阅读说明：本技术 一种用于防尘的滑动装置 (Be used for dirt-proof slider ) 是由 布拉玛奇.马丁 杨忠明 胡鸽 李永军 李雪香 康骐 牛亭 于 2021-07-02 设计创作，主要内容包括：本发明涉及一种用于防尘的滑动装置,包括Y轴滑座、Z轴滑板,所述Y轴滑座与所述Z轴滑板之间设置有两个交叉滚柱导轨,每个所述交叉滚柱导轨包括相互滑动配合的固定轨道、滑动轨道,所述固定轨道与所述Y轴滑座固定连接,所述滑动轨道与所述Z轴滑板固定连接,所述交叉滚柱导轨的两端分别固定连接有除尘组件,每个所述除尘组件与所述交叉滚柱导轨的滑动面抵接以对滑动面进行除尘操作,通过所述交叉滚柱导轨的设置,使得所述Y轴滑座与所述Z轴滑板之间的连接刚性更高,动作更加轻快,并且有效行程更大,本结构无间隙且高刚性,能够降低在切割过程中出现因碰撞切割头导致导轨变形的情况发生。(The invention relates to a dustproof sliding device, which comprises a Y-axis sliding seat and a Z-axis sliding plate, wherein two crossed roller guide rails are arranged between the Y-axis sliding seat and the Z-axis sliding plate, each crossed roller guide rail comprises a fixed rail and a sliding rail which are mutually matched in a sliding way, the fixed track is fixedly connected with the Y-axis sliding seat, the sliding track is fixedly connected with the Z-axis sliding plate, the two ends of the crossed roller guide rail are respectively and fixedly connected with a dust removal assembly, each dust removal assembly is abutted against the sliding surface of the crossed roller guide rail to carry out dust removal operation on the sliding surface, through the arrangement of the crossed roller guide rail, the connection rigidity between the Y-axis sliding seat and the Z-axis sliding plate is higher, the action is lighter, and effective stroke is bigger, and this structure zero clearance and high rigidity can reduce to appear leading to the condition emergence of guide rail deformation because of colliding the cutting head in the cutting process.)

1. The utility model provides a slider for it is dustproof, includes Y axle slide (1), Z axle slide (2), its characterized in that: two crossed roller guide rails (3) are arranged between the Y-axis sliding seat (1) and the Z-axis sliding plate (2), each crossed roller guide rail (3) comprises a fixed rail (31) and a sliding rail (32) which are in sliding fit with each other, the fixed rail (31) is fixedly connected with the Y-axis sliding seat (1), the sliding rail (32) is fixedly connected with the Z-axis sliding plate (2), two ends of each crossed roller guide rail (3) are respectively and fixedly connected with a dust removal assembly (4), and each dust removal assembly (4) is abutted to the sliding surface of the crossed roller guide rail (3) so as to perform dust removal operation on the sliding surface;

the relative sliding direction of the fixed rail (31) and the sliding rail (32) is parallel to the Z-axis direction; the length of the fixed rail (31) is the same as that of the sliding rail (32) and is not greater than that of the Z-axis sliding plate (2).

2. A sliding apparatus for dust control according to claim 1, wherein: the fixed rail (31) and sliding rail (32) are connected with a roller group (33) in a sliding mode, the fixed rail (31) is fixedly connected onto the Y-axis sliding base (1) through a fastener (34), and the sliding rail (32) is fixedly connected onto the Z-axis sliding plate (2) through a fastener (34).

3. A sliding apparatus for dust prevention according to claim 2, wherein: the dust removing assembly (4) positioned at the top end of the crossed roller guide rail (3) comprises a brush component (41) fixedly connected to the top end of the fixed rail (31); the dust removing assembly (4) at the bottom end of the cross roller guide rail (3) comprises a brush member (41) fixedly connected to the bottom end of the sliding rail (32); the brush member (41) abuts against the sliding surface.

4. A sliding apparatus for dust control according to claim 3, wherein: the dust removal assembly (4) positioned at the top end of the crossed roller guide rail (3) also comprises a dust removal pipe (42) fixedly connected to the top end of the sliding rail (32); the dust removal assembly (4) positioned at the bottom end of the crossed roller guide rail (3) comprises a dust removal pipe (42) fixedly connected to the bottom end of the fixed rail (31).

5. A sliding apparatus for dust control according to claim 4, wherein: the dust removal pipe (42) is connected with an external air source.

6. A sliding apparatus for dust control according to claim 4, wherein: the air outlet of the dust removal duct (42) faces the brush member (41).

7. A sliding apparatus for dust control according to claim 4, wherein: the brush member (41) includes a cleaning brush (411), and the cleaning brush (411) abuts against a sliding surface of the slide rail (31).

8. A sliding apparatus for dust control according to claim 7, wherein: brush component (41) still include fixed connection fixed block (412) on fixed track (31) top, it faces the principle to have seted up the opening in fixed block (412) spout (413) of Y axle slide (1), sliding connection has slider (414) in spout (413), slider (414) with spout (413) are kept away from fixedly connected with spring (415) between a lateral wall of slip track (32), slider (413) are kept away from the one end of Y axle slide (1) with cleaning brush (411) fixed connection.

[ technical field ] A method for producing a semiconductor device

The invention relates to the field of laser cutting equipment, in particular to a dustproof sliding device.

[ background of the invention ]

Common laser cutting machine Z axle, generally linear guide cooperation slider mechanism, effective stroke is less, laser cutting machine is towards the high power now, high cutting speed develops, need now reliably, it is compact, specific gravity is light, the big solution of effective stroke, and can produce a large amount of dusts and waste residue at laser cutting's in-process, these dusts and waste residue can glue on the Z axle subassembly and accumulate, along with the lapse of time, can damage the Z axle subassembly, need to shut down the dismantlement and maintain or change the processing, cause to generate and produce inefficiency, the high problem of manufacturing cost, therefore, the urgent need wait to design a high rigidity, effective stroke is big and can prevent the Z axle slider of dust.

[ summary of the invention ]

The invention aims to provide a Z-axis sliding device which has high rigidity and large effective stroke and can place dust, aiming at the problems that the prior Z-axis sliding mechanism has small effective stroke, dust and waste residue can be accumulated on the sliding mechanism and damage the Z-axis sliding mechanism.

In order to achieve the purpose, the invention adopts the technical scheme that: the utility model provides a be used for dirt-proof slider, includes Y axle slide, Z axle slide, Y axle slide with be provided with two alternately roller guide rails between the Z axle slide, every alternately roller guide rail includes mutual sliding fit's trapped orbit, slip track, the trapped orbit with Y axle slide fixed connection, the slip track with Z axle slide fixed connection, the both ends difference fixedly connected with dust removal subassembly of alternately roller guide rail, every the dust removal subassembly with the slip plane butt of alternately roller guide is in order to carry out the dust removal operation to the slip plane.

Preferably, the crossed roller guide rail comprises a fixed rail and a sliding rail which are symmetrically arranged, a roller group is connected between the fixed rail and the sliding rail in a sliding manner, the fixed rail is fixedly connected to the Y-axis sliding seat through a fastener, and the sliding rail is fixedly connected to the Z-axis sliding plate through a fastener.

Preferably, the relative sliding direction of the fixed rail and the sliding rail is parallel to the Z-axis direction.

Preferably, said dusting assembly at the top end of said cross roller guide rail comprises a brush member fixedly attached to the top end of said fixed rail; the dust removal assembly at the bottom end of the cross roller guide rail comprises a brush member fixedly connected to the bottom end of the sliding rail; the brush member abuts against the sliding surface.

Preferably, the dust removal assembly positioned at the top end of the crossed roller guide rail further comprises a dust removal pipe fixedly connected to the top end of the sliding rail; the dust removal assembly positioned at the bottom end of the crossed roller guide rail comprises a dust removal pipe fixedly connected to the bottom end of the fixed rail.

Preferably, the dust removal pipe is connected with an external air source.

Preferably, the air outlet of the dust removing duct faces the brush member.

Preferably, the brush member includes a cleaning brush that abuts against a sliding surface of the slide rail.

Preferably, the brush component still includes fixed connection and is in the fixed block on fixed track top, it moves towards the principle to open the opening in the fixed block the spout of Y axle slide, sliding connection has the slider in the spout, the slider with the spout is kept away from fixedly connected with spring between the orbital lateral wall of slip, the slider is kept away from the one end of Y axle slide with cleaning brush fixed connection.

The invention has the advantages that:

1. through the arrangement of the crossed roller guide rails, the Y-axis sliding seat and the Z-axis sliding plate are higher in connection rigidity, lighter and faster in action and larger in effective stroke, and the structure has no clearance and high rigidity, so that the condition that the guide rails deform due to the fact that the cutting heads collide in the cutting process can be reduced.

2. Through the setting of dust removal subassembly, can be right the glide plane of alternately roller guide rail cleans, and the waste residue that avoids producing among the cutting process is attached on the glide plane of alternately roller guide rail, influences the slip between Y axle slide and the Z axle slide, has reduced daily maintenance work.

[ description of the drawings ]

FIG. 1 is a schematic view of the cross roller guide mounting structure of the present invention;

FIG. 2 is a schematic structural view of the present invention;

FIG. 3 is an exploded view of the cross roller guide configuration of the present invention;

FIG. 4 is an exploded view of the structure of the brush element of the present invention;

FIG. 5 is an exploded view of the dust extraction tube of the present invention;

FIG. 6 is a schematic structural diagram of a second embodiment of the present invention;

fig. 7 is a schematic structural diagram of a third embodiment of the present invention.

The reference numerals and components referred to in the drawings are as follows: 1. a Y-axis slide carriage; 2. a Z-axis slide plate; 3. a cross roller guide; 31. fixing a track; 32. a sliding track; 33. a roller group; 34. a fastener; 4. a dust removal assembly; 41. a brush member; 411. a cleaning brush; 411A, a dust removing brush; 412. a fixed block; 413. a chute; 414. a slider; 415. a spring; 42. a dust removal pipe; 42A, a dust suction pipe; 5. and (6) installing a buckle.

[ detailed description ] embodiments

The following detailed description of the present invention will be made with reference to the accompanying drawings.

The present invention will be described in detail with reference to fig. 1 to 7, and the technical solutions in the embodiments of the present invention will be clearly and completely described, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The invention describes a dustproof sliding device, which is used for connecting a Y-axis sliding seat and a Z-axis sliding plate of a laser cutting machine, wherein a sliding mechanism with higher rigidity is needed because the phenomenon of cutter collision can be generated due to improper operation in the laser cutting process, the rigidity of a crossed roller guide rail adopted by the dustproof sliding device is higher than that of a common guide rail and sliding block matching mechanism, waste residues can be generated in the cutting process and are scattered in the air, the sliding mechanism is generally exposed outside, so that the sliding part can be attached with the waste residues, and the normal operation of the sliding mechanism can be influenced after a long time, therefore, the dustproof sliding device is provided with a dust removal part for cleaning the sliding part of the sliding mechanism.

Example one

As shown in fig. 1 and 2, the invention is a sliding device for dust prevention, which includes a Y-axis sliding base 1 and a Z-axis sliding plate 2, two crossed roller guide rails 3 are disposed between the Y-axis sliding base 1 and the Z-axis sliding plate 2, each crossed roller guide rail 3 includes a fixed rail 31 and a sliding rail 32 which are in sliding fit with each other, the fixed rail 31 is fixedly connected with the Y-axis sliding base 1, the sliding rail 32 is fixedly connected with the Z-axis sliding plate 2, two ends of each crossed roller guide rail 3 are respectively and fixedly connected with a dust removing assembly 4, and each dust removing assembly 4 abuts against a sliding surface of the crossed roller guide rail 3 to perform dust removing operation on the sliding surface.

In this application, because fixed track 31 with Y axle slide 1 fixed connection, slide track 32 with Z axle slide 2 fixed connection for Y axle slide 1 and Z axle slide 2 cooperation of sliding. In addition, the internal structure design of the crossed roller guide rail 3 is more compact than that of the conventional linear guide rail, and the rigidity is higher after special heat treatment is carried out inside, the Y-axis sliding seat 1 and the Z-axis sliding plate 2 are connected through the Y-axis sliding seat, so that the connection rigidity is higher, the action is lighter, and compared with the conventional linear guide rail, the cross roller guide rail 3 with the same length has the advantages that the effective stroke of the conventional linear guide rail is only limited in the length range, and the effective stroke of the cross roller guide 3 can exceed the length range thereof, so that the effective stroke thereof is larger, and through the setting of dust removal subassembly 4, can be right the glide plane of crossing roller guide 3 cleans, avoids the waste residue that produces in the cutting process to attach on the glide plane of crossing roller guide 3, influences the slip between Y axle slide 1 and the Z axle slide 2, has reduced daily maintenance work.

As shown in fig. 1 and 3, a roller group 33 is slidably connected between the fixed rail 31 and the sliding rail 32, the fixed rail 31 is fixedly connected to the Y-axis slide carriage 1 through a fastener 34, and the sliding rail 32 is fixedly connected to the Z-axis slide carriage 2 through a fastener 34; the relative sliding direction of the fixed rail 31 and the sliding rail 32 is parallel to the Z-axis direction.

Further, the fastening member 34 is a tightening bolt, the tightening bolt respectively tightens the fixed rail 31 and the Y-axis slide 1, the sliding rail 32 and the Z-axis slide 2, so as to eliminate a machining error gap and reduce the machining precision requirement of the Y-axis slide, the roller group 33 is in the prior art and is not repeated, and the length of the fixed rail 31 is the same as that of the sliding rail 32 and is not greater than that of the Z-axis slide 2.

The two dust removing assemblies 4 are arranged on the crossed roller guide rail 3 in a centrosymmetric manner.

As shown in fig. 2, the dust removing assembly 4 at the top end of the cross roller guide 3 includes a brush member 41 fixedly coupled to the top end of the fixed rail 31; the dust removing assembly 4 at the bottom end of the cross roller guide 3 includes a brush member 41 fixedly coupled to the bottom end of the slide rail 32; the brush member 41 abuts against the sliding surface.

It should be noted that: in this application, two dust removing assemblies 4 are arranged on the cross roller guide rail 3 in a central symmetry manner, and the definitions thereof are as follows: the brush member 41 located at the top end of the fixed rail 31 and the brush member 41 located at the bottom end of the slide rail 32 are arranged on the cross roller guide 3 in a central symmetry.

The top end of the fixed rail 31 is the upper end of the fixed rail 31 in fig. 2, and the bottom end of the slide rail 32 is the lower end of the slide rail 32 in fig. 2.

Further, as shown in fig. 2 and 4, the brush member 41 includes a fixed block 412 fixedly connected to the top end of the fixed rail 31, a sliding slot 413 with an opening facing away from the Y-axis sliding seat 1 is formed in the fixed block 412, a sliding block 414 is slidably connected in the sliding slot 413, a spring 415 is fixedly connected between the sliding block 414 and a side wall of the sliding slot 413 away from the sliding rail 32, a cleaning brush 411 is fixedly connected to one end of the sliding block 413 away from the Y-axis sliding seat 1, a lower portion of a side surface of the cleaning brush 411 close to the sliding rail 32 is an inclined surface, and a side surface of the cleaning brush 411 close to the sliding surface is provided with a brush; when there is no relative sliding between the fixed rail 31 and the sliding rail 32, that is, when the fixed rail 31 is aligned with the end of the sliding rail 32, the sliding block 414 is located at one end of the sliding groove 413 close to the sliding rail 32 under the action of the spring 415, and the brush is located right above the top end of the sliding rail 32, so as to prevent the waste residue brushed off the brush from falling into the gap between the two rails and attaching to the sliding surface, when there is relative sliding between the fixed rail 31 and the sliding rail 32, that is, when the sliding rail 32 slides upward relative to the fixed rail 31, the top end of the sliding rail 32 abuts against the inclined surface of the cleaning brush 411, so that the cleaning brush 411 moves in a direction away from the sliding rail 32, and the cleaning brush 411 compresses the spring 415 through the sliding block 414, when the sliding rail 32 moves to a position that the top end is not abutted to the inclined surface of the cleaning brush 411, the cleaning brush 411 enables the brush to abut to the sliding surface of the sliding rail 32 under the action of the elastic force of the spring 415, waste slag generated in the working process of the cutting machine is scattered in the air and then attached to the sliding-out part of the sliding surface of the sliding rail 32, and when the cutting machine is reset, namely the sliding rail 32 moves towards the direction close to the fixed rail 31, the brush cleans the waste slag on the sliding-out part of the sliding surface of the sliding rail 32, so that the waste slag is attached to the brush; similarly, the cleaning brush 411 which is centrally symmetrical to the dust removing assembly and is positioned at the bottom end of the sliding rail 32 cleans the sliding-out part of the sliding-out surface of the fixed rail 31; when slide rail 32 resets completely, cleaning brush 411 is in move under the effect of spring 415 slide rail 32 directly over, avoid the waste residue on the brush to drop in two orbital gaps, through brush 411's setting for orbital roll-off part can be cleaned after attached waste residue, has avoided the waste residue to add up on orbital roll-off face, influences the sliding effect of Y axle slide and Z axle slide.

It should be noted that the fixed connection manner between the fixed block 412 and the top end of the fixed rail 31 includes, but is not limited to: bolting, adhesive bonding, and the like.

As shown in fig. 2, the dust removing assembly 4 at the top end of the cross roller guide rail 3 further comprises a dust removing pipe 42 fixedly connected to the top end of the sliding rail 32; the dust removing assembly 4 at the bottom end of the crossed roller guide rail 3 comprises a dust removing pipe 42 fixedly connected with the bottom end of the fixed rail 31; the dust removing pipe 42 is connected to an external air source, and an air outlet of the dust removing pipe 42 faces the brush member 41.

The top end of the slide rail 32 is an upper end of the slide rail 32 in fig. 2. The bottom end of the fixed rail 31 is the lower end of the fixed rail 31 in fig. 2.

Further, as shown in fig. 2 and 5, each dust removal pipe 42 is provided with a mounting buckle 5 in a fixed sleeve manner, the mounting buckles 5 are respectively arranged on one side surface of the sliding rail 32, which is deviated from the fixed rail 31, the dust removal pipe 42 is connected with an external suction mechanism, an air outlet of the dust removal pipe 42 faces the cleaning brush 411, when the sliding rail 32 is reset, the external suction mechanism is started, and the external suction mechanism is used for sucking away waste residues on the cleaning brush 411 through the dust removal pipe 42, so that the next use of the dust removal assembly is facilitated.

It should be noted that the mounting buckle 5 includes, but is not limited to: u-shaped buckles, square buckles and the like. The fixing connection manner of the mounting buckle 5 and the sliding rail 32 includes but is not limited to: bolting, adhesive bonding, and the like.

Example two

The present embodiment is different from the other embodiments in that:

as shown in fig. 6, the dust removing assembly 4 includes a dust removing brush 411A fixedly connected to the top end of the fixed rail 31, when the sliding rail 32 is far away from the fixed rail 31, the dust removing brush 411A can abut against the sliding surface of the sliding rail 32, the top end of the sliding rail 32 is fixedly connected with a dust suction pipe 42A, an opening of the dust suction pipe faces the dust removing brush 411A, the dust suction pipe 42A is connected with an external air source, when the sliding rail 32 is reset, the external air source is started, and the external air source sucks away the waste residues on the dust removing brush 411A through the dust suction pipe 42A; through the setting of dust removal brush 411A for dust removal brush 411A can clean the roll-off face, has avoided the waste residue to pile up on the glide plane, influences the slip effect, and dust removal brush 411A simple structure, and the production and the installation of being convenient for have reduced manufacturing cost.

EXAMPLE III

The present embodiment is different from the other embodiments in that:

the dust removal assembly comprises a suction pipe 42B fixedly connected to the top end of the fixed rail 31, the opening of the suction pipe 42B faces the sliding surface of the sliding rail 32, the suction pipe 42B is connected with an external air source, when the sliding rail 32 is reset, the external air source is started, and the external air source sucks away waste residues attached to the sliding surface of the sliding rail 32 through the suction pipe 42B; this embodiment simple structure, the installation is comparatively convenient, has played certain clean effect to the roll-off face of slip track 32 equally.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, several modifications and additions can be made without departing from the method of the present invention, and these modifications and additions should also be regarded as the protection scope of the present invention.