阅读说明：本技术 一种长条高真空阴极电弧靶装置 (Long-strip high-vacuum cathode arc target device ) 是由 廖斌 华青松 何光宇 欧阳晓平 罗军 陈琳 张旭 吴先映 庞盼 韩然 英敏菊 于 2019-12-09 设计创作，主要内容包括：本发明公开了一种长条高真空阴极电弧靶装置,真空室用于放置长条高真空阴极电弧靶装置,包括：主支撑架、阳极、阴极靶材、屏蔽电极、第一屏蔽环、永磁体、触发电极和旋转部件；主支撑架上安装所述旋转部件；旋转部件与阴极靶材固定连接,并进行旋转动作；阳极与主支撑架连接；第一屏蔽环固定在阳极上,屏蔽阴极靶材和真空室；屏蔽电极包裹阴极靶材,并且阴极靶材的内部设置有永磁体；触发电极安装在屏蔽电极上,并且触发电极与触发电源电性连接。本发明提供了一种长条高真空阴极电弧靶装置,实现其能在高真空下稳定、可靠的弧光放电,同时大幅减低起弧时因温度过高而带来的颗粒喷射和提高阴极寿命。(The invention discloses a long-strip high-vacuum cathode arc target device, wherein a vacuum chamber is used for placing the long-strip high-vacuum cathode arc target device, and the device comprises: the device comprises a main support frame, an anode, a cathode target, a shielding electrode, a first shielding ring, a permanent magnet, a trigger electrode and a rotating part; the main support frame is provided with the rotating part; the rotating part is fixedly connected with the cathode target and performs rotating action; the anode is connected with the main supporting frame; the first shielding ring is fixed on the anode and shields the cathode target and the vacuum chamber; the shielding electrode wraps the cathode target, and a permanent magnet is arranged inside the cathode target; the trigger electrode is arranged on the shielding electrode and is electrically connected with the trigger power supply. The invention provides a long-strip high-vacuum cathode electric arc target device, which can realize stable and reliable arc discharge under high vacuum, greatly reduce particle injection caused by overhigh temperature during arc striking and prolong the service life of a cathode.)

1. A long strip high vacuum cathode arc target device, a vacuum chamber is used for installing the long strip high vacuum cathode arc target device, which is characterized by comprising: the device comprises a main support frame, a cathode target, a shielding electrode, a first shielding ring, a permanent magnet, a trigger electrode and a rotating part; the main support frame is provided with the rotating part; the rotating part is fixedly connected with the cathode target and performs rotating action; the vacuum chamber is used as an anode, and the anode is connected with the main supporting frame; the first shielding ring is fixed on the anode and shields the cathode target and the vacuum chamber; the shielding electrode wraps the cathode target, and a permanent magnet is arranged inside the cathode target; the trigger electrode is arranged on the shielding electrode and is electrically connected with a trigger power supply.

2. The elongated high vacuum cathodic arc target apparatus of claim 1, wherein said rotating member comprises: the device comprises a motor, a driving gear, a first driven gear and a rotating shaft; the first driven wheel is mounted on the rotating shaft, the driving gear is mounted on an output shaft of the motor, and the driving gear is meshed with the first driven wheel; the rotating shaft is fixedly connected with the cathode target.

3. The elongated high vacuum cathode electric arc target apparatus according to claim 1, wherein the shielding electrode comprises a first shielding electrode, a second shielding electrode and a third shielding electrode; the first shielding electrode is connected with the current-limiting resistor and grounded, and the second shielding electrode and the third shielding electrode shield the first shielding electrode and the anode.

4. The elongated high vacuum cathode arc target apparatus according to claim 1, further comprising a polytetrafluoroethylene shield ring, a polymer shield; the polytetrafluoroethylene shielding ring is arranged between the main supporting frame and the polymer shielding pole; the polymer shield shields the anode and the cathode target.

5. The long strip high vacuum cathode electric arc target device according to claim 1, wherein a polytetrafluoroethylene shielding base is mounted at the end of the cathode target, and a second driven gear is mounted on the polytetrafluoroethylene shielding base and is matched with the cathode target.

6. The elongated high vacuum cathode arc target apparatus according to claim 1, wherein the trigger electrode is connected to a current limiting resistor and grounded.

7. The long strip high vacuum cathode electric arc target device according to claim 1, wherein the trigger electrode contacts the cathode target under the control of the trigger power supply to initiate arc and discharge cathode arc spots.

8. The long strip high vacuum cathode electric arc target device according to claim 7, wherein the cathode arc spot is periodically moved by the permanent magnet to circularly move around the outer long axis of the cathode target.

9. The elongated high vacuum cathode arc target apparatus according to any one of claims 1 to 8, further comprising a cooling duct; the cooling pipeline penetrates through the cathode target, and cooling liquid is introduced into the cooling pipeline.

Technical Field

The invention relates to the technical field of coating, in particular to a long-strip high-vacuum cathode arc target device.

Background

With the rapid development of scientific technology, the requirements on the surface modification technology of materials are higher and higher, and the traditional single surface modification technology is more and more difficult to meet the technical requirements on industrial production; the trend of technical development is the synthesis, integration and multi-functionalization.

In recent years, several surface modification composite technologies have been developed and put into industry one after another, and have played an important role. For example, the composite technology of the magnetron sputtering technology and the arc ion plating technology is compatible with the advantages that the magnetron sputtering technology can deposit films with large area and high uniformity and the ion plating technology can prepare films with high bonding force, and the process practicability is improved. And like multi-arc ion plating, a plurality of arc sources act together, so that the deposition of the multi-element composite film is realized, the deposition efficiency is obviously improved, and the technology is widely applied to the machining industry of cutters and parts at present. Multi-arc ion plating is a very important modification means in the surface deposition technology. However, it has important disadvantages that the compactness of the deposited film layer is not high, micron-sized large particles exist, the size of the processed workpiece is limited, and the temperature sensitive substrate is not suitable, etc. The magnetic filtration cathode vacuum arc deposition technology is a novel ion beam film preparation method developed in recent years, large particles and neutral atoms generated by an arc source are filtered through the magnetic filtration technology to obtain pure plasma beams without large particles, the problem caused by the existence of the large particles in the common arc source deposition method is effectively solved, the prepared film has excellent performance, but the important defects of the direct current magnetic filtration deposition technology are that the effective area is limited during film deposition, the effective area is within 160mm of the diameter, and uniform film coating on the surfaces of some large-size workpieces cannot be realized.

Therefore, a need exists in the art for a coating apparatus that provides a stable and reliable arc discharge in high vacuum, while significantly reducing particle emissions caused by excessive temperatures during arcing and increasing cathode lifetime.

Disclosure of Invention

In view of the above, the present invention provides a long high vacuum cathode arc target device, which can realize stable and reliable arc discharge under high vacuum, and greatly reduce particle ejection caused by over-high temperature during arc striking and prolong the service life of the cathode.

In order to achieve the above purpose, the invention provides the following technical scheme:

an elongated high vacuum cathode arc target assembly, a vacuum chamber for mounting the elongated high vacuum cathode arc target assembly, comprising: the device comprises a main support frame, a cathode target, a shielding electrode, a first shielding ring, a permanent magnet, a trigger electrode and a rotating part; the main support frame is provided with the rotating part; the rotating part is fixedly connected with the cathode target and performs rotating action; the vacuum chamber is used as an anode, and the anode is connected with the main supporting frame; the first shielding ring is fixed on the anode through a ceramic screw to shield the cathode target and the vacuum chamber; the shielding electrode wraps the cathode target, and a permanent magnet is arranged inside the cathode target; the trigger electrode is arranged on the shielding electrode and is electrically connected with a trigger power supply.

Through the technical scheme, the invention has the technical effects that: under the control of a trigger power supply, a trigger electrode contacts a cathode target material to strike an arc, the cathode target generates arc discharge, and the arc starts to work normally; the arc spot periodically moves under the action of the permanent magnet and circularly moves around the outer long axis direction of the cathode target; the cathode target material is driven by a motor to perform circular motion, and the arc spots are always in circular motion in the direction of the outer long axis under the action of the three shielding electrodes; plasma generated by the arc spot moves to the vacuum chamber under the traction of the initial speed to reach the surface of the workpiece for deposition; when the deposition is finished, the power supply is turned off, and the arc spot is automatically extinguished under the condition of no auxiliary voltage (cathode-anode voltage).

Preferably, in the above long high vacuum cathode arc target apparatus, the rotating member includes: the device comprises a motor, a driving gear, a first driven gear and a rotating shaft; the first driven wheel is mounted on the rotating shaft, the driving gear is mounted on an output shaft of the motor, and the driving gear is meshed with the first driven wheel; the rotating shaft is fixedly connected with the cathode target.

Through the technical scheme, the invention has the technical effects that: the uniformity of the film layer is ensured.

Preferably, in the above-mentioned long high vacuum cathode electric arc target device, the shielding electrode includes a first shielding electrode, a second shielding electrode and a third shielding electrode; the first shielding electrode is connected with the current-limiting resistor and grounded, and the second shielding electrode and the third shielding electrode shield the first shielding electrode and the anode.

Through the technical scheme, the invention has the technical effects that: the magnetic field intensity on the back and the side of the arc spot basically does not influence the motion of the arc spot of the arc target under the matching of the three shielding electrode systems, and the stable and controllable arc spot arcing state can be realized. The shielding mode mainly comprises the shielding of an electric field and a magnetic field; the metal has shielding effect on the electric field; the magnetic conductive metal such as Fe, Co, Ni and the like has shielding effect on the magnetic field.

Preferably, in the above long high vacuum cathode arc target device, the device further comprises a polytetrafluoroethylene shield ring polymer shield; the polytetrafluoroethylene shielding ring is arranged between the main supporting frame and the polymer shielding pole; the polymer shielding pole shields the anode and the cathode target, and is arranged on the surface of the long-strip arc metal flange and used for being insulated from the vacuum chamber when being connected with the vacuum chamber.

Preferably, in the above long high vacuum cathode arc target device, a polytetrafluoroethylene shielding base is mounted at the end of the cathode target, a second driven gear is mounted on the polytetrafluoroethylene shielding base, and the second driven gear is matched with the cathode target.

Through the technical scheme, the invention has the technical effects that: ensuring the normal rotation of the cathode target material.

Preferably, in the above-mentioned long high vacuum cathode arc target device, the trigger electrode is connected to a current limiting resistor and grounded.

Preferably, in the above long high vacuum cathode arc target device, the trigger electrode contacts the cathode target under the control of the trigger power supply to initiate arc, so that the cathode arc spot discharges.

Preferably, in the above long high vacuum cathode arc target device, the cathode arc spot moves periodically under the action of the permanent magnet and moves circularly around the long axis direction of the cathode target.

Through the technical scheme, the invention has the technical effects that: the arc spot can be ensured to circularly reciprocate by controlling the magnetic field in the cathode target material, and high stability and reliability are kept; the problem of uneven deposition caused by the limitation of the movement speed of the arc spot can be avoided; the system can enable the target material to realize higher-valence ion excitation under the coordination of a subsequent magnetic field, namely the average charge state of ions led out from the plasma is higher, which is beneficial to the deposition of a film layer, meanwhile, the service life of the cathode arc target is longer, basically more than 200 hours, which is more than 25 times of the service life of the existing direct current magnetic filtration deposition, the labor cost for replacing the target material is saved, and the large-scale industrialization is easier to realize.

Preferably, in the above long high vacuum cathode arc target device, a cooling pipe is further included; the cooling pipeline penetrates through the cathode target, and cooling liquid is introduced into the cooling pipeline.

As can be seen from the above technical solutions, compared with the prior art, the technical effects of the present invention are:

1. the invention provides a large-size strip cathode arc target, the maximum extraction size can be any length, the limitation of the extraction area of a round cathode target is avoided, the target can be designed according to the size of a sample, and the industrial application is greatly facilitated;

2. compared with the existing cathode structure target design with the diameter of 100mm, the beam current density of the device can be 1/5 or lower than the original density, under the condition of the same arcing current, the heat productivity of the cathode arc target per unit area is smaller, micron-sized particles generated due to overheating can be obviously inhibited, and the film forming quality is greatly improved;

3. compared with the existing circular target design, the device can control the temperature of the substrate to be below 40 ℃ when depositing the film layer, and is very suitable for large-area surface modification of the substrate extremely sensitive to temperature;

4. compared with the existing cylindrical target design, the cathode target material has lower surface problems, so that the arc breaking caused by target material poisoning is more easily avoided, and the deposition of an oxide film layer is more conveniently realized;

5. compared with the existing cylindrical arc technology, the arc striking of the utility model is stable arc striking under high vacuum (the vacuum degree is less than 3 multiplied by 10)^-3Pa), the arc spot can be ensured to circularly reciprocate by controlling the magnetic field in the cathode target material, and high stability and reliability are kept; the problem of uneven deposition caused by the limitation of the motion speed of the arc spot can be avoided; meanwhile, the prior cylindrical arc technology is easy to preferentially ablate at the input end of current, the uniformity of a film layer of the cylindrical arc technology is seriously influenced, the ablation homogenization at two ends is realized by controlling the strength of magnetic fields at two ends, and the industrialized batch production of the cylindrical arc technology is further promoted.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

FIG. 1 is a schematic diagram of the structure of the present invention;

fig. 2 is a schematic structural diagram of the shielding electrode of the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The embodiment of the invention discloses a long-strip high-vacuum cathode electric arc target device, which can realize stable and reliable arc discharge under high vacuum, greatly reduce particle injection caused by overhigh temperature during arc striking and prolong the service life of a cathode.

An elongated high vacuum cathode arc target assembly, a vacuum chamber for mounting the elongated high vacuum cathode arc target assembly, comprising: the main support frame 111, the cathode target 107, the shielding electrode, the first shielding ring 102, the permanent magnet 106, the trigger electrode 116 and the rotating component; a rotating part is arranged on the main supporting frame 111; the rotating part is fixedly connected with the cathode target 107 and rotates; the vacuum chamber is used as an anode, and the anode is connected with the main support frame 111; the first shield ring 102 is fixed on the anode, shielding the cathode target 107 and the vacuum chamber; the shielding electrode wraps the cathode target 107, and a permanent magnet 106 is arranged inside the cathode target 107; the trigger electrode 116 is mounted on the shielding electrode, and the trigger electrode 116 is electrically connected to a trigger power source.

In order to further optimize the above technical solution, the rotating member includes: a motor 112, a driving gear 113, a first driven gear 110, and a rotation shaft 109; a first driven wheel 110 is arranged on the rotating shaft 109, a driving gear 113 is arranged on an output shaft of the motor 112, and the driving gear 113 is meshed with the first driven wheel 110; the rotating shaft 109 is fixedly connected to the cathode target 107.

In order to further optimize the above solution, the shielding electrode comprises a first shielding electrode 101, a second shielding electrode 105 and a third shielding electrode 108; the first shielding electrode 101 is connected to the current limiting resistor and grounded, and the second shielding electrode 105 and the third shielding electrode 108 shield the first shielding electrode 101 and the anode.

In order to further optimize the technical scheme, the device also comprises a polytetrafluoroethylene shielding ring 114 and a polymer shielding pole 115; the polytetrafluoroethylene shielding ring 114 is arranged between the main supporting frame 111 and the polymer shielding pole 115; a polymer shield 115 shields the anode and cathode targets 107.

In order to further optimize the technical scheme, the polytetrafluoroethylene shielding base 104 is mounted at the tail end of the cathode target 107, the second driven gear 103 is mounted on the polytetrafluoroethylene shielding base 104, and the second driven gear 103 is matched with the cathode target 107.

In order to further optimize the above technical solution, the trigger electrode 116 is connected to the current limiting resistor and grounded.

In order to further optimize the technical scheme, the trigger electrode 116 is in contact with the cathode target 107 to ignite arc under the control of the trigger power supply, and the cathode arc spot discharges.

In order to further optimize the technical scheme, the cathode arc spot periodically moves under the action of the permanent magnet 106 and circularly moves around the outer long axis direction of the cathode target 107.

In order to further optimize the technical scheme, the device also comprises a cooling pipeline 117; the cooling pipe 117 penetrates the cathode target 107, and a cooling liquid is introduced into the inside.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.