Substrate frame structure and vacuum evaporation device
阅读说明:本技术 一种基片架结构及真空蒸镀装置 (Substrate frame structure and vacuum evaporation device ) 是由 黄稳 张敬娣 梁舰 宋祥慧 陈敏 顾婉莹 武启飞 冯敏强 廖良生 于 2020-07-20 设计创作,主要内容包括:本发明涉及真空蒸镀技术领域,公开一种基片架结构及真空蒸镀装置。其中基片架结构包括设置有冷却水缓冲区的基片架以及与冷却水缓冲区连通的水管和第一水口,还包括由靠近至远离基片架的方向依次套设于水管上的第一磁流体和第二磁流体;第一磁流体包括第一内管和第一外管,第二磁流体包括第二内管和第二外管,第一内管与基片架和第二外管连接,且第一内管能够沿进水管的轴线转动;第二内管的内壁与水管的外壁围成水通路,水通路一端与冷却水缓冲区连通,另一端与第一水口连通。本发明通过增设第二磁流体,一方面增加了密封效果,另一方面解决了密封圈在旋转时被磨损的问题,减少了基片架结构的维修次数,节约维修成本,增加了使用寿命。(The invention relates to the technical field of vacuum evaporation, and discloses a substrate frame structure and a vacuum evaporation device. The substrate frame structure comprises a substrate frame provided with a cooling water buffer area, a water pipe and a first water gap which are communicated with the cooling water buffer area, and a first magnetic fluid and a second magnetic fluid which are sequentially sleeved on the water pipe from the direction close to the substrate frame to the direction far away from the substrate frame; the first magnetic fluid comprises a first inner tube and a first outer tube, the second magnetic fluid comprises a second inner tube and a second outer tube, the first inner tube is connected with the substrate frame and the second outer tube, and the first inner tube can rotate along the axis of the water inlet tube; the inner wall of the second inner pipe and the outer wall of the water pipe form a water passage in a surrounding mode, one end of the water passage is communicated with the cooling water buffer area, and the other end of the water passage is communicated with the first water port. According to the invention, the second magnetic fluid is additionally arranged, so that the sealing effect is improved, the problem that the sealing ring is abraded during rotation is solved, the maintenance times of the substrate frame structure are reduced, the maintenance cost is saved, and the service life is prolonged.)
1. A substrate frame structure comprises a substrate frame (1) provided with a cooling water buffer area (11), and a water pipe (21) and a first water gap (22) which are communicated with the cooling water buffer area (11), wherein cooling water can flow through the water pipe (21), the cooling water buffer area (11) and the first water gap (22) in sequence or flow through the first water gap (22), the cooling water buffer area (11) and the water pipe (21) in sequence to cool the substrate frame (1), and is characterized in that,
the magnetic field generator further comprises a first magnetic fluid (3) and a second magnetic fluid (4) which are sequentially sleeved on the water pipe (21) from the direction close to the substrate frame (1) to the direction far away from the substrate frame;
the first magnetic fluid (3) comprises a first inner tube (31) and a first outer tube (32) which are mutually rotatably connected, the second magnetic fluid (4) comprises a second inner tube (41) and a second outer tube (42) which are mutually rotatably connected, the first inner tube (31) is connected with the substrate frame (1) and the second outer tube (42), and the first inner tube (31) can rotate along the axis of the water tube (21);
the inner wall of the second inner pipe (41) and the outer wall of the water pipe (21) enclose a water passage (23), one end of the water passage (23) is communicated with the cooling water buffer area (11), and the other end of the water passage is communicated with the first water gap (22).
2. The substrate holder structure according to claim 1, further comprising a cooling water jacket (24), wherein the cooling water jacket (24) is connected with the second inner tube (41), the first water gap (22) is arranged on the cooling water jacket (24), and a second water gap (25) is further arranged on the cooling water jacket (24), and the second water gap (25) is communicated with the water tube (21).
3. The substrate holder structure according to claim 1, further comprising a driving assembly (5) having an output end provided with a first pulley (51), and an outer circumference of the first inner tube (31) is provided with a second pulley (33) connected to the first pulley (51).
4. Substrate holder structure according to claim 3, wherein the drive assembly (5) comprises a drive motor (52) and a speed reducer (53) connected to an output of the drive motor (52), the first pulley (51) being arranged at an output of the speed reducer (53).
5. The substrate holder structure according to claim 1, wherein the substrate holder (1) comprises an upper cooling plate (12) and a lower cooling plate (13) fastened to each other, and the cooling water buffer zone (11) is enclosed between the upper cooling plate (12) and the lower cooling plate (13).
6. The substrate holder structure according to claim 5, wherein a sealing ring groove (131) is provided on the cooling upper plate (12) or the cooling lower plate (13) to seal the cooling water buffer zone (11).
7. Substrate holder structure according to claim 5, characterized in that the substrate holder (1) further comprises:
the upper substrate tray (15) is arranged at one end, far away from the lower cooling plate (13), of the upper cooling plate (12), and a first substrate seat is arranged on the upper substrate tray (15);
the lower substrate tray (16) is arranged at one end, far away from the upper cooling plate (12), of the lower cooling plate (13), the lower substrate tray (16) is connected with the lower cooling plate (13), a second substrate seat is arranged on the lower substrate tray (16), and the area of the second substrate seat is larger than that of the first substrate seat.
8. The substrate holder structure according to claim 7, further comprising a lifting assembly (6), wherein the lifting assembly (6) is connected to the upper substrate tray (15) to lift the upper substrate tray (15) to detach the upper substrate tray (15) from the cooling upper plate (12) or to lower the upper substrate tray (15) to connect the upper substrate tray (15) to the cooling upper plate (12).
9. A substrate frame structure comprises a substrate frame (1) provided with a cooling water buffer area (11), and a water pipe (21) and a first water port (22) which are communicated with the cooling water buffer area (11), wherein cooling water can sequentially flow through the water pipe (21), the cooling water buffer area (11) and the first water port (22) or sequentially flow through the first water port (22), the cooling water buffer area (11) and the water pipe (21) to cool the substrate frame (1), the substrate frame structure is characterized in that the first water port (22) is communicated with a water channel (23), the water pipe (21) and the water channel (23) are mutually sleeved, the substrate frame structure further comprises a flow distribution plate (14), the flow distribution plate (14) is arranged in the cooling water buffer area (11), a through hole (141) is arranged on the flow distribution plate (14), and the water pipe (21) is arranged in the through hole (141), cooling water can be circulated between the water pipe (21) and the water passage (23).
10. A vacuum evaporation apparatus comprising the substrate holder according to any one of claims 1 to 9.
Technical Field
The invention relates to the technical field of vacuum evaporation, in particular to a substrate frame structure and a vacuum evaporation device.
Background
In the current vacuum evaporation device, the uniformity of film formation of the substrate is of great importance, and in order to meet the requirement, the evaporated substrate needs to rotate at a constant speed in a limited space so as to ensure that evaporated molecules can be smoothly adsorbed on the substrate. Meanwhile, in order to prevent the organic layer evaporated on the substrate from being damaged by high temperature in metal evaporation, the substrate needs to be cooled to a certain extent, so that the performance of the prepared device is not damaged.
At present, in order to meet the requirements of rotation and cooling of a substrate, a rotating shaft is additionally provided with a sealing ring for sealing, when the structure rotates, the sealing ring is always in a wear state, and in the past, the sealing ring is damaged, and the sealing performance is directly influenced. The whole device is required to be dismantled when the sealing ring is replaced, and the working efficiency is greatly reduced.
Therefore, a substrate frame structure is needed to solve the above problems.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a substrate holder structure and a vacuum evaporation apparatus, which can cool a substrate holder and have a good sealing effect and a long service life.
In order to achieve the purpose, the invention adopts the following technical scheme:
A substrate frame structure comprises a substrate frame provided with a cooling water buffer area, and a water pipe and a first water gap which are communicated with the cooling water buffer area, wherein cooling water can sequentially flow through the water pipe, the cooling water buffer area and the first water gap or sequentially flow through the first water gap, the cooling water buffer area and the water pipe to cool the substrate frame,
the first magnetic fluid and the second magnetic fluid are sequentially sleeved on the water pipe from the direction close to the substrate frame to the direction far away from the substrate frame;
the first magnetic fluid comprises a first inner tube and a first outer tube which are mutually and rotatably connected, the second magnetic fluid comprises a second inner tube and a second outer tube which are mutually and rotatably connected, the first inner tube is connected with the substrate frame and the second outer tube, and the first inner tube can rotate along the axis of the water tube;
and a water passage is enclosed by the inner wall of the second inner pipe and the outer wall of the water pipe, one end of the water passage is communicated with the cooling water buffer area, and the other end of the water passage is communicated with the first water gap.
As a preferred scheme of a substrate frame structure, the substrate frame structure further comprises a cooling water jacket, the cooling water jacket is connected with the second inner pipe, the first water gap is arranged on the cooling water jacket, the cooling water jacket is further provided with a second water gap, and the second water gap is communicated with the water pipe.
As a preferred scheme of a substrate frame structure, the substrate frame structure further comprises a driving assembly, wherein a first belt wheel is arranged at the output end of the driving assembly, and a second belt wheel connected with the first belt wheel is arranged on the periphery of the first inner pipe.
As a preferable scheme of the substrate frame structure, the driving assembly includes a driving motor and a speed reducer connected to an output end of the driving motor, and the first pulley is disposed at an output end of the speed reducer.
As a preferable scheme of the substrate frame structure, the substrate frame comprises an upper cooling plate and a lower cooling plate which are buckled with each other, and a cooling water buffer zone is enclosed between the upper cooling plate and the lower cooling plate.
As a preferable embodiment of the substrate holder structure, a sealing ring groove is provided on the cooling upper plate or the cooling lower plate to seal the cooling water buffer region.
As a preferred scheme of a substrate frame structure, the cooling water buffer area is provided with a flow distribution plate, and the water pipe is arranged on the flow distribution plate in a penetrating mode.
As a preferable aspect of a substrate holder structure, the substrate holder further includes:
the upper substrate tray is arranged at one end, far away from the cooling lower plate, of the cooling upper plate, and a first substrate seat is arranged on the upper substrate tray;
The lower substrate tray is arranged at one end, far away from the upper cooling plate, of the lower cooling plate, the lower substrate tray is connected with the lower cooling plate, a second substrate seat is arranged on the lower substrate tray, and the area of the second substrate seat is larger than that of the first substrate seat.
As a preferable scheme of the substrate holder structure, the substrate holder structure further includes a lifting assembly, and the lifting assembly is connected to the upper substrate tray to lift the upper substrate tray to separate the upper substrate tray from the cooling upper plate, or to lower the upper substrate tray to connect the upper substrate tray to the cooling upper plate.
The utility model provides a substrate frame structure, including the substrate frame that is provided with the cooling water buffer and with water pipe and the first mouth of a river of cooling water buffer intercommunication, cooling hydroenergy flows through in proper order the water pipe the cooling water buffer with first mouth of a river or flow through in proper order first mouth of a river the cooling water buffer with the water pipe is right the substrate frame cools off, first mouth of a river and water passageway intercommunication, the water pipe with the mutual cover of water passageway is established, substrate frame structure still includes the flow distribution plate, the flow distribution plate sets up in the cooling water buffer, be provided with the through-hole on the flow distribution plate, the water pipe is worn to locate in the through-hole, cooling water can be in the water pipe with circulate between the water passageway.
A vacuum evaporation device comprises the substrate frame structure in any scheme.
The invention has the beneficial effects that: the cooling water buffer area is used for cooling the substrate on the substrate frame so as to keep the substrate on the substrate frame at a proper temperature; through addding the second magnetic current body to be connected the second outer tube of second magnetic current body and the first inner tube of first magnetic current body, when the second outer tube with first inner tube along the circumferential direction of water pipe, play good sealed effect, simultaneously, the sealing washer among the prior art is replaced to the second magnetic current body, has increased sealed effect on the one hand, and on the other hand has solved the problem that the sealing washer is worn and torn when rotatory, has reduced the maintenance number of times of substrate frame structure, practices thrift cost of maintenance, has increased life.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
FIG. 1 is a schematic diagram of a substrate holder configuration provided in accordance with an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a substrate holder configuration provided in accordance with an embodiment of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
fig. 4 is a top view of a diverter plate according to an embodiment of the present invention.
In the figure:
1-a substrate holder; 11-a cooling water buffer zone; 12-cooling the upper plate; 13-cooling the lower plate; 131-a sealing ring groove; 14-a splitter plate; 141-a through hole; 142-a first projection; 143-a second projection; 15-upper substrate tray; 16-a lower substrate tray;
21-a water pipe; 22-a first nozzle; 23-a water pathway; 24-a cooling water jacket; 25-a second nozzle;
3-a first magnetic fluid; 31-a first inner tube; 32-a first outer tube; 33-a second pulley;
4-a second magnetic fluid; 41-a second inner tube; 42-a second outer tube;
5-a drive assembly; 51-a first pulley; 52-a drive motor; 53-a reducer;
6-lifting the assembly.
Detailed Description
In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1 to 3, the present embodiment provides a substrate holder structure for a vacuum evaporation apparatus, the substrate holder structure includes a substrate holder 1 provided with a cooling
The cooling
The substrate frame structure further comprises a
Further, the substrate holder 1 further comprises a driving assembly 5, the output end of the driving assembly 5 is provided with a
Specifically, the driving assembly 5 includes a
In this embodiment, in order to achieve sufficient cooling of the substrate holder 1 by the
In order to seal the cooling
Further, the substrate holder 1 further comprises an
Preferably, to accommodate a scenario where the substrate holder configuration cools only substrates on the
As shown in fig. 2 to 4, the substrate frame structure provided in this embodiment further includes a
The arrangement of the
It should be noted that the
Further, as shown in fig. 4, one surface of the
Optionally, the
Preferably, the heights of the
Further preferably, the dividing
In this embodiment, the
Optionally, the
Illustratively, four
Preferably, in order to facilitate the circulation of cooling water, water holes may be further formed on the
Further, the water through holes may be provided in a circular shape or an arched shape. Further preferably, the arched water through holes are communicated with the
Optionally, the upstream surface of the
Optionally, the end of the
The embodiment also discloses a vacuum evaporation device which comprises the substrate frame structure in any scheme.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
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