阅读说明：本技术 具有集成光电二极管的垂直腔面发射激光器装置 (Vertical cavity surface emitting laser device with integrated photodiode ) 是由 P·H·格拉赫 于 2019-01-09 设计创作，主要内容包括：本发明描述一种垂直腔面发射激光器(VCSEL)装置、包括VCSEL装置的光学传感器以及制造这样的VCSEL装置的方法。VCSEL装置包括第一电接触体(105)、第三电接触体(130)、第四电接触体(150)和光学谐振器。光学谐振器包括第一分布式布拉格反射器(115)、光电二极管、第二分布式布拉格反射器和用于发光的有源层(120)。有源层(120)被布置在第一分布式布拉格反射器(115)与第二分布式布拉格反射器之间。第二分布式布拉格反射器包括第一部分(125)、第二部分(135)和第三部分(145)。第一部分(125)包括具有不同折射率的至少一对成对层。所述至少一对成对层的特征在于是第二导电类型的。第二部分(135)包括具有不同折射率的至少一对成对层。所述至少一对成对层的特征在于是与第二导电类型不同的第一导电类型的。第三部分包括具有不同折射率的至少一对成对层,其中,所述至少一对成对层的特征在于是第二导电类型的。光电二极管的光吸收结构(140)被布置在第二部分(135)与第三部分(145)之间。第一电接触体(105)和另一电接触体被布置为能够提供电驱动电流,以电泵浦光学谐振器。光吸收结构(140)被布置在电驱动电流的电流路径之外。第三电接触体(130)和第四电接触体(150)被布置为能够电接触光电二极管。(A Vertical Cavity Surface Emitting Laser (VCSEL) device, an optical sensor including the VCSEL device, and a method of fabricating such VCSEL device are described. The VCSEL device includes a first electrical contact (105), a third electrical contact (130), a fourth electrical contact (150), and an optical resonator. The optical resonator includes a first distributed bragg reflector (115), a photodiode, a second distributed bragg reflector, and an active layer (120) for emitting light. An active layer (120) is disposed between the first distributed Bragg reflector (115) and the second distributed Bragg reflector. The second distributed Bragg reflector includes a first portion (125), a second portion (135), and a third portion (145). The first portion (125) includes at least one pair of dyads having different indices of refraction. The at least one pair of pairs of layers is characterized as being of the second conductivity type. The second portion (135) includes at least one pair of dyads having different indices of refraction. The at least one pair of pairs of layers is characterized by a first conductivity type different from a second conductivity type. The third portion includes at least one pair of dyads having different indices of refraction, wherein the at least one pair of dyads is characterized as being of the second conductivity type. The light absorbing structure (140) of the photodiode is arranged between the second portion (135) and the third portion (145). The first electrical contact (105) and the further electrical contact are arranged to be able to provide an electrical driving current to electrically pump the optical resonator. The light absorbing structure (140) is arranged outside a current path of the electrical driving current. The third electrical contact (130) and the fourth electrical contact (150) are arranged to be able to electrically contact the photodiode.)

1. A VCSEL device comprising a first electrical contact (105), a third electrical contact (130), a fourth electrical contact (150), and an optical resonator, wherein the optical resonator comprises a first distributed Bragg reflector (115), a photodiode, a second distributed Bragg reflector, and an active layer (120) for emitting light, wherein the active layer (120) is arranged between the first distributed Bragg reflector (115) and the second distributed Bragg reflector, wherein the second distributed Bragg reflector comprises a first portion (125), a second portion (135), and a third portion (145), wherein the first portion (125) comprises at least one pair of first dyad layers having different refractive indices, wherein the at least one pair of first dyad layers are of a second conductivity type, wherein the second portion (135) comprises at least one pair of second dyad layers having different refractive indices, wherein the at least one pair of second dyad layers is of a first conductivity type different from the second conductivity type, wherein the third portion comprises at least one pair of third dyad layers having different refractive indices, wherein the at least one pair of third dyad layers is of a second conductivity type, wherein the light absorbing structure (140) of the photodiode is arranged between the second portion (135) and the third portion (145), wherein the first electrical contact (105) and the further electrical contact are arranged to be able to provide an electrical driving current for electrically pumping the optical resonator, wherein the light absorbing structure (140) is arranged outside a current path of the electrical driving current, wherein the third electrical contact (130) and the fourth electrical contact (150) are arranged to be able to electrically contact the photodiode, wherein the further electrical contact is a second electrical contact (127), wherein the second electrical contact (127) electrically contacts the first portion (125), wherein the third electrical contact (130) electrically contacts the second portion (135), wherein the second electrical contact (127) and the third electrical contact (130) are separated by the semiconductor layer structure.

2. The VCSEL device of claim 1, comprising a base (110), wherein the first DBR is disposed between the base (110) and the active layer (120).

3. The VCSEL device of claim 1, comprising a base (110), wherein the base (110) is of a first conductivity type, wherein the first distributed Bragg reflector (115) is of the first conductivity type.

4. A vcsel device in accordance with claim 2 or 3, wherein the first conductivity type is characterized as having n-doped material, and wherein the second conductivity type is characterized as having p-doped material.

5. A vertical cavity surface emitting laser device according to any preceding claim, wherein the semiconductor layer structure is an isolation structure (128) arranged to electrically isolate the third electrical contact (130) from the second electrical contact (127).

6. The VCSEL device of claim 5, wherein the isolation structure (128) includes at least one pair of pairs of layers, each of the pairs of layers including a first layer having a first refractive index and a second layer having a second refractive index different from the first refractive index.

7. The VCSEL device of claim 6, wherein the isolation structure (128) includes a plurality of pairs including first and second layers, wherein at least two of the first layers are of a first conductivity type and wherein at least two of the second layers are of a second conductivity type.

8. The VCSEL device of claim 1, wherein the VCSEL device is arranged to be capable of lasing through a first distributed Bragg reflector (115).

9. The VCSEL device of claim 8, comprising a first current distributing layer (106) disposed between the base (110) and the first DBR (115), wherein the first current distributing layer is electrically connected to the first electrical contact (105), wherein the base (110) comprises an undoped semiconductor material.

10. The VCSEL device of any of the preceding claims, wherein the first portion (125) and the second portion (135) of the second DBR include more pairs of layers having different refractive indices than the third portion (145) of the second DBR.

11. The VCSEL device of any of the preceding claims, wherein the absorbing structure (140) includes an intrinsic layer (141) having a thickness less than 100 nanometers.

12. The VCSEL device of claim 11, wherein the intrinsic layer (141) is disposed in an antinode of a standing wave pattern in the optical resonator during operation of the VCSEL device.

13. An optical sensor comprising a vertical cavity surface emitting laser device according to any preceding claim.

14. A method of fabricating a vertical cavity surface emitting laser device, the method comprising:

a base body (110) is arranged,

providing a first electrical contact (105), wherein the first electrical contact (105) and the further electrical contact are arranged to be able to provide an electrical driving current for electrically pumping the vertical cavity surface emitting laser device,

a first distributed bragg reflector (115) is provided,

an active layer (120) is provided such that a first distributed Bragg reflector (115) is arranged between the active layer (120) and the base body (110),

arranging a first portion (125) of a second distributed Bragg reflector such that the active layer (120) is arranged between the first distributed Bragg reflector (115) and the first portion (125), wherein the first portion (125) comprises at least one pair of first dyad layers having different refractive indices, wherein the at least one pair of first dyad layers is of a second conductivity type,

providing a second portion (135) of a second distributed Bragg reflector, wherein the second portion (135) comprises at least one pair of second dyads having different refractive indices, wherein the at least one pair of second dyads is of a first conductivity type different from the second conductivity type,

providing a third portion (145) of the second distributed Bragg reflector, wherein the third portion (145) comprises at least one third pair of layers having different refractive indices, wherein the at least one third pair of layers is of the second conductivity type,

a light absorbing structure (140) of the photodiode is arranged between the second portion (135) and the third portion (145), wherein the light absorbing structure (140) is arranged outside a current path of the electrical driving current,

-providing a third electrical contact (130),

providing a fourth electrical contact (150), wherein the third electrical contact (130) and the fourth electrical contact (150) are arranged to be able to electrically contact the photodiode, wherein the further electrical contact is the second electrical contact (127), the method further comprising electrically contacting the first portion (125) through the second electrical contact (127) and the second portion (135) through the third electrical contact (130), and separating the second electrical contact (127) and the third electrical contact (130) through the semiconductor layer structure.

Technical Field

The present invention relates to a Vertical Cavity Surface Emitting Laser (VCSEL) device with an integrated photodiode. The invention also relates to a corresponding method of manufacturing such a VCSEL device.

Background

WO2009/136348a1, corresponding to US2011/0064110a1, discloses a vertical cavity surface emitting laser device comprising a VCSEL having a monolithically integrated photodiode arranged between a substrate and a first Distributed Bragg Reflector (DBR) of the VCSEL. The photodiode is formed by a layer sequence of a first n-doped region, a p-doped region, an intrinsic region and a second n-doped region of semiconductor material. The photodiode and the laser share a common electrode realized as an ohmic n-contact at said first n-doped region.

US5757837A discloses a VCSEL configured with an intracavity quantum well photodetector. EP0993087a1 discloses a combination of a light-emitting device and a photodetector having such a structure: the layer of the photodetector in contact with the light emitting device has a semiconductor conductivity type polarity opposite to that of the light emitting device. US5892786A discloses an intracavity sensor based output power control for microcavity light emitting devices.

Disclosure of Invention

It is an object of the present invention to provide an improved vertical cavity surface emitting laser device with an integrated photodiode.

According to a first aspect, a Vertical Cavity Surface Emitting Laser (VCSEL) device is provided. The VCSEL device includes a first electrical contact, a base, a third electrical contact, a fourth electrical contact, and an optical resonator. The optical resonator includes a first Distributed Bragg Reflector (DBR), a photodiode, a second DBR, and an active layer for emitting light. The active layer is disposed between the first DBR and the second DBR. The first DBR may be disposed between the substrate and the active layer. The second DBR includes a first portion, a second portion, and a third portion. The first portion includes at least one pair of dyad layers having different refractive indices. The at least one pair of pairs of layers is characterized as being of the second conductivity type. The second portion includes at least one pair of dyads having different refractive indices. The at least one pair of pairs of layers is characterized by a first conductivity type different from a second conductivity type. The third portion includes at least one pair of dyads having different refractive indices. The at least one pair of dyad layers of the third portion is characterized as being of the second conductivity type. The light absorbing structure of the photodiode is disposed between the second portion and the third portion. The first electrical contact and the further electrical contact are arranged to be able to provide an electrical driving current to electrically pump the optical resonator. The light absorbing structure is arranged outside the current path of the electrical driving current. The third electrical contact and the fourth electrical contact are arranged to be able to electrically contact the photodiode. The further electrical contact may be a third electrical contact or a further second electrical contact.

The arrangement of the light absorbing structure between the second and third portions of the second (upper as seen from the distance to the substrate) DBR of the photodiode may reduce the absorption of the light spontaneously emitted by the active layer compared to prior art solutions. Thus, the signal-to-noise ratio can be improved. Furthermore, the processing can be simplified and in particular the processing time can be reduced, since it is avoided to etch back (through a few micrometers of semiconductor material) to contact the photodiode, which is usually placed in the first (lower seen from the distance to the substrate) DBR. Finally, the electrical isolation between the active layer and the photodiode can be improved by arranging the light absorbing structure outside the current path for the driving current for electrically pumping the active layer.

The second DBR may include four, five, or more portions. Each of the pairs of layers may be characterized by a thickness of one quarter of the emission wavelength of the VCSEL device in the respective material of the layer. VCSEL devices may include other layers such as current distribution layers and current confinement layers (e.g., oxide apertures). Each of the layers may include two, three, four, or more sub-layers of the build layer. The active layer may, for example, comprise a plurality of sub-layers building a quantum well structure or layer.

VCSEL devices can be bottom emitters (lasing through the first DBR or through the substrate) or top emitters (lasing away from the first DBR or substrate).

According to one embodiment, the substrate, or more particularly the semiconductor substrate (e.g., gallium arsenide substrate) and the first DBR may be of the first conductivity type. According to an alternative embodiment, the substrate may be substantially electrically non-conductive. The matrix may, for example, comprise or consist of an undoped semiconductor material. The concentration of the material for the n-doped or p-doped semiconductor material in the undoped semiconductor is preferably less than 10¹⁷/cm³. Contamination of the corresponding semiconductor material by any doping material (background doping) may not be avoided.

The first conductivity type may be characterized as having an n-doped material and the second conductivity type may be characterized as having a p-doped material.

The further electrical contact is a further second electrical contact. A second electrical contact electrically contacts the first portion. A third electrical contact electrically contacts the second portion. The second electrical contact and the third electrical contact are separated by the semiconductor layer structure. The semiconductor layer structure may be, for example, a material of the first conductivity type.

The provision of a separate and further second electrical contact between the first electrical contact and the second electrical contact may also improve the electrical isolation between the electrical drive current provided by means of the first electrical contact and the second electrical contact and the e.g. self-mixing interferometric sensor signal generated by the photodiode, which may be measured via the third electrical contact and the fourth electrical contact.

The semiconductor layer structure may be an isolation structure arranged to electrically isolate the third electrical contact from the second electrical contact. The isolation structure provides electrical isolation but does not provide optical isolation. The isolation structure is thus substantially transparent in the wavelength range of the emission wavelength of the VCSEL structure. The isolation structure may be a separate semiconductor layer structure disposed between the first portion of the second DBR and the second portion of the second DBR.

The isolation structure may include at least one pair of pairs of layers. Each of the one or more pairs of layers includes a first layer having a first refractive index and a second layer having a second refractive index different from the first refractive index. The first and second layers may be quarter-wave layers that contribute to the reflectivity of the second DBR. The isolation structure may increase the distance between the active layer and the absorption structure of the photodiode. Accordingly, the thickness of the isolation structure in the direction perpendicular to the active layer may reduce the probability of detecting light spontaneously emitted through the active layer due to an increase in the distance between the active layer and the photodiode.

The at least one pair of layers comprised by the isolation structure may for example comprise undoped semiconductor material to increase the electrical isolation. This results in a strong heterogeneous shift in the energy band diagram that can increase the electrical isolation between the second electrical contact and the third electrical contact.

The material of the first layer may comprise a first aluminum concentration and the material of the second layer comprises a second aluminum concentration lower than the first aluminum concentration, wherein the aluminum concentration determines the refractive index of the respective layer, wherein an interface between the first layer and the second layer, wherein the first aluminum concentration changes to the second aluminum concentration, is characterized as having a thickness of less than lnm. The sharp grading between the first layer and the second layer supports electrical isolation. Sharp grading may be limited by surface roughness and production tolerances.

The isolation structure may alternatively or additionally comprise a plurality of pairs of layers comprising first and second layers, wherein at least two of the first layers are of a first conductivity type and wherein at least two of the second layers are of a second conductivity type. The isolation structure may for example comprise alternating p-n-p-n (or n-p-n-p) doping to increase the electrical isolation.

The second electrical contact may be in electrical contact with a highly conductive p-doped contact layer arranged in a node of a standing wave pattern of the optical resonator during operation of the VCSEL device. The highly conductive p-doped contact layer may be characterized as having a thickness preferably greater than 10¹⁹/cm³More preferably greater than 10²⁰/cm³The carbon doping concentration of (c). The high conductivity of the p-doped contact layer can provide good current distribution across the active layer. Placing a highly doped p-doped contact layer in the nodes of the standing wave pattern may avoid or at least reduce laser mode absorption that occurs during operation of the VCSEL device.

The further electrical contact may alternatively be a third electrical contact. The third electrical contact is in electrical contact with the first portion of the second DBR. The junction between the first portion of the second DBR and the second portion of the second DBR may be a pn junction disposed between the third electrical contact and the fourth electrical contact. The pn-junction is contacted in the forward direction (direction bias) during operation of the VCSEL device. The pn junction may increase the electrical isolation between the electrical drive current used to pump the active layer of the VCSEL device and the photodiode.

According to one embodiment, the VCSEL device may be arranged to be able to emit laser light through or in the direction of the substrate (bottom emitter). A doped matrix (e.g. an n-doped GaAs matrix, which is commonly used because it is available in high quality) may cause absorption of the laser light. Therefore, it may be preferable to thin the substrate or alternatively use an undoped semiconductor substrate to reduce the absorption of the laser light. In this case, the VCSEL device may include a first current distribution layer disposed between the base and the first DBR. The first current distribution layer is electrically connected to the first electrical contact. The first electrical contact is typically an n-contact of the active layer of the VCSEL device. The first current-distributing layer is characterized by a high electrical conductivity (e.g. a high n-doping). The absorption of the laser light may be reduced by arranging the first current distributing layer in a node of a standing wave pattern of the VCSEL device. Alternatively, the matrix may be partially or even completely removed after processing the VCSEL device.

The third portion of the second DBR may comprise pairs of layers of different refractive index, preferably between 2 and 20 pairs of layers of different refractive index, more preferably between 5 and 15 pairs of layers of different refractive index and most preferably between 8 and 12 pairs of layers of different refractive index. For example, AlGaAs (Al)_xGa_(1-x)As) layer may vary between 15% and 90% Al concentration to provide different refractive indices. The paired layers of the second DBR increase the intensity of the intra-cavity standing wave pattern.

The second portion of the second DBR may include at least two dyad layers of the first conductivity type. The first and second portions of the second DBR may include more pairs of layers of different refractive index than the third portion of the second DBR. As the distance between the active layer and the absorbing structure increases, the intensity of light spontaneously emitted by the active layer may be reduced as the number of pairs of layers increases.

The absorbing structure may comprise an intrinsic layer having a thickness of less than 100 nm. The intrinsic layer of the photodiode may comprise an undoped absorbing semiconductor having a low bandgap, for example undoped GaAs. The absorbing structure may be placed such that it is located in the antinode (maximum) of the standing wave pattern in the laser cavity to have a high absorption of the laser light during operation of the VCSEL device. A representative thickness of the absorbing structure may be 100 nm. Placing a relatively thin absorbing structure in an antinode of the standing wave pattern may increase the likelihood of laser light absorption compared to absorption of light spontaneously emitted by the active layer. A disadvantage of a thin absorbing layer may be a relatively high capacity, limiting the switching speed of the VCSEL device. Thus, according to an alternative embodiment, the absorbing structure may be characterized by having a thickness that covers two, three or more antinodes of the standing wave pattern within the laser cavity. An increase in the thickness of the absorbent structure can reduce the capacity, but it can make this design more sensitive to self-luminescence, since the total absorption of self-luminescence increases with increasing thickness of the absorbing layer.

The VCSEL device may be comprised by an optical sensor. The optical sensor may be comprised by a mobile communication device. Optical sensors can be used for distance detection, speed detection, particle density detection (PM 2.5 measurement), gesture control and all sensor applications based in particular on self-mixing interferometry.

According to another aspect, a method of fabricating a VCSEL device with an integrated photodiode is provided. The method comprises the following steps:

the base body is arranged on the base body,

providing a first electrical contact, wherein the first electrical contact and the further electrical contact are arranged to be able to provide an electrical driving current to electrically pump the VCSEL device,

a first DBR is provided which has a first DBR,

an active layer is provided such that the first DBR is disposed between the active layer and the substrate,

providing a first portion of the second DBR such that the active layer is arranged between the first DBR and the first portion, wherein the first portion comprises at least one pair of dyads having different refractive indices, wherein the at least one pair of dyads is characterized by a second conductivity type,

providing a second portion of the second DBR, wherein the second portion includes at least one pair of dyads having different refractive indices, wherein the at least one pair of dyads is characterized as being of a first conductivity type different from the second conductivity type,

providing a third portion of the second DBR, wherein the third portion includes at least one pair of dyads having different refractive indices, wherein the at least one pair of dyads is characterized as being of a second conductivity type,

a light absorbing structure of the photodiode is arranged between the second portion and the third portion, wherein the light absorbing structure is arranged outside a current path of the electric drive current,

a third electrical contact is provided which,

providing a fourth electrical contact, wherein the third and fourth electrical contacts are arranged to be able to electrically contact the photodiode,

wherein the further electrical contact is a second electrical contact (127), the method further comprising electrically contacting the first portion (125) through the second electrical contact (127) and the second portion (135) through the third electrical contact (130), and separating the second electrical contact (127) and the third electrical contact (130) by the semiconductor layer structure.

These steps need not be performed in the order given above. The different layers may be deposited by epitaxial methods, such as MOCVD, MBE, etc. The matrix may be removed in a subsequent processing step.

It shall be understood that the VCSEL device and the method of manufacturing a VCSEL device according to any of the embodiments described above have similar and/or identical embodiments, in particular as defined in the dependent claims.

It shall be understood that preferred embodiments of the invention may also be any combination of the dependent claims with the respective independent claims.

Further advantageous embodiments are defined below.

Drawings

These and other aspects of the invention are apparent from and will be elucidated with reference to the embodiments described hereinafter.

The invention will now be described by way of example based on embodiments with reference to the accompanying drawings.

In the drawings:

fig. 1 shows a schematic diagram of a first VCSEL device with integrated photodiode.

Fig. 2 shows a schematic diagram of a second VCSEL device with integrated photodiode.

Fig. 3 shows a schematic diagram of a third VCSEL device with integrated photodiode.

Fig. 4 shows a schematic diagram of a part of the standing wave pattern of the fourth VCSEL device in relation to the layer arrangement of the integrated photodiode.

Fig. 5 shows a schematic diagram of a top view of a fifth VCSEL device with integrated photodiode.

Fig. 6 shows an equivalent circuit of a fifth VCSEL device.

Fig. 7 shows a schematic diagram of a sixth VCSEL device with integrated photodiode.

FIG. 8 illustrates one embodiment of an optical sensor.

Fig. 9 illustrates one embodiment of a mobile communication device including an optical sensor.

Fig. 10 shows a schematic diagram of a process flow of a method of manufacturing a VCSEL according to the present invention.

In the drawings, like reference numerals refer to like elements throughout. The objects in the drawings are not necessarily to scale.

Detailed Description

Various embodiments of the invention will now be described with the aid of the accompanying drawings.

Fig. 1 shows a schematic diagram of a first VCSEL device with integrated photodiode. The first VCSEL is a top-emitting VCSEL device that emits laser light in a direction away from the base 110 as indicated by the arrow. The substrate 110 comprises n-doped gallium arsenide. The first electrical contact 105 is disposed on the bottom side of the base 110. The first electrical contact 105 is an n-contact of the active layer 120 of the VCSEL device. A first DBR 115 is disposed on the top side of the base 110, the first DBR 115 including 40 pairs of layers having a first refractive index and a second refractive index. The pair of layers of the first DBR 115 includes n-doped AlGaAs layers. The thickness of the layer is adapted to the emission wavelength of the VCSEL to provide the required reflectivity of more than 99.9%. An active layer 120 is disposed on top of the first DBR 115. The active layer 120 includes a quantum well structure for light generation. An n-current injection layer (not shown) may be disposed between the first DBR 115 and the active layer 120. The first portion 125 of the second DBR is disposed on top of the active layer 120. The first portion 125 of the second DBR includes 15 pairs of layers having the first refractive index and the second refractive index. The pair of layers of the first portion 125 of the second DBR comprises a p-doped A1GaAs layer. The uppermost layer of the first portion 125 of the second DBR is highly conductive and is in contact with the third electrical contact 130. The second portion 135 of the second DBR is disposed on top of the first portion 125 of the second DBR. The second portion 135 of the second DBR includes a pair of layers having a first refractive index and a second refractive index. The pair of layers of the second portion 135 of the second DBR comprises n-doped AlGaAs layers. The absorbing structure 140 is disposed on top of the second portion 135 of the second DBR. The absorbing structure comprises an intrinsic layer of undoped GaAs having a thickness of 90 nm. The third portion 145 of the second DBR is disposed on top of the absorption layer. The third portion 145 of the second DBR includes eight pairs of layers having the first refractive index and the second refractive index. The pair of layers of the third portion 145 of the second DBR comprises a p-doped AlGaAs layer. A fourth electrical contact 150, for example an annular fourth electrical contact 150, is provided on top of the third portion 145 of the second DBR. The fourth electrical contact 150 is a p-contact of the photodiode constructed by the third electrical contact 130, the fourth electrical contact 150 and the intermediate semiconductor layer. In this embodiment of the VCSEL device, the third electrical contact 130 is a p-contact of the active layer 120. The photodiode is in indirect contact by means of the third electrical contact 130 and the fourth electrical contact 150. The doping order of the different structures of the VCSEL device ( different portions 125, 135, 145 of the first DBR 115 and the second DBR) may be different in case of a p-doped matrix 110 (expensive) or an undoped matrix 110, which may be used in the case of a bottom emitter (see below). The polarity of the electrical contacts may be adjusted according to the doping sequence of the different structures.

Fig. 2 shows a schematic diagram of a second VCSEL device with integrated photodiode. The construction of the second VCSEL device is similar to that described in relation to figure 1. The main difference is that the electrical contacts of the light emitting part of the VCSEL device are separated from the electrical contacts of the photodiode. The first portion 125 of the second DBR is in contact with a second electrical contact 127. A second electrical contact 127 is disposed on top of the uppermost high p conductive layer of the first portion 125 of the second DBR. The second electrical contact 127 is the p-contact of the laser cavity. The third electrical contact 130 is provided on top of one, preferably high n, conductive layer of the second portion 135 of the second DBR, which is preferably arranged in a node of the standing wave pattern to reduce light absorption. The third electrical contact 130 is an n-contact of a photodiode arranged between the third electrical contact 130 and the fourth electrical contact 150. At least one intermediate layer (e.g., a pair of layers having different refractive indices) is present between the second electrical contact and the third electrical contact to increase electrical insulation between the light emitting portion and the light detecting portion of the VCSEL device.

Fig. 3 shows a schematic diagram of a third VCSEL device with integrated photodiode. The construction of the third VCSEL device is similar to that described in relation to figure 2. The main difference is that there is an isolation structure 128 disposed between the first portion 125 of the second DBR and the second portion 135 of the second DBR. The isolation structure 128 is arranged to increase the electrical isolation between the light emitting portion of the VCSEL device and the light detecting portion of the VCSEL device. The isolation structure 128 may be arranged such that interference with light emission by means of the VCSEL device is avoided. The isolation structure 128 may be arranged to be able to support the reflectivity of the second DBR. In this embodiment, the isolation structure 128 of the third VCSEL device includes a pair of layers of undoped semiconductor material (e.g., Al with different Al contents)_xGa_(1-x)As layer). Two of the pairs of layers have different refractive indices and a thickness of one quarter of the emission wavelength of the VCSEL device. The isolation structure 128 therefore contributes to the reflectivity of the second DBR, and in this case may be considered to be part of the second DBR. The use of substantially undoped semiconductor material avoids or at least reduces optical losses.

Fig. 4 shows a schematic diagram of a part of the standing wave pattern of the fourth VCSEL device in relation to the layer arrangement of the integrated photodiode. The fourth VCSEL device is also a top emitter as discussed with respect to fig. 1-3. The fourth VCSEL device comprises an n-doped GaAs substrate and Al with an aluminum content that varies as a function of the distance 203 from left to right to the laser facet as shown by the y-axis showing the aluminum concentration 201_xGa_(1-x)And an As layer. Fig. 4 shows an upper part of the semiconductor layer stack discussed in fig. 1 to 3 starting with the fourth electrical contact 150 shown on the left side of fig. 4. The fourth electrical contact 150 is in electrical contact with the highly p-doped cap layer and constitutes the anode contact of the photodiode. The cap layer terminates in the opposite phase so that the grating 148 can be processed using a grating etch process to achieve the polarization sensitive reflectivity of the second DBR. The grating is part of the third portion 145 of the second DBR, the third portion 145 of the second DBR further comprising (from left to right in fig. 4) Al with different refractive indices_xGa_(1-x)Some p-doped DBR layers at the graded interface between the As layers. For VCSEL devices emitting laser light with an emission wavelength of 850nm, the Al concentration may vary between 15% and 90%, as shown by the aluminum profile 211. In this embodiment, the number of pairs of layers in the third portion 145 of the second DBR is 10. The absorption structure 140 is disposed between the third portion 145 of the second DBR and the second portion 135 of the second DBR. The absorption structure 140 comprises an absorption layer of the photodiode, which is an intrinsic layer 141 having a thickness of 120nm and comprising undoped absorbing GaAs with a low band gap. The intrinsic layer 141 is placed such that it is located in the antinode (maximum) of the standing wave pattern 213. The second portion 135 of the second DBR follows under the photodiode (absorption structure 140) and comprises n-doped pairs of Al with different refractive indices_xGa_(1-x)An As layer to continue the second DBR of the VCSEL structure. The second portion 135 of the second DBR comprises, after the two pairs of layers, an interrupted structure within the pairs of layers in the second DBR. The interrupted structure is an intrinsic layer for stopping the etching to provide the n-contact of the photodiode, i.e. the third electrical contact 130. In this embodiment, the material is low in aluminum (e.g., 15% AlGas). The intrinsic layer is thick enough to cope with the diffusion of etch non-uniformities. The intrinsic layer has a thickness of n x λ/2 (where n is 1, 2, 3 … …), and λ is the emission wavelength of the VCSEL device within the material of the intrinsic layer. The photodiode cathode contact (third electrical contact 130) of the photodiode will be placed in this intrinsic layer (see, for example, the description of fig. 5). It should be noted that the diffusion in the etch will translate into a different contact location for the contact between the intrinsic layer and the third electrical contact 130. Since the materials are the same, the contact quality is not dependent on the location and the actual etch depth. The isolation structure 128 is disposed between the second portion 135 of the second DBR and the first portion 125 of the second DBR. The isolation structure 128 includes two pairs of undoped Al having different aluminum concentrations and thicknesses of one-quarter of the emission wavelength of the VCSEL device_xGa_(1-x)A layer of As. Undoped Al_xGa_(1-x)The As layer contributes to the reflectivity of the second DBR and ensures electrical isolation between the photodiode of the VCSEL device including the active layer (not shown) and the light emitting part. Second oneThe additional interruption structure of the DBR is disposed at the right (or lower) end of the isolation structure 128. The interruption structure comprises a thin AlAs layer with a thickness of e.g. 4nm, which in this embodiment is used to provide an etch stop to cope with uncertainties in the dry etch process that may be used to open the semiconductor layer stack to provide the second electrical contact 127 on top of the first portion 125 of the second DBR. The thickness of the intrinsic layer directly above the AlAs layer is designed to enable the dry etch to stop in this layer. The dry etch should stop just above the thin AlAs layer (the intrinsic layer has a thickness of n x λ/2, where n is 1, 2, 3 … …, and λ is the emission wavelength of the VCSEL device within the material of the intrinsic layer, as discussed above). After dry etching, a selective wet chemical etch is used to stop on the AlAs layer. The wet chemical etch process requires a high selectivity to AlAs. Citric acid may be used for this purpose. After wet chemical etching, the etch depth is uniform across the wafer due to the fact that it stops selective to AlAs. A highly p-doped contact layer is provided below the AlAs layer. The contact layer is placed in the node of the standing wave pattern 213 so that high doping does not result in strong laser mode absorption. The contact layer is designed to be able to serve as a contact layer for the second electrical contact 127(VCSEL anode contact). As described above, the first portion 125 of the second DBR is below the contact layer and includes p-doped paired Al_xGa_(1-x)And an As layer. The aluminum concentration of the layers having high and low refractive indices may be the same or may be different in the first portion 125, the second portion 135, or the third portion 145 of the second DBR. The remaining structure may be similar to that discussed with respect to fig. 1-3.

Fig. 5 shows a schematic diagram of a top view of a fifth VCSEL device with integrated photodiode. The semiconductor layer structure of the fifth VCSEL device is similar to that discussed with respect to fig. 3. A first electrical contact (n-contact) 105 of the light emitting structure of the VCSEL device is arranged on the back side of the base body and is in contact with a first bond pad, not shown in fig. 5. The second bond pad 327 deposited on the planarization layer contacts the second electrical contact 127 of the VCSEL device via the lower etch structure 364 to the p-contact layer of the light emitting structure of the VCSEL device. The third bond pad 330 contacts the third electrical contact 130 of the VCSEL device via an underetched structure 362 to the n-contact bulk layer of the photodiode of the VCSEL device. The fourth bond pad 350 contacts the top fourth electrical contact 150, i.e., the p-contact of the photodiode of the VCSEL device. Fig. 5 shows an additional lower etch structure 366 to an aperture layer (not shown in fig. 1-4) for providing a current aperture for confining current in the second DBR.

Fig. 6 shows an equivalent circuit of a fifth VCSEL device. The light emitting laser diodes of the VCSEL device are contacted by means of the first bonding pad 325 and the second bonding pad 327. The photodiode is contacted by means of the third bonding pad 330 and the fourth bonding pad 350. Electrical isolation between the laser diode and the photodiode is provided by means of an isolation structure (not shown) as discussed in fig. 3 and 4.

Fig. 7 shows a schematic diagram of a sixth VCSEL device with integrated photodiode. The sixth VCSEL device is a bottom emitting VCSEL device comprising two VCSELs with integrated photodiodes arranged on the same substrate 110. The sixth VCSEL device is a bottom emitter that emits laser light (indicated by arrows) through the substrate 110. Each of the VCSELs with integrated photodiodes includes a first DBR 115, an active layer 120, a first portion 125 of a second DBR, a second electrical contact 127, an isolation structure 128, a third electrical contact 130, a second portion 135 of the second DBR, an absorbing structure 140, a third portion 145 of the second DBR and a fourth electrical contact 150 similar to those discussed with respect to fig. 3. The conductivity types of the different portions 125, 135, 145 of the first DBR 115 and the second DBR are the same as discussed with respect to fig. 3. The first DBR includes 30 pairs of layers with alternating refractive indices to provide a reflectivity of 98.5% to enable lasing through the substrate 110. The first portion 125 of the second DBR comprises 20 pairs of layers with alternating refractive indices to increase the reflectivity of the second (top) DBR. The isolation structure 128 comprises three pairs of layers having alternating refractive indices, wherein each of the layers comprises a pn junction. Thus, the isolation structure 128 includes six layers having a conductivity type in the order of n-p-n-p-n-p starting with the layer of the isolation structure 128 attached to the first portion 125 of the second DBR. The second portion 135 of the second DBR comprises a further seven pairs of layers with alternating refractive indices. The third section 145 of the second DBR comprises a further ten pairs of layers with alternating refractive indices such that the second DBR is characterized by a reflectivity of more than 99.95% in the wavelength range of the emission wavelength of the VCSEL device. Finally, the second DBR of each VCSEL with integrated photodiode is completely covered by the fourth electrical contact 150 to provide the p-contact of the photodiode. An n-type common first current distribution layer 106 is arranged between the first DBR 115 of the two VCSELs with integrated photodiodes and the base body 110. The first current distributing layer 106 is arranged in a node of the standing wave pattern and is contacted by means of the first electrical contact 105. The substrate 110 comprises undoped gallium arsenide to reduce optical losses. The laser light is emitted via an optical structure 112 (e.g., a microlens) attached to or etched in the lower surface of the substrate 110 (the surface opposite the surface on which the semiconductor layer is deposited). The second electrical contact 127 may be a common p-contact of the laser diodes such that all laser diodes emit laser light simultaneously. The common contacts may enable a very compact design of such a VCSEL array. The second electrical contact 127 may alternatively be an individually addressable p-contact of the laser diode, such that each VCSEL may be individually addressed to emit laser light. The fourth electrical contacts 150 may be contacted by means of flip-chip bumps to individually read out the photodiode of each VCSEL. The VCSEL device may include a two-dimensional array of VCSELs with integrated photodiodes. The combination of the semiconductor layer structure discussed with respect to fig. 1 in the bottom emission array configuration discussed with respect to fig. 7 with the common first electrical contact and the common third electrical contact (without the second electrical contact) may enable a dense package with a 20 μm pitch between adjacent VCSELs with integrated photodiodes. Only two contact pads are required to contact the n-contact (first electrical contact) and the third electrical contact (p-contact of the laser diode and n-contact of the photodiode) of the laser diode. Such laser arrays may comprise 5 x 5, 6 x 6, 8 x 10, etc. laser diodes with integrated photodiodes and may be used in combination with suitable optics, for example for self-mixing interferometric sensors.

Fig. 8 shows a cross section of an optical sensor 300 according to a first embodiment. The optical sensor 300 is arranged to be able to determine the presence, distance and movement of an object by means of self-mixing interferometry. The optical sensor 300 includes the VCSEL device 100, the transmissive window 310, and the drive circuit 320 for electrically driving the VCSEL device 100 as discussed above. The driver circuit 320 is electrically connected to the VCSEL device 100 to provide power to the VCSEL device 100 in a defined manner. The driver circuit 320 includes a memory device for storing data and instructions for operating the driver circuit 320 and a processing unit for executing data and instructions for operating the driver circuit 320. The optical sensor 300 further comprises an analytical evaluator 323. The photodiodes included by the VCSEL device 100 are arranged to be able to determine variations in the standing wave pattern within the laser cavity coupled to the respective photodiodes. The analysis evaluator 323 comprises at least one memory device, for example a memory chip, and at least one processing device, for example a microprocessor. The analytical evaluator 323 is adapted to receive electrical signals from the VCSEL device 100 and optionally from the drive circuit 320 to determine a distance or motion of one or more objects based on interference of the laser light 315 reflected by the respective object (reflected laser light 317) and the optical standing wave within the respective laser cavity. Optical sensors may be used for particle detection (e.g., air quality), distance/velocity measurements, or user interfaces.

Fig. 9 shows a schematic diagram of a mobile communication device 380 comprising an optical sensor 300. The optical sensor 300 may be used, for example, in conjunction with a software application running on the mobile communication device 380. The software application may use the optical sensor 300 for sensing applications. Such sensing applications may be, for example, self-mixing interference (SMI) sensors, particle sensors, or gesture-based user interfaces.

Fig. 10 shows a schematic diagram of a process flow of a method of manufacturing a VCSEL according to the present invention. In step 410, the substrate 110 is provided. In step 415, the first electrical contact 105 is set. The first electrical contact 105 and the further electrical contact are arranged to be able to provide an electrical driving current to electrically pump the VCSEL device to emit laser light. In step 420, a first distributed bragg reflector 115 is disposed. In step 425, the active layer 120 is disposed such that the first distributed bragg reflector 115 is disposed between the active layer 120 and the base 110. The first portion 125 of the second distributed bragg reflector may be disposed in step 430 such that the active layer 120 is disposed between the first distributed bragg reflector 115 and the first portion 125. The first portion 125 includes at least one pair of layers having different refractive indices. The at least one pair of layers is characterized by a second conductivity type. In step 435, the second portion 135 of the second distributed bragg reflector is disposed. The second portion 135 includes at least one pair of layers having different refractive indices. The at least one pair of layers is characterized by a first conductivity type different from a second conductivity type. In step 440, the third portion 145 of the second distributed bragg reflector is disposed. The third portion 145 includes at least one pair of layers having different refractive indices. The at least one pair of layers is characterized by a second conductivity type. In step 445, the light absorbing structure 140 of the photodiode is disposed between the second portion 135 and the third portion 145. The light absorbing structure 140 is arranged outside the current path of the electrical driving current. In step 450, the third electrical contact 130 is provided. In step 455, the fourth electrical contact 150 is provided. The third and fourth electrical contacts 130, 150 are arranged to be able to electrically contact the photodiode.

The provision of electrical contacts may comprise one or more than two steps of etching down to the respective contact layers using a suitable etching technique (dry etching, wet etching, etc.) as described above in relation to figure 4. The fabrication process may also include an oxidation process to provide an oxide aperture in each VCSEL of the VCSEL device. The manufacturing process may also include a passivation or planarization process to provide a smooth surface for depositing the bond pads (see, e.g., fig. 5). The substrate 110 may be polished after deposition of the semiconductor layers of the VCSEL structure. The n-contacts of the VCSEL diode may be provided on the thinned back side of the base 110 after thinning or grinding the base 110.

The layers of the first DBR, the active layer and any other layers that are current injection layers, etc. may be deposited by an epitaxial method, such as MOCVD or MBE.

While the invention has been illustrated and described in detail in the drawings and foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive.

Other modifications will be apparent to persons skilled in the art upon reading this disclosure. Such modifications may involve other features which are already known in the art and which may be used instead of or in addition to features already described herein.

Variations to the disclosed embodiments can be understood and effected by those skilled in the art from a study of the drawings, the disclosure, and the appended claims. In the claims, the word "comprising" does not exclude other elements or steps, and the singular form does not exclude the plural elements or steps. The mere fact that certain measures are recited in mutually different dependent claims does not indicate that a combination of these measures cannot be used to advantage.

Any reference signs in the claims shall not be construed as limiting the scope of the claims.

List of reference numerals:

105 first electric contact

106 first current distribution layer

110 base body

112 optical structure

115 first DBR

120 active layer

125 first portion of the second DBR

127 second electrical contact

128 isolation structure

130 third electrical contact

135 second portion of the second DBR

140 absorbent structure

141 intrinsic layer

145 third portion of the second DBR

148 grating

150 fourth electrical contact

201 aluminum concentration

203 to laser facet distance

211 aluminum distribution

213 standing wave pattern

300 optical sensor

310 transmission window

315 emitting laser

317 reflection laser

320 driving circuit

323 analysis evaluator

325 first bonding pad

327 second bonding pad

330 third bond pad

350 fourth bond pad

362 underetch structure to photodiode cathode contact layer

364-UNDER ETCHING STRUCTURE TO VCSEL ANODE CONTACT LAYER

366 to the lower etch structure of the aperture layer

380 mobile communication device

410 step of disposing a substrate

415 step of setting a first electrical contact

420 step of setting the first DBR

425 step of providing source layer

430 step of setting the first portion of the second DBR

435 step of setting the second portion of the second DBR

440 step of disposing a third portion of the second DBR

445 step of disposing a light absorbing structure

450 setting the third electrical contact

455 setting fourth Electrical contact