阅读说明：本技术 一种称量装置及具有其的蒸发源设备 (Weighing device and evaporation source equipment with same ) 是由 徐义 *** 于 2019-03-29 设计创作，主要内容包括：本发明公开了一种称量装置及具有其的蒸发源设备,其中称量装置包括：承载部,承载部的一端用于与待称量物连接,承载部的至少一部分为弹性元件；调节部,设置在基体上,调节部与承载部的另一端连接,用于在弹性元件的伸缩方向上调节承载部的位置；反馈部,设置在基体上,用于反馈承载部的位置信息。通过调节部和反馈部的配合,用户可以操作调节部使得调节部运动的距离与弹性元件伸缩的距离一致,即弹性元件的长度的变化量,进而得到了与弹性元件的长度的变化量对应地待称量物的重量变化量,该过程不会直接对待称量物进行测量,因此待称量物可以全程处于密封或高压等极端化境下。(The invention discloses a weighing device and an evaporation source device with the same, wherein the weighing device comprises: one end of the bearing part is used for being connected with an object to be weighed, and at least one part of the bearing part is an elastic element; the adjusting part is arranged on the base body, is connected with the other end of the bearing part and is used for adjusting the position of the bearing part in the telescopic direction of the elastic element; and the feedback part is arranged on the base body and is used for feeding back the position information of the bearing part. Through the cooperation of regulating part and feedback portion, the user can operate the regulating part and make the distance of regulating part motion unanimous with the flexible distance of elastic element, the change of elastic element's length promptly, and then obtained and waited to weigh the weight change volume of thing with the change of elastic element's length correspondingly, this process can directly not be waited to weigh the thing and measure, consequently waited to weigh the thing and can be in under extreme circumstances such as sealed or high pressure in the whole journey.)

1. A weighing apparatus, comprising:

the weighing device comprises a bearing part (10), wherein one end of the bearing part (10) is used for being connected with an object to be weighed, and at least one part of the bearing part (10) is an elastic element (15);

the adjusting part (20) is arranged on the base body, and the adjusting part (20) is connected with the other end of the bearing part (10) and is used for adjusting the position of the bearing part (10) in the telescopic direction of the elastic element (15);

and the feedback part is arranged on the base body and is used for feeding back the position information of the bearing part (10).

2. The weighing apparatus according to claim 1, wherein the feedback part comprises a sensor (30), the carrier part (10) in the activated position activating the sensor (30).

3. The weighing apparatus according to claim 2, further comprising a linkage (40) connected to the carrier (10) and arranged to follow the carrier (10), the linkage (40) comprising a trigger for triggering the sensor (30).

4. A weighing apparatus according to claim 2 or 3, wherein the sensor (30) comprises a pressure sensor, the carrier (10) in the activated position being moved upwards, the pressure sensor being out of the activated state; or the bearing part (10) at the triggering position moves downwards, and the pressure sensor is separated from the triggering state.

5. A weighing device according to claim 1, characterized in that the carrier part (10) comprises a contact part (11) connected to the object to be weighed, which contact part is made of a heat-resistant material.

6. The weighing apparatus according to claim 1, wherein the carrier (10) comprises:

a contact part (11) connected with the object to be weighed;

a support portion to which the contact portion (11) is connected, the elastic element (15) being connected to the support portion and extending in a direction away from the contact portion (11).

7. A weighing apparatus according to claim 6, wherein the support comprises a grid (12) and feet (13), the feet (13) protruding from the grid (12) at an end remote from the contact portion (11).

8. A weighing device according to claim 7, characterized in that the support (12) further comprises a tray (14), the tray (14) being arranged transversely on the grid (12), the resilient element (15) being connected to the tray (14).

9. An evaporation source apparatus comprising a crucible (100), a heating device (200) and a sealed chamber (300), the crucible (100) being disposed within the heating device (200), the heating device (200) being disposed within the sealed chamber (300), characterized in that the evaporation source apparatus further comprises a weighing device according to any one of claims 1 to 8, a carrying portion (10) of the weighing device being connected to the crucible (100), an adjusting portion (20) of the weighing device being disposed on a bottom wall of the sealed chamber (300), the feedback portion being disposed on an inner wall of the sealed chamber (300).

10. The evaporation source apparatus according to claim 9, wherein the heating device (200) is provided with guide ribs (201) on its inner wall for guiding the crucible (100) when the crucible (100) is moved.

Technical Field

The invention relates to the technical field of vapor deposition, in particular to a weighing device and evaporation source equipment with the same.

Background

Vapor deposition is a process of forming a metallic, non-metallic or compound coating on the surface of a workpiece by using physical and chemical processes occurring in the vapor phase. The vapor deposition includes physical vapor deposition, which is to generate gas phase metal particles through processes of evaporation, ionization or sputtering and the like, and deposit the gas phase metal particles on the surface of a workpiece to form a film layer.

Vapor deposition is mostly performed in a vacuum environment, for example, fig. 1 and 2 show an evaporation source apparatus for vapor deposition in which a crucible 100' is used to contain a metal or nonmetal material as an evaporation source; the crucible 100 ' is disposed in a heating device 200 ', the heating device 200 ' being for heating the crucible 100 ' and evaporating the material in the crucible 100 '; the heating device 200 ' is arranged in the sealed cabin 300 ', the sealed cabin 300 ' is in a vacuum environment, and the heating device 200 ' and the crucible 100 ' work in the vacuum environment; the open end of the sealed cabin 300 'is connected with the evaporation chamber 400, the material in the crucible 100' is evaporated into gas state and then enters the evaporation chamber 400, and reacts with the substrate in the evaporation chamber 400 to be deposited on the substrate, and a coating is formed on the substrate.

In the gas phase deposition process, the material in the crucible 100 'is gradually reduced until it is completely consumed, but since the crucible 100' is disposed in the sealed chamber 300 'and the inside is in a high temperature state, it cannot be weighed in a conventional manner, i.e., it is difficult to grasp the state of the remaining amount of the material in the crucible 100'. In the prior art, the amount of residual materials in the current crucible 100' can only be roughly estimated according to the production time and the later weighing of the common residual amount, so that the setting of heating power according to the source weight at the initial debugging stage is not facilitated, and the accurate calculation of evaporation cut-off time at the later stage is also not facilitated, namely, the waste caused by insufficient evaporation amount at the earlier stage and the waste caused by the insufficient evaporation amount of materials at the later stage are caused.

Disclosure of Invention

In order to solve the technical problem, the invention provides a weighing device and an evaporation source device with the same. Wherein weighing device includes: one end of the bearing part is used for being connected with an object to be weighed, and at least one part of the bearing part is an elastic element; the adjusting part is arranged on the base body, is connected with the other end of the bearing part and is used for adjusting the position of the bearing part in the telescopic direction of the elastic element; and the feedback part is arranged on the base body and is used for feeding back the position information of the bearing part.

Further, the feedback part comprises a sensor, and the bearing part in the triggering position triggers the sensor.

Further, the weighing device also comprises a connecting rod which is connected with the bearing part and is arranged along with the bearing part, and the connecting rod comprises a triggering part for triggering the sensor.

Further, the sensor comprises a pressure sensor, the bearing part at the triggering position moves upwards, and the pressure sensor is separated from the triggering state; or the bearing part at the triggering position moves downwards, and the pressure sensor is separated from the triggering state.

Further, the bearing part comprises a contact part connected with the object to be weighed, and the contact part is made of a heat-resistant material.

Further, the bearing part includes: the contact part is connected with an object to be weighed; the supporting part is connected with the contact part, and the elastic element is connected with the supporting part and extends towards the direction far away from the contact part.

Further, the supporting part comprises a grid and a foot, and one end of the foot, which is far away from the contact part, protrudes out of the grid.

Furthermore, the supporting part also comprises a tray body, the tray body is transversely arranged on the grating, and the elastic element is connected with the tray body.

According to another aspect of the present invention, there is also provided an evaporation source apparatus, comprising a crucible, a heating device and a sealed chamber, wherein the crucible is disposed in the heating device, the heating device is disposed in the sealed chamber, the evaporation source apparatus further comprises the above-mentioned weighing device, the bearing portion of the weighing device is connected to the crucible, the adjusting portion of the weighing device is disposed on the bottom wall of the sealed chamber, and the feedback portion is disposed on the inner wall of the sealed chamber.

Furthermore, the inner wall of the heating device is provided with a guide rib which is used for guiding the crucible when the crucible moves.

Through the matching of the adjusting part and the feedback part, a user can operate the adjusting part to enable the movement distance of the adjusting part to be consistent with the telescopic distance of the elastic element, namely the length variation of the elastic element, so that the weight variation of the object to be weighed corresponding to the length variation of the elastic element is obtained, the object to be weighed cannot be directly measured in the process, therefore, the object to be weighed can be in an extreme environment such as sealing or high pressure in the whole process, and the weight of the object to be weighed in the environment can be measured in real time by using the weighing device provided by the invention.

Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

Drawings

The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the example serve to explain the principles of the invention and not to limit the invention.

Fig. 1 is a schematic structural view of an evaporation source apparatus in the prior art;

fig. 2 is a side view of the evaporation source apparatus shown in fig. 1;

fig. 3 is a schematic structural view of an embodiment of an evaporation source apparatus including a part of a weighing device according to the present invention;

FIG. 4 is a schematic structural view showing an example of a connection relationship between a crucible and an evaporation chamber of an evaporation source apparatus according to the present invention;

FIG. 5 is a schematic structural view of an embodiment of a connecting portion and a support portion of the weighing apparatus of the present invention;

FIG. 6 is a schematic diagram of a weighing apparatus according to an embodiment of the present invention;

fig. 7 is a schematic cross-sectional view of an embodiment of a crucible and a heating device of an evaporation source apparatus of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.

The use of "first," "second," and similar terms in the present application do not denote any order, quantity, or importance, but rather the terms are used to distinguish one element from another.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

According to an aspect of the present invention, there is provided a weighing apparatus, as shown in fig. 3 to 6, including: the weighing device comprises a bearing part 10, wherein one end of the bearing part 10 is used for being connected with an object to be weighed, and at least one part of the bearing part 10 is an elastic element 15; an adjusting part 20 arranged on the base body, wherein the adjusting part 20 is connected with the other end of the bearing part 10 and is used for adjusting the position of the bearing part 10 in the stretching direction of the elastic element 15; and a feedback part arranged on the base body and used for feeding back the position information of the bearing part 10.

The bearing part 10 of the weighing device comprises the elastic element 15, the elastic element 15 is compressed when being pressed, so that the bearing part 10 can change the position along with the weight change of the object to be weighed, the feedback part can detect and feed back the position information of the bearing part 10, and the adjusting part 20 can also detect and feed back the position information of the bearing part 10 by adjusting the position of the bearing part 10. Therefore, due to the matching of the adjusting part 20 and the feedback part, the user can operate the adjusting part 20 to make the movement distance of the adjusting part 20 consistent with the stretching distance of the elastic element 15, namely, the variation of the length of the elastic element 15, and further obtain the variation of the weight of the object to be weighed corresponding to the variation of the length of the elastic element 15, the object to be weighed cannot be directly measured in the process, so that the object to be weighed can be in an extreme environment such as sealing or high pressure in the whole process, and the weight of the object to be weighed in the environment can be measured in real time by using the weighing device of the invention.

Preferably, the feedback part comprises a sensor 30, the carrier part 10 in the activated position activating the sensor 30.

The sensor 30 is mainly used for feeding back the position information of the carrying part 10, so the sensor 30 can be any one or a combination of more than one of a pressure-sensitive sensor, a travel switch, a photosensitive sensor, a magnetic-sensitive sensor and the like according to different use environments. For example, the pressure-sensitive sensor is suitable for being used in a vacuum environment, and the magnetic-sensitive sensor is not suitable for being used in a strong magnetic field environment.

Preferably, the weighing device further comprises a connecting rod 40 connected with the carrier part 10 and arranged to follow the carrier part 10, the connecting rod 40 comprising a triggering part for triggering the sensor 30.

In the embodiment shown in fig. 6, in order to avoid interference with the elastic element 15, the sensor 30 is located at a distance from the carrier 10, so that the motion state of the carrier 10 is transmitted to the sensor 30 through the link 40, and the link 40 is fixedly connected with the carrier 10 and follows the carrier 10.

More preferably, in this embodiment, the sensor 30 comprises a pressure sensor, the carrier 10 in the activated position being moved upwards, the pressure sensor being out of the activated state.

The sensor 30 is disposed on the bottom plate of the sealed cabin 300 as a base body, when the maximum compression amount of the elastic element 15 is the maximum, the relative position of the bearing part 10 and the connecting rod 40 is closest to the sensor 30, the position of the bearing part 10 and the connecting rod 40 is the initial position, and the weight sensor for pressing the object to be weighed is in a trigger state. As the weight of the object to be weighed is reduced, the elastic member 15 is gradually extended, the load bearing part 10 and the link 40 are away from the sensor 30, and the pressure sensor is released from the trigger state. The load-bearing part 10 and the connecting rod 40 are adjusted to the initial position through the adjusting part 20, the pressure sensor is triggered again, the adjusting distance of the adjusting part 20, namely the extending distance of the elastic element 15, and the change of the weight of the object to be weighed which is in positive correlation with the change of the length of the elastic element 15 can be obtained through the change of the length of the elastic element 15.

In other embodiments, the sensor 30 comprises a pressure sensor, and the carrier 10 in the activated position is moved downward and the pressure sensor is released from the activated state.

This part of the embodiment is not shown in the drawings, but the pressure sensor can be located at the side wall or the ceiling of the base body at the same distance as the embodiment in fig. 6.

Preferably, the load bearing part 10 includes a contact part 11 connected with the object to be weighed, the contact part being made of a heat-resistant material.

If the weighing apparatus is used to measure the weight change of the crucible 100 in the evaporation source device, the receiving portion 10 is directly contacted with the crucible 100 through the high temperature resistant contact portion 11 in order to prevent the high temperature of the crucible 100 from affecting other components of the weighing apparatus, and the contact portion 11 also plays a role of heat insulation. The material of the contact portion 11 is preferably graphite.

Preferably, the carrier 10 comprises: a contact part 11 connected with an object to be weighed; the supporting portion, the contact portion 11 is connected, and the elastic member 15 is connected with the supporting portion and extends in a direction away from the contact portion 11.

The support part, to which the elastic element 15 is connected, and preferably also the connecting rod 40 in the above-described embodiment, can be made of a more ductile and less expensive metal material, since the contact part 11 serves as a heat insulation.

As shown in fig. 3 to 6, if the position of the adjusting part 20 is too low and the compression amount of the elastic element 15 is large, the supporting part will first contact with the bottom plate of the sealed chamber 300, and support the crucible 100, so that the crucible 100 is maintained at a reasonable position, and the normal operation of the evaporation source apparatus is guaranteed.

Preferably, the support portion comprises a grille 12 and a leg 13, one end of the leg 13 remote from the contact portion 11 protruding out of the grille 12.

The grid 12 is a metal thin-wall structure, and the metal thin-wall structure has poor heat conduction, so that the downward transfer of heat of the contact part 11 can be blocked. The support legs 13 are used to contact the bottom plate of the sealed chamber 300, if necessary, and serve to support the crucible 100.

More preferably, the support 12 further comprises a tray 14, the tray 14 being arranged transversely on the grid 12, the elastic element 15 being connected to the tray 14.

In the embodiment shown in fig. 4 and 5, the tray 14 is disposed in the middle of the grille 12. In other embodiments, which are not shown in the drawings, the tray 14 is disposed at the end of the grille 12 connected to the feet 13, i.e., between the grille 12 and the feet 13.

As can be seen in the embodiments shown in fig. 3 and 6, there is a distance between the tray 14 and the bottom of the foot 13, so that at least a part of the resilient element 15 is located in the space between the tray 14 and the bottom of the foot 13. In a preferred embodiment, the distance between the tray 14 and the bottom of the feet 13 is greater than or equal to the shortest length of the resilient member 15, which protects the resilient member 15 from failure due to excessive contraction of the resilient member 15.

Preferably, the adjusting part 20 is a screw. Specifically, a rod body with a thread pair is provided, a handle convenient for screwing is provided at one end extending out of the sealed cabin 300, the rod body is connected with a threaded hole formed on the sealed cabin 300 through the thread pair, and the rod body and the sealed cabin 300 are sealed through a corrugated pipe.

More preferably, the screw is provided with scale marks to facilitate reading.

According to another aspect of the present invention, there is also provided an evaporation source apparatus, as shown in fig. 3 to 7, including a crucible 100, a heating device 200, and a sealed chamber 300, the crucible 100 being disposed in the heating device 200, the heating device 200 being disposed in the sealed chamber 300, the evaporation source apparatus further including the above-mentioned weighing device, a carrying portion 10 of the weighing device being connected to the crucible 100, an adjusting portion 20 of the weighing device being disposed on a bottom wall of the sealed chamber 300, and a feedback portion being disposed on an inner wall of the sealed chamber 300.

As shown in fig. 3 and 4, the crucible 100 is disposed in the heating device 200, the heating device 200 is disposed in the sealed chamber 300, the upper end of the sealed chamber 300 is connected to the evaporation chamber 400, the upper opening of the sealed chamber 300 is communicated with the inner cavity of the evaporation chamber 400, and the material in the crucible 100 is heated and evaporated by the heating device 200, enters the evaporation chamber 400, reacts with the substrate in the evaporation chamber 400, and is deposited on the substrate to form a plating layer on the substrate.

By adopting the weighing device, the staff can detect the weight change of the crucible 100 and the material in real time in the operation process of the evaporation source equipment, namely can detect the amount of the residual material in the crucible 100, so that whether the evaporation amount of the material reaches the standard or not can be accurately judged to carry out deposition reaction, and when the material is supplemented can be mastered, thereby improving the utilization rate of the material and avoiding the waste of the base material.

Preferably, the heating device 200 is provided with guide ribs 201 on the inner wall thereof for guiding the crucible 100 when the crucible 100 is moved.

In the embodiment shown in fig. 7, since the crucible 100 may be lifted slightly when the crucible 100 is weighed by the weighing apparatus of the present invention, the inner wall of the heating apparatus 200 is provided with guide ribs 201 for positioning and guiding the crucible 100, and the guide ribs 201 are preferably made of graphite material, and are resistant to high temperature and wear.

The evaporation source apparatus of the present invention can be applied to a manufacturing line of a solar cell panel as a part of vapor deposition apparatuses such as Mo deposition, CIGS deposition, CBD deposition, and the like.

Although the embodiments of the present invention have been described above, the above description is only for the convenience of understanding the present invention, and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.