阅读说明：本技术 基于to封装的绿光单管的光纤耦合半导体激光器模块 (TO-packaging-based optical fiber coupling semiconductor laser module with green light single tube ) 是由 林学春 娄博杰 赵鹏飞 于海娟 于 2019-09-26 设计创作，主要内容包括：一种光纤耦合半导体激光器模块,包括：若干个绿光单管半导体激光器、快轴准直镜、慢轴准直镜、小45度反射镜、大45度反射镜、夹具以及耦合聚焦镜；其中,在每一个所述绿光单管半导体激光器发出的激光光束的光路上依次设置有用于对光束进行准直的快轴准直镜和慢轴准直镜、用于使光束彼此成为平行等间距的小45度反射镜和大45度反射镜、用于使所有光束聚焦为耦合光束的耦合透镜,所述耦合光束进入光纤中；所述光纤耦合半导体激光器模块使用的单管为TO封装。本发明的基于TO封装的绿光单管的光纤耦合半导体激光器模块具有体积小、功率高、易调节等优点。(A fiber coupled semiconductor laser module comprising: the device comprises a plurality of green light single-tube semiconductor lasers, a fast axis collimating mirror, a slow axis collimating mirror, a small 45-degree reflecting mirror, a large 45-degree reflecting mirror, a clamp and a coupling focusing mirror; the laser system comprises a single-tube semiconductor laser, a plurality of single-tube semiconductor lasers, a plurality of coupling lenses, a plurality of single-tube semiconductor lasers and a plurality of single-tube semiconductor lasers, wherein a fast-axis collimating mirror and a slow-axis collimating mirror for collimating beams, a small 45-degree reflecting mirror and a large 45-degree reflecting mirror for enabling the beams to be parallel and equidistant, and the coupling lenses for enabling all the beams to be focused into coupling beams are sequentially arranged on a; the single tube used by the optical fiber coupling semiconductor laser module is TO encapsulation. The TO-packaged single-tube optical fiber coupling semiconductor laser module based on the green light has the advantages of small volume, high power, easiness in adjustment and the like.)

1. A fiber coupled semiconductor laser module, comprising: the device comprises a plurality of green light single-tube semiconductor lasers, a fast axis collimating mirror, a slow axis collimating mirror, a small 45-degree reflecting mirror, a large 45-degree reflecting mirror, a clamp and a coupling focusing mirror;

the laser system comprises a single-tube semiconductor laser, a plurality of single-tube semiconductor lasers, a plurality of coupling lenses, a plurality of single-tube semiconductor lasers and a plurality of single-tube semiconductor lasers, wherein a fast-axis collimating mirror and a slow-axis collimating mirror for collimating beams, a small 45-degree reflecting mirror and a large 45-degree reflecting mirror for enabling the beams to be parallel and equidistant, and the coupling lenses for enabling all the beams to be focused into coupling beams are sequentially arranged on a;

the single tube used by the optical fiber coupling semiconductor laser module is TO encapsulation.

2. The fiber-coupled semiconductor laser module of claim 1, wherein the green single-tube semiconductor lasers are placed in the jig and connected in series.

3. The fiber coupled semiconductor laser module of claim 1, wherein the clamp dimensions are length: 5.0cm-6.0cm wide: 1.3cm-1.5cm height: 1.2cm-1.5 cm;

preferably, the clamp is made of brass, and the back of the green light single tube is tightly connected with the clamp to enhance heat dissipation.

4. The fiber-coupled semiconductor laser module of claim 1, wherein the green-light single-tube semiconductor lasers are arranged at equal intervals along a fast axis direction (horizontal direction) and are arranged at equal heights along a slow axis direction (vertical direction), and light beams emitted by the green-light single-tube semiconductor lasers do not interfere with each other.

5. The fiber-coupled semiconductor laser module of claim 1, wherein the fast axis collimating mirror is an array of aspherical mirrorsThe back working distance is larger than 1.0mm, and the focal length of the aspherical mirror needs to meet the following requirements: f is not less than 2.6mm_f≤3.1mm；

Preferably, the slow axis collimating lens is a bi-cylindrical lens array, and the focal length of the bi-cylindrical lens needs to satisfy the condition that f is more than or equal to 35.0mm_s≤41.0mm。

6. The fiber coupled semiconductor laser module of claim 1, wherein the reflectivity R of the reflective film coated by the small 45 degree mirror is > 99%;

preferably, the reflectance R of the reflection film plated on the large 45-degree reflector is more than 99%.

7. The fiber-coupled semiconductor laser module of claim 1, wherein the green single-tube semiconductor laser outputs a column of parallel and equally spaced combined beams after passing through the small 45-degree mirror, thereby achieving spatial beam combination in the fast axis direction; the power of the light beam is the superposition of the collimated powers of the three green light single tubes.

8. The fiber-coupled semiconductor laser module of claim 1, wherein the green single-tube semiconductor laser passes through the small 45-degree mirror and then is reflected by the large 45-degree mirror, and the direction of the light beam is deflected by 180 degrees compared with the original direction, thereby reducing the space volume.

9. The fiber-coupled semiconductor laser module of claim 1, wherein the coupling lens has a clear aperture value in the range of 11.0mm to 13.0mm and a numerical aperture NA of 0.2 or less.

10. The fiber-coupled semiconductor laser module of claim 1, wherein the green single-tube semiconductor laser is reflected by the small 45-degree reflector and the large 45-degree reflector and focused by the coupling lens, and then a focused light spot enters the optical fiber with a core diameter of 50 μm and a numerical aperture of 0.2.

Technical Field

The invention relates TO the technical field of semiconductor lasers, in particular TO a TO-packaging-based optical fiber coupling semiconductor laser module with a green light single tube.

Background

Semiconductor lasers have the advantages of high photoelectric conversion efficiency, small size, high reliability, long service life and the like, and therefore, the semiconductor lasers are paid much attention since the advent. Nowadays, the laser therapy, laser cladding, laser welding, laser display, solid-state laser pumping and the like play more and more important roles. The development of semiconductor lasers is not balanced. Near infrared lasers (wavelength: 9XXnm) are developing relatively rapidly. The output power of a single light emitting unit has been increased to several tens of watts. The multi-single-tube system constructed by various combination technologies can reach output power of tens of kilowatts. However, visible light semiconductor lasers have been developed more slowly than near-infrared lasers. Especially, the direct green semiconductor laser light emitting unit has been difficult to make a major breakthrough. Until 2009 Osram (germany), Nichia (japan) and Sumitomo (japan) succeeded in breaking the "500 nm limit" and in achieving a truly green LD (wavelength 532nm) based on InGaN. In 2013, the maximum output power of a single tube produced by Nichia (Japan) has reached 1W. The power of the green light single tube which is commercially available at present is 1 w. In recent years, industrial applications as well as solid-state laser pumping sources have increased the demand for higher power green semiconductor Laser Diodes (LDs).

In order to meet the industrial requirement, the output power can be increased by a beam combination method. At present, the main methods for combining beams of semiconductor lasers include coherent beam combination and incoherent beam combination. Coherent beam combination, also known as array phase lock, can effectively improve and enhance the beam quality of the output light of the semiconductor laser array. However, this technique requires that each light emitting unit of the semiconductor laser array lases with the same spectrum, and also requires control of the phase relationship between the units to ensure that a beneficial interference can be generated, so that the technique has extremely high requirements on the stability of the ambient temperature and the precision of the instrument, is complicated in process, and cannot easily obtain a high-power stable output of the in-phase supermode. The incoherent beam combining technology is a main beam combining method of a semiconductor laser in the world at present, and is mainly used for combining multiple paths of semiconductor lasers into one beam by methods of spatial beam combining, wavelength beam combining, polarization beam combining and the like, so that the output power is increased, and the purpose of improving the system brightness is achieved. Although the incoherent beam combination technology cannot obtain an output beam close to a diffraction limit, the incoherent beam combination technology has no phase, spectrum and frequency requirements, is easy to debug and is relatively simple to operate.

Disclosure of Invention

In view of the above, the main object of the present invention is TO provide a TO package-based green monotube fiber-coupled semiconductor laser module, which is intended TO at least partially solve at least one of the above technical problems.

In order TO achieve the above object, the present invention provides a TO package-based optical fiber coupled semiconductor laser module with a green monotube, comprising: the device comprises a plurality of green light single-tube semiconductor lasers, a fast axis collimating mirror, a slow axis collimating mirror, a small 45-degree reflecting mirror, a large 45-degree reflecting mirror, a clamp and a coupling focusing mirror;

the laser system comprises a single-tube semiconductor laser, a plurality of single-tube semiconductor lasers, a plurality of coupling lenses, a plurality of single-tube semiconductor lasers and a plurality of single-tube semiconductor lasers, wherein a fast-axis collimating mirror and a slow-axis collimating mirror for collimating beams, a small 45-degree reflecting mirror and a large 45-degree reflecting mirror for enabling the beams to be parallel and equidistant, and the coupling lenses for enabling all the beams to be focused into coupling beams are sequentially arranged on a; the single tube used by the optical fiber coupling semiconductor laser module is TO encapsulation.

The green light single-tube semiconductor laser is placed in the clamp, and the green light single-tube semiconductor lasers are connected in series.

Wherein the clamp size is long: 5.0cm-6.0cm wide: 1.3cm-1.5cm height: 1.2cm-1.5 cm;

preferably, the clamp is made of brass, and the back of the green light single tube is tightly connected with the clamp to enhance heat dissipation.

The green light single-tube semiconductor laser is arranged at equal intervals along the fast axis direction (horizontal direction), and is arranged at equal height along the slow axis direction (vertical direction), and light beams emitted by the green light single-tube semiconductor laser do not interfere with each other.

Wherein, fast axle collimating mirror is aspherical mirror array, and aspherical mirror's back working distance is greater than 1.0mm, and aspherical mirror's focus needs to satisfy: f is not less than 2.6mm_f≤3.1mm；

Preferably, the slow axis collimating lens is a bi-cylindrical lens array, and the focal length of the bi-cylindrical lens needs to satisfy the condition that f is more than or equal to 35.0mm_s≤41.0mm。

Wherein the reflectivity R of the reflecting film plated on the small 45-degree reflector is more than 99 percent;

preferably, the reflectance R of the reflection film plated on the large 45-degree reflector is more than 99%.

The green light single-tube semiconductor laser outputs a row of parallel combined beams at equal intervals after passing through the small 45-degree reflector, so that spatial beam combination is realized in the fast axis direction; the power of the light beam is the superposition of the collimated powers of the three green light single tubes.

The green light single-tube semiconductor laser passes through the small 45-degree reflector and then is reflected by the large 45-degree reflector, and the direction of the light beam is deflected by 180 degrees compared with the original direction, so that the space volume is reduced.

The range of the light transmission aperture value of the coupling lens is 11.0mm-13.0mm, and the numerical aperture NA is less than or equal to 0.2.

And after the green light single-tube semiconductor laser is reflected by the small 45-degree reflector and the large 45-degree reflector and focused by the coupling lens, focusing light spots enter an optical fiber with the core diameter of 50 mu m and the numerical aperture of 0.2.

Based on the technical scheme, compared with the prior art, the TO-packaged single-tube green light fiber-coupled semiconductor laser module at least has one part of the following beneficial effects:

(1) the TO-packaged green light single tube-based optical fiber coupling semiconductor laser module has the advantages of small volume, high power, easiness in adjustment and the like;

(2) after the combined light beam is acted by the coupling lens, the combined light beam is focused and coupled into a smaller light beam which is coupled into an optical fiber with the core diameter of 50 mu m, and the combined light beam has the advantage of high brightness;

(3) the laser module of the invention has simple structure and easy operation.

Drawings

Fig. 1 is a schematic structural diagram of an optical fiber coupling semiconductor laser module with three green light single tubes according to an embodiment of the present invention;

fig. 2 is a schematic view of a single tube placed in a copper block holder according to an embodiment of the present invention.

In the above drawings, the reference numerals have the following meanings:

1. a green light single-tube semiconductor laser; 2. A fast axis collimating mirror;

3. a slow axis collimating mirror; 4. A small 45 degree height mirror;

5. large 45 degree height mirrors; 6. A coupling focusing lens;

7. an optical fiber; 8. A copper block clamp;

9. the light emitting size of the single tube.

Detailed Description

In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.

The invention utilizes the step prism to realize spatial beam combination, namely, the reflector is used for placing along different positions to rearrange the light beams emitted in the same direction, thereby realizing spatial beam combination. The method has the advantages of strong operability, convenient debugging, linear increase of power and the like, but for the optical fiber determined by a certain parameter, the maximum number of the single tubes which can be coupled by spatial beam combination is determined, namely the power is limited by spatial beam combination, so that the maximum number of the single tubes which can be coupled is determined by calculation, and thus, larger power output is realized.

After being collimated, the three single tubes are respectively reflected by three 45-degree reflectors, and the three small 45-degree reflectors are arranged at equal intervals along the oblique line direction. After reflection, a group of light beams which are arranged at equal intervals can be obtained, the positions of the three small reflectors are adjusted, the intervals among the light beams can be changed, and dead zones among single tubes are reduced, so that the filling factor of space beam combination is improved. After being spatially combined, the optical fiber can be coupled into an optical fiber with the core diameter of 50 mu m and the NA of 0.2.

The invention discloses an optical fiber coupling semiconductor laser module of a green light single tube based on TO encapsulation. Comprises a TO packaged 1w continuous green light single tube, a fast axis collimating mirror, a slow axis collimating mirror, a copper block clamp, a light-emitting diode (LED) and a light-emitting diode (LED) which are produced by Nissan Hitachi,A large mirror, a small mirror, and a coupling lens. And placing the three green light single-tube semiconductor lasers in the same height and at equal intervals in a copper block clamp. And a fast axis collimating mirror and a slow axis collimating mirror are fixed in front of each green light single-tube semiconductor laser. The three green light single-tube semiconductor lasers all emit a line of light beams which are collimated by the fast and slow axes, and the light beams are output into a line of parallel combined light beams at equal intervals after passing through the small reflector and the large reflector. The combined beam is focused and coupled into the optical fiber by the coupling lens. Because the distance between the TO-packaged green light single-tube light-emitting unit and the exit window is 1mm, and the inherent astigmatism exists between the fast axis and the slow axis of the light-emitting unit, the fast axis collimating mirror and the slow axis collimating mirror need TO be designed for collimation respectively. The fast axis collimating lens uses an aspheric lens, and the focal length needs to satisfy f is less than or equal to 2.6mm_fLess than or equal to 3.1mm and the rear working distance is more than 1 mm. And the slow axis collimating mirror is a positive and negative column lens group. The combined focal length of the lens group needs to satisfy the condition that f is more than or equal to 35.0mm_sThe size of the collimated light spot is about 2.2mm to 2.6mm on the fast axis and about 6.8mm to 7.8mm on the slow axis. After collimation, the three green light single tubes are arranged at equal intervals in the fast axis direction, the small reflecting mirror is used for enabling the three light beams to deflect 90 degrees, and the distance between the light beams in the fast axis direction is changed by moving the position of the small reflecting mirror, so that the three light beams are closely connected and do not overlap with each other. Therefore, the three independent light beams can be combined into one light beam to realize beam combination, and the integral size of the combined light spot is about 7.2mm multiplied by 7.0 mm. The combined light spot is reflected by the large reflector again, the whole light beam deflects by 90 degrees and is transmitted to the coupling focusing mirror, the range of the clear aperture value of the lens is 11.0mm-13.0mm, f/#is2, and NA is less than 0.2. Therefore, after being spatially combined by the three single-tube semiconductor lasers, the optical fiber can be coupled into an optical fiber with the diameter of 50 mu m and the NA of 0.2. The optical fiber coupling system is ingenious in design, and the size of the whole system is reduced by utilizing the two reflectors. The operation is convenient, and the rear working distance of the designed fast axis collimating mirror can reach mm level due to the fact that different lenses are used for respectively collimating fast and slow axes. The fast axis collimating lens is convenient to adhere and can be adhered by using a common five-dimensional adjusting frame. In addition to thisAnd incoherent beam combination methods such as spatial beam combination and the like are adopted to effectively reduce the operation difficulty of beam combination. The final beam is coupled into a 50 μm fiber with an NA of 0.2, and the overall brightness of the coupled system has been increased to MW/cm²Str level. Therefore, the LED lamp has the characteristics of high brightness and the like.

The technical solution of the present invention is further explained by the following specific embodiments with reference to the accompanying drawings.

Referring to fig. 1, a schematic structural diagram of a fiber-coupled semiconductor laser module with a single tube for emitting three green lights includes: the single-tube green light semiconductor laser comprises a single-tube green light semiconductor laser 1, a fast axis collimating mirror 2, a slow axis collimating mirror 3, a small 45-degree height reflecting mirror 4, a large 45-degree height reflecting mirror 5, a coupling focusing lens 6, an optical fiber 7, a copper block clamp 8 and a single-tube light emitting size 9.

Referring to fig. 1 and 2, the three green-light single-tube semiconductor lasers 1 are arranged at equal intervals along the left and right sides in the horizontal direction (fast axis direction). In the vertical direction, the green light single-tube semiconductor lasers 1 are arranged at equal intervals and equal height on the copper block clamp 8. The fast axis collimating lens 2 and the slow axis collimating lens 3 are sequentially fixed in front of each linear array semiconductor laser 1, the fast axis collimating lens 2 is an aspheric lens array, and the slow axis collimating lens 3 is a double-column lens array. The fast axis collimating lens 2 is used for reducing the divergence angle of the light beam in the fast axis direction, so that the light beam in the fast axis direction is collimated, and the working distance between the fast axis collimating lens and the light emitting size 9 of a single tube is larger than 1.0mm. The slow axis collimating mirror 3 is configured to reduce a divergence angle of a light beam in a slow axis direction, so that the light beam in the slow axis direction is collimated, that is, a light beam emitted by each of the green single-tube semiconductor lasers 1 passes through the fast axis collimating mirror 2 and the slow axis collimating mirror 3 and then is converted into a column of parallel elliptical light beams, each of the linear array semiconductor lasers 1 and the fast axis collimating mirror 2 and the slow axis collimating mirror 3 fixed in front of the green single-tube semiconductor laser 1 form a beam combining unit, and in this embodiment, there are 3 beam combining units in total.

Three parallel light beams emitted by the three beam combination units are arranged at equal intervals along the oblique line direction by the three small 45-degree height reflectors 4 under the action of the three small 45-degree height reflectors 4. After reflection, a group of light beams which are arranged at equal intervals can be obtained, the positions of the three small reflectors are adjusted, the intervals among the light beams can be changed, dead zones among single tubes are reduced, and the filling factor of space beam combination is improved. Meanwhile, the direction of the light beam deflects by 90 degrees, the direction of the combined light beam deflects by 90 degrees again under the action of the large 45-degree height reflecting mirror 5, and the combined light beam enters the coupling focusing lens 6. After the action of the coupling focusing lens 6, the combined beams emitted by the 3 beam combining units are converged on the end face of the optical fiber. The light is converged to form a convergent light beam, and the convergent point is a.

The invention provides a TO packaging-based green light single-tube semiconductor laser spatial beam combining method, wherein three green light single-tube semiconductor lasers are arranged at equal intervals along a fast axis direction and three single tubes are arranged at equal heights along a slow axis direction, and emergent light beams are not interfered with each other. And the fast axis collimating mirror and the slow axis collimating mirror are sequentially fixed in front of each green light single-tube semiconductor laser. Each green light single-tube semiconductor laser emits a line of light beams collimated by a fast-slow axis, the light beams output a line of parallel combined light beams with equal intervals after passing through the small 45-degree reflector and the large 45-degree reflector, and the output laser power is increased by three times of that of a single light-emitting unit due to the increase of the number of the coupled single-tube semiconductor lasers. While the beam direction is deflected 180 degrees. Has the advantages of small volume, high power, easy adjustment, etc. And after the combined light beam is acted by the coupling lens, the combined light beam is focused and coupled into a smaller light beam and is coupled into an optical fiber with the core diameter of 50 mu m and the NA of 0.2. Therefore, the system has the advantages of high brightness, easy operation and the like.

The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.