阅读说明：本技术 一种超高真空束源炉坩埚除气装置 (Ultrahigh vacuum beam source furnace crucible degassing device ) 是由 陈建新 金博睿 徐志成 于 2020-05-25 设计创作，主要内容包括：本发明公开了一种超高真空束源炉坩埚除气装置,该装置包括：在真空腔室上通过第一刀口法兰与真空规管上的第五刀口法兰连接,通过第二刀口法兰与闸板阀上的第六刀口法兰连接,通过第三和第四刀口法兰分别安装2台束源炉上的第九刀口法兰连接。在闸板阀上通过第七刀口法兰与真空泵上的第八刀口法兰连接。该装置结构简单,在暴露大气后能快速恢复到超高真空度,束源炉装卸简单,极大地提高了束源炉坩埚除气的工作效率。(The invention discloses a crucible degassing device of an ultrahigh vacuum beam source furnace, which comprises: the vacuum chamber is connected with a fifth knife edge flange on the vacuum gauge pipe through a first knife edge flange, is connected with a sixth knife edge flange on the gate valve through a second knife edge flange, and is respectively connected with a ninth knife edge flange on the 2-beam source furnace through a third knife edge flange and a fourth knife edge flange. The gate valve is connected with an eighth knife edge flange on the vacuum pump through a seventh knife edge flange. The device has simple structure, can quickly recover to ultrahigh vacuum degree after being exposed to the atmosphere, has simple loading and unloading of the beam source furnace, and greatly improves the working efficiency of degassing the crucible of the beam source furnace.)

1. An ultrahigh vacuum beam source furnace crucible degassing device comprises: vacuum chamber (1), vacuum gauge pipe (2), slide valve (3), vacuum pump (4), beam source stove (5), its characterized in that:

a first knife edge flange (1-3) on the vacuum chamber (1) is connected with a fifth knife edge flange (2-1) on the vacuum gauge pipe (2) by bolts, a second knife edge flange (1-4) on the vacuum chamber (1) is connected with a sixth knife edge flange (3-1) on the gate valve (3) by bolts, a seventh knife edge flange (3-2) on the gate valve (3) is connected with an eighth knife edge flange (4-1) on the top of the vacuum pump (4) by bolts, a ninth knife edge flange (5-1) on the upper surface of the two beam source furnaces (5) is respectively connected with a third knife edge flange (1-1-1) on a beam source furnace degassing chamber (1-1) in the vacuum chamber (1) and a fourth knife edge flange (1-2-1) on a beam source furnace storage chamber (1-2) by bolts.

2. The degassing device for the crucible of the ultra-high vacuum beam source furnace according to claim 1, wherein the vacuum chamber (1) is made of stainless steel, the appearance of the vacuum chamber is a cylindrical cylinder with a hollow cavity in the middle, and one side of the upper half part of the cylinder is connected with a degassing chamber (1-1) of the beam source furnace; the other side of the cylinder is connected with a beam source furnace storage chamber (1-2), one side of the lower half part of the cylinder is connected with a first knife edge flange (1-3) on the same side of the beam source furnace degassing chamber (1-1), and the bottom surface of the cylinder is connected with a second knife edge flange (1-4). The beam source furnace degassing chamber (1-1) is made of stainless steel, a hollow cylinder is arranged in the middle of the beam source furnace degassing chamber and is cylindrical, and a third knife edge flange (1-1-1) is welded at the other end of the cylinder; the beam source furnace storage chamber (1-2) is made of stainless steel, a hollow cylinder is arranged in the middle of the cylindrical appearance, and a fourth knife edge flange (1-2-1) is welded at the other end of the cylinder.

3. The crucible degassing device for the ultrahigh vacuum beam source furnace according to the claim 1, characterized in that one end of the vacuum gauge tube (2) is welded with a filament binding post; the other end is welded with a fifth knife edge flange (2-1). The filament binding post is connected with a filament at the vacuum end in the vacuum gauge tube (2).

4. The degassing device for the crucible of the ultrahigh vacuum beam source furnace according to claim 1, wherein the gate valve (3) is made of stainless steel, and a sixth knife edge flange (3-1) and a seventh knife edge flange (3-2) are welded on the upper side and the lower side of the valve body respectively.

5. The crucible degassing device for the ultrahigh vacuum beam source furnace according to claim 1, characterized in that an eighth knife edge flange (4-1) is welded on the top of the vacuum pump (4).

6. The crucible degassing device for the ultrahigh vacuum beam source furnace according to claim 1, wherein a ninth knife-edge flange (5-1) is welded on the beam source furnace (5), and a cylindrical cavity made of tantalum material for placing the crucible is arranged in the middle of one end, which is not welded with the beam source furnace (5), of the ninth knife-edge flange (5-1).

Technical Field

The invention relates to the technical field of vacuum cavities, in particular to a degassing device of a beam source furnace utilizing an ultrahigh vacuum environment.

Background

Under the vacuum environment, the metal material can be evaporated from the crucible of the beam source furnace by heating with the resistance wire in the beam source furnace, thereby realizing the preparation of the film material or the chip metal electrode. The beam source furnace has become a core component for preparing semiconductor materials and chip metal electrodes. However, the impurities carried by the new beam source furnace or crucible itself during use are likely to contaminate the high purity metal. Therefore, high temperature outgassing is required before a new beam source furnace or crucible can be used. If a new beam source furnace or crucible is directly placed into the process equipment for degassing, the background vacuum degree of the system is poor, and the risk of polluting the process equipment exists, meanwhile, the process equipment is exposed to the atmosphere for many times by repeatedly disassembling the crucible of the beam source furnace, and the cavity needs to be baked for a long time after the system is exposed to the atmosphere each time, so that water vapor and other organic gases adhered to the cavity wall when the cavity is exposed to the atmosphere are removed, and the cavity returns to the ultrahigh vacuum environment, so that the utilization efficiency of the process equipment is greatly reduced, obviously, the method of directly placing the beam source furnace or crucible into the process equipment for degassing is not preferable. Therefore, the degassing of the beam source furnace crucible by the cavity in the ultrahigh vacuum environment is expected to be realized, and the cavity is simple in structure and beneficial to high-efficiency recovery of the ultrahigh vacuum environment and quick loading and unloading of the beam source furnace crucible.

Disclosure of Invention

The invention aims to provide a device for degassing a crucible of a beam source furnace in an ultrahigh vacuum environment, which solves the existing problems and has the advantages of simple structure, high vacuum degree and simple assembly and disassembly.

In order to achieve the above object, the present invention provides the following solutions: the invention provides an ultrahigh vacuum beam source

The furnace crucible degassing device mainly comprises a vacuum chamber 1, a beam source furnace degassing chamber 1-1, a beam source furnace storage chamber 1-2, a vacuum gauge pipe 2, a gate valve 3, a vacuum pump 4 and a beam source furnace 5.

The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. One side of the upper half part of the cylinder is connected with a gas chamber 1-1 at the beam source furnace, the degassing chamber 1-1 of the beam source furnace is made of stainless steel, the cylinder is cylindrical in appearance, a hollow hole is formed in the middle, the other end of the cylinder is connected with a third knife edge flange 1-1-1, and the other end of the third knife edge 1-1-1 is connected with a ninth knife edge flange 5-1 on the beam source furnace 5 through bolts.

The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. The other side of the upper half part of the cylinder is connected with a beam source furnace storage chamber 1-2, the beam source furnace storage chamber 1-2 is made of stainless steel, the cylinder is cylindrical in appearance, a hollow hole is formed in the middle, the other end of the cylinder is connected with a fourth knife edge flange 1-2-1, and the other end of the fourth knife edge flange 1-2-1 is connected with a ninth knife edge flange 5-1 on the beam source furnace 5 through bolts.

The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. One side of the lower half part of the cylinder is connected with a first knife edge flange (1-3) at the same side of a beam source furnace degassing chamber (1-1), and the other end of the first knife edge flange (1-3) is connected with a fifth knife edge flange (2-1) on the vacuum gauge pipe (2) through a bolt.

The vacuum chamber 1 is made of stainless steel, and is cylindrical in appearance with a hollow cylinder in the middle. The bottom surface of the cylinder is connected with a second knife edge flange (1-4), and the other end of the second knife edge flange (1-4) is connected with a sixth knife edge flange (3-1) on the gate valve (3) through a bolt.

The gate valve 3 is made of stainless steel, and the upper side and the lower side of the gate valve 3 are provided with a sixth knife edge flange 1-3 and a seventh knife edge flange 1-4 on the valve faces. The other end of the seventh knife edge flange 1-4 is connected with an eighth knife edge flange 4-1 welded with the vacuum pump 4 through bolts.

The top of the vacuum pump 4 is connected with the other end of the eighth knife edge flange 4-1 through welding.

A ninth knife edge flange 5-1 is welded on the beam source furnace 5, and a cylindrical cavity made of tantalum materials and used for placing a crucible is arranged in the middle of one end, not welded with the beam source furnace 5, of the ninth knife edge flange 5-1.

Compared with the prior art, the invention has the following technical effects:

the invention provides a beam source furnace crucible degassing device utilizing an ultrahigh vacuum environment, which has a simple structure, is convenient to assemble and disassemble a beam source furnace crucible, has short rough vacuumizing time and high ultrahigh vacuum degree recovery speed, can work after reaching corresponding vacuum and improves the working efficiency.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.

FIG. 1 is a schematic structural view of a crucible degassing device of an ultrahigh vacuum beam source furnace according to the present invention;

wherein 1 is a vacuum chamber, 1-1 is a beam source furnace degassing chamber, 1-2 is a beam source furnace storage chamber, 1-3 is a first knife edge flange (welded with the vacuum chamber), 1-4 is a knife edge flange (welded with the vacuum chamber), 1-1-1 is a knife edge flange (welded with the beam source furnace degassing chamber), 1-2-1 is a knife edge flange (welded with the beam source furnace storage chamber), 2 is a vacuum gauge pipe, 2-1 is a knife edge flange (welded with the vacuum gauge pipe), 3 is a gate valve, 3-1 is a knife edge flange (welded with the gate valve), 3-2 is a knife edge flange (welded with the gate valve), 4 is a vacuum pump, 4-1 is a knife edge flange (welded with the vacuum pump), 5 is a beam source furnace, and 5-1 is a knife edge flange (welded with the beam source furnace).

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The invention aims to provide a degassing device for a crucible of an ultrahigh vacuum beam source furnace, which is used for solving the problems in the prior art, so that a vacuum cavity is simple in structure and convenient to assemble and disassemble the crucible of the beam source furnace, and rapid ultrahigh vacuum is obtained.

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, the present invention is further described in detail with reference to the accompanying drawings and the detailed description thereof.

As shown in figure 1, the invention provides a beam source furnace crucible degassing system in an ultrahigh vacuum environment, which comprises a vacuum chamber 1, a beam source furnace degassing chamber 1-1, a beam source furnace storage chamber 1-2, a vacuum gauge 2, a gate valve 3, a vacuum pump 4 and a beam source furnace 5. The vacuum chamber 1 is formed by welding stainless steel round pipes, one end of a first knife edge flange 1-3, a second knife edge flange 1-4, a third knife edge flange 1-1-1 and a fourth knife edge flange 1-2-1 is welded with the vacuum chamber 1, and the other end is respectively connected with a vacuum gauge pipe 2, a gate valve 3 and a beam source furnace 5 through bolts. A sixth knife edge flange 3-1 is welded on the valve face on one side of the gate valve 3 and is connected with a second knife edge flange 1-4; the gate valve 3 is connected with an eighth knife edge flange 4-1 welded on the top of the vacuum pump 4 through a seventh knife edge flange 3-2 welded on the other side valve face.

Wherein the vacuum chamber 1 is formed by welding stainless steel round pipes with the pipe diameter of 550mm, and the right side surface of the upper half part is provided with a round hole with the diameter of 100mm for welding with the beam source furnace degassing chamber 1-1. The degassing chamber 1-1 of the beam source furnace is a stainless steel round pipe with the diameter of 100mm, and a third knife edge flange 1-1-1 with the diameter of 120mm is welded at the other end of the degassing chamber. And the third knife edge flange 1-1-1 is connected with an eighth knife edge flange 4-1 welded with the beam source furnace 5 and having a diameter of 120mm through M6 bolts.

Wherein the vacuum chamber 1 is formed by welding stainless steel round pipes, and the left side surface of the upper half part is provided with a round hole of 90mm for welding with the beam source furnace storage chamber 1-2. The beam source furnace storage chamber 1-2 is a stainless steel round pipe with the diameter of 90mm, and a fourth knife edge flange 1-2-1 with the diameter of 120mm is welded at the other end of the stainless steel round pipe. And the fourth knife edge flange 1-2-1 is connected with an eighth knife edge flange 4-1 welded with the beam source furnace 5 and having a diameter of 120mm through M6 bolts.

The vacuum gauge pipe 2 is connected with a first knife edge flange 1-3 welded to the vacuum chamber 1 through a fifth knife edge flange 2-1 with the diameter of 50mm through an M4 bolt, and the other end of the fifth knife edge flange 2-1 is welded to the vacuum gauge pipe 2.

Wherein, the gate valve 3 is made of stainless steel, a sixth knife edge flange 3-1 with the diameter of 150mm is welded on the valve surface at one side of the gate valve 3, and the second knife edge flange 1-4 with the diameter of 150mm is welded with the vacuum chamber 1 and is connected with the vacuum chamber through M6 bolts. A seventh knife edge flange 3-2 with the diameter of 150mm is welded on the valve surface on the other side of the gate valve 3, and an eighth knife edge flange 4-1 with the diameter of 150mm is welded on the vacuum pump 4 and is connected with the vacuum pump through M6 bolts.

Wherein, the top of the vacuum pump 4 is welded with an eighth knife edge flange 4-1 with the diameter of 150 mm.

Wherein, the beam source furnace 5 is connected with the outside by welding a ninth knife edge flange 5-1 with the diameter of 120 mm. The middle of the other end of the ninth knife edge flange 5-1 is made of tantalum and welded into a barrel shape, a cavity is arranged in the middle and used for placing a crucible, and the end face of the ninth knife edge flange is respectively connected with a first knife edge flange 1-3 and a second knife edge flange 1-4 welded to the vacuum chamber 1 through bolts.

The invention is an ultrahigh vacuum chamber, has simple structure, can quickly and conveniently load and unload the beam source furnace, ensures that the ultrahigh vacuum of the cavity is recovered in a very short time, meets the process requirements of degassing crucibles of various beam source furnaces and improves the working efficiency.

The principles and implementations of the present invention have been explained in detail using specific examples, and the above descriptions are only used to help understanding the method and core idea of the present invention, and are not to be construed as limiting the scope of the claims, and other substantially equivalent alternatives that may be conceived by those skilled in the art are also within the scope of the present invention.