阅读说明：本技术 一种基于压电陶瓷精密位移的激光调阻方法 (Laser resistance adjusting method based on precise displacement of piezoelectric ceramics ) 是由 陈勇 王晓勇 吴修娟 王蕾 张涛 李勤涛 于 2020-06-24 设计创作，主要内容包括：本发明公开一种基于压电陶瓷精密位移的激光调阻方法,涉及激光精细加工领域,包括光束整形头、压电陶瓷位移模块和脉冲激光器,所述脉冲激光器与光束整形头连接,所述压电陶瓷位移模块设于光束整形头内,所述光束整形头内设有准直镜片,所述准直镜片用于保证入射光可以整形成为平行光,所述压电陶瓷位移模块用于控制准直镜片位移,通过压电陶瓷位移模块对光束整形头内的准直镜片进行纳米级的位移控制,来精确控制激光束在片状电阻上的刻蚀的长度,位移精度高,电阻可调精度高,可以获得更高精度的电阻元件。(The invention discloses a laser resistance adjusting method based on piezoelectric ceramic precise displacement, which relates to the field of laser fine processing and comprises a light beam shaping head, a piezoelectric ceramic displacement module and a pulse laser, wherein the pulse laser is connected with the light beam shaping head, the piezoelectric ceramic displacement module is arranged in the light beam shaping head, a collimating lens is arranged in the light beam shaping head and used for ensuring that incident light can be shaped into parallel light, the piezoelectric ceramic displacement module is used for controlling the displacement of the collimating lens, and the nano-scale displacement control is carried out on the collimating lens in the light beam shaping head through the piezoelectric ceramic displacement module so as to accurately control the etching length of a laser beam on a sheet resistor, so that the displacement precision is high, the resistance adjusting precision is high, and a resistor element with higher precision can be obtained.)

1. A laser resistance-adjusting method based on piezoelectric ceramic precise displacement is characterized by comprising a light beam shaping head (3), a piezoelectric ceramic displacement module (6) and a pulse laser (4), wherein the pulse laser (4) is connected with the light beam shaping head (3), the piezoelectric ceramic displacement module (6) is arranged in the light beam shaping head (3), a collimating lens (5) is arranged in the light beam shaping head (3), the collimating lens (5) is used for ensuring that incident light can be shaped into parallel light, and the piezoelectric ceramic displacement module (6) is used for controlling the displacement of the collimating lens (5);

a piezoelectric ceramic control circuit is further arranged in the beam shaping head (3), the piezoelectric ceramic control circuit comprises a first optocoupler (101), a second optocoupler (102), a first triode (103) and a second triode (104), the first optocoupler (101) is connected with piezoelectric ceramic through the first triode (103), and the second optocoupler (102) is connected with the piezoelectric ceramic through the second triode (104);

the laser resistance adjusting method comprises the following steps:

firstly, connecting a chip resistor (9) which is adjusting resistance with an upper high-precision fast bridge, and continuously detecting the resistance value change of the chip resistor (9) in real time through the high-precision fast bridge in the laser resistance adjusting process;

secondly, inputting a high level into an input end SP, inputting a low level into an input end ST, and controlling the forward displacement of the piezoelectric ceramic displacement module (6) by the first optical coupler (101) to drive the collimating lens (5) to move forward;

and thirdly, inputting a high level into an input end ST, inputting a low level into an input end SP, controlling the piezoelectric ceramic displacement module (6) to reversely displace through a second optical coupler (102), and driving the collimating lens (5) to reversely move.

Fourthly, when the resistance value of the sheet resistor (9) reaches the required resistor precision, laser resistance adjustment is finished.

2. The laser resistance adjusting method based on the precise displacement of the piezoelectric ceramics, according to claim 1, is characterized in that: a first diode (105) is connected in parallel with the collector and the emitter of the first triode (103), and a second diode (106) is connected in parallel with the collector and the emitter of the second triode (104).

3. The laser resistance adjusting method based on the precise displacement of the piezoelectric ceramics, according to claim 1, is characterized in that: the collector electrode of the first triode (103) is connected with the emitter electrode of the second triode (104), and the piezoelectric ceramic displacement module (6) is connected with the collector electrode of the first triode (103).

4. The laser resistance adjusting method based on the precise displacement of the piezoelectric ceramics, according to claim 1, is characterized in that: the light beam shaping head (3) is fixedly connected to the support (1) through the fixing shaft (2), the support (1) is further provided with a moving platform (8), and the sheet resistor (9) is placed on the moving platform (8).

5. The laser resistance adjusting method based on the precise displacement of the piezoelectric ceramics, according to claim 1, is characterized in that: the bottom of the beam shaping head (3) is also provided with a protective lens (7), and the protective lens (7) is used for preventing steam generated during laser resistance adjustment from damaging the beam shaping head (3).

6. The laser resistance adjusting method based on the precise displacement of the piezoelectric ceramics, according to claim 1, is characterized in that: the interior of the beam shaping head (3) is a vacuum environment.

Technical Field

The invention relates to the field of laser fine processing, in particular to a laser resistance adjusting method based on piezoelectric ceramic precise displacement.

Background

The laser resistor trimming mainly utilizes an extremely fine laser beam to strike on the sheet resistor, and the sheet resistor is cut by gasifying and evaporating the resistor. Meanwhile, the real-time measuring circuit monitors the change of the resistance value of the chip resistor in real time, the resistance value of the chip resistor is continuously close to the target resistance value, and when the chip resistor reaches the target resistance value, the laser beam is turned off, namely the laser resistance adjusting process is realized.

When the chip resistor is subjected to laser cutting resistance adjustment, the etching length can be controlled by moving the chip resistor, and the etching length can also be controlled by moving the beam shaping head, but the laser resistance adjustment precision by adopting the two modes is lower.

Disclosure of Invention

The invention aims to provide a laser resistance adjusting method based on precise piezoelectric ceramic displacement, which is characterized in that a displacement control of a nano level is carried out on a collimating lens in a light beam shaping head through a piezoelectric ceramic displacement module to accurately control the etching length of a laser beam on a sheet resistor, the displacement precision is high, the resistance adjusting precision is high, and a resistor element with higher precision can be obtained.

A laser resistance-adjusting method based on piezoelectric ceramic precise displacement comprises a light beam shaping head, a piezoelectric ceramic displacement module and a pulse laser, wherein the pulse laser is connected with the light beam shaping head, the piezoelectric ceramic displacement module is arranged in the light beam shaping head, a collimating lens is arranged in the light beam shaping head and used for ensuring that incident light can be shaped into parallel light, and the piezoelectric ceramic displacement module is used for controlling the displacement of the collimating lens;

a piezoelectric ceramic control circuit is further arranged in the beam shaping head and comprises a first optocoupler, a second optocoupler, a first triode and a second triode, the first optocoupler is connected with the piezoelectric ceramic through the first triode, and the second optocoupler is connected with the piezoelectric ceramic through the second triode;

the laser resistance adjusting method comprises the following steps:

firstly, connecting a chip resistor which is being subjected to resistance adjustment with a high-precision rapid electric bridge, and continuously detecting the resistance value change of the chip resistor in real time through the high-precision rapid electric bridge in the laser resistance adjustment process;

secondly, inputting a high level into an input end SP, inputting a low level into an input end ST, and controlling the forward displacement of the piezoelectric ceramic displacement module by the first optical coupler to drive the collimating lens to move forward;

and thirdly, inputting a high level into an input end ST, inputting a low level into an input end SP, and controlling the piezoelectric ceramic displacement module to reversely displace through a second optical coupler to drive the collimating lens to reversely move.

Fourthly, when the resistance value of the chip resistor reaches the required resistor precision, laser resistance adjustment is finished.

Preferably, a first diode is connected in parallel to the collector and the emitter of the first triode, and a second diode is connected in parallel to the collector and the emitter of the second triode.

Preferably, the collector of the first triode is connected with the emitter of the second triode, and the piezoelectric ceramic displacement module is connected to the collector of the first triode.

Preferably, the beam shaping head is fixedly connected to the support through a fixed shaft, a moving platform is further arranged on the support, and the chip resistor is placed on the moving platform.

Preferably, the inside of the beam shaping head is a vacuum environment.

Preferably, the bottom of the beam shaping head is further provided with a protective lens, and steam generated when the protective lens is used for laser resistance adjustment cannot damage the beam shaping head.

The invention has the advantages that: the nano-scale displacement control is carried out on the collimating lens in the beam shaping head through the piezoelectric ceramic displacement module, so that the etching length of the laser beam on the sheet resistor is accurately controlled, the displacement precision is high, the adjustable precision of the resistor is high, and a resistor element with higher precision can be obtained.

Drawings

FIG. 1 illustrates the principle of the method of the present invention;

FIG. 2 is a schematic diagram of the structure of the apparatus of the present invention;

FIG. 3 is a circuit diagram of the displacement control of piezoelectric ceramics according to the present invention;

the device comprises a support 1, a support 2, a fixed shaft 3, a beam shaping head 4, a pulse laser 5, a collimating lens 6, a piezoelectric ceramic displacement module 7, a protective lens 8, a movable platform 9, a sheet resistor 101, a first optical coupler 102, a second optical coupler 103, a first triode 104, a second triode 105, a first diode 106 and a second diode.

Detailed Description

In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.

As shown in fig. 1 to 3, a laser resistance adjusting method based on precise piezoelectric ceramic displacement includes a light beam shaping head 3, a piezoelectric ceramic displacement module 6 and a pulse laser 4, where the pulse laser 4 is connected to the light beam shaping head 3, the piezoelectric ceramic displacement module 6 is disposed in the light beam shaping head 3, a collimating lens 5 is disposed in the light beam shaping head 3, the collimating lens 5 is used to ensure that incident light can be shaped into parallel light, and the piezoelectric ceramic displacement module 6 is used to control displacement of the collimating lens 5;

a piezoelectric ceramic control circuit is further arranged in the beam shaping head 3 and comprises a first optocoupler 101, a second optocoupler 102, a first triode 103 and a second triode 104, the first optocoupler 101 is connected with piezoelectric ceramic through the first triode 103, and the second optocoupler 102 is connected with the piezoelectric ceramic through the second triode 104;

the laser resistance adjusting method comprises the following steps:

firstly, connecting a chip resistor 9 which is adjusting resistance with a high-precision fast bridge, and continuously detecting the resistance value change of the chip resistor 9 in real time through the high-precision fast bridge in the laser resistance adjusting process;

secondly, inputting a high level into an input end SP, inputting a low level into an input end ST, and controlling the forward displacement of the piezoelectric ceramic displacement module 6 by the first optical coupler 101 to drive the collimating lens 5 to move forward;

and thirdly, inputting a high level into an input end ST, inputting a low level into an input end SP, controlling the piezoelectric ceramic displacement module 6 to reversely displace through the second optical coupler 102, and driving the collimating lens 5 to reversely move.

Fourthly, when the resistance value of the chip resistor 9 reaches the required resistor precision, laser resistance adjustment is finished. The nano-scale displacement control is carried out on the collimating lens 5 in the beam shaping head 3 through the piezoelectric ceramic displacement module 6, so that the etching length of the laser beam on the sheet resistor 9 is accurately controlled, the displacement precision is high, the resistor adjustable precision is high, and a resistor element with higher precision can be obtained.

A first diode 105 is connected in parallel with the collector and the emitter of the first transistor 103, and a second diode 106 is connected in parallel with the collector and the emitter of the second transistor 104.

The collector of the first triode 103 is connected with the emitter of the second triode 104, and the piezoceramic displacement module 6 is connected with the collector of the first triode 103.

The light beam shaping head 3 is fixedly connected to the support 1 through the fixing shaft 2, the support 1 is further provided with a moving platform 8, and the sheet resistor 9 is placed on the moving platform 8.

The inside of the beam shaping head 3 is a vacuum environment.

The bottom of the beam shaping head 3 is also provided with a protective lens 7, and steam generated when the protective lens 7 is used for laser resistance adjustment cannot damage the inside of the beam shaping head 3.