阅读说明：本技术 蒸镀坩埚及蒸镀装置 (Evaporation crucible and evaporation device ) 是由 黄永振 于 2020-04-30 设计创作，主要内容包括：本发明涉及一种蒸镀坩埚及蒸镀装置。蒸镀坩埚包括坩埚本体及阻挡组件,阻挡组件可拆卸地安装于容置腔内,阻挡组件包括沿容置腔的轴向方向间隔设置的至少一个第一阻挡片及至少一个第二阻挡片；第一阻挡片设有第一流通部,第二阻挡片沿容置腔的轴向方向在第一阻挡片的正投影覆盖第一流通部；第二阻挡片与容置腔的内壁之间具有间隙。本发明提供的蒸镀坩埚及蒸镀装置,第一流通部及间隙连通形成蒸镀材料的流通路径,并且利用第一阻挡片及第二阻挡片,阻挡的大部分颗粒物质喷溅及氧化物颗粒排出的同时也将颗粒物质喷溅及氧化物颗粒收集至第一阻挡片上,提高了产品良率且方便清理。(The invention relates to an evaporation crucible and an evaporation device. The evaporation crucible comprises a crucible body and a blocking assembly, the blocking assembly is detachably arranged in the accommodating cavity, and the blocking assembly comprises at least one first blocking piece and at least one second blocking piece which are arranged at intervals along the axial direction of the accommodating cavity; the first blocking piece is provided with a first circulation part, and the second blocking piece covers the first circulation part in the orthographic projection of the first blocking piece along the axial direction of the accommodating cavity; a gap is formed between the second blocking piece and the inner wall of the accommodating cavity. According to the evaporation crucible and the evaporation device provided by the invention, the first flow part and the gap are communicated to form the flow path of the evaporation material, and the first barrier sheet and the second barrier sheet are utilized to collect most of the particulate matter splash and oxide particles on the first barrier sheet while discharging the particulate matter splash and the oxide particles, so that the product yield is improved and the cleaning is convenient.)

1. An evaporation crucible, comprising:

the crucible body is provided with an accommodating cavity for accommodating evaporation materials, and the crucible body is provided with an evaporation outlet which is communicated with the accommodating cavity;

the blocking assembly is detachably arranged in the accommodating cavity and comprises at least one first blocking piece and at least one second blocking piece which are arranged at intervals along the axial direction of the accommodating cavity;

the first blocking piece is provided with a first circulation part, and the second blocking piece covers the first circulation part along the orthographic projection of the first blocking piece in the axial direction of the accommodating cavity;

and a gap is formed between the second blocking piece and the inner wall of the accommodating cavity.

2. An evaporation crucible according to claim 1, wherein the at least one first barrier sheet and the at least one second barrier sheet are alternately arranged at intervals along the axial direction of the accommodating cavity.

3. An evaporation crucible according to claim 1, wherein the circumferential side wall of the first barrier sheet is in contact with the inner wall of the accommodating chamber.

4. An evaporation crucible according to claim 1, wherein the first barrier sheet further comprises a first barrier portion surrounding the first flow-through portion;

the first blocking part farthest away from the evaporation outlet extends towards the evaporation outlet in an inclined mode along the axial direction of the accommodating cavity and is connected with the first flow-through part; and/or the presence of a gas in the gas,

the first blocking part is closest to the evaporation outlet, deviates from the evaporation outlet in the axial direction of the accommodating cavity in an inclined extending mode, and is connected with the first flow-through part.

5. A vaporization crucible according to claim 1, wherein the first flow-through portion comprises at least one first through-hole;

preferably, the first circulating part includes a plurality of first through holes arranged in an array.

6. A evaporation crucible according to claim 5, wherein the barrier assembly further comprises a mesh member disposed within at least one of the first through holes.

7. The evaporation crucible according to claim 1, wherein the second barrier sheet has a concave portion facing the evaporation outlet.

8. The evaporation crucible according to claim 1 or 7, wherein the concave portion is provided on a surface of the second barrier sheet facing the evaporation outlet; or the second barrier sheet is sunken to form the concave part along the direction far away from the evaporation outlet.

9. The evaporation crucible according to claim 1, wherein the barrier assembly further comprises a suspension member, the at least one first barrier sheet and the at least one second barrier sheet are fixed to the suspension member, and the suspension member is suspended at the evaporation outlet of the crucible body.

10. A vapor deposition apparatus comprising the vapor deposition crucible according to claim 1 to 9.

Technical Field

The invention relates to the technical field of display screen manufacturing, in particular to an evaporation crucible and an evaporation device.

Background

An OLED (Organic Light-Emitting Diode) device mainly includes a metal film layer and an Organic film layer, and is generally formed by depositing a metal material or an Organic material on a back plate by vacuum thermal evaporation, and an evaporation crucible is generally adopted to evaporate the metal material or the Organic material in the process, but the yield of products evaporated by the evaporation crucible in the prior art is low.

Disclosure of Invention

Accordingly, the present invention provides an evaporation crucible and an evaporation apparatus that can effectively solve the problem of low yield of products.

According to an aspect of the present application, there is provided an evaporation crucible comprising:

the crucible body is provided with an accommodating cavity for accommodating evaporation materials, and the crucible body is provided with an evaporation outlet which is communicated with the accommodating cavity;

the blocking assembly is detachably arranged in the accommodating cavity and comprises at least one first blocking piece and at least one second blocking piece which are arranged at intervals along the axial direction of the accommodating cavity;

the first blocking piece is provided with a first circulation part, and the second blocking piece covers the first circulation part along the orthographic projection of the first blocking piece in the axial direction of the accommodating cavity;

and a gap is formed between the second blocking piece and the inner wall of the accommodating cavity.

In an embodiment, the at least one first blocking piece and the at least one second blocking piece are alternately arranged at intervals along the axial direction of the accommodating cavity.

In one embodiment, the circumferential side wall of the first blocking piece is in contact with the inner wall of the accommodating cavity. Can prevent partial particle substance from splashing and oxide particles from flowing out to the evaporation outlet from the gap between the first barrier sheet and the accommodating cavity.

In an embodiment, the first blocking tab further comprises a first blocking portion surrounding the first flow-through portion;

the first blocking part farthest away from the evaporation outlet extends towards the evaporation outlet in an inclined mode along the axial direction of the accommodating cavity and is connected with the first flow-through part; and/or the first blocking part closest to the evaporation outlet obliquely extends away from the evaporation outlet along the axial direction of the accommodating cavity and is connected with the first flow-through part. The sputtering of the particulate matter and the outflow of the oxide particles are fully blocked, and the mixing of the particulate matter sputtering and the falling of the oxide particles into the accommodating cavity and the evaporation material is avoided.

In an embodiment, the first flow-through comprises at least one first through-hole; preferably, the first circulating part includes a plurality of first through holes arranged in an array. Various embodiments of the first flow-through are provided.

In an embodiment, the blocking assembly further comprises a mesh disposed within at least one of the first through holes. Various embodiments of the first flow-through are provided.

In one embodiment, the second barrier sheet has a concave portion facing the evaporation outlet.

In an embodiment, the concave part is arranged on one side surface of the second barrier sheet facing the evaporation outlet; or the second barrier sheet is sunken to form the concave part along the direction far away from the evaporation outlet. After the particle substance splash and the oxide particles fall to the concave part of the second barrier plate, the particle substance splash and the oxide particle movement track are limited by the concave part and are not easy to escape, and the barrier effect of the second barrier plate is improved.

In an embodiment, the blocking assembly further includes a suspension member, the at least one first blocking plate and the at least one second blocking plate are fixed to the suspension member, and the suspension member can be suspended at the evaporation outlet of the crucible body. Conveniently take out from the holding chamber and block the subassembly, also conveniently will block the subassembly and install to the holding chamber.

According to another aspect of the application, the evaporation device comprises the evaporation crucible.

Above-mentioned coating by vaporization crucible and coating by vaporization device, utilize first piece and the second that blocks to block the piece cooperation, block particulate matter splash and oxide granule and flow out along with steam flow direction coating by vaporization export, and utilize first piece and the second that blocks the position relation between the piece, make most particulate matter splash and oxide granule that are blockked collect to first blocking on the piece, avoided particulate matter splash and oxide granule to return to the holding intracavity and mix with the coating by vaporization material, discharge to the coating by vaporization export and influence the condition of waiting to process the product quality along with the steam flow once more, perhaps deposit in the bottom in holding chamber and be difficult to the clearance. Furthermore, the blocking assembly is detachable relative to the crucible body, so that the subsequent independent cleaning of the blocking assembly is facilitated, and the shutdown time is prolonged.

Drawings

FIG. 1 is a schematic cross-sectional view of an evaporation crucible according to an embodiment of the present invention;

FIG. 2 is a schematic structural view of a barrier assembly of an evaporation crucible according to an embodiment of the present invention;

FIG. 3 is a schematic structural view of a barrier assembly of an evaporation crucible according to another embodiment of the present invention;

FIG. 4 is a schematic view of a barrier assembly of an evaporation crucible according to another embodiment of the present invention;

FIG. 5 is a schematic cross-sectional view of an evaporation crucible according to another embodiment of the present invention;

FIG. 6 is a schematic view of a barrier assembly of an evaporation crucible according to another embodiment of the present invention.

Detailed Description

To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

One or more embodiments of the present invention will be described in detail with reference to the accompanying drawings, in which elements such as shapes, sizes, proportions, angles, and numbers of elements are merely examples, and in different embodiments, the same or corresponding elements may be denoted by the same reference numerals, and repeated descriptions thereof will be omitted.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Where the terms "comprising," "having," and "including" are used herein, another element may be added unless an explicit limitation is used, such as "only," "consisting of … …," etc. Unless mentioned to the contrary, terms in the singular may include the plural and are not to be construed as being one in number.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the present invention.

In recent years, as Organic Light-Emitting Diode (OLED) display screens are widely used in mobile phone screens, more and more panel manufacturers begin to build OLED display screen production lines, wherein the evaporation process is a key process affecting the yield of the OLED display screens and is a project that needs to be controlled in the production line production process.

The present invention relates to an OLED device, and more particularly, to an OLED device including a metal film layer and an organic film layer, wherein the metal material used in the metal film layer and the organic material used in the organic film layer are evaporated onto a backplane during a long-term research and development process, for example, silver (Ag), lithium fluoride (LiF), or a part of organic substances may generate particle substance sputtering, and some of the organic substances, such as magnesium (Mg) and ytterbium (Yb), may be easily oxidized to generate oxide particles.

These particles are resistant to high temperature and are not easily decomposed, and can be evaporated on the product along with the evaporation material in the evaporation process, so that the packaging failure, the falling of the film layer, the point-like defect and the like occur on the surface of the product to be processed, and the yield is affected.

In addition, the evaporation process usually uses a crucible to contain evaporation materials for evaporation, a large amount of particulate matter splashes and oxide particles are accumulated in the crucible, and if the particulate matter splashes and the oxide particles are cleaned at irregular time, the particulate matter splashes and the oxide particles are deposited on a back plate along with steam flow, so that the yield of products to be processed is low.

Therefore, it is desirable to provide a solution that reduces the splashing of particulate matter and the deposition of oxide particles onto the backing plate with the vapor stream of the evaporation material.

Next, an evaporation crucible in an embodiment of the present invention will be described in detail with reference to the drawings.

Fig. 1 shows a schematic structural view of an evaporation crucible in an embodiment of the present application, and fig. 2 shows a schematic structural view of a barrier member of an evaporation crucible in an embodiment of the present application. For the purpose of illustration, the drawings show only the structures associated with embodiments of the invention.

Referring to the drawings, an evaporation crucible 100 according to an embodiment of the present application includes a crucible body 10 and a barrier assembly 20.

The crucible body 10 has a holding chamber 11 for holding evaporation materials, and the crucible body 10 is provided with an evaporation outlet 12, and the evaporation outlet 12 is communicated with the holding chamber 11.

Specifically, the evaporation material may include materials forming a Hole Injection Layer (HIL), a Hole Transport Layer (HTL), an Electron Blocking Layer (EBL), an emission layer (EML), a Hole Blocking Layer (HBL), an Electron Transport Layer (ETL), an Electron Injection Layer (EIL), a Cathode (Cathode), and a light extraction layer (CPL) in the OLED device, and may also include other materials that require a film formation using an evaporation process, which is not limited herein.

Specifically, a nozzle is further provided at the evaporation outlet 12 for adjusting the spraying range of the evaporation material.

In some embodiments, the crucible body 10 has a cylindrical shape, and the receiving cavity 11 may also have a cylindrical shape. The evaporation outlet 12 is opened at the top of the crucible body 10 in the vertical direction, and after evaporation of the evaporation material, the evaporation material is evaporated upward to the back plate through the evaporation outlet 12. Specifically, a mask is further disposed between the crucible 100 and the back plate.

The blocking assembly 20 is detachably installed in the accommodating cavity 11, and the blocking assembly 20 includes at least one first blocking piece 21 and at least one second blocking piece 22 arranged at intervals along the axial direction of the accommodating cavity 11.

The first blocking piece 21 is provided with a first circulation portion 211, the second blocking piece 211 covers the first circulation portion 211 in the orthographic projection of the first blocking piece 21 along the axial direction of the accommodating cavity 11, and a gap is formed between the second blocking piece 22 and the inner wall of the accommodating cavity 11. It can be understood that the first flow portion 211 and the gap communicate with each other to form a flow path of the vapor deposition material.

During the process that the particle substance splashing and oxide particles generated in the evaporation process rise along with the steam flow, the particle substance splashing and oxide particles are firstly blocked by one of the first blocking sheet 21 or the second blocking sheet 22, and the rest part flows to the gap between the second blocking sheet 22 and the inner wall of the accommodating cavity 11 through the first flowing part 211 or flows to the first flowing part 211 through the gap between the second blocking sheet 22 and the inner wall of the accommodating cavity 11, since the second barrier rib 22 covers the first flow portion 211 in the orthogonal projection of the first barrier rib 21 along the axial direction of the accommodating chamber 11, part of the particulate matter splash and the oxide particles are blocked by the surface of the second barrier rib 22 facing the first barrier rib 21 or the surface of the first barrier rib 21 facing the second barrier rib 22, and a part of the particulate matter splash and the oxide particles fall onto the first barrier layer 211 or the second barrier sheet 22 due to the reverse force of the barrier.

According to the evaporation crucible 100, the first blocking sheet 21 and the second blocking sheet 22 are matched to block the splashing of the particulate matter and the flowing of the oxide particles out of the evaporation outlet 12 along with the steam, and the position relationship between the first blocking sheet 21 and the second blocking sheet 22 is utilized to collect most of the blocked splashing of the particulate matter and the blocked oxide particles on the first blocking sheet 21 or the second blocking sheet 22, so that the situation that the quality of a product to be processed is influenced by the splashing of the particulate matter and the returning of the oxide particles into the accommodating cavity 11 to be mixed with the evaporation material and the discharging of the particles to the evaporation outlet 12 along with the steam flow again is avoided, or the particles are deposited at the bottom of the accommodating cavity 11 and are difficult to clean. In addition, the blocking component 20 is detachable relative to the crucible body 10, so that the subsequent independent cleaning of the blocking component 20 is facilitated, and the shutdown time is prolonged.

It should also be noted that, compared with a crucible without the barrier assembly 20, the flow cross-sectional area of the evaporation material flowing to the evaporation outlet 12 can be reduced by using the barrier assembly 20 of the present application, so that the evaporation rate is increased and the stability of the evaporation process is improved at the same flow rate.

In some embodiments, the at least one first blocking piece 21 and the at least one second blocking piece 22 are alternately arranged at intervals along the axial direction of the accommodating cavity 11. Therefore, the particle substance splashing and the oxide particles are continuously blocked by the adjacent first blocking sheet 21 and the second blocking sheet 22 in the flowing process along with the steam flow, the blocking effect is improved, and the product quantity rate is improved.

Preferably, the adjacent first blocking pieces 21 and the second blocking pieces 22 have the same spacing distance along the axial direction of the accommodating cavity 11, and this arrangement may further contribute to improving the blocking effect.

It can be known that, in some embodiments, the arrangement manner of the first blocking pieces 21 and the second blocking pieces 22 may be a manner in which two first blocking pieces 21 and one second blocking piece 22 are alternately arranged at intervals, or a manner in which two second blocking pieces 22 and one first blocking piece 21 are alternately arranged at intervals, or a manner in which other numbers of first blocking pieces 21 and second blocking pieces 22 are alternately arranged at intervals, and the arrangement may be specifically performed according to actual conditions, and is not limited in detail herein.

Referring to fig. 1, in some embodiments, the shapes of the first blocking piece 21 and the second blocking piece 22 may match the shape of the accommodating cavity 11, for example, the shapes of the first blocking piece 21 and the second blocking piece 22 are circular.

In some embodiments, the circumferential side wall of the first blocking plate 21 contacts the inner wall of the accommodating cavity 11, so that part of the particulate matter splash and oxide particles are prevented from flowing out from the gap between the first blocking plate 21 and the accommodating cavity 11 to the outlet 12 to be discharged, and the blocking effect is ensured.

Referring to fig. 2, in some embodiments, the first flow portion 211 includes at least one first through hole 2111, and the first through hole 2111 and the gap communicate to form a flow path of the evaporation material.

Specifically, in an embodiment, the first flow-through portion 211 includes only one first through hole 2111, or as shown in fig. 3, the first flow-through portion 211 includes a plurality of first through holes 2111, further, the plurality of first through holes 2111 are arranged in an array, and specifically, the plurality of first through holes 2111 are arranged in a circular array along the center of the first flow-through portion 211.

As shown in fig. 4, further, the blocking assembly 21 includes a mesh member 23, and the mesh member 23 is disposed in the at least one first through hole 2111. Preferably, when the first circulation portion 211 includes only one first through hole 2111, the mesh member 23 is disposed in the first through hole 2111. The provision of the mesh 23 may improve the blocking effect.

In some embodiments, the midline of the first flow-through portion 211 coincides with the centerline of the accommodation cavity 11. Therefore, the sputtering of the particle matter and the oxide particles can be uniformly blocked, and the blocking effect is better.

In some embodiments, the first blocking piece 21 and the second blocking piece 22 are both disposed along a radial direction parallel to the accommodating cavity 11. I.e. to the maximum extent possible, it is the particulate matter spray and oxide particles that are blocked from flowing with the vapor stream during the evaporation process.

In some embodiments, the material of the barrier component 20 is metal, preferably one of tantalum, titanium, aluminum, stainless steel or copper, it should be understood that when the evaporation material is evaporated, a higher temperature is required, so that the evaporation crucible 100 needs to have good thermal conductivity, and the barrier component 20 made of metal has good thermal conductivity, which can help to improve the evaporation effect.

As shown in fig. 5, in order to sufficiently block the splashing of the particulate matter and the outflow of the oxide particles, and prevent the splashing of the particulate matter and the falling of the oxide particles into the accommodating chamber 11 from being mixed with the evaporation material, the first barrier 21 further includes a first barrier 212 surrounding the first flow-through portion 211, and the first barrier 212 farthest from the evaporation outlet 12 is inclined toward the evaporation outlet 12 in the axial direction of the accommodating chamber 11 and connected to the first flow-through portion 211. In addition, when the plurality of first barrier sheets 21 are provided, in addition to the first barrier section 212 which is most distant from the vapor deposition outlet 12 being provided to be inclined toward the vapor deposition outlet 12 along the axial direction of the accommodating chamber 11, the first barrier sections 212 of the other first barrier sheets 21 may be provided to be inclined toward the vapor deposition outlet 12 along the axial direction of the accommodating chamber 11.

When the first blocking plate 21 is disposed closer to the evaporation outlet 12 than the second blocking plate 22, the first blocking plate 21 is inclined to increase the angle of the reverse movement of the splashed particles and the oxide particles after the splashed particles and the oxide particles are blocked, so that the probability of the reverse movement of the splashed particles and the oxide particles onto the second blocking plate 22 is increased, and therefore, more of the splashed particles and the oxide particles can be collected into the second blocking plate 22.

When the second blocking plate 22 is disposed closer to the evaporation outlet 12 than the first blocking plate 21, the first blocking plate 21 is inclined to form a groove between the first blocking plate 21 and the inner wall of the accommodating chamber 11 for receiving the splashed particles of the particulate matter and the oxide particles, so that the probability of receiving the splashed particles of the particulate matter and the oxide particles is increased, and the splashed particles of the particulate matter and the oxide particles collected on the first blocking plate 21 are prevented from falling into the accommodating chamber 11 and being mixed with the evaporation material.

For the same reason, the first blocking portion 212 closest to the evaporation outlet 12 is inclined away from the evaporation outlet 12 along the axial direction of the accommodating chamber 11 and is connected to the first circulating portion 211. In this way, the distance between the first blocking portion 212 closest to the evaporation outlet 12 and the first blocking sheet 21 on the side away from the evaporation outlet 12 is reduced along the axial direction of the accommodating cavity due to the inclination, so that the probability of the particulate matter splash and the oxide particles flowing to the first flow portion 211 is reduced, and the probability of the particulate matter splash and the oxide particles being blocked by the first blocking portion 212 is increased, and therefore, the particulate matter splash and the oxide particles can be more collected on the second blocking sheet 22.

In other embodiments, the first blocking portion 212 farthest from the evaporation outlet 12 is disposed obliquely toward the evaporation outlet 12 along the axial direction of the accommodating chamber 11, and the first blocking portion 212 closest to the evaporation outlet 12 is disposed obliquely away from the evaporation outlet 12 along the axial direction of the accommodating chamber 11, so that the particle material splashing and the oxide particles are prevented from returning to the accommodating chamber and mixing with the evaporation material, and the mixture is discharged to the evaporation outlet along with the steam flow again to affect the quality of the product to be processed, or is deposited at the bottom of the accommodating chamber and is difficult to clean.

Specifically, the first blocking section 212 farthest from the evaporation outlet 12 is inclined toward the evaporation outlet 12 along the axial direction of the accommodating chamber 11 by an angle greater than 0 degree and less than or equal to 60 degrees, and similarly, the first blocking section 212 closest to the evaporation outlet 12 is inclined away from the evaporation outlet 12 along the axial direction of the accommodating chamber 11 by an angle greater than 0 degree and less than or equal to 60 degrees.

In other embodiments, the second barrier 22 has a recess towards the evaporation outlets 12. Thus, since the second barrier rib 22 has the concave portion, when the particulate matter splash and the oxide particles are blocked by the first barrier rib 21 and fall into the concave portion of the second barrier rib 22, the movement locus of the particulate matter splash and the oxide particles is limited by the concave portion and is not easy to escape, thereby improving the blocking effect of the second barrier rib 22.

Further, a concave portion is provided on a surface of the second barrier sheet 22 on a side facing the vapor deposition outlet 12. The arrangement is simple. In other embodiments, the second barrier 22 is recessed in a direction away from the vapor deposition outlet 12 to form a concave portion, and it is understood that the second barrier 22 may be recessed in shape as a whole. Like this, when guaranteeing that the concave part can collect particulate matter splash and oxide granule betterly, concave second blocks piece 22 and has a bigger surface area to at particulate matter splash and oxide granule along with steam flow first circulation portion 211 flow to the second and block the clearance in-process between piece 22 and the inner wall of holding chamber 11, increased with particulate matter splash and oxide granule area of contact, improved and blocked the effect.

Specifically, the cross-sectional shape of the recess in the axial direction of the accommodation chamber 11 is arc-shaped. The inner surface of the arc-shaped concave part is smooth, and the particulate matter splash and the oxide particles falling into the concave part of the second barrier plate 22 can slide to the bottom of the concave part along the arc-shaped inner surface, so that the particulate matter splash and the oxide particles can be better collected, and the particulate matter splash and the oxide particles are prevented from overflowing the second barrier plate 22 too early. In other embodiments, the cross-sectional shape of the concave portion along the axial direction of the accommodating chamber 11 may also be, for example, a rectangle, a square, a regular trapezoid, an inverted trapezoid, a polygon, or a combination of partial shapes thereof, which is not limited herein.

As shown in fig. 6, in order to facilitate the installation and removal of the baffle assembly 20 to and from the accommodating chamber 11, the baffle assembly 20 includes a suspension member 24, at least one first baffle plate 21 and at least one second baffle plate 22 are fixed to the suspension member 24, and the suspension member 24 can be suspended at the evaporation outlet 12 of the crucible body 10.

Specifically, the suspension member 24 includes a suspension tube 241 and a connection member 242, the suspension tube 241 includes a tube body 2411, one end of the tube body 2411 has an outlet 2412, the suspension tube 241 further includes a suspension edge 2413, the suspension edge 2413 is connected to an edge of the outlet 2412 and extends along a side away from the outlet 2412, the suspension edge 2413 is supported on an edge of the evaporation outlet 12 along an axial direction of the accommodating cavity 11, and the connection member 242 is used for connecting and fixing the at least one first blocking sheet 21 and the at least one second blocking sheet 22 to the tube body 2411.

Specifically, the hanging edge 2413 is disposed around the edge of the outlet 2412 in the circumferential direction of the outlet 2412. In some embodiments, the hanging edge 2413 extends in a radial direction of the housing chamber 11 to a side away from the outlet 2412.

Specifically, the connecting element 242 includes a plurality of first connecting elements 2421 and a plurality of second connecting elements 2422, the plurality of first connecting elements 2421 are used for connecting the cylinder 2411 and the first blocking plate 21, and the plurality of second connecting elements 2422 are used for connecting the first blocking plate 21 and the second blocking plate 22. More specifically, the connection 242 includes a bolt.

Specifically, in an embodiment, the barrel 2411 has a bottom wall, the bottom wall is provided with a mounting hole, a projection area of the mounting hole along the axial direction of the accommodating cavity 11 covers the first circulating portion 211, a fixing edge is formed between the mounting hole and the barrel wall of the barrel 221, and the first blocking piece 21 and the second blocking piece 22 are connected and fixed to the fixing edge through the connecting piece 242. In other embodiments, the fixing edge may be used as the first barrier 21.

Based on the same inventive concept, the present application further provides an evaporation apparatus, which includes the evaporation crucible 100.

Specifically, the evaporation apparatus may include a plurality of evaporation crucibles 100, and may further include a vacuum chamber, a heating device, and a mounting platform, where the evaporation crucibles 100, the heating device, and the mounting platform are located in the vacuum chamber, the heating device is configured to heat the evaporation crucibles 100, and the mounting platform is located on an upstream side of the evaporation crucibles 100 along the steam flow, and is configured to mount a back plate.

The evaporation crucible 100 and the evaporation device can prevent the particulate matter splash and the oxide particles from flowing out along with the steam to the evaporation outlet 12 by the cooperation of the first barrier sheet 21 and the second barrier sheet 22, and can prevent most of the particulate matter splash and the oxide particles from being collected on the first barrier sheet 21 by the position relationship between the first barrier sheet 21 and the second barrier sheet 22, thereby preventing the particulate matter splash and the oxide particles from returning to the accommodating cavity 11 to be mixed with the evaporation material and being discharged to the evaporation outlet 12 along with the steam again to influence the quality of the product to be processed, or being deposited at the bottom of the accommodating cavity 11 to be difficult to clean. In addition, the blocking component 20 is detachable relative to the crucible body 10, so that the subsequent independent cleaning of the blocking component 20 is facilitated, and the shutdown time is prolonged.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.