阅读说明：本技术 驾驶员报警系统 (Driver warning system ) 是由 胜井秀一 池田隆之 于 2019-10-01 设计创作，主要内容包括：提供一种能够提高安全性的驾驶员报警系统。自行车包括发射第一超声波的第一发射电路、接收第二超声波的第一接收电路、从第二超声波检测出物体有无的运算电路及发射第三超声波的第二发射电路。驾驶员穿戴包括接收第三超声波的第二接收电路的第二外壳。运算电路包括以不同时序分别选择对应于第二超声波的电位的第一选择电路、保持对应于第二超声波的电位的多个信号保持电路、选择多个信号保持电路中的任一的第二选择电路及被输入由第二选择电路选出并输出的信号的信号处理电路。第二选择电路以不同时序分别选择多个信号保持电路来生成拖延了第二超声波的信号。将根据该信号生成的第三超声波发送到上述第二外壳。(Provided is a driver warning system capable of improving safety. The bicycle includes a first transmitting circuit that transmits a first ultrasonic wave, a first receiving circuit that receives a second ultrasonic wave, an arithmetic circuit that detects the presence or absence of an object from the second ultrasonic wave, and a second transmitting circuit that transmits a third ultrasonic wave. The driver wears a second housing including a second receiving circuit that receives the third ultrasonic wave. The arithmetic circuit includes a first selection circuit for selecting a potential corresponding to the second ultrasonic wave at different timings, a plurality of signal holding circuits for holding the potential corresponding to the second ultrasonic wave, a second selection circuit for selecting any one of the plurality of signal holding circuits, and a signal processing circuit to which a signal selected and output by the second selection circuit is input. The second selection circuit selects the plurality of signal holding circuits at different timings to generate signals delayed by the second ultrasonic wave. And transmitting a third ultrasonic wave generated based on the signal to the second housing.)

1. A driver warning system comprising:

a first housing comprising:

a first transmitting circuit that transmits a first ultrasonic wave;

a first receiving circuit that receives the second ultrasonic wave;

an arithmetic circuit for detecting the presence or absence of an object from the second ultrasonic wave; and

a second transmitting circuit for transmitting a third ultrasonic wave based on the signal obtained by the arithmetic circuit, and

a second housing comprising:

a second receiving circuit that receives the third ultrasonic wave,

wherein the arithmetic circuit comprises:

a first selection circuit for selecting potentials corresponding to the second ultrasonic waves at different timings, respectively;

a plurality of signal holding circuits that hold potentials corresponding to the second ultrasonic waves;

a second selection circuit that selects any one of the plurality of signal holding circuits; and

a signal processing circuit to which a signal selected and output by the second selection circuit is input,

each of the plurality of signal holding circuits includes a first transistor,

the second ultrasonic wave is an ultrasonic wave obtained by reflecting the first ultrasonic wave,

the first transistor includes a semiconductor layer including an oxide semiconductor in a channel formation region,

the second selection circuit selects the plurality of signal holding circuits at different timings respectively to generate signals delaying the second ultrasonic wave,

and transmitting the third ultrasonic wave generated according to the signal to the second housing.

2. A driver warning system comprising:

a first housing comprising:

a first transmitting circuit that transmits a first ultrasonic wave;

a first receiving circuit that receives the second ultrasonic wave;

a second transmitting circuit that transmits a third ultrasonic wave;

a second receiving circuit that receives a fourth ultrasonic wave;

an arithmetic circuit for detecting the presence or absence of an object from the second ultrasonic wave and the fourth ultrasonic wave; and

a third transmitting circuit for transmitting a fifth ultrasonic wave based on the signal obtained by the arithmetic circuit, and

a second housing comprising:

a third receiving circuit that receives the fifth ultrasonic wave,

wherein the arithmetic circuit comprises:

a first selection circuit that selects potentials corresponding to the second ultrasonic wave and the fourth ultrasonic wave at different timings, respectively;

a plurality of signal holding circuits that hold potentials corresponding to the second ultrasonic wave or the fourth ultrasonic wave;

a second selection circuit that selects any one of the plurality of signal holding circuits; and

a signal processing circuit to which a signal selected and output by the second selection circuit is input,

the second ultrasonic wave is an ultrasonic wave obtained by reflecting the first ultrasonic wave,

the fourth ultrasonic wave is an ultrasonic wave obtained by reflection of the third ultrasonic wave,

each of the plurality of signal holding circuits includes a first transistor,

the first transistor includes a semiconductor layer including an oxide semiconductor in a channel formation region,

the second selection circuit selects the plurality of signal holding circuits at different timings respectively to generate a signal delaying the second ultrasonic wave or the fourth ultrasonic wave,

and transmitting a fifth ultrasonic wave generated according to the signal to the second housing.

3. The driver warning system according to claim 1 or 2,

wherein the first transistor is used as a selection switch in the first selection circuit.

4. The driver warning system according to any one of claims 1 to 3,

wherein each of the plurality of signal holding circuits includes an amplifying circuit having a second transistor,

and the second transistor includes a semiconductor layer including an oxide semiconductor in a channel formation region.

5. The driver warning system according to any one of claims 1 to 4,

wherein the second selection circuit comprises a third transistor,

and the third transistor includes a semiconductor layer including an oxide semiconductor in a channel formation region.

6. The driver warning system according to any one of claims 1 to 5,

wherein the signal processing circuit comprises a differential circuit, an integrating circuit, a comparator and a triangular wave generating circuit,

the differential circuit is inputted with a first voltage and a second voltage,

the integrating circuit is inputted with an output signal of the differential circuit,

and the comparator is inputted with the output signal of the integrating circuit and the output signal of the triangular wave generating circuit.

7. The driver warning system according to any one of claims 1 to 6,

wherein the differential circuit comprises a fourth transistor,

and the fourth transistor includes a semiconductor layer including an oxide semiconductor in a channel formation region.

Technical Field

One aspect of the present invention relates to a driver warning system.

Background

Research and development of a driver warning system for a bicycle has been discussed (for example, patent document 1). Patent document 1 discloses the following structure: microwave ultrasonic radar is mounted to a bicycle as a proximity sensor to monitor structures in front and behind using Echolocation (echo). Patent document 1 also discloses a structure for warning a driver by vibrating a vibration motor attached to a handlebar based on information detected by a proximity sensor.

[ Prior Art document ]

[ patent document ]

[ patent document 1] Japanese patent application laid-open No. 2017-206242

Disclosure of Invention

Technical problem to be solved by the invention

The driver notices a warning based on information measured by a sensor or the like. In order to further facilitate the driver's attention to the warning, the warning device is preferably wearable, i.e. a wearable device. However, the wearable device still has a concern that its size becomes large when the power consumption of the processor, the a/D conversion circuit, and the like is high and the circuit area is large.

An object of one embodiment of the present invention is to provide a driver warning system having a novel structure that can achieve miniaturization of equipment. It is another object of one embodiment of the present invention to provide a driver warning system having a novel configuration that can reduce power consumption of devices. It is another object of one embodiment of the present invention to provide a driver warning system having a novel structure that can improve safety.

Note that the description of these objects does not hinder the existence of other objects. In addition, one embodiment of the present invention does not necessarily achieve all of the above-described objects. The objects other than the above can be extracted from the descriptions of the specification, the drawings, the claims, and the like.

Means for solving the problems

One aspect of the present invention is a driver warning system including a first housing including a first transmitting circuit that transmits a first ultrasonic wave, a first receiving circuit that receives a second ultrasonic wave, an arithmetic circuit that detects the presence or absence of an object from the second ultrasonic wave, and a second transmitting circuit that transmits a third ultrasonic wave based on a signal obtained by the arithmetic circuit, and a second housing including a second receiving circuit that receives the third ultrasonic wave, the arithmetic circuit including a first selecting circuit that selects potentials corresponding to the second ultrasonic wave at different timings, a plurality of signal holding circuits that hold potentials corresponding to the second ultrasonic wave, a second selecting circuit that selects any one of the plurality of signal holding circuits, and a signal processing circuit that is input with a signal selected and output by the second selecting circuit, each of the plurality of signal holding circuits including a first transistor, the second ultrasonic wave is an ultrasonic wave obtained by reflection of the first ultrasonic wave, the first transistor includes a semiconductor layer including an oxide semiconductor in a channel formation region, and the second selection circuit selects the plurality of signal holding circuits at different timings, respectively, to generate a signal delaying the second ultrasonic wave and transmits a third ultrasonic wave generated from the signal to the second housing.

One aspect of the present invention is a driver warning system including a first housing including a first transmitting circuit that transmits a first ultrasonic wave, a first receiving circuit that receives a second ultrasonic wave, a second transmitting circuit that transmits a third ultrasonic wave, a second receiving circuit that receives a fourth ultrasonic wave, an arithmetic circuit that detects the presence or absence of an object from the second ultrasonic wave and the fourth ultrasonic wave, and a third transmitting circuit that transmits a fifth ultrasonic wave based on a signal obtained by the arithmetic circuit, and a second housing including a third receiving circuit that receives the fifth ultrasonic wave, the arithmetic circuit including a first selecting circuit that selects potentials corresponding to the second ultrasonic wave and the fourth ultrasonic wave at different timings, a plurality of signal holding circuits that hold potentials corresponding to the second ultrasonic wave or the fourth ultrasonic wave, a second selecting circuit that selects any one of the plurality of signal holding circuits, and a signal processing circuit to which a signal selected by the second selecting circuit is input and output, the second ultrasonic wave is an ultrasonic wave obtained by reflection of the first ultrasonic wave, the fourth ultrasonic wave is an ultrasonic wave obtained by reflection of the third ultrasonic wave, each of the plurality of signal holding circuits includes a first transistor including a semiconductor layer including an oxide semiconductor in a channel formation region, and the second selection circuit selects the plurality of signal holding circuits at different timings, respectively, to generate a signal that delays the second ultrasonic wave or the fourth ultrasonic wave and transmits a fifth ultrasonic wave generated from the signal to the second housing.

In the driver warning system according to one aspect of the present invention, the first transistor is preferably used as a selection switch in the first selection circuit.

In the driver warning system of one embodiment of the present invention, each of the plurality of signal hold circuits includes an amplifier circuit having a second transistor including a semiconductor layer including an oxide semiconductor in a channel formation region.

In the driver warning system according to one embodiment of the present invention, the second selection circuit includes a third transistor including a semiconductor layer including an oxide semiconductor in a channel formation region.

In the driver warning system according to one aspect of the present invention, the signal processing circuit includes a differential circuit to which the first voltage and the second voltage are input, an integrating circuit to which an output signal of the differential circuit is input, and a triangular wave generating circuit to which an output signal of the integrating circuit and an output signal of the triangular wave generating circuit are input.

Note that other aspects of the present invention are described in the description of the embodiments and the drawings described below.

Effects of the invention

According to one embodiment of the present invention, a driver warning system having a novel structure can be provided, which can achieve miniaturization of the device. Further, according to one embodiment of the present invention, it is possible to provide a driver warning system having a novel configuration that can reduce power consumption of devices. Further, according to one embodiment of the present invention, a driver warning system having a novel structure capable of improving safety can be provided.

Note that the description of these effects does not hinder the existence of other effects. In addition, one embodiment of the present invention does not necessarily have all of the above effects. Further, effects other than the above can be extracted from the descriptions of the specification, the drawings, the claims, and the like.

Drawings

Fig. 1A, 1B, and 1C are diagrams illustrating the configuration of a driver warning system.

Fig. 2A and 2B are diagrams illustrating the configuration of the driver warning system.

Fig. 3A and 3B are diagrams illustrating the configuration of the driver warning system.

Fig. 4 is a diagram illustrating the configuration of the driver warning system.

Fig. 5 is a diagram illustrating the configuration of the driver warning system.

Fig. 6 is a diagram illustrating the configuration of the driver warning system.

Fig. 7A, 7B, and 7C are diagrams illustrating the configuration of the driver warning system.

Fig. 8A and 8B are diagrams illustrating the configuration of the driver warning system.

Fig. 9A and 9B are diagrams illustrating the configuration of the driver warning system.

Fig. 10 is a schematic sectional view showing a structural example of a transistor.

Fig. 11 is a schematic sectional view showing a structural example of a transistor.

Fig. 12A, 12B, and 12C are a plan view and a schematic cross-sectional view showing a structural example of a transistor.

Fig. 13A, 13B, 13C, 13D, and 13E are diagrams illustrating structures of a semiconductor wafer and an electronic component.

Fig. 14A, 14B, and 14C are diagrams illustrating examples of the configuration of an electronic device.

Detailed Description

Hereinafter, embodiments will be described with reference to the drawings. However, the embodiments may be embodied in many different forms, and those skilled in the art will readily appreciate that the aspects and details thereof may be modified in various forms without departing from the spirit and scope of the present invention. Therefore, the present invention should not be construed as being limited to the description of the embodiments shown below.

In the present specification and the like, ordinal numbers such as "first", "second", "third", and the like are added to avoid confusion of constituent elements. Therefore, the ordinal number does not limit the number of components. In addition, the ordinal number does not limit the order of the constituent elements. For example, in this specification and the like, a component denoted by "first" in one embodiment may be a component denoted by "second" in another embodiment or claims. For example, in this specification and the like, a component denoted by "first" in one embodiment may be omitted in another embodiment or claims.

In the drawings, the same components, components having the same functions, components made of the same material, components formed at the same time, and the like may be denoted by the same reference numerals, and overlapping descriptions may be omitted.

(embodiment mode 1)

The structure and operation of the driver warning system of one embodiment of the present invention will be described with reference to fig. 1A to 9B. A driver warning system according to an aspect of the present invention functions as an echo positioning device that can detect the presence or absence of an object and the distance to the object by delaying a signal obtained by receiving ultrasonic waves and comparing the signal with a reference signal.

The driver warning system 100 shown in fig. 1A is composed of a housing 10 and a housing 20. The housing 10 includes an arithmetic circuit 11, a transmission circuit 12, a reception circuit 13, and a transmission circuit 14. The housing 20 includes a receiving circuit 21, a control circuit 22, and a vibration motor 23.

The housing 10 corresponds to a frame or a handlebar of a bicycle or the like. Alternatively, the housing 10 corresponds to a device that can be attached to a frame or a handlebar of a bicycle or the like. The components of the arithmetic circuit 11, the transmission circuit 12, the reception circuit 13, the transmission circuit 14, and the like may be mounted inside or outside the housing 10. The housing 10 is a part of a moving body such as a bicycle driven by a driver wearing a wearable housing such as a helmet. Examples of the moving body include a bicycle, a motorcycle, an electric bicycle, and the like.

The housing 20 corresponds to a structure wearable by the driver, such as a helmet or a watch. The components such as the receiver circuit 21, the control circuit 22, and the vibration motor 23 may be mounted inside or outside the housing 20. The housing 20 is an electronic device wearable by the driver. Examples of the electronic device include wearable electronic terminals of watch type, head type, goggle type, glasses type, armband type, hand chain type, necklace type, and the like.

The housing 20 receives the ultrasonic waves 33 transmitted from the transmission circuit 14 of the housing 10 using the reception circuit 21. The control circuit 22 has a function of selecting the activation of the vibration motor 23 in accordance with the received ultrasonic wave 33. The vibration motor 23 is only one example of a structure for warning the driver of the detection of the object, and may have another structure.

The arithmetic circuit 11 has a function of outputting the ultrasonic wave 31 through the transmission circuit 12. The ultrasonic wave 31 is reflected by the object 30 to become an ultrasonic wave 32. The receiving circuit 13 can observe the ultrasonic wave 32 as a reflected wave of the ultrasonic wave 31. The arithmetic circuit 11 delays the signal obtained by receiving the ultrasonic wave 32 by the receiving circuit 13 to compare the signal with a reference signal having a different frequency, pulse repetition frequency, wavelength, or the like. The arithmetic circuit 11 acquires information on the presence or absence of the object 30 and the distance to the object 30 from the comparison result. This information is sent to the housing 20 through the transmitting circuit 14 in a manner superimposed on the ultrasonic waves 33.

The transmission circuits 12 and 14 have a circuit configuration for transmitting ultrasonic waves from the ultrasonic transducers. The receiving circuits 13 and 21 have a circuit configuration for receiving ultrasonic waves.

The ultrasonic wave 31 is a sound wave emitted by a pulse method with a frequency of 20kHz or more. By using this frequency, it is possible to emit an acoustic wave having directivity and perform object detection or the like using the reflected wave. The pulse repetition frequency of the ultrasonic wave 31 is preferably switched in a range of 5Hz to 100 Hz. The range of distance measurement to the object 30 may be switched according to the pulse repetition frequency. Therefore, it is preferable to switch the pulse repetition frequency according to the speed of the casing 10 or the presence or absence of the object 30.

The ultrasonic wave 32 is an ultrasonic wave in which the pulse frequency, pulse repetition frequency, amplitude, wavelength, or the like of the ultrasonic wave 31 changes according to the doppler effect caused by the relative velocity between the housing 10 and the object, the absorption attenuation in air at each ambient temperature, the acoustic impedance of the object 30, or the like.

The ultrasonic wave 33 may be a signal on which information on the presence or absence of the object 30 and the distance from the housing 10 to the object 30 can be superimposed. Signals of other frequencies (RF band, UHF band) may be used as appropriate depending on the distance between the housing 10 and the housing 20.

A configuration example of the arithmetic circuit 11 will be explained with reference to a block diagram shown in fig. 1B. The arithmetic circuit 11 includes a signal generation circuit 40, a delay circuit 41, and a signal processing circuit 42. The delay circuit 41 includes a selection circuit 111, a plurality of signal holding circuits 112, and a selection circuit 113.

When a specific one of the signal holding circuits 112 is used, the description will be given using a symbol "signal holding circuit 112", and when an arbitrary signal holding circuit is used, the description will be given using symbols "signal holding circuit 112_ 1", "signal holding circuit 112_ 2", and the like. Similarly, other components are also denoted by "_ 2" or [1] to distinguish the plurality of components.

The signal generating circuit 40 is a circuit for generating a signal for transmitting the ultrasonic wave 31 through the transmitting circuit 12. The signal generating circuit 40 is a circuit for outputting the signals W, S for controlling the delay circuit based on the signal output to the transmitting circuit 12.

The reception circuit 13 generates an electric signal (analog signal) of an analog value obtained by receiving the ultrasonic wave 32, that is, a signal S_IN. The delay circuit 41 is preferably provided for each receiving circuit 13.

The selection circuit 111 (also referred to as a first selection circuit) is used to select the signal S_INTo a demultiplexer of a plurality of signal holding circuits 112. The selection circuit 111 is used as a switch, the on/off of which is controlled by the selection signal W. The selection circuit 111 is formed of, for example, an n-channel transistor.

The plurality of signal holding circuits 112 have hold and signals S_INAnd a function of outputting a voltage corresponding to the analog voltage. The switch included in the selection circuit 111 is turned on at a time of a designated timing to the signal S_INSampling is performed, whereby an analog voltage is written into the signal holding circuit 112. Writing of the analog voltage to the signal holding circuit 112 can be controlled by setting the selection signal W to the H level. Further, by making the selection signal W at the L level, the holding of the analog voltage by the signal holding circuit 112 can be controlled.

Further, each of the plurality of signal holding circuits 112 is written with the signal S based on the selection signal W at the H level at different timings_INAnd holds the analog voltage by making the selection signal W at the L level. That is, each of the plurality of signal holding circuits 112 can acquire the signal S at different timings_INAnd maintains the signal S_INThe corresponding voltage. Therefore, the plurality of signal holding circuits 112 can continuously perform the signal S_INTo hold the signal S output from the receiving circuit 13_INA discrete value of (1).

The plurality of signal holding circuits 112 have a function of amplifying and outputting the held analog voltages. As an example, each of the plurality of signal holding circuits 112 includes a source follower circuit, and has a function of outputting a voltage corresponding to the held analog voltage by the source follower circuit or the like.

The selection circuit 113 (also referred to as a second selection circuit) is used as a multiplexer that selects any one of the analog voltages held by the plurality of signal holding circuits 112 and outputs it at different timings. The selection circuit 113 is used as a switch, the on/off of which is controlled by the selection signal S. The selection circuit 113 is formed of, for example, an n-channel transistor. At this time, the selection circuit 113 includes a transistor which is turned on when the selection signal S is at the H level and is turned off when the selection signal S is at the L level.

The selection circuit 113 can obtain the signal S_SEL. Signal S_SELIs an AND signal S_INCorresponding signals, and are discrete signals obtained by sequentially outputting the analog voltages held by the plurality of signal holding circuits 112 in the delay circuit 41. The signal S_SELEquivalent to the signal S_INHolding off the signal for a specified time. That is, by setting a specified delay time of the selection signal S, the selection circuit 113 can output the signal S whose delay time has been determined_SEL。

In particular, a transistor including an oxide semiconductor in a channel formation region (hereinafter referred to as an OS transistor) is preferably used as each transistor constituting the delay circuit 41. In the configuration according to one embodiment of the present invention, by employing an OS transistor as a transistor included in the delay circuit 41, the pass signal S can be detected by utilizing a characteristic that a leakage current (hereinafter, an off-state current) flowing between a source and a drain at the time of off is extremely small_INThe sampled analog voltage is held in the signal holding circuit 112 of the delay circuit 41. Therefore, the analog voltage can be obtained with high accuracy, and the signal S can be more accurately obtained_INObject detection, distance to the object measurement.

In addition, in the signal holding circuit 112 using an OS transistor, writing and reading of an analog voltage can be performed by charging or discharging electric charges, and thus acquisition and reading of an analog voltage can be performed substantially infinitely. The signal holding circuit using the OS transistor does not cause structural change at an atomic level like a magnetic memory, a resistance change memory, or the like, and therefore has excellent rewrite resistance. Further, the signal holding circuit using the OS transistor does not cause instability due to an increase in electron trap centers even when the repeated rewriting operation is performed like a flash memory.

Further, since the signal holding circuit using the OS transistor can be freely arranged in a circuit using a transistor including silicon in a channel formation region (hereinafter, referred to as a Si transistor) or the like, integration can be easily performed even when a configuration including a plurality of delay circuits is employed. Further, the OS transistor can be manufactured by the same manufacturing apparatus as the Si transistor, and thus can be manufactured at low cost.

In addition, when the OS transistor includes a back gate electrode in addition to the gate electrode, the source electrode, and the drain electrode, the OS transistor can be a 4-terminal semiconductor element. It is possible to configure a circuit network that can independently control input/output of a signal flowing between a source and a drain according to a voltage applied to a gate electrode or a back gate electrode. Therefore, circuit design can be performed in the same manner as LSI. In addition, the OS transistor has electrical characteristics superior to those of the Si transistor in a high-temperature environment. Specifically, even at a high temperature of 125 ℃ or higher and 150 ℃ or lower, the ratio of the on-state current to the off-state current is large, and thus a good switching operation can be performed.

The signal processing circuit 42 has the following functions: calculates the signal S selected by the selection circuit 113_SELAnd the difference between the reference signal and the reference signal, and calculating an integral value of the difference, thereby estimating the delay time with the phases thereof being consistent. The signal processing circuit 42 includes, for example, a differential circuit, an integrating circuit, a comparator, and a triangular wave generating circuit. The differential circuit receives the signal S selected by the selection circuit 113_INAnd a reference signal. The integration circuit outputs a value obtained by integrating the output signal of the differential circuit. The comparator is inputted with an output signal of the integrating circuit and an output signal of the triangular wave generating circuit. In the signal processing circuit 42, since the signal processing is performed by comparing the analog value signal, a circuit having a large occupied area such as an a/D conversion circuit can be omitted, and thus, an increase in circuit area can be suppressed and power consumption can be reduced.

In the driver warning system 100 shown in fig. 1A, OS transistors are used as the transistors constituting the delay circuit 41 shown in fig. 1B, and analog electric power that is directly held and sampled at different timings is usedThe manner of pressing the corresponding charge. Since the off-state current of the OS transistor is extremely small, the analog voltage can be continuously held even at a node having a small holding capacitance, and a plurality of delay circuits can be mounted. Further, the driver warning system 100 shown in fig. 1A adopts the following manner: the discrete signal S is read out by reading out the analog voltages corresponding to the electric charges held in the delay circuit 41 at different timings_INAs an output signal. By differently setting the timings of the control signals S, it is possible to control the manner of reading at a desired delay time. Therefore, it is not necessary to apply the signal S_INConversion to digital signals and controllable to read at desired delay times, the discrete signal S being delayed_INThe phase of (c).

In fig. 1C, a specific circuit configuration example of the delay circuit 41 illustrated in fig. 1B is illustrated. FIG. 1C is a configuration example of a delay circuit in which a signal S is held at two nodes_INIt is used as a signal S with different delay time_SELAnd (6) outputting.

Fig. 1C shows a transistor 121 constituting the selection circuit 111, a transistor 121, a transistor 122, and a transistor 123 constituting the signal holding circuit 112, and a transistor 124 constituting the selection circuit 113. The transistors 121 to 124 are n-channel type transistors.

Fig. 1C shows the selection signals W11 and W12 as the selection signal W. The selection signals W11 and W12 are used to perform the signal S with different timings_INOf the analog voltage of (a).

Fig. 1C shows nodes F11 and F12 for holding the analog voltage sampled in the selection circuit 111. Fig. 1C shows a structure in which the nodes F11 and F12 are connected to the gate of the transistor 122 which is an input terminal of the source follower circuit. Further, a bias voltage V of the source follower circuit is shown_BApplied to the gate of transistor 123. Note that although the nodes F11 and F12 are connected to capacitors, the capacitors can be omitted by using a structure in which the gate capacitance of the transistor 122 is sufficiently large.

Fig. 1C shows the selection signals S11 to S12, that is, the selection signal S of the selection circuit 113. The selection circuit 113 may be enabled by selection signals S11 toS12 selectively outputs a voltage generation signal S corresponding to the sampled analog voltage_SELWhich is equivalent to the signal S_INDelaying the signal for a prescribed period. Further, a plurality of transistors 124 may be provided so that the source and the drain are electrically connected in parallel. With this configuration, a plurality of signals having different delay times can be sequentially output.

Although the structure in which the housing 10 includes one receiving circuit and one transmitting circuit is shown in fig. 1A, a plurality of receiving circuits and a plurality of transmitting circuits may be included. For example, as shown in fig. 2A, the ultrasonic diagnostic apparatus may include a transmission circuit 12A and a transmission circuit 12B, and a reception circuit 13A and a reception circuit 13B, and may transmit ultrasonic waves 31A and 31B and receive ultrasonic waves 32A and 32B. Since different ultrasonic waves can be received to detect the object 30, a driver warning system with higher safety can be provided. The ultrasonic waves 32A and 32B are ultrasonic waves obtained by reflecting the ultrasonic waves 31A and 31B from the object 30.

Further, in the case shown in fig. 1B, as shown in fig. 2B, the delay circuits 41 are preferably provided in the receiving circuits 13A, 13B, respectively. With this configuration, the signal S based on the ultrasonic wave 32A received by the receiving circuit 13A can be converted into the signal S based on the ultrasonic wave 32A_INA signal S based on the ultrasonic wave 32B received by the receiving circuit 13B_INB are held in different delay circuits 41, respectively.

Next, the operation of the delay circuit 41 shown in fig. 1C is described with reference to fig. 3A to 5.

FIG. 3A is a configuration example of the delay circuit 41, in which the signal S is to be used for easy understanding of the operation in FIG. 1C_INThe sampled selection signals W are represented as selection signals W11 to W13, and a plurality of held analog voltages are read as signals S_SEL1 and signal S_SELThe selection signal S _2 is described as selection signals S111 and S112, S121 and S122, and S131 and S132. That is, the delay circuit 41 shown in FIG. 3A performs the signal S at three different timings_INSampling to obtain three analog voltages, and outputting signals S with different delay times at two different timings_SEL1 and signal S_SELAnd (4) _ 2. Further, in fig. 3A, nodes F11 to F13 are shown.

FIG. 3B is a diagram for explaining the signal S connected to the delay circuit 41 shown in FIG. 3A_INTiming diagram of the sampling operation of (1). In FIG. 3B, except for the signal S_INIn addition to the waveforms of (1), the changes in the voltages of the selection signals W11 to W13, written to the nodes F11 to F13 in the time T1 to T4 are also illustrated. Note that in the drawings illustrating the timing chart, the hatched period is a period showing an indefinite state.

As described above, at time T1, the selection signal W11 is brought to the H level, and the signal S is applied_INVoltage V1 is written into node F11, thereby proceeding with signal S_INSampling of (3).

At time T2 after time T, the selection signal W12 is set to H level, and the signal S is set to S level_INVoltage V2 is written into node F12, thereby proceeding with signal S_INSampling of (3). Note that the shorter the time T, the better. The signal S can be increased_INCan easily detect the object.

At time T2, the selection signal W13 is set to the H level, and the signal S is set to the H level_INVoltage V3 is written into node F13, thereby proceeding with signal S_INSampling of (3).

When the selection signals W11 to W13 are at the L level, the voltages V1 to V3 held by the nodes F11 to F13 may be held. When initialization is performed, as shown by time T4, a signal S of a fixed potential is supplied_INIn the state (2), the selection signal W11 may be at the H level.

Fig. 4 shows: example of the structure of the delay circuit 41, in which the signal S is to be used for easy understanding of the operation of the circuit in FIG. 1C_INThe sampled selection signals W are represented as selection signals W11 to W13, and the held voltage is read as a signal S_SEL1 and signal S_SELThe selection signal S _2 is described as selection signals S111 and S112, S121 and S122, and S131 and S132. That is, the delay circuit 41 shown in fig. 4 takes three analog voltages and outputs two output signals different in delay time at two different timings. Further, in fig. 4, nodes F11 to F13 are shown.

FIG. 5 is a diagram illustrating the voltages V1 to V3 held at the nodes F11 to F13 of the delay circuit 41 in FIG. 4 as signalsNumber S_SEL1 and signal S_SELTiming diagram of the operation of _2 readout. In addition, in fig. 5, the signal S read out from the nodes F11 to F13 due to the selection signals S111 and S112, S121 and S122, and S131 and S132 is described_SEL1 and signal S_SELA change in _2from time T5 to T8.

The selection signal S111 is brought to the H level at time T5, and the voltage corresponding to the voltage V1 at the node F11 is taken as the signal S_SELAnd (4) outputting the signal _1.

The selection signal S121 is brought to the H level at time T6, and the voltage corresponding to the voltage V2 at the node F12 is taken as the signal S_SELAnd (4) outputting the signal _1. At this time T6, the selection signal S112 is set to the H level, and the voltage corresponding to the voltage V4 at the node F11 is set as the signal S_SELAnd (4) outputting the signal _2.

The selection signal S131 is brought to the H level at time T7, and the voltage corresponding to the voltage V3 at the node F13 is taken as the signal S_SELAnd (4) outputting the signal _1. At this time T7, the selection signal S122 is also set to the H level, and the voltage corresponding to the voltage V5 at the node F12 is taken as the signal S_SELAnd (4) outputting the signal _2.

The selection signal S132 is brought to the H level at time T8, and the voltage corresponding to the voltage V3 at the node F13 is taken as the signal S_SELAnd (4) outputting the signal _2.

As shown in fig. 5, a signal S can be obtained_SELA 2 as the signal S_SEL1 delayed signal. By controlling the timing of the selection signal S, the signal held by the signal holding circuit can be delayed by an arbitrary delay time and output. Therefore, for example, by switching the delay time by the delay circuit 41 so that the phases of different signals coincide, an object can be detected.

Next, fig. 6 shows a specific configuration example of the signal processing circuit 42. The signal processing circuit 42 shown in fig. 6 includes differential circuits 51_1 to 51_9, integrating circuits 52_1 to 52_9, comparators 53_1 to 53_9, a triangular wave generating circuit 54, and an arithmetic circuit 55. Further, fig. 6 shows the reference signal generation circuit 50 that outputs the reference signals REF1 to REF 3. The reference signals REF1 to REF3 are signals for comparing signals obtained by reflecting ultrasonic waves on an object with them to detect the position of the object. The reference signals REF1 to REF3 may use, for example, signals synchronized with the ultrasonic waves 31 emitted from the transmission circuit 12.

The differential circuits 51_1 to 51_9 calculate the signal S output from the delay circuit 41_SELAnd the difference between the respective signals of the reference signal REF output from the reference signal generation circuit 50. The integration circuits 52_1 to 52_9 are inputted with the output signals of the differential circuits 51_1 to 51_9 and perform integration of the output signals. The triangular wave output from the triangular wave generation circuit 54 and the output signals of the integration circuits 52_1 to 52_9 are input to the comparators 53_1 to 53_9, and the voltages are compared. The operation circuit 55 is inputted with the output signals of the comparators 53_1 to 53_9, and estimates the signal S_INAnd a delay time in accordance with the phase of the reference signal REF, a signal S corresponding to the distance to the object can be obtained_OUT。

Specific examples of circuits constituting the signal processing circuit 42 are explained with reference to fig. 7A to 7C. Fig. 7A is a block diagram showing the structure of one stage in the signal processing circuit 42 shown in fig. 6. Fig. 7A shows, as an example, a differential circuit 51, an integrating circuit 52, a comparator 53, and a triangular wave generating circuit 54.

Fig. 7B shows a configuration example of the differential circuit 51. The differential circuit 51 includes resistors 61 and 62 and transistors 63, 64, and 65 as an example. A gate of the transistor 63 is connected to the non-inverting input terminal. The gate of the transistor 64 is connected to the inverting input terminal. The gate of the transistor 65 is connected to a wiring for supplying the bias voltage Vbias. The transistor 64 has an output terminal OUT of the differential circuit 51 on the drain terminal side.

Fig. 7C shows a configuration example of the integrating circuit 52. The integration circuit 52 includes, as an example, a diode 71, a resistor 72, an operational amplifier 73, a capacitor 74, and a switch 75. The input terminal of the diode 71 is supplied with the output signal of the differential circuit 51. The output terminal OUT of the integrating circuit 52 is provided to the output terminal of the operational amplifier.

Fig. 8A and 8B show a modification of the delay circuit 41.

In fig. 1C, fig. 3A, and the like, the transistors 121 to 124 are transistors having a top gate structure or a bottom gate structure that does not include a back gate electrode, but are not limited thereto. For example, as in the delay circuit 41A shown in fig. 8A, transistors 121A to 124A including back gate electrodes may also be used. By adopting the structure of fig. 8A, the states of the transistors 121A to 124A can be easily controlled from the outside.

For example, as in the delay circuit 41B shown in fig. 8B, transistors 121B to 124B including back gate electrodes connected to gate electrodes may also be used. By adopting the structure of fig. 8B, the amount of current flowing through the transistors 121B to 124B can be increased.

Fig. 9A and 9B show a modification of the differential circuit 51.

In fig. 7B, the transistors 63 to 65 are transistors having a top gate structure or a bottom gate structure which does not include a back gate electrode, but are not limited thereto. For example, as in the differential circuit 51A shown in fig. 9A, transistors 63A to 65A including back gate electrodes may be used. By adopting the structure of fig. 9A, the states of the transistors 63A to 65A can be easily controlled from the outside.

For example, as in the differential circuit 51B shown in fig. 9B, transistors 63B to 65B including back gate electrodes connected to gate electrodes may also be used. By adopting the structure of fig. 9B, the amount of current flowing through the transistors 63B to 65B can be increased.

In the driver warning system according to one embodiment of the present invention described above, the analog voltage is held by using the arithmetic circuit having the OS transistor, so that a circuit such as an analog-digital conversion circuit necessary for a stall signal can be eliminated. In addition, the driver warning system according to one embodiment of the present invention can be mounted to an electronic device wearable by a driver, while achieving miniaturization and low power consumption, thereby improving safety.

(embodiment mode 2)

In this embodiment, a structure of a transistor applicable to a circuit structure such as a delay circuit described in the above embodiments, specifically, a structure in which schematic cross-sectional views of transistors having different electrical characteristics are stacked will be described. By adopting this structure, the degree of freedom in designing the circuit can be improved. Further, by stacking transistors having different electrical characteristics, the degree of integration of the circuit can be improved.

The cross-sectional view of fig. 10 includes a transistor 300, a transistor 500, and a capacitor 600. Fig. 12A is a sectional view in the channel length direction of the transistor 500, fig. 12B is a sectional view in the channel width direction of the transistor 500, and fig. 12C is a sectional view in the channel width direction of the transistor 300.

The transistor 500 is a transistor including metal oxide in a channel formation region (an OS transistor). Since the off-state current of the transistor 500 is small, the written data voltage or charge can be held for a long period of time.

As shown in fig. 10, a cross-sectional view described in one embodiment of the present invention includes a transistor 300, a transistor 500, and a capacitor 600. The transistor 500 is provided above the transistor 300, and the capacitor 600 is provided above the transistor 300 and the transistor 500. Further, the capacitor 600 may be a capacitor Cs or the like in the memory circuit MC.

The transistor 300 is provided over a substrate 311, and includes: a conductor 316, an insulator 315, and a semiconductor region 313 formed of a part of the substrate 311; and a low-resistance region 314a and a low-resistance region 314b which are used as a source region and a drain region.

As shown in fig. 12C, in the transistor 300, the conductor 316 covers the top surface and the side surfaces in the channel width direction of the semiconductor region 313 with the insulator 315 interposed therebetween. In this manner, since the transistor 300 has a Fin-type structure, the channel width is effectively increased, and the on-state characteristics of the transistor 300 can be improved. Further, since the influence of the electric field of the gate electrode can be increased, the off characteristic of the transistor 300 can be improved.

Further, the transistor 300 may be a p-channel type transistor or an n-channel type transistor.

The channel formation region of the semiconductor region 313, the region in the vicinity thereof, the low-resistance region 314a and the low-resistance region 314b which are used as a source region or a drain region, and the like preferably include a semiconductor such as a silicon-based semiconductor, and more preferably include single crystal silicon. In addition, it may be formed using a material containing Ge (germanium), SiGe (silicon germanium), GaAs (gallium arsenide), GaAlAs (gallium aluminum arsenide), or the like. Effective quality of silicon can be controlled by applying stress to the crystal lattice and changing the interplanar spacing. The Transistor 300 may be a HEMT (High Electron Mobility Transistor) using GaAs, GaAlAs, or the like.

The low-resistance regions 314a and 314b contain an element imparting n-type conductivity, such as arsenic or phosphorus, or an element imparting p-type conductivity, such as boron, in addition to the semiconductor material applied to the semiconductor region 313.

As the conductor 316 used as the gate electrode, a semiconductor material such as silicon containing an element imparting n-type conductivity such as arsenic or phosphorus or an element imparting p-type conductivity such as boron, a metal material, an alloy material, or a conductive material such as a metal oxide material can be used.

Further, since the material of the conductor determines the work function, the threshold voltage of the transistor can be adjusted by selecting the material of the conductor. Specifically, a material such as titanium nitride or tantalum nitride is preferably used as the conductor. In order to achieve both conductivity and embeddability, a stack of metal materials such as tungsten and aluminum is preferably used as the conductor, and tungsten is particularly preferably used in terms of heat resistance.

Note that the structure of the transistor 300 shown in fig. 10 is merely an example, and is not limited to the above structure, and an appropriate transistor may be used depending on a circuit structure or a driving method. For example, when a unipolar circuit including only an OS transistor (that is, a circuit including only transistors of the same polarity such as n-channel transistors) is used as a transistor, as shown in fig. 11, the same structure as that of the transistor 500 including an oxide semiconductor may be used as the transistor 300. The detailed structure of the transistor 500 will be described later.

An insulator 320, an insulator 322, an insulator 324, and an insulator 326 are stacked in this order so as to cover the transistor 300.

As the insulators 320, 322, 324, and 326, for example, silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxynitride, aluminum nitride oxide, aluminum nitride, or the like can be used.

Note that in this specification, "silicon oxynitride" refers to a material whose composition contains more oxygen than nitrogen, and "silicon nitride oxide" refers to a material whose composition contains more nitrogen than oxygen. Note that in this specification, "aluminum oxynitride" refers to a material having an oxygen content greater than a nitrogen content, and "aluminum nitride oxide" refers to a material having a nitrogen content greater than an oxygen content.

The insulator 322 may also be used as a planarization film for planarizing a step due to the transistor 300 and the like provided therebelow. For example, in order to improve the flatness of the top surface of the insulator 322, the top surface thereof may be planarized by a planarization process using a Chemical Mechanical Polishing (CMP) method or the like.

As the insulator 324, a film having barrier properties which can prevent diffusion of hydrogen or impurities from the substrate 311, the transistor 300, or the like into a region where the transistor 500 is provided is preferably used.

As an example of the film having a barrier property against hydrogen, for example, silicon nitride formed by a CVD method can be used. Here, hydrogen may diffuse into a semiconductor element having an oxide semiconductor such as the transistor 500, and the characteristics of the semiconductor element may be degraded. Therefore, a film which suppresses diffusion of hydrogen is preferably provided between the transistor 500 and the transistor 300. Specifically, the membrane that suppresses the diffusion of hydrogen means a membrane in which the amount of hydrogen released is small.

The amount of hydrogen desorbed can be measured by Thermal Desorption Spectroscopy (TDS) or the like, for example. For example, in the range of 50 ℃ to 500 ℃ of the film surface temperature in the TDS analysis, when the desorption amount converted into hydrogen atoms is converted into the amount per unit area of the insulator 324, the desorption amount of hydrogen in the insulator 324 is 10 × 10¹⁵atoms/cm²Hereinafter, it is preferably 5 × 10¹⁵atoms/cm²The following procedure was followed.

Note that the dielectric constant of the insulator 326 is preferably lower than that of the insulator 324. For example, the relative permittivity of the insulator 326 is preferably lower than 4, more preferably lower than 3. For example, the relative permittivity of the insulator 326 is preferably 0.7 times or less, and more preferably 0.6 times or less, the relative permittivity of the insulator 324. By using a material having a low dielectric constant for the interlayer film, parasitic capacitance generated between wirings can be reduced.

Further, a conductor 328, a conductor 330, and the like connected to the capacitor 600 or the transistor 500 are embedded in the insulator 320, the insulator 322, the insulator 324, and the insulator 326. The conductors 328 and 330 function as plugs or wires. Note that a plurality of conductors having a function of a plug or a wiring may be denoted by the same reference numeral. In this specification and the like, a wiring and a plug connected to the wiring may be one component. That is, a part of the conductor is sometimes used as a wiring, and a part of the conductor is sometimes used as a plug.

As a material of each plug and wiring (the conductor 328, the conductor 330, and the like), a single layer or a stacked layer of a conductive material such as a metal material, an alloy material, a metal nitride material, or a metal oxide material can be used. High melting point materials such as tungsten and molybdenum having both heat resistance and conductivity are preferably used, and tungsten is particularly preferably used. Alternatively, a low-resistance conductive material such as aluminum or copper is preferably used. Wiring resistance can be reduced by using a low-resistance conductive material.

A wiring layer may be formed on the insulator 326 and the conductor 330. For example, in fig. 10, an insulator 350, an insulator 352, and an insulator 354 are stacked in this order. A conductor 356 is formed in the insulator 350, the insulator 352, and the insulator 354. The conductor 356 functions as a plug or a wiring connected to the transistor 300. The conductor 356 can be formed using the same material as the conductor 328 and the conductor 330.

As the insulator 350, an insulator having a barrier property against hydrogen, for example, is preferably used, similarly to the insulator 324. In addition, the conductive body 356 preferably includes a conductive body having a barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 350 having a barrier property against hydrogen. By adopting this structure, the transistor 300 can be separated from the transistor 500 using the barrier layer, and thus diffusion of hydrogen from the transistor 300 into the transistor 500 can be suppressed.

Note that as the conductor having a barrier property against hydrogen, for example, tantalum nitride or the like is preferably used. Further, by stacking tantalum nitride and tungsten having high conductivity, diffusion of hydrogen from the transistor 300 can be suppressed while maintaining conductivity as a wiring. At this time, the tantalum nitride layer having barrier properties to hydrogen is preferably in contact with the insulator 350 having barrier properties to hydrogen.

Further, a wiring layer may be formed over the insulator 354 and the conductor 356. For example, in fig. 10, an insulator 360, an insulator 362, and an insulator 364 are stacked in this order. Further, a conductor 366 is formed in the insulator 360, the insulator 362, and the insulator 364. Conductor 366 functions as a plug or wiring. The conductor 366 can be formed using the same material as the conductor 328 and the conductor 330.

As the insulator 360, an insulator having a barrier property against hydrogen, for example, is preferably used, similarly to the insulator 324. In addition, the conductive body 366 preferably includes a conductive body having barrier properties against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 360 having a barrier property against hydrogen. By adopting this structure, the transistor 300 can be separated from the transistor 500 using the barrier layer, and thus diffusion of hydrogen from the transistor 300 into the transistor 500 can be suppressed.

Further, a wiring layer may be formed on the insulator 364 and the conductor 366. For example, in fig. 10, an insulator 370, an insulator 372, and an insulator 374 are stacked in this order. Further, a conductor 376 is formed on the insulator 370, the insulator 372, and the insulator 374. The conductor 376 functions as a plug or a wire. The conductor 376 can be formed using the same material as the conductor 328 and the conductor 330.

As the insulator 324, an insulator having a barrier property against hydrogen is preferably used as the insulator 370. The conductive member 376 preferably includes a conductive member having a barrier property against hydrogen. In particular, a conductor having hydrogen barrier properties is formed in an opening of the insulator 370 having hydrogen barrier properties. By adopting this structure, the transistor 300 can be separated from the transistor 500 using the barrier layer, and thus diffusion of hydrogen from the transistor 300 into the transistor 500 can be suppressed.

Further, a wiring layer may be formed on the insulator 374 and the conductor 376. For example, in fig. 10, an insulator 380, an insulator 382, and an insulator 384 are stacked in this order. Further, a conductor 386 is formed in the insulator 380, the insulator 382, and the insulator 384. Conductor 386 functions as a plug or wiring. The conductor 386 may be formed using the same material as the conductor 328 and the conductor 330.

As the insulator 380, an insulator having a barrier property against hydrogen, for example, is preferably used, similarly to the insulator 324. In addition, the electric conductor 386 preferably includes an electric conductor having barrier property against hydrogen. In particular, a conductor having a barrier property against hydrogen is formed in an opening of the insulator 380 having a barrier property against hydrogen. By adopting this structure, the transistor 300 can be separated from the transistor 500 using the barrier layer, and thus diffusion of hydrogen from the transistor 300 into the transistor 500 can be suppressed.

The above describes the wiring layer including conductor 356, the wiring layer including conductor 366, the wiring layer including conductor 376, and the wiring layer including conductor 386, but the structure of the cross-sectional view diagram of the present embodiment is not limited to this. The same wiring layer as the wiring layer including the conductor 356 may be three layers or less, and the same wiring layer as the wiring layer including the conductor 356 may be five layers or more.

An insulator 510, an insulator 512, an insulator 514, and an insulator 516 are stacked in this order on the insulator 384. As one of the insulator 510, the insulator 512, the insulator 514, and the insulator 516, a substance having barrier properties against oxygen or hydrogen is preferably used.

For example, as the insulator 510 and the insulator 514, a film having barrier properties which can prevent diffusion of hydrogen or impurities from the substrate 311, a region where the transistor 300 is provided, or the like into a region where the transistor 500 is provided is preferably used. Therefore, the same material as the insulator 324 can be used for the insulators 510 and 514.

As an example of the film having a barrier property against hydrogen, silicon nitride formed by a CVD method can be used. Here, hydrogen may diffuse into a semiconductor element having an oxide semiconductor such as the transistor 500, and the characteristics of the semiconductor element may be degraded. Therefore, a film which suppresses diffusion of hydrogen is preferably provided between the transistor 500 and the transistor 300. Specifically, the membrane that suppresses the diffusion of hydrogen means a membrane in which the amount of hydrogen released is small.

For example, as a film having a barrier property against hydrogen, a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide is preferably used for the insulators 510 and 514.

In particular, alumina has a high barrier effect against permeation of impurities such as oxygen and hydrogen and moisture which cause variations in electrical characteristics of a transistor. Therefore, the alumina can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the manufacturing process of the transistor. In addition, aluminum oxide can suppress oxygen release from the oxide constituting the transistor 500. Therefore, alumina is suitable for the protective film of the transistor 500.

For example, the same material as the insulator 320 can be used for the insulator 512 and the insulator 516. In addition, by using a material having a low dielectric constant as the insulator, parasitic capacitance generated between wirings can be reduced. For example, as the insulator 512 and the insulator 516, a silicon oxide film, a silicon oxynitride film, or the like can be used.

In addition, for example, a conductor 518, a conductor (for example, the conductor 503) constituting the transistor 500, and the like are embedded in the insulator 510, the insulator 512, the insulator 514, and the insulator 516. Further, the conductor 518 is used as a plug or a wiring connected to the capacitor 600 or the transistor 300. The conductor 518 can be formed using the same material as the conductor 328 and the conductor 330.

In particular, the conductor 518 in the region in contact with the insulator 510 and the insulator 514 is preferably a conductor having barrier properties against oxygen, hydrogen, and water. With this structure, the transistor 300 can be separated from the transistor 500 by a layer having barrier properties against oxygen, hydrogen, and water, and diffusion of hydrogen from the transistor 300 to the transistor 500 can be suppressed.

Above the insulator 516 is disposed a transistor 500.

As shown in fig. 12A and 12B, the transistor 500 includes: an electrical conductor 503 embedded in the insulator 514 and the insulator 516; an insulator 520 disposed on the insulator 516 and the conductor 503; an insulator 522 disposed on the insulator 520; an insulator 524 disposed on the insulator 522; an oxide 530a disposed on insulator 524; an oxide 530b disposed on the oxide 530 a; a conductor 542a and a conductor 542b disposed on the oxide 530b and spaced apart from each other; an insulator 580 disposed on the conductors 542a and 542b and having an opening formed therein so as to overlap the conductor 542a and the conductor 542 b; an oxide 530c disposed on the bottom and side surfaces of the opening; an insulator 550 disposed on the formation surface of the oxide 530 c; and a conductor 560 disposed on the formation surface of the insulator 550.

As shown in fig. 12A and 12B, an insulator 544 is preferably disposed between the oxide 530a, the oxide 530B, the conductor 542A, and the conductor 542B, and the insulator 580. As shown in fig. 12A and 12B, the conductor 560 preferably includes a conductor 560a provided inside the insulator 550 and a conductor 560B embedded inside the conductor 560 a. As shown in fig. 12A and 12B, an insulator 574 is preferably disposed on the insulator 580, the conductor 560, and the insulator 550.

Note that the oxide 530a, the oxide 530b, and the oxide 530c are collectively referred to as an oxide 530 in some cases.

In the transistor 500, three layers of an oxide 530a, an oxide 530b, and an oxide 530c are stacked over a region where a channel is formed and the vicinity thereof, but the present invention is not limited thereto. For example, a single layer of the oxide 530b, a two-layer structure of the oxide 530b and the oxide 530a, a two-layer structure of the oxide 530b and the oxide 530c, or a stacked-layer structure of four or more layers may be provided. Further, in the transistor 500, the conductive body 560 has a two-layer structure, but the present invention is not limited thereto. For example, the conductor 560 may have a single-layer structure or a stacked-layer structure of three or more layers. Note that the structure of the transistor 500 shown in fig. 10 and 12A is merely an example and is not limited to the above structure, and an appropriate transistor can be used depending on a circuit structure or a driving method.

Here, the conductor 560 is used as a gate electrode of the transistor, and the conductor 542a and the conductor 542b are used as a source electrode or a drain electrode. As described above, the conductor 560 is buried in the opening of the insulator 580 and in the region sandwiched between the conductor 542a and the conductor 542 b. The arrangement of the conductors 560, 542a, and 542b with respect to the opening of the insulator 580 is selected to be self-aligned. In other words, in the transistor 500, a gate electrode can be arranged in self-alignment between a source electrode and a drain electrode. Thus, the conductor 560 can be formed without providing a space for alignment, and therefore, the area occupied by the transistor 500 can be reduced. Thus, miniaturization and high integration of the semiconductor device can be achieved.

Since the conductor 560 is formed in a self-aligned manner in a region between the conductors 542a and 542b, the conductor 560 does not include a region overlapping with the conductor 542a or the conductor 542 b. This can reduce the parasitic capacitance formed between the conductor 560 and the conductors 542a and 542 b. Accordingly, the switching speed of the transistor 500 can be increased, so that the transistor 500 can have high frequency characteristics.

The conductive body 560 is sometimes used as a first gate (also referred to as a top gate) electrode. The conductive body 503 is sometimes used as a second gate (also referred to as a bottom gate) electrode. In this case, the threshold voltage of the transistor 500 can be controlled by independently changing the potential supplied to the conductor 503 without interlocking with the potential supplied to the conductor 560. In particular, by supplying a negative potential to the conductive body 503, the threshold voltage of the transistor 500 can be made larger than 0V and the off-state current can be reduced. Therefore, in the case where a negative potential is applied to the conductor 503, the drain current when the potential applied to the conductor 560 is 0V can be reduced as compared with the case where a negative potential is not applied to the conductor 503.

The conductor 503 is disposed so as to overlap with the oxide 530 and the conductor 560. Thus, when a potential is applied to the conductor 560 and the conductor 503, the electric field generated from the conductor 560 and the electric field generated from the conductor 503 are connected to each other, and the channel formation region formed in the oxide 530 can be covered. In this specification and the like, a structure of a transistor in which a channel formation region is electrically surrounded by an electric field of a first gate electrode and an electric field of a second gate electrode is referred to as a surrounded channel (S-channel: surrounding channel) structure.

The conductor 503 has the same configuration as the conductor 518, and a conductor 503a is formed so as to contact the inner walls of the openings of the insulator 514 and the insulator 516, and a conductor 503b is formed inside the opening. In the transistor 500, the conductor 503a and the conductor 503b are stacked, but the present invention is not limited to this. For example, the conductor 503 may have a single-layer structure or a stacked-layer structure of three or more layers.

Here, as the conductor 503a, a conductive material having a function of suppressing diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, and copper atoms (which is unlikely to allow the impurities to pass therethrough) is preferably used. Further, it is preferable to use a conductive material having a function of suppressing diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, and the like) (not easily permeating the oxygen). In the present specification, the "function of suppressing diffusion of an impurity or oxygen" refers to a function of suppressing diffusion of any or all of the impurity and the oxygen.

For example, by providing the conductor 503a with a function of suppressing oxygen diffusion, a decrease in conductivity due to oxidation of the conductor 503b can be suppressed.

When the conductor 503 also functions as a wiring, a highly conductive material containing tungsten, copper, or aluminum as a main component is preferably used as the conductor 503 b. In this case, the conductive body 505 is not necessarily provided. In the drawing, the conductive body 503b has a single-layer structure, but may have a stacked-layer structure, for example, a stacked-layer structure of titanium or titanium nitride and the above-described conductive material may be employed.

The insulator 520, the insulator 522, the insulator 524, and the insulator 550 are used as the second gate insulating film.

Here, as the insulator 524 in contact with the oxide 530, an insulator containing oxygen in excess of the stoichiometric composition is preferably used. In other words, the insulator 524 preferably has an excess oxygen region formed therein. By providing the above insulator containing excess oxygen in contact with the oxide 530, oxygen defects in the oxide 530 can be reduced, and the reliability of the transistor 500 can be improved.

Specifically, as the insulator having the excess oxygen region, an oxide material in which a part of oxygen is desorbed by heating is preferably used. The oxide which is freed of oxygen by heating is referred to as being in TDS (Thermal Desorption Spectroscopy: Thermal Desorption Spectroscopy)) The amount of oxygen desorbed in the analysis was 1.0X 10 in terms of oxygen atom¹⁸atoms/cm³Above, preferably 1.0X 10¹⁹atoms/cm³The above is more preferably 2.0 × 10¹⁹atoms/cm³Above, or 3.0 × 10²⁰atoms/cm³The above oxide film. The surface temperature of the membrane when TDS analysis is performed is preferably in the range of 100 ℃ to 700 ℃ or more, or 100 ℃ to 400 ℃ or less.

When the insulator 524 has an excess oxygen region, the insulator 522 preferably has a function of suppressing diffusion of oxygen (for example, oxygen atoms, oxygen molecules, or the like) (the oxygen is not easily permeated).

When the insulator 522 has a function of suppressing diffusion of oxygen or impurities, oxygen contained in the oxide 530 is preferably not diffused to the insulator 520 side. Further, the conductive body 503 can be suppressed from reacting with oxygen contained in the insulator 524 or the oxide 530.

As the insulator 522, for example, an insulator containing aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO), or the like is preferably used₃) Or (Ba, Sr) TiO₃A single layer or a stack of insulators of so-called high-k material such as (BST). When miniaturization and high integration of a transistor are performed, a problem of leakage current or the like may occur due to the thinning of a gate insulating film. By using a high-k material as an insulator used as a gate insulating film, a gate potential at the time of operation of a transistor can be reduced while maintaining a physical thickness.

In particular, it is preferable to use an insulator containing an oxide of one or both of aluminum and hafnium as an insulating material having a function of suppressing diffusion of impurities, oxygen, and the like (the oxygen is not easily permeated). As the insulator containing an oxide of one or both of aluminum and hafnium, aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like is preferably used. When the insulator 522 is formed using such a material, the insulator 522 functions as a layer which suppresses release of oxygen from the oxide 530 or entry of impurities such as hydrogen into the oxide 530 from the peripheral portion of the transistor 500.

Alternatively, for example, alumina, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, or zirconium oxide may be added to the insulator. Further, the insulator may be subjected to nitriding treatment. Silicon oxide, silicon oxynitride, or silicon nitride may be stacked over the insulator.

The insulator 520 preferably has thermal stability. For example, silicon oxide and silicon oxynitride are preferable because they have thermal stability. In addition, by combining an insulator of a high-k material with silicon oxide or silicon oxynitride, the insulator 520 or the insulator 526 having a stacked-layer structure which is thermally stable and has a high relative dielectric constant can be formed.

In the transistor 500 in fig. 12A and 12B, the insulator 520, the insulator 522, and the insulator 524 are used as the second gate insulating film having a three-layer stacked structure, but the second gate insulating film may have a single-layer, two-layer, or four-layer or more stacked structure. In this case, the stacked structure is not limited to the stacked structure formed using the same material, and may be a stacked structure formed using different materials.

In the transistor 500, a metal oxide which is used as an oxide semiconductor is preferably used for the oxide 530 including the channel formation region. For example, as the oxide 530, a metal oxide such as an In-M-Zn oxide (In which the element M is one or more selected from aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, and the like) is preferably used. In particular, the In-M-Zn oxide that can be applied to the oxide 530 is preferably CAAC-OS or CAC-OS. In addition, as the oxide 530, an In-Ga oxide or an In-Zn oxide can be used.

In addition, a metal oxide having a low carrier density is preferably used for the transistor 500. When the carrier density of the metal oxide is reduced, the impurity concentration in the metal oxide may be reduced to reduce the defect state density. In this specification and the like, a state where the impurity concentration is low and the defect state density is low is referred to as "high-purity intrinsic" or "substantially high-purity intrinsic". Examples of the impurities in the metal oxide include hydrogen, nitrogen, alkali metals, alkaline earth metals, iron, nickel, and silicon.

In particular, hydrogen contained in the metal oxide reacts with oxygen bonded to the metal atom to generate water, and thus oxygen defects are sometimes formed in the metal oxide. When oxygen vacancies are included in a channel formation region in a metal oxide, a transistor sometimes has a normally-on characteristic. Further, a defect in which hydrogen enters an oxygen vacancy may be used as a donor to generate an electron as a carrier. In addition, a part of hydrogen is bonded to oxygen bonded to a metal atom to generate electrons as carriers. Therefore, a transistor using a metal oxide containing a large amount of hydrogen easily has a normally-on characteristic.

The defect of hydrogen entering the oxygen defect will act as a donor for the metal oxide. However, it is difficult to quantitatively evaluate the defect. Therefore, in the metal oxide, evaluation may be performed not by using the donor concentration but by using the carrier concentration. Therefore, in this specification and the like, as a parameter of the metal oxide, not the donor concentration but the carrier concentration in a state where no electric field is assumed to be applied may be used.

Therefore, when a metal oxide is used for the oxide 530, it is preferable to reduce hydrogen in the metal oxide as much as possible. Specifically, the concentration of hydrogen in the metal oxide measured by Secondary Ion Mass Spectrometry (SIMS) is less than 1X 10²⁰atoms/cm³Preferably less than 1X 10¹⁹atoms/cm³More preferably less than 5X 10¹⁸atoms/cm³More preferably less than 1X 10¹⁸atoms/cm³. By using a metal oxide in which impurities such as hydrogen are sufficiently reduced in a channel formation region of a transistor, the transistor can have stable electrical characteristics.

Further, when a metal oxide is used as the oxide 530, the carrier concentration of the metal oxide in the channel formation region is preferably 1 × 10¹⁸cm^-3Hereinafter, more preferably less than 1X 10¹⁷cm^-3And more preferably less than 1X 10¹⁶cm^-3And still more preferably less than 1X 10¹³cm^-3Still more preferably less than 1X 10¹²cm^-3. Note that the channel is formedThe lower limit of the carrier concentration of the metal oxide in the region is not particularly limited, and may be set to, for example, 1 × 10^-9cm^-3。

When a metal oxide is used as the oxide 530, when the conductor 542 (the conductor 542a and the conductor 542b) is in contact with the oxide 530, oxygen in the oxide 530 may diffuse into the conductor 542 and the conductor 542 may be oxidized. When the conductor 542 is oxidized, the electrical conductivity of the conductor 542 is likely to decrease. Further, "oxygen in the oxide 530 diffuses into the conductor 542" may be referred to as "the conductor 542 absorbs oxygen in the oxide 530".

When oxygen in the oxide 530 diffuses into the conductor 542 (the conductor 542a and the conductor 542b), another layer may be formed between the conductor 542a and the oxide 530b and between the conductor 542b and the oxide 530 b. Since the other layer contains more oxygen than the conductor 542, the other layer can be considered to have insulating properties. In this case, the three-layer structure of the conductor 542, the other layer, and the oxide 530b may be regarded as a three-layer structure including a Metal, an Insulator, and a Semiconductor, and may be referred to as a Metal-Insulator-Metal (MIS) structure or a diode junction structure having a MIS structure as a main structure.

Note that the other layer is not limited to be formed between the conductor 542 and the oxide 530b, and for example, another layer may be formed between the conductor 542 and the oxide 530c, between the conductor 542 and the oxide 530b, or between the conductor 542 and the oxide 530 c.

As a metal oxide used as a channel formation region in the oxide 530, a metal oxide having a band gap of 2eV or more, preferably 2.5eV or more is preferably used. Thus, by using a metal oxide having a wider band gap, the off-state current of the transistor can be reduced.

In the oxide 530, when the oxide 530a is disposed under the oxide 530b, impurities may be prevented from being diffused to the oxide 530b from a structure formed under the oxide 530 a. When the oxide 530c is disposed over the oxide 530b, impurities may be prevented from diffusing from a structure formed over the oxide 530c to the oxide 530 b.

The oxide 530 preferably has a stacked-layer structure of oxides having different atomic number ratios of metal atoms. Specifically, the atomic number ratio of the element M in the constituent elements of the metal oxide used for the oxide 530a is preferably larger than the atomic number ratio of the element M in the constituent elements of the metal oxide used for the oxide 530 b. Further, the atomic number ratio of the element M with respect to In the metal oxide used for the oxide 530a is preferably larger than the atomic number ratio of the element M with respect to In the metal oxide used for the oxide 530 b. Further, the atomic number ratio of In with respect to the element M In the metal oxide used for the oxide 530b is preferably larger than the atomic number ratio of In with respect to the element M In the metal oxide used for the oxide 530 a. In addition, as the oxide 530c, a metal oxide which can be used for the oxide 530a or the oxide 530b can be used.

Preferably, the energy of the conduction band bottom of oxide 530a and oxide 530c is higher than that of oxide 530 b. In other words, the electron affinities of the oxide 530a and the oxide 530c are preferably smaller than the electron affinity of the oxide 530 b.

Here, the energy level of the conduction band bottom changes gently at the junction of the oxide 530a, the oxide 530b, and the oxide 530 c. In other words, the above case can be expressed as a case where the energy levels of the conduction band bottoms of the junctions of the oxide 530a, the oxide 530b, and the oxide 530c are continuously changed or continuously joined. Therefore, it is preferable to reduce the defect state density of the mixed layer formed at the interface between the oxide 530a and the oxide 530b and the interface between the oxide 530b and the oxide 530 c.

Specifically, by including a common element (as a main component) in addition to oxygen in the oxide 530a and the oxide 530b and the oxide 530c, a mixed layer with low defect state density can be formed. For example, when the oxide 530b is an In-Ga-Zn oxide, gallium oxide, or the like is preferably used as the oxide 530a and the oxide 530 c.

At this time, the main path of carriers is oxide 530 b. By providing the oxide 530a and the oxide 530c with the above structure, the defect state density at the interface between the oxide 530a and the oxide 530b and the interface between the oxide 530b and the oxide 530c can be reduced. Therefore, the influence of interface scattering on carrier conduction is reduced, and the on-state current of the transistor 500 can be increased.

On the oxide 530b, conductors 542a and 542b serving as source and drain electrodes are provided. As the conductors 542a and 542b, a metal element selected from aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, iridium, strontium, and lanthanum, an alloy containing the above metal elements as a component, an alloy combining the above metal elements, or the like is preferably used. For example, tantalum nitride, titanium nitride, tungsten nitride, a nitride containing titanium and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, an oxide containing lanthanum and nickel, or the like is preferably used. Further, tantalum nitride, titanium nitride, a nitride containing titanium and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, and an oxide containing lanthanum and nickel are conductive materials which are not easily oxidized or materials which absorb oxygen and maintain conductivity, and thus are preferable. Further, a metal nitride film such as tantalum nitride is preferable because it has a barrier property against hydrogen or oxygen.

Although the conductors 542A and 542b have a single-layer structure in fig. 12A, a stacked structure of two or more layers may be employed. For example, a tantalum nitride film and a tungsten film are preferably stacked. Further, a titanium film and an aluminum film may be laminated. In addition, a two-layer structure in which an aluminum film is stacked over a tungsten film, a two-layer structure in which a copper film is stacked over a copper-magnesium-aluminum alloy film, a two-layer structure in which a copper film is stacked over a titanium film, or a two-layer structure in which a copper film is stacked over a tungsten film may be employed.

Further, it is also possible to use: a three-layer structure in which an aluminum film or a copper film is stacked over a titanium film or a titanium nitride film and a titanium film or a titanium nitride film is formed thereover, a three-layer structure in which an aluminum film or a copper film is stacked over a molybdenum film or a molybdenum nitride film and a molybdenum film or a molybdenum nitride film is formed thereover, or the like. In addition, a transparent conductive material containing indium oxide, tin oxide, or zinc oxide may also be used.

As shown in fig. 12A, a region 543a and a region 543b may be formed as low-resistance regions at the interface between the oxide 530 and the conductor 542A (conductor 542b) and in the vicinity thereof. At this time, the region 543a is used as one of the source region and the drain region, and the region 543b is used as the other of the source region and the drain region. Further, a channel formation region is formed in a region sandwiched between the region 543a and the region 543 b.

By forming the conductor 542a (conductor 542b) so as to be in contact with the oxide 530, the oxygen concentration in the region 543a (region 543b) may be reduced. In addition, in the region 543a (the region 543b), a metal compound layer including a component including the metal in the conductor 542a (the conductor 542b) and the oxide 530 may be formed. In this case, the carrier concentration of the region 543a (the region 543b) increases, and the region 543a (the region 543b) becomes a low-resistance region.

The insulator 544 is provided so as to cover the conductors 542a and 542b, and suppresses oxidation of the conductors 542a and 542 b. In this case, the insulator 544 may be provided so as to cover the side surface of the oxide 530 and be in contact with the insulator 524.

As the insulator 544, a metal oxide containing one or two or more kinds selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, neodymium, lanthanum, magnesium, and the like can be used. Further, silicon oxynitride, silicon nitride, or the like may be used as the insulator 544.

In particular, as the insulator 544, aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), or the like, which is an insulator containing an oxide of one or both of aluminum and hafnium, is preferably used. In particular, hafnium aluminate has higher heat resistance than hafnium oxide films. Therefore, crystallization is not easily caused in the heat treatment in the subsequent step, and therefore, this is preferable. In the case where the conductors 542a and 542b are made of a material having oxidation resistance or do not significantly decrease in conductivity even when oxygen is absorbed, the insulator 544 does not need to be necessarily provided. The transistor characteristics may be appropriately designed according to the required transistor characteristics.

By including the insulator 544, impurities such as water and hydrogen contained in the insulator 580 can be suppressed from diffusing to the oxide 530b through the oxide 530c and the insulator 550. Further, the excess oxygen contained in the insulator 580 can be suppressed from oxidizing the conductor 560.

Further, an insulator 550 is used as the first gate insulating film. The insulator 550 is preferably disposed so as to be in contact with the inner side (upper surface and side surface) of the oxide 530 c. As with the insulator 524 described above, the insulator 550 is preferably formed using an insulator that contains excess oxygen and releases oxygen by heating.

Specifically, silicon oxide containing excess oxygen, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon and nitrogen are added, or silicon oxide having pores can be used. In particular, silicon oxide and silicon oxynitride are preferable because they have thermal stability.

By providing an insulator that releases oxygen by heating as the insulator 550 in contact with the top surface of the oxide 530c, oxygen can be efficiently supplied from the insulator 550 to the channel formation region of the oxide 530b through the oxide 530 c. Similarly to the insulator 524, the concentration of impurities such as water and hydrogen in the insulator 550 is preferably reduced. The thickness of the insulator 550 is preferably 1nm or more and 20nm or less.

In order to efficiently supply the excess oxygen contained in the insulator 550 to the oxide 530, a metal oxide may be provided between the insulator 550 and the conductor 560. The metal oxide preferably inhibits oxygen diffusion from the insulator 550 to the electrical conductor 560. By providing a metal oxide that suppresses the diffusion of oxygen, the diffusion of excess oxygen from the insulator 550 to the conductor 560 is suppressed. In other words, the reduction of the excess oxygen supplied to the oxide 530 can be suppressed. Further, oxidation of the conductive body 560 due to excess oxygen can be suppressed. As the metal oxide, a material that can be used for the insulator 544 can be used.

In addition, the insulator 550 may have a stacked-layer structure as in the case of the second gate insulating film. In the case of miniaturization and high integration of a transistor, since a problem such as a leakage current may occur due to a reduction in the thickness of a gate insulating film, a gate potential during operation of the transistor can be reduced while maintaining a physical thickness by providing an insulator used as the gate insulating film with a stacked structure of a high-k material and a material having thermal stability. In addition, a stacked structure having thermal stability and a high relative dielectric constant can be realized.

In fig. 12A and 12B, the conductor 560 used as the first gate electrode has a two-layer structure, but may have a single-layer structure or a stacked-layer structure of three or more layers.

The conductor 560a preferably contains hydrogen atoms, hydrogen molecules, water molecules, nitrogen atoms, nitrogen molecules, and nitrogen oxide molecules (N)₂O、NO、NO₂Etc.), copper atoms, etc. Further, it is preferable to use a conductive material having a function of suppressing diffusion of oxygen (for example, at least one of oxygen atoms, oxygen molecules, and the like). By providing the conductor 560a with a function of suppressing oxygen diffusion, it is possible to suppress a decrease in conductivity due to oxidation of the conductor 560b by oxygen contained in the insulator 550. As the conductive material having a function of suppressing oxygen diffusion, for example, tantalum nitride, ruthenium oxide, or the like is preferably used. Further, as the conductive body 560a, an oxide semiconductor which can be applied to the oxide 530 can be used. At this time, by forming the conductor 560b by sputtering, the resistance value of the oxide semiconductor can be reduced to be a conductor. This conductor may be referred to as an oc (oxygen conductor) electrode.

As the conductor 560b, a conductive material containing tungsten, copper, or aluminum as a main component is preferably used. Since the conductor 560b is also used as a wiring, a conductor having high conductivity is preferably used. The conductive body 560b may have a stacked-layer structure, and for example, a stacked-layer structure of titanium or titanium nitride and the above-described conductive material may be used.

The insulator 580 is preferably provided on the conductors 542a and 542b with the insulator 544 interposed therebetween. Insulator 580 preferably has a region of excess oxygen. For example, the insulator 580 preferably contains silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon and nitrogen are added, silicon oxide having a void, resin, or the like. In particular, silicon oxide and silicon oxynitride are preferable because they have thermal stability. In particular, silicon oxide and silicon oxide having pores are preferable because an excess oxygen region is easily formed in a subsequent step.

Insulator 580 preferably has a region of excess oxygen. By providing the insulator 580 that releases oxygen by heating in contact with the oxide 530c, oxygen in the insulator 580 can be efficiently supplied to the oxides 530a, 530b through the oxide 530 c. Further, it is preferable to reduce the concentration of impurities such as water and hydrogen in the insulator 580.

The opening of the insulator 580 is formed so as to overlap with a region between the conductive body 542a and the conductive body 542 b. Thus, the conductor 560 is buried in the opening of the insulator 580 and in the region sandwiched between the conductors 542a and 542 b.

In the case of miniaturization of a transistor, although it is necessary to shorten the gate length, it is necessary to prevent a decrease in the conductivity of the conductor 560. Therefore, when the thickness of the conductor 560 is increased, the conductor 560 may have a shape with a high aspect ratio. In the present embodiment, since the conductor 560 is buried in the opening of the insulator 580, even if the conductor 560 has a shape with a high aspect ratio, the conductor 560 does not collapse in the process.

The insulator 574 is preferably disposed in contact with the top surface of the insulator 580, the top surface of the conductor 560, and the top surface of the insulator 550. By forming the insulator 574 by a sputtering method, an excess oxygen region can be formed in the insulator 550 and the insulator 580. Thereby, oxygen can be supplied from the excess oxygen region into the oxide 530.

For example, as the insulator 574, a metal oxide containing one or two or more kinds selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium, and the like can be used.

In particular, alumina has high barrier properties, and even when it is a thin film of 0.5nm or more and 3.0nm or less, diffusion of hydrogen and nitrogen can be suppressed. Thus, the aluminum oxide formed by the sputtering method can function as a barrier film for impurities such as hydrogen while being used as an oxygen supply source.

Further, an insulator 581 used as an interlayer film is preferably provided over the insulator 574. Similarly to the insulator 524 or the like, it is preferable to reduce the concentration of impurities such as water and hydrogen in the insulator 581.

Further, the conductors 540a and 540b are disposed in openings formed in the insulators 581, 574, 580, and 544. The conductors 540a and 540b are provided so as to face each other with the conductor 560 interposed therebetween. The conductors 540a and 540b have the same structure as the conductors 546 and 548 to be described later.

An insulator 582 is provided on the insulator 581. The insulator 582 preferably uses a substance having barrier properties against oxygen or hydrogen. Therefore, the same material as that of the insulator 514 can be used for the insulator 582. For example, a metal oxide such as aluminum oxide, hafnium oxide, or tantalum oxide is preferably used as the insulator 582.

In particular, alumina has a high barrier effect against the permeation of impurities such as oxygen and hydrogen and moisture which cause variations in electrical characteristics of transistors. Therefore, the alumina can prevent impurities such as hydrogen and moisture from entering the transistor 500 during and after the manufacturing process of the transistor. In addition, aluminum oxide can suppress oxygen release from the oxide constituting the transistor 500. Therefore, alumina is suitable for the protective film of the transistor 500.

Further, an insulator 586 is provided on the insulator 582. The insulator 586 may be made of the same material as the insulator 320. In addition, by using a material having a low dielectric constant for the insulator 586, parasitic capacitance generated between wirings can be reduced. For example, a silicon oxide film, a silicon oxynitride film, or the like can be used as the insulator 586.

Further, conductors 546, 548, and the like are embedded in the insulator 520, the insulator 522, the insulator 524, the insulator 544, the insulator 580, the insulator 574, the insulator 581, the insulator 582, and the insulator 586.

The conductor 546 and the conductor 548 are used as a plug or a wiring for connecting to the capacitor 600, the transistor 500, or the transistor 300. The conductors 546 and 548 can be formed using the same material as the conductors 328 and 330.

Next, a capacitor 600 is provided above the transistor 500. Capacitor 600 includes a conductive body 610, a conductive body 620, and an insulator 630.

The conductor 612 may be provided over the conductors 546 and 548. The conductor 612 is used as a plug or a wiring connected to the transistor 500. The conductive body 610 is used as an electrode of the capacitor 600. Further, the conductor 612 and the conductor 610 can be formed at the same time.

As the conductor 612 and the conductor 610, a metal film containing an element selected from molybdenum, titanium, tantalum, tungsten, aluminum, copper, chromium, neodymium, and scandium, a metal nitride film containing the above element as a component (a tantalum nitride film, a titanium nitride film, a molybdenum nitride film, and a tungsten nitride film), or the like can be used. Alternatively, a conductive material such as indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, or indium tin oxide to which silicon oxide is added may be used.

In fig. 10, the conductor 612 and the conductor 610 have a single-layer structure, but the present invention is not limited thereto, and may have a laminated structure of two or more layers. For example, a conductor having high electrical conductivity and a conductor having high electrical conductivity may be formed between a conductor having barrier properties and a conductor having high electrical conductivity and having high adhesion.

The conductor 620 is provided so as to overlap the conductor 610 with an insulator 630 interposed therebetween. As the conductor 620, a conductive material such as a metal material, an alloy material, or a metal oxide material can be used. High melting point materials such as tungsten and molybdenum having both heat resistance and conductivity are preferably used, and tungsten is particularly preferably used. When the conductor 620 is formed simultaneously with other components such as a conductor, Cu (copper), Al (aluminum), or the like, which is a low-resistance metal material, may be used.

The conductor 620 and the insulator 630 are provided with an insulator 640. The insulator 640 may be formed using the same material as the insulator 320. Further, the insulator 640 may be used as a planarization film covering the concave-convex shape thereunder.

By adopting this structure, miniaturization or high integration of a transistor including an oxide semiconductor can be achieved.

(embodiment mode 3)

In the present embodiment, an electronic component, a wearable device to which the electronic component can be applied, and the like will be described as an example of a device (semiconductor device) to which the driver warning system can be applied.

< example of method for producing electronic Components >

Fig. 13A is a flowchart illustrating an example of a method of manufacturing an electronic component. The electronic component is also called a semiconductor package, an IC package, or the like. The electronic component has a plurality of different specifications and names according to a terminal taking-out direction or a shape of the terminal. In this embodiment, an example thereof will be described. The following electronic components can be applied to the electronic components of the housing 10 or the housing 20 shown in embodiment 1.

A semiconductor device including a transistor can be formed by combining a plurality of detachable members on a printed circuit board in an assembly step (post-step). The post-process can be completed by performing each process shown in fig. 13A. Specifically, after the device substrate obtained in the previous step is completed (step ST71), the back surface of the substrate is polished. By thinning the substrate at this stage, warpage of the substrate and the like generated in the previous step are reduced, and the size of the member is reduced. Next, a "dicing process" of dividing the substrate into a plurality of chips is performed (step ST 72).

Fig. 13B is a top view of semiconductor wafer 7100 before a dicing process is performed. Fig. 13C is a partial enlarged view of fig. 13B. The semiconductor wafer 7100 is provided with a plurality of circuit regions 7102. The circuit region 7102 is provided with each circuit of the embodiment of the present invention.

Each of the plurality of circuit regions 7102 is surrounded by a separate region 7104. The separation line (also referred to as "cut line") 7106 is located at a position overlapping with the separation region 7104. In the dicing process ST72, the chips 7110 including the circuit regions 7102 are cut out of the semiconductor wafer 7100 by cutting the semiconductor wafer 7100 along the separation lines 7106. Fig. 13D shows an enlarged view of the chip 7110.

In addition, a conductive layer or a semiconductor layer may be provided in the separation region 7104. By providing the conductive layer or the semiconductor layer in the separation region 7104, ESD which may be generated in the dicing step can be alleviated, and a decrease in yield due to the dicing step can be prevented. In addition, in general, in order to cool the substrate, remove shavings, prevent electrification, and the like, the cutting process is performed while supplying pure water in which carbonic acid gas or the like is dissolved to reduce the resistivity thereof to the cutting portion. By providing the conductive layer or the semiconductor layer in the separation region 7104, the amount of pure water used can be reduced.

After step ST72, the separated chip is picked up and mounted and bonded on the lead frame, that is, a chip bonding process is performed (step ST 73). The method of bonding the chip and the lead frame in the chip bonding step may be selected as appropriate depending on the product. For example, bonding may be performed using resin or adhesive tape. The bonding of the chip to the lead frame in the chip bonding process may be performed by mounting the chip on an interposer (interposer). In the wire bonding step, the lead of the lead frame and the electrode on the chip are electrically connected by a thin metal wire (step ST 74). As the fine metal wire, a silver wire or a gold wire can be used. The wire bonding may use ball bonding or wedge bonding.

A molding process of sealing the wire-bonded chips with epoxy resin or the like is performed (step ST 75). By performing the molding step, the inside of the electronic component is filled with the resin, so that damage to the built-in circuit portion and the thin metal wire by mechanical external force can be reduced, and deterioration in characteristics due to moisture or dust can be reduced. Then, the lead of the lead frame is subjected to plating treatment. Then, the lead is cut and formed (step ST 76). The plating process can prevent the lead from rusting, and the lead can be more reliably soldered when being mounted on a printed circuit board later. Subsequently, the printing process is performed on the package surface (step ST 77). Then, through the inspection process (step ST78), an electronic component is produced (step ST 79).

Fig. 13E shows a perspective view of the finished electronic component. Fig. 13E is a schematic perspective view of a QFP (quad flat package) as an example of the electronic component. As shown in fig. 13E, the electronic component 7000 includes a lead 7001 and a chip 7110.

The electronic component 7000 is mounted on the printed circuit board 7002, for example. By combining a plurality of such electronic members 7000 and electrically connecting them to each other on the printed circuit board 7002, the electronic members 7000 can be mounted to the electronic apparatus. The manufactured circuit board 7004 is provided inside an electronic apparatus or the like.

The electronic component 7000 can be applied to wearable electronic devices such as a watch type, a head-mounted type, a goggle type, a glasses type, a armband type, a bracelet type, and a necklace type.

< example of application to electronic apparatus >

Next, a case where the electronic component is applied to a wearable electronic device or a housing will be described.

Fig. 14A is a schematic diagram showing a driver of a bicycle. The frame 80 of the bicycle corresponds to the housing 10 described in embodiment 1. In a bicycle, a handle bar or the like may also be used as the housing 10. Although not shown, the electronic components including the receiving circuit, the transmitting circuit, the arithmetic circuit, and the like described in embodiment 1 may be provided on the vehicle body frame 80.

Fig. 14A shows a wristwatch-type electronic terminal 81 and a helmet 91 as wearable devices corresponding to the case 20 described in embodiment 1. Fig. 14B shows an enlarged view of the wristwatch-type electronic terminal 81, and fig. 14C shows an enlarged view of the helmet 91.

The wristwatch-type electronic terminal 81 shown in fig. 14B is provided with an electronic component 83 including the receiver circuit 21, the control circuit 22, the vibration motor 23, and the like described in embodiment 1, in a housing having a display portion 82. The electronic member 83 can vibrate the display portion 82 or the band 84 by a vibration motor or the like in accordance with the ultrasonic waves emitted from the frame 80 as the bicycle body to warn the driver of the presence of an object. Therefore, the driver can easily notice the presence of the object, whereby a danger can be prevented.

The helmet 91 shown in fig. 14C is provided with an electronic component 93 including the receiver circuit 21, the control circuit 22, the vibration motor 23, and the like described in embodiment 1, in the protection portion 92. The electronic member 93 may vibrate the protecting portion 92 or the chin strap 94 using a vibration motor or the like in correspondence with the ultrasonic waves emitted from the frame 80 as the bicycle main body to warn the driver of the presence of an object. Therefore, the driver can easily notice the presence of the object, whereby a danger can be prevented.

(Note about the description of this specification, etc.)

Next, the above embodiments and the description of each configuration in the embodiments are annotated.

The structure described in each embodiment can be combined with the structure described in another embodiment as appropriate to form an embodiment of the present invention. Further, when a plurality of configuration examples are shown in one embodiment, these configuration examples may be combined as appropriate.

Further, the contents (or a part thereof) described in one embodiment may be applied to, combined with, or replaced with the other contents (or a part thereof) described in the embodiment and/or the contents (or a part thereof) described in another embodiment or other embodiments.

Note that the content described in the embodiments refers to content described in various figures or content described in a text described in the specification in each embodiment.

Further, a drawing (or a part thereof) shown in one embodiment may be combined with another drawing (or a part thereof) shown in another embodiment, another drawing (or a part thereof) shown in the embodiment, and/or a drawing (or a part thereof) shown in another embodiment or another plurality of embodiments to form a further drawing.

In this specification and the like, constituent elements are classified according to functions and are represented as blocks independent of each other in a block diagram. However, in an actual circuit or the like, it is difficult to classify constituent elements according to functions, and there are cases where one circuit involves a plurality of functions or where a plurality of circuits involve one function. Therefore, the division of the blocks in the block diagrams is not limited to the constituent elements described in the specification, and may be appropriately different depending on the case.

For convenience of explanation, in the drawings, any size, thickness of layer, or region is illustrated. Therefore, the present invention is not limited to the dimensions in the drawings. The drawings are schematically illustrated for clarity and are not limited to the shapes, numerical values, etc. shown in the drawings. For example, unevenness of a signal, voltage, or current due to noise, timing deviation, or the like may be included.

In this specification and the like, in describing a connection relationship of the transistor, an expression of "one of a source and a drain" (a first electrode or a first terminal) is used and the other of the source and the drain is described as "the other of the source and the drain" (a second electrode or a second terminal). This is because the source and the drain of the transistor change depending on the structure or the operating condition of the transistor or the like. Note that the source and the drain of the transistor may be referred to as a source (drain) terminal, a source (drain) electrode, or the like as appropriate depending on the case.

In this specification and the like, "electrode" or "wiring" does not functionally limit its constituent elements. For example, an "electrode" is sometimes used as part of a "wiring", and vice versa. The term "electrode" or "wiring" also includes a case where a plurality of "electrodes" or "wirings" are integrally formed.

In this specification and the like, the voltage and the potential may be appropriately exchanged. The voltage is a potential difference from a reference potential, and for example, when the reference potential is a ground potential (ground potential), the voltage may be referred to as a potential. The ground potential does not necessarily mean 0V. Note that the potentials are relative, and the potential supplied to the wiring or the like sometimes varies depending on the reference potential.

In this specification and the like, terms such as "film" and "layer" may be interchanged depending on the situation or state. For example, the "conductive layer" may be sometimes changed to a "conductive film". In addition, the "insulating film" may be sometimes replaced with an "insulating layer".

In this specification and the like, a switch is an element having a function of controlling whether or not to allow a current to flow by being turned into an on state (on state) or an off state (off state). Alternatively, the switch refers to an element having a function of selecting and switching a current path.

In this specification and the like, for example, the channel length refers to a distance between a source and a drain in a region where a semiconductor (or a portion through which a current flows in the semiconductor when the transistor is in an on state) and a gate overlap or a region where a channel is formed in a plan view of the transistor.

In this specification and the like, for example, the channel width refers to a length of a region where a semiconductor (or a portion through which a current flows in a semiconductor when a transistor is in an on state) overlaps with a gate, or a portion where a source and a drain are opposed in a region where a channel is formed.

In this specification and the like, "a and B are connected" includes a case where a and B are electrically connected in addition to a case where a and B are directly connected. Here, "a is electrically connected to B" means that an object having some kind of electrical action is present between a and B, and an electrical signal can be transmitted and received between a and B.

[ description of symbols ]

F11: node, F12: node, F13: node, REF 1: reference signal, REF 3: reference signal, S11: selection signal, S12: selection signal, S111: selection signal, S112: selection signal, S121: selection signal, S122: selection signal, S131: selection signal, S132: selection signal, S_SELA _1: signal, S_SELA _2: signal, ST 72: cutting process, T1: time, T2: time, T4: time, T5: time, T6: time, T7: time, T8: time, W11: selection signal, W12: selection signal, W13: selection signal, 10: a housing, 11: arithmetic circuit, 12: transmission circuit, 12A: transmission circuit, 12B: transmission circuit, 13: reception circuit, 13A: reception circuit, 13B: reception circuit, 14: transmission circuit, 20: housing, 21: reception circuit, 22: control circuit, 23: vibration motor, 30: object, 31: ultrasonic wave, 31A: ultrasonic wave, 31B: ultrasonic wave, 32: ultrasonic wave, 32A: ultrasonic wave, 32B: ultrasonic wave, 33: ultrasonic wave, 40: signal generation circuit, 41: delay circuit, 41A: delay circuit, 41B: delay circuit, 42: signal processing circuit, 50: reference signal generation circuit, 51: differential circuit, 51_ 1: differential circuit, 51_ 9: differential circuit, 51A: differential circuit, 51B: differential circuit, 52: integration circuit, 52_ 1: integration circuit, 52_ 9: integration circuit, 53: a comparator,53_ 1: comparator, 53_ 9: comparator, 54: triangular wave generation circuit, 55: arithmetic circuit, 61: resistor, 62: resistor, 63: transistor, 63A: transistor, 63B: transistor, 64: transistor, 65: transistor, 65A: transistor, 65B: transistor, 71: diode, 72: resistor, 73: operational amplifier, 74: capacitor, 75: switch, 80: frame, 81: wristwatch-type electronic terminal, 82: display unit, 83: electronic component, 84: watchband, 91: safety helmet, 92: protection unit, 93: electronic component, 94: chin strap, 100: driver warning system, 111: selection circuit, 112: signal holding circuit, 112_ 1: signal holding circuit, 112_ 2: signal holding circuit, 113: selection circuit, 121: transistor, 121A: transistor, 121B: transistor, 122: transistor, 123: transistor, 124: transistor, 124A: transistor, 124B: transistor, 300: transistor, 311: substrate, 313: semiconductor region, 314 a: low-resistance region, 314 b: low-resistance region, 315: insulator, 316: electrical conductor, 320: insulator, 322: insulator, 324: insulator, 326: insulator, 328: electrical conductor, 330: conductor, 350: insulator, 352: insulator, 354: insulator, 356: conductor, 360: insulator, 362: insulator, 364: insulator, 366: conductor, 370: insulator, 372: insulator, 374: insulator, 376: conductor, 380: insulator, 382: insulator, 384: insulator, 386: conductor, 500: transistor, 503: conductor, 503 a: conductor, 503 b: electrical conductor, 505: electrical conductor, 510: insulator, 512: insulator, 514: insulator, 516: insulator, 518: electrical conductor, 520: insulator, 522: insulator, 524: insulator, 526: insulator, 530: oxide, 530 a: oxide, 530 b: oxide, 530 c: oxide, 540 a: conductor, 540 b: conductor, 542: conductor, 542 a: conductor, 542 b: conductor, 543 a: region, 543 b: region, 544: insulator, 546: conductor, 548: electrical conductor, 550: insulator, 560: conductor, 560 a: conductor, 560 b: conductor, 574: insulator, 580: insulator, 581: insulator, 582: insulator, 586: insulator, 600: capacitor, 610: a conductor,612: conductor, 620: electrical conductor, 630: insulator, 640: insulator, 7000: electronic member, 7001: lead, 7002: printed circuit board, 7004: circuit board, 7100: semiconductor wafer, 7102: circuit region, 7104: separation zone, 7106: separation line, 7110: chip and method for manufacturing the same