A kind of preparation method of shearing-type piezo-electricity composite material and its preparation of driver
阅读说明：本技术 一种剪切型压电复合材料的制备方法及其驱动器的制备 (A kind of preparation method of shearing-type piezo-electricity composite material and its preparation of driver ) 是由 张斗 闫明洋 袁晰 周科朝 于 2019-09-11 设计创作，主要内容包括：一种剪切型压电复合材料的制备方法及其驱动器的制备,包括以下步骤：将压电陶瓷块沿厚度方向极化；将极化后的压电陶瓷块沿其厚度方向作第一次切割成薄片；沿所述的薄片的厚度方向,垂直于极化方向作第二次切割,或是沿所述的薄片的厚度方向,平行于极化方向作第二次切割；第二次切割过程中薄片时并没有切透,其中一部分保留作为基体,形成带间隙压电陶瓷薄片；将聚合物填充到所述的压电陶瓷薄片的间隙中,经固化,减薄。将电极复合至(4)步所得到的压电陶瓷薄片上、下表面。将(4)步所得的材料沿厚度方向施加电场。制备简单,易于操作,性能好,且可以实现两种构型的d<Sub>15</Sub>型压电纤维复合材料的制备。(A kind of preparation method of shearing-type piezo-electricity composite material and its preparation of driver, comprising the following steps: piezoelectric ceramics block through-thickness polarizes；Piezoelectric ceramics block after polarization is made into cutting flakiness for the first time along its thickness direction；Along the thickness direction of the thin slice, make second perpendicular to polarization direction and cut, or along the thickness direction of the thin slice, is parallel to polarization direction and makees to cut for the second time；It is not cut through when thin slice in second of cutting process, a portion is retained as matrix, forms band gap piezoelectric ceramic thin sheet；It is cured by polymer-filled into the gap of the piezoelectric ceramic thin sheet, it is thinned.Electrode is compound to the obtained piezoelectric ceramic thin sheet upper and lower surfaces of (4) step.The resulting material through-thickness of (4) step is applied into electric field.Preparation is simple, and easily operated, performance is good, and the d of two kinds of configurations may be implemented 15 The preparation of type piezoelectric fibre composite material.)
1. a kind of preparation method of shearing-type piezo-electricity composite material, comprising the following steps:
(1) piezoelectric ceramics block through-thickness is polarized；
(2) piezoelectric ceramics block after polarization is made into cutting flakiness for the first time along its thickness direction；
(3) along the thickness direction of the thin slice, make second perpendicular to polarization direction and cut, or along the thickness of the thin slice Direction is spent, polarization direction is parallel to and makees second of cutting；It is not cut through when thin slice in second of cutting process, a portion It is retained as matrix, forms band gap piezoelectric ceramic thin sheet；
(4) cured by polymer-filled into the gap of the piezoelectric ceramic thin sheet, it is thinned.
2. preparation method according to claim 1, which is characterized in that electrode is compound to the upper and lower table of piezoelectric ceramic thin sheet Face.
3. preparation method according to claim 2, which is characterized in that apply the resulting material through-thickness of (4) step Electric field.
4. preparation method according to claim 3, which is characterized in that the material for having applied electric field is formed in d15Shearing mould The shearing-type piezo-electricity composite material to work under formula.
5. preparation method according to claim 2, which is characterized in that by way of magnetron sputtering or silk-screen printing or electricity Electrode is compounded in the obtained piezoelectric ceramic thin sheet upper and lower surfaces of (4) step by chemical deposition.
6. preparation method according to claim 1, which is characterized in that piezoelectric ceramic thin sheet gap in the step (3) It is 80~250 μm.
7. preparation method according to claim 1, which is characterized in that piezoelectric ceramics block of material is lead zirconate titanate piezoelectric pottery Porcelain.
8. preparation method according to claim 1, which is characterized in that the polymer is epoxy resin.
9. a kind of method is made shearing-type piezo-electricity composite material based on any one of claim 1-8 the method and is fabricated to driving Device.
10. according to the method described in claim 7, being formed in d15The driver to work under shear mode.
Technical field
The present invention relates to piezo-electricity composite material preparation field, in particular to a kind of preparation of shearing-type piezo-electricity composite material with And the method for using the piezo-electricity composite material to prepare driver.
Background technique
Most of piezoelectric actuators are in d33Or d31It works under mode, it is few to be based on d15The piezoelectric composite of mode is used In driver.Now widely used piezoelectric ceramics and including d33Piezoelectric ceramics including type piezoelectric fibre composite material is compound Material is all based on the axial piezoelectric effect of piezoelectric ceramics, that is, acts on the driving electric field direction of piezoelectric ceramics and the polarization of ceramics Direction is parallel, and piezoelectric ceramics is generated along polarization direction (d33) or perpendicular to polarization direction (d31) deformation.In addition to axial piezoelectricity is imitated It answers, including PZT (piezoelectric ceramic transducer, lead titanate piezoelectric ceramics), BaTiO3Deng including Piezoceramic material also has a kind of shearing piezoelectric effect, i.e., when extra electric field direction is vertical with its polarization direction, then piezoelectricity Ceramics can generate a pure shear (d15) deformation, as shown in Figure 1.For most of piezoelectric ceramics, piezoelectric coefficient d15Value be higher than d33And d31Coefficient.Chen et al. proposes a kind of based on BiScO3-PbTiO3Ceramic wafer is in d15The annular shearing to work under mode Driver, it can generate big bending displacement at the center of driver.Gao et al. reports one kind in d15Work under shear mode The multi-layer cylindrical piezoelectric shear actuator of work can be used for carrying out precision actuation under larger mechanical load.However, due to complexity Design and manufacture technique, about using piezoelectric fibre composite material piezoelectric shear actuator report it is seldom.About shearing Many researchs of piezoelectric fibre composite material all concentrate on numerical value calculating and finite element analysis, and only a few experiments work is reported Road.Kranz et al. has manufactured a kind of longitudinal polarization piezoelectric d15Shearing-type piezoelectric fibre composite material, and demonstrate driving function Operability.Yuan et al. proposes thickness direction polarization d15Piezoelectric fibre composite material is sheared, the shear strain of actuator reaches 176.5ppm.However, the research of shearing piezoelectric fibre composite material is also insufficient, new is directed to d15 type piezoelectric fabric composite wood The preparation method needs of material are suggested.
Summary of the invention
The purpose of the present invention be intended to provide it is a kind of prepare simple, easily operated, performance is good, and two kinds of configurations may be implemented The preparation method of shearing-type piezo-electricity composite material.
Another object of the present invention is to provide a kind of using made from above-mentioned shearing-type piezo-electricity composite material preparation method The method that piezo-electricity composite material prepares driver.
Further object of the present invention is the shearing-type piezo-electricity composite material of two kinds of above-mentioned configurations or its driving Device is adapted in d15It works under shear mode.
The purpose of the present invention is what is realized by following proposal:
A kind of preparation method of shearing-type piezo-electricity composite material, comprising the following steps:
(1) piezoelectric ceramics block through-thickness is polarized；
(2) piezoelectric ceramics block after polarization is made into cutting flakiness for the first time along its thickness direction；
(3) along the thickness direction of the thin slice, make second perpendicular to polarization direction and cut, or along the thin slice Thickness direction, be parallel to polarization direction and make second and cut；It is not cut through when thin slice in second of cutting process, wherein one Part is retained as matrix, forms band gap piezoelectric ceramic thin sheet；
(4) cured by polymer-filled into the gap of the piezoelectric ceramic thin sheet, it is thinned.
Electrode is compound to the obtained piezoelectric ceramic thin sheet upper and lower surfaces of (4) step.
The resulting material through-thickness of (4) step is applied into electric field.
Two kinds of shearing-type piezo-electricity composite material can be successfully prepared in scheme through the invention: the first is edge The shearing-type piezo-electricity composite material of fiber width direction polarization, polarization direction are the width along fiber, and through-thickness applies electricity ；Another kind is the shearing-type piezoelectric fibre composite material along fibre length direction polarization, and polarization direction is the length along fiber Degree, electric field through-thickness apply.Specific structure is as shown in Figure 2.In addition, the present inventor also systematically characterizes two kinds of shearing-types The piezoelectric property of piezo-electricity composite material, it was demonstrated that two kinds of shearing-type piezo-electricity composite material shows d15Shearing work mould Formula, and its driving capability is had evaluated by experimental work.
In the present invention, a kind of new method for preparing shearing-type piezo-electricity composite material is inventors herein proposed, is made pottery to piezoelectricity In the case of porcelain block of material carries out whole through-thickness polarization process, then secondary special requirement are carried out to piezoelectric ceramics block and are cut It cuts, polarization direction is changed into length direction by thickness direction, and cut by second, realized along fibre length, width side Preparation to the shearing-type piezo-electricity composite material of polarized two kinds of configurations.The special innovation of this method is polarization direction Ingenious conversion, the polarized shearing-type piezo fiber composite of obtained not instead of thickness direction, fibre length, width direction The shearing-type piezo fiber composite of polarized two kinds of configurations, to realize different configurations.It is multiple with piezoelectricity in the prior art Condensation material is compared, and method of the invention is more simple, and only can be realized simultaneously by feat of the ingenious transformation of polarization direction The preparation of the shearing-type piezo fiber composite of two kinds of configurations.And there is good piezo-electricity composite material performance.
Piezoelectric ceramics block of material of the invention is that lead titanate piezoelectric ceramics can select PZT-5A piezoelectric ceramics, PZT-5H Piezoelectric ceramics, PZT2 piezoelectric ceramics, PZT4 piezoelectric ceramics, PZT8 piezoelectric ceramics,；It is preferred that PZT-5H piezoelectric ceramics.
Polymer of the present invention is epoxy resin；It is preferred that 2020 epoxy resin of Araldite.
Piezoelectric ceramics block of the present invention can be cuboid or cylindrical body.
Step (2) the of the present invention thin slice is preferably cuboid.
The width range in step (3) gap of the present invention, which is 80~250 μm, to be advisable.
The dielectric strength when present invention polarizes is 2kV/mm~3kV/mm；Temperature is 110-130 DEG C.Polarize 15~25min.
Added maximum field is no more than 400V/mm when present invention driving.
40 DEG C~60 DEG C of solidification temperature range of the present invention.
Solidification process of the present invention is to carry out under vacuum.
Electrode material of the present invention can be other conductive materials such as gold or silver.
The present invention can by way of magnetron sputtering or silk-screen printing or electrochemical deposition by electrode deposition in (4) step institute Obtained piezoelectric ceramic thin sheet upper and lower surfaces；The wherein mode of particularly preferred magnetron sputtering.
The shearing-type piezo-electricity composite material as obtained by preparation method of the present invention is direct or is fabricated to the required driving of implementation Device.
The shearing-type piezo-electricity composite material or its driver is in d15It works under shear mode.
The advantage of the preparation method of shearing-type piezo-electricity composite material of the present invention is to prepare simply, easily operated, obtained Piezo-electricity composite material performance is good, can also realize the preparation of the shearing-type piezo-electricity composite material of two kinds of configurations.Pass through Agilent essence Close impedance analyzer measurement electrical impedance and phase angle, as a result as shown in Figure 4.For the shearing piezoelectricity along fiber width direction polarization Fibrous composite, resonance frequency 3.77MHz, for the shearing piezoelectric fabric composite wood along fibre length direction polarization Material, resonance frequency 2.85MHz.The difference at the phase angle of two kinds of shearing piezoelectric fibre composite material at resonance frequency 150 degree can be reached, it was demonstrated that two kinds of shearing piezoelectric fibre composite material has good dynamic response.It is multiple to shearing-type The application voltage measurement of condensating fiber material is shear-deformable, former if the electric field applied is excessively high for shearing piezoelectric fibre composite material The polarized state of beginning will be changed, therefore the operating mode for shearing piezoelectric fibre composite material can also change.Therefore, application is most Big electric field is -250-+250V/mm.Fig. 6 shows in -250-+250V/mm, measured under the electric field that frequency is 0.1Hz along fibre The deflection of the polarized shearing-type piezoelectric fibre composite material of width direction is tieed up, the shear displacemant of measurement can reach 82nm.Fig. 7 Show the shearing-type piezoelectricity along fibre length direction polarization in -250-+250V/mm, measured under the electric field that frequency is 0.1Hz The shear displacemant of the deflection of fibrous composite, measurement can reach 91nm.In order to characterize shearing piezoelectric fibre composite material Driveability, we are prepared for sandwich cantilever beam structure to test its tip displacement.As shown in Figure 9 and Figure 10, for edge For fiber width direction and the polarized shearing-type piezo-electricity composite material of length direction, in -250-+250V/mm, frequency is The tip displacement measured under the electric field of 0.1Hz is respectively 0.33mm and 0.28mm.
Detailed description of the invention
Fig. 1 is the shearing piezoelectric effect schematic diagram of piezoelectric ceramics.
Fig. 2 is a kind of shearing-type piezoelectric fibre composite material configuration preparation method figure along fiber width direction polarization.
Fig. 3 is another shearing-type piezoelectric fibre composite material configuration preparation method figure along fibre length direction polarization.
The impedance spectrum figure of two kinds of shearing-type piezoelectric fibre composite materials of Fig. 4
Fig. 5 shear deformation test schematic diagram
Deflection of the Fig. 6 along the shearing-type piezoelectric fibre composite material of fiber width direction polarization
Deflection of the Fig. 7 along the shearing-type piezoelectric fibre composite material of fibre length direction polarization
Fig. 8 tip displacement test schematic diagram.
Tip displacement of the Fig. 9 along the shearing-type piezoelectric fibre composite material of fiber width direction polarization.
Tip displacement of the Figure 10 along the shearing-type piezoelectric fibre composite material of fibre length direction polarization.
Specific embodiment
Following embodiment is intended to illustrate invention rather than limitation of the invention further.