阅读说明：本技术 一种电泵浦深紫外AlGaN半导体激光器 (Electric pumping deep ultraviolet AlGaN semiconductor laser ) 是由 曾涵宇 于 2019-07-30 设计创作，主要内容包括：本发明公开了一种电泵浦深紫外AlGaN半导体激光器,其结构包括机体、激光器,激光器设有支撑脚、按键板、光束调节器,本发明的有益效果是：能够通过旋转器在旋转过程中带动推动齿推动收线器上的转轮进行转动,从而带动转杆对拉绳进行缠绕收缩,在拉绳收缩的过程中通过拉绳拉动皮筋向四周拉绳,从而扩大皮筋的直径,皮筋外圈被遮光网遮挡,从而能够保证光束只能够通过光束孔进行照射,以此能够根据需要的光点直径进行刻度板上的刻度对准,从而将光点直径精确到某个数值,使激光器在进行光刻工作时调节切割槽的宽度,从而缩小光刻时产生的误差,同时通过缩小光点直径能够更进一步精确光刻的长度,提高激光器在进行光刻时的精确度。(The invention discloses an electric pumping deep ultraviolet AlGaN semiconductor laser, which structurally comprises a machine body and a laser, wherein the laser is provided with supporting legs, a key board and a light beam regulator, and the electric pumping deep ultraviolet AlGaN semiconductor laser has the beneficial effects that: can drive the runner that promotes on the tooth promotion spooler through the circulator in rotatory in-process and rotate, thereby drive the bull stick and carry out the winding shrink to the stay cord, stay cord drawing rubber band is to stay cord all around at the in-process that the stay cord is shrink, thereby enlarge the diameter of rubber band, the rubber band outer lane is sheltered from by the shading net, thereby can guarantee that the light beam can only shine through the beam hole, with this spot diameter that can be as required carry out the scale alignment on the scale plate, thereby be accurate to certain numerical value with the spot diameter, make the laser instrument adjust the width of cutting groove when carrying out the photoetching work, thereby reduce the error that produces when the photoetching, simultaneously through reducing the length that the spot diameter can further accurate photoetching, improve the accuracy of laser instrument when carrying out the photoetching.)

1. a kind of electric pump deep ultraviolet AlGaN semiconductor laser, structure includes body (1), laser (2), the body (1) it is bolted to laser (2) bottom, the laser (2) is bolted to body (1) upper surface, special Sign is:

The body (1) is equipped with control panel (10), and the control panel (10) is bolted to body (1) outer surface；

The laser (2) is equipped with support leg (20), keypad (21), beam adjuster (22), and the support leg (20) passes through It is bolted between body (1) and laser (2), the keypad (21) is bolted to laser (2) outer surface On, the beam adjuster (22) is bolted to laser (2) outer surface.

2. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 1, it is characterised in that: the light Beam adjuster (22) is equipped with scale plate (220), rotator (221), spooler (222), diameter constrictor (223), the scale Plate (220) is embedded at rotator (221) both ends, and rotator (221) is embedded between scale plate (220), the spooler (222) It is internal to be embedded at rotator (221), it is internal that the diameter constrictor (223) is embedded at rotator (221).

3. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 2, it is characterised in that: the quarter It spends plate (220) and is equipped with scale (A), sliding slot (B), the scale (A) is uniformly distributed on scale plate (220) outer surface, the cunning Slot (B) is embedded at the bottom scale plate (A).

4. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 2, it is characterised in that: the rotation Turn device (221) equipped with anti-skid rack (C), draw runner (D), promotion tooth (E), the anti-skid rack (C) is distributed in rotator (221) outside On surface, the draw runner (D) is welded in rotator (221) upper and lower surface, and the promotion tooth (E) is uniformly distributed in rotator (221) on inner wall.

5. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 4, it is characterised in that: the cunning Item (D) is equipped with strip (D1), and the strip (D1) is welded on draw runner (D), and the strip (D1) is embedded in sliding slot (B).

6. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 2, it is characterised in that: the receipts Line device (222) is equipped with runner (F), take-up bar (G), and the runner (F) is welded in the both ends take-up bar (G), take-up bar (G) weldering It is connected on rotator (221) inner wall.

7. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 6, it is characterised in that: the receipts Line bar (G) is equipped with escape groove (G1), bull stick (G2), and the escape groove (G1) is embedded on the outer surface take-up bar (G), the bull stick (G2) it is welded between runner (F).

8. a kind of electric pump deep ultraviolet AlGaN semiconductor laser according to claim 2, it is characterised in that: described straight Diameter constrictor (223) is equipped with drawstring (H), shading net (I), rubber band (J), light beam hole (K), and the drawstring (H) is connected to escape groove (G1) between rubber band (J), the shading net (I) is connected between rubber band (J) and spooler (222) by suture, the skin Muscle (J) is connected to the middle section shading net (I) by suture, and the light beam hole (K) is embedded at rubber band (J) central part.

Technical field

The present invention relates to semiconductor field, specifically a kind of electric pump deep ultraviolet AlGaN semiconductor laser.

Background technique

Semiconductor is a kind of insulator to the material between conductor, has controllability, in science and technology and rapid economic development Today, semiconductor have very important importance, and nowadays most electronic product all has with semiconductor extremely closely Connection, when ultraviolet light is applied on semiconductor, can be used in Raman spectrum, surface contamination is inspected, photoetching and laser note Record etc., it is widely used.

For the problem that current electric pump deep ultraviolet AlGaN semiconductor laser, formulated relatively for existing below Scheme:

Because existing electric pump deep ultraviolet AlGaN semiconductor laser is carrying out position and angle in use, laser The static alignment limit and light beam close relation, the diameter of luminous point of degree also affect the working effect of laser, especially exist When carrying out photoetching using laser, the diameter of luminous point affects the length variation of photoetching, and laser is in the diameter adjustment of light beam On still have some deficits, the accurate adjusting of spot diameter can not be carried out as needed.

Summary of the invention

It is a primary object of the present invention to overcome the deficiencies of the prior art and provide a kind of electric pump deep ultraviolet AlGaN partly to lead Body laser.

The present invention adopts the following technical scheme that realize: a kind of electric pump deep ultraviolet semiconductor laser, structure include Body, laser, the body are bolted to laser bottom, and the laser is bolted to table on body Face, the body are equipped with control panel, and the control panel is bolted to body outer surface；The laser is equipped with branch Support foot, keypad, beam adjuster, the support leg are bolted between body and laser, and the keypad is logical It crosses and is bolted on laser outer surface, the beam adjuster is bolted to laser outer surface.

As optimization, the beam adjuster is equipped with scale plate, rotator, spooler, diameter constrictor, the scale plate Rotator both ends are embedded at, rotator is embedded between scale plate, and the spooler is embedded inside rotator, and the diameter is received Contracting device is embedded inside rotator, and the scale plate is circular ring shape plate structure, and the scale plate is metal material, the scale Plate is 2, and the rotator is hollow circular tubular structure, and the spooler is 6.

As optimization, the scale plate is equipped with scale, sliding slot, and the scale is uniformly distributed on scale plate outer surface, institute It states sliding slot and is embedded at scale plate bottom, the scale is 2 rows, and the sliding slot is cirque structure T-type groove, and the sliding slot is 2 A, the sliding slot is embedded at respectively on two scale plates.

As optimization, the rotator is equipped with anti-skid rack, draw runner, pushes tooth, and the anti-skid rack is distributed in rotator On outer surface, the draw runner is welded in rotator upper and lower surface, and the promotion tooth is uniformly distributed on rotator inner wall, described Protecting rack gear is several.

As optimization, the draw runner is equipped with strip, and the strip is welded on draw runner, and the strip is embedded in sliding slot, The strip is cirque structure, and the strip is 2, and the strip is metal material.

As optimization, the spooler is equipped with runner, take-up bar, and the runner is welded in take-up bar both ends, the take-up Bar is welded on rotator inner wall, and the runner is 2, and the runner is metal material, and the runner is equipped with 4 plate wings, The runner is metal material, and the take-up bar is hollow tubular structure, and the take-up bar is metal material.

As optimization, the take-up bar is equipped with escape groove, bull stick, and the escape groove is embedded on take-up rod outer surface, institute It states bull stick to be welded between runner, the bull stick is circular rod-shaped configuration, and the bull stick is 6.

As optimization, the diameter constrictor is equipped with drawstring, shading net, rubber band, light beam hole, and the drawstring is connected to evacuation Between slot and rubber band, the shading net is connected between rubber band and spooler by suture, and the rubber band is connected to by suture Shading net middle section, the light beam hole are embedded at rubber band central part, and the drawstring is linen-cotton material, the drawstring toughness By force, elasticity is 0, and the shading net shading rate is 80%-100%, and the rubber band elasticity is strong, and the light beam hole is circular configuration.

Beneficial effect

When a kind of electric pump deep ultraviolet AlGaN semiconductor laser of the present invention is worked:

By being equipped with a kind of beam adjuster, the beam adjuster is equipped with scale plate, rotator, spooler, diameter and receives Contracting device is directed at scale plate by turning rotator, so that spooler be driven to work, and then diameter constrictor is pulled to carry out light The adjusting of spot diameter；

By being equipped with a kind of rotator, the rotator is equipped with anti-skid rack, draw runner, pushes tooth, in turning rotator, Anti-skid rack is contacted by finger, thus turning rotator, rotator drives draw runner to be rotated, while driving and slot is pushed to carry out Rotation pushes tooth to push spooler to work in the course of rotation；

By being equipped with a kind of scale plate, the scale plate is equipped with scale, sliding slot, needs to be aligned when rotator is rotated Scale on scale plate, while draw runner is rotated in the sliding slot on scale plate, draw runner is acted on by the fixing of strip, so that Draw runner can carry out circular path rotation in sliding slot；

By being equipped with a kind of spooler, the spooler is equipped with runner, take-up bar, drives spooler when pushing tooth rotation The runner of upper and lower ends is rotated, and runner drives bar rotation in the course of rotation, and when bar rotation, take-up bar is motionless, Drawstring is controlled by the escape groove on take-up bar, so that diameter constrictor be pulled to work；

By being equipped with a kind of diameter constrictor, the diameter constrictor is equipped with drawstring, shading net, rubber band, light beam hole, works as drawing When rope is pulled, it will band elastic rubber band is pulled, and rubber band is pulled around by the pulling force of root drawstring, to drive shading Net is shunk, and is expanded with the light beam hole among elastic rubber band, thus the diameter in expanded light beam hole, enables spot diameter It is adjusted.

Compared with prior art, the beneficial effects of the present invention are: promotion can be driven in rotary course by rotator Tooth pushes the runner on spooler to be rotated, to drive bull stick to be wound contraction to drawstring, in the process that drawstring is shunk In rubber band drawstring around pulled by drawstring, to expand the diameter of rubber band, rubber band outer ring is blocked by shading net, so as to Guarantee that light beam is merely able to be irradiated by light beam hole, the scale on scale plate is carried out with the spot diameter that this can be as needed Alignment, so that spot diameter is accurate to some numerical value, makes laser adjust the width of cutting groove when carrying out photoetching work, from And the length for reducing the error generated when photoetching, while capableing of further accurate photolithographic by reducing spot diameter, it improves and swashs The accuracy of light device when carrying out photoetching.

Detailed description of the invention

Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention, Objects and advantages will become more apparent upon:

Fig. 1 is a kind of structural schematic diagram of electric pump deep ultraviolet AlGaN semiconductor laser of the present invention.

Fig. 2 is the enlarged structure schematic diagram of beam adjuster of the present invention.

Fig. 3 is the enlarged structure schematic diagram of scale plate of the present invention.

Fig. 4 is the structural schematic diagram under rotator of the present invention and diameter constrictor matching conjunction state.

Fig. 5 is the overlooking structure diagram of diameter constrictor of the present invention.

Fig. 6 is the amplification overlooking structure diagram of rotator of the present invention.

Fig. 7 is the enlarged structure schematic diagram of draw runner of the present invention.

Fig. 8 is the side structure schematic diagram of spooler of the present invention.

Fig. 9 is the schematic diagram of internal structure of take-up bar of the present invention.

In figure: body 1, laser 2, control panel 10, support leg 20, keypad 21, beam adjuster 22, scale plate 220, rotator 221, spooler 222, diameter constrictor 223, scale A, sliding slot B, anti-skid rack C, draw runner D, promotion tooth E, card D1, runner F, take-up bar G, escape groove G1, bull stick G2, drawstring H, shading net I, rubber band J, light beam hole K.

Specific embodiment

Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.

Please refer to Fig. 1-9, the present invention provides a kind of electric pump deep ultraviolet AlGaN semiconductor laser technology scheme: it is tied Structure includes body 1, laser 2, and the body 1 is bolted to 2 bottom of laser, and the laser 2 is connected by bolt It is connected to 1 upper surface of body, the body 1 is equipped with control panel 10, and the control panel 10 is bolted to 1 appearance of body Face；The laser 2 is equipped with support leg 20, keypad 21, beam adjuster 22, and the support leg 20 is bolted to machine Between body 1 and laser 2, the keypad 21 is bolted on 2 outer surface of laser, and the beam adjuster 22 is logical Cross and be bolted in 2 outer surface of laser, the beam adjuster 22 be equipped with scale plate 220, rotator 221, spooler 222, Diameter constrictor 223, the scale plate 220 are embedded at 221 both ends of rotator, and rotator 221 is embedded between scale plate 220, The spooler 222 is embedded inside rotator 221, and the diameter constrictor 223 is embedded inside rotator 221, the quarter Degree plate 220 is used to carry out rotation adjusting according to spot diameter, and the rotator 221 is for driving spooler 222 to work, institute Spooler 222 is stated for pulling diameter constrictor 223 to carry out the adjusting of spot diameter, the scale plate 220 is equipped with scale A, cunning Slot B, the scale A are uniformly distributed on 220 outer surface of scale plate, and the sliding slot B is embedded at the bottom scale plate A, the scale 220 for being directed at the exact numerical of spot diameter, and for assisting draw runner D to be rotated, the rotator 221 is set the sliding slot B There is anti-skid rack C, draw runner D, tooth E, the anti-skid rack C pushed to be distributed on 221 outer surface of rotator, the draw runner D welding In in 221 upper and lower surface of rotator, the promotion tooth E is uniformly distributed on 221 inner wall of rotator, and the anti-skid rack C is used for Anti-skidding effect is carried out when rotated, and the draw runner D is described to push away for driving rotator 221 to be rotated between scale plate 220 Movable tooth E is for pushing spooler 222 to carry out take-up work, and the draw runner D is equipped with strip D1, and the strip D1 is welded in draw runner D On, the strip D1 is embedded in sliding slot B, and the strip D1 is for driving draw runner D to be stuck in sliding slot B, to assist rotator 221 are rotated, and the spooler 222 is equipped with runner F, take-up bar G, the runner F are welded in the both ends take-up bar G, the receipts Line bar G is welded on 221 inner wall of rotator, and the runner F is described for driving the bull stick G2 of take-up bar G interior to be rotated For take-up bar G for blocking drawstring H in take-up, the take-up bar G is equipped with escape groove G1, bull stick G2, and the escape groove G1 is embedded In on the outer surface take-up bar G, the bull stick G2 is welded between runner F, and the bull stick G2 is used to that drawstring H to be driven to be wound, To pull drawstring H to be shunk and discharged, the diameter constrictor 223 is equipped with drawstring H, shading net I, rubber band J, light beam hole K, The drawstring H is connected between escape groove G1 and rubber band J, and the shading net I is connected to rubber band J and spooler 222 by suture Between, the rubber band J is connected to the middle section shading net I by suture, and the light beam hole K is embedded at rubber band J central part, institute Drawstring H is stated for pulling rubber band J to stretch, the shading net I is used to control the diameter of luminous point, and the rubber band J is used for Shading net I is driven to be shunk, the light beam hole K is used to form luminous point.

When in use, scale plate 220 is directed at by turning rotator 221, so that spooler 222 is driven to work, into And pull the adjusting of the progress spot diameter of diameter constrictor 223；In turning rotator 221, anti-skid rack is contacted by finger C, thus turning rotator 221, rotator 221 drives draw runner D to be rotated, while driving and slot E is pushed to be rotated, and pushes tooth E pushes spooler 222 to work in the course of rotation；It needs to be aligned on scale plate 220 when rotator 221 is rotated Scale A, while draw runner D is rotated in the sliding slot B on scale plate 220, and draw runner D is acted on by the fixing of strip D1, is made Circular path rotation can be carried out in sliding slot B by obtaining draw runner D；Turning for 222 upper and lower ends of spooler is driven when tooth E rotation when pushing Wheel F is rotated, and runner F drives bull stick G2 to rotate in the course of rotation, and when bull stick G2 rotation, take-up bar G is motionless, is passed through Escape groove G1 on take-up bar G controls drawstring H, so that diameter constrictor 223 be pulled to work；When drawstring H is carried out When pulling, it will band elastic rubber band J is pulled, and rubber band J is pulled around by the pulling force of 6 drawstring H, to drive shading net I is shunk, and is expanded with the light beam hole K among elastic rubber band J, thus the diameter of expanded light beam hole K, enables spot diameter Enough it is adjusted.

The technological progress that the present invention obtains compared with the prior art is:

It can be driven in rotary course by rotator and push tooth that the runner on spooler is pushed to be rotated, thus band Turn bar is wound contraction to drawstring, rubber band drawstring around is pulled by drawstring during drawstring is shunk, to expand The diameter of big rubber band, rubber band outer ring is blocked by shading net, so as to guarantee that light beam is merely able to be irradiated by light beam hole, with This can be as needed spot diameter carry out the scale alignment on scale plate, so that spot diameter is accurate to some numerical value, So that laser is adjusted the width of cutting groove, the error generated when to reducing photoetching when carrying out photoetching work, while passing through contracting Small spot diameter is capable of the length of further accurate photolithographic, improves the accuracy of laser when carrying out photoetching.

Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art, It is still possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is carried out etc. With replacement, all within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in this Within the protection scope of invention.