Preparation method of electronic device and multi-mode electronic sensor
阅读说明：本技术 一种表皮电子器件和多模态表皮电子传感器的制备方法 (Preparation method of electronic device and multi-mode electronic sensor ) 是由 臧剑锋 曾志康 黄钊 吴志刚 于 2019-11-27 设计创作，主要内容包括：本发明公开了一种表皮电子器件和多模态表皮电子传感器的制备方法,属于柔性表皮电子领域。包括：选取表面无黏性聚合物基板,对其表面进行等离子清洗,使其对金属薄膜具有弱吸附性,将金属薄膜平铺在该基板表面；将该基板送入激光切割机,调节激光脉冲频率、切割速率和切割高度,按照目标图案对基板表面的金属进行切割,同时不损伤基板；去除基板表面多余金属,只留下目标金属图案,通过贴附转移,将金属图案转移到表面黏性更强的表皮电子基底表面。通过本发明实现了聚合物基板上的金属薄膜的高精度图案化,以及金属薄膜图案的室温下转移,且工艺流程简单低成本。(The invention discloses a preparation method of an epidermal electronic device and a multi-mode epidermal electronic sensor, and belongs to the field of flexible epidermal electronics. The method comprises the following steps: selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to ensure that the polymer substrate has weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate; sending the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to a target pattern without damaging the substrate; and removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate with stronger surface viscosity through attaching and transferring. The invention realizes the high-precision patterning of the metal film on the polymer substrate and the room-temperature transfer of the metal film pattern, and has simple process flow and low cost.)
1. A method for manufacturing a surface electronic device, comprising the steps of:
s1, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate;
s2, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to a target pattern without damaging the substrate;
and S3, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate with the surface with stronger viscosity through attaching and transferring.
2. The method of claim 1, wherein the non-adhesive polymer substrate is a PET film or a PDMS film.
3. The method according to claim 1, wherein the metal thin film is a copper foil or an aluminum foil having a thickness of 5 to 30 μm.
4. The method of claim 1, wherein if epidermal electronics is used to detect electrocardio/myoelectricity, the target pattern comprises: the device comprises three biological electrodes and corresponding conducting paths, wherein the ground electrode is used for defining a potential zero point, the working electrode and the reference electrode are used for collecting potential change of the skin surface caused by electrocardio/myoelectric activity, and the conducting paths are used for communicating with external equipment;
if the skin electronics is used to detect skin electricity, the target pattern comprises: two electrodes for detecting changes in conductance/resistance of the skin between the two electrodes due to sweat gland activity and respective conductive paths for communicating with an external device;
if the epidermal electronics is used to detect brain electricity, the target pattern comprises: nine biological electrodes and corresponding conductive paths, wherein the ground electrode is used for defining a potential zero point, the six working electrodes and the two reference electrodes are used for acquiring the potential change of the brain electricity, and the conductive paths are used for communicating with external equipment;
if the skin electronics is used for wireless communication, the target pattern comprises: and the four loop coils are used for carrying out antenna required by wireless information transmission to an external receiving device.
5. The method of claim 4, wherein the bioelectrode center-to-center spacing is between 25mm and 40mm and the radius of the toroidal coil is between 5cm and 10 cm.
6. The method of claim 4, wherein the conductive path is a serpentine line structure, the bioelectrode is a half-crossed serpentine line structure, and the loop coil is a serpentine line structure.
7. The method of claim 1, wherein the skin electronic substrate is water transfer tattoo paper.
8. A preparation method of a multi-modal epidermal electronic sensor is characterized by comprising the following steps:
s1, scratching a graphite rod on sand paper to form a graphite particle layer on the sand paper;
s2, transferring the graphite particle layer to the surface of the epidermal electronic substrate with stronger surface viscosity through attaching transfer;
s3, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate;
s4, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to the target pattern without damaging the substrate;
and S5, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate of the surface with the graphite particle layer through attaching and transferring to ensure that two ends of the graphite region are in good contact with the copper foil.
9. A preparation method of a multi-modal epidermal electronic sensor is characterized by comprising the following steps:
s1, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate;
s2, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to a target pattern without damaging the substrate;
s3, scratching the graphite rod on the abrasive paper to form a graphite particle layer on the abrasive paper;
s4, transferring the graphite particle layer to the surface of the epidermal electronic substrate with stronger surface viscosity through attaching transfer;
and S5, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate of the surface with the graphite particle layer through attaching and transferring to ensure that two ends of the graphite region are in good contact with the copper foil.
10. The method according to claim 8 or 9, wherein the layer of graphite particles is formed as a rectangular area of 2mm x 10 mm.
Technical Field
The invention belongs to the field of flexible epidermal electronics, and particularly relates to a preparation method of an epidermal electronic device and a multi-mode epidermal electronic sensor.
Background
As one of the flexible electronics, the mechanical properties of the epidermal electronic system match those of human skin, and is lightweight and breathable. The sensor can be attached to the surface of human skin to detect physiological signals such as electrocardio, respiration, myoelectricity and the like temporary transfer tattoos.
Conventional methods of manufacturing skin electronic devices rely on standard microfabrication processes, including: spin coating, photolithography, wet or dry etching, and transfer printing to achieve patterning of the conductive material on the flexible substrate. Such fabrication methods have high patterning accuracy, but involve high raw material and process costs, and long process cycle times.
Another type of "cut and paste" based method is to first attach a polymer-metal laminate to the surface of a Thermal Release Tape (TRT) and mechanically engrave the polymer-metal laminate with a designed pattern using a bench top electronic cutting machine. The TRT tape is then tack-deactivated by heating to above 100 deg. so that the excess polymer-metal laminate is easily removed with tweezers, leaving only the designed pattern. And finally transferring the polymer-metal laminated pattern to the surface of the tattoo sticker or medical adhesive tape. The method has low process cost and short process period. There are several disadvantages, however: (1) the cutting precision of the blade type cutting head is limited, the minimum line width is about 200 mu m, and the blade type cutting head is easy to wear along with use and is not suitable for preparing a fine patterning device; (2) the polymer-metal laminate is cut and transferred as a whole, and the existence of the polymer increases the thickness of the metal electrode on one hand, further increases the contact resistance with the skin and is not beneficial to the measurement of physiological electric signals; on the other hand, only the metal layer side of the polymer-metal lamination has conductivity, so that the combination of the polymer-metal lamination with other conductive materials and preparation processes is limited; (3) the TRT adhesive tape introduces high temperature of more than 100 degrees, and restricts the combination with functional materials which cannot resist high temperature.
Disclosure of Invention
Aiming at the defects and improvement requirements of the prior art, the invention provides a preparation method of a skin electronic device, which aims to realize high-precision (20 mu m) patterning of a metal single layer by using a high-power-density laser beam, realize metal support and transfer at room temperature by using a weak-adsorption substrate pretreated by plasma cleaning, prepare a tattoo-like skin electronic device and realize measurement of physiological signals such as electrocardio, respiration and the like.
To achieve the above object, according to a first aspect of the present invention, there is provided a method for manufacturing a surface electronic device, the method comprising the steps of:
s1, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate;
s2, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to a target pattern without damaging the substrate;
and S3, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate with the surface with stronger viscosity through attaching and transferring.
Specifically, the non-adhesive polymer substrate is a PET film or a PDMS film.
Specifically, the metal film is a copper foil or an aluminum foil with the thickness of 5-30 μm.
Specifically, if the epidermal electronics is used to detect electrocardiography/myoelectricity, the target pattern includes: the device comprises three biological electrodes and corresponding conducting paths, wherein the ground electrode is used for defining a potential zero point, the working electrode and the reference electrode are used for collecting potential change of the skin surface caused by electrocardio/myoelectric activity, and the conducting paths are used for communicating with external equipment;
if the skin electronics is used to detect skin electricity, the target pattern comprises: two electrodes for detecting changes in conductance/resistance of the skin between the two electrodes due to sweat gland activity and respective conductive paths for communicating with an external device;
if the epidermal electronics is used to detect brain electricity, the target pattern comprises: nine biological electrodes and corresponding conductive paths, wherein the ground electrode is used for defining a potential zero point, the six working electrodes and the two reference electrodes are used for acquiring the potential change of the brain electricity, and the conductive paths are used for communicating with external equipment;
if the skin electronics is used for wireless communication, the target pattern comprises: and the four loop coils are used for carrying out antenna required by wireless information transmission to an external receiving device.
Specifically, the center distance of the bioelectrode is 25-40 mm, and the radius of the annular coil is 5-10 cm.
Specifically, the conductive path is a serpentine line structure, the bioelectrode is a half-crossed serpentine line structure, and the loop coil is a serpentine line structure.
Specifically, the electronic substrate of the surface skin is water transfer tattoo paper.
In order to achieve the above object, according to a second aspect of the present invention, there is provided a method for preparing a multimodal epidermal electronic sensor, the method comprising the steps of:
s1, scratching a graphite rod on sand paper to form a graphite particle layer on the sand paper;
s2, transferring the graphite particle layer to the surface of the epidermal electronic substrate with stronger surface viscosity through attaching transfer;
s3, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate;
s4, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to the target pattern without damaging the substrate;
and S5, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate of the surface with the graphite particle layer through attaching and transferring to ensure that two ends of the graphite region are in good contact with the copper foil.
To achieve the above object, according to a third aspect of the present invention, there is provided a method for preparing a multimodal epidermal electronic sensor, the method comprising the steps of:
s1, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate;
s2, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to a target pattern without damaging the substrate;
s3, scratching the graphite rod on the abrasive paper to form a graphite particle layer on the abrasive paper;
s4, transferring the graphite particle layer to the surface of the epidermal electronic substrate with stronger surface viscosity through attaching transfer;
and S5, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate of the surface with the graphite particle layer through attaching and transferring to ensure that two ends of the graphite region are in good contact with the copper foil.
Specifically, the formed graphite particle layer was a rectangular area of 2mm by 10 mm.
Generally, by the above technical solution conceived by the present invention, the following beneficial effects can be obtained:
(1) according to the invention, the polymer surface is bombarded by the plasma, so that the polymer substrate which has no adsorbability on the metal film on the original surface has weak adsorbability, and the metal film is easily paved and adsorbed on the treated polymer surface, thereby providing a stable substrate for the ultrathin metal film on one hand, and on the other hand, when the metal pattern is transferred, the metal pattern can be easily transferred to the surface of a target epidermal electronic substrate with higher adsorbability, and the high-temperature heating process caused by the introduction of a heat release adhesive tape is avoided. By adopting a mode of laser patterning of the metal film, the metal film on the polymer substrate is irradiated by the high-power-density laser beam, and the characteristics of fixed point, accuracy, adjustability and high energy density of the laser are utilized, so that the metal is quickly heated to the vaporization temperature and evaporated to form holes, and the holes continuously form slits with narrow width along with the movement of the material by the light beam, and meanwhile, the lower-layer polymer substrate is not influenced at all. High-precision patterning of the metal thin film layer on the polymer substrate is achieved, and meanwhile, a circuit formed by a metal single layer is easier to be in effective electric contact with other conductive materials due to the conductivity of two surfaces of the circuit. The metal pattern is transferred to the surface of the electronic substrate with the surface with stronger viscosity through direct attaching transfer to prepare the skin electronic device similar to the tattoo, so that the high-precision patterning of the metal film on the polymer substrate and the transfer of the metal film pattern at room temperature are realized, and the process flow is simple and low in cost.
(2) The invention realizes platform compatibility in a skin electronic system, namely, on a water transfer paper platform, an electrocardio sensor and a respiration sensor are integrated at the same time, and the layout design ensures that the electrocardio electrode leads correctly and the respiration sensor is positioned at the position where the thorax fluctuates greatly; the sensor integration realizes process compatibility, the graphite particle layer and the copper foil pattern are transferred to the surface of the water transfer paper through an adsorption transfer process by utilizing high viscosity of the surface of the water transfer paper, and the graphite and the copper foil form good conductive contact due to the fluffy characteristic of the graphite layer.
Drawings
Fig. 1 is a schematic view of a method for manufacturing a surface electronic device according to an embodiment of the present invention;
fig. 2 is a circuit pattern of a multi-modal epidermal electronic sensor capable of detecting electrocardiographic and respiratory frequency signals simultaneously according to a second embodiment of the present invention;
fig. 3 is a schematic view of a method for manufacturing a multi-modal epidermal electronic sensor according to a third embodiment of the present invention;
fig. 4 is a schematic diagram of a method for using the multi-modal epidermal electronic sensor according to the fourth embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention provides a preparation method of a surface electronic device, which comprises the following steps:
s1, selecting a polymer substrate without viscosity on the surface, carrying out plasma cleaning on the surface of the polymer substrate to enable the polymer substrate to have weak adsorbability on a metal film, and flatly paving the metal film on the surface of the substrate.
Further preferably, the non-adhesive polymer substrate is a PET film or a PDMS film. The thickness of the metal film is preferably 5-30 μm, and the metal film can be a copper foil or an aluminum foil.
The polymer substrate is pretreated, and the surface of the polymer is bombarded by plasma, so that the polymer substrate which originally has no adsorbability on the metal film has weak adsorbability. The metal film is easy to be tiled and adsorbed on the surface of the treated polymer, on one hand, a stable substrate is provided for the ultrathin metal film, on the other hand, when the metal pattern is transferred, the metal pattern can be easily transferred to the surface of a target epidermal electronic substrate with higher adsorbability, and the high-temperature heating process caused by the introduction of the heat release adhesive tape is avoided.
Further preferably, the plasma cleaning time period is preferably 3 minutes to 5 minutes.
And S2, conveying the substrate into a laser cutting machine, adjusting the laser pulse frequency, the cutting rate and the cutting height, and cutting the metal on the surface of the substrate according to the target pattern without damaging the substrate.
The method adopts a mode of laser patterning of the metal film, utilizes a high-power-density laser beam to irradiate the metal film on the polymer substrate, utilizes the characteristics of fixed point, accuracy, adjustability and high energy density of the laser to quickly heat the metal to the vaporization temperature and evaporate the metal to form holes, and the holes continuously form slits with narrow width along with the movement of the material by the light beam without influencing the lower polymer substrate. High-precision patterning of the metal thin film layer on the polymer substrate is achieved, and meanwhile, a circuit formed by a metal single layer is easier to be in effective electric contact with other conductive materials due to the conductivity of two surfaces of the circuit.
If the epidermal electronics is used for detecting electrocardio/myoelectricity, the target pattern comprises: the device comprises three biological electrodes and corresponding conducting paths, wherein the ground electrode is used for defining a potential zero point, the working electrode and the reference electrode are used for collecting potential changes on the skin surface caused by electrocardio/myoelectric activity, and the conducting paths are used for communicating with external equipment.
If the skin electronics is used to detect skin electricity, the target pattern comprises: two electrodes for detecting changes in the conductance/resistance of the skin between the two electrodes due to sweat gland activity and corresponding conductive paths for communicating with an external device.
If the epidermal electronics is used to detect brain electricity, the target pattern comprises: nine biological electrodes and corresponding conductive paths, wherein the ground electrode is used for defining a potential zero point, the six working electrodes and the two reference electrodes are used for acquiring the potential change of the skin surface caused by the brain electrical activity, and the conductive paths are used for communicating with an external device.
If the skin electronics is used for wireless communication, the target pattern comprises: and the four loop coils are used for carrying out antenna required by wireless information transmission to an external receiving device.
And S3, removing redundant metal on the surface of the substrate, only leaving the target metal pattern, and transferring the metal pattern to the surface of the electronic substrate with the surface with stronger viscosity through attaching and transferring.
Further preferably, the surface electronic substrate with stronger surface viscosity is water transfer tattoo paper.
As shown in fig. 1, an embodiment of the present invention provides a method for manufacturing a surface-mount electronic device, including the following steps:
step S1, the
And S2, importing the designed circuit pattern file into a
And S3, easily removing the redundant copper foil on the PET by using tweezers, and only leaving the designed copper foil pattern. Then, one side of the PET having the copper foil pattern was attached to the surface of the breathable and stretchable substrate having surface adhesiveness on the water
As shown in fig. 2, the second embodiment is a circuit pattern of the multi-modal epidermal electronic sensor capable of detecting electrocardiographic and respiratory frequency signals simultaneously, wherein the circuit pattern for detecting electrocardiographic/myoelectric signals includes three epidermal electrodes and corresponding conductive paths for measuring bioelectrical signals, and the three bioelectrical electrodes are respectively: working
Preferably, the center-to-center distance between the bioelectrode is 25 mm-40 mm, so that a proper lead is realized and a stronger electrocardiosignal is measured.
Preferably, the conductive path adopts a winding line structure, the electrode adopts a half-crossed winding line structure, the line width is 0.1-2 mm, the ratio of the line width to the outer diameter is 0.4, and the connection angle is 0 degree.
The water transfer tattoo paper has good air permeability, moderate adhesiveness and low cost. The water-soluble adhesive breathable stretchable base layer is composed of a breathable
As shown in fig. 3, the third embodiment provides a method for preparing a multi-modal epidermal electronic sensor, including:
step S1, scratching a graphite rod on the
Due to the frictional wear of the particles on the surface of the sandpaper to the graphite, a rectangular area of a layer of graphite particles is formed on the sandpaper. Preferably, the formed graphite particle layer is a rectangular area of 2mm by 10mm, the resistance of the graphite particle layer with the size has good strain sensitivity to periodic strain change caused by thoracic cavity fluctuation during breathing, and the scratch times are 3-5 different and have a certain thickness.
And S2, transferring the graphite particle layer to the surface of the epidermal electronic substrate with stronger surface viscosity through attaching and transferring.
And (3) attaching the surface of the sand paper with the graphite particle layer to the surface of the breathable and stretchable substrate with surface adhesiveness on the water transfer tattoo paper, and tearing off the sand paper after pressing. The layer of graphite particles is transferred to the surface of the stretchable substrate due to adhesion.
And S3, putting the PET film into a plasma cleaning machine, and carrying out surface plasma cleaning for 3 minutes, so that the surface of the PET is cleaned and has weak adhesion. A 9 μm copper foil was then laid flat onto the PET substrate surface.
And S4, importing the designed circuit pattern file into a laser cutting machine, setting the laser pulse frequency to be 70kHz, the cutting rate to be 95mm/s and the cutting height to be 5.8mm, and carrying out patterned cutting on the copper foil on the PET.
And S5, removing the redundant copper foil on the PET by using tweezers, and only leaving the designed copper foil pattern. PET is then attached to the stretchable substrate surface where the transferred layer of graphite particles has been present in S2, ensuring good contact of the graphite regions with the copper foil at both ends. After a slight press, the PET substrate was peeled off and the copper foil pattern could be easily transferred to the stretchable substrate surface.
And the good contact and conduction between the two ends of the graphite region and the copper foil are ensured. Thus, the epidermal electronic sensor capable of simultaneously detecting electrocardio signals and respiratory frequency signals is prepared, and the sensor has a four-layer structure and comprises the following components in parts by weight: the sensor comprises a sensing functional layer, a stretchable basal layer, a water-soluble layer and a temporary basal layer. Wherein, the sensing functional layer includes: a copper foil electrode which can detect bioelectric signals and a graphite layer which can detect strain caused by the fluctuation of the thoracic cavity. The device can be used for comfortably and noninvasively acquiring electrocardio and respiratory signals of a person.
As shown in fig. 4, a fourth embodiment provides a method for using the multi-modal epidermal electronic sensor, the method comprising: in use, the stretchable substrate layer is applied to the
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
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