阅读说明：本技术 一种喷淋式冷却溅射阴极磁棒装置 (Spray type cooling sputtering cathode magnetic bar device ) 是由 靳伟 曹永军 陈建飞 于 2020-08-28 设计创作，主要内容包括：本发明涉及薄膜制备技术领域,尤其是一种喷淋式冷却溅射阴极磁棒装置,包括靶管、磁铁以及冷却液管路,其中所述磁铁置于所述靶管的内部,所述冷却液管路具有冷却液进口、冷却液出口以及冷却液喷淋口,所述冷却液进口与所述冷却液出口相连通,所述冷却液喷淋口开设在所述冷却液管路上且朝向所述靶管以构成喷淋式冷却。本发明的优点是：1)可以在各种角度工作的溅射阴极内部使用,避免因为靶管内部存在气泡或者未充满冷却液造成靶材开裂；2)磁棒的局部磁场强度可以通过外部的磁铁背部连杆方便调节；3)磁棒的磁铁与冷却液完全隔离,避免冷却液对磁铁的不良影响,保证磁棒的使用性能。(The invention relates to the technical field of film preparation, in particular to a spray-type cooling sputtering cathode magnetic rod device which comprises a target tube, a magnet and a cooling liquid pipeline, wherein the magnet is arranged inside the target tube, the cooling liquid pipeline is provided with a cooling liquid inlet, a cooling liquid outlet and a cooling liquid spray port, the cooling liquid inlet is communicated with the cooling liquid outlet, and the cooling liquid spray port is arranged on the cooling liquid pipeline and faces the target tube to form spray-type cooling. The invention has the advantages that: 1) the sputtering target can be used in sputtering cathodes working at various angles, and target cracking caused by bubbles in the target tube or the fact that the target tube is not filled with cooling liquid is avoided; 2) the local magnetic field intensity of the magnetic bar can be conveniently adjusted through an external magnet back connecting rod; 3) the magnet of bar magnet is kept apart with the coolant liquid completely, avoids the coolant liquid to the harmful effects of magnet, guarantees the performance of bar magnet.)

1. The utility model provides a fountain cooling sputtering cathode bar magnet device which characterized in that: the device includes target pipe, magnet and coolant liquid pipeline, wherein magnet is arranged in the inside of target pipe, the coolant liquid pipeline has coolant liquid import, coolant liquid export and coolant liquid and sprays the mouth, the coolant liquid import with the coolant liquid export is linked together, the coolant liquid sprays the mouth and sets up on the coolant liquid pipeline and orientation the target pipe is in order to constitute the fountain cooling.

2. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.

3. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the periphery of the magnet is sealed by arranging a magnet shell, so that the magnet is isolated from the cooling liquid in the cooling liquid pipeline.

4. The spray cooled sputtering cathode magnetic bar device according to claim 3, wherein: the cooling liquid pipeline is provided with at least one cooling liquid inlet and at least two cooling liquid outlets arranged in an array mode, the cooling liquid inlet is located in the middle of the cooling liquid pipeline, the cooling liquid outlets are respectively symmetrically arranged on the periphery of the magnet shell, and therefore the cooling liquid pipeline is internally provided with cooling liquid inlet to the cooling liquid outlets which are uniformly and symmetrically divided into cooling liquid flow paths.

5. The spray cooled sputtering cathode magnetic bar device according to claim 4, wherein: the cooling liquid flow paths are independent and are arranged in a zigzag shape along the length arrangement direction of the cooling liquid pipeline.

6. The spray cooled sputtering cathode magnetic bar device according to claim 3, wherein: the cooling liquid pipeline is connected with the magnet shell.

7. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the bottom of the magnet is provided with a height-adjustable magnetic field adjusting rod, and the magnetic field adjusting rod supports the magnet and adjusts the magnetic field of the magnet through height adjustment of the magnet.

8. The spray cooled sputtering cathode magnetic bar device according to claim 7, wherein: the magnetic field adjusting rod penetrates through the magnet shell to support the magnet and is independently arranged with the cooling liquid pipeline.

9. The spray cooled sputtering cathode magnetic rod device according to claim 7 or 8, wherein: the magnetic field adjusting rods are uniformly arranged at intervals along the length arrangement direction of the magnets.

10. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.

Technical Field

The invention relates to the technical field of film preparation, in particular to a spray type cooling sputtering cathode magnetic rod device.

Background

With the wider application of the magnetron sputtering cathode in the field of vacuum coating, the working modes of the sputtering cathode are diversified, such as upward sputtering, downward sputtering, inclined sputtering and the like; such as dc sputtering, intermediate frequency sputtering, rf sputtering, etc. The excessive heat generated by the magnetron sputtering cathode during operation can adversely affect the coating process and the sputtering cathode, so that a cooling mechanism needs to be arranged in the magnetron sputtering cathode to ensure the stable operation of the magnetron sputtering cathode.

For the traditional magnetic rod, the immersion cooling scheme is adopted at present. The main mode is that the inner tube or the outer tube of the cooling liquid of the magnetic bar is used for filling the cooling liquid in the whole target tube, and the heat generated by the target tube during the operation of the sputtering cathode is taken away by the flowing of the liquid. However, the arrangement of the sputtering surface of the existing sputtering cathode and the magnetic bar structure often causes that some residual spaces inside the target tube are not filled with the cooling liquid, so that the target tube in a local area can not be effectively cooled; this situation develops further and the target tube is heated unevenly with the heat build-up, resulting in cracking.

Disclosure of Invention

The invention aims to provide a spray type cooling sputtering cathode magnetic rod device according to the defects of the prior art, and the spray type cooling scheme is adopted to realize the cooling of a sputtering cathode target tube.

The purpose of the invention is realized by the following technical scheme:

the utility model provides a fountain cooling sputtering cathode bar magnet device which characterized in that: the device includes target pipe, magnet and coolant liquid pipeline, wherein magnet is arranged in the inside of target pipe, the coolant liquid pipeline has coolant liquid import, coolant liquid export and coolant liquid and sprays the mouth, the coolant liquid import with the coolant liquid export is linked together, the coolant liquid sprays the mouth and sets up on the coolant liquid pipeline and orientation the target pipe is in order to constitute the fountain cooling.

The cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.

The periphery of the magnet is sealed by arranging a magnet shell, so that the magnet is isolated from the cooling liquid in the cooling liquid pipeline.

The cooling liquid pipeline is provided with at least one cooling liquid inlet and at least two cooling liquid outlets arranged in an array mode, the cooling liquid inlet is located in the middle of the cooling liquid pipeline, the cooling liquid outlets are respectively symmetrically arranged on the periphery of the magnet shell, and therefore the cooling liquid pipeline is internally provided with cooling liquid inlet to the cooling liquid outlets which are uniformly and symmetrically divided into cooling liquid flow paths.

The cooling liquid flow paths are independent and are arranged in a zigzag shape along the length arrangement direction of the cooling liquid pipeline.

The cooling liquid pipeline is connected with the magnet shell.

The cooling liquid pipeline and the magnet can adopt a screw connection structure or a hoop clamping structure.

The cooling liquid pipeline can adopt a multi-section connecting structure and also can adopt an integrated structure.

The bottom of the magnet is provided with a height-adjustable magnetic field adjusting rod, and the magnetic field adjusting rod supports the magnet and adjusts the magnetic field of the magnet through height adjustment of the magnet.

The magnetic field adjusting rod can adjust the local magnetic field intensity of the magnet in the magnet shell through externally plugging or removing the gasket, and can also adjust the local magnetic field intensity through a simple screw rod mode.

The magnetic field adjusting rod penetrates through the magnet shell to support the magnet and is independently arranged with the cooling liquid pipeline.

The magnetic field adjusting rods are uniformly arranged at intervals along the length arrangement direction of the magnets.

The cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.

The invention has the advantages that: 1) the sputtering target can be used in sputtering cathodes working at various angles, and target cracking caused by bubbles in the target tube or the fact that the target tube is not filled with cooling liquid is avoided; 2) the local magnetic field intensity of the magnetic bar can be conveniently adjusted through an external magnet back connecting rod; 3) the magnet of bar magnet is kept apart with the coolant liquid completely, avoids the coolant liquid to the harmful effects of magnet, guarantees the performance of bar magnet.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic diagram of a cross-sectional structure of the present invention;

FIG. 3 is a schematic view of the flow path of the cooling fluid in the present invention;

FIG. 4 is an enlarged view of a portion of FIG. 2;

fig. 5 is a schematic longitudinal sectional structure of the present invention.

Detailed Description

The features of the present invention and other related features are described in further detail below by way of example in conjunction with the following drawings to facilitate understanding by those skilled in the art:

as shown in fig. 1-5, the symbols 1-11 in the figures are respectively represented as: the cooling liquid spraying device comprises a cooling liquid pipeline 1, a magnet shell 2, a cooling liquid inlet flange 3, a cooling liquid spraying port 4, a magnet 5, an external magnetic field adjusting device 6, a cooling liquid inlet channel 7, a cooling liquid return flange 8, a magnetic field adjusting rod 9, an adjusting gasket 10 and a sealing cover 11.