阅读说明：本技术 一种激光Bar条芯片光电性能检测方法 (Method for detecting photoelectric property of Bar laser chip ) 是由 赵亮 涂洪森 *** 邹宇 于 2020-06-05 设计创作，主要内容包括：本发明公开了一种激光Bar条芯片光电性能检测方法,包括以下步骤：S1、将Bar条盒摆放在放置座上；S2、确认Bar条的摆放位置；S3、将Bar条移送至检测平台上；S4、对Bar条微调定位；S5、使芯片处于芯片检测工位；S6、对芯片的外观和位置进行检测；S7、供电使芯片发光；S8、对芯片进行发光强度检测；S9、移动避让检测空间；S10、对芯片分别检测水平发散角和竖直发散角；S11、分离停止供电；S12、Bar条上的所有芯片全部检测完成；S13、将检测完的芯片移送至Bar条盒内；S14、重复检测直至Bar条盒内所有Bar条的芯片均检测完成。该检测方法可以连续对Bar条盒内的所有Bar条上的所有芯片进行全检,检测效率更高。(The invention discloses a method for detecting the photoelectric property of a laser Bar chip, which comprises the following steps: s1, placing the Bar box on a placing seat; s2, confirming the placing position of the Bar; s3, moving the Bar strips to a detection platform; s4, fine adjustment and positioning of the Bar; s5, enabling the chip to be in a chip detection station; s6, detecting the appearance and the position of the chip; s7, supplying power to make the chip emit light; s8, detecting the luminous intensity of the chip; s9, moving an avoidance detection space; s10, detecting a horizontal divergence angle and a vertical divergence angle of the chip respectively; s11, separating and stopping power supply; s12, completing the detection of all chips on the Bar strip; s13, transferring the detected chips to a Bar box; s14, repeating the detection until all chips of the Bar strip in the Bar strip box are detected. The detection method can continuously carry out full detection on all chips on all Bar strips in the Bar box, and has higher detection efficiency.)

1. A laser Bar chip photoelectric property detection method is characterized in that: the method comprises the following steps:

s1, placing the Bar box with the plurality of Bar strips on a Bar strip detection station of a placing seat;

s2, taking a picture of a Bar box on a Bar detection station by using a Bar detection camera to confirm the placement position of Bar in the Bar box;

s3, transferring one Bar in a Bar box to a detection platform at a feeding station by a Bar transfer mechanism in a negative pressure air suction mode;

s4, finely adjusting and positioning Bar strips on the detection platform;

s5, moving the detection platform to enable a first chip to be detected on the Bar strip to be located at a chip detection station;

s6, detecting the appearance and the position of the first chip to be detected by using a chip position detection device, and finely adjusting a detection platform according to the position detection result;

s7, supplying power to the first chip to be detected by using a power supply device to enable the first chip to be detected to emit light;

s8, detecting the luminous intensity of the first chip to be detected by using a light intensity detection device arranged on the luminous side of the chip;

s9, moving to avoid the detection space after the detection of the light intensity detection device is completed;

s10, detecting the horizontal divergence angle and the vertical divergence angle of the first chip to be detected respectively by using the horizontal divergence angle detection device and the vertical divergence angle detection device to complete the photoelectric performance detection of the first chip to be detected;

s11, separating the power supply device from the chip and stopping power supply;

s12, repeating the steps S5 to S11 to finish the detection of all chips on the Bar strip;

s13, the detection platform is reset to move to a feeding station, and the Bar transfer mechanism transfers the detected chips to a Bar box;

s14, repeating the steps S3 to S13 until all chips of the Bar strip in the Bar strip box are detected.

2. The method for detecting the photoelectric property of the laser Bar chip as claimed in claim 1, wherein: the specific mode of the Bar transfer mechanism negative pressure air suction transfer in the step S3 is as follows: defining an X axis as a coordinate axis parallel to a connecting line between the Bar detection station and the feeding station, defining a Y axis as a coordinate axis vertical to the X axis on a horizontal plane, and defining a Z axis as a coordinate axis vertical to a plane where the X axis and the Y axis are located; bar strip transfer mechanism adopts the transfer suction nozzle to realize negative pressure and adsorbs, and the setting of transfer suction nozzle is on transferring the support, and its concrete transfer flow is:

s31, moving the transfer support to the upper part of the bar box on an XY plane formed by an X axis and a Y axis;

s32, the transfer support descends along the Z-axis direction to suck one Bar in the Bar box by using a negative pressure principle;

and S33, the transfer support ascends along the Z axis, moves to the feeding station and descends to place the Bar on the detection platform.

3. The method for detecting the photoelectric property of the laser Bar chip as claimed in claim 2, wherein: the concrete manner of fine tuning and positioning the Bar on the detection platform in the step S4 is as follows:

fix a location scraper blade on shifting the support, the location scraper blade is higher than the least significant end that shifts the suction nozzle, and one side of testing platform is provided with the inclined plane of dodging that conveniently shifts the suction nozzle and dodge, should dodge the edge line definition that inclined plane and testing platform upper surface intersect for the location edge line: and the positioning edge line is parallel to the X axis, and the fine adjustment positioning comprises the following steps:

s41, after the step S33, the Bar strip is placed on the detection platform, and the transfer support moves along the Y axis to enable the transfer suction nozzle to correspond to the position of the avoidance inclined plane;

s42, the transfer support descends along the Z direction to enable the positioning scraper to contact with the upper surface of the detection platform;

s43, moving the transfer support along the Y axis, and pushing the Bar strip by the positioning scraper to enable the edge of the Bar strip to be flush with the positioning edge line.

4. The method for detecting the photoelectric property of the laser Bar chip as claimed in claim 1, wherein: the specific way of supplying power to the chip by the power supply device in the step S7 is as follows:

providing a power supply sliding seat which is driven by a power supply lifting power device to slide along the Z direction, wherein a first mounting rod and a second mounting rod are mounted on the power supply sliding seat through a micro-motion platform, and a first conductive pin and a second conductive pin are arranged on the first mounting rod and the second mounting rod; when power supply is needed, the power supply lifting power device drives the power supply sliding seat to descend so that the first conductive pins and the second conductive pins are in contact with the power supply area of the chip for conducting electricity; when the conduction is not needed, the power supply sliding seat ascends to enable the first conductive pin and the second conductive pin to be separated from the chip.

5. The method for detecting the photoelectric property of the laser Bar chip as claimed in claim 1, wherein: the horizontal divergence angle detecting means in the step S10 includes a first detecting support which is driven by a first yaw power means to be deflected about a vertical central axis, the first detecting support having a vertical rod portion on which a first photodetection sensor is provided; the steps for detecting the horizontal divergence angle are as follows:

s101, in an initial state, the vertical rod part is located at an initial position on one side, and the first light detection sensor at the initial position cannot detect light rays emitted by the chip;

s102, a first deflection power device drives a first detection support to deflect, and when a first light detection sensor detects light rays emitted by a chip, a first critical position is recorded;

s103, the first detection support deflects continuously, and when the first optical detection sensor cannot detect the light emitted by the chip, the second critical position is recorded;

and S104, calculating a horizontal angle formed by the first critical position and the second critical position relative to the light-emitting center of the chip, namely a horizontal divergence angle.

6. The method for detecting the photoelectric property of the laser Bar chip as claimed in claim 5, wherein: the vertical divergence angle detecting means in the step S10 includes a second detecting support which is driven by a second yaw driving means to be deflected about the horizontal central axis, the second detecting support having a horizontal rod portion on which a second photodetection sensor is provided; the steps for detecting the vertical divergence angle are:

s10-1, in an initial state, the horizontal rod part is located at an initial position on one side, and the second light detection sensor at the initial position cannot detect light rays emitted by the chip;

s10-2, the second deflection power device drives the second detection support to deflect, and when the second light detection sensor detects light rays emitted by the chip, a third critical position is recorded;

s10-3, the second detection support deflects continuously, and the fourth critical position is recorded when the second light detection sensor cannot detect the light emitted by the chip;

and S10-4, calculating a vertical angle formed by the third critical position and the fourth critical position relative to the light-emitting center of the chip, namely a vertical divergence angle.

7. The method for detecting the photoelectric property of the laser Bar chip as claimed in claim 1, wherein: at least two Bar boxes are placed on the placing seat, and after all the Bar in one of the Bar boxes are detected, the placing seat moves one station to enable the next Bar box to move to the Bar detection station to perform the next round of detection.

Technical Field

The invention relates to a method for detecting the photoelectric property of a laser Bar chip, belonging to the field of laser semiconductor detection.

Background

The detection of the laser Bar chip is an important process in the production process of the laser chip. The current detection method has several disadvantages:

1. bar's material loading is intelligent inadequately, also can not be continuous, and general operation utilizes pneumatic suction nozzle or other instrument to put the detection platform with the Bar and detects on, can't guarantee that the Bar has just been put, and manual operation also probably causes the damage to the chip on the Bar simultaneously.

2. The Bar strips are manually conveyed to the detection platform by the existing detection method, the position of the Bar strips is required to be adjusted due to the fact that the placing position of the Bar strips is incorrect, the operation of adjusting the position is inconvenient, the operation is difficult, some Bar strips are moved by the experience of workers and the recognition of human eyes in a positioning adjustment mode, some Bar strips are positioned by additionally adding a positioning mechanism, the efficiency of the added positioning mechanism is lower, and meanwhile, the installation of the positioning mechanism is very difficult to debug due to the fact that the Bar strips are thinner. And the positioning mechanism also occupies certain space of the equipment.

3. Because the number of chips on the Bar strip is multiple, the position positioning difficulty of the Bar strip is high, the position of each chip is inaccurate, each chip needs to be conducted to enable the chip to emit light when performance detection is carried out on each chip, the conventional detection device cannot conduct the chips with inaccurate positions one by one, all the chips on the Bar strip cannot be efficiently detected, particularly the photoelectric performance of the chips, and the conventional detection method has low detection efficiency on the luminous intensity and the divergence angle.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the detection method can continuously carry out full detection on all chips on all Bar strips in the Bar box, and has higher detection efficiency.

In order to solve the technical problems, the technical scheme of the invention is as follows: a method for detecting the photoelectric property of a laser Bar chip comprises the following steps:

s1, placing the Bar box with the plurality of Bar strips on a Bar strip detection station of a placing seat;

s2, taking a picture of a Bar box on a Bar detection station by using a Bar detection camera to confirm the placement position of Bar in the Bar box;

s3, transferring one Bar in a Bar box to a detection platform at a feeding station by a Bar transfer mechanism in a negative pressure air suction mode;

s4, finely adjusting and positioning Bar strips on the detection platform;

s5, moving the detection platform to enable a first chip to be detected on the Bar strip to be located at a chip detection station;

s6, detecting the appearance and the position of the first chip to be detected by using a chip position detection device, and finely adjusting a detection platform according to the position detection result;

s7, supplying power to the first chip to be detected by using a power supply device to enable the first chip to be detected to emit light;

s8, detecting the luminous intensity of the first chip to be detected by using a light intensity detection device arranged on the luminous side of the chip;

s9, moving to avoid the detection space after the detection of the light intensity detection device is completed;

s10, detecting the horizontal divergence angle and the vertical divergence angle of the first chip to be detected respectively by using the horizontal divergence angle detection device and the vertical divergence angle detection device to complete the photoelectric performance detection of the first chip to be detected;

s11, separating the power supply device from the chip and stopping power supply;

s12, repeating the steps S5 to S11 to finish the detection of all chips on the Bar strip;

s13, the detection platform is reset to move to a feeding station, and the Bar transfer mechanism transfers the detected chips to a Bar box;

s14, repeating the steps S3 to S13 until all chips of the Bar strip in the Bar strip box are detected.

Preferably, the Bar transfer mechanism in the step S3 adopts a negative pressure air suction transfer mode: defining an X axis as a coordinate axis parallel to a connecting line between the Bar detection station and the feeding station, defining a Y axis as a coordinate axis vertical to the X axis on a horizontal plane, and defining a Z axis as a coordinate axis vertical to a plane where the X axis and the Y axis are located; bar strip transfer mechanism adopts the transfer suction nozzle to realize negative pressure and adsorbs, and the setting of transfer suction nozzle is on transferring the support, and its concrete transfer flow is:

s31, moving the transfer support to the upper part of the bar box on an XY plane formed by an X axis and a Y axis;

s32, the transfer support descends along the Z-axis direction to suck one Bar in the Bar box by using a negative pressure principle;

and S33, the transfer support ascends along the Z axis, moves to the feeding station and descends to place the Bar on the detection platform.

Preferably, the specific manner of fine-tuning and positioning the Bar on the detection platform in step S4 is as follows:

fix a location scraper blade on shifting the support, the location scraper blade is higher than the least significant end that shifts the suction nozzle, and one side of testing platform is provided with the inclined plane of dodging that conveniently shifts the suction nozzle and dodge, should dodge the edge line definition that inclined plane and testing platform upper surface intersect for the location edge line: and the positioning edge line is parallel to the X axis, and the fine adjustment positioning comprises the following steps:

s41, after the step S33, the Bar strip is placed on the detection platform, and the transfer support moves along the Y axis to enable the transfer suction nozzle to correspond to the position of the avoidance inclined plane;

s42, the transfer support descends along the Z direction to enable the positioning scraper to contact with the upper surface of the detection platform;

s43, moving the transfer support along the Y axis, and pushing the Bar strip by the positioning scraper to enable the edge of the Bar strip to be flush with the positioning edge line.

Preferably, the specific way of supplying power to the chip by the power supply device in step S7 is as follows:

providing a power supply sliding seat which is driven by a power supply lifting power device to slide along the Z direction, wherein a first mounting rod and a second mounting rod are mounted on the power supply sliding seat through a micro-motion platform, and a first conductive pin and a second conductive pin are arranged on the first mounting rod and the second mounting rod; when power supply is needed, the power supply lifting power device drives the power supply sliding seat to descend so that the first conductive pins and the second conductive pins are in contact with the power supply area of the chip for conducting electricity; when the conduction is not needed, the power supply sliding seat ascends to enable the first conductive pin and the second conductive pin to be separated from the chip.

Preferably, the horizontal divergence angle detecting means in step S10 includes a first detecting support driven by a first deflecting power means to deflect around a vertical central axis, the first detecting support having a vertical rod portion on which a first photo-detecting sensor is disposed; the steps for detecting the horizontal divergence angle are as follows:

s101, in an initial state, the vertical rod part is located at an initial position on one side, and the first light detection sensor at the initial position cannot detect light rays emitted by the chip;

s102, a first deflection power device drives a first detection support to deflect, and when a first light detection sensor detects light rays emitted by a chip, a first critical position is recorded;

s103, the first detection support deflects continuously, and when the first optical detection sensor cannot detect the light emitted by the chip, the second critical position is recorded;

and S104, calculating a horizontal angle formed by the first critical position and the second critical position relative to the light-emitting center of the chip, namely a horizontal divergence angle.

Preferably, in step S10, the vertical divergence angle detecting device includes a second detecting support driven by a second deflecting power device to deflect around the horizontal central axis, the second detecting support has a horizontal rod portion, and the horizontal rod portion is provided with a second light detecting sensor; the steps for detecting the vertical divergence angle are:

s10-1, in an initial state, the horizontal rod part is located at an initial position on one side, and the second light detection sensor at the initial position cannot detect light rays emitted by the chip;

s10-2, the second deflection power device drives the second detection support to deflect, and when the second light detection sensor detects light rays emitted by the chip, a third critical position is recorded;

s10-3, the second detection support deflects continuously, and the fourth critical position is recorded when the second light detection sensor cannot detect the light emitted by the chip;

and S10-4, calculating a vertical angle formed by the third critical position and the fourth critical position relative to the light-emitting center of the chip, namely a vertical divergence angle.

Preferably, at least two Bar boxes are placed on the placing seat, and when all the Bar in one of the Bar boxes are detected, the placing seat moves one station to enable the next Bar box to move to the Bar detection station for the next round of detection.

After the technical scheme is adopted, the invention has the effects that: 1. the detection method utilizes a Bar strip detection camera to photograph a Bar box on a Bar strip detection station to confirm the placement position of Bar strips in the Bar box, so that the positions of the Bar box with the Bar strips can be determined, and accurate absorption of a Bar strip transfer mechanism is facilitated after the position of each Bar strip is determined; 2. the Bar transferring mechanism realizes automatic transfer and placement of the Bar by using a negative pressure air suction mode, the placement position of the Bar on the detection platform is accurate, then the Bar can be accurately positioned by fine adjustment and positioning, and the Bar can be conveniently and accurately positioned to supply power; 3. the detection method utilizes the chip position detection device to detect the appearance and the position of a first chip to be detected, finely adjusts the detection platform according to the position detection result, enables the position of the chip to be more accurate, and meanwhile, the chip position detection device can also detect the appearance quality of the chip; 4. the detection method utilizes the light intensity detection device, the horizontal divergence angle detection device and the vertical emission angle detection device to detect the automatic detection photoelectric property of the chips, and the chips on each Bar strip can be completely detected, so that the quick full detection is realized, and the detection efficiency is higher.

The specific manner of fine-tuning and positioning the Bar on the detection platform in the step S4 is as follows:

fix a location scraper blade on shifting the support, the location scraper blade is higher than the least significant end that shifts the suction nozzle, and one side of testing platform is provided with the inclined plane of dodging that conveniently shifts the suction nozzle and dodge, should dodge the edge line definition that inclined plane and testing platform upper surface intersect for the location edge line: and the positioning edge line is parallel to the X axis, and the fine adjustment positioning comprises the following steps:

s41, after the step S33, the Bar strip is placed on the detection platform, and the transfer support moves along the Y axis to enable the transfer suction nozzle to correspond to the position of the avoidance inclined plane;

s42, the transfer support descends along the Z direction to enable the positioning scraper to contact with the upper surface of the detection platform;

s43, moving the transfer support along the Y axis, and pushing the Bar strip by the positioning scraper to enable the edge of the Bar strip to be flush with the positioning edge line. This Bar fine setting mode of location relies on the removal realization fine setting of location scraper blade, need not additionally to increase fine setting power and structure, and Bar transfer mechanism is accurate control to every Bar locating position on testing platform simultaneously, and consequently the certain distance of location scraper blade also can calculate the accuracy and obtain to fine setting location realizes simply.

Since the horizontal divergence angle detecting means in the step S10 includes a first detecting support which is driven by the first deflecting power means to deflect around the vertical central axis, the first detecting support has a vertical rod portion on which the first light detecting sensor is disposed; the steps for detecting the horizontal divergence angle are as follows:

s101, in an initial state, the vertical rod part is located at an initial position on one side, and the first light detection sensor at the initial position cannot detect light rays emitted by the chip;

s102, a first deflection power device drives a first detection support to deflect, and when a first light detection sensor detects light rays emitted by a chip, a first critical position is recorded;

s103, the first detection support deflects continuously, and when the first optical detection sensor cannot detect the light emitted by the chip, the second critical position is recorded;

s104, calculating a horizontal angle formed by the first critical position and the second critical position relative to the chip light-emitting center to be a horizontal divergence angle, wherein the detection of the horizontal divergence angle is very quick, the detection can be completed only by the deflection of the first detection support, the efficiency is high, and the accuracy is higher.

And because at least two Bar boxes are arranged on the placing seat, after all the Bar in one of the Bar boxes are detected, the placing seat moves one station to enable the next Bar box to move to the Bar detection station for the next round of detection, so that the placing seat can conveniently realize the loading and unloading of the Bar in the detection process, and the automation degree is higher.

Drawings

The invention is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic perspective view of an embodiment of the present invention;

FIG. 2 is a schematic perspective view of another angle of an embodiment of the present invention;

FIG. 3 is a perspective view of the Bar transfer mechanism and structure on the test platform;

FIG. 4 is a perspective view of the power supply, the testing platform and the optoelectronic property testing device;

fig. 5 is a perspective view of a Bar box;

FIG. 6 is a perspective view of an inspection platform;

in the drawings: 1. a machine base; bar transfer mechanism; 21. a transfer base; an X slide; an X power plant; a Y slide; a Y power plant; a Z power plant; a Z slide; a transfer support; 29. transferring the suction nozzle; 210. positioning a scraper plate; 3. a detection platform; 31. a platform body; an avoidance inclined plane; 32. detecting a station switching power device; 33. a platform slide; bar strip supply means; 41. a placing seat; 42. a material supplementing power device; bar boxes; 431. a box body; 432.Bar holding grooves; 433. orientation positioning marks; bar strip detection means; 51. an annular light supplement device; bar strip detection camera; 6. a chip position detecting device; 7. a power supply device; 71. a power supply slide seat; a first mounting bar; 73. a second mounting bar; 74. a first conductive pin; 75. a second conductive pin; 76. a power supply lifting power device; 8 light intensity detection means; 81. a light intensity detection base; 82. light intensity detection sensing; 83. an avoidance power device; 9. a horizontal divergence angle detection device; 91. a first detection base; 92. a first yaw power device; 93. a first detection support; 94. a vertical rod portion; 10. a vertical divergence angle detection device; 101. a second detection base; 102. a second detection support; 103. a horizontal rod portion; 104. and a second deflection power device.

Detailed Description

The present invention is described in further detail below with reference to specific examples.

A method for detecting the photoelectric property of a laser Bar chip comprises the following steps:

s1, placing the Bar box 43 placed with the plurality of Bar strips on a Bar strip detection station of the placing seat 41; wherein, a plurality of Bar placing grooves 432 are arranged on the Bar box 43, and each Bar is placed in the corresponding Bar placing groove 432; at least two Bar boxes 43 are placed on the placing seat 41, and when all the Bar in one of the Bar boxes 43 are detected, the placing seat 41 moves one station to enable the next Bar box 43 to move to the Bar detection station for the next round of detection.

S2, taking a picture of the Bar box 43 on the Bar detection station by using the Bar detection camera 52 to confirm the placement position of the Bar in the Bar box 43; the light can be supplemented by parallel annular light when photographing.

S3, transferring one Bar in the Bar box 43 to the detection platform 3 at the feeding station by the Bar transferring mechanism 2 in a negative pressure air suction mode;

s4, finely adjusting and positioning Bar strips on the detection platform 3;

s5, moving the detection platform 3 to enable a first chip to be detected on the Bar strip to be located at a chip detection station;

s6, detecting the appearance and the position of the first chip to be detected by using the chip position detection device 6, and finely adjusting the detection platform 3 according to the position detection result;

s7, supplying power to the first chip to be detected by using the power supply device 7 to enable the first chip to be detected to emit light;

s8, detecting the luminous intensity of the first chip to be detected by using the light intensity detection device 8 arranged on the luminous side of the chip;

s9, moving to avoid the detection space after the detection of the light intensity detection device 8 is completed;

s10, detecting the horizontal divergence angle and the vertical divergence angle of the first chip to be detected respectively by using the horizontal divergence angle detection device and the vertical divergence angle detection device to complete the photoelectric performance detection of the first chip to be detected;

s11, separating the power supply device 7 from the chip and stopping power supply;

s12, repeating the steps S5 to S11 to finish the detection of all chips on the Bar strip;

s13, the detection platform 3 is reset and moved to a feeding station, and the Bar transfer mechanism 2 transfers the detected chips into a Bar box 43;

s14, repeating the steps S3 to S13 until all chips of the Bar strip in the Bar strip box 43 are detected.

Preferably, the specific manner of the Bar transfer mechanism 2 negative pressure air suction transfer in the step S3 is as follows: defining an X axis as a coordinate axis parallel to a connecting line between the Bar detection station and the feeding station, defining a Y axis as a coordinate axis vertical to the X axis on a horizontal plane, and defining a Z axis as a coordinate axis vertical to a plane where the X axis and the Y axis are located; bar transfer mechanism 2 adopts transfer suction nozzle 29 to realize negative pressure and adsorbs, and transfer suction nozzle 29 sets up on transferring support 28, and its specific transfer flow is:

s31, moving the transfer support 28 to the position above the Bar box 43 on an XY plane formed by an X axis and a Y axis;

s32, the transfer support 28 descends along the Z-axis direction to suck one Bar in the Bar box 43 by using the negative pressure principle;

s33, the Bar strip is placed on the detection platform 3 by descending after the transfer support 28 ascends along the Z axis and moves to the feeding station.

Preferably, the specific manner of fine-tuning and positioning the Bar on the detection platform 3 in the step S4 is as follows:

a positioning scraper 210 is fixed on the transfer support 28, the positioning scraper 210 is higher than the lowest end of the transfer suction nozzle 29, an avoiding inclined plane 311 which is convenient for the transfer suction nozzle 29 to avoid is arranged on one side of the detection platform 3, and the edge line of the avoiding inclined plane 311 intersected with the upper surface of the detection platform 3 is defined as a positioning edge line: and the positioning edge line is parallel to the X axis, and the fine adjustment positioning comprises the following steps:

s41, after the step S33, the Bar strip is placed on the detection platform 3, and the transfer support 28 moves along the Y axis to enable the transfer suction nozzle 29 to correspond to the position of the avoiding inclined plane 311;

s42, the transfer support 28 descends along the Z direction to enable the positioning scraper 210 to be in contact with the upper surface of the detection platform 3, and at the moment, due to the existence of the avoidance inclined surface 311, the lower end of the transfer suction nozzle 29 is lower than the detection platform 3, so that the positioning scraper 210 can be in better and more reliable contact with the detection platform 3;

s43, the transfer support 28 moves along the Y axis, and the positioning scraper 210 pushes the Bar to make the edge of the Bar level with the positioning edge line.

The specific way of supplying power to the chip by the power supply device 7 in step S7 is as follows:

providing a power supply sliding seat which is driven by a power supply lifting power device to slide along the Z direction, wherein a first mounting rod 72 and a second mounting rod 73 are mounted on the power supply sliding seat through a micro-motion platform, and a first conductive pin 74 and a second conductive pin 75 are arranged on the first mounting rod 72 and the second mounting rod 73; when power supply is needed, the power supply lifting power device drives the power supply sliding seat to descend so that the first conductive pins 74 and the second conductive pins 75 are in contact with the power supply area of the chip for conducting electricity; when no conduction is required, the power supply slide is raised to separate the first conductor pins 74 and the second conductor pins 75 from the chip.

The horizontal divergence angle detecting means in the step S10 includes a first detecting support 93 deflected about a vertical central axis by a first deflecting power means 92, the first detecting support 93 having a vertical rod portion 94, the vertical rod portion 94 being provided with a first photodetection sensor; the steps for detecting the horizontal divergence angle are as follows:

s101, in an initial state, the vertical rod part 94 is located at an initial position on one side, and the first light detection sensor at the initial position cannot detect light rays emitted by the chip;

s102, the first deflection power device 92 drives the first detection support 93 to deflect, and when the first light detection sensor detects light rays emitted by the chip, a first critical position is recorded;

s103, the first detection support 93 deflects continuously, and when the first light detection sensor cannot detect the light emitted by the chip, the second critical position is recorded;

and S104, calculating a horizontal angle formed by the first critical position and the second critical position relative to the light-emitting center of the chip, namely a horizontal divergence angle.

In step S10, the vertical divergence angle detecting device 10 includes a second detecting support 102 driven by a second deflecting power device 104 to deflect around the horizontal central axis, the first detecting support has a horizontal rod part 103, and a second light detecting sensor is disposed on the horizontal rod part 103; the steps for detecting the vertical divergence angle are:

s10-1, in an initial state, the horizontal rod part 103 is located at an initial position on one side, and the second light detection sensor at the initial position cannot detect light rays emitted by the chip;

s10-2, the second deflection power device 104 drives the second detection support 102 to deflect, and when the second light detection sensor detects the light emitted by the chip, the third critical position is recorded;

s10-3, the second detection support 102 deflects continuously, and when the second light detection sensor cannot detect the light emitted by the chip, the fourth critical position is recorded;

and S10-4, calculating a vertical angle formed by the third critical position and the fourth critical position relative to the light-emitting center of the chip, namely a vertical divergence angle. Wherein the detection order of the vertical divergence angle detecting means 10 and the horizontal divergence angle detecting means is not mandatory.

As shown in fig. 1 to 6, the embodiment further discloses a detection device for implementing the method for detecting photoelectric performance, and an automatic detection device for a laser Bar chip, which includes a base 1, wherein a placing seat 41 is disposed on the base 1, a Bar detection station is disposed on the placing seat 41, and a Bar box 43 is disposed at the Bar detection station, wherein, for automatic material supplement of the automatic detection device, the placing seat 41 is horizontally slidably mounted on the base 1, at least one placing station convenient for placing the Bar box 43 is disposed on the placing seat 41, the placing seat 41 is driven by a material supplement power device 42 to slide so that the Bar box 43 on the placing station is moved to the Bar detection station, and the Bar supply device 4 is formed by the above structure; as shown in FIG. 1, the placing seat 41 has two placing stations and one Bar detection station, both of which are placed with Bar boxes 43, the Bar box 43 near the right side in FIG. 1 is at the Bar detection station, and the feeding power device 42 employs a linear servo motor, so as to accurately control the moving feeding of the placing seat 41. As shown in fig. 5, the Bar box 43 includes a box body 431, a plurality of Bar placing grooves 432 are arranged on the box body 431 in an array, and the same end of all the placing grooves is provided with an orientation mark 433. The center of box body 431 is provided with a location centre bore, and what adopted towards location sign 433 is that the homonymy tip at the standing groove has set up the inclined plane, makes things convenient for the orientation when Bar is placed like this, and Bar orientation back just can make the luminous side of chip towards one side of photoelectric property detection device, makes things convenient for automated inspection.

A Bar strip detection device 5 for detecting Bar strips in the Bar strip box 43 is arranged on the machine base 1 above the Bar strip detection station; in this embodiment, Bar detection device 5 is including being fixed in on frame 1 and being located Bar detection camera 52 above the Bar detection station, it is provided with annular light filling device 51 that carries out the light filling to Bar barrel 43 to be located between Bar detection camera 52 and Bar barrel 43 on frame 1, and this annular light filling device 51 adopts the annular light source of LED can.

A detection platform 3 is horizontally and slidably mounted on the machine base 1, and the detection platform 3 is driven by a detection station switching power device 32 to horizontally slide in a feeding station and a chip detection station; as shown in fig. 3, the detection platform 3 includes a platform body 31, the platform body 31 is fixed on a platform sliding seat 33, and the platform sliding seat 33 is slidably mounted on the machine base 1 and driven by a detection station switching power device 32. One side on the platform body 31 is provided with the inclined plane 311 of dodging that makes things convenient for the transfer suction nozzle 29 to dodge, should dodge the inclined plane 311 and be the location edge line with the crossing edge line of testing platform 3, when the platform body 31 was in and is in the material loading station, Bar strip transfer mechanism 2 transferred one of them Bar strip in the Bar box 43 to the platform body 31 on, then testing platform 3 was switched power device 32 drive by the testing station and is made a chip on the Bar strip move and carry out chip detection on the chip testing station. After one chip is detected, the detection station switching power device 32 drives the Bar strip to move by one chip span, so that the next chip is positioned at the chip detection station. The detection station switching power device 32 is also driven by a linear servo motor.

The machine base 1 is provided with a Bar strip transfer mechanism 2 which transfers Bar strips from a Bar strip box 43 and positions the Bar strips on a detection platform 3 of a feeding station, and a chip position detection device 6 which detects the positions of chips on the Bar strips on a chip detection station is arranged above the chip detection station on the machine base 1. The chip detection device adopts a detection camera, and only the detection camera has stronger resolving power and higher magnification, thereby accurately detecting the chips on the Bar strips. As shown in fig. 1 and 2, both the camera of the chip detection device and the Bar detection camera 52 can be focused by the focusing device in the vertical direction, and the two cameras are respectively mounted on the micro-motion platform, so that the position adjustment is convenient.

As shown in fig. 2 and 3, the Bar transfer mechanism 2 comprises a transfer base 21, wherein an X slide 22 driven by an X power device 23 to slide along an X axis is slidably arranged on the transfer base 21, the X axis is defined as a coordinate axis parallel to a connecting line between a Bar detection station and a feeding station, the Y axis is defined as a coordinate axis vertical to the X axis on a horizontal plane, and the Z axis is defined as a coordinate axis vertical to a plane where the X axis and the Y axis are located; a Y sliding seat 24 driven by a Y power device 25 is arranged on the X sliding seat 22 in a sliding mode along the Y-axis direction, and a Z sliding seat 27 driven by a Z power device 26 is arranged on the Y sliding seat 24 in a sliding mode along the Z axis; a transfer support 28 is mounted on the Z slide 27, and a transfer suction nozzle 29 is arranged on the transfer support 28, and the transfer suction nozzle 29 is communicated with a vacuum-pumping system. In the present embodiment, the sliding direction of the placing seat 41 is the Y direction, and the sliding direction of the detecting platform 3 is the X direction, so that the arrangement is more compact. The X power device 23, the Y power device 25, and the Z power device 26 are driven by linear servo motors. The transfer support 28 is also mounted on the Z-slide 27 by means of a micro-motion stage, which allows fine adjustment of the position of the transfer nozzle 29.

In this embodiment, the transfer support 28 is provided with a positioning scraper 210, the positioning scraper 210 is higher than the lowest end of the transfer suction nozzle 29, one side of the detection platform 3 is provided with an avoidance inclined plane 311 which facilitates the avoidance of the transfer suction nozzle 29, an edge line of the avoidance inclined plane 311, which intersects with the detection platform 3, is a positioning edge line, and the positioning scraper 210 is driven by the Y power device 25 to scrape the Bar strip so that the edge of the Bar strip is flush with the positioning edge line. Since the position of the positioning scraper 210 is higher than the lowest end of the transfer suction nozzle 29, when the Bar in the Bar box 43 is sucked, the positioning scraper 210 does not hinder the suction, and when the positioning scraper 210 is used, the position of the transfer suction nozzle 29 is in the avoiding inclined surface 311, so that the positioning scraper 210 is convenient to contact with the upper surface of the platform body 31. And the movement of the positioning scraper 210 is driven by the Y power device 25, so that additional positioning power is saved, and the mechanism is more compact.

Frame 1 still is provided with the power supply unit 7 that supplies power to the chip on the chip detection station, power supply unit 7 includes vertical slidable mounting in the power supply slide 71 on frame 1, be provided with first installation pole 72 and second installation pole 73 on the power supply slide 71, on first installation pole 72 and the second installation pole 73 respectively demountable installation have first conductive needle 74 and second conductive needle 75, power supply slide 71 is gone up and down by power supply lift power device 76 drive, and the one end and the power supply electricity of first conductive needle 74 and second conductive needle 75 are connected, and the other end of first conductive needle 74 and second conductive needle 75 corresponds with the power supply position of the chip on the chip detection station respectively. In the embodiment, the first mounting rod 72 and the second mounting rod 73 are both mounted on the power supply sliding base 71 through a micro-motion platform, so that the positions of the first mounting rod 72 and the second mounting rod 73 can be adjusted through the micro-motion platform, and adjustment during equipment debugging is facilitated. During the detection, the first conductive pins 74 and the second conductive pins 75 are lowered to be directly contacted with the power supply position of the chip, and then the chip can conduct electricity.

One side of the base 1, which is positioned at the chip detection station, is also provided with a photoelectric performance detection device for detecting the photoelectric performance of the chip, and the light-emitting side of the chip faces the photoelectric performance detection device.

In this embodiment, the photoelectric property detection device includes the light intensity detection device 8, the light intensity detection device 8 is including installing the light intensity detection seat 81 on frame 1, be provided with the light intensity on the light intensity detection seat 81 and detect sensor 82, the light intensity detects sensor 82 ware and corresponds with the luminous side position of chip. The light intensity detecting sensor 82 is a conventional sensor, and is commercially available.

The photoelectric performance detection device further comprises a horizontal divergence angle detection device 9, the light intensity detection seat 81 is linearly and slidably mounted on the machine base 1 and driven by the avoidance power device 83, the sliding direction of the light intensity detection seat is also the Y direction, the horizontal divergence angle detection device 9 comprises a first detection base 91 fixed on the machine base 1, a vertical central shaft is rotatably mounted on the first detection base 91 and driven by a first deflection power device 92, an L-shaped first detection support 93 is mounted on the vertical central shaft, and a first light detection sensor is arranged on a vertical rod part 94 of the first detection support 93. The first light detecting sensor may employ a photo resistor or other similar sensor. The first yaw power device adopts a yaw motor, the first yaw power device drives the vertical central shaft to rotate for a certain angle, so that the first detection support 93 is driven to rotate, the first optical detection sensor on the vertical rod part 94 also deflects around the vertical central shaft, the first optical detection sensor rotates until the first optical detection sensor cannot detect light after the first optical detection sensor starts to receive the light emitted by the laser chip, and the two critical positions detect the horizontal divergence angle of the laser chip.

Similarly, the photoelectric performance detection device further comprises a vertical divergence angle detection device 10, the vertical divergence angle detection device 10 comprises a second detection base 101 fixed on the base 1, a horizontal central shaft is rotatably mounted on the second detection base 101, the horizontal central shaft is driven by a second deflection power device 104, an L-shaped second detection support 102 is mounted on the horizontal central shaft, and a second optical detection sensor is arranged on a horizontal rod part 103 of the second detection support 102. The same principle can detect the vertical divergence angle.

The gas circuit system, the actuating devices such as the servo motor and the like, the gear transmission mechanism and the screw and nut mechanism mentioned in the embodiment are all the conventional technologies at present, the specific structures and principles of the cylinder, the motor and other transmission mechanisms and other designs are disclosed in detail in the fifth edition of the mechanical design manual printed for the twenty-eighth edition in the fifth edition of Beijing in 4 months of 2008, and belong to the prior art, the structure of the gas circuit system belongs to the prior art, the structure of the gas circuit system is clearly clarified, the vacuum element, the gas circuit and the program control are disclosed in detail in the modern practical pneumatic technology 3 rd edition SMC training teaching material published by the mechanical industry publisher in 08 months and 01 days of 2008, the gas circuit structure in the embodiment is also the prior art, and the control and the travel switch of the motor are also described in detail in the book of Motor drive and speed regulation published by the chemical industry publisher in 07 months and 01 days of 2015, therefore, the circuit and the gas circuit connection are clear.

The above-mentioned embodiments are merely descriptions of the preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and various modifications and alterations made to the technical solution of the present invention without departing from the spirit of the present invention are intended to fall within the scope of the present invention defined by the claims.