阅读说明：本技术 一种钢板的连续真空镀膜机 (Continuous vacuum coating machine of steel plate ) 是由 武文全 于 2019-09-11 设计创作，主要内容包括：本发明公开了一种钢板的连续真空镀膜机,包括真空室,所述真空室中设有放卷装置、收卷装置与立式镀膜装置,所述立式镀膜装置位于放卷装置的竖直方向上；所述真空室内还设有多个转辊,所述转辊中包括加热辊与冷却辊。本发明通过利用立式的镀膜装置对钢板进行镀膜,钢板在放卷后不再沿着走水平方向走,而是沿着竖直方向进入到立式镀膜装置,在镀膜的时候,由于钢板的表面与水平面是垂直的,所以在电镀的时候,钢板表面的杂质会在重力的作用下往下掉,而不会集聚在钢板的表面,因此镀膜后其表面的成型质量更好,而且整个镀膜机呈立式布置,占地空间更小。(The invention discloses a continuous vacuum coating machine for a steel plate, which comprises a vacuum chamber, wherein an unwinding device, a winding device and a vertical coating device are arranged in the vacuum chamber, and the vertical coating device is positioned in the vertical direction of the unwinding device; still be equipped with a plurality of commentaries on classics rollers in the vacuum chamber, including warming mill and chill roll in changeing the roller. According to the invention, the vertical film coating device is used for coating the steel plate, the steel plate does not move along the horizontal direction after being unreeled but enters the vertical film coating device along the vertical direction, and during film coating, because the surface of the steel plate is vertical to the horizontal plane, impurities on the surface of the steel plate can fall down under the action of gravity and can not be accumulated on the surface of the steel plate during electroplating, so that the forming quality of the surface of the steel plate after film coating is better, and the whole film coating machine is arranged vertically, so that the occupied space is smaller.)

1. A continuous vacuum coating machine for steel plates is characterized in that: the vacuum chamber is internally provided with an unwinding device, a winding device and a vertical film coating device, wherein the vertical film coating device is positioned in the vertical direction of the unwinding device; still be equipped with a plurality of commentaries on classics rollers in the vacuum chamber, including warming mill and chill roll in the commentaries on classics roller, the warming mill arrange be close to unwinding device's one side, the chill roll is arranged be close to winding device's one side.

2. The continuous vacuum coating machine for steel sheets according to claim 1, characterized in that: the vacuum chambers comprise a first vacuum chamber, a second vacuum chamber and a third vacuum chamber, the first vacuum chamber and the second vacuum chamber are arranged side by side, the first vacuum chamber is positioned on the left side of the second vacuum chamber, and the third vacuum chamber is positioned above the first vacuum chamber and the second vacuum chamber; the unwinding device is placed in a first vacuum chamber, and the winding device is placed in a second vacuum chamber; the vertical coating device is positioned in the third vacuum chamber.

3. The continuous vacuum coating machine for steel sheets according to claim 2, characterized in that: the third vacuum chamber is in a door shape and comprises a left chamber body, a right chamber body and a middle chamber body, the left chamber body is communicated with the first vacuum chamber through a first port, and the right chamber body is communicated with the second vacuum chamber through a second port; the vertical film coating device comprises a first cathode sputtering source group and a second cathode sputtering source group, wherein the first cathode sputtering source group is positioned in the left chamber body, and the second cathode sputtering source group is positioned in the right chamber body.

4. The continuous vacuum coating machine for steel sheets according to claim 3, characterized in that: the first cathode sputtering source group comprises a plurality of sputtering sources which are parallel to each other and are arranged from bottom to top.

5. The continuous vacuum coating machine for steel sheets according to claim 4, characterized in that: the sputtering source comprises at least one of a multi-arc sputtering source, a column arc sputtering source, a plane arc sputtering source and a magnetron sputtering source or a combination of several kinds of the sputtering sources.

6. The continuous vacuum coating machine for steel sheets according to claim 3, characterized in that: the left chamber body comprises a sealing plate, the first cathode sputtering source group is arranged on the sealing plate, and the sealing plate is detachably connected with the left chamber body; the left chamber body further comprises a standby sealing plate, the vertical film coating device comprises a first standby cathode sputtering source set, the first standby cathode sputtering source set is installed on the standby sealing plate, and the standby sealing plate is detachably connected with the left chamber body.

7. The continuous vacuum coating machine for steel sheets according to claim 3, characterized in that: be equipped with the regulating plate on the first opening, regulating plate and left room body swing joint.

8. The continuous vacuum coating machine for steel sheets according to claim 1, characterized in that: and a high-pressure cleaning ion source is also arranged in the vacuum chamber and is positioned beside the unwinding device.

9. The continuous vacuum coating machine for steel sheets according to claim 1, characterized in that: the heating roller comprises a roller shaft, a heating wire is arranged in the roller shaft, the cooling roller comprises a second roller shaft, a cooling pipeline is arranged in the second roller shaft, and cooling liquid is introduced into the cooling pipeline.

10. The continuous vacuum coating machine for steel sheets according to claim 1, characterized in that: the winding device comprises an unloading mechanism and a winding roller, the unloading mechanism comprises a slide rail and an unloading trolley, and the winding roller is installed on the unloading trolley.

Technical Field

The invention relates to the technical field of vacuum coating, in particular to vacuum coating of a steel plate winding.

Background

Vacuum coating is a technique of producing a thin film material by a physical or chemical method, and atoms of the material are extracted from a heating source in a vacuum chamber to hit the surface of an object to be coated. The technology can be used for producing optical lenses, such as navigation telescope lenses and the like; and other functional films, record aluminizing, decorative coating, material surface modification and the like, such as imitation gold coating of watch shells and coating of mechanical cutters, so that the processing hardness is changed. Vacuum coating has three forms, namely evaporation coating, sputtering coating, ion coating and pure ion coating.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: provides a novel device capable of continuously coating a steel plate.

The solution of the invention for solving the technical problem is as follows: a continuous vacuum coating machine for steel plates comprises a vacuum chamber, wherein an unwinding device, a winding device and a vertical coating device are arranged in the vacuum chamber, and the vertical coating device is positioned in the vertical direction of the unwinding device; still be equipped with a plurality of commentaries on classics rollers in the vacuum chamber, including warming mill and chill roll in the commentaries on classics roller, the warming mill arrange be close to unwinding device's one side, the chill roll is arranged be close to winding device's one side.

The invention has the beneficial effects that: according to the invention, the vertical film coating device is used for coating the steel plate, the steel plate does not move along the horizontal direction after being unreeled but enters the vertical film coating device along the vertical direction through the rotating roller, and during film coating, because the surface of the steel plate is vertical to the horizontal plane, impurities on the surface of the steel plate can fall down under the action of gravity and can not be gathered on the surface of the steel plate during electroplating, so that the forming quality of the surface of the steel plate after film coating is better. The whole film plating machine is arranged vertically, so that the occupied space is smaller; meanwhile, the steel plate is reversed in the vacuum chamber by a rotating roller, wherein the rotating roller comprises a heating roller and a cooling roller, the heating roller can be used for heating the steel plate after unreeling, and the steel plate is in contact with the surface of the heating roller while unreeling, so that the temperature of the steel plate is increased, and the heated steel plate is more beneficial to coating; and after the temperature rises, the temperature of the steel plate is reduced by using the cooling roller, so that the steel plate can be conveniently wound.

As a further improvement of the above technical solution, the vacuum chamber includes a first vacuum chamber, a second vacuum chamber and a third vacuum chamber, the first vacuum chamber and the second vacuum chamber are arranged side by side, the first vacuum chamber is located at the left side of the second vacuum chamber, and the third vacuum chamber is located above the first vacuum chamber and the second vacuum chamber; the unwinding device is placed in a first vacuum chamber, and the winding device is placed in a second vacuum chamber; the vertical coating device is positioned in the third vacuum chamber. Divide into three cavity with real empty room, not only save material, holistic space is littleer moreover, reduces the load pressure to the vacuum pump, and three independent cavity makes the operation more convenient in work simultaneously.

As a further improvement of the above technical solution, the third vacuum chamber is in a shape of a "door", the third vacuum chamber includes a left chamber body, a right chamber body and a middle chamber body, the left chamber body is communicated with the first vacuum chamber through the first port, and the right chamber body is communicated with the second vacuum chamber through the second port; the vertical film coating device comprises a first cathode sputtering source group and a second cathode sputtering source group, wherein the first cathode sputtering source group is positioned in the left chamber body, and the second cathode sputtering source group is positioned in the right chamber body. After adopting this structure for the structure of third vacuum chamber is compacter, utilizes two negative pole sputtering source groups to carry out vacuum coating to the steel sheet moreover, increases film forming rate. The first cathode sputtering source group comprises a plurality of sputtering sources which are parallel to each other and are arranged from bottom to top. The sputtering source comprises a multi-arc sputtering source, a cylindrical arc sputtering source or a planar arc sputtering source. According to the actual requirement of production, the sputtering sources of the first cathode sputtering source group can be arranged, and the sputtering sources can adopt one of a multi-arc sputtering source, a cylindrical arc sputtering source, a planar arc sputtering source or a magnetron sputtering source or a combination of several of the multi-arc sputtering sources, the cylindrical arc sputtering source, the planar arc sputtering source or the magnetron sputtering source.

As a further improvement of the above technical solution, the left chamber body includes a sealing plate, the first cathode sputtering source set is mounted on the sealing plate, and the sealing plate is detachably connected to the left chamber body. The left chamber body further comprises a standby sealing plate, the vertical film coating device comprises a first standby cathode sputtering source set, the first standby cathode sputtering source set is installed on the standby sealing plate, and the standby sealing plate is detachably connected with the left chamber body. Because the quantity of every sputter source is limited, when needing to change the cathode sputter source, can be through directly unloading or opening the shrouding and maintain, then install the reserve shrouding of new cathode sputter source intercommunication in the left chamber body together. The down time of the equipment is reduced.

As a further improvement of the technical scheme, an adjusting plate is arranged on the first through hole and is movably connected with the left chamber body. The caliber of the first through opening can be adjusted through the adjusting plate so as to adapt to the unreeling change of the steel plate.

As a further improvement of the technical scheme, a high-pressure cleaning ion source is further arranged in the vacuum chamber and is positioned beside the unwinding device. The high pressure cleaning ion source can have two functions during operation: firstly, the surface of the steel plate is cleaned, so that a clean surface is conveniently obtained, and the binding force between the film layer and the steel plate is improved; and secondly, the plasma generated by the high-pressure cleaning ion source interacts with sputtering products in the coating process to increase the ionization rate of the sputtering products, thereby greatly improving the sputtering coating efficiency.

As a further improvement of the technical scheme, the heating roller comprises a roller shaft, a heating wire is arranged in the roller shaft, the cooling roller comprises a second roller shaft, a cooling pipeline is arranged in the second roller shaft, and cooling liquid is introduced into the cooling pipeline. Of course, in addition to using the heating wire, the heating roller shaft may be heated by introducing a high-temperature liquid, thereby achieving the heating effect.

As a further improvement of the technical scheme, the winding device comprises an unloading mechanism and a winding roller, the unloading mechanism comprises a sliding rail and an unloading trolley, and the winding roller is installed on the unloading trolley. Through the unloading mechanism, the coated steel plate can be conveniently recovered.

Drawings

In order to more clearly illustrate the technical solution in the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly described below. It is clear that the described figures are only some embodiments of the invention, not all embodiments, and that a person skilled in the art can also derive other designs and figures from them without inventive effort.

FIG. 1 is a front view of a first embodiment of the present invention;

FIG. 2 is a top view of a first embodiment of the present invention;

fig. 3 is a front view of a second embodiment of the present invention.

Detailed Description

The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. The drawings illustrate a preferred embodiment of the invention and, together with the description, serve to complement the description with figures so that the person may visually and vividly understand each and every feature and every technical solution of the invention, but are not to be construed as limiting the scope of the invention.

In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.