阅读说明：本技术 一种镀膜用冷却设备、镀膜设备、方法及卷对卷薄膜 (Cooling equipment for coating, coating equipment and method and roll-to-roll film ) 是由 张玉春 仲树栋 于 2020-07-09 设计创作，主要内容包括：本申请实施例公开了一种镀膜用冷却设备、镀膜设备、方法及卷对卷薄膜,其中镀膜用冷却设备包括具有冷却气体入口且设于工艺鼓内的至少一个气体循环管路；至少一部分所述气体循环管路嵌入所述工艺鼓内壁且延伸出出口朝向所述工艺鼓外壁上设置的耐磨透气层的至少两个支路,以便对所述耐磨透气层外的柔性基材进行冷却。本申请通过设置采用气体冷却的镀膜用冷却设备,利用气体的快速冷却特点,保证了二次镀膜过程中热量的快速释放,使得两次镀膜过程可以采用相同的速度,进而避免了因速度不同导致膜外观出现MD纹路,两面膜外观不一致的问题。(The embodiment of the application discloses cooling equipment for coating, coating equipment, a method and a roll-to-roll film, wherein the cooling equipment for coating comprises at least one gas circulation pipeline which is provided with a cooling gas inlet and is arranged in a process drum; at least one part of the gas circulation pipeline is embedded into the inner wall of the process drum and extends out of at least two branches of which the outlets face the wear-resistant breathable layer arranged on the outer wall of the process drum, so that the flexible base material outside the wear-resistant breathable layer is cooled. This application utilizes gaseous quick cooling characteristics through setting up the cooling arrangement for the coating film that adopts gas cooling, has guaranteed the thermal quick release in the secondary coating film process for twice coating film process can adopt the same speed, and then has avoided leading to the membrane outward appearance to appear MD line because of the speed difference, the inconsistent problem of two facial mask outward appearances.)

1. The cooling equipment for coating is characterized by comprising at least one gas circulation pipeline which is provided with a cooling gas inlet and is arranged in a process drum; at least one part of the gas circulation pipeline is embedded into the inner wall of the process drum and extends out of at least two branches of which the outlets face the wear-resistant breathable layer arranged on the outer wall of the process drum, so that the flexible base material outside the wear-resistant breathable layer is cooled.

2. The cooling apparatus for coating film according to claim 1, wherein each of said gas circulation lines comprises a gas inlet line extending along the rotation axis of said process drum, a gas cooling line having an end bent toward the inner wall of said process drum and extending a predetermined distance from said inner wall, and an end bent toward the rotation axis of said process drum until communicating with said cooling gas inlet.

3. The cooling apparatus for plating according to claim 2, wherein each of the gas circulation lines has a rectangular shape.

4. The cooling apparatus for plating according to claim 2, wherein all of the gas circulation lines are symmetrically arranged along a center line of the rotation shaft of the process drum.

5. The cooling apparatus for plating according to claim 1, wherein the wear-resistant air-permeable layer is provided with air-permeable through holes.

6. The cooling apparatus for coating film according to claim 1, wherein said wear-resistant air-permeable layer is made of a combination of cast steel and carbon steel.

7. The cooling apparatus for plating a film according to claim 1, further comprising at least one liquid circulation line provided inside the process drum; each liquid circulation pipeline comprises a water inlet pipeline, a water cooling pipeline and a water drainage pipeline; all the liquid circulation pipelines share one water inlet pipeline which is arranged along the rotating shaft of the process drum in an extending mode, the tail end of the water inlet pipeline is bent towards at least two directions of the inner wall of the process drum and extends for a preset distance to form a water cooling pipeline on the inner wall of the process drum, and the tail end of the water cooling pipeline is bent towards the rotating shaft of the process drum and forms a water drainage pipeline along the rotating shaft of the process drum.

8. A coating device, comprising a vacuum cavity, a process drum arranged in the vacuum cavity, a transmission device, a magnetic control target and the cooling device of any one of claims 1 to 7;

the process drum, the cooling device, the film transmission mechanism and the magnetic control target are all arranged in the vacuum cavity, and the transmission device is used for transmitting the flexible base material to the wear-resistant breathable layer on the outer wall of the process drum; the magnetic control targets are distributed on the periphery of the process drum; the cooling device is arranged in the process drum.

9. A plating method characterized by performing plating using the plating apparatus according to claim 8, comprising two plating processes:

the actuator delivering the flexible substrate to the process drum at a first speed;

the magnetron target is used for coating one surface of the flexible substrate at a second speed, and the cooling equipment is used for cooling the flexible substrate;

the transmission device sends the coated flexible base material out of the process drum;

the actuator delivering the flexible substrate to the process drum at a first speed;

the magnetron target is used for coating the other surface of the flexible substrate at a second speed, and the cooling equipment is used for cooling the flexible substrate;

and the transmission device sends the coated flexible substrate out of the process drum.

10. A roll-to-roll film, characterized in that it is prepared by the process of claim 9.

Technical Field

The application relates to the field of optical coating, in particular to cooling equipment for coating, coating equipment, a coating method and a roll-to-roll film.

Background

The roll-to-roll magnetron sputtering coating is a common coating method at present, and equipment for coating comprises a vacuum cavity, a process drum arranged in the vacuum cavity, a magnetron target arranged on the periphery of the process drum, water cooling equipment and a film transmission device. When coating, the film transmission device transmits the film to the outer wall of the process drum, the magnetron sputtering coating is carried out on the film by the magnetron target, and after the coating is finished, the film is carried away from the process drum by the film transmission device.

The film generates high temperature in the magnetron sputtering process, so that the film needs to be cooled by water cooling equipment to reduce stress and ensure the quality of the film.

In many scenarios, the film needs to be coated on both sides. Generally, one surface is coated with a film, and then the other surface is coated with a film after turning. However, the stress is generated on the film in the first film coating process, so that the stress cannot be released in the second film coating process, and the heat in the film coating process cannot be released in time. Therefore, the second coating speed is usually decreased. The disparity in the speeds of the two times before and after the coating causes many problems, such as disparity in the appearance of the two coatings. How to solve the problem is a current problem.

Disclosure of Invention

The application provides a cooling device, a coating device and a method for coating and a roll-to-roll film, which aim to solve the problems in the prior art.

The application provides the following scheme:

in one aspect, a cooling apparatus for coating is provided, the apparatus comprising at least one gas circulation line having a cooling gas inlet and disposed within a process drum; at least one part of the gas circulation pipeline is embedded into the inner wall of the process drum and extends out of at least two branches of which the outlets face the wear-resistant breathable layer arranged on the outer wall of the process drum, so that the flexible base material outside the wear-resistant breathable layer is cooled.

Preferably, each gas circulation pipeline comprises a gas inlet pipeline extending along the rotating shaft of the process drum, and a gas cooling pipeline, wherein the tail end of the gas inlet pipeline bends towards the inner wall of the process drum and extends for a preset distance from the inner wall, and the tail end of the gas cooling pipeline bends towards the rotating shaft of the process drum until being communicated with the cooling gas inlet.

Preferably, each of the gas circulation lines has a rectangular shape.

Preferably, all of the gas circulation lines are symmetrically arranged along a center line of the process drum rotation shaft.

Preferably, the wear-resistant breathable layer is provided with a breathable through hole.

Preferably, the wear-resistant breathable layer is made of a cast steel and carbon steel combination.

Preferably, the apparatus further comprises at least one liquid circulation line arranged inside the process drum; each liquid circulation pipeline comprises a water inlet pipeline, a water cooling pipeline and a water drainage pipeline; all the liquid circulation pipelines share one water inlet pipeline which is arranged along the rotating shaft of the process drum in an extending mode, the tail end of the water inlet pipeline is bent towards at least two directions of the inner wall of the process drum and extends for a preset distance to form a water cooling pipeline on the inner wall of the process drum, and the tail end of the water cooling pipeline is bent towards the rotating shaft of the process drum and forms a water drainage pipeline along the rotating shaft of the process drum.

The application also discloses a coating device, which comprises a vacuum cavity, a process drum arranged in the vacuum cavity, a transmission device, a magnetic control target and the cooling device;

the process drum, the cooling device, the film transmission mechanism and the magnetic control target are all arranged in the vacuum cavity, and the transmission device is used for transmitting the flexible base material to the wear-resistant breathable layer on the outer wall of the process drum; the magnetic control targets are distributed on the periphery of the process drum; the cooling device is arranged in the process drum.

The application further discloses a coating method, which utilizes the coating equipment to carry out coating and comprises two coating processes:

the actuator delivering the flexible substrate to the process drum at a first speed;

the magnetron target is used for coating one surface of the flexible substrate at a second speed, and the cooling equipment is used for cooling the flexible substrate;

the transmission device sends the coated flexible base material out of the process drum;

the actuator delivering the flexible substrate to the process drum at a first speed;

the magnetron target is used for coating the other surface of the flexible substrate at a second speed, and the cooling equipment is used for cooling the flexible substrate;

and the transmission device sends the coated flexible substrate out of the process drum.

A final aspect of the present application discloses a roll-to-roll film prepared by the above method.

According to the specific embodiments provided herein, the present application discloses the following technical effects:

according to the technical scheme, the cooling equipment for the coating is cooled by gas through the arrangement, the rapid cooling characteristic of gas is utilized, the rapid release of heat in the secondary coating process is guaranteed, the same speed can be adopted in the secondary coating process, and the problems that MD grains and appearance inconsistency of secondary coating are caused by different speeds of the membrane surface are avoided.

Furthermore, set up wear-resisting ventilative layer outside the technology drum in this application, guaranteed promptly that flexible substrate can be attached to and not scratched coating film under the prerequisite at technology drum outer wall, be used for the refrigerated gas can see through wear-resisting ventilative layer simultaneously and give off and cool down with the more quick flexible substrate.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a structural view of a coating apparatus of the present application;

FIG. 2 is a sectional view of the coating apparatus of the present application along the direction in which the axis of rotation of the process drum extends.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments that can be derived from the embodiments given herein by a person of ordinary skill in the art are intended to be within the scope of the present disclosure.

The application aims at providing a cooling arrangement for coating film to carry out rapid cooling to the coating film process through gas cooling's mode, thereby guarantee giving off of secondary coating film in-process heat, thereby make the coating film speed of two-sided coating film in-process the same, and then guarantee that the outward appearance of two-sided coating film tends to unanimity.

As shown in fig. 1, the coating apparatus includes a vacuum chamber 11, a process drum 12 disposed in the vacuum chamber, a magnetron target 13 disposed on the periphery of the process drum, and a cooling apparatus (14 is an air cooling apparatus, and in some embodiments, a water cooling apparatus 15 is further included) disposed in the process drum.

As shown in fig. 2, in the embodiment 1 of the present application, the cooling device includes a plurality of (at least one) gas circulation lines 24 having cooling gas inlets 241 and provided in the process drum 21. In order to improve the effect of gas cooling, at least one part of the gas circulation pipeline is embedded into the inner wall of the process drum and extends out of at least two branches 2431 with outlets facing the wear-resistant breathable layer 23 arranged on the outer wall of the process drum, so that the flexible substrate 22 outside the wear-resistant breathable layer is cooled. Wear-resisting ventilative layer has wear-resisting and two functions of breathing freely, and flexible substrate is direct can produce wearing and tearing to flexible substrate in the transmission of technology drum, and the damage of flexible substrate has just been avoided on wear-resisting ventilative layer, and its ventilative function can make gas ooze this layer and cool down flexible substrate simultaneously. For this purpose, a plurality of fine air holes, such as a honeycomb shape, can be arranged on the wear-resistant air-permeable layer.

In a preferred embodiment, the wear-resistant and gas-permeable layer is made of a cast steel, carbon steel in combination, wherein carbon steel accounts for a proportion of not more than 50 wt%. The carbon steel has good air permeability, and the air permeability can be ensured.

In order to optimize the structure and maximize the utilization of the cooling gas, as shown in fig. 2, each of the gas circulation pipes includes a gas inlet pipe 242 extending along the rotation axis of the process drum, a gas cooling pipe 243 having an end bent toward the inner wall of the process drum and extending a predetermined distance from the inner wall, and an end bent toward the rotation axis 211 of the process drum until communicating with the cooling gas inlet 241. In a preferred embodiment, each of the gas circulation lines is substantially rectangular with the end of the gas inlet line near the end of the axis of rotation of the process drum, and the gas cooling line is parallel to the gas inlet line and has a length sufficient to cover the width of the flexible substrate.

In a preferred embodiment, all the gas circulation pipelines are symmetrically arranged along the central line of the rotating shaft of the process drum, and the gas cooling pipelines of all the gas circulation pipelines are circumferentially arranged relative to the rotating shaft of the process drum.

The gas in the gas circulation line may be an inert gas such as argon or helium.

In order to reduce costs, the plant comprises, in the present application, at least one liquid circulation line 25 inside the process drum; each of the liquid circulation lines includes a water inlet line 253 (water inlet 251), a water cooling line 254, and a water discharge line 255; all the liquid circulation pipelines share one water inlet pipeline which is arranged along the process drum rotating shaft 211 in an extending mode, the tail end of the water inlet pipeline is bent towards at least two directions of the inner wall of the process drum respectively and extends for a preset distance on the inner wall of the process drum to form a water cooling pipeline, the tail end of the water cooling pipeline is bent towards the process drum rotating shaft and forms a water drainage pipeline along the process drum rotating shaft, and water is drained through a water drainage outlet 252.

In a preferred embodiment, the liquid circulation line is substantially rectangular. All the liquid circulation pipelines are symmetrically arranged along the central line of the rotating shaft of the process drum, and the liquid cooling pipelines of all the liquid circulation pipelines are circumferentially arranged relative to the rotating shaft of the process drum.

The embodiment 2 of the present application further discloses a coating device, as shown in fig. 1, including a vacuum chamber 11, a process drum 12 disposed in the vacuum chamber, a transmission device 17, a magnetron target 13, and the above-mentioned cooling devices (14 and 15); the process drum, the cooling device, the film transmission mechanism and the magnetic control target are all arranged in the vacuum cavity, and the transmission device is used for transmitting the flexible substrate 16 to the wear-resistant breathable layer on the outer wall of the process drum; the magnetic control targets are distributed on the periphery of the process drum; the cooling device is arranged in the process drum.

The embodiment 3 of the application also discloses a coating method, which utilizes the coating equipment to carry out coating, and comprises two coating processes:

the actuator delivering the flexible substrate to the process drum at a first speed;

the magnetron target is used for coating one surface of the flexible substrate at a second speed, and the cooling equipment is used for cooling the flexible substrate;

the transmission device sends the coated flexible base material out of the process drum;

the actuator delivering the flexible substrate to the process drum at a first speed;

the magnetron target is used for coating the other surface of the flexible substrate at a second speed, and the cooling equipment is used for cooling the flexible substrate;

and the transmission device sends the coated flexible substrate out of the process drum.

The embodiment 4 of the application also discloses a roll-to-roll film, and the roll-to-roll film is prepared by the film coating method. The method specifically comprises the following steps:

the low-resistance conductive layer, the CU layer and the protective layer are sequentially stacked on two sides of the transparent base material; the protective layer is a CU alloy layer or an MO alloy layer; the low-resistance conducting layer is used for conducting electricity, and the resistance of the low-resistance conducting layer is not more than 100 ohms.

The CU alloy layer contains NI, and the NI accounts for 10-90 wt% of the CU alloy layer.

In a preferred embodiment, the protective layer is a blackening layer for blackening the CU layer, and the reflectivity is less than 20.

The single-side stress of the film prepared by the coating equipment is 1-3N/m 2.

The following table 1 shows the comparison result of stress and film appearance under the condition that the speed of two coating processes of double-sided coating is the same in the cooling modes of the prior art and the present application. The following items were tested using detection methods known in the art.

In each embodiment, the properties of the same layer are the same unless otherwise specified.

Thickness of each layer: the total thicknesses of the protective layer (CuNi), the CU layer, the substrate layer (PET layer), the low-resistance conducting layer (ITO) and the IM layer (IM1 and IM2) are respectively 10nm, 200nm, 125um, 90nm and 2.5 um; the coating speed was 3 m/min. Wherein the appearance detection mode adopts visual observation under a 1000Lucas light source; the stress measuring tool selects a force analysis detector. The results are as follows:

therefore, on the premise of adopting the air cooling or the air cooling and water cooling combined mode, the stress of the film is reduced, and on the premise of the same double-sided film coating speed, the MD grains are reduced in the appearance of the double-sided film coating compared with the MD grains in the single water cooling mode.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.