Vacuum coating machine

文档序号:1842123 发布日期:2021-11-16 浏览:19次 中文

阅读说明:本技术 一种真空镀膜机 (Vacuum coating machine ) 是由 姚斌 于 2021-08-23 设计创作,主要内容包括:本发明公开了一种真空镀膜机,涉及真空镀膜技术领域,包括箱体,箱体内设置有蒸发组件、齿轮传动组件、喷淋组件和若干个夹持组件,蒸发组件、齿轮传动组件和喷淋组件自下而上依次设置在箱体内,若干个夹持组件呈上下交错分布在齿轮传动组件上,蒸发组件包括蒸发架、滤网和防水部件,蒸发架与箱体固定连接,滤网设置在蒸发架的底部,蒸发架内设置有若干个蒸发电极,防水部件设置在蒸发架的顶部,箱体下部的一侧设置有排水管,箱体的顶部设置有排气管,箱体中部的一侧开设有操作门。本发明使夹持组件对镀件进行多角度的转动,提高了镀膜的效果,并且操作过程中不需要频繁地对设备进行拆卸,减少因频繁对设备操作而产生的隐患。(The invention discloses a vacuum coating machine, which relates to the technical field of vacuum coating and comprises a box body, wherein an evaporation assembly, a gear transmission assembly, a spraying assembly and a plurality of clamping assemblies are arranged in the box body, the evaporation assembly, the gear transmission assembly and the spraying assembly are sequentially arranged in the box body from bottom to top, the clamping assemblies are distributed on the gear transmission assembly in a vertically staggered manner, the evaporation assembly comprises an evaporation rack, a filter screen and a waterproof part, the evaporation rack is fixedly connected with the box body, the filter screen is arranged at the bottom of the evaporation rack, a plurality of evaporation electrodes are arranged in the evaporation rack, the waterproof part is arranged at the top of the evaporation rack, a drain pipe is arranged on one side of the lower part of the box body, an exhaust pipe is arranged at the top of the box body, and an operation door is arranged on one side of the middle part of the box body. The invention enables the clamping component to rotate the plated part at multiple angles, improves the film plating effect, does not need to frequently disassemble the equipment in the operation process, and reduces the hidden danger caused by frequent operation of the equipment.)

1. A vacuum coating machine comprises a box body (1) and is characterized in that an evaporation assembly (2), a gear transmission assembly (3), a spraying assembly (4) and a plurality of clamping assemblies (5) are arranged in the box body (1), the evaporation assembly (2), the gear transmission assembly (3) and the spraying assembly (4) are sequentially arranged in the box body (1) from bottom to top, the clamping assemblies (5) are vertically and alternately distributed on the gear transmission assembly (3), the evaporation assembly (2) comprises an evaporation rack (6), a filter screen (61) and a waterproof component (7), the evaporation rack (6) is fixedly connected with the box body (1), the filter screen (61) is arranged at the bottom of the evaporation rack (6), a plurality of evaporation electrodes (62) are arranged in the evaporation rack (6), and the waterproof component (7) is arranged at the top of the evaporation rack (6), one side of the lower part of the box body (1) is provided with a drain pipe (8), the top of the box body (1) is provided with an exhaust pipe (9), and one side of the middle part of the box body (1) is provided with an operating door (10).

2. A vacuum coating machine as claimed in claim 1, wherein said waterproof member (7) comprises a first motor (72) and two half-round doors (71), one end of one of said half-round doors (71) is provided with a driving shaft (73), one end of the other half-round door (71) is provided with a driven shaft (74), said driving shaft (73) and said driven shaft (74) are rotatably connected with the box body (1), said driving shaft (73) is provided with a driving gear (75), said driven shaft (74) is provided with a driven gear (76), said driving gear (75) and said driven gear (76) are engaged with each other, said first motor (72) is installed at the bottom of the box body (1), and the output end of said first motor (72) is connected with the driving shaft (73).

3. The vacuum coating machine according to claim 1, wherein the gear transmission assembly (3) comprises a first shaft rod (31), a fixing rod (32), a second motor (33), a plurality of first bevel gears (34), a plurality of second shaft rods (35) and a plurality of second bevel gears (36), the bottom of the first shaft rod (31) is rotatably connected with the box body (1), the top of the first shaft rod (31) is rotatably connected with the box body (1), the second motor (33) is arranged at the bottom of the box body (1), the output end of the second motor (33) is connected with the first shaft rod (31), the first shaft rod (31) is of a hollow structure, the fixing rod (32) is arranged inside the first shaft rod (31), the top end of the fixing rod (32) is fixedly connected with the box body (1), the plurality of first bevel gears (34) are arranged on the fixing rod (32) at equal intervals, each second shaft lever (35) penetrates through one side of the first shaft lever (31), the second bevel gears (36) are arranged at one ends of the second shaft levers (35), each second bevel gear (36) is meshed with the corresponding first bevel gear (34), and a reinforcing ring (37) is arranged at the joint of each second shaft lever (35) and the first shaft lever (31).

4. A vacuum coater according to claim 3, wherein the bottom of the fixing rod (32) is provided with a bearing (38), the inside of the bearing (38) is fixedly connected with the fixing rod (32), and the outside of the bearing (38) is rotatably connected with the first shaft rod (31).

5. The vacuum coating machine according to claim 3, wherein the clamping assemblies (5) are in the same number and correspond to the second shaft rods (35) one by one, each clamping assembly (5) comprises an L-shaped fixed block (51), a sliding block (52) and a screw (53), each fixed block (51) is arranged at the other end of the corresponding second shaft rod (35), each fixed block (51) is provided with a sliding groove (54), each sliding block (52) is in sliding connection with the corresponding sliding groove (54), and each screw (53) penetrates through the corresponding fixed block (51) and the corresponding sliding block (52).

6. A vacuum coating machine according to claim 5, characterized in that the clamping surfaces of each fixed block (51) and slide block (52) are symmetrically provided with anti-slip lines (55).

7. The vacuum coating machine according to claim 1, wherein the spray assembly (4) comprises a plurality of water inlet pipes (41) and a plurality of spray heads (42), the number of the water inlet pipes (41) and the number of the spray heads (42) are the same, the water inlet pipes (41) correspond to each other one by one, each spray head (42) is arranged in the box body (1), each spray head (42) is arranged at one end of each water inlet pipe (41), and the output end of each spray head (42) is inclined towards the top of the box body (1).

Technical Field

The invention relates to the technical field of vacuum coating, in particular to a vacuum coating machine.

Background

Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit it on an object to be coated (referred to as a substrate, a substrate or a base) is called vacuum coating.

Chinese patent No. CN109930128B discloses a vacuum coating machine, including bottom plate, diffusion pump and mechanical pump, the equal fixed mounting in the lower extreme surface left and right sides of bottom plate has the support, the inside left side of the cover body is provided with the vacuometer, the inside right side of the cover body is provided with the bleed valve, the inside left and right sides of the cover body all is provided with electric telescopic handle, equidistant fixed connection of electric telescopic handle's upper end surface remains the metallization, electric telescopic handle's inboard is provided with the framework, the right side fixed surface of framework installs the motor, the structural erection joint of interlock has the fixed disk, the upper surface right side fixed mounting of bottom plate has the liquid reserve tank.

The cover body that its set up need constantly dismantle, install in the course of the work, not only influences the internal leakproofness of cover, still wastes time and energy to the centre gripping subassembly that its set up is in the below of evaporation electrode, makes the work piece that needs the coating film fail the internal granule of treating of absorption cover that is fine, and the coating film effect is not good, and the shower nozzle of its setting fails to wash the granule of easy gathering at cover body top, and it is not good to wash the effect.

Disclosure of Invention

The invention aims to provide a vacuum coating machine to solve the technical problems of poor coating effect, poor sealing performance caused by cover body disassembly and assembly and high labor cost in the prior art.

The invention provides a vacuum coating machine which comprises a box body, wherein an evaporation assembly, a gear transmission assembly, a spraying assembly and a plurality of clamping assemblies are arranged in the box body, the evaporation assembly, the gear transmission assembly and the spraying assembly are sequentially arranged in the box body from bottom to top, the clamping assemblies are distributed on the gear transmission assembly in a vertically staggered mode, the evaporation assembly comprises an evaporation frame, a filter screen and a waterproof part, the evaporation frame is fixedly connected with the box body, the filter screen is arranged at the bottom of the evaporation frame, a plurality of evaporation electrodes are arranged in the evaporation frame, the waterproof part is arranged at the top of the evaporation frame, a drain pipe is arranged on one side of the lower portion of the box body, an exhaust pipe is arranged on the top of the box body, and an operation door is arranged on one side of the middle of the box body.

Further, the waterproof part includes first motor and two semicircle doors, one of them the one end of semicircle door is provided with initiative pivot, another the one end of semicircle door is provided with driven shaft, initiative pivot and driven shaft rotate with the box and are connected, be provided with the driving gear in the initiative pivot, be provided with driven gear in the driven shaft, driving gear and driven gear intermeshing, the bottom at the box is installed to first motor, just the output and the initiative pivot of first motor are connected.

Further, the gear transmission component comprises a first shaft lever, a fixed rod, a second motor, a plurality of first bevel gears, a plurality of second shaft levers and a plurality of second bevel gears, the bottom of the first shaft lever is rotationally connected with the box body, the top of the first shaft lever is rotationally connected with the box body, the second motor is arranged at the bottom of the box body, the output end of the second motor is connected with a first shaft lever, the first shaft lever is of a hollow structure, the fixed lever is arranged in the first shaft lever, the top end of the fixed rod is fixedly connected with the box body, a plurality of first bevel gears are arranged on the fixed rod at equal intervals, each second shaft lever penetrates through one side of the first shaft lever, the second bevel gears are arranged at one end of the second shaft lever, and each second bevel gear is meshed with the corresponding first bevel gear, and a reinforcing ring is arranged at the joint of each second shaft lever and the corresponding first shaft lever.

Further, the bottom of dead lever is provided with the bearing, the inside and the dead lever fixed connection of bearing, the outside and the first shaft lever of bearing are rotated and are connected.

Further, the centre gripping subassembly is the same with the second shaft pole quantity and one-to-one, every the centre gripping subassembly includes "L" shape fixed block, slider and screw rod, every the fixed block all sets up the other end at the second shaft pole that corresponds, every the spout has all been seted up on the fixed block, every the slider all with corresponding spout sliding connection, every the screw rod all runs through corresponding fixed block and slider setting.

Furthermore, each clamping surface of the fixed block and the sliding block is symmetrically provided with anti-skid grains.

Further, the spray assembly includes a plurality of inlet tube and a plurality of shower nozzle, the quantity of inlet tube and shower nozzle is the same and the one-to-one, every the inlet tube all sets up in the inside of box, every the shower nozzle sets up the one end at the inlet tube, and every the output of shower nozzle all inclines towards the top of box.

Compared with the prior art, the invention has the beneficial effects that:

(1) according to the invention, the clamping assembly rotates the plated part in multiple angles through the meshing of the first bevel gear and the second bevel gear, so that the plated part can absorb particles to be plated in all directions, the plating effect is improved, and in addition, extra resource consumption is not needed in the operation process, so that the plating work can be performed in an energy-saving and efficient manner.

(2) The invention prevents the cleaning liquid from entering the evaporation rack to corrode the evaporation electrode when the waterproof part is used for cleaning, thereby further influencing the normal operation of the equipment, reducing the cost of operation and maintenance and saving manpower and material resources.

(3) The invention can realize continuous work, does not need to frequently disassemble the equipment, reduces hidden troubles caused by frequent operation of the equipment, ensures that the equipment runs more stably by arranging the bearing and the reinforcing ring, and improves the practicability of the invention.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a cross-sectional view of the present invention;

FIG. 3 is a first partial schematic of the present invention;

FIG. 4 is a second partial structural view of the present invention;

FIG. 5 is a schematic view of a clamping assembly according to the present invention.

Reference numerals:

1. a box body; 2. an evaporation assembly; 3. a gear drive assembly; 4. a spray assembly; 5. a clamping assembly; 6. an evaporation rack; 7. a waterproof member; 8. a drain pipe; 9. an exhaust pipe; 10. an operating door; 31. a first shaft lever; 32. fixing the rod; 33. a second motor; 34. a first bevel gear; 35. a second shaft lever; 36. a second bevel gear; 37. reinforcing rings; 38. a bearing; 41. a water inlet pipe; 42. a spray head; 51. a fixed block; 52. a slider; 53. a screw; 54. a chute; 55. anti-skid lines; 61. filtering with a screen; 62. an evaporation electrode; 71. a semi-circular door; 72. a first motor; 73. a driving rotating shaft; 74. a driven rotating shaft; 75. a driving gear; 76. a driven gear.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention.

The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.

All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The embodiment of the invention provides a vacuum coating machine which comprises a box body 1, wherein an evaporation assembly 2, a gear transmission assembly 3, a spraying assembly 4 and a plurality of clamping assemblies 5 are arranged in the box body 1, the evaporation assembly 2, the gear transmission assembly 3 and the spraying assembly 4 are sequentially arranged in the box body 1 from bottom to top, the clamping assemblies 5 are vertically and alternately distributed on the gear transmission assembly 3, the evaporation assembly 2 comprises an evaporation frame 6, a filter screen 61 and a waterproof part 7, the evaporation frame 6 is fixedly connected with the box body 1, the filter screen 61 is arranged at the bottom of the evaporation frame 6, a plurality of evaporation electrodes 62 are arranged in the evaporation frame 6, the waterproof part 7 is arranged at the top of the evaporation frame 6, a drain pipe 8 is arranged on one side of the lower part of the box body 1, and an exhaust pipe 9 is arranged at the top of the box body 1, an operation door 10 is arranged on one side of the middle part of the box body 1.

The working principle is as follows: when the coating preparation work is carried out, an operator opens the operation door 10, places the metal to be coated on the evaporation electrode 62, places the coated piece on the clamping assembly 5, adjusts the coated piece through the screw 53 to clamp the coated piece, then closes the operation door 10, vacuums the box body 1 through the exhaust pipe 9, then starts the coating work, opens the first motor 72 to rotate the driving rotating shaft 73, opens the waterproof part 7 through the meshing of the driving gear 75 and the driven gear 76, heats the metal to be coated through the evaporation electrode 62, opens the second motor 33 to rotate the first shaft rod 31, the first shaft rod 31 rotates to drive the plurality of second shaft rods 35 on the first shaft rod 31 to transversely rotate, meanwhile, the second bevel gear 36 on each second shaft rod 35 meshes with the first bevel gear 34 on the fixed rod, so that the second shaft rods 35 longitudinally rotate through the rotation in two directions, the messenger plates the granule of treating plating in the piece can the better absorption environment, and after the coating film, waterproof part 7 is closed to first motor 72 of rethread, and rethread spray set 4 washes the inner wall of box, accomplishes the cleaning operation.

Specifically, the waterproof part 7 includes a first motor 72 and two semicircular doors 71, one of them the one end of semicircular door 71 is provided with initiative pivot 73, another the one end of semicircular door 71 is provided with driven pivot 74, initiative pivot 73 and driven pivot 74 rotate with the box 1 and are connected, be provided with driving gear 75 on the initiative pivot 73, be provided with driven gear 76 on the driven pivot 74, driving gear 75 and driven gear 76 intermeshing, the bottom at the box 1 is installed to first motor 72, just the output of first motor 72 is connected with initiative pivot 73. The waterproof member 7 is used to prevent the cleaning liquid from entering the evaporation rack 6 and corroding the evaporation electrode 62 during the cleaning operation.

Specifically, the gear transmission assembly 3 includes a first shaft 31, a fixing rod 32, a second motor 33, a plurality of first bevel gears 34, a plurality of second shafts 35, and a plurality of second bevel gears 36, wherein the bottom of the first shaft 31 is rotatably connected to the case 1, the top of the first shaft 31 is rotatably connected to the case 1, the second motor 33 is disposed at the bottom of the case 1, the output end of the second motor 33 is connected to the first shaft 31, the first shaft 31 is hollow, the fixing rod 32 is disposed inside the first shaft 31, the top of the fixing rod 32 is fixedly connected to the case 1, the plurality of first bevel gears 34 are disposed on the fixing rod 32 at equal intervals, each second shaft 35 is disposed at one side of the first shaft 31, the second bevel gears 36 are disposed at one end of the second shaft 35, and each second bevel gear 36 is engaged with the corresponding first bevel gear 34, a reinforcing ring 37 is arranged at the joint of each second shaft 35 and the first shaft 31. Through the meshing of first bevel gear 34 and second bevel gear 36, make centre gripping subassembly 5 carry out multi-angle's rotation to plating the piece, make to plate the piece and can adsorb the granule that treats to plate in all-round, improve the effect of coating film, the reinforcing ring 37 guarantees that second axostylus axostyle 35 can rotate on first axostylus axostyle 31 steadily.

Specifically, the bottom of the fixing rod 32 is provided with a bearing 38, the inside of the bearing 38 is fixedly connected with the fixing rod 32, and the outside of the bearing 38 is rotatably connected with the first shaft 31. The arrangement of the bearing 38 ensures that the fixing rod 32 is in a stable state in the first shaft 31, and prevents the whole gear transmission assembly 3 from being out of work due to the shaking of the fixing rod 32.

Specifically, the clamping assemblies 5 are the same in number and correspond to the second shaft rods 35 one by one, each clamping assembly 5 comprises an L-shaped fixing block 51, a sliding block 52 and a screw 53, each fixing block 51 is arranged at the other end of the corresponding second shaft rod 35, a sliding groove 54 is formed in each fixing block 51, each sliding block 52 is connected with the corresponding sliding groove 54 in a sliding mode, and each screw 53 penetrates through the corresponding fixing block 51 and the corresponding sliding block 52. The plated piece in the clamping component 5 is fastened by rotating the screw 53, so that the plated piece is prevented from falling off from the clamping component 5 in the film plating process.

Specifically, the clamping surfaces of each fixed block 51 and each sliding block 52 are symmetrically provided with anti-slip threads 55. The anti-slip lines 55 can further ensure that the plated part cannot fall off from the clamping assembly 5, and the anti-slip lines 55 can allow particles to be plated in the box body 1 to enter the plated part from gaps of the anti-slip lines 55, so that the plated part can comprehensively adsorb the particles to be plated.

Specifically, spray set 4 includes a plurality of inlet tube 41 and a plurality of shower nozzle 42, inlet tube 41 and shower nozzle 42 the same and one-to-one of quantity, every inlet tube 41 all sets up in the inside of box 1, every shower nozzle 42 sets up the one end at inlet tube 41, and every the output of shower nozzle 42 all inclines towards the top of box 1. The spray head 42 is obliquely and upwards arranged to wash the particles to be plated gathered at the top of the box body 1, and the particles are washed along the inner wall of the box body 1 until the bottom of the box body 1, so that the washing surface is wider, and the washing effect is better.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

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