阅读说明：本技术 曝光平台的支撑装置 (Supporting device of exposure platform ) 是由 余燕青 杜志航 于 2021-09-15 设计创作，主要内容包括：本发明涉及曝光平台的支撑装置,具有上铬板固定框及下铬板固定框,以及还包括有给予上铬板固定框安装支持的支撑立柱,上铬板固定框在支撑立柱上通过滑动块引导来实现沿空间直角坐标系的Z轴移动,滑动块与上铬板固定框之间通过浮动块连接,该浮动块与滑动块在空间直角坐标系的Z轴方向上具有一定范围内的相对移动量,使上铬板固定框和下铬板固定框构建真空时,上铬板固定框跟随抽真空状态自适向下铬板固定框移动。本发明可以保证曝光过程的线路板在真空环境吸附下即使遇到震动也不会发生变形及偏移,继续保持精确的对位状态,提升曝光生产效率及质量,加工精度更高。结构简单,投资成本低,符合产业利用。(The invention relates to a supporting device of an exposure platform, which comprises an upper chromium plate fixing frame, a lower chromium plate fixing frame and a supporting upright post for mounting and supporting the upper chromium plate fixing frame, wherein the upper chromium plate fixing frame is guided on the supporting upright post by a sliding block to move along a Z axis of a space rectangular coordinate system, the sliding block is connected with the upper chromium plate fixing frame by a floating block, the floating block and the sliding block have relative movement in a certain range in the Z axis direction of the space rectangular coordinate system, and when the upper chromium plate fixing frame and the lower chromium plate fixing frame construct a vacuum, the upper chromium plate fixing frame can move to the lower chromium plate fixing frame along with a vacuumizing state. The invention can ensure that the circuit board in the exposure process can not deform and shift even if the circuit board is subjected to vibration under the vacuum environment adsorption, the accurate alignment state is continuously kept, the exposure production efficiency and quality are improved, and the processing precision is higher. Simple structure, low investment cost and industrial utilization.)

1. The supporting device of the exposure platform is provided with an upper chromium plate fixing frame (1) and a lower chromium plate fixing frame (2), and is characterized by further comprising a supporting upright post (3) for mounting and supporting the upper chromium plate fixing frame (1), wherein the upper chromium plate fixing frame (1) is guided on the supporting upright post (3) through a sliding block (4) to move along the Z axis of a space rectangular coordinate system, the sliding block (4) is connected with the upper chromium plate fixing frame (1) through a floating block (5), the floating block (5) and the sliding block (4) have a relative movement amount within a certain range in the Z axis direction of the space rectangular coordinate system, and when the upper chromium plate fixing frame (1) and the lower chromium plate fixing frame (2) construct a vacuum, the upper chromium plate fixing frame (1) automatically and suitably moves towards the lower chromium plate fixing frame (2) along with a vacuumizing state.

2. The support device of an exposure platform according to claim 1, wherein the upper chrome plate fixing frame (1) and the lower chrome plate fixing frame (2) are constructed in a vacuum manner based on an upper glass (11), a lower glass (21) and a sealant (22), the upper glass (11) is arranged on the upper chrome plate fixing frame (1), and the lower glass (21) and the sealant (22) are arranged on the lower chrome plate fixing frame (2); the upper glass (11) and the lower glass (21) are arranged in parallel, the flexible substrate to be exposed is positioned between the upper glass (11) and the lower glass (21), and exposure is carried out in a vacuum state; the sealing rubber strips (22) are distributed on the periphery of the lower glass (21), the upper side faces of the sealing rubber strips (22) are higher than the upper side faces of the lower glass (21), the sealing rubber strips (22) prop the upper chromium plate fixing frame (1) and assist the upper chromium plate fixing frame (1) to move to the lower chromium plate fixing frame (2) along with the vacuumizing state in a self-adaptive mode.

3. The supporting device of the exposure platform according to claim 1 or 2, wherein the upper chromium plate fixing frame (1) is rectangular, four corners of the upper chromium plate fixing frame (1) are respectively correspondingly connected with the floating blocks (5), one of the four floating blocks (5) is directly and fixedly connected with the upper chromium plate fixing frame (1), the other three floating blocks (5) are connected with the upper chromium plate fixing frame (1) through adjusting blocks (6), and the adjusting blocks (6) can be adjusted and displaced at least along one axial direction in a space rectangular coordinate system.

4. The supporting device of the exposure platform according to claim 1, wherein the sliding block (4) is driven by a motor screw mechanism (7) to realize the movement of the sliding block (4) on the supporting column (3) along the Z axis of the rectangular space coordinate system.

5. The support device of an exposure platform according to claim 1, wherein the support columns (3) are spaced around the periphery of the upper chrome plate fixing frame (1) and all support columns (3) are mounted on the same base plate (8).

Technical Field

The invention relates to the technical field of processing and manufacturing of flexible electronic circuit boards and IC lead frames, in particular to an exposure platform applied to a double-sided automatic alignment exposure machine.

Background

With the development of electronic technology, the application of circuit boards (such as PCBs/FPCs) is more and more extensive, and the technical requirements for processing and manufacturing the circuit boards are higher and higher. Generally, circuit board exposure is an important process in the circuit board manufacturing process, and whether a good exposure process can be realized is the key point of whether accurate registration alignment between an upper circuit and a lower circuit of the circuit board can be achieved. As shown in fig. 1, the exposure platform is used to align the circuit board and the chrome plate and perform an exposure operation, and in the prior art, the exposure platform moves and adjusts the upper frame mold 200 and the lower frame mold 300 loaded with the chrome plate mainly under the control of the CCD alignment mechanism 100, so as to align the circuit board 400 and the chrome plate. However, in actual production, the circuit board after alignment is often affected by vibration or copper film stretching lines, which causes the circuit on the circuit board and the circuit on the circuit board to move or distort, and affects the production and quality of the circuit before and after connection of the flexible circuit board and the IC lead frame in bonding. Then, a vacuum environment is created to cooperate with exposure, and the flexible substrate 400 is adsorbed in vacuum to prevent the flexible substrate from being influenced by vibration or copper film stretching lines; however, in order to satisfy the vacuum-pumping, the installation structure between the upper frame mold 200 and the lower frame mold 300 is relatively complicated, and the amount of displacement for matching the vacuum-pumping between the upper frame mold 200 and the lower frame mold 300 is short, so that the upper frame mold 200 is lowered and jammed, which affects the vacuum-pumping quality.

Disclosure of Invention

The invention aims to provide a supporting device of an exposure platform, which well solves the technical problem.

In order to achieve the purpose, the invention adopts the following technical scheme:

the supporting device of the exposure platform comprises an upper chromium plate fixing frame and a lower chromium plate fixing frame, and further comprises a supporting stand column for mounting and supporting the upper chromium plate fixing frame, the upper chromium plate fixing frame is guided by a sliding block to move along the Z axis of a space rectangular coordinate system on the supporting stand column, the sliding block is connected with the upper chromium plate fixing frame through a floating block, the floating block and the sliding block have a certain range of relative movement amount in the Z axis direction of the space rectangular coordinate system, and when the upper chromium plate fixing frame and the lower chromium plate fixing frame are enabled to construct a vacuum, the upper chromium plate fixing frame can automatically and properly move towards the lower chromium plate fixing frame along with a vacuumizing state.

The scheme is further that the upper chromium plate fixing frame and the lower chromium plate fixing frame are constructed to be vacuum and are realized based on upper glass, lower glass and sealing rubber strips, the upper glass is arranged on the upper chromium plate fixing frame, and the lower glass and the sealing rubber strips are arranged on the lower chromium plate fixing frame; the upper glass and the lower glass are arranged in parallel, the flexible substrate to be exposed is positioned between the upper glass and the lower glass, and exposure is carried out in a vacuum state; the sealing rubber strips are distributed on the periphery of the lower glass, the upper side faces of the sealing rubber strips are higher than the upper side faces of the lower glass, and the sealing rubber strips prop the upper chromium plate fixing frame and assist the upper chromium plate fixing frame to move towards the lower chromium plate fixing frame along with the vacuumizing state in a self-adaptive mode.

The technical scheme is that the upper chromium plate fixing frame is rectangular, four corners of the upper chromium plate fixing frame are correspondingly connected with floating blocks respectively, one of the four floating blocks is directly and fixedly connected with the upper chromium plate fixing frame, the other three floating blocks are connected with the upper chromium plate fixing frame through adjusting blocks, and the adjusting blocks can adjust displacement at least along one axial direction in a space rectangular coordinate system.

The sliding block is driven by the motor lead screw mechanism, and the sliding block moves on the supporting stand column along the Z axis of the space rectangular coordinate system.

The supporting columns are arranged around the periphery of the upper chromium plate fixing frame at intervals, and all the supporting columns are arranged on the same bottom plate.

According to the invention, through the connection between the upper chromium plate fixing frame and the supporting upright post through the sliding block and the floating block, the upper chromium plate fixing frame is enabled to obtain the opening and closing work of moving up and down, and the upper chromium plate fixing frame is also provided to move to the lower chromium plate fixing frame along with the vacuumizing state in a self-adaptive manner, so that the upper chromium plate fixing frame and the lower chromium plate fixing frame are vacuumized, the flexible circuit board to be exposed is clamped between the upper chromium plate fixing frame and the lower chromium plate fixing frame, the flexible circuit board is enabled to be in a vacuum adsorption state when being stably sleeved and aligned with the upper chromium plate and the lower chromium plate, the circuit board in the exposure process can be ensured not to deform and deviate even being subjected to vibration under the adsorption of a vacuum environment, the accurate alignment state is continuously maintained, the exposure production efficiency and quality are improved, and the processing precision is higher. Simple structure, low investment cost and industrial utilization.

Description of the drawings:

FIG. 1 is a schematic structural diagram of a conventional exposure stage;

FIG. 2 is a partial schematic view of the present invention;

FIG. 3 is a schematic top view of the embodiment of FIG. 2;

FIG. 4 is a schematic view showing the combination of the upper and lower chromium plate fixing frames of the present invention.

The specific implementation mode is as follows:

the conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.

It should be noted that in the description of the present invention, the terms of direction or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

Referring to fig. 2, 3 and 4, which are schematic views of a preferred embodiment of the present invention, the present invention relates to a supporting device for an exposure platform, which comprises an upper chromium plate fixing frame 1, a lower chromium plate fixing frame 2, and a supporting column 3 for supporting the upper chromium plate fixing frame 1, wherein the upper chromium plate fixing frame 1 is correspondingly assembled with an upper chromium plate, and the lower chromium plate fixing frame 2 is correspondingly assembled with a lower chromium plate, so as to be used for exposure operation. The upper chromium plate fixing frame 1 is guided on the supporting upright post 3 through the sliding block 4 to realize the Z-axis movement along a space rectangular coordinate system, and the sliding block 4 is connected with the upper chromium plate fixing frame 1 through the floating block 5. The slider 5 and the slider 4 have a relative movement amount within a certain range in the Z-axis direction of a rectangular space coordinate system, so that when the upper chromium plate fixing frame 1 and the lower chromium plate fixing frame 2 construct a vacuum, the upper chromium plate fixing frame 1 can move to the lower chromium plate fixing frame 2 along with the self-adaption of a vacuumizing state. In this embodiment, slider 5 and slider 4 remove in the ascending certain limit of Z axle side of space rectangular coordinate system, can be through modes such as spout spacing or lug screens, and it is not limited here, as long as satisfy slider 4 and drive the fixed frame of chromium board 1 motion, can also give the fixed frame of chromium board 1 and follow the self-adaptation of evacuation state and remove to the fixed frame of chromium board 2 directions simultaneously. The upper chromium plate fixing frame 1 and the lower chromium plate fixing frame 2 are used for building vacuum based on upper glass 11, lower glass 21 and sealing rubber strips 22, wherein the upper glass 11 is arranged on the upper chromium plate fixing frame 1, and the lower glass 21 and the sealing rubber strips 22 are arranged on the lower chromium plate fixing frame 2; the upper glass 11 and the lower glass 21 are arranged in parallel with each other, and a wiring board to be exposed is positioned between the upper glass 11 and the lower glass 21 and exposed in a vacuum state. The sealing rubber strips 22 are distributed on the periphery of the lower glass 21, the upper side faces of the sealing rubber strips 22 are higher than the upper side faces of the lower glass 21, and the sealing rubber strips 22 prop the upper chromium plate fixing frame 1 and assist the upper chromium plate fixing frame 1 to automatically and adaptively move towards the lower chromium plate fixing frame 2 along with the vacuumizing state. When vacuumizing, a sealed cavity formed by the upper chromium plate fixing frame 1, the lower chromium plate fixing frame 2, the upper glass 11 and the lower glass 21 reaches a vacuum attachment environment; the circuit board that treats the exposure inlays to be established between last glass 11 and lower glass 21, after accomplishing and last chromium board and lower chromium board counterpoint, make the circuit board that treats the exposure be attached between last glass 11 and lower glass 21 through vacuum adhesion power, then expose from top to bottom under the counterpoint state, because the circuit board that the exposure process is treated the exposure keeps being the stable counterpoint of vacuum adhesion state, even meet vibrations and can not take place deformation and skew yet, continue to keep accurate counterpoint state, promote exposure production efficiency and quality and machining precision. In this embodiment, the upper and lower chrome plate fixing frames 1 and 2 are adjusted in directions X, Y and θ by corresponding UVW adjusting mechanisms, so as to perform alignment adjustment operation under the control of the CCD alignment mechanism, specifically: and the CCD alignment mechanism is adjusted to align the target of the upper glass 11, and then the UVW alignment system of the lower glass 21 is driven to sleeve the target of the lower glass 21 and the target of the upper glass 11, so that the upper and lower glass sleeve alignment is completed. And adjusting the CCD alignment mechanism to align the target of the circuit board, and then driving the UVW alignment system of the upper glass 11 to be in registration with the target of the circuit board to complete registration alignment of the circuit board and the two chrome plates. The specific adjusting mechanism is the prior art and is not described in detail herein.

As shown in fig. 2, 3 and 4, in the embodiment, the upper chromium plate fixing frame 1 is square, four corners of the upper chromium plate fixing frame 1 are respectively and correspondingly connected with the floating blocks 5, one of the four floating blocks 5 is directly and fixedly connected with the upper chromium plate fixing frame 1, the other three floating blocks 5 are connected with the upper chromium plate fixing frame 1 through the adjusting blocks 6, and the adjusting blocks 6 can be adjusted and displaced at least along one axial direction in a space rectangular coordinate system, so that the four corners of the upper chromium plate fixing frame 1 can be adjusted to be installed, and the installation adjustment of the upper chromium plate fixing frame 1 is achieved. The supporting columns 3 are arranged at intervals around the periphery of the upper chromium plate fixing frame 1, and all the supporting columns 3 are installed on the same bottom plate 8. The bottom plate 8 is driven by the UVW adjusting mechanism to integrally adjust the upper chromium plate fixing frame 1 so as to facilitate the alignment between the upper chromium plate and the lower chromium plate as well as between the upper chromium plate and the circuit board. Sliding block 4 pass through the drive of motor lead screw mechanism 7, realize sliding block 4 and remove along the Z axle of space rectangular coordinate system on support post 3, this simple structure, convenient equipment, and move steadily, accurate.

When the device works, after the circuit board is aligned with the upper chromium plate and the lower chromium plate in a sleeved mode, the motor screw rod mechanism 7 drives the sliding block 4 to move, the upper chromium plate fixing frame 1 is enabled to lean against the lower chromium plate fixing frame 2, when the upper chromium plate fixing frame 1 is in contact with the sealing rubber strip 22, the sliding block 4 continues to move, the sealing rubber strip 22 supports the upper chromium plate fixing frame 1, at the moment, the upper chromium plate fixing frame 1 is matched with the sliding block 4 in a moving mode through the floating block 5, the upper chromium plate fixing frame 1 stops on the sealing rubber strip 22, the distance of the floating block 5 moving relative to the sliding block 4 provides a space for the upper chromium plate fixing frame 1 to move in the direction of the lower chromium plate fixing frame 2 in a self-adaptive mode along with a vacuumizing state, the vacuumizing requirement is met, the vacuum degree is guaranteed, the circuit board line is beneficial to be kept positioned with the upper chromium plate and the lower chromium plate through the vacuum adsorption force after alignment is completed, and the exposure quality is improved.

According to the invention, through the connection between the upper chromium plate fixing frame and the supporting upright post through the sliding block and the floating block, the upper chromium plate fixing frame is enabled to obtain the opening and closing work of moving up and down, and the upper chromium plate fixing frame is also provided to move to the lower chromium plate fixing frame along with the vacuumizing state in a self-adaptive manner, so that the upper chromium plate fixing frame and the lower chromium plate fixing frame are vacuumized, the flexible circuit board to be exposed is clamped between the upper chromium plate fixing frame and the lower chromium plate fixing frame, the flexible circuit board is enabled to be in a vacuum adsorption state when being stably sleeved and aligned with the upper chromium plate and the lower chromium plate, the circuit board in the exposure process can be ensured not to deform and deviate even being subjected to vibration under the adsorption of a vacuum environment, the accurate alignment state is continuously maintained, the exposure production efficiency and quality are improved, and the processing precision is higher. Simple structure, low investment cost and industrial utilization.

While the preferred embodiments of the invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.