound, (b) an aldehyde, (c) at least one amino compound having at least two primary amino groups, and (d) a protic acid, wherein the protic acid is as described in unpublished international patent application No. pct/EP2009/066781, which is incorporated herein by reference. The above compounds are defined by their functional group content. For example, when, for example, the compound comprises one acid function and, for example, two primary amino groups or one aldehyde group, two of the above compounds may also be identical. The reaction is a polycondensation. In the polycondensation, polymerization is carried out by eliminating low molecular weight compounds such as water or alcohol.
In the case of the present invention, water is eliminated. When the carbonyl group of an α -dicarbonyl compound is present wholly or partially in the ketal form and/or the aldehyde group of an aldehyde is present in the acetal or hemiacetal form, the alcohol is eliminated correspondingly rather than water.
The alpha-dicarbonyl compound (a) is preferably a compound of formula L2a
R1-CO-CO-R2(L2a)。
The compound is particularly preferably glyoxal.
The carbonyl group of the alpha-dicarbonyl compound may also be in the form of a ketal or hemiketal, preferably in the form of a lower alcohol (e.g., C)1-C10Alkanol) in the form of a hemiketal or ketal. In this case, the alcohol is eliminated in a later condensation reaction.
The carbonyl group of the α -dicarbonyl compound is preferably not present as a hemiketal or ketal.
The aldehyde compound (b) may be any compound having at least one aldehyde group. The aldehyde is in particular an aldehyde of the formula L2 b:
R3-CHO (L2b)。
the aldehyde group of the aldehyde may also be present in the hemiacetal or acetal form, preferably in the hemiacetal or acetal form of a lower alcohol, for example a C1-C10 alkanol. In this case, the alcohol is eliminated in a later condensation reaction.
The aldehyde groups are preferably not present in the hemiacetal or acetal form.
The amino compound (c) is a compound having at least two primary amino groups.
The amino compound may be represented by the general formula L2 c:
(NH2-)mX1(L2c)
wherein m is an integer of 2 or more and represents the number of amino groups. m can be a very large value, for example, m can be an integer from 2 to 10000, particularly from 2 to 5000. For example, when polyamines such as polyvinylamine or polyethyleneimine are used, very high values of m exist.
When a compound having m ═ 2 (diamine) is used in the reaction, a linear, polymeric imidazole is formed
In a preferred embodiment, m is an integer from 2 to 6, in particular from 2 to 4. Very particular preference is given to m ═ 2 (diamine) or m ═ 3 (triamine). Very particular preference is given to m ═ 2.
In a preferred embodiment, the amino compound comprises at most ether groups, secondary or tertiary amino groups, and no other functional groups besides these. Mention may be made, for example, of polyetheramines. X1Preference is therefore given to pure hydrocarbon radicals or hydrocarbon radicals interrupted by ether, secondary or tertiary amino groups or substituted by ether, secondary or tertiary amino groups. In a particular embodiment, X1Is a pure hydrocarbon group and does not contain any functional group.
The hydrocarbyl group may be aliphatic or aromatic or contain both aromatic and aliphatic groups.
Possible amino compounds are those in which a primary amino group is bonded to an aliphatic hydrocarbon radical, preferably to an aliphatic hydrocarbon having from 2 to 50 carbon atoms, particularly preferably having from 3 to 40 carbon atoms, preferably diamines.
Other possible amino compounds are amino compounds in which the primary amino group is bonded directly to an aromatic ring system (for example phenylene or naphthylene), preferably diamines, or amino compounds in which the primary amino group is bonded to an aliphatic group in the form of an alkyl substituent of an aromatic ring system.
Diamines which may be mentioned are in particular C2-C20Alkanediamines such as 1, 4-butanediamine or 1, 6-hexanediamine.
Possible triamines are, for example, aliphatic compounds of the formula L2 d:
wherein R is5、R6And R7Each independently of the other is C1-C10Alkylene, particularly preferably C2-C6An alkylene group.
In the simplest case, the radical R5、R6And R7Have the same meaning; an example which may be mentioned is triaminoethylamine (R)5＝R6＝R7Ethane diyl).
Compounds having the following structure may also be used:
in the process of the invention, it is also possible in particular to use mixtures of amino compounds. In this way, polymeric imidazoles comprising different molecular groups between the imidazole rings are obtained
Mixtures of various aliphatic amino compounds or mixtures of various aromatic amino compounds, for example, and also mixtures of aliphatic and aromatic amino compounds can be used as mixtures of amino compounds. The amino compounds in the mixture may be amino compounds having different numbers of primary amino groups. When diamines are used in the process of the invention, linear polymers are obtained. When amino compounds having three or more primary amino groups are used, crosslinked and/or branched structures are formed. The use of mixtures of diamines with amino compounds having more than two primary amino groups, for example triamines, makes it possible to set the desired degree of crosslinking or branching via the proportion of triamines.
Amino compounds having a hydroxyl group in the beta position relative to one primary amino group can also be used as amino compounds. In this case, polymeric imidazoles which have been able to be obtained according to the prior art by reacting imidazole derivatives with epichlorohydrin or other epoxy compounds (see above) are also obtainable by the process of the inventionA compound is provided. However, for the purposes of the present invention, the use of these compounds is not absolutely necessary, so that they can also be omitted.
In a preferred embodiment, the amino compound has a molecular weight of less than 10000g/mol, particularly preferably less than 5000g/mol, very particularly preferably less than 1000g/mol, most preferably less than 500 g/mol.
Possible diamines and triamines are, in particular, compounds having molecular weights of from 60 to 500g/mol or from 60 to 250 g/mol.
In the process for preparing the additive according to the invention, other compounds can be used, for example to introduce specific end groups into the polymer or to cause additional crosslinking by means of other functional groups, to set defined properties or to possibly further react the resulting polymer at a later point in time (polymer-analogous reactions).
Thus, if desired, compounds having, for example, only one primary amino group can be concomitantly used to influence the polymerization of imidazoles
The protic acid (d) may be represented by the formula Yo-(H+)oWherein o is an integer. It may also be a polymeric protonic acid, such as polyacrylic acid; in this case, o may be a very high value. As such polymeric protonic acids there may be mentioned, for example, polyacrylic acid, polymethacrylic acid or copolymers of (meth) acrylic acid, maleic acid, fumaric acid or itaconic acid with any other monomer, for example (meth) acrylates, vinyl esters or aromatic monomers such as styrene, or further polymers having a plurality of carboxyl groups.
In a preferred embodiment, o is an integer from 1 to 4, particularly preferably 1 or 2. In a particular embodiment, o is 1.
Anion Y of protonic acido-Formation of polymeric imidazolesImidazoles of compounds
The anion of the protic acid is, for example, selected from F-、Cl-、NO2 -、NO3 -Radicals of the sulfates, sulfites and sulfonates (e.g. SO)4 2-、HSO4 -、SO3 2-、HSO3 -、H3COSO3 -、H3CSO3 -Phenylsulfonate, p-toluenesulfonate), HCO3 -、CO3 2-Alcohol and phenol radicals (e.g. H)3CO-、H5C2O), phosphate, phosphonate, phosphinate, phosphite, phosphinate, and phosphinate groups (e.g., PO)4 3-、HPO4 2-、H2PO4 -、PO3 3-、HPO3 2-、H2PO3 -) Carboxylate (e.g. formate and acetate) and halogenated hydrocarbon (e.g. CF)3SO3 -、(CF3SO3)2N-、CF3CO2 -And CCl3CO2 -)。
The product received in this way can be subjected to a typical anion exchange by means of precipitation or by means of an anion exchange resin to receive the desired counter ion.
The reaction of the starting compounds is preferably carried out in water, a water-miscible solvent or a mixture thereof.
The water-miscible solvents are in particular protic solvents, preferably aliphatic alcohols or ethers having not more than 4 carbon atoms, such as methanol, ethanol, methyl ethyl ether, tetrahydrofuran. Suitable protic solvents are miscible with water in any ratio (at 1 bar, 21 ℃).
The reaction is preferably carried out in water or a mixture of water and the above protic solvent. The reaction is particularly preferably carried out in water.
The reaction of the starting components can be carried out, for example, at pressures of from 0.1 to 10 bar, in particular under atmospheric pressure. The reaction of the starting components can be carried out, for example, at temperatures of from 5 to 120 ℃. In particular, the starting components are added at a temperature of about 5 ℃ to 50 ℃, preferably 15-30 ℃, and then heated up to 120 ℃, preferably 80-100 ℃.
The starting components may be combined in any order.
The reaction may be carried out batchwise, semi-continuously or continuously. For example, in a semicontinuous mode of operation, at least one starting compound can be charged first and the other starting components metered in.
In the continuous mode of operation, the starting components are combined continuously and the product mixture is discharged continuously. The starting components can be fed in individually or in the form of a mixture of all or part of the starting components. In a particular embodiment, the amine and the acid are mixed beforehand and are supplied in one stream, while the other components can be supplied individually or likewise in the form of a mixture (second stream).
In another particular embodiment, all starting components comprising a carbonyl group, i.e. the α -dicarbonyl compound, the aldehyde and the protic acid of the anion X (if the latter is a carboxylate salt), are mixed beforehand and fed together in the form of a stream; the remaining amino compounds are then fed separately.
The continuous preparation can be carried out in any reaction vessel, i.e. in a stirred vessel. It is preferably carried out in a cascade of stirred vessels (for example 2 to 4 stirred vessels) or in a tubular reactor.
The reaction proceeds in principle according to the following reaction scheme.
Instead of CH, any of the other anions mentioned above may be used3COO-Or CH may be precipitated or passed through an anion exchange resin3COO-Subjected to anion exchange to give the desired counterion.
Here, 1mol of aldehyde, 2mol of primary amino group and 1mol of acid group (H) of protonic acid are required per 1mol of alpha-dicarbonyl compound+). In the resulting polymer, imidazole
Further details and alternatives are described in patent publication WO2016/020216 and international patent application PCT/EP2017/050054, respectively, which are incorporated herein by reference.
One skilled in the art will appreciate that more than one leveling agent may be used. When two or more leveling agents are used, at least one leveling agent is a polyimidazole as described herein
Suitable additional leveling agents include, but are not limited to, polyaminoamides and derivatives thereof, polyalkanolamines and derivatives thereof, polyethyleneimines and derivatives thereof, quaternized polyethyleneimines, polyglycine, poly (allylamine), polyaniline, polyurea, polyacrylamide, poly (melamine-co-formaldehyde), reaction products of amines with epichlorohydrin, amines, reaction products of epichlorohydrin and polyalkylene oxide, reaction products of amines with polyepoxides, polyvinylpyridine, polyvinylimidazole, polyvinylpyrrolidone or copolymers thereof, nigrosine, pentamethyl parafuchsin hydrohalide, hexamethyl parafuchsin hydrohalide, or a compound containing a functional group of the formula N-R-S, wherein R is a substituted alkyl group, an unsubstituted alkyl group, a substituted aryl group, or an unsubstituted aryl group. Typically, alkyl is C1-C6Alkyl, preferably C1-C4An alkyl group. Typically aryl includes C6-C20Aryl, preferably C6-C12And (4) an aryl group. Such aryl groups may further include heteroatoms such as sulfur, nitrogen and oxygen. Preferably aryl is phenyl or naphthyl. Compounds containing functional groups of the formula N-R-S are generally known, are generally commercially available and can be used without further purification.
In such compounds containing N-R-S functionality, sulfur ("S") and/or nitrogen ("N") may be attached to such compounds via single or double bonds. When sulfur is attached to such compounds via a single bond, the sulfur will have additional substituents such as, but not limited to, hydrogen, C1-C12Alkyl radical, C2-C12Alkenyl radical, C6-C20Aryl radical, C1-C12Alkylthio radical, C2-C12Alkenylthio radical, C6-C20Arylthio groups, and the like. Likewise, the nitrogen has one or more substituents, such as, but not limited to, hydrogen, C1-C12Alkyl radical, C2-C12Alkenyl radical, C7-C10Aryl, and the like. The N-R-S functionality may be acyclic or cyclic. Compounds containing cyclic N-R-S functionality include nitrogen or sulfur or both nitrogen and sulfur in the ring systemBoth of which are described below.
Other levelling agents are triethanolamine condensates as described in unpublished international patent application No. pct/EP 2009/066581.
The total amount of levelling agent in the plating bath is typically from 0.5 to 10000ppm, based on the total weight of the plating bath. The leveling agent according to the present invention is typically used in a total amount of about 100ppm to about 10000ppm based on the total weight of the plating bath, but more or less amounts may be used.
Various additives are typically used in the bath to provide the desired surface finish of the electroplated tin or tin alloy bumps. More than one additive is typically used, with each additive forming the desired function. Advantageously, the electroplating bath may contain one or more surfactants, grain refiners, complexing agents (in the case of alloy deposition), antioxidants and mixtures thereof. Most preferably, the electroplating bath comprises a surfactant and optionally a grain refiner in addition to the levelling agent according to the invention. Other additives may also be suitably employed in the electroplating bath of the present invention.
Surface active agent
One or more nonionic surfactants may be used in the compositions of the present invention. Typically, the nonionic surfactant has an average molecular weight of 200-. Such nonionic surfactants are typically present in the electrolyte compositions in concentrations of from 1 to 10,000ppm, preferably from 5 to 10,000ppm, based on the weight of the composition. Preferred oxyalkylene compounds include polyalkylene glycols such as, but not limited to, oxyalkylene addition products of organic compounds having at least one hydroxyl group and 20 carbon atoms or less, and tetrafunctional polyethers derived from the addition of different alkylene oxides to low molecular weight polyamine compounds.
Preferred polyalkylene glycols are polyethylene glycol and polypropylene glycol. Such polyalkylene glycols are generally available from a variety of sources and may be used without further purification. It may also be suitable to use a capped polyalkylene glycol having one or more of the terminal hydrogens replaced with a hydrocarbon group. An example of a suitable polyalkylene glycol is of the formula R-O- (CXYCX 'Y' O)nR 'wherein R and R' are independently selected from H, C2-C20Alkyl and C6-C20An aryl group; x, Y, X 'and Y' are each independently selected from hydrogen, alkyl such as methyl, ethyl or propyl, aryl such as phenyl or aralkyl such as benzyl; and n is an integer of 5 to 100000. Typically, one or more of X, Y, X 'and Y' is hydrogen.
Suitable EO/PO copolymers generally have an EO to PO weight ratio of from 10:90 to 90:10, preferably from 10:90 to 80: 20. Such EO/PO copolymers preferably have an average molecular weight of 750-. Such EO/PO copolymers are available from a variety of sources, such as those available under the trade name "PLURONIC", from BASF.
Suitable alkylene oxide condensation products of organic compounds having at least one hydroxyl group and 20 carbon atoms or less include aliphatic hydrocarbons having 1 to 7 carbon atoms, unsubstituted aromatic compounds or alkylated aromatic compounds having six carbons or less in the alkyl moiety, such as those disclosed in US5,174,887. The aliphatic alcohols may be saturated or unsaturated. Suitable aromatic compounds are those having up to two aromatic rings. The aromatic alcohol has up to 20 carbon atoms prior to derivatization with ethylene oxide. Such aliphatic and aromatic alcohols may be further substituted, for example by sulfate or sulfonate groups.
Grain refiner
The tin or tin alloy plating bath may further contain a grain refiner. The grain refiner may be selected from compounds of formula G1 or G2:
wherein R is1Each independently is C1-C6Alkyl radical, C1-C6Alkoxy, hydroxy or halogen; r2And R3Independently selected from H and C1-C6An alkyl group; r4Is H, OH, C1-C6Alkyl or C1-C6An alkoxy group; m is integerA number of 0 to 2; r5Each independently is C1-C6An alkyl group; r6Each independently selected from H, OH, C1-C6Alkyl or C1-C6An alkoxy group; n is 1 or 2; and p is 0, 1 or 2.
Preferably, R1Each independently is C1-C6Alkyl radical, C1-C3Alkoxy or hydroxy, more preferably C1-C4Alkyl radical, C1-C2Alkoxy or hydroxy. Preferably R2And R3Independently selected from H and C1-C3Alkyl, more preferably H and methyl. Preferably, R4Is H, OH, C1-C4Alkyl or C1-C4Alkoxy, more preferably H, OH or C1-C4An alkyl group. Preferably R5Is C1-C4Alkyl, more preferably C1-C3An alkyl group. R6Each preferably selected from H, OH or C1-C6Alkyl, more preferably H, OH or C1-C3Alkyl, more preferably H or OH. Preferably m is 0 or 1, more preferably m is 0. Preferably, n is 1. Preferably p is 0 or 1, more preferably p is 0. A mixture of first grain refiners such as two different grain refiners of formula 1, two different grain refiners of formula 2, or a mixture of grain refiners of formula 1 and grain refiners of formula 2 may be used.
Exemplary compounds that may be used as such grain refiners include, but are not limited to, cinnamic acid, cinnamaldehyde, benzylidene acetone, picolinic acid, picolinate, picolinic aldehyde, dipicolinic aldehyde, or mixtures thereof. Preferred grain refiners include benzalacetone, 4-methoxybenzaldehyde, benzylpyridine-3-formate and 1, 10-phenanthroline.
The other grain refiners may be selected from α, β -unsaturated aliphatic carbonyl compounds. Suitable α, β -unsaturated aliphatic carbonyl compounds include, but are not limited to, α, β -unsaturated carboxylic acids, α, β -unsaturated carboxylic acid esters, α, β -unsaturated amides, and α, β -unsaturated aldehydes. Preferably, such grain refiners are selected from the group consisting of α, β -unsaturated carboxylic acids, α, β -unsaturated carboxylic acid esters, and α, β -unsaturated aldehydes, more preferably from the group consisting of α, β -unsaturated carboxylic acids and α, β -unsaturated aldehydesAnd an aldehyde. Exemplary α, β -unsaturated aliphatic carbonyl compounds include (meth) acrylic acid, crotonic acid, C-C6 alkyl (meth) acrylates, (meth) acrylamides, C crotonic acid1-C6Alkyl esters, crotonamides, crotonaldehyde, (meth) acrolein, or mixtures thereof. Preferably, the α, β -unsaturated aliphatic carbonyl compound is (meth) acrylic acid, crotonic acid, crotonaldehyde, (meth) acrolein, or a mixture thereof.
The grain refiner may be present in the electroplating bath of the invention in an amount of from 0.0001 to 0.045 g/l. Preferably, the grain refiner is present in an amount of 0.0001-0.04g/l, more preferably 0.0001-0.035g/l, more preferably 0.0001-0.03 g/l. Compounds useful as first grain refiners are generally available from a variety of sources and may be used as such or may be further purified.
The compositions of the present invention may optionally include other additives such as antioxidants, organic solvents, complexing agents, and mixtures thereof. Although additional leveling agents may be used in the plating bath of the present invention, the plating bath preferably comprises only leveling agents according to the present invention.
Antioxidant agent
Antioxidants may optionally be added to the present compositions to help maintain the tin in a soluble, divalent state. Preferably, one or more antioxidants are used in the compositions of the present invention. Exemplary antioxidants include, but are not limited to, hydroquinone, and hydroxylated and/or alkoxylated aromatic compounds, including sulfonic acid derivatives of such aromatic compounds, preferably: hydroquinone; methyl hydroquinone; resorcinol; catechol; 1,2, 3-trihydroxybenzene; 1, 2-dihydroxybenzene-4-sulfonic acid; 1, 2-dihydroxybenzene-3, 5-disulfonic acid; 1, 4-dihydroxybenzene-2-sulfonic acid; 1, 4-dihydroxybenzene-2, 5-disulfonic acid; 2, 4-dihydroxybenzenesulfonic acid and p-methoxyphenol. Such antioxidants are disclosed in US4,871,429. Other suitable antioxidants or reducing agents include, but are not limited to, vanadium compounds such as vanadyl acetylacetonate, vanadium triacetyl pyruvate, vanadium halides, vanadium oxyhalides, vanadium alkoxides, and vanadyl alkoxides. The concentration of such reducing agents is well known to the person skilled in the art, but is typically in the range of from 0.1 to 10g/l, more preferably from 1 to 5 g/l. Such antioxidants are generally available from a variety of sources. It is particularly preferred to use the specified antioxidant in a pure tin electroplating composition.
Complexing agents
The tin or tin alloy plating bath may further contain a complexing agent for complexing the tin and/or any other metal present in the composition. A typical complexing agent is 3, 6-dithio-1, 8-octanediol.
Typical complexing agents are polyoxy monocarboxylic acids, polycarboxylic acids, aminocarboxylic acids, lactone compounds and salts thereof.
Other complexing agents are organic sulphur compounds such as thioureas, thiols or thioethers as disclosed in US 7628903, JP 4296358B 2, EP 0854206 a and US 8980077B 2.
Electrolyte
Generally, as used herein, "aqueous" means that the electroplating compositions of the present invention comprise a solvent comprising at least 50% water. Preferably, "aqueous" means that the major portion of the composition is water, more preferably 90% of the solvent is water, most preferably the solvent consists essentially of water. Any type of water may be used such as distilled water, deionized or tap water.
Tin (Sn)
The source of tin ions can be any compound capable of releasing metal ions to be deposited in the plating bath in sufficient amounts, i.e., at least partially soluble in the plating bath.
Preferably, the source of metal ions is soluble in the electroplating bath. Suitable metal ion sources are metal salts and include, but are not limited to, metal sulfates, metal halides, metal acetates, metal nitrates, metal fluoroborates, metal alkyl sulfonates, metal aryl sulfonates, metal sulfamates, metal gluconates, and the like.
Any amount of metal ion sufficient for electroplating can be provided on the substrate in the present invention. When the metal is tin alone, the tin salt is typically present in the electroplating solution in an amount of about 1g/l to about 300 g/l.
Alloy metal
Optionally, the electroplating bath according to the invention may contain one or more alloying metal ions. Suitable alloying metals include, but are not limited to, silver, gold, copper, bismuth, indium, zinc, antimony, manganese, and mixtures thereof. Preferred alloying metals are silver, copper, bismuth, indium and mixtures thereof, more preferably silver. Preferably the composition of the invention is lead free. Any bath soluble salt of the alloy metal may suitably be used as the source of the alloy metal ions. Examples of such alloying metal salts include, but are not limited to: a metal oxide; a metal halide; a metal fluoroborate; a metal sulfate; metal alkanesulfonates such as metal methanesulfonate, metal ethanesulfonate and metal propanesulfonate; metal aryl sulfonates such as metal phenyl sulfonate, metal toluene sulfonate and metal phenol sulfonate; metal carboxylates such as metal gluconates and metal acetates, and the like. Preferably, the alloy metal salt is a metal sulfate; a metal alkanesulfonate; and metal aryl sulfonates. When an alloying metal is added to the composition of the present invention, binary alloy deposition is achieved. When 2,3 or more different alloy metals are added to the composition of the present invention, ternary, quaternary or higher alloy deposition is achieved. The amount of such alloying metals used in the compositions of the present invention will depend on the particular tin alloy desired. The selection of such amounts of alloying metals is within the ability of those skilled in the art. Those skilled in the art will appreciate that when certain alloying metals are used, such as silver, additional complexing agents may be required. Such complexing agents (or complexes) are well known in the art and may be used in any suitable amount.
The electroplating compositions of the invention are suitable for depositing tin-containing layers, which can be pure tin layers or tin alloy layers. Exemplary tin alloy layers include, but are not limited to, tin-silver, tin-copper, tin-indium, tin-bismuth, tin-silver-copper-antimony, tin-silver-copper-manganese, tin-silver-bismuth, tin-silver-indium, tin-silver-zinc-copper, and tin-silver-indium-bismuth. Preferably, the electroplating compositions of the invention deposit pure tin, tin-silver-copper, tin-silver-bismuth, tin-silver-indium and tin-silver-indium-bismuth, more preferably pure tin, tin-silver or tin-copper.
The alloy deposited from the electroplating bath of the invention contains tin in an amount of 0.01 to 99.99 wt%, and one or more alloying metals in an amount of 99.99 to 0.01 wt%, based on the weight of the alloy, as measured by Atomic Absorption Spectroscopy (AAS), X-ray fluorescence (XRF), Inductively Coupled Plasma (ICP), or Differential Scanning Calorimetry (DSC). Preferably, the tin-silver alloy deposited using the present invention contains 90 to 99.99 wt.% tin and 0.01 to 10 wt.% silver, as well as any other alloying metals. More preferably, the tin-silver alloy deposit contains 95-99.9 wt.% tin and 0.1-5 wt.% silver, as well as any other alloying metals. Tin-silver alloys are preferred tin alloy deposits and preferably contain 90 to 99.9 wt.% tin and 10 to 0.1 wt.% silver. More preferably, the tin-silver alloy deposit contains 95-99.9 wt.% tin and 5-0.1 wt.% silver. Eutectic compositions of alloys are useful in many applications. The alloy deposited according to the invention is substantially lead-free, i.e. it contains 1 wt.%, more preferably less than 0.5 wt.%, more preferably less than 0.2 wt.% lead, more preferably no lead.
Bath
Generally, the metal plating compositions of the invention remove a source of metal ions and at least one further species referred to as a polyimidazole
Preferably, the electroplating bath of the invention is acidic, i.e. it has a pH value of less than 7. Typically, the tin or tin alloy electroplating composition has a pH of less than 4, preferably less than 3, and most preferably less than 2.
The electroplating baths of the present invention may be prepared by combining the components in any order. Preferably, the inorganic components such as metal salts, water, electrolyte and optionally a source of halide ions are first added to the bath container, followed by the organic components such as surfactants, grain refiners, leveling agents and the like.
Typically, the electroplating baths of the present invention may be used at any temperature of 10-65 ℃ or higher. Preferably, the temperature of the plating bath is 10 to 35 deg.C, more preferably 15 to 30 deg.C.
Suitable electrolytes include, for example (but are not limited to): sulfuric acid; acetic acid; fluoroboric acid; alkyl sulfonic acids such as methane sulfonic acid, ethane sulfonic acid, propane sulfonic acid, and trifluoromethane sulfonic acid; arylsulfonic acids such as phenylsulfonic acid and toluenesulfonic acid; sulfamic acid; hydrochloric acid; phosphoric acid; tetraalkylammonium hydroxides, preferably tetramethylammonium hydroxide; sodium hydroxide; potassium hydroxide, and the like. The acid is typically present in an amount of about 1g/l to about 300 g/l.
In one embodiment, at least one additive comprises a counterion Y selected from chloride, sulfate or acetateo-Wherein o is a positive integer.
Such electrolytes may optionally contain a source of halide ions such as chloride ions in tin chloride or hydrochloric acid. A wide range of halide ion concentrations, such as from about 0ppm to about 500ppm, can be used in the present invention. Typically, the halide ion concentration is from about 10ppm to about 100ppm based on the plating bath. Preferably the electrolyte is sulphuric acid or methane sulphonic acid, and preferably a mixture of sulphuric acid or methane sulphonic acid and a source of chloride ions. The acid and halide ion sources useful in the present invention are generally commercially available and may be used without further purification.
Applications of
The electroplating compositions of the invention are useful in a variety of electroplating processes requiring a tin-containing layer, and are particularly useful for depositing a tin-containing solder layer on a semiconductor wafer comprising a plurality of conductive bonding features. Electroplating methods include, but are not limited to, horizontal or vertical wafer plating, barrel plating, rack plating, high speed plating (e.g., roll-to-roll and spray plating), and rack-less plating, with horizontal or vertical wafer plating being preferred. A wide range of substrates can be electroplated with the tin-containing deposits according to the present invention. The substrate to be plated is electrically conductive and may comprise copper, copper alloys, nickel alloys, nickel-iron containing materials. Such substrates may be in the form of electronic components such as (a) lead frames, connectors, chip capacitors, chip resistors, and semiconductor packages, (b) plastics such as circuit boards, and (c) semiconductor wafers. Preferably, the substrate is a semiconductor wafer. Accordingly, the present invention also provides a method of depositing a tin-containing layer on a semiconductor wafer, comprising: providing a semiconductor wafer comprising a plurality of conductive bonding features; contacting a semiconductor wafer with the composition described above; and applying a sufficient current density to deposit a tin-containing layer on the conductive bonding feature. Preferably, the joining feature comprises copper, which may be in the form of a pure copper layer, a copper alloy layer, or any interconnect structure comprising copper. Copper pillars are one preferred conductive bonding feature. Optionally, the copper pillars may comprise a top metal layer, such as a nickel layer. When the conductive bonding feature has a top metal layer, a pure tin solder layer is deposited on the top metal layer of the bonding feature. Conductive bonding features such as bond pads, copper pillars, and the like are well known in the art, for example as described in US 7,781,325, US 2008/0054459A, US 2008/0296761 a, and US 2006/0094226A.
Method of producing a composite material
Typically when the invention is used to deposit tin or tin alloys on a substrate, the plating bath is agitated during use. Any suitable agitation method may be used in the present invention and such methods are well known in the art. Suitable agitation methods include, but are not limited to, inert gas or air sprays, workpiece agitation, impingement, and the like. Such methods are well known to those skilled in the art. When the present invention is used to electroplate an integrated circuit substrate, such as a wafer, the wafer may be rotated, for example, at 1-150RPM, and the electroplating solution contacted the rotating wafer, for example, by pumping or spraying. In the alternative, the wafer need not be rotated when the plating bath fluid is sufficient to provide the desired metal deposition.
Tin or tin alloys according to the invention are deposited in the grooves without substantial formation of voids within the metal deposit. The term "substantially no voids formed" means that no voids greater than 1000nm, preferably 500nm, most preferably 100nm, are present in the metal deposit.
Electroplating apparatus for electroplating semiconductor substrates are well known. The electroplating apparatus comprises an electroplating bath containing a tin or tin alloy electrolyte and made of a suitable material such as plastic or other material inert to the electrolytic plating solution. The grooves may be cylindrical, especially for wafer plating. The cathode is horizontally disposed at the upper portion of the tank, and may be any type of substrate such as a silicon wafer having an opening.
These additives may be used with soluble and insoluble anodes with or without a membrane separating the catholyte from the anolyte.
The cathode substrate and the anode are electrically connected and connected to a power source through wires, respectively. The cathode substrate for direct or pulsed current has a net negative charge such that metal ions in the solution are reduced at the cathode substrate, thereby forming plated metal on the cathode surface. The oxidation reaction is carried out at the anode. The cathode and anode may be disposed horizontally or vertically in the cell.
Typically, when fabricating tin or tin alloy bumps, a photoresist layer is applied to a semiconductor wafer, followed by standard photolithographic exposure and development techniques to form a patterned photoresist layer (or plating mask) having openings or vias therein. The dimensions of the plating mask (thickness of the plating mask and size of the openings in the pattern) define the size and location of the tin or tin alloy layer deposited on the I/O pads and UBM. The diameter of such deposits is typically in the range from 1 to 300. mu.m, preferably in the range from 2 to 100. mu.m.
All percentages, ppm or equivalent values, unless otherwise specified, refer to weight relative to the total weight of the corresponding composition. All cited documents are incorporated herein by reference.
The following examples further illustrate the invention without limiting the scope of the invention.
Methods as used herein
The molecular weight of the polymeric ionic compound was determined by Size Exclusion Chromatography (SEC). For leveling agent 3, poly (methyl methacrylate) was used as a standard, and aqueous hexafluoroisopropanol containing 0.05 wt% of potassium trifluoroacetate was used as an effluent.
For leveling agents 1 and 2, poly (2-vinylpyridine) was used as a standard and water containing 0.1 wt% trifluoroacetate and 0.1M NaCl was used as the effluent. The column temperature was 35 ℃, the injection volume was 100 μ L (microliter), the concentration was 1.5mg/ml, and the flow rate was 0.8 ml/min. Determination of the weight average molecular weight (M) of the polymeric Ionic Compoundw) Number average molecular weight (M)n) And a polydisperse PDI (M)w/Mn)。
Coplanarity and morphology (roughness) were determined by measuring the substrate height with a laser scanning microscope.
The patterned photoresist contained vias of 8 μm diameter and 15 μm depth and preformed copper micro-bumps of 5 μm height. Isolated (iso) regions consist of a 3 x 6 array of columns with a center-to-center distance (pitch) of 32 μm. The dense region consisted of an array of 8 x 16 pillars with a center-to-center distance (pitch) of 16 μm. To calculate the in-mold coplanarity (within the mold), take 3 bumps from isolated regions and 3 bumps from the center of dense regions.
In-mold (WID) Coplanarity (COP) was determined by using the following formula
COP＝(Hiso-Hdense)/HAv
Where H isisoAnd HdenseIs the average height of the bumps in the isolated/dense region and HAVIs the overall average height of all bumps in isolated and dense areas as described above.
Average roughness RaCalculated by using the following formula:
where H isiIs the height of location i on the particular bump. During the laser scanning of the surface of one bump, the heights of the n positions are determined. HmeanIs the average height of all n positions of a bump.
Examples
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