阅读说明：本技术 水晶探头遮罩装置 (Crystal probe shade device ) 是由 阮丽霞 于 2019-10-30 设计创作，主要内容包括：本发明公开了一种水晶探头遮罩装置。本发明通过在水晶探头遮罩装置的遮罩开口处设置过滤网,且由马达通过切换杆控制过滤网的切换或旋转,以减少直接沉积在晶振片表面的材料,从而提高晶振片的使用寿命。(The invention discloses a crystal probe shielding device. According to the invention, the filter screen is arranged at the shield opening of the crystal probe shield device, and the motor controls the switching or rotation of the filter screen through the switching rod, so that the material directly deposited on the surface of the crystal oscillator piece is reduced, and the service life of the crystal oscillator piece is prolonged.)

1. A crystal probe masking device, comprising:

a mask, said mask having an opening;

the crystal oscillator piece retainer is arranged in the cavity of the shade and comprises a crystal oscillator piece;

the filtering structure is arranged above the opening and comprises a filtering net and at least one switching rod; and

and the motor is electrically connected with the at least one switching rod and is used for controlling the replacement of the filter screen through the switching rod.

2. The crystal probe masking apparatus of claim 1, wherein the motor is further electrically connected to the crystal plate holder for controlling the replacement of the crystal plate.

3. The crystal probe masking apparatus according to claim 1, wherein the at least one switching rod is used for fixedly connecting the filter screen.

4. A crystal probe masking apparatus as claimed in claim 3, wherein the at least one switching rod is a rolling rod, and the filter screen covers the opening.

5. The crystal probe masking apparatus according to claim 1, wherein the at least one switching rod is a rotating rod, the filter screen is parallel to the opening, and the area of the filter screen is larger than that of the opening.

6. A crystal probe masking apparatus as claimed in claim 1, wherein the diameter of the opening is in the range of 2 to 3 mm.

7. The crystal probe masking apparatus according to claim 1, wherein the center of the opening is coaxial with the center of the crystal oscillator plate.

8. The crystal probe masking apparatus according to claim 1, wherein the filter screen has a plurality of openings, and the plurality of openings are arranged regularly.

9. The crystal probe masking apparatus of claim 8, wherein the plurality of openings are circular and square in shape.

10. A crystal probe masking apparatus as claimed in claim 1, wherein the material of the filter mesh comprises stainless steel.

Technical Field

The invention belongs to the technical field of display, and particularly relates to a crystal probe shielding device.

Background

The main mode of OLED device manufacture is heating evaporation coating, and in the evaporation process, a crystal oscillator plate is adopted to monitor the evaporation rate and the film thickness. The evaporated material is deposited on the crystal oscillator plate through the opening area of the film thickness detection device, and the real-time plating rate and the film thickness are displayed by utilizing the linear relation between the natural frequency of the crystal oscillator plate and the film thickness. Along with the increase of the film thickness, the fundamental frequency of the crystal oscillator plate is reduced, and if the fundamental frequency is reduced too much, the frequency hopping phenomenon of the crystal oscillator plate can be caused, so that the monitored film thickness is inaccurate. Therefore, after a certain thickness is deposited on the crystal oscillator plate, the crystal oscillator plate needs to be replaced in time. When the crystal oscillator plate is replaced, the machine needs to be stopped and the cavity needs to be opened, so that the productivity is influenced.

In addition, the mask of the crystal oscillator piece holder of the evaporated crystal probe is provided with an opening, and the diameter of the opening is larger than that of the crystal oscillator piece, so that evaporated materials can be directly deposited on the crystal oscillator piece through the opening.

Therefore, how to increase the service life of the crystal oscillator is an important issue in the display technology.

Disclosure of Invention

The embodiment of the invention provides a crystal probe shielding device, wherein a filter screen is arranged at a shielding opening of the crystal probe shielding device, and a motor controls the switching or rotation of the filter screen through a switching rod, so that materials directly deposited on the surface of a crystal oscillator piece are reduced, and the service life of the crystal oscillator piece is prolonged.

The invention provides a crystal probe shade device, which comprises: a mask, said mask having an opening; the crystal oscillator piece retainer is arranged in the cavity of the shade and comprises a crystal oscillator piece; the filtering structure is arranged above the opening and comprises a filtering net and at least one switching rod; and the motor is electrically connected with the at least one switching rod and is used for controlling the replacement of the filter screen through the switching rod.

Furthermore, the motor is electrically connected with the crystal oscillator piece retainer to control the replacement of the crystal oscillator piece.

Further, the at least one switching rod is used for fixedly connecting the filter screen.

Further, the at least one switching rod is a rolling rod, and the filter screen covers the opening.

Further, at least one switching rod is a rotating rod, the filter screen is parallel to the opening, and the area of the filter screen is larger than that of the opening.

Further, the diameter of the opening ranges from 2 to 3 millimeters.

Further, the center of the opening and the center of the crystal oscillator plate are coaxially arranged.

Furthermore, a plurality of openings are arranged on the filter screen, and the openings are regularly arranged.

Further, the shape of the plurality of openings includes a circle and a square.

Further, the material of the filter screen comprises stainless steel.

The embodiment of the invention provides a crystal probe shielding device, wherein a filter screen is arranged at a shielding opening of the crystal probe shielding device, and a motor controls the switching or rotation of the filter screen through a switching rod, so that materials directly deposited on the surface of a crystal oscillator piece are reduced, and the service life of the crystal oscillator piece is prolonged.

Drawings

The technical solution and the advantages of the present invention will be apparent from the following detailed description of the embodiments of the present invention with reference to the accompanying drawings.

FIG. 1 is a side view of a crystal probe masking apparatus according to an embodiment of the present invention.

Fig. 2 is a front view of the crystal probe masking apparatus shown in fig. 1.

Fig. 3 is a schematic structural diagram of a filter screen of the crystal probe masking apparatus shown in fig. 1.

Fig. 4 is a schematic view of a connection structure of a motor of the crystal probe masking apparatus shown in fig. 1.

FIG. 5 is a side view of a crystal probe masking apparatus according to another embodiment of the present invention.

FIG. 6 is a front view of the crystal probe masking apparatus shown in FIG. 5.

FIG. 7 is a schematic view of the connection structure of the motor of the crystal probe masking apparatus shown in FIG. 5.

FIG. 8 is a side view of a crystal probe masking apparatus according to another embodiment of the present invention.

FIG. 9 is a front view of the crystal probe masking apparatus shown in FIG. 8.

FIG. 10 is a schematic view showing a connection structure of a motor of the crystal probe masking apparatus shown in FIG. 8.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.