阅读说明：本技术 一种垂直腔面发射激光器 (Vertical cavity surface emitting laser ) 是由 崔尧 王嘉星 于 2021-09-08 设计创作，主要内容包括：本申请涉及半导体激光器技术领域,公开了一种垂直腔面发射激光器,其包括：本体；光学整形件,用于对所述本体发射的光线准直、光线的发射角缩小或者扩大,所述光学整形件位于所述本体发射的光线的光路上,且所述光学整形件与所述本体一体成型。本申请通过光学元件与本体的一体化成型,将光学元件对光线的准直、光线的发射角缩小或者扩大的功能整合至本体中,以使本体能够自行对其发射出的光线进行准直、发射角的缩小或者扩大的作用。本申请一方面缩小了激光器的整体尺寸,另一方面还降低了生产成本。(The application relates to the technical field of semiconductor lasers, and discloses a vertical cavity surface emitting laser, which comprises: a body; the optical shaping piece is used for collimating the light rays emitted by the body and reducing or enlarging the emission angle of the light rays, is positioned on the light path of the light rays emitted by the body, and is integrally formed with the body. This application is through the integrated into one piece of optical element and body, and with optical element to the collimation of light, the emission angle of light reduce or the function of expanding integrate to the body in to make the body can carry out the effect of collimation, the reduction of emission angle or expansion to its light of launching by oneself. The laser device has the advantages that on one hand, the whole size of the laser device is reduced, and on the other hand, the production cost is also reduced.)

1. A vertical cavity surface emitting laser, comprising:

a body;

the optical shaping piece is used for collimating the light rays emitted by the body and reducing or enlarging the emission angle of the light rays, is positioned on the light path of the light rays emitted by the body, and is integrally formed with the body.

2. A vertical cavity surface emitting laser according to claim 1, wherein said optical shaping element comprises an optical shaping layer, said optical shaping layer being connected to said body.

3. A vertical cavity surface emitting laser according to claim 2, wherein said body includes an oxide layer, said oxide layer defining a plurality of unoxidized regions thereon, said optical shaping layer covering at least a portion of said unoxidized regions on said oxide layer.

4. A vertical cavity surface emitting laser according to claim 3, wherein said optical shaping layer covers all of the unoxidized regions on said oxidized layer.

5. A vertical cavity surface emitting laser according to claim 4, wherein said optical shaping layer includes at least two portions, one for collimating light rays emitted from said body and the other for reducing or enlarging an emission angle of light rays emitted from said body,

a non-oxidized region partially covering an upper portion of the oxide layer; the other of the portions covers the remaining unoxidized region on the oxide layer.

6. A vertical cavity surface emitting laser according to claim 1, wherein said optical shaping layer is a one-dimensional grating structure including a plurality of grating strips, each of said grating strips being parallel to each other and equally spaced.

7. A vertical cavity surface emitting laser according to claim 1, wherein said optical shaping layer is a two-dimensional grating structure including a plurality of high contrast microstructure units, each of said high contrast microstructure units being arranged in an array, said high contrast microstructure units being one of large-top and small-bottom and large-top and small-bottom.

8. A vertical cavity surface emitting laser according to claim 7, wherein said high contrast microstructure unit includes a plurality of structure layers arranged in a stack, and the area of each of said structure layers is sequentially decreased or increased along said light emission direction.

9. A vcsel according to claim 1, wherein said body is a top or bottom vcsel.

Technical Field

The invention relates to the technical field of semiconductor lasers, in particular to a vertical cavity surface emitting laser.

Background

A vertical cavity surface emitting laser, referred to as VCSEL for short, is a new semiconductor laser light source. Compared with a traditional edge-emitting semiconductor laser, the VCSEL has the advantages of low threshold value, symmetrical circular light spots, single longitudinal mode, easiness in two-dimensional array, good thermal stability and the like. This makes VCSELs have important applications in medical, display technology, space communication, optical interconnects, etc.

Generally, the light emitted from the VCSEL needs to be shaped before being projected into space, and the main shaping is collimation, beam expansion, and the like.

In the related art, optical devices such as a lens, a DOE (diffractive optical device), and a diffusion sheet are added in front of the VCSEL to realize beam shaping. The research on the vertical cavity surface emitting laser still needs to be advanced.

Disclosure of Invention

The present invention provides a vertical cavity surface emitting laser, including:

a body;

the optical shaping piece is used for collimating the light rays emitted by the body and reducing or enlarging the emission angle of the light rays, is positioned on the light path of the light rays emitted by the body, and is integrally formed with the body.

Most preferably implementable, the optical shaping element comprises an optical shaping layer, the optical shaping layer being connected to the body.

As an optimal way to realize, the body includes an oxide layer, a plurality of unoxidized areas are disposed on the oxide layer, and the optical shaping layer covers at least a part of the unoxidized areas on the oxide layer.

As an optimal way to achieve this, the optical shaping layer covers all of the unoxidized areas on the oxidized layer.

In an optimal way, the optical shaping layer comprises at least two parts, one part is used for collimating the light rays emitted by the body, the other part is used for reducing or enlarging the emission angle of the light rays emitted by the body,

a non-oxidized region partially covering an upper portion of the oxide layer; the other of the portions covers the remaining unoxidized region on the oxide layer.

As an optimal way to realize, the optical shaping layer is a one-dimensional grating structure, which includes a plurality of grating strips, and the grating strips are parallel to each other and equally spaced.

As an optimal way to be realized, the optical shaping layer is a two-dimensional grating structure, which includes a plurality of high-contrast microstructure units, each of the high-contrast microstructure units is arranged in an array, and the high-contrast microstructure units are large in top and small in bottom or large in top and small in bottom.

As an optimal mode for realization, the high-contrast microstructure unit comprises a plurality of structural layers which are arranged in a stacked manner, and the area of each structural layer is sequentially reduced or increased along the light emission direction.

Most preferably, the body is a top surface VCSEL or a bottom surface VCSEL.

Compared with the prior art, the invention has the beneficial effects that:

this application is through the integrated into one piece of optical element and body, and with optical element to the collimation of light, the emission angle of light reduce or the function of expanding integrate to the body in to make the body can carry out the effect of collimation, the reduction of emission angle or expansion to its light of launching by oneself. The laser device has the advantages that on one hand, the whole size of the laser device is reduced, and on the other hand, the production cost is also reduced.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:

FIG. 1 is a schematic structural diagram of a first type of VCSEL according to an embodiment of the present application;

FIG. 2 is a schematic structural diagram of a second VCSEL according to an embodiment of the present application;

FIG. 3 is a schematic structural diagram of a third type of VCSEL according to an embodiment of the present application;

FIG. 4 is a schematic diagram of a two-dimensional high contrast microstructure according to an embodiment of the present application;

fig. 5 is a schematic structural view of another two-dimensional high contrast microstructure according to embodiments of the present application.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.

Fig. 1 to 3 show schematic structural views of the vertical cavity surface emitting laser.

A vertical cavity surface emitting laser includes: the optical shaping piece is used for collimating the light rays emitted by the body and reducing or expanding the emission angle of the light rays, the optical shaping piece is positioned on the light path of the light rays emitted by the body, and the body and the optical shaping piece are integrally formed.

It should be noted that the body is a laser emitter, which includes a first emitting layer, a second emitting layer, an active layer 40, a substrate layer 20, and the like, and the laser emitter is a top vertical cavity surface emitting laser or a bottom vertical cavity surface emitting laser.

The optical shaping piece and the body are integrally formed, namely functions of light collimation and light emission angle reduction or expansion are integrated into the body, so that the body can automatically perform functions of light collimation and light emission angle expansion or reduction on the light emitted by the body. The distance between the light source of the body and the optical shaping layer 80 is a first preset distance L1 so as to collimate the light emitted by the body; the distance between the light source of the body and the optical shaping layer 80 is a second preset distance L2 so as to reduce the emission angle of the light emitted by the body, wherein the second preset distance L2 is greater than the first preset distance L1; the distance between the light source of the body and the optical shaping layer 80 is a third predetermined distance L3 to enlarge the emission angle of the light emitted from the body, wherein the third predetermined distance L3 is smaller than the first predetermined distance L1.

In the related art, optical devices such as a lens, a DOE (diffractive optical device), and a diffusion sheet are added in front of the VCSEL to realize beam shaping. The arrangement mode not only increases the cost, but also increases the overall size of the laser.

Based on this, this application has proposed a vertical cavity surface emitting laser, through the integrated molding of optical element and body, with optical element to the collimation of light, the emission angle of light reduces or the function of expanding integrate to the body in to make the body can carry out the effect of collimation, the reduction or the expansion of emission angle to its light of launching by oneself. The laser device has the advantages that on one hand, the whole size of the laser device is reduced, and on the other hand, the production cost is also reduced.

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, so that the above is the core idea of the present invention, and the above objects, features and advantages of the present invention can be more clearly understood. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In a preferred embodiment, the VCSEL includes an optical shaping layer 80, the optical shaping layer 80 being configured as the optical element, the optical shaping layer 80 being coupled to the body. The optical shaping layer 80 is arranged, so that the optical shaping piece and the body are integrally formed, and the processing is convenient.

In one embodiment, as shown in fig. 1, the vcsel employs a positive emission technology, the body includes an N electrode layer 10, a substrate layer 20, an N DBR layer 30, an active layer 40, an oxide layer 50, a P electrode contact layer 60, and a P electrode layer 70, which are sequentially stacked from bottom to top, a via region is disposed at a middle position of the P electrode layer 70, an optical shaping layer 80 is disposed in the via region, and the optical shaping layer 80 is connected to a surface of the P electrode layer 70 facing away from the P electrode contact layer 60.

In another embodiment, as shown in fig. 2, the vcsel employs a back-emission technology, the body includes a P-electrode layer 70, a P-type electrode contact layer 60, a P-type DBR layer, an active layer 40, an oxide layer 50, an N-electrode layer 10, and a substrate layer 20, which are stacked in sequence from bottom to top, and the optical shaping layer 80 is connected to a surface of the substrate layer 20 opposite to the N-electrode layer 10.

It should be noted that the optical shaping layer 80 is a high-contrast grating layer, and those skilled in the art can design a corresponding high-contrast grating layer structure as required. The optical shaping layer 80 is provided to shape all light reflected from the laser. The vcsel employs a back emission technique, and a schematic structural diagram of the vcsel may be shown in fig. 2 or fig. 3.

In a preferred embodiment, the body includes an oxide layer 50, a plurality of unoxidized areas 51 are formed on the oxide layer 50, and the optical shaping layer 80 covers at least a portion of the unoxidized areas 51 on the oxide layer 50.

It should be noted that the vcsel has an array of light sources, one light source corresponding to an unoxidized region 51 on an oxide layer 50, and light is emitted from the unoxidized region 51. The optical shaping layer 80 can cover the unoxidized region 51 in the upper portion of the oxide layer 50 to shape a portion of the light of the VCSEL; the optical shaping layer 80 can cover all of the unoxidized region 51 on the oxide layer 50 to shape all of the light of the VCSEL.

In a preferred embodiment, the optical shaping layer 80 covers all of the unoxidized regions 51 on the oxide layer 50 to shape all of the light from the VCSEL.

In a preferred embodiment, the optical shaping layer 80 covers an unoxidized region 51 of the oxide layer 50, i.e., the optical shaping layer 80 shapes the unoxidized region 51 alone, where the area of the light shaping layer is slightly larger than the size of the unoxidized region 51. The VCSEL may include several of the above-described optical shaping layers 80.

In a preferred embodiment, the optical shaping layer 80 includes at least two portions, one for collimating the light emitted from the bulk, the other for reducing or enlarging the emission angle of the light emitted from the bulk, and one for covering the unoxidized area 51 on the upper portion of the oxide layer 50; the other of said portions covers the remaining unoxidized area 51 on said oxide layer 50. The above arrangement can perform preset shaping of a part of light rays individually.

In a specific embodiment, the optical shaping layer 80 is divided into a first portion for collimating the light emitted from the body and a second portion for reducing or expanding the emission angle of the light emitted from the body. The first portion covers the unoxidized area 51 of the upper portion of the oxide layer 50; the second portion covers the remaining unoxidized areas 51 on the oxide layer 50.

In another embodiment, the optical shaping layer 80 is divided into a first portion for collimating the light emitted from the body, a second portion for reducing the emission angle of the light emitted from the body, and a third portion for expanding the emission angle of the light emitted from the body. The first portion covers a portion of the unoxidized region 51 on the oxide layer 50; the second portion covers another portion of the unoxidized region 51 on the oxide layer 50, and the third portion covers the remaining unoxidized region 51 on the oxide layer 50.

In a preferred embodiment, as shown in fig. 1, the optical shaping layer 80 is a one-dimensional grating structure, which includes a plurality of grating bars 81, and the grating bars 81 are parallel to each other and equally spaced. The optical shaping layer 80 is simple in structure and convenient to manufacture.

In a preferred embodiment, the optical shaping layer 80 is a two-dimensional grating structure including a plurality of high-contrast microstructure elements 82, each high-contrast microstructure element 82 being arranged in an array, and the high-contrast microstructure elements 82 being either large-top-small or large-top-small. The optical shaping layer 80 has a good shaping effect on light.

Specifically, as shown in fig. 4 and 5, the high-contrast microstructure unit 82 includes a plurality of structural layers 821 arranged in a stacked manner, the high-contrast microstructure unit 82 may be pyramid-shaped, and the areas of the structural layers 821 are sequentially reduced along the light emission direction; the high-contrast microstructure unit 82 may be in an inverted pyramid shape, and the areas of the structure layers 821 are sequentially increased along the light emission direction, so that the processing is convenient and the manufacturing cost is low.

The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by those skilled in the art that the scope of the disclosure herein is not limited to the particular combination of features described above, but also encompasses other arrangements formed by any combination of the above features or their equivalents without departing from the spirit of the disclosure. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.