阅读说明：本技术 一种基于平面蒸发源真空蒸镀技术的盲孔显示器制备方法 (Blind hole display preparation method based on planar evaporation source vacuum evaporation technology ) 是由 潘燕萍 熊超 于 2021-08-03 设计创作，主要内容包括：本发明公开了一种基于平面蒸发源真空蒸镀技术的盲孔显示器制备方法,属于真空蒸镀技术领域。本发明的基于平面蒸发源真空蒸镀技术的盲孔显示器制备方法,首先利用线源材料真空蒸镀制备平面蒸发源,在平面蒸发源对应显示器屏幕盲孔的位置上形成相应的面源通孔,利用平面蒸发源垂直真空蒸镀,在玻璃基板上蒸镀形成带有蒸镀盲孔的蒸镀材料层,可一次实现盲孔显示器的制备,制备工艺更加简单,与现有工艺相比,无需镭射去除有机材料的步骤,也无需更改金属掩膜版的结构,并且显示器屏下盲孔制备精度和效率高,制备的显示器产品显示稳定性和显示效果更好。(The invention discloses a blind hole display preparation method based on a planar evaporation source vacuum evaporation technology, and belongs to the technical field of vacuum evaporation. The invention relates to a blind hole display preparation method based on a plane evaporation source vacuum evaporation technology, which comprises the steps of firstly preparing a plane evaporation source by utilizing a line source material vacuum evaporation, forming a corresponding surface source through hole at a position of the plane evaporation source corresponding to a blind hole of a display screen, utilizing the plane evaporation source to perform vertical vacuum evaporation, and forming an evaporation material layer with an evaporation blind hole on a glass substrate by evaporation, so that the preparation of the blind hole display can be realized at one time.)

1. A blind hole display preparation method based on a plane evaporation source vacuum evaporation technology is characterized by comprising the following steps:

s1, preparing a plane evaporation source by adopting a line source material (11) through vacuum evaporation, and forming a surface source material (13) on a surface source material bearing table (12) through evaporation and deposition;

s2, removing the organic material at the position of the planar evaporation source corresponding to the blind hole of the display screen, and forming a corresponding surface source through hole (13a) on the surface source material (13) of the planar evaporation source;

s3, the plane evaporation source is turned over, the plane evaporation source and the glass substrate (15) to be evaporated are positioned, the plane evaporation source is used for vertical vacuum evaporation, and the evaporation material layer (16) with the evaporation blind hole (16a) is formed on the glass substrate (15) in an evaporation mode.

2. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to claim 1, wherein: in step S1, directly evaporating and depositing the surface source material (13) on the surface source material bearing table (12); then, in step S2, a through hole (13a) is directly punched at the position of the planar evaporation source where the surface source material (13) corresponds to the blind hole of the display screen.

3. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to claim 1, wherein: in step S1, a carrier through hole (12a) is punched on the surface source material carrier (12) in advance, a jig is used for plugging the hole at the carrier through hole (12a) of the surface source material carrier (12), and then the surface source material (13) is formed on the surface source material carrier (12) by evaporation and deposition; then, in step S2, the organic material at the position corresponding to the carrier through hole (12a) is removed by removing the hole plugging jig in the carrier through hole (12a), and a corresponding surface source through hole (13a) is formed on the surface source material (13).

4. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to claim 3, wherein: the bearing table through holes (12a) on the surface source material bearing table (12) are formed by adopting precision machining.

5. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to claim 4, wherein: the precision machining mode of the through hole (12a) of the bearing table is as follows: the method comprises the steps of roughly drilling holes by a wire cutting process, and then finely machining by a drilling and hole grinding process, so that the position accuracy and the shape accuracy of the holes formed in the through holes (12a) of the bearing table are ensured.

6. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to any one of claims 1 to 5, wherein: in the process of preparing the planar evaporation source in the step S1, the line source material (11) is translated back and forth along the line source scanning direction under the surface source material bearing table (12) for vacuum thermal evaporation, so that the organic molecules of the line source material (11) are evaporated, adsorbed and deposited on the surface source material bearing table (12).

7. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to claim 6, wherein: in step S1, the flatness of the surface source material bearing table (12) is controlled within 20 μm, and the thickness uniformity of the surface source material (13) evaporated and deposited on the surface source material bearing table (12) is controlled within 3%.

8. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to any one of claims 1 to 5, wherein: in step S3, the planar evaporation source is turned over and then placed on a surface heating source (14), the size of the heating surface of the surface heating source (14) is slightly larger than the planar size of the surface source material carrying table (12), and the uniformity of the surface heating source (14) for heating the back surface of the surface source material carrying table (12) is controlled to be more than 98%.

9. The method for preparing a blind hole display based on the planar evaporation source vacuum evaporation technology according to claim 8, wherein: an error compensation delta is arranged between the aperture D2 of the surface source through hole (13a) and the diameter D1 of the evaporation blind hole (16a) formed on the glass substrate (15) through evaporation, the error compensation delta is h/tan alpha, and D2 is D1+2 delta, wherein h is the distance between the upper surface of the surface source material (13) and the lower surface of the glass substrate (15), and alpha is the vacuum evaporation angle of the surface source material (13).

Technical Field

The invention relates to a display vacuum evaporation process, in particular to a blind hole display preparation method based on a planar evaporation source vacuum evaporation technology.

Background

AMOLED (active organic light emitting display) is called next generation display technology, and is currently used in many fields such as wearable, mobile phone, tablet computer, and notebook computer. With the maturity of technology and the improvement of yield, the share of the display is higher and higher, and the display tends to gradually replace a-Si and LTPS displays.

The mainstream production mode of AMOLED is vacuum deposition, wherein the metal mask is an indispensable tool for vacuum deposition, and is also receiving more and more attention from the market, and the metal mask is divided into a Common Metal Mask (CMM) and a Fine Metal Mask (FMM), and the metal mask is currently mainly monopolized by korea, japan and taiwan.

With the diversification of screen designs of display products, many displays need to dig holes under the screen at present, that is, organic materials are removed from the back of the display to form blind hole regions, for example, the blind hole regions are used for normal shooting of a front camera. At present, the blind hole area under the screen of the display is mostly formed by removing organic materials through laser, so that the camera and other parts work normally. Taking the screen shown in fig. 1 as an example, an organic material layer 102 is vacuum-evaporated on a screen glass 101, the organic material layer 102 is a display area of the screen, and a blind hole area 103 is formed on the organic material layer 102 (as shown in fig. 1 (a)); the blind hole area 103 is covered by an organic material, and the organic material in the blind hole area 103 is removed by a laser technology (as shown in fig. 1 (b)), so that a blind hole 104 as shown in fig. 1 (c) can be formed under the screen of the screen glass 101, and a non-display area of the screen is formed at the blind hole 104. However, this method requires an additional step of removing organic materials by laser, which increases the complexity of the manufacturing process of the product.

Another under-screen blind hole is that in the vacuum evaporation process, a shielding sheet is arranged at a corresponding position of a metal mask to shield a blind hole area on the back surface of the display, for example, as shown in fig. 2, a Common Metal Mask (CMM) is used, the metal mask comprises a metal frame 201 and a mask mesh 202 with a mesh fixed on the metal frame 201, a plurality of openings 203 are arranged on the mask mesh 202, the area where the openings 203 are located is an organic material area formed on the glass substrate in the vacuum evaporation process, in order to form the blind hole in the organic material area, a shielding sheet 205 is arranged at a position corresponding to the openings 203 of the mask mesh 202 through a metal strip 204, and the shielding sheet 205 is used for shielding the organic material in the vacuum evaporation process, so that the organic material area with the blind hole is formed on the glass substrate. However, this method needs the metal strip 204 to fix the shielding sheet 205, which may cause a weak dark line phenomenon of the product at the position of the metal strip 204, and may adversely affect the product. The specific scheme of forming the blind hole region by arranging the shielding piece on the metal mask can also be seen in the patent application of 'a mask' disclosed in chinese patent No. ZL201911053494.9, in which the shielding part (shielding piece) is fixed by using the connecting part (metal strip), and the cross-sectional shape of the connecting part is optimized to reduce the negative effect of the connecting part on the product, but the existence of the connecting part obviously cannot completely avoid the weak dark line phenomenon caused by the connecting part.

Disclosure of Invention

1. Technical problem to be solved by the invention

The invention aims to overcome the defects of complex laser hole digging preparation process under the screen of the existing vacuum evaporation display and weak dark lines in the blind hole display prepared by a mask plate shielding sheet, and the like, and provides a blind hole display preparation method based on a plane evaporation source vacuum evaporation technology. The prepared display product has better display stability and display effect.

2. Technical scheme

In order to achieve the purpose, the technical scheme provided by the invention is as follows:

the invention relates to a blind hole display preparation method based on a planar evaporation source vacuum evaporation technology, which comprises the following steps:

s1, preparing a planar evaporation source by adopting line source material vacuum evaporation, and forming a surface source material by evaporation deposition on a surface source material bearing table;

s2, removing the organic material at the position of the planar evaporation source corresponding to the blind hole of the display screen, and forming a corresponding surface source through hole on the surface source material of the planar evaporation source;

s3, turning over the planar evaporation source, positioning the planar evaporation source and the glass substrate to be evaporated, and vertically performing vacuum evaporation through the planar evaporation source to form an evaporation material layer with evaporation blind holes on the glass substrate by evaporation.

Further, in step S1, directly depositing the surface source material on the surface source material bearing table; then, in step S2, a through hole is directly punched at the position of the planar evaporation source where the surface source material corresponds to the blind hole of the display screen.

Further, in step S1, a through hole is formed in the surface source material carrier, and a jig is used to block the through hole, and then the surface source material is formed on the surface source material carrier by evaporation deposition; then, in step S2, the organic material at the position corresponding to the carrier through hole is removed by removing the hole plugging jig in the carrier through hole, so as to form a corresponding surface source through hole on the surface source material.

Furthermore, the bearing table through holes on the surface source material bearing table are formed by adopting precision machining.

Furthermore, the precision machining mode of the through hole of the bearing table is as follows: the method comprises the steps of firstly carrying out rough hole opening through a wire cutting process, and then carrying out finish machining through a hole drilling and grinding process, so that the hole opening position precision and the shape precision of the through hole of the bearing table are guaranteed.

Further, in the process of preparing the planar evaporation source in step S1, the line source material is reciprocally translated along the line source scanning direction under the surface source material bearing table for vacuum thermal evaporation, so that the organic molecules of the line source material are evaporated, adsorbed and deposited on the surface source material bearing table.

Further, in step S1, the flatness of the surface source material holder is controlled to be within 20 μm, and the uniformity of the thickness of the surface source material vapor-deposited on the surface source material holder is controlled to be within 3%.

Further, in step S3, the planar evaporation source is turned over and then placed on a surface heating source, the size of the heating surface of the surface heating source is slightly larger than the planar size of the surface source material holder, and the uniformity of the surface heating source heating the back surface of the surface source material holder is controlled to be more than 98%.

Furthermore, an error compensation delta is arranged between the aperture D2 of the surface source through hole and the diameter D1 of the evaporation blind hole formed on the glass substrate by evaporation, the error compensation delta is h/tan alpha, and D2 is D1+2 delta, wherein h is the distance between the upper surface of the surface source material and the lower surface of the glass substrate, and alpha is the vacuum evaporation angle of the surface source material.

3. Advantageous effects

Compared with the prior art, the technical scheme provided by the invention has the following remarkable effects:

(1) the invention relates to a blind hole display preparation method based on a plane evaporation source vacuum evaporation technology, which comprises the steps of preparing a plane evaporation source by utilizing a line source material in a vacuum evaporation mode, forming a corresponding surface source through hole in a position, corresponding to a blind hole of a display screen, of the plane evaporation source, utilizing the plane evaporation source to perform vertical vacuum evaporation, and forming an evaporation material layer with an evaporation blind hole on a glass substrate in an evaporation mode, so that the preparation of the blind hole display can be realized at one time;

(2) according to the preparation method of the blind hole display based on the planar evaporation source vacuum evaporation technology, the surface source through hole can be formed by punching after the surface source material is evaporated on the bearing table, and the surface source through hole is simpler to manufacture; the surface source through hole can also be formed by removing the hole plugging jig in the bearing table through hole after the surface source through hole is formed by evaporation deposition through bearing table through hole plugging holes formed in the surface source material bearing table in advance, so that the surface source through hole is ensured to be free of organic materials, and the preparation precision of the surface source through hole is high;

(3) according to the blind hole display preparation method based on the plane evaporation source vacuum evaporation technology, the packaging screen printing precision of the screen blind hole is about 100 mu m generally, and the round hole processing precision and the like are added, so that the single side has 0.2-0.3 mm precision redundancy, and therefore the opening position precision and the shape precision of the bearing table through hole can be ensured by adopting precision machining for the bearing table through hole on the surface source material bearing table;

(4) according to the blind hole display preparation method based on the planar evaporation source vacuum evaporation technology, in the process of preparing the planar evaporation source in the step S1, the line source material is translated back and forth along the line source scanning direction below the surface source material bearing platform to carry out vacuum thermal evaporation, so that organic molecules of the line source material are evaporated, adsorbed and deposited on the surface source material bearing platform, the flatness of the surface source material bearing platform is controlled within 20 microns, the thickness uniformity of the evaporated surface source material can be ensured, and the evaporation precision of an evaporation material layer on a glass substrate is improved;

(5) according to the blind hole display preparation method based on the planar evaporation source vacuum evaporation technology, the planar evaporation source is placed on the surface heating source after being turned over, the size of the heating surface of the surface heating source is slightly larger than the size of the plane of the surface source material bearing table, the heating uniformity of the surface heating source on the back surface of the surface source material bearing table is controlled to be more than 98%, the evaporation heating uniformity of the surface source material is ensured, and the thickness uniformity of an evaporation material layer evaporated on a glass substrate is further improved;

(6) according to the blind hole display preparation method based on the plane evaporation source vacuum evaporation technology, the evaporation angle of the plane evaporation source vacuum evaporation is not absolute 90 degrees, so that the size of a screen blind hole actually evaporated is smaller than that of a surface source through hole, error compensation is designed, and the error compensation delta is h/tan alpha, wherein h is the distance between the upper surface of a surface source material and the lower surface of a glass substrate, and alpha is the vacuum evaporation angle of the surface source material, so that the size precision of the screen blind hole in the evaporation preparation is higher.

Drawings

FIG. 1 is a flow chart of a prior art process for forming blind under-screen holes by laser removal of organic material from a glass screen;

FIG. 2 is a schematic structural diagram of a mask plate in a process of forming blind holes under the mask plate by arranging a shielding sheet on the mask plate in the prior art;

FIG. 3 is a flow chart of a method for manufacturing a blind hole display based on a planar evaporation source vacuum evaporation technique according to the present invention;

FIG. 4 is a schematic diagram illustrating the principle of the preparation of a planar evaporation source according to the present invention;

FIG. 5 is a schematic diagram of the principle of vertical vacuum evaporation of a planar evaporation source according to the present invention;

FIG. 6 is a schematic structural diagram of an evaporation material layer with evaporation blind holes deposited on a glass substrate by evaporation in the present invention;

FIG. 7 is a schematic plane structure of a surface source material with a surface source through hole according to the present invention;

FIG. 8 is a schematic diagram of the error compensation principle of the vertical vacuum evaporation of the planar evaporation source according to the present invention;

FIG. 9 is a schematic view of a packaging screen printing structure at a position of a blind via hole deposited on a glass substrate according to the present invention.

The reference numerals in the schematic drawings illustrate:

101. a screen glass; 102. an organic material layer; 103. a blind hole region; 104. blind holes;

201. a metal frame; 202. a mask mesh; 203. an opening; 204. a metal strip; 205. a shielding sheet;

11. a line source material; 12. a surface source material bearing table; 12a, a bearing table through hole; 13. a non-point source material; 13a, a surface source through hole; 14. a surface heating source; 15. a glass substrate; 15a, an encapsulation area; 15b, a blind hole area of the screen; 15c, a peripheral wiring area; 16. Evaporating a material layer; 16a, evaporation blind holes.

Detailed Description

For a further understanding of the invention, reference should be made to the following detailed description taken in conjunction with the accompanying drawings.

Referring to fig. 3, the method for manufacturing a blind hole display based on a planar evaporation source vacuum evaporation technology of the present invention includes the following steps:

s1, preparing a planar evaporation source by adopting a line source material 11 through vacuum evaporation, and forming a surface source material 13 on the surface source material bearing table 12 through evaporation and deposition; a line source is adopted for evaporation to form a planar evaporation source, so that the thickness uniformity of the surface source material 13 can be ensured, and the vertical vacuum evaporation precision of the subsequent planar evaporation source can be ensured;

s2, removing the organic material at the position of the planar evaporation source corresponding to the blind hole of the display screen, and forming a corresponding surface source through hole 13a on the surface source material 13 of the planar evaporation source; in the process of thermal evaporation of the planar evaporation source, organic material molecules basically keep flying vertically, and because the position of the surface source through hole 13a is free from organic materials, an evaporation blind hole 16a corresponding to the position of the surface source through hole 13a also appears on an evaporation material layer 16 deposited on the glass substrate 15 by evaporation;

s3, the plane evaporation source is turned over, the plane evaporation source and a glass substrate 15 to be evaporated are positioned, the evaporation material layer 16 with an evaporation blind hole 16a is formed on the glass substrate 15 through vertical vacuum evaporation of the plane evaporation source in an evaporation mode, the evaporation blind hole 16a is a screen blind hole on a display, and the shape, the size and the position of the evaporation blind hole 16a are determined by the shape, the size and the position of the surface source through hole 13a, so that the size and the position accuracy of the surface source through hole 13a are guaranteed, a high-precision screen blind hole structure can be obtained.

The present invention will be further described with reference to the following examples.

[ example 1]

As shown in fig. 3, based on the above manufacturing method and principle, the method for manufacturing a blind hole display based on a planar evaporation source vacuum evaporation technology of this embodiment includes the following steps:

s1, preparing a planar evaporation source by adopting a line source material 11 through vacuum evaporation, and forming a surface source material 13 on the surface source material bearing table 12 through evaporation and deposition; the specific preparation principle is as shown in fig. 4, in the process of preparing the planar evaporation source, a line source evaporation source with certain film forming uniformity is adopted, the line source material 11 is in reciprocating translation along the line source scanning direction below the surface source material bearing table 12 for vacuum thermal evaporation, so that organic molecules of the line source material 11 are evaporated, adsorbed and deposited on the surface source material bearing table 12, and the surface source material 13 with uniform thickness is formed; specifically, in the present embodiment, the flatness of the surface source material bearing table 12 is controlled within 20 μm, and the thickness uniformity of the surface source material 13 evaporated and deposited on the surface source material bearing table 12 is controlled within 3%, so that the thickness uniformity of the evaporated surface source material can be ensured, and the evaporation precision of the evaporation material layer on the glass substrate can be improved; the surface source material bearing table 12 is made of a metal plate, and the principle of preparing a plane evaporation source by vacuum evaporation of the line source material 11 is similar to that of the existing line source vacuum evaporation;

s2, removing the organic material at the position of the planar evaporation source corresponding to the blind hole of the display screen, and forming a corresponding surface source through hole 13a on the surface source material 13 of the planar evaporation source; the shape and position of the surface source through hole 13a determine the shape and position of the evaporation blind hole 16a on the glass substrate 15 in the subsequent evaporation process, specifically in this embodiment, the surface source material 13 is directly formed on the surface source material carrying table 12 by evaporation deposition, and then the surface source through hole 13a is directly formed by punching at the position of the surface source material 13 of the planar evaporation source corresponding to the display screen blind hole. As shown in fig. 9, the precision of the blind hole area of the display screen is generally high, the periphery of the blind hole area 15b of the screen is a packaging area 15a, the periphery of the packaging area 15a is a peripheral wiring area 15c, the Frit packaging process of the AMOLED is the prior art, the precision is generally 100 μm, the single edge has a precision redundancy of 0.2-0.3 mm, and the like, so that the dimensional precision of the surface source through hole 13a can be ensured by the existing precision machining, for example, the surface source through hole is formed by drilling and hole grinding;

s3, turning over the planar evaporation source, positioning the planar evaporation source and the glass substrate 15 to be evaporated, performing vertical vacuum evaporation through the planar evaporation source, and forming an evaporation material layer 16 with an evaporation blind hole 16a on the glass substrate 15 by evaporation; specifically, the turning-over operation of the planar evaporation source can be realized by arranging a turning-over mechanism in the vacuum chamber, as shown in fig. 5, after the planar evaporation source is turned over, the surface source material 13 is turned upwards, that is, the surface source material 13 of the planar evaporation source is located below the glass substrate 15, the surface source material 13 and the glass substrate 15 are kept parallel, and the relative position of the planar evaporation source and the glass substrate 15 to be evaporated is positioned and fixed by a positioning mechanism; as shown in fig. 4, the planar evaporation source is turned over and then placed on a surface heating source 14, the surface heating source 14 is used to heat the surface source material 13, and the organic molecules of the surface source material 13 are evaporated and deposited on the lower surface of the glass substrate 15 perpendicular to the glass substrate 15 under a vacuum environment, of course, a metal mask is further disposed below the glass substrate 15, which is similar to the vacuum evaporation principle of the existing planar evaporation source; since the position of the surface source through hole 13a is free from organic materials, an evaporation blind hole 16a corresponding to the position of the surface source through hole 13a also appears on an evaporation material layer 16 deposited on the glass substrate 15 by evaporation, and the evaporation blind hole 16a is a screen blind hole on the display; in addition, in this embodiment, the size of the heating surface of the surface heating source 14 is slightly larger than the size of the plane of the surface source material bearing table 12, so that the surface source material bearing table 12 can be completely attached to the heating surface of the surface heating source 14, and the uniformity of heating the back surface of the surface source material bearing table 12 by the surface heating source 14 is controlled to be more than 98%, thereby ensuring the uniformity of evaporation heating of the surface source material and further improving the uniformity of the thickness of the evaporation material layer evaporated onto the glass substrate.

Since the evaporation angle of the planar evaporation source vacuum evaporation is not absolute 90 °, the size of the screen blind hole actually evaporated is smaller than that of the surface source through hole 13 a. As shown in fig. 6, the glass substrate 15 is deposited with a vapor deposition material layer 16, the diameter of the vapor deposition blind hole 16a on the vapor deposition material layer 16 is D1, fig. 7 shows the surface source material 13 with the surface source through hole 13a, the diameter of the surface source through hole 13a is D2, during vapor deposition, the surface source material 13 around the surface source through hole 13a evaporates to the inside of the hole at a certain vapor deposition angle, and the diameter of the vapor deposition blind hole 16a is D1 smaller than the diameter of the surface source through hole 13a is D2. In order to ensure the dimensional accuracy of the evaporation blind hole 16a, an error compensation Δ is provided between the aperture D2 of the surface source through hole 13a and the diameter D1 of the evaporation blind hole 16a formed on the glass substrate 15 by evaporation, as shown in fig. 8, the error compensation Δ is h/tan α, and D2 is D1+2 Δ, where h is the distance between the upper surface of the surface source material 13 and the lower surface of the glass substrate 15, and α is the vacuum evaporation angle of the surface source material 13. In an actual production process, the vacuum evaporation angle α of the surface source material 13 is about 83 °, and assuming that the distance h between the upper surface of the surface source material 13 and the lower surface of the glass substrate 15 is 10cm, the error compensation Δ is 10/tan83 ° cm ≈ 1.23 cm. Thus, the dimension error generated by the non-vertical flight of the surface source material 13 can be eliminated by slightly increasing the size opening of the surface source through hole 13a relative to the designed evaporation blind hole 16a according to the error compensation, so that the size precision of the evaporation preparation of the screen blind hole is higher.

[ example 2]

As shown in fig. 3, the basic steps and operation principle of the method for manufacturing a blind hole display based on a planar evaporation source vacuum evaporation technology in this embodiment are the same as those of embodiment 1, except that

In this embodiment, as shown in fig. 5, in step S1, a through hole 12a is formed in the surface source material carrier 12 by drilling in advance, and the through hole 12a of the surface source material carrier 12 is plugged with a jig, and then the surface source material 13 is formed on the surface source material carrier 12 by evaporation deposition; then, in step S2, the organic material at the position corresponding to the carrier through hole 12a is removed by removing the hole plugging jig in the carrier through hole 12a, so as to form a corresponding surface source through hole 13a on the surface source material 13. The position of the bearing table through hole 12a on the surface source material bearing table 12 can be changed according to the position design of the evaporation blind hole 16a, in the process of preparing the surface source by online source evaporation, a special jig is needed to block the bearing table through hole 12a when the surface source material bearing table 12 is installed, so that the organic material is prevented from being plugged in the bearing table through hole 12a, when the surface source material bearing table 12 is placed on the surface heating source 14 in an overturning mode, the surface source material bearing table 12 is separated from the hole-blocking jig, the organic material at the position corresponding to the bearing table through hole 12a is removed, and the situation that no organic material exists in the bearing table through hole 12a can be guaranteed. In this embodiment, the through holes 12a of the susceptor 12 may be pre-formed by precision machining. Specifically, the precision machining method of the through hole 12a of the carrier table is as follows: rough hole forming is carried out through a wire cutting process, and then fine machining is carried out through a hole drilling and grinding process, so that the hole forming position precision and the shape precision of the bearing table through hole 12a are guaranteed. By adopting the design, the forming of the surface source through holes 13a is facilitated, the hole precision is high, in addition, in the overturning process of the surface source material bearing table 12, the jig can be directly separated from the surface source material bearing table 12 to form the surface source through holes 13a, so that the surface source through holes 13a are formed without machining after the evaporation of the surface source materials 13, the preparation efficiency is relatively higher, and the automatic design of the vacuum evaporation is facilitated.

In the method for manufacturing a blind hole display based on the planar evaporation source vacuum evaporation technology in embodiments 1 and 2 of the present invention, the vacuum chamber, the evaporation equipment, the evaporation source material, the heating source, and the specific parameter settings for vacuum evaporation used in the implementation process are similar to those of the prior art, and a description thereof is omitted here.

The invention relates to a blind hole display preparation method based on a plane evaporation source vacuum evaporation technology, which comprises the steps of firstly preparing a plane evaporation source by utilizing a line source material in a vacuum evaporation mode, forming a corresponding surface source through hole in a position, corresponding to a blind hole of a display screen, of the plane evaporation source, utilizing the plane evaporation source to perform vertical vacuum evaporation, and forming an evaporation material layer with an evaporation blind hole on a glass substrate in an evaporation mode.

The present invention and its embodiments have been described above schematically, without limitation, and what is shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. Therefore, if the person skilled in the art receives the teaching, without departing from the spirit of the invention, the person skilled in the art shall not inventively design the similar structural modes and embodiments to the technical solution, but shall fall within the scope of the invention.