阅读说明：本技术 应用于光学相控阵的天线阵列、光学相控阵及激光雷达 (Antenna array applied to optical phased array, optical phased array and laser radar ) 是由 汪敬 于 2019-07-10 设计创作，主要内容包括：本发明实施例公开了一种应用于光学相控阵的天线阵列、光学相控阵及激光雷达,其中,天线阵列包括：N个相位补偿组和N个天线组,每个相位补偿组包括M个相位补偿单元,每个天线组包括M个天线单元,其中,N、M为正整数；其中一个所述相位补偿组中的其中一个相位补偿单元的输入端用于接收光信号,输出端连接其中一个天线组中的其中一个天线单元,用于将接收的光信号传输至天线单元,并根据天线单元产生的相位偏移,对所述光信号进行相位补偿,天线单元用于发射光信号。由此可见,利用本发明方案,通过缩小天线单元的宽度可以扩大天线发射的光斑大小,降低与外界的反射,提高发射效率；不同的天线单元引起的相位差异通过相位补偿单元进行弥补,使发射出去的多路光信号的相位保持等差,满足远场成像的要求。(The embodiment of the invention discloses antenna arrays applied to an optical phased array, the optical phased array and a laser radar, wherein the antenna array comprises N phase compensation groups and N antenna groups, each phase compensation group comprises M phase compensation units, each antenna group comprises M antenna units, N, M is a positive integer, the input end of phase compensation units in phase compensation groups is used for receiving optical signals, the output end of the 3538 antenna units in antenna groups is connected with antenna units for transmitting the received optical signals to the antenna units, phase compensation is carried out on the optical signals according to phase deviation generated by the antenna units, and the antenna units are used for transmitting the optical signals.)

The antenna array applied to the optical phased array is characterized by comprising N phase compensation groups and N antenna groups, wherein each phase compensation group comprises M phase compensation units, each antenna group comprises M antenna units, N, M is a positive integer, the input ends of phase compensation units in the phase compensation groups are used for receiving optical signals, the output ends of the antenna units in the antenna groups are connected and used for transmitting the received optical signals to the antenna units and performing phase compensation on the optical signals according to phase offsets generated by the antenna units, and the antenna units are used for transmitting the optical signals.

2. An antenna array according to claim 1 wherein the antenna elements comprise waveguide mode converters of width tapering from a second width to a larger width for gradually expanding and launching a spot in the waveguide at the end.

3. An antenna array according to claim 2 wherein the phase compensation element comprises a mode converter of gradually varying width from the th width to a third width and a second mode converter of gradually varying width from the third width to the th width, the output of the mode converter being connected to the input of the second mode converter, the output of the second mode converter being connected to of the antenna elements.

4. An antenna array according to claim 3 wherein the third width is related to the second width of the antenna elements connected to the output of the second mode converter and to the manufacturing process of the antenna array.

5. The antenna array of claim 3, wherein in any of the antenna groups, if of the antenna elements generates a phase shift of θ, the phase compensation element connected to the output end of the antenna element generates a phase shift of- θ by adjusting the difference between the th width and the third width, where θ represents the amount of phase change.

6. The antenna array of claim 3, wherein the width wj of any phase compensation elements in the phase compensation group is 300 nm-500 nm, and the third width wjp is wj ± 200 nm.

7. The antenna array of claim 1, wherein the length of any of the phase compensation elements is 1 μm to 50 μm, and the length of any of the antenna elements is 1 μm to 50 μm.

8, optical phased array, comprising an optical signal output unit, a waveguide unit and an antenna array applied to the optical phased array as claimed in any of claims 1-7, wherein the optical signal output unit is used for outputting nxm modulated optical signals, and the waveguide unit comprises nxm waveguide pipes for transmitting the nxm modulated optical signals to the antenna array to transmit the optical signals.

9. The optical phased array as claimed in claim 8, wherein said optical signal output unit includes an optical splitter for splitting input light and a phase shifter connected to said optical splitter; the phase shifter is used for shifting the phase of the light split by the optical splitter and finally outputting the light signals of NxM paths with different phases.

Lidar of the type 10, , comprising a light receiving unit, a ranging unit and an optical phased array of any of claims 8-9, .

Technical Field

The invention relates to the technical field of laser radars, in particular to antenna arrays applied to optical phased arrays, optical phased arrays and laser radars.

Background

The optical phased array is an important component of an all-solid-state laser radar system, and has the advantages of complete solid state, high reliability, small size, convenience in control and the like. Optical phased arrays may be implemented by integrated optoelectronic technologies, and existing antenna arrays include Silicon-on-insulator (SOI) materials, Silicon nitride materials, iii-v materials, and the like. Silicon-based optical phased-arrays based on SOI materials have received much attention in recent years due to their ability to utilize the mature microelectronic Metal Oxide Semiconductor (CMOS) process platform.

generally, an optical phased array is composed of an optical splitter, a tunable phase shifter, a connecting waveguide, and an antenna launch unit through which the input light is split into equal or unequal proportions of light that will be phase shifted after passing through the tunable phase shifter, and finally launched into free space in the antenna launch unit after passing through the series of connecting waveguides.

The waveguide width of the edge transmitting antenna at the edge of the chip is often wide, light can be well limited in the waveguide, when the light reaches the edge of the chip suddenly and is transmitted to a free space, obvious reflection phenomenon can occur due to the sudden change of the refractive index, the transmitting efficiency of the antenna is greatly influenced, and therefore how to improve the transmitting efficiency of the edge transmitting antenna is a problem which needs to be solved urgently in the industry at present.

Disclosure of Invention

In view of the above, embodiments of the present invention provide antenna arrays, optical phased arrays and lidar applications for optical phased arrays that overcome or at least partially solve the above problems.

According to aspects of the present invention, there are provided antenna arrays applied to an optical phased array, including N phase compensation groups and N antenna groups, each of the phase compensation groups includes M phase compensation units, each of the antenna groups includes M antenna units, wherein N, M is a positive integer, wherein an input end of of the phase compensation units in the phase compensation groups is used for receiving an optical signal, and an output end of the phase compensation units is connected to antenna units in the antenna groups, and is used for transmitting the received optical signal to the antenna units and performing phase compensation on the optical signal according to a phase offset generated by the antenna units, and the antenna units are used for transmitting the optical signal.

Optionally, the antenna unit comprises a waveguide mode converter which gradually narrows from th width to second width, and is used for gradually enlarging the light spot in the waveguide and emitting the light spot at the tail end.

Optionally, the phase compensation unit includes a mode converter whose width gradually changes from the th width to a third width, and a second mode converter whose width gradually changes from the third width to the th width, an output terminal of the mode converter is connected to an input terminal of the second mode converter, and an output terminal of the second mode converter is connected to of the antenna units.

Optionally, the third width is related to the second width of the antenna unit connected to the output end of the second mode converter and a manufacturing process of the antenna array.

Optionally, in the phase compensation group of any , in the antenna group of any , in any , the antenna unit generates a phase shift of θ, and the phase compensation unit, of which the output end is connected to the antenna unit, makes the phase compensation unit generate a phase shift of — θ by adjusting a difference between the th width and the third width, where θ represents a phase change amount.

Optionally, the width wj of any phase compensation unit in the phase compensation group is 300nm to 500nm, and the third width wjp is wj ± 200 nm.

Optionally, the length of any phase compensation unit is 1 μm to 50 μm, and the length of any antenna unit is 1 μm to 50 μm.

According to another aspects of the present invention, there are provided kinds of optical phased arrays including an optical signal output unit for outputting nxm modulated optical signals, a waveguide unit including nxm waveguide pipes for transmitting the nxm modulated optical signals to the antenna unit to transmit the optical signals, and the aforementioned antenna array applied to the optical phased array.

Optionally, the optical signal output unit includes an optical splitter and a phase shifter connected to the optical splitter, where the optical splitter is configured to split input light; the phase shifter is used for shifting the phase of the light split by the optical splitter and finally outputting the light signals of NxM paths with different phases.

According to another aspects of the invention, lidar is provided, including the aforementioned optical phased array, light receiving unit, and ranging unit.

According to another aspects of the invention, smart devices are provided, including the aforementioned lidar.

In the embodiment of the invention, an antenna array applied to an optical phased array comprises N phase compensation groups and N antenna groups, each phase compensation group comprises M phase compensation units, each antenna group comprises M antenna units, wherein N, M is a positive integer, wherein of the phase compensation units are used for receiving optical signals, and the output end of each phase compensation unit is connected with of the antenna groups and used for transmitting the received optical signals to the antenna units and performing phase compensation on the optical signals according to phase offset generated by the antenna units, and the antenna units are used for transmitting the optical signals.

Drawings

the various embodiments are illustrated by way of example in the accompanying drawings and not by way of limitation, in which elements having the same reference number designation may be referred to by similar elements in the drawings and, unless otherwise indicated, the drawings are not to scale.

Fig. 1 is a schematic diagram illustrating a structure of antenna arrays applied to an optical phased array according to an embodiment of the present invention;

fig. 2 is a schematic diagram illustrating an internal structure of an antenna group and a phase compensation group applied to an antenna array of an optical phased array in accordance with an embodiment of the present invention;

fig. 3 is a schematic diagram illustrating another antenna array applied to an optical phased array according to an embodiment of the present invention;

fig. 4 shows a schematic structural diagram of optical phased arrays according to an embodiment of the invention.

Detailed Description

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

Fig. 1 shows a schematic structural diagram of antenna arrays applied to an optical phased array according to an embodiment of the present invention, fig. 2 shows a schematic structural diagram of a phase compensation group and an antenna group of an antenna array applied to an optical phased array according to an embodiment , fig. 1 shows an antenna array applied to an optical phased array comprising N phase compensation groups 11 and N antenna groups 12, fig. 2 shows that each phase compensation group 11 comprises M phase compensation units 110, each antenna group 12 comprises M antenna units 120, wherein N, M is a positive integer, wherein of the phase compensation groups 110 have an input end for receiving optical signals and an output end connected to of the antenna groups 12 for transmitting received optical signals to the antenna units 120 and performing phase compensation on the optical signals according to a phase offset generated by the antenna units 120, and the antenna units 120 are used for transmitting the optical signals.

In the embodiment of the present invention, the ith phase compensation group 11 is connected to the ith antenna group 12, each phase compensation group 11 can receive M input optical signals, wherein 1< i < n, the general structure of among different phase compensation groups 11 is kept , and similarly, the general structure of among different antenna groups 12 is kept , in any phase compensation group 11 and the antenna group 12 connected to the phase compensation group 11, the jth phase compensation unit 110 is connected to the jth antenna unit 120, each phase compensation unit 110 can receive input optical signals, wherein 1< j < M, the antenna unit 120 is used to transmit optical signals, and the phase compensation unit 110 is used to compensate for the phase difference caused by the antenna unit 120 connected to the phase compensation unit 110.

In the embodiment of the present invention, any antenna unit 120 is composed of segments of gradually narrowing waveguide mode converters, which can gradually enlarge the light spots in the antenna waveguide, and the waveguide mode converters can be tapered waveguides with gradually decreasing widths, or parabolic and similar profile waveguides, specifically, in any antenna group 12, the jth antenna unit 120 includes a waveguide mode converter with gradually narrowing width wj from to wjt, which is used to gradually enlarge the light spots in the waveguide and emit the light spots at the end, and the width of the antenna unit 120 gradually narrows from to wjt, which can gradually enlarge the light spots in each antenna, reduce the mode effective refractive index, and get closer to the refractive index of air in free space, so when the optical signal is emitted, the reflection caused by the difference between the antenna mode refractive index and the free space air refractive index can be suppressed, and the emission efficiency can be obviously increased.

In any phase compensation group 11, any phase compensation unit 110 may be a tapered mode converter with two gradually changing widths, may adopt a bow-tie shape or the like, and may have an inner profile which may be a parabola and the like in addition to a taper shape, the phase compensation unit 110 may compensate for an additional phase shift caused by the antenna unit 120 connected thereto by a change in width or length, specifically, the phase compensation unit includes a mode converter with a width gradually changing from a th width wj to a third width wjp and a second mode converter with a width gradually changing from the third width wjp to the th width wj, an output of the mode converter is connected to an input of the second mode converter, an output of the second mode converter is connected to antenna units 120 among the antenna units, the output of the phase compensation unit 110 is determined by changing a value of the third width wjp, and the phase compensation amount of the phase compensation unit 110 of any is determined by changing the value of the third width wjp in the phase compensation group 11, the larger the phase compensation unit 110 is changed by the same width as the third width of the .

In the present embodiment, in any of the antenna group 12, any of the antenna units 120 generates a phase shift of θ, and the phase compensation unit 110 whose output end is connected to the antenna unit 120 generates a phase shift of — θ by adjusting a difference between the width wj and the third width wjp, where θ represents a phase change amount, and the third width wjp of the corresponding phase compensation unit 110 connected to the antenna unit 120 can be adjusted according to the phase difference caused by the antenna unit 120 in the antenna group 12 to ensure that the phase is compensated, i.e., the third width wjp is related to the second width wjt of the antenna unit 120 connected to the output end of the second mode converter and the manufacturing process of the antenna array, e.g., the jth antenna unit 120 in any antenna group 12 can cause a phase shift of θ j, and then the selection of the third width wjp of the jth phase compensation unit 110 connected to the jth antenna unit 120 should ensure that the phase compensation unit 110 can cause a phase shift of θ j, and thus the phase shift of the light entering the antenna group is finally arranged with an equal phase difference of .

In the embodiment of the present invention, the structure of the antenna unit 120 in each antenna group 12 is different, and the structure of the antenna unit at the corresponding position in the different antenna groups is the same, like the structure of the jth antenna unit in antenna groups is different from the structure of the jth antenna unit in the jth antenna group, and the jth antenna unit in the ith antenna group is the same as the jth antenna unit in the ith-1 antenna group.

The antenna array of the present embodiment is implemented on a silicon optical platform with a silicon layer thickness of 220nm, the smaller the second width wjt at the end of the antenna element 120, the closer the mode effective refractive index is to the refractive index of air in free space, the better the reflection caused by the difference between the antenna mode refractive index and the free space air refractive index is, and the higher the transmission efficiency is, but due to process constraints, the second width wjt may be 100nm to 300nm, preferably, the second width wjt is 200nm, and the relatively narrower waveguide width makes the antenna end unable to confine optical signals in the waveguide, and makes the mode field spot larger, the second width wjt of any of the phase compensation group 11 may be 300nm to 500nm, so as to ensure single-mode transmission, and no unnecessary crosstalk is caused by a high-order mode, the third width wjp is ± 200nm, and any width change of the waveguide may cause a larger change in the mode refractive index, i.e., may cause a larger change in the phase, i.e., a larger change in the phase loss may be caused by a third width 632, a smaller than a wj of a silicon layer thickness of 220nm, and may also be reduced by a width of the adjacent waveguide, and a length of the third width of the waveguide may be larger than a waveguide 80 μ, and may be reduced by a width of the waveguide 18 μ, a width of the adjacent waveguide 11, a waveguide.

As shown in fig. 3, the antenna array includes three antenna groups 12 and three phase compensation groups 11 respectively connected to the three antenna groups 12, each antenna group 12 includes an th antenna unit 121, a second antenna unit 122 and a third antenna unit 123, each phase compensation group includes a th phase compensation unit 111 connected to the th antenna unit 121, a second phase compensation unit 112 connected to the second antenna unit 122 and a third phase compensation unit 113 connected to the third antenna unit 123.

The antenna unit 121 includes a tapered waveguide mode converter with a width gradually narrowing from a th width w1 to a second width w1t, the t th phase compensation unit 111 includes a third mode converter 1101 with a width gradually changing from said t th width w t to a third width w1t and a second mode converter 1102 with a width gradually changing from said third width w1t to said t th width w t. the second antenna unit 122 includes a tapered waveguide mode converter 1101 with a width gradually narrowing from a t th width w t to a second width w2t, the second phase compensation unit 112 includes a third mode converter 1101 with a width gradually changing from said t th width w t to a third width w2t and a second mode converter 1102 with a width gradually changing from said third width w2t to said t th width w 72 w t, the third antenna unit 123 includes a tapered waveguide mode converter t with a width gradually narrowing from said t th width w t to said t th width w 72 w3, and the tapered waveguide mode converter 1101 includes a width gradually changing from said third mode converter t w 72 to said third mode converter t w 72 w t and a width t w3 gradually changing from said third mode converter t w t to said third mode converter t w t.

In the embodiment of the invention, the th widths w1, w2 and w3 are different from each other, the second widths w1t, w2t and w3t are different from each other, the third widths w1p, w2p and w3p are different from each other, the th widths w1, w2 and w3 are widths of single-mode waveguides, and can be 300nm to 500nm, the third widths w1p, w2p and w3p are limited by process conditions, and can be 100nm to 300nm, the second width w1t is determined according to the phase shift generated by the th antenna unit 121, the second width w2t is determined according to the phase shift generated by the second antenna unit 122, and the second width w3t is determined according to the phase shift generated by the third antenna unit 123.

The th antenna element 121, the second antenna element 122, and the third antenna element 123 have the same length L2, and the th phase compensation element 111, the second phase compensation element 112, and the third phase compensation element 113 have the same length or different lengths, which are specifically set as required.

The antenna array of the embodiment of the invention can be used for silicon-based CMOS (complementary metal oxide semiconductor) process processing, and is beneficial to realizing a larger-scale antenna array.

In the embodiment of the invention, an antenna array applied to an optical phased array comprises N phase compensation groups and N antenna groups, each phase compensation group comprises M phase compensation units, each antenna group comprises M antenna units, wherein N, M is a positive integer, the input end of any phase compensation units is used for receiving optical signals, the output end of the phase compensation unit is connected with antenna units in antenna groups and is used for transmitting the received optical signals to the antenna units and compensating phase differences generated by the antenna units, and the antenna units are used for transmitting the optical signals.

The embodiment of the invention also discloses optical phased arrays, as shown in fig. 4, which include an optical signal output unit 1, a waveguide unit 2 and the aforementioned antenna array 3 applied to the optical phased array, where the optical signal output unit 1 is configured to output nxm channels of modulated optical signals, and the waveguide unit 2 includes nxm channels of waveguide pipes 200 configured to transmit the nxm channels of modulated optical signals to the antenna array 3 to transmit the optical signals.

The optical signal output unit 1 includes an optical splitter 10 and a phase shifter 11 connected to the optical splitter 10. The optical splitter 10 is used for splitting input light; the phase shifter 11 is configured to shift the phase of the light split by the optical splitter 10, and finally output nxm paths of the optical signals with different phases. In the embodiment of the present invention, the optical splitter 10 may split the input light, and then the phase shifter 11 may shift the phase of the light split by the optical splitter 10, so as to obtain a plurality of optical signals with different phases and output the optical signals. Alternatively, the optical splitter 10 and the phase shifter 11 may be alternately arranged, that is, the splitting and the shifting of the input light are alternately performed, and finally, a plurality of optical signals with different phases are output. The input light is split and phase-shifted by the optical splitter 10 and the phase shifter 11, respectively, and then N × M optical signals with different phases are output. The waveguide unit 2 receives nxm optical signals carrying different phase information, which are split and phase-shifted by the optical splitter 10 and the phase shifter 11, and M output ends of the waveguide unit 2 are connected with nxm input ends of the antenna array 3.

In order to reduce the complexity and power consumption of the phase shift region, the phase shift region may use a cascaded phase shift mode, which cannot perform independent phase adjustment on each antenna, and only can provide the phase with equal difference distribution, if the antenna array does not result in , additional phase differences cannot be completely adjusted by the dynamic adjustment mode of the phase shift region, therefore, phase compensation groups need to be designed in the antenna array 3 to compensate for the additional phase shift caused by the antenna group.

The antenna array 3 includes N phase compensation groups, each of which can receive M input optical signals from the waveguide unit 2 and transmit the M input optical signals to an antenna group connected to the phase compensation group, and N antenna groups, each of which is configured to transmit an optical signal, and each of which is configured to compensate for a phase shift generated by the antenna group connected to the phase compensation group. For a more detailed structure and operation principle of the antenna array 3, reference is made to the antenna array of the previous embodiment, which is not described herein again.

The embodiment of the invention also discloses laser radars, which comprise an optical phased array, a light receiving unit and a distance measuring unit, wherein the optical phased array is used for emitting laser, the light receiving unit is used for receiving laser signals returned back by an object, and the distance measuring unit is used for measuring distance according to the laser signals received by the receiving unit.

The embodiment of the invention also discloses kinds of intelligent equipment, which comprise the laser radar, and the specific structure and the working principle of the laser radar are the same as those of the laser radar in the embodiment, so that the detailed description is omitted.

In the embodiment of the invention, an antenna array applied to an optical phased array comprises N phase compensation groups and N antenna groups, each phase compensation group comprises M phase compensation units, each antenna group comprises M antenna units, wherein N, M is a positive integer, the input end of any phase compensation units is used for receiving optical signals, the output end of the phase compensation unit is connected with antenna units in antenna groups and is used for transmitting the received optical signals to the antenna units and compensating phase differences generated by the antenna units, and the antenna units are used for transmitting the optical signals.

However, it is understood that embodiments of the invention may be practiced without these specific details, and that examples well-known methods, structures, and techniques have not been shown in detail in order not to obscure the understanding of this description.

Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together by in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of the various inventive aspects, however, the disclosed method is not intended to be interpreted as reflecting an intention that the claimed invention requires more features than are expressly recited in each claim.

It will be understood by those skilled in the art that modules in the apparatus of the embodiments may be adaptively changed and arranged in or more apparatuses different from the embodiments, that modules or units or components in the embodiments may be combined into modules or units or components, and further, that they may be divided into sub-modules or sub-units or sub-components, that all features disclosed in this specification (including the accompanying claims, abstract and drawings), and all processes or units of any method or apparatus so disclosed, may be combined in any combination, except at least of such features and/or processes or units are mutually exclusive, unless expressly stated otherwise, each feature disclosed in this specification (including the accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose.

Furthermore, those of skill in the art will appreciate that while the embodiments described herein include some features included in other embodiments, not others, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments.

The invention may be embodied by means of hardware comprising several distinct elements, and by means of a suitably programmed computer, in a unit claim enumerating several means, several of these means may be embodied by one and the same item of hardware, the use of the words , second, third, etc. may indicate any sequence.