阅读说明：本技术 防附着部件和真空处理装置 (Adhesion-preventing member and vacuum processing apparatus ) 是由 阪上弘敏 大野哲宏 尾崎萌 于 2019-06-12 设计创作，主要内容包括：本发明提供能够抑制在真空处理时从配置于放电空间的防附着部件产生的微粒的技术。本发明是防止在真空处理时产生的物质向真空槽内附着的防附着部件(30),具备框状的防附着主体部件(10)和保持防附着主体部件(10)的保持部件(20)。防附着主体部件(10)具有在基板的周围设置的板状的第一至第四构成部件1-4,并且第一至第四构成部件1-4在与真空槽内的放电空间相向的面相反侧的面上分别设有第一至第四勾挂部,第一至第四勾挂部用于勾挂并安装于在保持部件(20)设置的第一至第四钩部。(The invention provides a technique capable of suppressing particles generated from an anti-adhesion member disposed in a discharge space during vacuum processing. The invention provides an anti-adhesion component (30) for preventing substances generated during vacuum treatment from adhering to a vacuum groove, which comprises a frame-shaped anti-adhesion main body component (10) and a holding component (20) for holding the anti-adhesion main body component (10). The anti-adhesion main body component (10) is provided with first to fourth plate-shaped components (1-4) arranged around the substrate, and the first to fourth components (1-4) are respectively provided with first to fourth hooking parts on the surfaces opposite to the discharge space in the vacuum groove, and the first to fourth hooking parts are used for hooking and being mounted on first to fourth hook parts arranged on the holding component (20).)

1. An adhesion preventing member for preventing adhesion of a substance generated during vacuum processing into a vacuum chamber, comprising:

a frame-shaped adhesion-preventing main body member; and

a holding member that holds the attachment prevention main body member,

the adhesion-preventing main body member has a plurality of plate-like components provided around the object to be processed, and the plurality of components are provided with hooking portions on surfaces opposite to surfaces facing the discharge space in the vacuum chamber, respectively, the hooking portions being adapted to be hooked and attached to a plurality of hook portions provided on the holding member.

2. The adhesion-preventing member according to claim 1, wherein each constituent member of the adhesion-preventing main body member is formed in an elongated shape, and the hooking portion of each constituent member has: a fixing hooking portion that hooks a fixing hook provided on a hook portion of the holding member in a state where the adhesion-preventing main body member is held by the holding member so that the respective constituent members do not move in the longitudinal direction; and a moving hook portion that is hooked to a moving hook provided on the hook portion of the holding member in a state in which each of the constituent members is movable in the longitudinal direction, wherein the fixing hook portion is provided at a central portion of each of the constituent members, and the moving hook portion is provided on both end portions of the constituent member with respect to the fixing hook portion.

3. The adhesion-preventing member according to claim 1, wherein a wall portion for plasma shielding extending toward a surface side facing a discharge space of the vacuum chamber is provided at a peripheral edge portion of each component of the adhesion-preventing body member.

4. The adhesion-preventing member according to any one of claims 1 to 3, wherein a mounting portion to the holding member is provided in a peripheral edge portion of each component member of the adhesion-preventing main body member so as to extend outward with respect to the plasma-shielding wall portion.

5. A vacuum processing apparatus configured to perform a predetermined vacuum process on a processing object disposed in the vicinity of an adhesion preventing member, the vacuum processing apparatus comprising:

a vacuum tank; and

the anti-adhesion component is arranged in the vacuum groove and prevents substances generated during vacuum treatment from adhering to the vacuum groove,

the adhesion preventing member has a frame-shaped adhesion preventing body member and a holding member for holding the adhesion preventing body member,

the anti-adhesion main body component is provided with a plurality of plate-shaped components arranged around the object to be processed,

the plurality of components are provided with hooking portions on surfaces opposite to surfaces facing the discharge space in the vacuum chamber, respectively, and the hooking portions are adapted to be hooked and attached to a plurality of hook portions provided on the holding member.

6. The vacuum processing apparatus according to claim 5, configured to: the sputtering target is disposed in the vacuum chamber, and the target to be processed disposed in the vicinity of the adhesion preventing member is sputtered.

Technical Field

The present invention relates to a technique of an adhesion preventing member used in a vacuum processing apparatus such as a sputtering apparatus.

Background

Conventionally, in such a vacuum processing apparatus, a plate-shaped adhesion preventing member is provided in order to prevent adhesion of a film forming material or the like to a wall surface or the like in a vacuum chamber during vacuum processing such as sputtering.

The anti-adhesion member is provided in the vicinity of a substrate in a discharge space where plasma processing is performed, such as a sputtering apparatus.

In this case, the adhesion preventing member is attached to, for example, a frame-shaped holding member in the vacuum chamber in a direction parallel to the substrate.

Conventionally, such an adhesion preventing member is attached to a holding member using a plurality of bolts.

However, the adhesion preventing member attached to the holding member has various problems.

That is, the deposition material is also deposited on the deposition preventing member during deposition such as sputtering. At this time, the film forming material also adheres to the surface of the bolt, which causes generation of particles. Therefore, a cap for preventing adhesion of the film forming material is attached to each bolt, but the film forming material adhering to the cap also causes generation of particles.

Further, since the adhesion preventing member is attached to the holding member from the discharge space side using a plurality of bolts, particles are generated by friction with the holding member due to the expansion of the adhesion preventing member caused by heat at the time of discharge.

Disclosure of Invention

Problems to be solved by the invention

The present invention has been made in view of the above problems of the prior art, and an object thereof is to provide a technique capable of suppressing generation of particles from an adhesion preventing member disposed in a discharge space during vacuum processing.

Means for solving the problems

The present invention made to achieve the above object is an adhesion preventing member for preventing adhesion of a substance generated during vacuum processing into a vacuum chamber, comprising: a frame-shaped adhesion-preventing main body member; and a holding member for holding the adhesion-preventing body member, wherein the adhesion-preventing body member has a plurality of plate-like components provided around the object to be processed, and the plurality of components are provided with hooking portions on surfaces opposite to surfaces facing the discharge space in the vacuum chamber, respectively, the hooking portions being adapted to be hooked and attached to a plurality of hook portions provided on the holding member.

In the present invention, it is also effective in the following cases: each component of the adhesion-preventing main body member is formed in an elongated shape, and the hooking portion of each component has: a fixing hook portion that hooks the fixing hook provided on the hook portion of the holding member in a state where the adhesion-preventing main body member is held by the holding member so that the respective constituent members do not move in the longitudinal direction; and a moving hook portion that is hooked to a moving hook provided on the hook portion of the holding member in a state where each of the constituent members is movable in the longitudinal direction, wherein the fixing hook portion is provided at a central portion of each of the constituent members, and the moving hook portion is provided at both end portions of the constituent member with respect to the fixing hook portion.

In the present invention, it is also effective in the following cases: a wall for plasma shielding is provided on the peripheral edge of each component of the adhesion preventing body member, extending toward the surface facing the discharge space of the vacuum chamber.

In the present invention, it is also effective in the following cases: an attachment portion to the holding member is provided on a peripheral edge portion of each component of the adhesion-preventing body member so as to extend outward from the plasma-shielding wall portion.

Further, the present invention is a vacuum processing apparatus configured to perform a predetermined vacuum process on a processing object disposed in the vicinity of an adhesion preventing member, including: a vacuum tank; and an anti-adhesion member provided in the vacuum chamber for preventing adhesion of a substance generated during vacuum processing to the vacuum chamber, wherein the anti-adhesion member includes a frame-shaped anti-adhesion body member and a holding member for holding the anti-adhesion body member, the anti-adhesion body member includes a plurality of plate-shaped components provided around a processing object, and the plurality of components are provided with hook portions on surfaces opposite to surfaces facing the discharge space in the vacuum chamber, respectively, and the hook portions are adapted to be hooked and attached to the plurality of hook portions provided on the holding member.

In the present invention, it is also effective in the following cases; the sputtering target is disposed in the vacuum chamber, and the target to be processed disposed in the vicinity of the adhesion preventing member is sputtered.

Effects of the invention

In the present invention, since the hook portions for hooking and attaching to the hook portions provided in the holding member are provided on the surfaces of the plate-like members of the adhesion-preventing main body member on the opposite side to the surfaces facing the discharge spaces in the vacuum grooves, respectively, it is not necessary to use a plurality of bolts with caps in order to hold the adhesion-preventing main body member by the holding member as in the conventional art.

As a result, according to the present invention, since the uneven portion of the surface of the adhesion-preventing member on the discharge space side can be reduced to reduce the surface area thereof, the generation of particles due to the film-forming material or the like adhering during the vacuum treatment peeling off from the surface of the adhesion-preventing member can be suppressed.

In the present invention, each component of the adhesion-preventing body member is formed in an elongated shape, and the hooking portion of each component includes: a fixing hook portion that hooks a fixing hook provided on a hook portion of the holding member in a state where the adhesion-preventing main body member is held by the holding member so that each component does not move in the longitudinal direction; and a moving hooking portion that hooks the moving hooks provided on the hook portions of the holding member in a state in which each of the constituent members is movable in the longitudinal direction, wherein the fixing hooking portion is provided at a central portion of each of the constituent members, and the moving hooking portion is provided at both end portions of the constituent member with respect to the fixing hooking portion.

As a result, according to the present invention, when each of the plurality of components is elongated by heat generated during the vacuum processing, the central portion of each component is uniformly elongated toward both end portions, and therefore, warpage and deformation of the adhesion preventing member during the vacuum processing can be suppressed.

In the present invention, when the peripheral edge portion of each of the constituent members of the adhesion-preventing member is provided with the wall portion for plasma shielding extending toward the surface facing the discharge space of the vacuum chamber, the amount of the substance such as the film-forming material adhering to the surface of the adhesion-preventing member on the discharge space side can be reduced, and therefore, the generation of particles caused by the peeling of the substance from the surface of the adhesion-preventing member can be further suppressed.

Further, in the present invention, the attachment portion for the holding member is provided in the peripheral edge portion of each component of the adhesion-preventing main body member so as to extend outward from the wall portion for plasma shielding, and in this case, even when the adhesion-preventing main body member is attached to the holding member by using a screw in the attachment portion, a substance generated during the vacuum treatment is shielded by the wall portion for plasma shielding provided in the adhesion-preventing main body member, and adhesion of the adhesion-preventing main body member to the attachment portion can be prevented, and generation of fine particles caused by peeling of the substance from the surface of the adhesion-preventing member can be further suppressed.

Drawings

Fig. 1 is a schematic configuration diagram showing an internal configuration of a sputtering apparatus as an example of a vacuum processing apparatus according to the present invention.

Fig. 2(a) and (b) are schematic configuration diagrams showing an example of the adhesion preventing member according to the present invention, fig. 2(a) is a front view seen from the discharge space side, and fig. 2(b) is a front view seen from the opposite side to the discharge space side.

Fig. 3(a) and (b) are schematic configuration diagrams showing an example of the adhesion preventing body member, fig. 3(a) is a front view seen from the discharge space side, and fig. 3(b) is a sectional view taken along line a-a of fig. 3 (a).

Fig. 4 is a front view showing an example of the holding member used in the present invention, as viewed from the discharge space side.

Fig. 5(a) is an explanatory view showing the configuration of the fixing hook portion of the first and second components of the adhesion preventing main body member and the fixing hook of the first and second frame portions of the holding member, and fig. 5(b) is an explanatory view showing the configuration of the moving hook portion of the first and second components of the adhesion preventing main body member and the moving hook of the first and second frame portions of the holding member.

Fig. 6(a) to (d) are sectional views showing the configuration and operation of the main part in the case where the first and second constituent members of the adhesion-preventing main body member are held by the first and second frame portions of the holding member.

Fig. 7(a) is an explanatory view showing the structure of the fixing hook portion in the third and fourth components of the adhesion preventing main body member and the fixing hook in the third and fourth frame portions of the holding member, and fig. 7(b) is an explanatory view showing the structure of the moving hook portion in the third and fourth components of the adhesion preventing main body member and the moving hook in the third and fourth frame portions of the holding member.

Fig. 8(a) to (d) are sectional views showing the configuration and operation of the main part in the case where the third and fourth constituent members of the adhesion-preventing main body member are held by the third and fourth frame portions of the holding member.

Fig. 9 is a front view showing an example of the adhesion preventing member according to the present invention, as viewed from the discharge space side.

Fig. 10 is a perspective sectional view taken along line B-B of fig. 9.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

Fig. 1 is a schematic configuration diagram showing an internal configuration of a sputtering apparatus as an example of a vacuum processing apparatus according to the present invention.

Fig. 2(a) and (b) are schematic configuration diagrams showing an example of the adhesion preventing member according to the present invention, fig. 2(a) is a front view seen from the discharge space side, and fig. 2(b) is a front view seen from the opposite side to the discharge space side.

Fig. 3(a) is a schematic configuration diagram showing an example of the adhesion preventing body member, fig. 3(a) is a front view seen from the discharge space side, and fig. 3(b) is a cross-sectional view taken along line a-a of fig. 3 (a).

As shown in fig. 1, the adhesion-preventing body member 10 of the present embodiment constitutes an adhesion-preventing member 30 used in a sputtering apparatus 40 as a vacuum processing apparatus, and is disposed in a state where it is held by a holding member 20 described later in the vicinity of a substrate 8 (object to be processed) in a vacuum chamber 6.

Here, in this example, the substrate 8 and the sputtering target (hereinafter referred to as "target") 7 are disposed to face each other in a substantially vertical direction, and the adhesion-preventing body member 10 is provided to face the discharge space 9 between the substrate 8 and the target 7.

In the sputtering apparatus 40 having such a configuration, a sputtering gas is introduced between the substrate 8 and the target 7, and a negative voltage is applied to the target 7 to generate a plasma discharge.

As a result, the negatively charged target 7 is sputtered by ions in the plasma, and a film is formed on the substrate 8 by sputtered particles that fly out from the surface of the target 7.

Fig. 2(a) shows a front side surface of the adhesion-preventing body member 10, and fig. 2(b) shows a back side surface of the adhesion-preventing body member 10.

As shown in fig. 2(a) and (b), the adhesion-preventing body member 10 of the present example has first to fourth constituent members 1 to 4 in the form of, for example, linear plates, and is formed in a rectangular frame shape having an opening 10 a.

The adhesion-preventing body member 10 of this example is made of, for example, aluminum (Al), stainless steel, or titanium (Ti), and is normally disposed in a state of facing the vertical direction.

Here, the adhesion-preventing body member 10 includes: a first component member 1 and a second component member 2 disposed on the upper and lower sides and extending in the horizontal direction; a third component 3 and a fourth component 4 are disposed between the first component 1 and the second component 2 on the left and right sides and extending in the vertical direction.

Hereinafter, the longitudinal direction of the first component 1 and the second component 2 of the adhesion-preventing body member 10 is referred to as "X-axis direction" as appropriate, and the longitudinal direction of the third component 3 and the fourth component 4 is referred to as "Z-axis direction" as appropriate.

These first to fourth components 1 to 4 are disposed with a plurality of gaps provided between both ends of adjacent components in consideration of thermal expansion during vacuum processing.

The first constituent member 1 and the second constituent member 2, and the third constituent member 3 and the fourth constituent member 4 of the first to fourth constituent members 1 to 4 are formed in a line-symmetrical shape with respect to a straight line passing through the center point of the adhesion-preventing body member 10.

The first to fourth components 1 to 4 are hooked and held by the holding member 20 by a mechanism described later.

Further, plasma shielding walls (plasma shielding wall portions) 1c, 2c, 3c, 4c are provided at the peripheral edge portions of the first to fourth components 1 to 4, respectively, and are formed to extend, for example, vertically toward the discharge space 9 side (front side) shown in fig. 1 of the first to fourth components 1 to 4.

On the back side surface of the first to fourth components 1 to 4 in this example, hooking portions 1A, 2A, 3A, and 4A for hooking and holding the first to fourth components 1 to 4 to the holding member 20, respectively, are provided.

The hooking portions 1A and 2A of the first and second components 1 and 2 include a fixing hooking portion 1A and a moving hooking portion 1b, which will be described later, respectively, and these fixing hooking portions 1A and moving hooking portions 1b are arranged in a line, for example, linearly along the longitudinal direction (X-axis direction) of the first and second components 1 and 2.

On the other hand, the hooking portions 3A and 4A of the third and fourth components 3 and 4 respectively have a fixing hooking portion 1a and an upper side movement hooking portion 1b, which will be described later_aAnd a lower side moving hook part 1b_bThese fixing hook part 1a and upper side moving hook part 1b_aAnd a lower side moving hook part 1b_bThe third and fourth components 3 and 4 are arranged in a line, for example, linearly in the longitudinal direction.

In the present invention, it is preferable that a fixing hooking portion 1a is provided at the center portion of each of the first and second components 1 and 2, and a moving hooking portion 1b is provided at each of both end portions of the first and second components 1 and 2 with respect to the fixing hooking portion 1 a.

In the present invention, it is preferable that a fixing hooking part 1a is provided at the center part of each of the third and fourth components 3 and 4, and an upper moving hooking part 1b is provided at both end parts of each of the third and fourth components 3 and 4 with respect to the fixing hooking part 1a_aA lower side moving hook part 1b_b。

In the present invention, although not particularly limited, from the viewpoint of preventing warpage of the adhesion preventing member 30 and from the viewpoint of reducing the amount of movement of each end portion with respect to the fixed position, it is preferable that a plurality of moving hooking portions 1b (upper moving hooking portions 1 b) are provided so as to be line-symmetrical with respect to a straight line (not shown) orthogonal to the longitudinal direction of the first to fourth components 1 to 4 with respect to the fixing hooking portion 1a provided at the central portion of the first to fourth components 1 to 4, respectively (upper moving hooking portions 1 b)_aA lower side moving hook part 1b_b)。

In this example, one fixing hook 1a is provided at the center of each of the first to fourth components 1 to 4, and the fixing hook 1a is provided at the first positionA plurality of (two in this example) moving engaging portions 1b (upper moving engaging portions 1 b) are provided to positions on both end sides of the fourth component member 1-4 which are line-symmetrical with respect to each other_aA lower side moving hook part 1b_b)。

Further, a fixed engaging part 1a and a movable engaging part 1b (upper side moving engaging part 1 b) provided in the first to fourth components 1 to 4_aA lower side moving hook part 1b_b) For example, the rectangular parallelepiped shape is formed, and has the same width and length.

On the other hand, a plurality of mounting portions 5 for mounting the first to fourth components 1 to 4 to the holding member 20 using, for example, bolts are provided at the peripheral edge portions of the first to fourth components 1 to 4 so as to extend (project) outward from the plasma shielding walls 1c to 4c, respectively.

Fig. 4 is a front view showing an example of the holding member used in the present invention, as viewed from the discharge space side.

In this example, the holding member 20 is fixed in the sputtering apparatus 40 shown in fig. 1, and the first to fourth components 1 to 4 of the adhesion-preventing body member 10 are attached to the discharge space 9 side of the holding member 20.

As shown in fig. 4, the holding member 20 of this example is formed in a rectangular frame shape.

The holding member 20 is integrally formed using a plate material having high rigidity, and is provided with an opening 20a, and the opening 20a has an outer diameter slightly larger than the outer diameter of the adhesion preventing body member 10 and an inner diameter slightly larger than the opening 10a of the adhesion preventing body member 10.

The holding member 20 is constituted by first to fourth frame portions 11 to 14 corresponding to the first to fourth constituent members 1 to 4 of the adhesion-preventing body member 10. That is, the first frame portion 11 and the second frame portion 12 extending in the horizontal direction are provided above and below the holding member 20, and the third frame portion 13 and the fourth frame portion 14 extending in the vertical direction are provided between the first frame portion 11 and the second frame portion 12 on the left and right of the holding member 20.

Hereinafter, the longitudinal direction of the first frame portion 1 and the second frame portion 12 of the adhesion prevention body member 20 is referred to as "X-axis direction" as appropriate, and the longitudinal direction of the third frame portion 13 and the fourth frame portion 14 is referred to as "Z-axis direction" as appropriate.

First to fourth hook portions 11A to 14A corresponding to hooking portions 1A to 4A of first to fourth constituent members 1 to 4 of the adhesion-preventing main body member 10 are provided on the surfaces of the first to fourth frame portions 11 to 14 of the holding member 20 on the side of the discharge space 9 shown in fig. 1, that is, on the front side surface.

In this example, the first hook 11A is provided on the first frame 11 on the upper side of the holding member 20, and the second hook 12A is provided on the second frame 12 on the lower side.

On the other hand, the third frame portion 13 on the left side of the holding member 20 as viewed from the discharge space 9 shown in fig. 1 is provided with a third hook portion 13A, and the fourth frame portion 14 on the right side as viewed from the discharge space 9 is provided with a fourth hook portion 14A.

The first to fourth hook portions 11A to 14A of the holding member 20 have fixing hooks 11A and moving hooks 11b, which will be described later, respectively, and these fixing hooks 11A and moving hooks 11b are arranged in a line, for example, linearly along the longitudinal direction of the first to fourth frame portions 11 to 14 of the holding member 20.

In the present invention, it is preferable that the holding member 20 has a fixing hook 11a provided at the center portion of the first to fourth frame portions 11 to 14, and a moving hook 11b provided on both end portions of the first to fourth frame portions 11 to 14 with respect to the fixing hook 11 a.

In the present invention, although not particularly limited, from the viewpoint of preventing warpage of the anti-buckling member 30, it is preferable that a plurality of moving hooks 11b be provided so as to be line-symmetrical with respect to the longitudinal direction of the first to fourth frame portions 11 to 14, respectively, with respect to the fixing hooks 11a provided at the central portions of the first to fourth frame portions 11 to 14.

In this example, one fixing hook 11a is provided at the center portion of each of the first to fourth frame portions 11 to 14, and a plurality of (two in this example) moving hooks 11b are provided at positions symmetrical to the fixing hook 11a on both end side portions of the first to fourth frame portions 11 to 14.

The fixing hook 11a and the moving hook 11b are respectively provided on the upper and lower sides of the frameThe fixing hook part 1a and the moving hook part 1b (upper side moving hook part 1 b) of the adhesion preventing body member 10_aA lower side moving hook part 1b_b) The corresponding position.

Fig. 5(a) is an explanatory view showing the configuration of the fixing hook portion of the first and second components of the adhesion preventing main body member and the fixing hook of the first and second frame portions of the holding member, and fig. 5(b) is an explanatory view showing the configuration of the moving hook portion of the first and second components of the adhesion preventing main body member and the moving hook of the first and second frame portions of the holding member.

Fig. 6(a) to (d) are sectional views showing the configuration and operation of the main part in the case where the first and second constituent members of the adhesion-preventing main body member are held by the first and second frame portions of the holding member.

As shown in fig. 4 and fig. 5(a) and (b), in this example, the fixing hooks 11a and the moving hooks 11b of the first and second frame portions 11 and 12 of the holding member 20 are respectively disposed in the fixing hook recesses 21a and the moving hook recesses 21b provided in the first and second components 1 and 2 of the adhesion-preventing body member 10.

These fixing hook recess 21a and moving hook recess 21b are formed as follows: the length of the first and second frame portions 11 and 12 of the holding member 20 in the X axis direction is longer in the lower portion than in the upper portion.

The fixing hook 11a and the moving hook 11b are both disposed in the lower portion of the fixing hook recess 21a and the moving hook recess 21 b.

The fixing hooks 11a of the first and second frame portions 11, 12 are formed in a rectangular parallelepiped shape, for example, and flat support surfaces 11a inclined so that the height thereof decreases toward the bottom of the fixing hook recess 21a are formed on the upper portions thereof₁(see FIG. 6 (a)).

The moving hook 11b of the first and second frame portions 11, 12 is formed in a rectangular parallelepiped shape, for example, and a hook projection 11b projecting upward is formed on an upper portion thereof, for example, on a portion on a side away from a bottom of the moving hook recess 21b₁(see FIG. 6 (b)).

In addition, the hook projection 11b of the moving hook 11b₁A flat support part 11b is formed between the bottom of the moving hook recess 21b and the bottom₂。

In this example, the fixing hooking part 1a and the moving hooking part 1b of the first and second components 1 and 2 of the adhesion-preventing body member 10 are configured to: when the adhesion preventing body member 10 is held by the holding member 20, both the first and second frame portions 11 and 12 of the holding member 20 are disposed at the upper side portions of the fixing hook recess 21a and the moving hook recess 21b (see fig. 5(a) and (b)).

As shown in fig. 5 a, the length (d1) in the X-axis direction of the fixing hooking portion 1a of the first and second components 1 and 2 of the adhesion-preventing body member 10 is set to be equal to or less than the length (d) in the X-axis direction in the portion of the holding member 20 above the fixing hook recess 21a in the first and second components 1 and 2, and each of the lengths can be inserted (press-fitted) into the fixing hook recess 21a (d 1. ltoreq. d).

Thus, when the fixing hooking portions 1a of the first and second components 1 and 2 of the adhesion preventing body member 10 are disposed in the fixing hook recesses 21a of the first and second frame portions 11 and 12 of the holding member 20, respectively, they are brought into close contact with the wall portions 21ah on both sides of the fixing hook recesses 21a in the X axis direction, respectively, and thus cannot move in the fixing hook recesses 21a in the X axis direction, respectively.

Here, the fixing hook portion 1a of the first and second components 1 and 2 of the adhesion-preventing body member 10 is provided at its lower portion with a support surface 11a capable of engaging with the fixing hook 11a of the first and second frames 11 and 12₁Closely contacted planar contact surface 1a₁(see FIG. 6 (a)).

On the other hand, as shown in fig. 5 b, the length (D2) in the X axis direction of the movement hooking section 1b of the first and second components 1 and 2 of the adhesion preventing body member 10 is set to be smaller than the length (D) in the X axis direction of the portion above the movement hooking recess 21b in each of the first and second frames 11 and 12 of the holding member 20 (D2 < D).

Thus, when the moving hooking portions 1b of the first and second components 1, 2 of the adhesion preventing body member 10 are disposed in the moving hooking recess 21b of the first and second frame portions 11, 12 of the holding member 20, the gaps 21 are formed between both ends of each moving hooking portion 1b in the X-axis direction and the wall portions 21bh on both sides of the upper side of the moving hooking recess 21b, and therefore, the following states are obtained: the movable hook recess 21b is movable in the X-axis direction without contacting the wall portions 21bh on both sides in the X-axis direction of the movable hook recess 21 b.

Here, the hook portion 1b for movement of the first and second components 1, 2 of the adhesion-preventing body member 10 is provided at the lower portion thereof with a hook protrusion 11b capable of engaging with the hook 11b for movement of the first and second frames 11, 12₁Engaging projections 1b₁(see FIG. 6 (b)).

The movement hooking portion 1b of the first and second components 1 and 2 of the adhesion preventing body member 10 is configured as follows: even in a state of being hooked on the moving hooks 11b of the first and second frames 11 and 12 of the holding member 20, the respective frames are movable in the X-axis direction.

In such a configuration, when the first and second components 1 and 2 of the adhesion-preventing body member 10 are held by the first and second frame portions 11 and 12 of the holding member 20, the following operations are performed.

First, for example, as shown in fig. 6(a), the back side surface of the adhesion preventing body member 10 is opposed to the front side surface of the holding member 20, and as shown in fig. 6(c), the fixing hooking portions 1a on the back side surfaces of the first and second constituent members 1 and 2 of the adhesion preventing body member 10 are inserted into the fixing hooking recesses 21a on the front side surfaces of the first and second frame portions 11 and 12 of the holding member 20, and the contact surfaces 1a are brought into contact with each other₁A support surface 11a contacting and hanging on the fixing hook 11a₁。

Here, the contact surfaces 1a of the fixing hooks 1a of the first and second components 1 and 2 of the adhesion-preventing body member 10 abut against each other₁Inclined support surfaces 11a of the fixing hooks 11a of the first and second frames 11, 12 of the member 20 to be held in close contact with each other₁And (4) supporting.

In this case, as described above, the fixing hooking portions 1a of the first and second constituent members 1 and 2 of the adhesion preventing body member 10 disposed in the fixing hook recesses 21a of the first and second frame portions 11 and 12 of the holding member 20 respectively come into close contact with the wall portions 21ah on both sides of the fixing hook recesses 21a in the X-axis direction as shown in fig. 5(a), and therefore, the fixing hook recesses 21a are not movable in the X-axis direction.

Further, simultaneously with the above-described operation, as shown in fig. 6(b), the back side surface of the adhesion preventing body member 10 is opposed to the front side surface of the holding member 20, and as shown in fig. 6(d), the movement hooking portions 1b on the back side surfaces of the first and second constituent members 1 and 2 of the adhesion preventing body member 10 are inserted into the movement hooking recesses 21b on the front side surfaces of the first and second frame portions 11 and 12 of the holding member 20, and the movement hooking portions 1b are hooked on the movement hooks 11 b.

In this case, the protrusion 1b of the moving hook 1b of each of the first and second components 1 and 2 of the adhesion-preventing body member 10 is caused to protrude₁The protrusion 1b of the movement hooking part 1b of the adhesion preventing body member 10 is inserted between the bottom of the movement hooking recess 21b of the movement hook 11b of the first and second frame parts 11, 12 of the holding member 20 and the protrusion 1b of the movement hooking part 1b of the adhesion preventing body member 10₁And a hook projection 11b of a moving hook 11b of the holding member 20₁And engaged (see fig. 9 and 10 described later).

In this state, the protruding portion 1b of the moving hooking portion 1b of the first and second components 1 and 2 of the adhesion-preventing body member 10 is protruded₁Can be brought into contact with the support portion 11b of the moving hook 11b of the first and second frames 11, 12 of the holding member 20₂Contact may be made or not.

Through the above steps, the step of holding the first and second components 1 and 2 of the adhesion-preventing body member 10 by the first and second frame portions 11 and 12 of the holding member 20 is completed.

Fig. 7(a) is an explanatory view showing the structure of the fixing hook portion in the third and fourth components of the adhesion preventing main body member and the fixing hook in the third and fourth frame portions of the holding member, and fig. 7(b) is an explanatory view showing the structure of the moving hook portion in the third and fourth components of the adhesion preventing main body member and the moving hook in the third and fourth frame portions of the holding member.

Fig. 8(a) to (d) are sectional views showing the configuration and operation of the main part in the case where the third and fourth constituent members of the adhesion-preventing main body member are held by the third and fourth frame portions of the holding member.

Fig. 9 is a front view showing an example of the adhesion preventing member according to the present invention, which is viewed from the discharge space side, and fig. 10 is a perspective cross-sectional view taken along line B-B of fig. 9.

As shown in fig. 4 and fig. 7(a) and (b), in this example, the fixing hooks 11a and the moving hooks 11b of the third and fourth frame portions 13 and 14 of the holding member 20 are disposed in the fixing hook recesses 21a and the moving hook recesses 21b provided in the third and fourth components 3 and 4 of the adhesion-preventing body member 10, respectively.

In this example, the fixing hooks 11a provided in the third and fourth frames 13 and 14 of the holding member 20 have the same basic configuration as the fixing hooks 11a provided in the first and second frames 11 and 12 of the holding member 20.

The fixing hook recess 21a and the moving hook recess 21b of the third and fourth frame portions 13 and 14 are formed such that: the length of the third and fourth frame portions 13 and 14 of the holding member 20 in the X axis direction is longer in the lower portion than in the upper portion.

The fixing hook 11a and the moving hook 11b are both disposed in the lower portion of the fixing hook recess 21a and the moving hook recess 21 b.

The fixing hooks 11a of the third and fourth frame portions 13, 14 are formed in, for example, a rectangular parallelepiped shape, and flat support surfaces 11a inclined so that the height thereof becomes lower toward the bottom of the fixing hook recess 21a are formed on the upper portions thereof₁(see FIG. 8 (a)).

The moving hooks 11b of the third and fourth frame portions 13, 14 are formed in a rectangular parallelepiped shape, for example, and are provided on the upper portion thereof, for example, on the side away from the bottom of the moving hook recess 21bPartially, formed with a hooking protrusion 11b protruding upward₁(see FIG. 8 (b)).

In addition, the hook projection 11b of the moving hook 11b₁A flat support part 11b is formed between the bottom of the moving hook recess 21b and the bottom₂。

In this example, the fixing hooking part 1a and the upper side moving hooking part 1b of the third and fourth components 3 and 4 of the adhesion preventing body member 10_aA lower side hooking part 1b_bThe structure is as follows: when the attachment prevention main body member 10 is held by the holding member 20, both the third and fourth frames 13 and 14 of the holding member 20 are disposed at portions above the Z-axis of the fixing hook recess 21a and the moving hook recess 21b (see fig. 7(a), (b), and fig. 9).

Here, as shown in fig. 7 a, the length (d1) in the X-axis direction of the fixing hooking portion 1a of the third and fourth components 3 and 4 of the adhesion-preventing body member 10 is set to be equal to or less than the length (d) in the X-axis direction in the portion of the holding member 20 above the fixing hook recess 21a in the third and fourth components 13 and 14, and is set to be a length (d1 ≦ d) that can be inserted (pressed) into the fixing hook recess 21 a.

Thus, when the fixing hooking portions 1a of the third and fourth components 3 and 4 of the adhesion preventing body member 10 are disposed in the fixing hook recesses 21a of the third and fourth frame portions 13 and 14 of the holding member 20, respectively, they are in close contact with the wall portions 21ah on both sides of the fixing hook recesses 21a in the X-axis direction, respectively, and thus cannot move in the fixing hook recesses 21a in the X-axis direction, respectively.

Here, the fixing hooking portion 1a of the third and fourth components 3 and 4 of the adhesion-preventing body member 10 is provided at its lower portion with a support surface 11a capable of engaging with the fixing hook 11a of the third and fourth frames 13 and 14 of the holding member 20₁Closely contacted planar contact surface 1a₁(see FIG. 8 (a)).

In this example, the configuration is: the contact surface 1a of the fixing hook part 1a of the third and fourth components 3 and 4 of the anti-adhesion body member 10₁With holding members 20Support surfaces 11a of the fixing hook recesses 11a of the third and fourth frames 13, 14₁When the main body adhesion prevention member 10 is closely attached to and supported by the fixing hooks 11a of the third and fourth frames 13 and 14 of the holding member 20, the entire load of the third and fourth components 3 and 4 is supported by the main body adhesion prevention member 10.

On the other hand, the hooking portion 1b for upper side movement of the third and fourth components 3 and 4 of the adhesion preventing body member 10 of the present embodiment_aAnd a lower side moving hook part 1b_bAs shown in fig. 7 b, the length (d2) in the X-axis direction is set to be equal to or less than the length (d) in the X-axis direction in the portion of the third and fourth frame portions 13 and 14 of the holding member 20 above the movement hook recess 21b, and is set to be a length (d2 ≦ d) that can be inserted (pressed) into the movement hook recess 21 b.

Therefore, in this example, the hooking portions 1b for upper side movement of the third and fourth components 3 and 4 of the adhesion preventing body member 10_aAnd a lower side moving hook part 1b_bWhen disposed in the moving hook recess 21b of each of the third and fourth frame portions 13 and 14 of the holding member 20, the holding member comes into close contact with the wall portions 21bh of the moving hook recess 21a on both sides in the X-axis direction, and thus cannot move in the X-axis direction in the moving hook recess 21 b.

On the other hand, in this example, when heat is applied during vacuum processing such as sputtering, the fixing hooking portion 1a located at the center of the third and fourth components 3 and 4 of the adhesion-preventing body member 10 is hardly elongated in the Z-axis direction and has no influence, but the third and fourth components 3 and 4 of the adhesion-preventing body member 10 are elongated in the Z-axis direction, and therefore, in consideration of this, the following configuration is adopted.

First, the hook portions 1b for moving the upper and lower sides of the adhesion-preventing body member 10 are moved_a、1b_bWhen the hook 11b for movement of the holding member 20 is hooked, as shown in fig. 8(d), the hooking portions 1b for movement on the upper and lower sides of the third and fourth components 3 and 4 of the adhesion-preventing body member 10 are hooked on_a、1b_bProtrusion 1b of₁Respectively enter and hold the member 20The hooking parts 1b for moving the upper side and the lower side between the bottoms of the moving hook recesses 21b of the moving hooks 11b of the third and fourth frame parts 13, 14_a、1b_bProtrusion 1b of₁A hook projection 11b of a moving hook 11b of the holding member 20₁And (4) meshing.

In this state, if heat during the vacuum treatment is applied to the third and fourth components 3 and 4 of the adhesion-preventing body member 10, the upper portion of the third and fourth components 3 and 4 extends upward in the Z-axis direction, and the upper-side moving hooking portion 1b is thereby formed_aAnd also extends upward in the Z-axis direction.

As a result, the hooking part 1b for upper side movement of the adhesion preventing body member 10_aProtrusion 1b of₁From the support portion 11b of the moving hook 11b of the holding member 20₂Apart, their spacing expands.

Therefore, in this example, the hooking portion 1b for upper side movement can be used without applying heat to the adhesion preventing main body member 10_aProtrusion 1b of₁The distal end portion of (2) relative to the support portion 11b of the moving hook 11b of the holding member 20₂Either a contacted structure or a separated structure.

However, it is preferable that the hooking part 1b for upper side movement of the adhesion-preventing body member 10 is set in advance appropriately_aProtrusion 1b of₁And a hook projection 11b of a moving hook 11b of the holding member 20₁Is shaped and sized so that the hooking part 1b for upward movement is brought into contact with the main adhesion preventing member 10 when heat is applied thereto_aProtrusion 1b of₁A hook projection 11b of a moving hook 11b of the holding member 20₁Does not disengage.

On the other hand, when heat is applied to the adhesion-preventing main body member 10, the lower portion extends downward in the Z-axis direction with respect to the central portions of the third and fourth constituent members 3 and 4, and the lower-side moving hooking portion 1b extends downward in the Z-axis direction_bAlso extends downward in the Z-axis direction, and the tip end moves downward in the Z-axis direction.

Therefore, in this example, it is preferable to appropriately set the prevention in advanceHook part 1b for moving downward of main body part 10_bProtrusion 1b of₁And a hook projection 11b of a moving hook 11b of the holding member 20₁And a support part 11b₂Is shaped and sized so that the hooking part 1b for downward movement is heated when the adhesion preventing body member 10 is heated_bProtrusion 1b of₁And a support portion 11b of the moving hook 11b of the holding member 20₂The lower moving hook part 1b is abutted without pressing it and in the state of not applying heat to the main adhesion prevention body member 10_bProtrusion 1b of₁The distal end portion of (2) relative to the support portion 11b of the moving hook 11b of the holding member 20₂Separated by a predetermined distance.

In such a configuration, when the third and fourth components 3 and 4 of the adhesion-preventing body member 10 are held by the third and fourth frame portions 13 and 14 of the holding member 20, the following operations are performed.

First, for example, as shown in fig. 8(a), the back surface of the adhesion preventing body member 10 is opposed to the front surface of the holding member 20, and as shown in fig. 8(c), the fixing hooks 1a on the back surfaces of the third and fourth constituent members 3 and 4 of the adhesion preventing body member 10 are inserted into the fixing hook recesses 21a on the front surfaces of the third and fourth frame portions 13 and 14 of the holding member 20, and the contact surfaces 1a are brought into contact with each other₁A support surface 11a contacting and hanging on the fixing hook 11a₁。

Here, the contact surfaces 1a of the fixing hooks 1a of the third and fourth components 3 and 4 of the adhesion-preventing body member 10 contact each other₁Inclined support surfaces 11a of the fixing hooks 11a of the third and fourth frames 13, 14 of the member 20 to be held in close contact with each other₁And (4) supporting.

In this case, as described above, the fixing hooking portions 1a of the third and fourth constituent members 3 and 4 of the adhesion preventing body member 10 disposed in the fixing hook recesses 21a of the third and fourth frame portions 13 and 14 of the holding member 20 respectively come into close contact with the wall portions 21ah on both sides of the fixing hook recesses 21a in the X-axis direction as shown in fig. 7(a), and therefore, the fixing hook recesses 21a are not movable in the X-axis direction.

Further, simultaneously with the above-described operation, as shown in fig. 8(b), the back surface of the adhesion-preventing body member 10 is made to face the front surface of the holding member 20, and as shown in fig. 8(d), the hook portions 1b for moving the upper and lower sides of the back surfaces of the third and fourth constituent members 3 and 4 of the adhesion-preventing body member 10 are made to face each other_a、1b_bThe hook parts 1b for moving the upper side and the lower side are inserted into the moving hook recesses 21b of the front side surfaces of the third and fourth frame parts 13, 14 of the holding member 20_a、1b_bIs hooked on the moving hook 11 b.

In this case, the hooking portions 1b for moving the upper and lower sides of the third and fourth components 3 and 4 of the adhesion-preventing body member 10_a、1b_bProtrusion 1b of₁The hook portions 1b for moving the upper and lower sides of the adhesion preventing body member 10 enter between the bottom portions of the moving hook recesses 21b of the moving hooks 11b of the third and fourth frame portions 13, 14 of the holding member 20_a、1b_bProtrusion 1b of₁A hook projection 11b of a moving hook 11b of the holding member 20₁And (4) meshing.

Through the above steps, the step of holding the third and fourth components 3 and 4 of the adhesion-preventing body member 10 by the third and fourth frame portions 13 and 14 of the holding member 20 is completed.

Then, in the mounting portion 5 of the adhesion-preventing body member 10, the adhesion-preventing body member 10 is fixed in close contact with and held by the holding member 20 by fastening with a screw (not shown), for example.

As a result, as shown in fig. 9, the adhesion preventing member 30 of the present embodiment is obtained.

In the present embodiment described above, the first to fourth hooking portions 1A-4A for hooking and attaching to the first to fourth hook portions 11A-14A provided in the holding member 20 are provided on the surfaces of the first to fourth constituent members 1-4 of the adhesion-preventing body member 10 on the opposite sides of the surfaces facing the discharge space 9 in the vacuum chamber 6, respectively, and therefore, it is not necessary to use a plurality of bolts with caps in order to hold the adhesion-preventing body member 10 by the holding member 20 as in the conventional art.

As a result, according to the present embodiment, since the uneven portions on the surface of the adhesion preventing member 30 on the discharge space 9 side can be reduced to reduce the surface area, generation of particles due to peeling of the film forming material or the like adhering to the adhesion preventing member 30 from the surface during the vacuum processing can be suppressed.

In the present embodiment, the first to fourth components 1 to 4 of the adhesion-preventing body member 10 are formed in an elongated shape, and the first to fourth hooking portions 1A to 4A of the first to fourth components 1 to 4 have: a fixing hook portion 1A that is hooked to the fixing hooks 11A provided to the first to fourth hook portions 11A to 14A of the holding member 20 in a state where the adhesion preventing body member 10 is held by the holding member 20 so that the first to fourth constituent members 1 to 4 do not move in the longitudinal direction; and a moving hook 1b (an upper side moving hook 1 b)_aA lower side moving hook part 1b_b) And a movable hook 11b hooked on the first to fourth hooks 11A to 14A of the holding member 20 in a state where the first to fourth components 1 to 4 are movable in the longitudinal direction, wherein the fixed hook 1A is provided at the center of the first to fourth components 1 to 4, and the movable hook 1b (the upper side movable hook 1 b) is provided at the center of the first to fourth components 1 to 4_aA lower side moving hook part 1b_b) Since the fixing hooks 1a are provided at both end portions of the first to fourth components 1 to 4, the moving hooks 1b (upper moving hooks 1 b) of the adhesion preventing body member 10 extend when the first to fourth components 1 to 4 are elongated by heat generated during vacuum processing such as sputtering_aA lower side moving hook part 1b_b) Can move in the longitudinal direction of the first to fourth components 1 to 4 in a state of being hooked on the moving hook 11b of the holding member 20.

As a result, according to the present embodiment, when the first to fourth components 1 to 4 are extended by heat generated during the vacuum processing, the first to fourth components 1 to 4 are extended uniformly toward both end portions with respect to the central portion thereof, and therefore, warpage and deformation of the adhesion preventing member 30 during the vacuum processing can be suppressed.

In addition, in the present embodiment, since the plasma-shielding wall portions 1c to 4c extending toward the surface side facing the discharge space 9 of the vacuum chamber 6 are provided at the peripheral edge portions of the first to fourth components 1 to 4 of the adhesion-preventing body member 10, the amount of substances such as film-forming materials adhering to the surface of the adhesion-preventing member 30 on the discharge space 9 side can be reduced, and generation of fine particles caused by peeling of the substances from the surface of the adhesion-preventing member 30 can be further suppressed.

Furthermore, in the present embodiment, since the mounting portion 5 is provided on the peripheral edge portion of each component of the adhesion-preventing body member 10 so as to extend outward from the plasma shielding walls 1c to 4c with respect to the holding member 20, even when the adhesion-preventing body member 10 is mounted on the holding member 20 by using screws in the mounting portion 5, substances generated during the vacuum treatment are shielded by the plasma shielding walls 1c to 4c provided in the adhesion-preventing body member 10, and adhesion of the adhesion-preventing body member 10 to the mounting portion 5 can be prevented, and generation of particles caused by peeling of the substances from the surface of the adhesion-preventing member 30 can be further suppressed.

The present invention is not limited to the above embodiment, and various modifications can be made. For example, the shape of the fixing hook part 1a, the moving hook part 1b, and the upper side moving hook part 1b of the adhesion preventing body member 10_aA lower side moving hook part 1b_bThe shape and number of (d) are not limited to those of the above embodiments, and can be appropriately changed.

The shape of the fixing hooks 11a and the shape and number of the moving hooks 11b of the holding member 20 are not limited to those of the above embodiments, and may be appropriately changed.

Further, although the above embodiment has been described by taking as an example a case where the embodiment is applied to a sputtering apparatus, the present invention is not limited to this, and can be applied to various vacuum processing apparatuses.

Description of the symbols

1 first constituent Member

1A hooking part

1a fixing hook

1b moving hook part

1b_aHook for moving upward and laterally

1b_bHook for moving downwards

1c plasma shield wall (wall for plasma shield)

2 second constituent element

2A hooking part

2c plasma screen wall

3 third constituent element

3A hooking part

3c plasma screen wall

4 fourth constituent element

4A hooking part

4c plasma screen wall

5 mounting part

6 vacuum groove

7 sputtering target material

8 substrate (object to be processed)

10 anti-adhesion body member

11 first frame part

11a fixing hook

11b moving hook

11A first hook part

12 second frame part

12A second hook part

13 third frame part

13A third hook

14 fourth frame part

14A fourth hook

20 holding member

21a fixing hook recess

21b moving hook recess

30 anti-adhesion member

40 sputtering apparatus (vacuum processing apparatus).