阅读说明：本技术 一种半导体激光泵浦源光学镜片装配方法 (Method for assembling optical lens of semiconductor laser pumping source ) 是由 王磊 刘新伟 赵克明 缪颖彬 于 2021-07-20 设计创作，主要内容包括：本发明公开了一种半导体激光泵浦源光学镜片装配方法,其包括利用机械手吸附镜片按照设定间距逐步下降,并实时反馈压力值大小,利用压力差找底,当镜片触底后,再反向上抬镜片,缩小上升节距,实时反馈压力值大小,利用压力差找到镜片与装配面刚刚接触的高度位置；上抬设定高度,利用XYZ轴旋转驱动机构,配合功率大小检测,使得镜片旋转至最佳角度位置；找光完成后,点胶,再将镜片移动至最佳角度位置,再次检测功率大小；OK后再进行胶水固化,固化完成后,最后再进行功率大小检测判定,完成装配。本发明能够精准的调节光学镜片的角度使其保障激光泵浦盒发出的光束位置以及功率达到设定要求,提高镜片装配精度与光学系统的可靠性。(The invention discloses a semiconductor laser pump source optical lens assembling method, which comprises the steps of utilizing a mechanical arm to adsorb a lens to gradually descend according to a set interval, feeding back the magnitude of a pressure value in real time, finding the bottom by utilizing pressure difference, lifting the lens upwards in a reverse mode after the lens touches the bottom, reducing the lifting pitch, feeding back the magnitude of the pressure value in real time, and finding the height position of the lens, which just contacts with an assembling surface, by utilizing the pressure difference; lifting to set a height, and rotating the lens to an optimal angle position by using an XYZ axis rotation driving mechanism in cooperation with power detection; after the light finding is finished, dispensing, moving the lens to the optimal angle position, and detecting the power again; and (5) after OK, carrying out glue solidification, and after solidification is finished, finally carrying out power detection and judgment to finish assembly. The invention can accurately adjust the angle of the optical lens to ensure that the position and the power of the light beam emitted by the laser pumping box meet the set requirements, and improve the assembly precision of the lens and the reliability of an optical system.)

1. A semiconductor laser pumping source optical lens assembly method is characterized in that: which comprises the following steps:

s1) the mechanical arm sucks the lens to touch the bottom:

s11) moving the lens to a set height position H above the assembling position by using the robot₁；

S12) according to the set distance h₀Gradually moving the lens downwards, and reading a pressure value once by using a pressure sensor on the manipulator once every walking;

s13) calculating the difference value deltap between the current pressure value and the last pressure value_A；

S14) determining Δ P_AIf the contact angle is larger than the set value, the bottom of the lens is considered to be contacted with the mounting surface, and the next step is continued; otherwise, continuing to repeat the steps S12) to S14);

s15) according to the set distance h₁Gradually moving the lens upwards, and reading a pressure value once by using a pressure sensor on the manipulator once each step is performed;

s16) calculating the difference value deltap between the last pressure value and the current pressure value_B；

S17) determining Δ P_BIf the height is smaller than the set value, keeping the lens at the height position, and continuing the next step; otherwise, continuing to repeat the steps S15) to S17);

s2) lifting the lens to set the height;

s3) initial alignment before dispensing: a multi-axis adjusting mechanism is arranged and comprises a U_xAngle-adjustable rotating shaft U_xRealize U_yAngle-adjustable rotating shaft U_yRealize U_zAngle-adjustable rotating shaft U_z(ii) a The manipulator is arranged at the movable tail end of the multi-axis adjusting mechanism;

s31) powering on the chip in the laser pumping source, wherein the power-on current is I₁Detecting the power of the light beam output by the laser pumping source by using a light beam power detector;

s32) using a rotation shaft U_xThe adjusting lens rotates and scans along the set direction according to the set angle in sequence, and the scanning range is theta₁With a scanning precision of omega₁And recording the output beam power as Q once per a set angle of rotation_x；

S33) getting Q_xMaximum value in (1) is Q_xmaxJudgment of Q_xmaxIf the value is larger than the set value, keeping the lens at Q_xmaxAnd (4) continuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, and if the obtained maximum power is less than the set value, judging that the lens is unqualifiedEnding finding light;

s34) using a rotation shaft U_yAdjusting the rotation set angle of the lens, the scanning range is theta₂With a scanning precision of omega₂And recording the output beam power as Q once every time the lens rotates a set angle_y；

S35) getting Q_yMaximum value in (1) is Q_ymaxJudgment of Q_ymaxIf the value is larger than the set value, keeping the lens at Q_ymaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s36) using a rotation shaft U_zAdjusting the rotation set angle of the lens, the scanning range is theta₃With a scanning precision of omega₃And recording the output beam power as Q once every time the lens rotates a set angle_z；

S37) getting Q_zMaximum value in (1) is Q_zmaxJudgment of Q_zmaxIf the value is larger than the set value, keeping the lens at Q_ymaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range, repeating the scanning according to the principle of the step 36), judging the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s4) precisely aligning before dispensing: increasing the power-on current to I₂And reducing the scanning range to theta₄Increasing the scanning accuracy to omega₄Then, repeating the steps S31) -S37) until the obtained three power values are judged to be larger than the set value, and obtaining the corresponding optimal position;

s5) power value judgment OK and dispensing: the lens moves to give way, and the dispensing mechanism dispenses at a set position;

s6), after dispensing, placing the lens at the optimal position obtained in the step S4), and judging whether the power of the light beam emitted by the laser pumping box exceeds a set value, if so, carrying out the next step, otherwise, precisely finding the light again according to the step S4);

s6) the power value is judged to be OK, and then the curing lamp starts to cure the glue;

s7), after the glue is solidified, judging whether the power of the light beam emitted by the laser pumping box exceeds a set value, if so, finishing the lens assembly, otherwise, judging to be NG.

2. The method of assembling an optical lens for a semiconductor laser pumping source according to claim 1, wherein: the manipulator is provided with a suction nozzle, and a pressure sensor for monitoring and feeding back the pressure of the suction nozzle in the vertical direction in real time.

3. The method of assembling an optical lens for a semiconductor laser pumping source according to claim 1, wherein: h is₁Less than h₀。

4. The method of assembling an optical lens for a semiconductor laser pumping source according to claim 3, wherein: h is₁＝0.5h₀。

5. The method of assembling an optical lens for a semiconductor laser pumping source according to claim 1, wherein: i is₂Is greater than I₁；θ₄Less than theta₁、θ₂、θ₃；ω₄Less than omega₁、ω₂、ω₃。

[ technical field ] A method for producing a semiconductor device

The invention relates to a method for assembling a semiconductor laser pump source optical lens.

[ background of the invention ]

With the rapid development of social economy, the requirements of various industries on the product quality are higher and higher, and meanwhile, the increase of labor cost and the management and control of production quality also become important problems for many enterprises; at present, the optical industry mainly adopts manual assembly, the production efficiency is low, and good quality control is difficult to form.

A laser is a device that can emit laser light. Lasers can be classified into four broad categories, gas lasers, solid lasers, semiconductor lasers and dye lasers, according to the working medium. Semiconductor laser is a device which uses certain semiconductor material as working substance to produce stimulated emission. The operating principle is that the population inversion of non-equilibrium carriers is realized between the energy bands (conduction band and valence band) of the semiconductor substance or between the energy bands of the semiconductor substance and the energy levels of impurities (acceptor or donor) through a certain excitation mode, and when a large number of electrons in the population inversion state are combined with holes, the stimulated emission effect is generated. The excitation modes of semiconductor lasers are mainly three, namely, an electro-injection mode, an optical pump mode and a high-energy electron beam excitation mode. In the production process of the semiconductor laser, an optical lens needs to be arranged at a set position according to a designed optical system, the assembly precision requirement of the optical lens is extremely high, and the lenses have the characteristics of microminiature and easy deformation under stress, so that the assembly is difficult. The lens in the prior art has extremely low assembly efficiency, the assembly precision is difficult to meet the design requirement, and the yield is low.

Therefore, it is necessary to develop a method for assembling an optical lens of a semiconductor laser pump source to solve the above problems.

[ summary of the invention ]

The invention mainly aims to provide an assembling method of an optical lens of a semiconductor laser pumping source, which can accurately adjust the angle of the optical lens to ensure that the position and the power of a light beam emitted by a laser pumping box meet set requirements, and improve the assembling precision of the lens and the reliability of an optical system.

The invention realizes the purpose through the following technical scheme: a semiconductor laser pumping source optical lens assembly method comprises the following steps:

s1) the mechanical arm sucks the lens to touch the bottom:

s11) useThe mechanical arm moves the lens to a set height position H above the assembly position₁；

S12) according to the set distance h₀Gradually moving the lens downwards, and reading a pressure value once by using a pressure sensor on the manipulator once every walking;

s13) calculating the difference value deltap between the current pressure value and the last pressure value_A；

S14) determining Δ P_AIf the contact angle is larger than the set value, the bottom of the lens is considered to be contacted with the mounting surface, and the next step is continued; otherwise, continuing to repeat the steps S12) to S14);

s15) according to the set distance h₁Gradually moving the lens upwards, and reading a pressure value once by using a pressure sensor on the manipulator once each step is performed;

s16) calculating the difference value deltap between the last pressure value and the current pressure value_B；

S17) determining Δ P_BIf the height is smaller than the set value, keeping the lens at the height position, and continuing the next step; otherwise, continuing to repeat the steps S15) to S17);

s2) lifting the lens to set the height;

s3) initial alignment before dispensing: a multi-axis adjusting mechanism is arranged and comprises a U_xAngle-adjustable rotating shaft U_xRealize U_yAngle-adjustable rotating shaft U_yRealize U_zAngle-adjustable rotating shaft U_z(ii) a The manipulator is arranged at the movable tail end of the multi-axis adjusting mechanism;

s31) powering on the chip in the laser pumping source, wherein the power-on current is I₁Detecting the power of the light beam output by the laser pumping source by using a light beam power detector;

s32) using a rotation shaft U_xThe adjusting lens rotates and scans along the set direction according to the set angle in sequence, and the scanning range is theta₁With a scanning precision of omega₁And recording the output beam power as Q once per a set angle of rotation_x；

S33) getting Q_xMaximum value in (1) is Q_xmaxJudgment ofQ off_xmaxIf the value is larger than the set value, keeping the lens at Q_xmaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s34) using a rotation shaft U_yAdjusting the rotation set angle of the lens, the scanning range is theta₂With a scanning precision of omega₂And recording the output beam power as Q once every time the lens rotates a set angle_y；

S35) getting Q_yMaximum value in (1) is Q_ymaxJudgment of Q_ymaxIf the value is larger than the set value, keeping the lens at Q_ymaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s36) using a rotation shaft U_zAdjusting the rotation set angle of the lens, the scanning range is theta₃With a scanning precision of omega₃And recording the output beam power as Q once every time the lens rotates a set angle_z；

S37) getting Q_zMaximum value in (1) is Q_zmaxJudgment of Q_zmaxIf the value is larger than the set value, keeping the lens at Q_ymaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s4) precisely aligning before dispensing: increasing the power-on current to I₂And reducing the scanning range theta₄Increasing the scanning accuracy to omega₄Then, repeating the steps S31) -S37) until the obtained three power values are judged to be larger than the set value, and obtaining the corresponding optimal position;

s5) power value judgment OK and dispensing: the lens moves to give way, and the dispensing mechanism dispenses at a set position;

s6), after dispensing, placing the lens at the optimal position obtained in the step S4), and judging whether the power of the light beam emitted by the laser pumping box exceeds a set value, if so, carrying out the next step, otherwise, precisely finding the light again according to the step S4);

s6) the power value is judged to be OK, and then the curing lamp starts to cure the glue;

s7), after the glue is solidified, judging whether the power of the light beam emitted by the laser pumping box exceeds a set value, if so, finishing the lens assembly, otherwise, judging to be NG.

Furthermore, the manipulator is provided with a suction nozzle, and a pressure sensor for monitoring and feeding back the pressure of the suction nozzle in the vertical direction in real time.

Further, h is₁＝0.5h₀。

Further, I₂Is greater than I₁；θ₄Less than theta₁、θ₂、θ₃；ω₄Less than omega₁、ω₂、ω₃。

Compared with the prior art, the method for assembling the optical lens of the semiconductor laser pumping source has the beneficial effects that: the mechanical arm is used for adsorbing the lens to gradually descend according to the set distance, the magnitude of the pressure value is fed back in real time, the bottom is found by using pressure difference, after the lens touches the bottom, the lens is lifted upwards in the reverse direction, the ascending pitch is reduced, the magnitude of the pressure value is fed back in real time, and the height position of the lens, which just contacts with the assembly surface, is found by using the pressure difference; lifting to set a height, and rotating the lens to an optimal angle position by using an XYZ axis rotation driving mechanism in cooperation with power detection; after the light finding is finished, dispensing, moving the lens to the optimal angle position, and detecting the power again; after OK, carrying out glue solidification, and after solidification, finally carrying out power detection and judgment to complete assembly; the optical lens is driven by the rotating shafts in the axial directions to accurately find the best position according to the step scanning, the assembling precision of the lens is guaranteed, and the stability, the accuracy and the reliability of an optical system in a laser pumping source are guaranteed.

[ description of the drawings ]

Fig. 1 is a flowchart of a method for finding light before dispensing according to an embodiment of the present invention.

[ detailed description ] embodiments

The first embodiment is as follows:

referring to fig. 1, the present embodiment is a method for assembling an optical lens of a semiconductor laser pumping source, including the following steps:

s1) the mechanical arm sucks the lens to touch the bottom: providing a mechanical arm, wherein the mechanical arm is provided with a suction nozzle and a pressure sensor for monitoring and feeding back the pressure of the suction nozzle in the vertical direction in real time;

s11) moving the lens to a set height position H above the assembly position₁；

S12) according to the set distance h₀Gradually moving the lens downwards, for example, moving downwards by 0.01mm each time, and reading a pressure value once by using a pressure sensor on the manipulator once every time the lens is moved downwards;

s13) calculating the difference value deltap between the current pressure value and the last pressure value_A；

S14) determining Δ P_AIf the contact angle is larger than the set value, the bottom of the lens is considered to be contacted with the mounting surface, and the next step is continued; otherwise, continuing to repeat the steps S12) to S14);

s15) according to the set distance h₁Moving the lens upwards step by step h₁Less than h₀For example, each time the robot lifts up by 0.005mm and each time the robot walks, the pressure sensor on the manipulator reads the pressure value; preferred is h₁＝0.5h₀；

S16) calculating the difference value deltap between the last pressure value and the current pressure value_B；

S17) determining Δ P_BIf the height is less than the set value, the bottom of the lens is considered to be just separated from the mounting surface, namely the bottom of the lens is just contacted with the mounting surface, and the current height position is recorded as H₂Continuing the next step; otherwise, continuing to repeat the steps S15) to S17);

s2) lifting the lens to a set height: for example, raised by 0.3 mm; the following functions are realized by lifting the lens to a set height: A) because the lens needs to be rotationally adjusted at various angles in the light finding process, in order to ensure that the center of the lens is kept unchanged in the rotational adjustment process, the change of the center of the lens caused by interference between the bottom of the lens and the mounting surface is avoided, and enough adjustment space is provided for adjustment of the lens in various directions, the lens is lifted by a certain height; B) when the lens is assembled, glue is required to be coated on the assembly surface, so that a glue coating space can be reserved after the height is set by lifting, the glue coating operation is convenient, and the assembly efficiency is improved;

s3) initial alignment before dispensing: a multi-axis adjusting mechanism is arranged and comprises a U_xAngle-adjustable rotating shaft U_xRealize U_yAngle-adjustable rotating shaft U_yRealize U_zAngle-adjustable rotating shaft U_z(ii) a The manipulator is arranged at the movable tail end of the multi-axis adjusting mechanism;

s31) powering on a chip in the laser pumping source, wherein at the moment, a light beam is output from the lens end corresponding to the laser pumping source, passes through the lens to be assembled at the position of the set height lifted in the step S2), and the power of the light beam is detected by a light beam power detector (such as an integrating sphere); here the initial power-on current I₁Controlling to be 2A; other values such as 2.5A, 3A, 4A, etc. may also be set;

s32) using a rotation shaft U_xAdjusting the lens to rotate and scan sequentially along a set direction according to a set angle, setting an initial scanning range to be theta 1, and setting a scanning precision to be omega 1, wherein if the rotating scanning range is 0.5 degree, each rotation is 0.01 degree, and each rotation is a set angle, the output light beam power is recorded once to be Q_x；

S33) getting Q_xMaximum value in (1) is Q_xmax(ii) a Judgment of Q_xmaxIf the value is larger than the set value, keeping the lens at Q_xmaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s34) using a rotation shaft U_yAdjusting the rotation set angle of the lens, setting the initial scanning range to be theta 2, and the scanning precision to be omega 2, wherein if the rotation scanning range is 0.5 degree, each rotation0.01 degree, and recording the output beam power as Q once per a set angle of rotation_y；

S35) getting Q_yMaximum value in (1) is Q_ymax(ii) a Judgment of Q_ymaxIf the value is larger than the set value, keeping the lens at Q_ymaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s36) using a rotation shaft U_zAdjusting the rotation set angle of the lens, setting the initial scanning range to be theta 3, and the scanning precision to be omega 3, if the rotation scanning range is 0.5 degree, each rotation is 0.01 degree, and each rotation is a set angle, recording the output light beam power to be Q once_z；

S37) getting Q_zMaximum value in (1) is Q_zmax(ii) a Judgment of Q_zmaxIf the value is larger than the set value, keeping the lens at Q_ymaxContinuing the next step according to the corresponding angle position, otherwise, expanding the scanning range and repeatedly scanning to judge the power, if the obtained maximum power is smaller than the set value, judging that the lens is unqualified, and finishing finding light;

s4) precisely finding out light before dispensing, increasing power-on current to I₂E.g., 10A or 20A, reducing the scanning range, e.g., 0.05 degree, increasing the scanning accuracy, e.g., 0.001 degree, and then repeating steps S31) -S37) until the obtained three power values are determined to be greater than the set value, and obtaining the corresponding optimal position;

s5) power value judgment OK and dispensing: the lens moves to give way, and the automatic dispensing mechanism dispenses at a set position;

s6), after dispensing, placing the lens at the optimal position obtained in the step S4), and judging whether the power of the light beam emitted by the laser pumping box exceeds a set value, if so, carrying out the next step, otherwise, precisely finding the light again according to the step S4);

s6) judging the power value, namely, after OK, starting to cure the glue by the curing lamp, and curing according to the glue characteristic and the energy step in the curing process, wherein if the energy of the curing lamp reaches 30% and the curing time is 10S; the energy is applied to 50 percent, and the curing time is 10 s; the energy reaches 80 percent, and the curing time is 30 s; the energy reaches 100 percent, and the curing time is 30 s;

s7), after the glue is solidified, judging whether the power of the light beam emitted by the laser pumping box exceeds a set value, if so, finishing the lens assembly, otherwise, judging to be NG.

The method for assembling the optical lens of the semiconductor laser pumping source comprises the steps of utilizing a mechanical arm to adsorb a lens to gradually descend according to a set interval, feeding back the magnitude of a pressure value in real time, finding a bottom by utilizing pressure difference, lifting the lens upwards in a reverse mode after the lens touches the bottom, reducing the ascending pitch, feeding back the magnitude of the pressure value in real time, and finding the height position of the lens, which just contacts with an assembling surface, by utilizing the pressure difference; lifting to set a height, and rotating the lens to an optimal angle position by using an XYZ axis rotation driving mechanism in cooperation with power detection; after the light finding is finished, dispensing, moving the lens to the optimal angle position, and detecting the power again; after OK, carrying out glue solidification, and after solidification, finally carrying out power detection and judgment to complete assembly; the optical lens is driven by the rotating shafts in the axial directions to accurately find the best position according to the step scanning, the assembling precision of the lens is guaranteed, and the stability, the accuracy and the reliability of an optical system in a laser pumping source are guaranteed.

What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.