阅读说明：本技术 一种压电驱动器及其制造方法和成像模组 (Piezoelectric driver, manufacturing method thereof and imaging module ) 是由 黄河 于 2020-05-14 设计创作，主要内容包括：本发明公开了一种压电驱动器及其制造方法和成像模组,其中压电驱动器包括：压电元件,压电元件沿长度方向上包括可动端和固定端；支撑块,用于固定压电元件的固定端；移动部件,设置于压电元件的可动端,移动部件设有滑槽,可动端至少部分伸入滑槽内；第一卡位结构,设置于移动部件沿压电元件宽度方向的至少一侧；固定部,固定部设有第二卡位结构,第二卡位结构与第一卡位结构相对设置,第一卡位结构和第二卡位结构其中之一为沿移动部件移动方向延伸的凹槽,另一为伸入凹槽中能够相对于凹槽上下移动的凸起；压电元件在通电的状态下,可动端能够带动移动部件沿第二卡位结构向上或向下移动。(The invention discloses a piezoelectric actuator, a manufacturing method thereof and an imaging module, wherein the piezoelectric actuator comprises: the piezoelectric element comprises a movable end and a fixed end along the length direction; the supporting block is used for fixing the fixed end of the piezoelectric element; the moving component is arranged at the movable end of the piezoelectric element and provided with a sliding chute, and the movable end at least partially extends into the sliding chute; the first clamping structure is arranged on at least one side of the moving component along the width direction of the piezoelectric element; the fixed part is provided with a second clamping structure, the second clamping structure is arranged opposite to the first clamping structure, one of the first clamping structure and the second clamping structure is a groove extending along the moving direction of the moving part, and the other clamping structure is a bulge extending into the groove and capable of moving up and down relative to the groove; when the piezoelectric element is in a power-on state, the movable end can drive the moving part to move upwards or downwards along the second clamping structure.)

1. A piezoelectric actuator, comprising:

a piezoelectric element including a movable end and a fixed end in a length direction;

the supporting block is used for fixing the fixed end of the piezoelectric element;

the moving component is arranged at the movable end of the piezoelectric element and provided with a sliding chute, and the movable end at least partially extends into the sliding chute;

the first clamping structure is arranged on at least one side of the moving component along the width direction of the piezoelectric element;

the fixing part is provided with a second clamping structure, the second clamping structure is arranged opposite to the first clamping structure, one of the first clamping structure and the second clamping structure is a groove extending along the moving direction of the moving part, and the other clamping structure is a protrusion extending into the groove and capable of moving up and down relative to the groove;

when the piezoelectric element is in a power-on state, the movable end can drive the moving part to move upwards or downwards along the second clamping structure.

2. The piezoelectric actuator according to claim 1, wherein the first detent structures are a pair of detent structures symmetrically disposed on both sides in the width direction of the piezoelectric element.

3. The piezoelectric actuator according to claim 1, wherein the fixing portion is a first cover disposed on an upper surface of the support block and covering the piezoelectric element and the moving member, and the second latching structure is disposed on a side wall of the first cover.

4. The piezoelectric actuator according to claim 3, wherein the fixing portion further comprises a second cover located on a lower surface of the support block, the second cover covering the piezoelectric element and the moving member, and the second detent structure is partially disposed in a side wall of the first cover and partially disposed in a side wall of the second cover.

5. The piezoelectric actuator according to claim 4, wherein the first cover, the second cover, the support block, and the moving member constitute a sealed cavity.

6. The piezoelectric actuator according to claim 1, wherein the moving member is provided with a bearing portion for adhering the driven member, the bearing portion being provided on a side away from the movable end.

7. The piezoelectric actuator according to claim 1, wherein the moving member is provided with a first film layer, a second film layer and a third film layer stacked in sequence from top to bottom, two sides of the first film layer and the third film layer extend outward relative to one end of the second film layer to form a protruding portion, and the protruding portion and the end of the second film layer enclose the sliding groove.

8. The piezoelectric actuator according to claim 1, wherein the piezoelectric element is provided with slide bars disposed on both sides or in the middle of the movable end, the slide bars extending into the slide grooves and being capable of sliding in a length direction of the piezoelectric element.

9. The piezoelectric driver of claim 8, wherein the depth and height of the runner match the length and height of the runner.

10. The piezoelectric driver according to claim 1, wherein the piezoelectric element includes:

the piezoelectric device comprises a supporting layer and a piezoelectric laminated structure positioned on the supporting layer, wherein the piezoelectric laminated structure comprises a second electrode, a piezoelectric layer and a first electrode which are sequentially stacked from bottom to top.

11. An imaging module comprising the piezoelectric actuator according to any one of claims 1 to 10, and further comprising a driven member provided on a surface of the moving member, the driven member comprising: a lens group, an imaging sensing element, an aperture or a lens sheet;

and the electric connection end is electrically connected with the piezoelectric driver.

12. The imaging module of claim 11, wherein the piezoelectric actuator is a plurality of actuators distributed around the periphery of the driven member.

13. The imaging module of claim 12, wherein a plurality of the piezoelectric actuators are symmetrically disposed.

14. A method of manufacturing a piezoelectric actuator according to claim 1, comprising:

providing a first substrate;

forming a supporting block and a first sacrificial layer located outside the supporting block on the first substrate, and forming a first part of the moving part in the first sacrificial layer, wherein the first part of the moving part comprises a bottom wall of the chute and a first part of a side wall of the chute;

forming a piezoelectric element, wherein the piezoelectric element comprises a movable end and a fixed end, the fixed end is arranged on the supporting block, and the movable end extends into the chute;

forming a second sacrificial layer on the piezoelectric element, on the first sacrificial layer, and a second portion of the moving part in the second sacrificial layer, the second portion of the moving part including a second portion of the chute side wall and a top wall of the chute; the first portion of the moving member and the second portion of the moving member constitute the moving member;

patterning the first substrate to form a support fence, wherein the support fence forms all or part of the fixing part and forms at least part of a second clamping structure in the support fence;

when or after forming the moving part, further comprising: forming a first detent structure on the moving member;

and removing the first sacrificial layer and the second sacrificial layer.

15. The method of manufacturing a piezoelectric actuator according to claim 14, wherein the fixing portion further includes a top cover, the method further comprising:

providing the top cover, bonding the top cover to the supporting wall, wherein the fixed part forms a first cover of the piezoelectric actuator, and the first cover covers the piezoelectric element and the moving part.

16. The method of manufacturing a piezoelectric actuator according to claim 15, wherein the first detent structure is the projection, and the step of forming the projection includes:

forming the projection when forming the first portion of the moving part; or the like, or, alternatively,

forming the projection when forming the second portion of the moving part; or the like, or, alternatively,

forming a first portion of the projection when forming the first portion of the moving part and a second portion of the projection when forming the second portion of the moving part, the first portion of the projection and the second portion of the projection together forming the complete projection.

17. The method of manufacturing a piezoelectric actuator according to claim 15, wherein the second detent structure is the recess, and forming the recess includes:

patterning the first substrate to form the support fence, and forming the groove in the step of forming the support fence; or after the first substrate is patterned and the supporting fence is formed, forming the groove in the supporting fence through an etching process.

18. The method of manufacturing a piezoelectric actuator according to claim 15, wherein the fixing portion further includes a second cover, the method further comprising:

providing a second cover, forming a part of the second clamping structure in the side wall of the second cover, and bonding the second cover to the lower surface of the supporting block, wherein the second cover covers the piezoelectric element and the moving part.

19. The method of manufacturing a piezoelectric actuator according to claim 18, wherein the first cover, the second cover, the support block, and the moving member constitute a sealed chamber.

20. The method of manufacturing a piezoelectric actuator according to claim 14, wherein the method of forming the piezoelectric element includes:

pre-forming the piezoelectric element, and bonding the fixed end of the piezoelectric element to the supporting block; or, forming a support layer on the support block and the first sacrificial layer, forming a second electrode on the support layer, forming a piezoelectric layer on the second electrode, forming a first electrode on the piezoelectric layer, and patterning the first electrode, the piezoelectric layer, the second electrode, and the support layer to form the piezoelectric element; or the like, or, alternatively,

forming a second electrode on the supporting block and the first sacrificial layer, forming a piezoelectric layer on the second electrode, forming a first electrode on the piezoelectric layer, forming a supporting layer on the first electrode, and patterning the supporting layer, the first electrode, the piezoelectric layer and the second electrode to form the piezoelectric element.

Technical Field

The invention relates to the technical field of motion control, in particular to a piezoelectric driver, a manufacturing method thereof and an imaging module.

Background

In some electronic terminals, it is often necessary to translate, vertically move or tilt some of the components to achieve some specific functions. For example, in various electronic terminals such as video cameras, still cameras, and mobile phones having a lens module, a movable lens or an image sensor is usually moved in an optical axis direction to focus or zoom or moved in a direction perpendicular to the optical axis direction to prevent optical shake by a driving mechanism such as a VCM Motor. However, unlike the conventional single lens reflex camera, it is a great engineering challenge to implement the function in electronic terminals such as mobile phones, micro video cameras, and cameras with a small spatial volume. Referring to fig. 1A and 1B, which are main structural views of a brake, fig. 1A shows an ideal state after a sacrificial layer is released, in which a moving member 30 is in a balanced state, and fig. 1B shows an actual state after the sacrificial layer is released, in which the moving member 30 rotates by gravity. In some cases, the actuator is required to release the supporting sacrificial layer and then bond with the element to be actuated, and the rotation of the moving part 30 affects the subsequent bonding of the element. In addition, referring to fig. 2A and 2B, fig. 2A is a schematic structural view of the driven member 50 moving upward in an ideal state, and fig. 2B is a schematic structural view of the driven member 50 moving laterally, so how to solve the above two problems is a problem to be solved at present.

Disclosure of Invention

The invention aims to provide a piezoelectric actuator, a manufacturing method thereof and an imaging module, which can solve the problems that a moving part rotates under the action of gravity after a sacrificial layer is released and a driven part moves horizontally when moving upwards or downwards.

In order to achieve the above object, the present invention provides a piezoelectric driver including:

a piezoelectric element including a movable end and a fixed end in a length direction;

the supporting block is used for fixing the fixed end of the piezoelectric element;

the moving component is arranged at the movable end of the piezoelectric element and provided with a sliding chute, and the movable end at least partially extends into the sliding chute;

the first clamping structure is arranged on at least one side of the moving component along the width direction of the piezoelectric element;

the fixing part is provided with a second clamping structure, the second clamping structure is arranged opposite to the first clamping structure, one of the first clamping structure and the second clamping structure is a groove extending along the moving direction of the moving part, and the other clamping structure is a protrusion extending into the groove and capable of moving up and down relative to the groove;

when the piezoelectric element is in a power-on state, the movable end can drive the moving part to move upwards or downwards along the second clamping structure.

The invention further provides an imaging module, which includes the piezoelectric actuator and a driven component, wherein the driven component is arranged on the surface of the moving component, and the driven component includes: a lens group, an imaging sensing element, an aperture or a lens sheet;

and the electric connection end is electrically connected with the piezoelectric driver.

The present invention also provides a method of manufacturing a piezoelectric actuator, comprising:

providing a first substrate;

forming a supporting block and a first sacrificial layer located outside the supporting block on the first substrate, and forming a first part of the moving part in the first sacrificial layer, wherein the first part of the moving part comprises a bottom wall of the chute and a first part of a side wall of the chute;

forming a piezoelectric element, wherein the piezoelectric element comprises a movable end and a fixed end, the fixed end is arranged on the supporting block, and the movable end extends into the chute;

forming a second sacrificial layer on the piezoelectric element, on the first sacrificial layer, and a second portion of the moving part in the second sacrificial layer, the second portion of the moving part including a second portion of the chute side wall and a top wall of the chute; the first portion of the moving member and the second portion of the moving member constitute the moving member;

patterning the first substrate to form a support fence, wherein the support fence forms all or part of the fixing part and forms at least part of a second clamping structure in the support fence;

when or after forming the moving part, further comprising: a first detent structure is formed on the moving member.

The invention has the beneficial effects that: set up first screens structure in the moving part, set up second screens structure opposite at first screens structure, first screens structure and second screens structure are mutually supported (one of them is the recess, another is the arch that stretches into in the recess), when the moving part upwards or when moving down, the lateral shifting of first screens structure is restricted to second screens structure to restriction moving part's lateral shifting, can solve simultaneously and release after the sacrifice layer, the slide bar is free motion in the spout, the moving part receives the action of gravity to produce pivoted problem.

Furthermore, the second clamping structure is arranged in the first sealing cover and/or the second sealing cover, so that the structure is simple, and the manufacturing process is simple.

Furthermore, the first sealing cover and the second sealing cover form a sealed space, and the piezoelectric element can be protected from being polluted by the external environment.

Further, the length of the sliding groove along the length direction of the piezoelectric element is adapted to the height of the piezoelectric element moving up and down, namely when the piezoelectric element is in a balanced state, the sliding rod is positioned at the end part of the sliding groove on the side far away from the movable end, and when the piezoelectric element moves up or down to the highest or lowest position, the sliding rod is positioned at the end part of the sliding groove on the side close to the movable end. In this arrangement, when the driven member is lifted, the horizontal movement of the driven member in the longitudinal direction of the chute is minimized. Particularly, when the sliding rod slides to the end part of the sliding groove, the driven part can be completely restricted from moving in the length direction of the sliding groove;

further, the length of the slide groove in the width direction of the piezoelectric element is matched with the length of the slide groove, and the lateral movement of the driven member in the width direction of the piezoelectric element is restricted, thereby restricting the horizontal movement of the driven member in the width direction of the piezoelectric element.

Drawings

FIG. 1A shows an example of an ideal situation after the sacrificial layer of the piezoelectric actuator is released.

FIG. 1B illustrates the rotation of the moving part after the sacrificial layer of the piezoelectric actuator is released.

Fig. 2A is an ideal case of a piezoelectric driver driving a driven member to move upward in an example.

Fig. 2B shows an example of the lateral movement of the piezoelectric actuator when the driven member is driven upward.

Fig. 3 is a schematic structural diagram of a piezoelectric actuator according to an embodiment of the invention.

Fig. 4 is a top view of fig. 3.

Fig. 5 is a schematic structural diagram of a piezoelectric element according to an embodiment of the invention.

Fig. 6 is a schematic structural diagram of a piezoelectric actuator according to another embodiment of the present invention.

FIG. 7 is a schematic view of the first and second detent structures of the present invention limiting lateral movement of the movable member.

Fig. 8 is a schematic structural diagram of a first cover according to an embodiment of the invention.

FIG. 9 is a schematic diagram of a piezoelectric element with a sliding rod according to an embodiment of the present invention.

Fig. 10 is a schematic view of a piezoelectric element with a sliding rod according to another embodiment of the present invention.

FIG. 11 is a schematic view of an example of a chute structure.

Fig. 12 is a schematic structural view of a chute according to an embodiment of the invention.

Fig. 13 is a schematic structural diagram of an imaging module according to an embodiment of the invention.

Fig. 14 is a top view of fig. 13.

Fig. 15 is a schematic structural diagram of an imaging module according to an embodiment of the invention.

Fig. 16 is a schematic structural diagram of an imaging module according to an embodiment of the invention.

Fig. 17 is a schematic structural diagram of an imaging module according to an embodiment of the invention.

Fig. 18 is a schematic structural diagram of an imaging module according to an embodiment of the invention.

Fig. 19 to fig. 31B are schematic structural diagrams of different stages of a manufacturing method of a piezoelectric actuator according to an embodiment of the invention.

Description of reference numerals:

10-a support block; 20-a piezoelectric element; 201-a slide bar; 21-a first electrode; 22-a second electrode; 23-a piezoelectric film; 24-a support layer; 25-an insulating layer; 251-a first electrode lead-out; 252-a second electrode lead-out; 30-a moving part; 311-a first film layer; 312-a second film layer; 313-a third film layer; 31-a chute; 32-a carrier; 40-a first clamping structure; 41-a second clamping structure; 401 — a first sidewall; 402-a second sidewall; 50-a driven member; 60-a fixed part; 61-a first electrical connection; 62-a second electrical connection; 63-a conductive plug; 80-a lead; 81-an electrical connection terminal; 82-an electrical connection terminal; 83-electrical connection; 84-lead; 85-electrical connection terminal; 86-lead wire; 87-a lead; 88-an electrical connection terminal; 89-an electrical connection terminal; 90-lead wire; 100-a circuit board; 200-a first substrate; 313-chute bottom wall; 3121-a first portion of a chute side wall; 3122-a second portion of the chute side wall; 311-chute ceiling; 321-a projection; 411-supporting the fence; 412-a top cover; 70-second cover.

Detailed Description

The imaging module and the manufacturing method thereof according to the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description and drawings, it being understood, however, that the concepts of the present invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. The drawings are in simplified form and are not to scale, but are provided for convenience and clarity in describing embodiments of the invention.

It will be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it can be directly on, adjacent to, connected or coupled to the other elements or layers or intervening elements or layers may be present. In contrast, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to" or "directly coupled to" other elements or layers, there are no intervening elements or layers present. It will be understood that, although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present invention.

Spatial relational terms such as "under," "below," "under," "above," "over," and the like may be used herein for convenience in describing the relationship of one element or feature to another element or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, then elements or features described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary terms "under" and "under" can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatial descriptors used herein interpreted accordingly.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. As used herein, the term "and/or" includes any and all combinations of the associated listed items.

If the method herein comprises a series of steps, the order in which these steps are presented herein is not necessarily the only order in which these steps may be performed, and some steps may be omitted and/or some other steps not described herein may be added to the method. Although elements in one drawing may be readily identified as such in other drawings, the present disclosure does not identify each element as being identical to each other in every drawing for clarity of description.

An embodiment of the present invention provides a piezoelectric actuator, fig. 3 is a schematic structural diagram of a piezoelectric actuator according to an embodiment of the present invention, and fig. 4 is a top view of fig. 3. Referring to fig. 3 and 4, the piezoelectric actuator includes:

a piezoelectric element 20, the piezoelectric element 20 including a movable end and a fixed end in a length direction;

a supporting block 10 for fixing a fixed end of the piezoelectric element 20;

and a moving member 30 provided at a movable end of the piezoelectric element 20, the moving member being provided with a slide groove 31, the movable end at least partially extending into the slide groove 31.

The first detent structures 40 are disposed on at least one side of the moving member 30 along the width direction of the piezoelectric element 20 (in the embodiment, a pair of first detent structures 40 are symmetrically disposed on two sides of the moving member along the width direction of the piezoelectric element 20).

The fixing portion 60 is provided with a second clamping structure 41, the second clamping structure 41 is arranged opposite to the first clamping structure 40, one of the first clamping structure 40 and the second clamping structure 41 is a groove extending along the moving direction of the moving part 30 (the moving element moves up and down), and the other is a protrusion extending into the groove and capable of moving up and down relative to the groove. In this embodiment, the first locking structure 40 is a protrusion, and the second locking structure 41 is a groove.

When the piezoelectric element 20 is in the energized state, the movable end can drive the moving part 30 to move upward or downward along the second detent structure 41.

First, the working principle of the piezoelectric actuator is described: the driving component of the piezoelectric actuator is a piezoelectric element 20, one end of the piezoelectric element 20 fixed to the supporting block 10 is a fixed end, and the other end is a movable end, and the movable end moves upwards or downwards when the piezoelectric element is in a power-on state. Specifically, referring to fig. 5, in the present embodiment, the specific structure of the piezoelectric element 20 includes a support layer 24, and a piezoelectric stack structure located on the support layer 24, where the piezoelectric stack structure includes a second electrode 22, a piezoelectric film 23, and a first electrode 21 stacked in sequence from bottom to top, an insulating layer 25 is further disposed above the first electrode 21, the first electrode 21 and the second electrode 22 are respectively connected to a first electrode terminal 251 and a second electrode terminal 252, and the first electrode terminal 251 and the second electrode terminal 252 are both located in the insulating layer 25.

When the first electrode lead 251 and the second electrode lead 252 are energized, a voltage difference is generated between the upper surface and the lower surface of the piezoelectric film 23, and the piezoelectric film 23 contracts, and the support layer 24 cannot expand and contract, so that the piezoelectric element 20 warps upward or downward (the direction of the warpage, the degree of the warpage depends on the voltages applied to the upper and lower surfaces of the piezoelectric film 23) after the energization, and the movable end of the piezoelectric element 20 bends upward or downward. When the movable end of the piezoelectric element 20 is provided with an element, the element can be driven to move up and down.

The piezoelectric film 23 is made of a piezoelectric material that can be deformed when energized, such as quartz crystal, aluminum nitride, zinc oxide, lead zirconate titanate, barium titanate, lithium gallate, lithium germanate, or titanium germanate. The material of the support layer 24 is a dielectric material that is not electrically conductive, such as silicon oxide, silicon nitride, etc.

As described in the background art, the moving part 30 is prone to horizontal movement during the up and down movement, and in order to prevent the horizontal movement, the moving part 30 is provided with a first detent structure 40, in this embodiment, the first detent structure 40 is a pair of protrusions facing outward in the width direction of the piezoelectric element, and the pair of protrusions is symmetrically arranged with respect to the piezoelectric element. In other embodiments, the protrusion may be one, located on one side of the moving part, or may be multiple, located on one or both sides of the moving part. When the plurality of protrusions are located on both sides of the moving member, they may be symmetrically or asymmetrically arranged. The fixing portion 60 is provided with a second locking structure 41, which is a groove in this embodiment, and the protrusion is disposed opposite to the groove and extends into the groove. The two side walls of the groove prevent the protrusion from moving laterally, so that the protrusion can only move vertically along the groove. Referring to fig. 6, in another embodiment, the first detent structure is a recess and the second detent structure is a protrusion.

Referring to fig. 7, fig. 7 is a schematic cross-sectional view of a structure in which the protrusion and the groove restrict the lateral movement (in the X-X direction) of the moving member 30. The groove includes a first sidewall 401 and a second sidewall 402, and the first sidewall 401 and the second sidewall 402 are distributed along the length direction (X-X direction) of the piezoelectric element. The projection is located between the two side walls, one of the projection or the recess is fixed, the other is located on the moving part, and when the recess is located on the moving part, the moving part moves along the X-X direction and is blocked by the projection. When the projection is on the moving member and the moving member moves in the X-X direction, the projection is blocked by the first sidewall 401 and the second sidewall 402, and the combination of the projection and the groove restricts the lateral movement of the moving member 30.

The second clamping structure is arranged on the fixing part, and the fixing part is used for bearing the second clamping structure. The second clamping structure is fixed, and no requirement is made on the structural characteristics of the fixing part.

Referring to fig. 8 and 3, in one embodiment, the fixing portion 60 is a first cover disposed on the upper surface of the supporting block 10 to cover the piezoelectric element and the moving member, and the second detent structure 41 (groove) is disposed in a side wall of the first cover. In another embodiment, the fixing portion is a support enclosure disposed on the support block, and the second retaining structure is disposed in the support enclosure.

Referring to fig. 3, in the present embodiment, the fixing portion further includes a second cover 70, the second cover 70 is located on the lower surface of the support block 10, the second cover 70 covers the piezoelectric element and the moving member, and the second detent structure (groove) is partially disposed in a sidewall of the first cover and partially disposed in a sidewall of the second cover. In this embodiment, the first cover, the second cover, the supporting block, and the moving member form a sealed cavity. In another embodiment, the fixing portion may be a second cover, and the second latching structure is disposed in a sidewall of the second cover.

Set up first screens structure in the moving part, set up the second screens structure opposite at first screens structure, first screens structure and second screens structure are mutually supported, when the moving part upwards or when moving down, the lateral shifting of first screens structure is restricted to the second screens structure to restriction moving part's lateral shifting, can solve simultaneously and release the sacrificial layer after, the slide bar is free motion in the spout, the moving part receives the action of gravity to produce pivoted problem. In this embodiment, the second locking structure is disposed in the first cover and the second cover, and the first cover and the second cover form a sealed space, so as to protect the piezoelectric element from being contaminated by the external environment.

Referring to fig. 4, in one embodiment, the moving member 30 is provided with a bearing portion 32 (shown in a dashed box), the bearing portion 32 is used for bonding a driven member, and the bearing portion 32 is disposed on a side away from the movable end.

Referring to fig. 9 and 10, in one embodiment, the piezoelectric element 20 is provided with a sliding rod 201, the sliding rod 201 is disposed at two sides or in the middle of the movable end, and the sliding rod 201 extends into the sliding slot and can slide along the length direction of the piezoelectric element. In the invention, when the sacrificial layer is released, the second clamping structure restricts the rotation of the moving part caused by the action of gravity.

Referring to fig. 11, in one embodiment, the moving member 30 is provided with a first film 311, a second film 312 and a third film 313 stacked from top to bottom, wherein two sides of the first film 311 and the third film 313 extend outward relative to the second film 312 to form an extending portion, and the extending portion and an end of the second film 312 enclose the sliding slot 31. The slide groove 31 has an opening in a direction in which the piezoelectric element 20 extends and contracts, when the piezoelectric element 20 warps, the slide rod 201 moves in the direction of the opening of the slide groove 31, and there is a risk of dropping out of the slide groove 31, referring to fig. 12, which is a schematic structural view of the slide groove 31, and referring to fig. 11, the slide groove 31 has an opening in a length direction (arrow X direction) of the piezoelectric element 20, and the slide rod 201 moves to the opening and there is a risk of dropping from the opening, and fig. 11 is a schematic structural view of a cross section of the slide groove 31 viewed in a width direction (arrow Y direction) of the piezoelectric element after the opening is closed. The cross section of the sliding chute 31 is annular, and when the sliding rod 201 slides to the edge of the sliding chute 31, the sliding rod is blocked and cannot fall off from the sliding chute 31.

In addition, the length of the slide groove 31 in the longitudinal direction of the piezoelectric element is adapted to the height of the piezoelectric element moving up and down. That is, when the piezoelectric element 20 is in the equilibrium state, the slide rod 201 is located at the end of the slide groove 31 on the side away from the movable end, and when the piezoelectric element 20 moves up or down to the highest or lowest position, the slide rod 201 is located at the end of the slide groove 31 on the side close to the movable end. In this arrangement, when the driven member is lifted, the horizontal movement of the driven member in the longitudinal direction of the chute is minimized. Especially when the slide bar 201 slides to the end of the slide groove 31, the movement of the driven member in the lengthwise direction of the slide groove 31 can be completely restricted.

With continued reference to fig. 11, in one embodiment, the sliding rod is disposed on both sides of the movable end, the sliding grooves include a first sub-sliding groove and a second sub-sliding groove (shown in two dotted ellipses) disposed oppositely, the first sub-sliding groove and the second sub-sliding groove are respectively provided with a first opening disposed oppositely along the width direction (along the Y direction) of the piezoelectric element, and the sliding rod extends into the sliding groove from the first opening.

In one embodiment, the depth and height of the chute 31 match the length and height of the chute. The depth of the sliding chute 31 is the length of the sliding chute in the width direction of the piezoelectric element, and the depth is matched with the length of the sliding rod 201, which means that the gap between the end part of the sliding rod 201 and the inner wall of the sliding chute 31 opposite to the end part is small, in this embodiment, the sliding rod 201 extends out of two sides of the movable end, and the top ends of the sliding rods 201 on two sides are provided with small gaps with the inner wall of the sliding chute 31, so that the horizontal movement of the driven part in the width direction of the piezoelectric element can be restricted. When the slide bar 201 is located in the middle of the movable end of the piezoelectric element, the gap between the two ends of the slide bar 201 and the two opposing side walls of the slide groove 31 is also minute, thereby controlling the horizontal movement of the driven member in the width direction of the piezoelectric element.

In one embodiment, the piezoelectric element 20 is fixed on the upper surface of the supporting block 10, and in another embodiment, the supporting block 10 includes an upper supporting block and a lower supporting block which are vertically distributed, and the piezoelectric element is fixed between the upper supporting block and the lower supporting block. When the piezoelectric element 20 is fixed between the upper support block and the lower support block, it is more advantageous to fix the fixed end of the piezoelectric element.

In one embodiment, the piezoelectric element is integrally located on the support block or the movable end of the piezoelectric element is suspended. When the whole piezoelectric element is positioned on the supporting block, the piezoelectric element is suitable for the condition that the piezoelectric element only needs to be warped upwards; when the movable end of the piezoelectric element is suspended, the movable end can be simultaneously applied to the condition that the piezoelectric element moves upwards or downwards.

An embodiment of the present invention further provides an imaging module, referring to fig. 13 and 14, fig. 13 is a schematic structural diagram of an imaging module according to an embodiment of the present invention, and fig. 14 is a top view of fig. 13. Referring to fig. 13 and 14, the imaging module includes the piezoelectric actuator and the driven component 50, the driven component 50 includes a lens group, an imaging sensor, an aperture or a lens sheet, and the driven component is disposed on the surface of the moving component; and the electric connection end is electrically connected with the piezoelectric driver.

Referring to fig. 13, in the present embodiment, two piezoelectric actuators are provided, and are symmetrically disposed with respect to the driven member 50, and the driven member 50 is disposed on the upper surface of the moving member. In other embodiments, the driven member 50 may be fixed to the lower surface of the moving member. The fixing mode comprises dry film bonding or viscose bonding.

In another embodiment, the piezoelectric actuator is provided in plurality, and the plurality of piezoelectric actuators is provided on the outer periphery of the driven member. In a preferred embodiment, the plurality of piezoelectric actuators are symmetrically arranged.

Of course, the piezoelectric actuators may be arranged asymmetrically, and it should be understood that when the piezoelectric actuators are arranged symmetrically, the balance of the driven member is facilitated, otherwise the driven member is prone to tilt during ascending or descending.

Referring to fig. 13, two piezoelectric drivers are symmetrically disposed on both sides of the driven member 50, the piezoelectric drivers are disposed on the circuit board 100, and the driven member 50 is bonded to the upper surfaces of the two piezoelectric driver carrying portions. A first electrode terminal and a second electrode terminal (not shown) of the piezoelectric element 20 are located on the bottom surface of the piezoelectric element 20, and a first electrical connection terminal 61 and a second electrical connection terminal 62 are located below the piezoelectric actuator and directly below the piezoelectric element 20. A conductive plug 63 connected with the first electrical connection terminal 61 is arranged below the piezoelectric element 20, the other end of the conductive plug 63 is electrically connected with a first electrode terminal of the piezoelectric element 20, and the second electrical connection terminal 62 is electrically connected with a second electrode terminal of the piezoelectric element 20 through another conductive plug 63. The first electric connection end 61 and the second electric connection end 62 are electrically connected with the circuit board 10 to supply power to the piezoelectric driving component.

Referring to fig. 15, when the first electrode terminal and the second electrode terminal (not shown) are both located on the top surface of the piezoelectric element, the first electrode terminal and the second electrode terminal may be electrically connected to a circuit board 100 through a lead wire 80, respectively, so that the circuit board 100 may apply a voltage to the piezoelectric actuator.

When the fixed end of the piezoelectric element is fixed between the upper-layer supporting block and the lower-layer supporting block, the first electrode leading-out end and the second electrode leading-out end of the piezoelectric element are located on the upper surface of the piezoelectric element, a first electric connection end and a second electric connection end can be arranged on the upper surface of the upper-layer supporting block and right above the piezoelectric element, the first electrode leading-out end and the second electrode leading-out end are respectively connected to the first electric connection end and the second electric connection end through conductive plugs penetrating through the upper-layer supporting block, and the first electric connection end and the second electric connection end can be connected to a circuit board through leads.

When the fixed end of the piezoelectric element is fixed between the upper layer supporting block and the lower layer supporting block, one of the first electrode leading-out end and the second electrode leading-out end is positioned on the upper surface of the piezoelectric element, and the other one is positioned on the lower surface of the piezoelectric element. The upper surface of the upper layer supporting block and the lower surface of the lower layer supporting block are respectively provided with an electric connection end, the electrode leading-out end is electrically connected with the electric connection end through a conductive plug, the electric connection end positioned on the lower surface of the supporting block is directly and electrically connected with the circuit board, and the electric connection end positioned on the upper surface of the supporting block is electrically connected with the circuit board through a lead.

In another embodiment, the driven member 50 is an imaging sensor element, which requires electrical connections.

With continued reference to fig. 15, the electrical connection end 82 of the driven member 50 is located on the upper surface of the driven member 50, an electrical connection end 81 is provided on the upper surface of the piezoelectric driver, and the electrical connection end 81 and the electrical connection end 82 are electrically connected by a lead 84. The piezoelectric actuator is further provided with a conductive plug 85 longitudinally penetrating through the piezoelectric actuator, the bottom surface of the piezoelectric actuator is provided with an electric connection end 83, two ends of the conductive plug 85 are respectively connected with the electric connection end 81 and the electric connection end 83, and the electric connection end 83 is electrically connected with the circuit board 100.

Referring to fig. 16, in another way of connecting the imaging sensor element to the circuit board, an electrical connection end 82 of the driven part 50 is located on the upper surface of the driven part 50, an electrical connection end 85 is arranged on the upper surface of the supporting block, the electrical connection end 82 and the electrical connection end 85 are connected through a lead 86, and the electrical connection end 85 and the circuit board 100 are electrically connected through a lead 87. It is of course also possible to form conductive plugs through the support block 10 and its underlying structure, by means of which the electrical connection terminals 85 are electrically connected to the circuit board 100.

Referring to fig. 17, the lower surface of the imaging sensor element is provided with an electrical connection terminal 88, the upper surface of the moving member 30 is provided with an electrical connection terminal 89, the electrical connection terminal 88 is in contact with the electrical connection terminal 89, the electrical connection terminal 89 is electrically connected to the wiring board through the wiring layer of the piezoelectric element 20, and the electrical connection structure of the electrical connection terminal 88 to the wiring board 10 is omitted in the figure.

Referring to fig. 18, the upper surface of the imaging sensor element is provided with an electrical connection terminal 88, the upper surface of the moving member 30 is provided with an electrical connection terminal 89, the electrical connection terminal 88 and the electrical connection terminal 89 are electrically connected by a lead 90, the electrical connection terminal 89 is electrically connected to the wiring board through the wiring layer of the piezoelectric element 20, and the electrical connection structure of the electrical connection terminal 88 to the wiring board 10 is omitted in the figure.

In another embodiment, the driven component is a mirror.

The moving part of the piezoelectric actuator is connected with one side of the reflector, the other side, opposite to the reflector, of the reflector is rotatably connected with a supporting surface, and when the piezoelectric element is electrified and warped upwards or downwards, the reflector is inclined, so that the purpose of changing the reflection angle is achieved.

In the present invention, one side of the mirror is not limited to one piezoelectric actuator, and two or more piezoelectric actuators may be provided.

It should be understood that the mirror is not limited to having the piezoelectric actuators distributed on only one side, but may also have the piezoelectric actuators distributed on two sides, four sides, and circumferentially.

An embodiment of the present invention further provides a method for manufacturing a piezoelectric actuator, and fig. 19 to 31 are schematic structural diagrams corresponding to different steps of the method for manufacturing a piezoelectric actuator according to an embodiment of the present invention, and the method for manufacturing a piezoelectric actuator will be described in detail below with reference to fig. 19 to 31.

The manufacturing method of the piezoelectric actuator comprises the following steps:

s01: providing a first substrate;

s02: forming a supporting block and a first sacrificial layer located outside the supporting block on the first substrate, and forming a first part of the moving part in the first sacrificial layer, wherein the first part of the moving part comprises a bottom wall of the chute and a first part of a side wall of the chute;

s03: forming a piezoelectric element, wherein the piezoelectric element comprises a movable end and a fixed end, the fixed end is arranged on the supporting block, and the movable end extends into the chute;

s04: forming a second sacrificial layer on the piezoelectric element, on the first sacrificial layer, and a second portion of the moving part in the second sacrificial layer, the second portion of the moving part including a second portion of the chute side wall and a top wall of the chute; the first portion of the moving member and the second portion of the moving member constitute the moving member;

s05: patterning the first substrate to form a support fence, wherein the support fence forms all or part of the fixing part and forms at least part of a second clamping structure in the support fence;

s06: when or after forming the moving part, further comprising: a first detent structure is formed on the moving member.

S07: and removing the first sacrificial layer and the second sacrificial layer.

Step S0N does not represent a chronological order.

Referring to fig. 19, step S01 is performed: a first substrate 200 is provided.

In this embodiment, the first substrate serves as both the carrier structure on which the support blocks and the moving member are formed and the second detent structure (which is a recess in this embodiment) is formed at a later stage. The material of the first substrate 200 may be any one of the following materials: silicon (Si), germanium (Ge), silicon germanium (SiGe), silicon carbon (SiC), silicon germanium carbon (SiGeC), indium arsenide (InAs), gallium arsenide (GaAs), indium phosphide (InP), or other III/V compound semiconductors or glasses.

Referring to fig. 20 to 22, step S02 is performed: a supporting block 10 and a first sacrificial layer outside the supporting block 10 are formed on the first substrate 200, and a first portion of the moving member including the bottom wall 313 of the chute and the first portion 3121 of the side wall of the chute is formed in the first sacrificial layer.

In this embodiment, the formation of the support block 10, the bottom wall 313 of the chute and the first portion 3121 of the side wall of the chute further includes forming a portion of the first detent structure 40 (protrusion). The specific method comprises the following steps: referring to fig. 20, a dielectric film is formed on the first substrate 200, and the dielectric film is patterned to form the supporting block 10 (it should be noted that only the bottom of the supporting block 10 is formed in this step, other layers of dielectric films are formed in a later process, and when the dielectric film is patterned, the dielectric film above the supporting block 10 is remained to form a complete supporting block, and the formation of the supporting block 10 will not be described in the following description). A first sacrificial layer is formed outside the supporting block 10.

Referring to fig. 21, a dielectric film is formed to cover the first sacrificial layer, and the dielectric film is patterned to form a bottom wall 313 of the runner and also form a bottom of the first stopper structure 40 (protrusion). Referring to fig. 22, a dielectric film is formed overlying the bottom wall 313 of the chute and patterned to form a first portion 3121 of the chute side wall, the dielectric film overlying the upper surface of the protrusion.

Referring to fig. 23, step S03 is performed: a piezoelectric element 20 is formed, the piezoelectric element 20 including a movable end and a fixed end, the fixed end being disposed on the supporting block 10, the movable end extending into the sliding groove.

The method of forming the piezoelectric element 20 includes three types, the first being: the piezoelectric element 20 is formed in advance, and the fixed end of the piezoelectric element 20 is bonded to the supporting block 10. The fixed end of the piezoelectric element 20 may be bonded to the supporting block 10 by dry film bonding or adhesive bonding. The second method is as follows: forming a support layer on the support block and the first sacrificial layer, forming a second electrode on the support layer, forming a piezoelectric layer on the second electrode, forming a first electrode on the piezoelectric layer, and patterning the first electrode, the piezoelectric layer, the second electrode, and the support layer to form the piezoelectric element. The third method is as follows: forming a second electrode on the supporting block and the first sacrificial layer, forming a piezoelectric layer on the second electrode, forming a first electrode on the piezoelectric layer, forming a supporting layer on the first electrode, and patterning the supporting layer, the first electrode, the piezoelectric layer and the second electrode to form the piezoelectric element.

Referring to fig. 24 and 25, step S04 is performed: forming a second sacrificial layer on the piezoelectric element 20, on the first sacrificial layer, and a second portion of the moving part in the second sacrificial layer, the second portion of the moving part including a second portion 3122 of the chute side wall and a top wall 311 of the chute; the first portion of the moving member and the second portion of the moving member constitute the moving member. In this embodiment, the first detent structure (protrusion) continues to be formed when the second portion 3122 of the chute side wall is formed, and the first detent structure (protrusion) continues to be formed when the top wall 311 of the chute is formed. In this embodiment, the first part of the first detent structure (projection) is formed when the first part of the moving member is formed, and the second part of the first detent structure (projection) is formed when the second part of the moving member is formed. The first portion of the projection and the second portion of the projection together form the complete projection. In other embodiments, the step of forming the first detent structure (protrusion) may further be: forming the projection when forming the first portion of the moving part; alternatively, the projection is formed when the second portion of the moving member is formed.

Referring to fig. 26, a sacrificial layer material is formed above the top wall 311 and at the outer circumference of the supporting block 10 for temporarily wrapping the formed moving parts for protecting the moving parts.

Referring to fig. 27, step S05 is performed to pattern the first substrate to form a support fence 411, where the support fence 411 forms all or a part of the fixing portion (in this embodiment, the support fence forms a part of the fixing portion), and at least a part of the second detent structure 41 (groove) is formed in the support fence 411. In this embodiment, a portion of the second detent structure is formed. In this embodiment, the method for forming the groove includes: patterning the first substrate to form the support fence, and forming the recess in the step of forming the support fence. In another embodiment, the method of forming the groove is: and after the first substrate is patterned and the supporting enclosing wall is formed, forming the groove in the supporting enclosing wall through an etching process. In another embodiment, the support enclosure forms all of the fixed portion and the second detent structure is located in all of the fixed portion.

Referring to fig. 28, in this embodiment, the fixing portion further includes a top cover 412, and the manufacturing method further includes: providing the top cover 412, bonding the top cover 412 to the supporting enclosing wall 411, wherein the fixed part constitutes a first cover of the piezoelectric actuator, and the first cover covers the piezoelectric element and the moving part.

Referring to fig. 29 and 30, in the present embodiment, the fixing portion further includes a second cover 70, and the manufacturing method further includes: providing a second cover 70, forming a part of the second detent structure 41 (groove) in the sidewall of the second cover 70, bonding the second cover 70 to the lower surface of the support block, the second cover covering the piezoelectric element 20 and the moving part. In one embodiment, the first cover, the second cover, the support block and the moving member constitute a sealed cavity.

Referring to fig. 31A and 31B, the first sacrificial layer and the second sacrificial layer are removed.

It should be noted that, in the present specification, all the embodiments are described in a related manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.

The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.