阅读说明：本技术 一种防止堵塞的蒸镀设备 (Prevent evaporation equipment of jam ) 是由 乔元武 于 2021-08-19 设计创作，主要内容包括：本发明涉及一种蒸镀设备,更具体的说是一种防止堵塞的蒸镀设备,包括冷却钳锅机构、蒸镀箱机构、防堵机构,设备能够卡紧基片,设备能够进行旋转蒸镀,设备能够蒸镀后关闭闸门然后进行快速冷却,设备能够保证真空泵的稳定运转,所述的冷却钳锅机构与蒸镀箱机构相连,蒸镀箱机构与防堵机构相连。(The invention relates to evaporation equipment, in particular to evaporation equipment capable of preventing blockage, which comprises a cooling pincer pot mechanism, an evaporation box mechanism and an anti-blocking mechanism, wherein a substrate can be clamped by the equipment, the equipment can carry out rotary evaporation, a gate can be closed after evaporation and then the equipment can carry out rapid cooling, the equipment can ensure the stable operation of a vacuum pump, the cooling pincer pot mechanism is connected with the evaporation box mechanism, and the evaporation box mechanism is connected with the anti-blocking mechanism.)

1. The utility model provides a prevent evaporation equipment of jam, includes cooling pincers pot mechanism (1), evaporation case mechanism (2), prevents stifled mechanism (3), its characterized in that: the cooling pincer pot mechanism (1) is connected with the evaporation box mechanism (2), and the evaporation box mechanism (2) is connected with the anti-blocking mechanism (3);

the cooling pincer-cooker mechanism (1) comprises a circulating box (1-1), a belt (1-2), a first belt pulley (1-3), a cam with a shaft (1-4), a matching seat with a rod (1-5), a first spring (1-6), a pincer-cooker (1-7), an opening and closing gate (1-8), a second belt pulley (1-9), a first bevel gear with a shaft (1-10), a second bevel gear with a shaft (1-11), an air inlet (1-12), a filter element (1-13), a gear with a shaft (1-14), an inner cavity (1-15), a circulating channel (1-16), a pressing one-way valve (1-17), a pressure change box (1-18), a piston (1-19), a suction one-way valve (1-20), a suction inlet (1-21), A backflow pipeline (1-22), a hook plate (1-23) with a bulge and an impeller (1-24), wherein a circulation box (1-1) is connected below a pincer pot (1-7), a belt (1-2) is in friction connection with a first belt pulley (1-3), the first belt pulley (1-3) is connected with a cam (1-4) with a shaft, the cam (1-4) with the shaft is in contact with a matching seat (1-5) with a rod, a first spring (1-6) is sleeved on the rod of the matching seat (1-5) with the rod, the pincer pot (1-7) is rotatably connected with two gears (1-14) with the shaft, the gears (1-14) with the shaft are connected with an opening and closing gate (1-8), the two gears (1-14) with the shaft are mutually engaged, a second belt pulley (1-9) is in friction connection with the belt (1-2), the second belt pulley (1-9) is connected with the first belt shaft bevel gear (1-10), the first belt shaft bevel gear (1-10) is rotationally connected on the circulating box (1-1), the first belt shaft bevel gear (1-10) is meshed with the second belt shaft bevel gear (1-11), the second belt shaft bevel gear (1-11) is rotationally connected with the circulating box (1-1), the second belt shaft bevel gear (1-11) is connected with the impeller (1-24), the air inlet (1-12) is arranged on one side of the circulating box (1-1) far away from the belt shaft cam (1-4), the filter element (1-13) is clamped in the circulating box (1-1), the filter element (1-13) passes through the air inlet (1-12), the inner cavity (1-15) is arranged in the pincer pot (1-7), the circulating channel (1-16) is arranged in the pincer pot (1-7), one end of the circulating channel (1-16) penetrates through the circulating box (1-1) and is communicated with the pressure change box (1-18), a pressure one-way valve (1-17) is arranged in the circulating channel (1-16), the other end of the circulating channel (1-16) is reversed in the pincer pot (1-7) and then extends into the circulating box (1-1), the circulating channel (1-16) is communicated with the inside of the circulating box (1-1) through a backflow pipeline (1-22), the pressure change box (1-18) is connected to the inside of the circulating box (1-1), the piston (1-19) is connected with the pressure change box (1-18) in a sliding mode, the piston (1-19) is connected with the matching seat (1-5) with the rod, the matching seat (1-5) with the rod is connected with the pressure change box (1-18) in a sliding mode, the matching seat (1-5) with the rod is connected with the circulation box (1-1) in a sliding mode, the suction one-way valve (1-20) is arranged at a suction port (1-21) on the pressure change box (1-18), the hook plate (1-23) with the protrusion is arranged in the circulation box (1-1), and the downward inclined tail of the hook plate (1-23) with the protrusion is the same as the center height of the impeller (1-24).

2. A vapor deposition apparatus to prevent clogging according to claim 1, wherein: the evaporation box mechanism (2) comprises a base (2-1), a first external connecting pipe (2-2), a box body (2-3) with supporting legs, a discharge cabin door (2-4), a shaft (2-5) with holes, a shaft (2-6) with bulges, a second spring (2-7), a motor (2-8), a motor base (2-9), a first servo motor (2-10), a platform (2-11) with a sliding rod, a reversing gear (2-12), a first sliding rack (2-13), a second sliding rack (2-14), a sliding rail (2-15), a clamping base (2-16), a sliding rod (2-17) with a limiting head, a built-in spring (2-18) and a screw rod (2-19), wherein the base (2-1) is connected with the box body (2-3) with supporting legs, a first external connecting pipe (2-2) and a discharge cabin door (2-4) are arranged on a box body (2-3) with supporting legs, a shaft with holes (2-5) is rotatably connected on a top plate of the box body (2-3) with supporting legs, a shaft with bulges (2-6) is slidably connected in the shaft with holes (2-5), a second spring (2-7) is sleeved on the shaft with bulges (2-6), the shaft with bulges (2-6) is connected with a motor (2-8), the motor (2-8) is connected with a motor base (2-9), the motor base (2-9) is slidably connected on a platform with sliding rods (2-11), the platform with sliding rods (2-11) is arranged on the upper end surface of the box body with supporting legs (2-3), a first servo motor (2-10) is arranged at the upper end of the platform with sliding rods (2-11), the rotating end of a first servo motor (2-10) is connected with a lead screw (2-19), the lead screw (2-19) is rotatably connected on a platform (2-11) with a sliding rod, the lead screw (2-19) is rotatably connected with a box body (2-3) with supporting legs, the lead screw (2-19) is in threaded connection with a motor base (2-9), a reversing gear (2-12) is rotatably connected on a sliding rail (2-15), a first sliding rack (2-13) and a second sliding rack (2-14) are both meshed with the reversing gear (2-12), the sliding rail (2-15) is connected at the lower end of a protruding shaft (2-6), two clamping seats (2-16) are symmetrically and slidably connected in the sliding rail (2-15), the first sliding rack (2-13) and the second sliding rack (2-14) are both connected with a sliding rod (2-17) with a limiting head, two sliding rods (2-17) with limiting heads are symmetrically and slidably connected to the sliding rails (2-15), the sliding rods (2-17) with limiting heads are connected with the clamping seats (2-16), the built-in springs (2-18) are sleeved on the sliding rods (2-17) with limiting heads, two ends of the built-in springs (2-18) are respectively connected to the inner walls of the sliding rails (2-15) and the clamping seats (2-16), the pincer pots (1-7) are connected with the box body (2-3) with supporting legs, and the circulating box (1-1) is connected with the base (2-1).

3. A vapor deposition apparatus to prevent clogging according to claim 2, wherein: the anti-blocking mechanism (3) comprises a second external connecting pipe (3-1), a filter box (3-2), a third belt pulley (3-3), a transmission belt (3-4), a motor belt pulley (3-5), a second servo motor (3-6), a third external connecting pipe (3-7), a first belt shaft adhesive wheel (3-8), a filter screen (3-9) and a second belt shaft adhesive wheel (3-10), wherein the second external connecting pipe (3-1) is connected and communicated with the filter box (3-2), the third belt pulley (3-3) is in friction connection with the transmission belt (3-4), the transmission belt (3-4) is in friction connection with the motor belt pulley (3-5), the motor belt pulley (3-5) is connected with the second servo motor (3-6), the second servo motor (3-6) is connected with the filter box (3-2), a third external connecting pipe (3-7) is connected and communicated with a filter box (3-2), a second external connecting pipe (3-1) and the third external connecting pipe (3-7) are concentric, a first belt shaft adhesive wheel (3-8) and a second belt shaft adhesive wheel (3-10) are rotationally connected with the filter box (3-2), the first belt shaft adhesive wheel (3-8) is connected with a third belt pulley (3-3), a motor belt pulley (3-5) is connected with the second belt shaft adhesive wheel (3-10), one end of a filter screen (3-9) is connected with the first belt shaft adhesive wheel (3-8) and winds around the first belt shaft adhesive wheel (3-8) for half circumference, the other end of the filter screen (3-9) is connected with the second belt shaft adhesive wheel (3-10) and winds around the second belt shaft adhesive wheel (3-10) for half circumference, the second external connecting pipe (3-1) is connected and communicated with the first external connecting pipe (2-2), the filter box (3-2) is connected with the base (2-1).

4. A block prevention evaporation apparatus according to any one of claims 1 to 3, wherein: the cam (1-4) with the shaft is provided with a matched driving motor.

5. A block prevention evaporation apparatus according to claim 3, wherein: the third external connecting pipe (3-7) is externally connected with a vacuum pump.

Technical Field

The invention relates to evaporation equipment, in particular to evaporation equipment capable of preventing blockage.

Background

In the process of vacuum evaporation, the traditional evaporation equipment has the problems that a pincer pot is slow to cool, evaporation is easy to be uneven, and a vacuum pump is easy to block, so that the efficiency after evaporation is low, and the vacuum pump is easy to block, so that the evaporation equipment for preventing blocking is designed.

Disclosure of Invention

The invention mainly solves the technical problem of providing the blockage-preventing evaporation equipment, the equipment can clamp a substrate tightly, the equipment can carry out rotary evaporation, the equipment can close a gate after evaporation and then carry out rapid cooling, and the equipment can ensure the stable operation of a vacuum pump.

In order to solve the technical problem, the invention relates to evaporation equipment, in particular to evaporation equipment capable of preventing blockage, which comprises a cooling pincer pot mechanism, an evaporation box mechanism and an anti-blocking mechanism, wherein a substrate can be clamped by the equipment, the equipment can carry out rotary evaporation, the equipment can close a gate after evaporation and then carry out rapid cooling, and the equipment can ensure the stable operation of a vacuum pump.

The cooling pincer pot mechanism is connected with the evaporation box mechanism, and the evaporation box mechanism is connected with the anti-blocking mechanism;

the cooling tong-pan mechanism comprises a circulating box, a belt, a first belt pulley, a belt shaft cam, a belt shaft matching seat, a first spring, a tong pan, an opening and closing gate, a second belt pulley, a first belt shaft bevel gear, a second belt shaft bevel gear, an air inlet, a filter element, a belt shaft gear, an inner cavity, a circulating channel, a pressing one-way valve, a pressure change box, a piston, a suction one-way valve, a suction inlet, a backflow pipeline, a hook plate with a bulge and an impeller, wherein the circulating box is connected below the tong pan, the belt is in friction connection with the first belt pulley, the first belt pulley is connected with the belt shaft cam, the belt shaft cam is in contact with the belt shaft matching seat, the first spring is sleeved on a rod of the belt shaft matching seat, the tong pan is rotatably connected with two belt shaft gears, the belt shaft gears are connected with the opening and closing gate, the two belt shaft gears are meshed with each other, the second belt pulley is in friction connection with the belt, the second belt pulley is connected with the first belt shaft bevel gear, the first belt shaft bevel gear is rotationally connected to the circulating box, the first belt shaft bevel gear is meshed with the second belt shaft bevel gear, the second belt shaft bevel gear is rotationally connected with the circulating box, the second belt shaft bevel gear is connected with the impeller, the air inlet is arranged on one side of the circulating box far away from the belt shaft cam, the filter element is clamped in the circulating box, the filter element penetrates through the air inlet, the inner cavity is arranged in the tong pan, the circulating channel is arranged in the tong pan, one end of the circulating channel penetrates through the circulating box and is communicated with the pressure change box, the circulating channel is internally provided with a pressing one-way valve, the other end of the circulating channel extends into the circulating box after being reversed in the tong pan, the circulating channel is communicated with the inside of the circulating box through a return pipeline, the pressure change box is connected to the inside of the circulating box, the piston is slidably connected with the pressure change box, the piston is connected with the belt rod matching seat, the belt rod matching seat is slidably connected with the pressure change box, and the belt rod matching seat is slidably connected with the circulating box, the suction one-way valve is arranged at a suction port on the pressure change box, the hook plate with the bulge is arranged in the circulating box, and the downward inclined tail part of the hook plate with the bulge is as high as the center of the impeller.

As a further optimization of the technical scheme, the evaporation box mechanism of the evaporation equipment for preventing blockage comprises a base, a first external connecting pipe, a box body with supporting legs, a discharge cabin door, a shaft with a hole, a shaft with a bulge, a second spring, a motor seat, a first servo motor, a platform with a sliding rod, a reversing gear, a first sliding rack, a second sliding rack, a sliding rail, a clamping seat, a sliding rod with a limiting head, a built-in spring and a screw rod, wherein the base is connected with the box body with the supporting legs, the box body with the supporting legs is provided with the first external connecting pipe and the discharge cabin door, the shaft with the hole is rotatably connected to a top plate of the box body with the supporting legs, the shaft with the bulge is slidably connected in the shaft, the second spring is sleeved on the shaft with the bulge, the shaft with the motor is connected with the motor seat, the motor seat is slidably connected to the platform with the sliding rod, the platform with the sliding rod is arranged on the upper end face of the box body with the supporting legs, the first servo motor is arranged at the upper end of a platform with a sliding rod, the rotating end of the first servo motor is connected with a lead screw, the lead screw is connected with the platform with the sliding rod in a rotating mode, the lead screw is connected with a box body with a supporting leg in a rotating mode, the lead screw is connected with a motor base in a threaded mode, a reversing gear is connected on a sliding rail in a rotating mode, a first sliding rack and a second sliding rack are meshed with the reversing gear, the sliding rail is connected with the lower end of a shaft with a protruding portion, two clamping seats are symmetrically and slidably connected into the sliding rail, the first sliding rack and the second sliding rack are connected with a sliding rod with a limiting head, the two sliding rods with the limiting head are symmetrically and slidably connected onto the sliding rail, the sliding rod with the limiting head is connected with the clamping seats, a built-in spring is sleeved on the sliding rod with the limiting head, two ends of the built-in spring are connected onto the inner wall of the sliding rail and the clamping seats respectively, a pincer pot is connected with the box body with the supporting leg, and a circulating box is connected with a base.

As a further optimization of the technical scheme, the anti-blocking mechanism of the evaporation equipment for preventing blocking comprises a second external connecting pipe, a filter box, a third belt pulley, a transmission belt, a motor belt pulley, a second servo motor, a third external connecting pipe, a first belt shaft adhesive wheel, a filter screen and a second belt shaft adhesive wheel, wherein the second external connecting pipe is connected and communicated with the filter box, the third belt pulley is in friction connection with the transmission belt, the transmission belt is in friction connection with the motor belt pulley, the motor belt pulley is connected with the second servo motor, the second servo motor is connected with the filter box, the third external connecting pipe is connected and communicated with the filter box, the second external connecting pipe and the third external connecting pipe are concentric, the first belt shaft adhesive wheel and the second belt shaft adhesive wheel are both rotationally connected with the filter box, the first belt shaft adhesive wheel is connected with the third belt pulley, the motor belt pulley is connected with the second belt shaft adhesive wheel, one end of the filter screen is connected with the first belt shaft adhesive wheel and winds around the first belt shaft adhesive wheel for half circle, the filter screen other end links to each other with the second tape spool bonding wheel and around the second tape spool bonding wheel half-cycle, and the second is outer to take over and is linked to each other and communicate with first outer takeover, and the rose box links to each other with the base.

As a further optimization of the technical scheme, the shaft-provided cam of the evaporation equipment for preventing blockage is provided with a matched driving motor.

As a further optimization of the technical scheme, the third external connecting pipe of the evaporation equipment for preventing blockage is externally connected with a vacuum pump.

The evaporation equipment for preventing blockage has the beneficial effects that:

according to the evaporation equipment capable of preventing blockage, the equipment can clamp the substrate, the equipment can carry out rotary evaporation, the equipment can close the gate after evaporation and then carry out rapid cooling, and the equipment can ensure stable operation of the vacuum pump.

Drawings

The invention is described in further detail below with reference to the accompanying drawings and specific embodiments.

Fig. 1 is a first structural schematic diagram of an evaporation apparatus for preventing clogging according to the present invention.

Fig. 2 is a schematic structural diagram of a second evaporation device for preventing blockage according to the present invention.

Fig. 3 is a third schematic structural view of an evaporation apparatus for preventing clogging according to the present invention.

Fig. 4 is a fourth schematic structural view of an evaporation apparatus for preventing clogging according to the present invention.

Fig. 5 is a first structural schematic diagram of a cooling pincer-pot mechanism 1 of an evaporation equipment for preventing blockage according to the present invention.

Fig. 6 is a second structural schematic diagram of a cooling pincer-pot mechanism 1 of an evaporation equipment for preventing blockage according to the present invention.

Fig. 7 is a third schematic structural diagram of a cooling pincer-pot mechanism 1 of an evaporation equipment for preventing blockage according to the present invention.

Fig. 8 is a first structural schematic diagram of a vapor deposition box mechanism 2 of a vapor deposition device for preventing blockage according to the present invention.

Fig. 9 is a partially enlarged structural diagram of a portion a of fig. 8 of a vapor deposition apparatus for preventing clogging according to the present invention.

Fig. 10 is a second structural schematic diagram of a vapor deposition box mechanism 2 of a vapor deposition device for preventing clogging according to the present invention.

Fig. 11 is a third schematic structural view of a vapor deposition box mechanism 2 of a vapor deposition device for preventing clogging according to the present invention.

Fig. 12 is a partially enlarged structural diagram of a portion B of the evaporation apparatus for preventing clogging according to the present invention.

Fig. 13 is a first schematic structural diagram of an anti-blocking mechanism 3 of an evaporation apparatus for preventing blocking according to the present invention.

Fig. 14 is a second schematic structural diagram of an anti-blocking mechanism 3 of a vapor deposition apparatus for preventing blocking according to the present invention.

In the figure: a cooling pincer-pot mechanism 1; 1-1 of a circulation box; 1-2 of a belt; a first pulley 1-3; 1-4 of cam with shaft; 1-5 of a matching seat with a rod; a first spring 1-6; 1-7 of a pincer pot; 1-8 of an opening and closing gate; a second pulley 1-9; 1-10 parts of a first belt shaft bevel gear; second belt shaft bevel gears 1 to 11; 1-12 of an air inlet; 1-13 of filter element; gears with shafts 1-14; 1-15 of inner cavity; circulation channels 1-16; 1-17 parts of extrusion one-way valve; pressure change tanks 1-18; pistons 1-19; 1-20 parts of a suction one-way valve; suction ports 1 to 21; 1-22 of a return line; 1-23 of hook plate with bulge; 1-24 parts of an impeller; an evaporation box mechanism 2; a base 2-1; a first external connecting pipe 2-2; a box body 2-3 with supporting legs; 2-4 parts of a discharge cabin door; 2-5 of a shaft with holes; 2-6 of a shaft with a bulge; a second spring 2-7; 2-8 of a motor; 2-9 parts of a motor base; a first servo motor 2-10; 2-11 of a platform with a sliding rod; 2-12 parts of a reversing gear; a first sliding rack 2-13; a second sliding rack 2-14; 2-15 of a slide rail; 2-16 of a card seat; 2-17 sliding rods with limiting heads; 2-18 of built-in spring; 2-19 parts of a lead screw; an anti-blocking mechanism 3; a second external connection pipe 3-1; 3-2 of a filter box; a third pulley 3-3; 3-4 parts of a transmission belt; 3-5 of a motor belt pulley; 3-6 of a second servo motor; 3-7 parts of a third external connecting pipe; 3-8 parts of a first tape spool sticking wheel; 3-9 parts of a filter screen; and 3-10 parts of a second adhesive wheel with a shaft.

Detailed Description

The first embodiment is as follows:

referring to fig. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, the embodiment is described, first connecting the third external connecting pipe 3-7 with a vacuum pump, then opening the discharge hatch 2-4, pulling the first sliding rack 2-13, the first sliding rack 2-13 will drive the second sliding rack 2-14 to move synchronously through the reversing gear 2-12, the first sliding rack 2-13 and the second sliding rack 2-14 have opposite moving directions, the first sliding rack 2-13 and the second sliding rack 2-14 will respectively pull the slide bar 2-17 with the limit head connected with the first sliding rack 2-13, the slide bar 2-17 with the limit head will drive the corresponding cassette 2-16 to move, so that the two cassette 2-16 will be far away from each other, clamping a substrate on a clamping seat 2-16, then loosening a first sliding rack 2-13, clamping the substrate between the clamping seat 2-16 under the action of the elastic force of an internal spring 2-18 to complete the fixation of the substrate, rotating a belt shaft gear 1-14, driving two opening and closing gates 1-8 to separate each other by the two belt shaft gears 1-14 due to mutual meshing, then putting the evaporated material into an inner cavity 1-15, then closing a discharge door 2-4, performing vacuum treatment in the whole device through the work of an external vacuum pump, starting heating a pincer pot 1-7, thus performing vacuum evaporation, evaporating the material on the substrate, operating a motor 2-8 to drive a belt convex shaft 2-6 to rotate for uniform evaporation, driving a sliding rail 2-15 to rotate by the belt convex shaft 2-6, the slide rails 2-15 can drive the substrate to rotate when rotating, so that a better evaporation effect is achieved, in the process, the first servo motors 2-10 can drive the screw rods 2-19 to rotate at any time, the screw rods 2-19 can drive the motor bases 2-9 to move up and down, so that the heights of the slide rails 2-15 and the splicing sheets are adjusted, in the process of vacuumizing, gas can be filtered by the filter screens 3-9, the second servo motors 3-6 can drive the motor belt pulleys 3-5 to rotate, the motor belt pulleys 3-5 can drive the third belt pulleys 3-3 to rotate through the transmission belts 3-4, so that the first belt shaft adhesive wheels 3-8 and the second belt shaft adhesive wheels 3-10 synchronously rotate in the same direction, and the filtering positions of the filter screens 3-9 are moved, the device can be repeatedly used for multiple times to prevent blockage, after evaporation is finished, the belt shaft gears 1-14 are rotated reversely to enable the opening and closing gates 1-8 to be closed mutually, heating is stopped, then the supporting motor of the belt shaft cams 1-4 operates to drive the belt shaft cams 1-4 to rotate, the belt shaft cams 1-4 drive the first belt pulleys 1-3 to rotate, the first belt pulleys 1-3 drive the second belt pulleys 1-9 to rotate through the belts 1-2, the second belt pulleys 1-9 drive the movable pulleys 1-24 to rotate through the driving belts of the first belt shaft bevel gears 1-10 and the second belt shaft bevel gears 1-11, cooling liquid is added in the circulation box 1-1 in advance, the height of the cooling liquid is the same as the height of the circle centers of the impellers 1-24, and the rotation of the belt shaft cams 1-4 drives the belt rod matching seats 1-5 to reciprocate through matching with the first springs 1-6 The matching seat 1-5 with the rod can drive the piston 1-19 to do reciprocating linear motion, so as to cause the pressure difference change in the pressure change box 1-18, the cooling liquid is sucked into the pressure change box 1-18 from the suction one-way valve 1-20 and then is pressurized and then is flushed out to be pressed out of the one-way valve 1-17 to enter the circulating channel 1-16 to exchange heat with the pincer pot 1-7, the purpose of rapid cooling is achieved, the cooling liquid can flow back from the hook plate 1-23 with the bulge, the bulge on the hook plate 1-23 with the bulge can play a role in increasing the heat exchange area, the rotation of the impeller 1-24 can blow the outside air to the hook plate 1-23 with the bulge after being filtered by the filter element 1-13 to perform rapid cooling, and the lower half part of the impeller 1-24 can play a role in pushing the cooling liquid, the liquid is assisted to move towards the suction one-way valves 1-20, and the functions of drainage and cooling are achieved.

The second embodiment is as follows:

the present embodiment will be described below with reference to fig. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, and 14, and the present embodiment further describes the first embodiment in which the cam with a shaft 1-4 is provided with a driving motor.

It is to be understood that the above description is not intended to limit the present invention, and the present invention is not limited to the above examples, and that various changes, modifications, additions and substitutions which are within the spirit and scope of the present invention and which may be made by those skilled in the art are also within the scope of the present invention.