A spheroid part coating film anchor clamps for physical vapor deposition

文档序号:940281 发布日期:2020-10-30 浏览:6次 中文

阅读说明:本技术 一种用于物理气相沉积的球体零件镀膜夹具 (A spheroid part coating film anchor clamps for physical vapor deposition ) 是由 陈火根 于 2020-07-22 设计创作,主要内容包括:本发明公开了一种用于物理气相沉积的球体零件镀膜夹具,包括分别固定在转炉杆上的上夹具和下夹具,所述上夹具包括套设在转炉杆上的基盘,所述基盘上设置有若干转盘轴承,所述转盘轴承内设置有上支架;所述下夹具包括依次套设在转炉杆上的底盘、中盘和上盘,所述上盘固定在所述转炉杆上,所述上盘设置有与所述转盘轴承位置对应的转动柱,所述转动柱上设置有与所述上支架位置对应的下支架,所述底盘固定在上盘上,所述中盘夹在底盘和上盘之间,所述中盘能够相对于底盘和上盘转动,所述中盘的一侧设置有突出部,所述突出部上设置有拨片,所述拨片能够拨动所述转动柱转动。本发明的球体零件镀膜夹具,实现对球体零件的夹持和旋转喷涂。(The invention discloses a ball part coating fixture for physical vapor deposition, which comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, wherein the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate. The coating clamp for the spherical part provided by the invention can be used for clamping and rotationally spraying the spherical part.)

1. A sphere part coating fixture for physical vapor deposition comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, and is characterized in that the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate.

2. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the turntable bearing and the rotation column are circumferentially and uniformly distributed on the base plate and the upper plate, respectively, centering on the shaft of the rotary furnace.

3. The ball part coating jig for physical vapor deposition as set forth in claim 1, wherein the upper plate is provided with a small cylinder protruding therefrom, and the lower end of the rotating cylinder is provided with a cylindrical hole for fitting with the small cylinder of the upper plate, the rotating cylinder being capable of rotating on the small cylinder.

4. The ball coating fixture for physical vapor deposition as claimed in claim 1, wherein the outer circumference of the rotation post is provided with a rotation post groove engaged with the pick.

5. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the upper bracket is separately connected to the turntable bearing, and the lower bracket is separately connected to the rotation post.

6. The ball part coating clamp for physical vapor deposition of claim 5, wherein the upper bracket is inserted into the turntable bearing, and the upper bracket is connected with the turntable bearing in an interference fit manner.

7. The ball part coating jig for physical vapor deposition of claim 5, wherein the lower bracket is screw-coupled to the rotating cylinder.

8. The ball part coating jig for physical vapor deposition as claimed in claim 1, wherein the end surfaces of the upper holder and the lower holder are each provided with a spherical groove to be matched with the ball part.

9. The ball part coating jig for physical vapor deposition as set forth in claim 1, wherein the furnace bar is provided with a plurality of fixing grooves, and the base plate and the upper plate are each fixed in position by fastening screws screwed into the fixing grooves.

10. The ball part coating clamp for physical vapor deposition as claimed in claim 1, wherein the pick is fixed on the protruding part of the middle plate by a pick column and a pick screw, and the pick column is welded or bolted on the middle plate.

Technical Field

The invention relates to the field of part coating by physical vapor deposition technology, in particular to a spherical part coating clamp for physical vapor deposition.

Background

Physical Vapor Deposition (PVD) is a process in which a metal, an alloy or a compound is evaporated (or sputtered) in a vacuum chamber, and the vapor atoms or molecules are deposited on the surface of a workpiece under certain conditions. Physical vapor deposition can be classified into vacuum evaporation, vacuum sputtering, and ion plating. Compared with CVD, PVD method has the main advantages of lower processing temperature, faster deposition rate, no pollution, etc., thus having high practical value.

With the development of the physical vapor deposition technology, a coating fixture is in a wide range, but no PVD coating fixture for spherical parts exists in the market at present, and the coating effect is poor because the spherical parts are not easy to clamp and fix and the spherical surfaces of the spherical parts are coated from fixed positions.

Disclosure of Invention

The invention aims to provide a coating clamp for a spherical part for physical vapor deposition, which is used for clamping and rotationally spraying the spherical part.

In order to solve the technical problem, the invention provides a ball part coating fixture for physical vapor deposition, which comprises an upper fixture and a lower fixture which are respectively fixed on a converter rod, wherein the upper fixture comprises a base plate sleeved on the converter rod, a plurality of turntable bearings are arranged on the base plate, and an upper support is arranged in each turntable bearing; the lower fixture comprises a base plate, a middle plate and an upper plate, wherein the base plate, the middle plate and the upper plate are sequentially sleeved on a converter rod, the upper plate is fixed on the converter rod, the upper plate is provided with a rotating column corresponding to a bearing position of the rotating plate, a lower support corresponding to a position of the upper support is arranged on the rotating column, the base plate is fixed on the upper plate, the middle plate is clamped between the base plate and the upper plate, the middle plate can rotate relative to the base plate and the upper plate, one side of the middle plate is provided with a protruding portion, a shifting sheet is arranged on the protruding portion, and the shifting sheet can shift the rotating column to rotate.

In a preferred embodiment of the present invention, the turntable bearing and the rotation column are circumferentially and uniformly distributed on the base plate and the upper plate, respectively, with the furnace rod as the center.

In a preferred embodiment of the present invention, the upper disc further comprises a small cylinder protruding from the upper disc, and the bottom end of the rotating cylinder is provided with a cylindrical hole to match with the small cylinder on the upper disc, and the rotating cylinder can rotate on the small cylinder.

In a preferred embodiment of the present invention, the rotation column further comprises a rotation column groove disposed on the periphery of the rotation column and engaged with the pick.

In a preferred embodiment of the present invention, the upper bracket is connected to the turntable bearing in a split manner, and the lower bracket is connected to the rotation column in a split manner.

In a preferred embodiment of the present invention, the upper bracket is inserted into the turntable bearing, and the upper bracket is connected with the turntable bearing in an interference fit manner.

In a preferred embodiment of the present invention, the lower bracket is connected to the rotary column by a screw.

In a preferred embodiment of the present invention, the upper bracket and the lower bracket are provided with spherical grooves on end surfaces thereof, which are matched with the spherical parts.

In a preferred embodiment of the present invention, the converter rod is further provided with a plurality of fixing grooves, and the base plate and the upper plate are screwed into the fixing grooves through fastening screws to fix the positions of the base plate and the upper plate.

In a preferred embodiment of the present invention, the shift plate is fixed on the protruding part of the middle plate through a shift plate column and a shift plate screw, and the shift plate column is welded or connected on the middle plate through a bolt.

The invention has the beneficial effects that:

the spherical part is clamped and fixed by the upper clamp and the lower clamp, the upper clamp and the lower clamp are sleeved on the converter rod and rotate along with the converter rod, the spherical part between the upper clamp and the lower clamp also rotates by taking the converter rod as an axis, the lower clamp is provided with the middle disc and the shifting piece which do not rotate along with the rotating furnace in the rotating process, and the spherical part can be shifted to rotate by the shifting piece, so that the revolution and the rotation of the spherical part in the coating equipment are realized by the clamp, and the omnibearing spraying of the spherical surface of the spherical part can be realized.

Drawings

FIG. 1 is an assembly diagram of a coating fixture for PVD ball parts according to the invention;

FIG. 2 is a drawing of an upper fixture of a coating fixture for a physical vapor deposition sphere part according to the present invention;

FIG. 3 is an exploded view of a lower fixture of a coating fixture for PVD sphere parts according to the invention;

FIG. 4 is a view of a lower fixture of a coating fixture for PVD sphere parts according to the invention;

FIG. 5 is a top view of a lower fixture of a coating fixture for physical vapor deposition of spherical parts according to the present invention;

FIG. 6 is a view of a lower fixture rotating column of a coating fixture for PVD sphere parts according to the invention;

FIG. 7 is a view of a lower fixture of a coating fixture for PVD sphere parts according to the invention;

FIG. 8 is a diagram of an upper bracket of a coating clamp for a physical vapor deposition ball part according to the present invention;

FIG. 9 is a view of a coating fixture furnace bar for physical vapor deposition of a spherical part according to the present invention.

The reference numbers in the figures illustrate: 1. a converter rod; 11. fixing the groove; 2. an upper clamp; 21. a base plate; 22. a turntable bearing; 23. an upper bracket; 3. a lower clamp; 31. a chassis; 32. a middle disc; 33. hanging the plate; 331. a small cylinder; 34. rotating the column; 341. a rotating post groove; 35. a lower bracket; 36. a shifting sheet; 37. a plectrum column; 38. a plectrum screw; 4. a ball part; 5. a spherical recess; 6. and (5) fastening the screw.

Detailed Description

The present invention is further described below in conjunction with the following figures and specific examples so that those skilled in the art may better understand the present invention and practice it, but the examples are not intended to limit the present invention.

Referring to fig. 1 to 4, an embodiment of a ball part coating fixture for physical vapor deposition according to the present invention includes an upper fixture 2 and a lower fixture 3 respectively fixed on a converter rod 1, where the upper fixture 2 and the lower fixture 3 are used to clamp and fix a ball part 4, the upper fixture 2 includes a base plate 21 sleeved on the converter rod 1, the base plate 21 is provided with a plurality of turntable bearings 22, and an upper support 23 is disposed in the turntable bearings 22; the lower clamp 3 comprises a bottom plate 31, a middle plate 32 and an upper plate 33 which are sequentially sleeved on the converter rod 1, the upper plate 33 is fixed on the converter rod 1, the upper plate 33 is provided with a rotating column 34 corresponding to the position of the turntable bearing 22, the rotating column 34 is provided with a lower support 35 corresponding to the position of the upper support 23, the turntable bearing 22 and the rotating column 34 are respectively and circumferentially and uniformly distributed on the base plate 21 and the upper plate 33 by taking the converter rod 1 as the center, a sphere part 4 is clamped between each upper support 23 and each lower support 35, the bottom plate 31 is fixed on the upper plate 33 through a connecting screw, the middle plate 32 is clamped between the bottom plate 31 and the upper plate 33, the middle plate 32 can rotate relative to the bottom plate 31 and the upper plate 33, one side of the middle plate 32 is provided with a protruding part, the protruding part is provided with a shifting sheet 36, the shifting sheet 36 is fixed on the protruding part of the middle plate 32 through a shifting sheet upright 37 and a shifting sheet screw 38, the shifting piece upright column 37 is welded or connected to the middle disc 32 through a bolt, and the shifting piece 36 can shift the rotating column 34 to rotate.

Referring to fig. 5, a small cylinder 331 protrudes from the upper plate 33, a cylindrical hole is formed at the bottom end of the rotary column 34 to be matched with the small cylinder 331 on the upper plate 33, and the rotary column 34 can rotate on the small cylinder 331.

Referring to fig. 6, a plurality of rotating cylinder recesses 341 are formed in the outer circumference of the rotating cylinder 34 and are engaged with the dials 36, and the dials 36 are sequentially inserted into the rotating cylinder recesses 341, so that the rotating cylinder 34 is rotated.

Specifically, when the clamp of this embodiment is placed in a physical deposition spraying apparatus, because the upper clamp 2 and the lower clamp 3 are both sleeved on the converter rod 1, the upper clamp 2 and the lower clamp 3 are driven by the converter rod 1 to rotate, the middle disc 32 is movably disposed between the bottom disc 31 and the upper disc 33, the middle disc 32 can rotate relative to the bottom disc 31 and the upper disc 33, a stop lever is disposed on a rotation track of a protruding portion of the middle disc 32 to limit the rotation of the middle disc 32, so that in the rotation process of the converter rod 1, the middle disc 32 stops rotating, the dial 36 on the middle disc 32 also stops moving, the upper disc 33 and the bottom disc 31 rotate relative to the middle disc 32, the upper disc 33 rotates to drive the rotation column 34 to move, and when the rotation column groove 341 moves to contact with the dial 36, the dial 36 dials 34 will dial to rotate.

Referring to fig. 7 and 8, in order to better hold the ball element 4, the end surfaces of the upper bracket 23 and the lower bracket 35 are provided with spherical grooves 5 matched with the ball element 4, the ball element 4 is further fixed by the spherical grooves 5, and the spherical grooves 5 with different sizes can be arranged according to the size of the ball element 4.

Specifically, for spherical parts 4 with different sizes, an upper bracket 23 and a lower bracket 35 with different sizes need to be adopted, and in order to facilitate replacement of the upper bracket 23 and the lower bracket 35, in this embodiment, the upper bracket 23 is separately connected with the turntable bearing 22, and the lower bracket 35 is separately connected with the rotating column 34.

Specifically, the upper bracket 23 is inserted into the turntable bearing 22, and the upper bracket 23 is connected with the turntable bearing 22 in an interference fit manner; the lower bracket 35 and the rotary column 34 are connected through threads, in a specific implementation process, the upper bracket 23 and the turntable bearing 22 can also be connected through threads, and the lower bracket 35 and the rotary column 34 can also be connected in an interference fit manner.

Referring to fig. 9, a plurality of fixing grooves 11 are formed in the converter rod 1, the base plate 21 and the upper plate 33 are screwed into the fixing grooves 11 through the fastening screws 6 to fix the positions of the base plate 21 and the upper plate 33, and then, in the process of clamping the sphere part 4, the lower clamp 3 is fixed on the converter rod 1 through the fastening screws 6, the sphere part 4 is placed between the upper clamp 2 and the lower clamp 3, the upper clamp 2 is moved down as much as possible to clamp the sphere part 4 between the upper clamp 2 and the lower clamp 3, and finally, the upper clamp 2 is fixed on the converter rod 1 through the fastening screws 4.

Specifically, in the jig of the present embodiment, when the spherical part 4 is coated, the spherical part 4 needs to be clamped, and no coating is applied to the position clamped by the upper bracket 23 and the lower bracket 35, so that a secondary coating is needed, and the clamping position of the upper bracket 23 and the lower bracket 35 is set at the coated position, so that the spherical part 4 which is not coated in the primary coating is partially coated, that is, the spherical surface of the spherical part 4 is completely coated.

The above-mentioned embodiments are merely preferred embodiments for fully illustrating the present invention, and the scope of the present invention is not limited thereto. The equivalent substitution or change made by the technical personnel in the technical field on the basis of the invention is all within the protection scope of the invention. The protection scope of the invention is subject to the claims.

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