A spheroid part coating film anchor clamps for physical vapor deposition
阅读说明:本技术 一种用于物理气相沉积的球体零件镀膜夹具 (A spheroid part coating film anchor clamps for physical vapor deposition ) 是由 陈火根 于 2020-07-22 设计创作,主要内容包括:本发明公开了一种用于物理气相沉积的球体零件镀膜夹具,包括分别固定在转炉杆上的上夹具和下夹具,所述上夹具包括套设在转炉杆上的基盘,所述基盘上设置有若干转盘轴承,所述转盘轴承内设置有上支架;所述下夹具包括依次套设在转炉杆上的底盘、中盘和上盘,所述上盘固定在所述转炉杆上,所述上盘设置有与所述转盘轴承位置对应的转动柱,所述转动柱上设置有与所述上支架位置对应的下支架,所述底盘固定在上盘上,所述中盘夹在底盘和上盘之间,所述中盘能够相对于底盘和上盘转动,所述中盘的一侧设置有突出部,所述突出部上设置有拨片,所述拨片能够拨动所述转动柱转动。本发明的球体零件镀膜夹具,实现对球体零件的夹持和旋转喷涂。(The invention discloses a ball part coating fixture for physical vapor deposition, which comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, wherein the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate. The coating clamp for the spherical part provided by the invention can be used for clamping and rotationally spraying the spherical part.)
1. A sphere part coating fixture for physical vapor deposition comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, and is characterized in that the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate.
2. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the turntable bearing and the rotation column are circumferentially and uniformly distributed on the base plate and the upper plate, respectively, centering on the shaft of the rotary furnace.
3. The ball part coating jig for physical vapor deposition as set forth in claim 1, wherein the upper plate is provided with a small cylinder protruding therefrom, and the lower end of the rotating cylinder is provided with a cylindrical hole for fitting with the small cylinder of the upper plate, the rotating cylinder being capable of rotating on the small cylinder.
4. The ball coating fixture for physical vapor deposition as claimed in claim 1, wherein the outer circumference of the rotation post is provided with a rotation post groove engaged with the pick.
5. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the upper bracket is separately connected to the turntable bearing, and the lower bracket is separately connected to the rotation post.
6. The ball part coating clamp for physical vapor deposition of claim 5, wherein the upper bracket is inserted into the turntable bearing, and the upper bracket is connected with the turntable bearing in an interference fit manner.
7. The ball part coating jig for physical vapor deposition of claim 5, wherein the lower bracket is screw-coupled to the rotating cylinder.
8. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the end surfaces of the upper holder and the lower holder are each provided with a spherical groove to be matched with the ball part.
9. The ball part coating jig for physical vapor deposition as set forth in claim 1, wherein the furnace bar is provided with a plurality of fixing grooves, and the base plate and the upper plate are each fixed in position by fastening screws screwed into the fixing grooves.
10. The ball part coating clamp for physical vapor deposition as claimed in claim 1, wherein the pick is fixed on the protruding part of the middle plate by a pick column and a pick screw, and the pick column is welded or bolted on the middle plate.
Technical Field
The invention relates to the field of part coating by physical vapor deposition technology, in particular to a spherical part coating clamp for physical vapor deposition.
Background
Physical Vapor Deposition (PVD) is a process in which a metal, an alloy or a compound is evaporated (or sputtered) in a vacuum chamber, and the vapor atoms or molecules are deposited on the surface of a workpiece under certain conditions. Physical vapor deposition can be classified into vacuum evaporation, vacuum sputtering, and ion plating. Compared with CVD, PVD method has the main advantages of lower processing temperature, faster deposition rate, no pollution, etc., thus having high practical value.
With the development of the physical vapor deposition technology, a coating fixture is in a wide range, but no PVD coating fixture for spherical parts exists in the market at present, and the coating effect is poor because the spherical parts are not easy to clamp and fix and the spherical surfaces of the spherical parts are coated from fixed positions.
Disclosure of Invention
The invention aims to provide a coating clamp for a spherical part for physical vapor deposition, which is used for clamping and rotationally spraying the spherical part.
In order to solve the technical problem, the invention provides a ball part coating fixture for physical vapor deposition, which comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, wherein the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate.
In a preferred embodiment of the present invention, the turntable bearing and the rotation column are circumferentially and uniformly distributed on the base plate and the upper plate, respectively, with the furnace rod as the center.
In a preferred embodiment of the present invention, the upper disc further comprises a small cylinder protruding from the upper disc, and the bottom end of the rotating cylinder is provided with a cylindrical hole to match with the small cylinder on the upper disc, and the rotating cylinder can rotate on the small cylinder.
In a preferred embodiment of the present invention, the rotation column further comprises a rotation column groove disposed on the periphery of the rotation column and engaged with the pick.
In a preferred embodiment of the present invention, the upper bracket is connected to the turntable bearing in a split manner, and the lower bracket is connected to the rotation column in a split manner.
In a preferred embodiment of the present invention, the upper bracket is inserted into the turntable bearing, and the upper bracket is connected with the turntable bearing in an interference fit manner.
In a preferred embodiment of the present invention, the lower bracket is connected to the rotary column by a screw.
In a preferred embodiment of the present invention, the upper bracket and the lower bracket are provided with spherical grooves on end surfaces thereof, which are matched with the spherical parts.
In a preferred embodiment of the present invention, the converter rod is further provided with a plurality of fixing grooves, and the base plate and the upper plate are screwed into the fixing grooves through fastening screws to fix the positions of the base plate and the upper plate.
In a preferred embodiment of the present invention, the shift plate is fixed on the protruding part of the middle plate through a shift plate column and a shift plate screw, and the shift plate column is welded or connected on the middle plate through a bolt.
The invention has the beneficial effects that:
the spherical part is clamped and fixed by the upper clamp and the lower clamp, the upper clamp and the lower clamp are sleeved on the converter rod and rotate along with the converter rod, the spherical part between the upper clamp and the lower clamp also rotates by taking the converter rod as an axis, the lower clamp is provided with the middle disc and the shifting piece which do not rotate along with the rotating furnace in the rotating process, and the spherical part can be shifted to rotate by the shifting piece, so that the revolution and the rotation of the spherical part in the coating equipment are realized by the clamp, and the omnibearing spraying of the spherical surface of the spherical part can be realized.
Drawings
FIG. 1 is an assembly diagram of a coating fixture for PVD ball parts according to the invention;
FIG. 2 is a drawing of an upper fixture of a coating fixture for a physical vapor deposition sphere part according to the present invention;
FIG. 3 is an exploded view of a lower fixture of a coating fixture for PVD sphere parts according to the invention;
FIG. 4 is a view of a lower fixture of a coating fixture for PVD sphere parts according to the invention;
FIG. 5 is a top view of a lower fixture of a coating fixture for physical vapor deposition of spherical parts according to the present invention;
FIG. 6 is a view of a lower fixture rotating column of a coating fixture for PVD sphere parts according to the invention;
FIG. 7 is a view of a lower fixture of a coating fixture for PVD sphere parts according to the invention;
FIG. 8 is a diagram of an upper bracket of a coating clamp for a physical vapor deposition ball part according to the present invention;
FIG. 9 is a view of a coating fixture furnace bar for physical vapor deposition of a spherical part according to the present invention.
The reference numbers in the figures illustrate: 1. a converter rod; 11. fixing the groove; 2. an upper clamp; 21. a base plate; 22. a turntable bearing; 23. an upper bracket; 3. a lower clamp; 31. a chassis; 32. a middle disc; 33. hanging the plate; 331. a small cylinder; 34. rotating the column; 341. a rotating post groove; 35. a lower bracket; 36. a shifting sheet; 37. a plectrum column; 38. a plectrum screw; 4. a ball part; 5. a spherical recess; 6. and (5) fastening the screw.
Detailed Description
The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.
Referring to fig. 1 to 4, an embodiment of a ball part coating fixture for physical vapor deposition according to the present invention includes an
Referring to fig. 5, a
Referring to fig. 6, a plurality of rotating
Specifically, when the clamp of this embodiment is placed in a physical deposition spraying apparatus, because the
Referring to fig. 7 and 8, in order to better hold the
Specifically, for
Specifically, the
Referring to fig. 9, a plurality of
Specifically, in the jig of the present embodiment, when the
The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the invention is all within the protection scope of the invention. The protection scope of the invention is subject to the claims.
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