阅读说明：本技术 一种镀膜治具和镀膜装置 (Film coating jig and film coating device ) 是由 马奔希 陈晨 朱乾成 周剑 沈章大 于 2020-07-15 设计创作，主要内容包括：本发明涉及一种镀膜治具和镀膜装置,镀膜治具包括框体,所述框体具有四个侧边,所述侧边包括：侧边本体、由所述侧边本体向所框体内延伸的凸起,各所述侧边本体在所述凸起的一侧围成膜片空间,各所述凸起用于承接所述膜片空间内的膜片；所述侧边本体朝向所述膜片空间的一侧上形成第一斜面,所述膜片搭设在各所述凸起上时,所述膜片的边缘与所述侧边本体的第一斜面与之间形成间隙。膜片搭设在四个凸起上时,膜片的边缘与第一斜面之间形成间隙,在进行镀膜时,膜片边缘与第一斜面之间具有间隙便于真空镀膜的进行,提升膜片边缘的镀膜速率,进而提升膜片整体的镀膜质量。(The invention relates to a film coating jig and a film coating device, wherein the film coating jig comprises a frame body, the frame body is provided with four side edges, and the side edges comprise: the side body and the bulges extend into the frame body from the side body, the side body surrounds a diaphragm space on one side of the bulge, and the bulges are used for bearing the diaphragm in the diaphragm space; the side body is provided with a first inclined surface on one side facing the diaphragm space, and when the diaphragms are erected on the protrusions, gaps are formed between the edges of the diaphragms and the first inclined surfaces of the side body. When the diaphragm is erected on the four bulges, a gap is formed between the edge of the diaphragm and the first inclined plane, when the film is coated, the gap between the edge of the diaphragm and the first inclined plane is convenient for vacuum coating, the film coating rate at the edge of the diaphragm is improved, and the overall film coating quality of the diaphragm is further improved.)

1. The coating jig is characterized by comprising a frame body, wherein the frame body is provided with four side edges, and the side edges comprise: the side body and the bulges extend into the frame body from the side body, the side body surrounds a diaphragm space on one side of the bulge, and the bulges are used for bearing the diaphragms in the diaphragm space; the side body is provided with a first inclined surface on one side facing the diaphragm space, and when the diaphragms are erected on the protrusions, gaps are formed between the edges of the diaphragms and the first inclined surfaces of the side body.

2. The coating fixture according to claim 1, wherein the frame body is rectangular or square, and the first inclined planes of the side bodies define an inverted trapezoidal boss.

3. The coating fixture according to claim 1, wherein each of the side bodies has a positioning portion on the first inclined surface, and the membrane is located between the positioning points when being erected on the protrusions.

4. The coating fixture of claim 3, wherein a side of the protrusion for receiving the membrane is a receiving surface, and the side body further comprises: connect the platform face on first inclined plane, the platform face is parallel with arbitrary bellied face of accepting, first inclined plane is located accept the face with between the platform face.

5. The plating jig of claim 3, wherein one end of the first inclined surface close to the receiving surface is connected to the receiving surface.

6. The plating jig of claim 3, wherein the side body further comprises: the connecting surface is arranged at the bottom of the first inclined surface, two ends of the connecting surface are respectively connected with the first inclined surface and the bearing surface, and the first inclined surface is higher than the bearing surface.

7. The plating jig according to claim 3, wherein the receiving surface has a first edge connected to the first inclined surface and a second edge opposite to the first edge, the positioning portion is provided on the first inclined surface, a side of the positioning portion facing the protrusion has a limiting surface, and the limiting surface is aligned with the second edge.

8. The plating jig of claim 1, wherein the protrusion has a vertical surface on a side facing the inside of the frame, and an angle between the first inclined surface and the vertical surface of the protrusion is between 30 ° and 70 °.

9. The coating fixture according to claim 1, wherein a second inclined plane is formed on one side of the side body facing the diaphragm space, the first inclined plane and the second inclined plane are respectively located on two sides of the protrusion, and the first inclined plane and the second inclined plane are close to each other toward the protrusion.

10. A plating device, characterized by comprising: a coating platform and a plurality of coating jigs according to any one of claims 1 to 8, each of the coating jigs being mounted on the coating platform.

11. The plating device according to claim 10, wherein the plating platform has a plurality of plating grooves, each of the plating jigs is installed in the plating groove, each of the side bodies of the plating jigs has a reinforcing rib extending outward of the frame, and the reinforcing rib is erected on the plating platform when the plating jig is located in the plating groove.

12. The plating device according to claim 10, wherein the plating platform is provided with a plurality of plating grooves, each plating jig is respectively installed in the plating grooves, any two adjacent side bodies of the plating jigs are connected to form a connecting angle, the connecting angle extends towards the outside of the frame body and is provided with reinforcing ribs, and when the plating jigs are located in the plating grooves, the reinforcing ribs are erected on the plating platform.

13. The plating device according to claim 10, wherein each of the plating jigs is integrally formed with the plating platform.

Technical Field

The invention relates to the field of coating processing, in particular to a coating jig and a coating device.

Background

With the development of economy and the progress of society, energy conservation becomes inevitable and socially recognized. CVD, PVD, go up unloading have already tended to automatic, have satisfied automatic unloading and have got, need consider again to increase the coating film efficiency of board, the quality of reinforcing product. The coating jig in the prior art generally sets up a recess that is used for placing CVD or PVD piece on the tool, and the diaphragm card carries out the coating film in going into the recess, but in the coating film process, the edge of diaphragm is generally nearer with the recess distance of tool, can lead to the edge coating film speed of diaphragm to be lower. The film coating rate of the middle part of the membrane is different from that of the edge of the membrane, so that the overall film coating quality of the membrane is reduced.

Disclosure of Invention

Accordingly, there is a need to provide a coating fixture for increasing the coating rate of the edge of the film, thereby increasing the overall quality of the coating.

A coating jig comprises a frame body, wherein the frame body is provided with four sides, and the sides comprise: the side body and the bulges extend into the frame body from the side body, the side body surrounds a diaphragm space on one side of the bulge, and the bulges are used for bearing the diaphragms in the diaphragm space; the side body is provided with a first inclined surface on one side facing the diaphragm space, and when the diaphragms are erected on the protrusions, gaps are formed between the edges of the diaphragms and the first inclined surfaces of the side body.

Above-mentioned coating jig, when the diaphragm was set up on four archs, formed the clearance between the edge of diaphragm and the first inclined plane, when carrying out the coating film, had the going on of the vacuum coating of being convenient for in clearance between diaphragm edge and the first inclined plane, promoted the coating film speed at diaphragm edge, and then promoted the holistic coating film quality of diaphragm.

In one embodiment, the frame body is rectangular or square, and the first inclined surface on each side body encloses an inverted trapezoidal boss.

In one embodiment, each side body is provided with a positioning portion on the first inclined surface, and the diaphragm is located between the positioning points when being erected on each protrusion. Because the setting on first inclined plane, the location difficulty when probably leading to the diaphragm feeding, for solving above-mentioned problem, each side body in this embodiment all is equipped with location portion on first inclined plane, and location portion is used for spacing to the diaphragm, through the setting of location portion on four side bodies, can fix a position four edges of diaphragm, reaches convenient location and fixes a position stable effect.

In one embodiment, each of the side body is provided with two positioning portions, and the side body is divided into three equal-length side sections by the two positioning portions. When the diaphragm is fixed a position by location portion in the diaphragm space, every edge is spacing by two location portions respectively, and is spacing more stable, and the condition that the diaphragm edge supported with location portion probably appears simultaneously when spacing, and what the contact of edge and a plurality of location portion can disperse the diaphragm edge and received is the effort, better protection diaphragm.

In one embodiment, a side surface of the protrusion for receiving the membrane is a receiving surface, and the side body further includes: connect the platform face on first inclined plane, the platform face is parallel with arbitrary bellied face of accepting, first inclined plane is located accept the face with between the platform face.

In one embodiment, one end of the first inclined surface close to the bearing surface is connected with the bearing surface.

In one embodiment, the side body further includes: the connecting surface is arranged at the bottom of the first inclined surface, two ends of the connecting surface are respectively connected with the first inclined surface and the bearing surface, and the first inclined surface is higher than the bearing surface.

In one embodiment, the bearing surface has a first edge connected to the first inclined surface and a second edge opposite to the first edge, the positioning portion is disposed on the first inclined surface, a side of the positioning portion facing the protrusion has a limiting surface, and the limiting surface is aligned with the second edge.

In one embodiment, the protrusion has a vertical surface on a side facing the inside of the frame, and the included angle between the first inclined surface and the vertical surface of the protrusion is 30 ° to 70 °.

In one embodiment, a second inclined plane is formed on one side of the side body facing the diaphragm space, the first inclined plane and the second inclined plane are respectively located on two sides of the protrusion, and the first inclined plane and the second inclined plane are close to each other towards the protrusion. When the coating jig is transversely arranged, the second protrusions form a trapezoid boss in a surrounding mode, the coating space on the back face of the diaphragm is increased, and the coating speed of the edge, contacting with the protrusions, of the back of the diaphragm is increased.

The invention also discloses a coating device, comprising: a coating platform and a plurality of coating tools according to any one of claims 1 to 8, wherein the coating platform is provided with a plurality of coating grooves, and each coating tool is respectively arranged in the coating groove.

Above-mentioned coating device, this coating device can set up in the manipulator below, carries out steps such as material loading, material taking to each coating film tool on the coating film platform in proper order through the manipulator, also can carry out vacuum coating operation simultaneously. The quality of a plurality of diaphragms plated with films simultaneously is improved.

In one embodiment, each side body of the film plating jig extends outward from the frame body and is provided with a reinforcing rib, and when the film plating jig is positioned in the film plating groove, the reinforcing rib is erected on the film plating platform. When laying the coating film tool, only need directly place the coating film tool on the coating film groove, the reinforcing rib of coating film tool can be automatic to be taken on the coating film platform, accomplishes laying of coating film tool, when accomplishing the coating film, prepares to take out the coating film tool, only needs can mention the coating film tool through reinforcing the rib, takes out convenient and fast from the coating film groove.

In one embodiment, the coating platform is provided with a plurality of coating grooves, each coating jig is respectively installed in the coating groove, any two adjacent side bodies of the coating jigs are connected to form a connecting angle, the connecting angle extends outwards from the frame body to form a reinforcing rib, and when the coating jigs are located in the coating grooves, the reinforcing rib is erected on the coating platform.

In one embodiment, each of the coating jigs is integrally formed with the coating platform.

Drawings

FIG. 1 is a front view of a coating fixture according to an embodiment;

FIG. 2 is a perspective view of an embodiment of a coating fixture;

FIG. 3 is a cross-sectional view taken at A-A of FIG. 1 in one embodiment;

FIG. 4 is a cross-sectional view taken along line A-A of FIG. 1 in accordance with another embodiment;

FIG. 5 is a schematic back structure view of a second embodiment of a coating fixture;

FIG. 6 is a schematic structural view of a coating fixture according to a third embodiment;

FIG. 7 is a schematic view showing the structure of a plating device according to a fourth embodiment.

Wherein: 1. a frame body; 10. a diaphragm space; 2. a side edge; 3. a side body; 31. a first inclined plane; 32. a platform surface; 33. a second inclined plane; 34. a connecting surface; 4. a protrusion; 41. a first side; 42. a second edge; 43. bearing surface; 44. a vertical plane; 5. a positioning part; 51. a limiting surface; 6. chamfering; 7. reinforcing the ribs; 8. a connecting angle; 9. a film coating platform; 91. a film coating jig.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and the detailed description. It should be understood that the detailed description and specific examples, while indicating the scope of the invention, are intended for purposes of illustration only and are not intended to limit the scope of the invention.

It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not represent the only embodiments.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

The first embodiment of the invention relates to a coating jig, which is arranged in a rectangular or square frame body 1, and PVD or CVD membranes are put into the coating jig for coating.

As shown in fig. 1, the coating jig includes a frame body 1, the frame body 1 has four sides 2, and the four sides 2 are all straight sides and enclose a square or a rectangle, wherein, in combination with fig. 2 and 3, the sides 2 include: the side body 3, by the protruding 4 of the side body 3 extension in to framework 1, the diaphragm gets into four side bodies 3 when the coating film in, is accepted by each protruding 4. The bulge 4 is arranged in the middle of the side body 3, and divides the space enclosed by the four side bodies 3 into two parts, and one side of the four bulges 4 is the diaphragm space 10, which is the upper side in the embodiment. The four side bodies 3 enclose a membrane space 10 on the upper sides of the four bulges 4, and when working, the membrane enters the membrane space 10 and is received by the bulges 4 to carry out film coating operation. In the scheme of the prior art, when general diaphragm was located diaphragm space 10, for the spacing of diaphragm, the distance between side body 3 and the diaphragm was too near, and laminating mutually even can cause the clearance undersize between diaphragm edge and the side body 3, and the unchangeable condition of coating film takes place for the position coating film rate at diaphragm edge is less than the coating film rate at diaphragm middle part, has caused the inconsistent condition of coating film rate to take place, influences the whole coating film quality of diaphragm.

As shown in fig. 1 and 2, in the coating fixture of this embodiment, a first inclined surface 31 is formed on one side of the side body 3 facing the diaphragm space 10, the first inclined surface 31 is located above the protrusion 4 and is inclined downward from the upper edge of the side body 3, the first inclined surfaces 31 of the four side bodies 3 form an inverted trapezoidal boss, and four sides of the trapezoidal boss are inclined downward. The diaphragm is located diaphragm space 10, and when the diaphragm was set up on four arch 4 promptly, the edge of diaphragm and first inclined plane 31 between form the clearance, when carrying out the coating film, have the clearance between diaphragm edge and the first inclined plane 31 and be convenient for going on of vacuum coating, promote the coating film speed at diaphragm edge, and then promote the holistic coating film quality of diaphragm.

Because the setting of first inclined plane 31, the location difficulty during probably leading to the diaphragm feeding, for solving above-mentioned problem, each side body 3 in this embodiment all is equipped with location portion 5 on first inclined plane 31, and location portion 5 is used for spacing to the diaphragm, through the setting of location portion 5 on four side bodies 3, can fix a position four edges of diaphragm, reaches the effect of convenient location and location stability. With reference to fig. 1, 2 and 3, the upper surface of the protrusion 4 is a receiving surface 43, and the side of the side body 3 above the protrusion 4 facing the inside of the frame 1 is: the first inclined plane 31 connected with the bearing surface 43 of the bulge 4 and the platform surface 32 connected with the first inclined plane 31 are connected with the top of the first inclined plane 31 and are parallel to the bearing surface 43 of any bulge 4, the bearing surface 43 and the platform surface 32 are both horizontally arranged, and the platform surface 32 enables the top surface of the frame body 1 to be horizontal, so that the film coating process is convenient to carry out. The receiving surface 43 of the projection 4 has a first edge 41 adjacent to the first inclined surface 31 and a second edge 42 away from the first edge 41. in one embodiment, as shown in fig. 3, the first inclined surface 31 is connected between the platform surface 32 and the receiving surface 43, i.e., the top end of the first inclined surface 31 is connected to the platform surface 32 and the bottom end of the first inclined surface 31 is connected to the first edge 41 of the receiving surface. The positioning part 5 is arranged on the first inclined surface 31, the bottom end of the positioning part is positioned at the bottom of the first inclined surface 31, one side of the positioning part 5 facing the inside of the frame body 1 is provided with a limiting surface 51, and the limiting surface 51 is connected with the first edge 41 of the bearing surface 43 of the bulge 4. The bottom of the positioning part 5 is connected with the bearing surface 43 to avoid the situation that the diaphragm abuts against the lower side of the first inclined surface 31 during positioning to cause positioning deviation.

In another embodiment, as shown in fig. 4, the side body 3 further has: establish the connection face 34 at first inclined plane 31 bottom, the top of first inclined plane 31 connects platform face 32, the bottom and the connection face 34 of first inclined plane 31 are connected, connection face 34 is connected with first side 41, connect face 34 and be connected first side 41 with first inclined plane 31 promptly, the setting of connection face 34 has risen the height of first inclined plane, make first inclined plane 31 separate with accepting the face 43, when having avoided the diaphragm edge to accept the face 43 on setting up arch 4, the condition of putting up on first inclined plane 31 easily takes place, reduce the probability of putting up the limit on first inclined plane 31 of diaphragm, make the diaphragm can carry on protruding 4's accepting face 43 steadily.

The two ends of the positioning part 5 are respectively connected with the top end and the bottom end of the first inclined surface 31, the position of the membrane is limited by limiting the position of the edge of the membrane on the limiting surface 51 facing the inside of the frame body 1 on the positioning part 5, when the membrane enters the membrane space 10, the membrane is positioned by the positioning parts 5 on the four side edges 2, and the membrane slides onto each bulge 4 through the positioning parts 5, abuts against the bearing surface 43 of each bulge 4 and is placed at the most central position of the frame body 1. Wherein, all be equipped with two location portion 5 on the first inclined plane 31 of each side body 3, side body 3 is separated into three isometric limit sections by two location portion 5. When the diaphragm is fixed a position by location portion 5 in diaphragm space 10, every edge is spacing by two location portion 5 respectively, and is spacing more stable, and the condition that the diaphragm edge supported with location portion 5 probably appears when spacing simultaneously, and what the edge and the contact of a plurality of location portion 5 can disperse the diaphragm edge and received is the effort, better protection diaphragm. Of course, the first inclined surface 31 of each side body 3 may also be provided with other numbers of positioning portions 5, for example, 3 or 4 or other numbers, and the positioning portions 5 may be arranged at equal intervals or at unequal intervals. It is worth noting that the protrusion 4 has a vertical surface 44 on a side facing the inside of the frame 1, an included angle between the first inclined surface 31 and the vertical surface 44 of the protrusion 4 is between 30 ° and 70 °, and may be any angle between 30 ° and 70 °, and an angle in the interval may well guide the film, and at the same time, a sufficiently large gap may be formed between the film and the film, so as to improve a film coating rate of the edge of the film.

The top of the positioning portion 5 is located on the top of the first inclined surface 31 and connected to the terrace surface 32. The positioning part 5 covers the first inclined surface 31, and the top of the positioning part 5 is connected with the platform surface 32 so as to avoid the situation that the membrane is lapped on the positioning part 5 during positioning and the membrane is positioned wrongly; the positioning portion 5 may be mounted on the first inclined surface 31 by a fixing member or an adhesive, or may be integrally formed with the first inclined surface 31, and the positioning portion 5 and the first inclined surface 31 are not particularly limited in this embodiment as an example. Location portion 5 and first inclined plane 31 integrated into one piece can be better promote 5 positions in location portion and spacing stability, and the installation flow has been removed from simultaneously in the processing of being convenient for.

It is worth noting in addition that, in the four sides 2, any two adjacent sides 2 are connected with each other, and the connecting part forms a chamfer 6 to provide a coating space for the edge corner of the diaphragm, in this embodiment, the chamfer 6 formed by connecting the two sides 2 is also provided with an inclined plane, so that a gap is formed between the edge corner of the diaphragm and the chamfer 6 of the frame body 1, and the gap can improve the coating rate of the edge corner of the diaphragm, and avoid the influence on the overall coating quality of the diaphragm due to the low coating rate of the edge corner of the diaphragm.

In addition, the front surface of the diaphragm needs to be coated, the back surface of the diaphragm also needs to be coated, the protrusion 4 is arranged in the middle of the side body 3, the side body 3 has a certain distance on the lower side of the protrusion 4, in order to facilitate the coating process on the back surface of the diaphragm, the side body 3 is further provided with a second inclined surface 33 on one side facing the diaphragm space 10, the first inclined surface 31 and the second inclined surface 33 are respectively positioned on two sides of the protrusion 4, and the first inclined surface 31 and the second inclined surface 33 are mutually close to each other towards the protrusion 4. When the coating jig is transversely arranged, the second protrusions 4 are enclosed to form trapezoidal bosses, so that the coating space on the back of the diaphragm is increased, and the coating speed of the edge, in contact with the protrusions 4, of the back of the diaphragm is increased. The included angle between the second inclined plane 33 and the vertical plane of the protrusion 4 is 30-70 degrees, and can be any angle between 30-70 degrees, and a large enough gap can be formed between the angle in the interval and the membrane, so that the coating rate of the edge of the membrane is improved.

In the diaphragm jig in the embodiment, the first inclined surface 31 and the second inclined surface 33 are arranged, so that the film coating rate of the edge and the back of the diaphragm is improved, and the overall film coating quality of the diaphragm is improved; the positioning problem caused by the gap between the inclined plane and the diaphragm is solved by the arrangement of the plurality of positioning parts 5.

The second embodiment of the invention discloses a film coating device, which comprises a film coating platform and a plurality of film coating jigs as in the first embodiment, wherein the film coating jigs are arranged on the film coating platform, the film coating platform is provided with a plurality of film coating grooves, and each film coating jig is respectively arranged in the film coating groove. The coating device can be arranged below a manipulator, and sequentially carries out the steps of feeding, material taking and the like on each coating jig on the coating platform through the manipulator, and can also carry out vacuum coating operation simultaneously. The integral coating quality of the plurality of membranes is improved.

As shown in fig. 2 and 5, each side body 3 of the coating jig has a reinforcing rib 7 extending outward from the frame 1, and the reinforcing rib 7 is connected to the platform surface 32 of the side body 3 and located at the top of the coating jig. The slotting dimension of each coating groove is the same with the shape that side body 3 encloses, when laying the coating tool, only needs to directly place the coating tool on the coating groove, and the intensive muscle 7 of coating tool can be taken on the coating platform automatically, accomplishes laying of coating tool, when accomplishing the coating film, prepares to take out the coating tool, only needs to mention the coating tool through strengthening muscle 7, takes out convenient and fast from the coating groove.

The third embodiment of the present invention relates to a film plating device, which is substantially the same as the film plating device of the second embodiment, and mainly differs from the second embodiment in that a reinforcing rib 7 extends from the side body 3, while in the third embodiment, as shown in fig. 6, any two adjacent side bodies 3 of a film plating jig are connected to form a connecting angle 8, the connecting angle 8 extends outward from the frame body to form the reinforcing rib 7, and when the film plating jig is located in the film plating tank, the reinforcing rib 7 is erected on a film plating platform. Compared with the coating device in the second embodiment in which the reinforcing ribs 7 extend from the whole side body 3, the coating device in the second embodiment only extends the reinforcing ribs 7 at the connecting corners 8, so that the coating device can be stably arranged in a coating tank, and meanwhile, the material of a jig is saved, and the processing cost of the jig is reduced.

A fourth embodiment of the present invention relates to a coating apparatus, which includes a coating platform and a plurality of coating jigs as in the first embodiment, and in this embodiment, as shown in fig. 7, the coating platform 9 and the coating jigs 91 are integrally formed, so that the steps of loading and unloading the coating jigs 91 on the coating platform 9 can be directly performed in sequence by a manipulator without a disassembly and assembly process, and vacuum coating operation can also be performed simultaneously. The integral coating quality of the plurality of membranes is improved.

The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.