阅读说明：本技术 一种石英晶体谐振器真空镀膜装置 (Vacuum coating device for quartz crystal resonator ) 是由 屈明明 王波 温从众 袁林花 于 2020-07-31 设计创作，主要内容包括：本发明公开了一种石英晶体谐振器真空镀膜装置,涉及真空镀膜技术领域。本发明包括支撑架和箱体,支撑架的左侧上方固定连接有箱体,箱体的内部上下两侧壁之间转动连接有轴杆,轴杆的侧壁上均连接有支撑板,支撑板的下表面开设有第一安装槽,第一安装槽内连接有加热机构,支撑板的上表面开设有第二安装槽,第二安装槽内连接有夹紧机构,真空泵上固定连接有真空管,真空管的另一端固定连接在箱体的右侧壁上。本发明通过将支撑板均匀固定连接在轴杆上,使得支撑板上的石英晶体谐振器在镀膜时,磁控靶能够扫射的面积更广,进而使得石英晶体谐振器的缝隙中也能够进行镀膜,使得石英晶体谐振器表面的镀膜更加完整。(The invention discloses a vacuum coating device for a quartz crystal resonator, and relates to the technical field of vacuum coating. The vacuum pump comprises a support frame and a box body, wherein the box body is fixedly connected above the left side of the support frame, a shaft lever is rotatably connected between the upper side wall and the lower side wall in the box body, supporting plates are respectively connected onto the side walls of the shaft lever, a first mounting groove is formed in the lower surface of each supporting plate, a heating mechanism is connected into the first mounting groove, a second mounting groove is formed in the upper surface of each supporting plate, a clamping mechanism is connected into the second mounting groove, a vacuum tube is fixedly connected onto a vacuum pump, and the other end of the vacuum tube. According to the invention, the supporting plate is uniformly and fixedly connected to the shaft rod, so that the area which can be swept by the magnetron target is wider when the quartz crystal resonator on the supporting plate is coated, the coating can be carried out in the gap of the quartz crystal resonator, and the coating on the surface of the quartz crystal resonator is more complete.)

1. The utility model provides a quartz crystal resonator vacuum coating device, includes support frame (1) and box (2), its characterized in that: a box body (2) is fixedly connected to the upper portion of the left side of the support frame (1), a shaft lever (3) is rotatably connected between the upper side wall and the lower side wall of the interior of the box body (2), and supporting plates (4) are uniformly and fixedly connected to the side walls of the shaft lever (3);

a first mounting groove (401) is formed in the lower surface of the supporting plate (4), and a heating mechanism (8) is fixedly connected in the first mounting groove (401);

a second mounting groove (402) is formed in the upper surface of the supporting plate (4), and a clamping mechanism (9) is fixedly connected in the second mounting groove (402);

a mounting vertical plate (5) is fixedly connected to the left side wall inside the box body (2), and a magnetic control target (501) is uniformly and fixedly connected to the right side surface of the mounting vertical plate (5);

the vacuum pump (7) is fixedly connected to the right side of the upper surface of the support frame (1), a vacuum tube (701) is fixedly connected to the vacuum pump (7), and the other end of the vacuum tube (701) is fixedly connected to the right side wall of the box body (2).

2. The vacuum coating device for the quartz crystal resonator according to claim 1, wherein a protective box (6) is fixedly connected to a position below the supporting frame (1) corresponding to the box body (2), the lower end of the shaft rod (3) penetrates through the lower side wall of the box body (2) and the supporting frame (1) and is fixedly connected with a first gear (601), a motor (602) is fixedly connected to the right side inside the protective box (6), a second gear (603) is fixedly connected to the output end of the motor (602), and the second gear (603) is meshed with the first gear (601).

3. The vacuum coating device for the quartz crystal resonator according to claim 1, wherein the heating mechanism (8) comprises a heating box (801) and an electric heating wire (802), the heating box (801) is fixedly embedded in the first installation groove (401), and the electric heating wire (802) is fixedly connected to the inside of the heating box (801).

4. The vacuum coating device for the quartz crystal resonator according to claim 1, wherein the clamping mechanism (9) comprises a spring (902) and a clamping plate (903), the side wall of the second mounting groove (402) is symmetrically provided with a groove (901), the spring (902) is fixedly connected inside the groove (901), and the tail end of the spring (902) extends out of the groove (901) and is fixedly connected with the clamping plate (903).

5. The vacuum coating device for the quartz crystal resonator according to claim 1, wherein the lower surface of the supporting plate (4) is positioned at the left side and the right side of the heating mechanism (8) and is fixedly connected with an L-shaped clamping plate (803) respectively, and the lower end of the L-shaped clamping plate (803) is clamped on the lower surface of the heating mechanism (8).

6. The vacuum coating device for the quartz crystal resonator according to claim 4, wherein the width of the clamping plate (903) is larger than that of the groove (901), and a clamping pad (904) is fixedly connected to one side of the clamping plate (903) far away from the spring (902).

Technical Field

The invention belongs to the technical field of vacuum coating, and particularly relates to a vacuum coating device for a quartz crystal resonator.

Background

In the manufacturing process of the quartz crystal resonator, silver layer coating needs to be carried out on parts such as electrodes of the quartz crystal resonator, so as to prevent the quartz crystal resonator and parts thereof from being oxidized, and the service life of the quartz crystal resonator is shortened. The existing coating technology of the quartz crystal resonator mainly carries out coating processing through vacuum coating equipment, but in the coating process of the existing equipment, because the quartz crystal resonator is not plane, when the quartz crystal resonator carries out vacuum coating, the gap between the quartz crystal resonators is difficult to coat, and the coating degree is incomplete.

Disclosure of Invention

The invention aims to provide a vacuum coating device for a quartz crystal resonator, which is characterized in that a supporting plate is uniformly and fixedly connected to a shaft rod, so that the area of a magnetron target which can be swept by the quartz crystal resonator on the supporting plate is wider during coating, and further, coating can be carried out in a gap of the quartz crystal resonator, so that the coating on the surface of the quartz crystal resonator is more complete, and the existing problems are solved.

In order to solve the technical problems, the invention is realized by the following technical scheme:

the invention relates to a vacuum coating device for a quartz crystal resonator, which comprises a support frame and a box body, wherein the box body is fixedly connected above the left side of the support frame, a shaft rod is rotatably connected between the upper side wall and the lower side wall in the box body, a support plate is uniformly and fixedly connected on the side wall of the shaft rod, the support plate can rotate around the shaft rod by uniformly and fixedly connecting the support plate on the shaft rod, so that the area which can be swept by a magnetic control target is wider when the quartz crystal resonator on the support plate is coated, the coating can be further carried out in a gap of the quartz crystal resonator, the coating on the surface of the quartz crystal resonator is more complete, a first mounting groove is formed in the lower surface of the support plate, a heating mechanism is fixedly connected in the first mounting groove, the support plate can be heated by the heating mechanism, the utility model discloses a vacuum coating device, including the support frame, the support frame is fixed with clamping mechanism in the second mounting groove, the upper surface of backup pad has seted up the second mounting groove, fixedly connected with clamping mechanism in the second mounting groove, fixedly connected with installation riser on the inside left side wall of box, even fixedly connected with magnetic control target on the right flank of installation riser, the upper surface right side fixedly connected with vacuum pump of support frame, fixedly connected with vacuum tube on the vacuum pump, the other end fixed connection of vacuum tube is on the right side wall of box, can make to be in vacuum state in the box through the vacuum pump to carry out.

Furthermore, the position department fixedly connected with protective housing of the box is corresponded to in the below of support frame, the lower extreme of axostylus axostyle runs through the lower lateral wall and the support frame of box and fixedly connected with first gear, the inside right side fixedly connected with motor of protective housing, the output fixedly connected with second gear of motor, the second gear is connected with the meshing of first gear.

Further, heating mechanism includes heating box and electric heating wire, the heating box is fixed to be inlayed in first mounting groove, the inside fixedly connected with electric heating wire of heating box.

Further, clamping mechanism includes spring and splint, the symmetry has seted up flutedly on the lateral wall of second mounting groove, the inside fixedly connected with spring of recess, the end of spring stretches out recess and fixedly connected with splint, can add through the spring that sets up and splint and hold quartz crystal syntonizer, and quartz crystal syntonizer rocks in the second mounting groove when avoiding the backup pad to rotate, leads to the coating film inhomogeneous.

Furthermore, the lower surface of the supporting plate is positioned at the left side and the right side of the heating mechanism and is fixedly connected with an L-shaped clamping plate respectively, and the lower end of the L-shaped clamping plate is clamped on the lower surface of the heating mechanism.

Furthermore, the width of the clamping plate is larger than that of the groove, a clamping pad is fixedly connected to one side face, far away from the spring, of the clamping plate, friction force between the quartz crystal resonator and the clamping plate can be increased, and stability of the quartz crystal resonator is enhanced.

The invention has the following beneficial effects:

1. according to the invention, the second gear is meshed with the first gear, the motor can drive the second gear to rotate when rotating, so that the first gear drives the shaft rod to rotate, the supporting plate rotates, and the supporting plate can rotate around the shaft rod by uniformly and fixedly connecting the supporting plate to the shaft rod, so that the area of the magnetron target which can be swept by the quartz crystal resonator on the supporting plate is wider during film coating of the quartz crystal resonator on the supporting plate, and further, film coating can be carried out in the gap of the quartz crystal resonator, and the film coating on the surface of the quartz crystal resonator is more complete.

2. According to the quartz crystal resonator, the second mounting groove is formed in the supporting plate, so that the quartz crystal resonator can be placed in the second mounting groove during film coating, the quartz crystal resonator can be clamped through the spring and the clamping plate, the phenomenon that the quartz crystal resonator shakes in the second mounting groove when the supporting plate rotates to cause uneven film coating is avoided, the clamping pad is bonded on the clamping plate, friction force between the quartz crystal resonator and the clamping plate can be increased, and stability of the quartz crystal resonator is enhanced.

Of course, it is not necessary for any product in which the invention is practiced to achieve all of the above-described advantages at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic top view of the control panel of the present invention;

FIG. 3 is a schematic view of the heating mechanism mounting structure of the present invention;

in the drawings, the components represented by the respective reference numerals are listed below:

1. a support frame; 2. a box body; 3. a shaft lever; 4. a support plate; 401. a first mounting groove; 402. a second mounting groove; 5. installing a vertical plate; 501. magnetically controlling a target; 6. a protective box; 601. a first gear; 602. a motor; 603. a second gear; 7. a vacuum pump; 701. a vacuum tube; 8. a heating mechanism; 801. a heating cartridge; 802. an electric heating wire; 803. an L-shaped clamping plate; 9. a clamping mechanism; 901. a groove; 902. a spring; 903. a splint; 904. a clamping pad.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1 and 3, the present invention is a vacuum coating apparatus for a quartz crystal resonator, including a supporting frame 1 and a box 2, the box 2 is fixedly connected to the upper portion of the left side of the supporting frame 1, a shaft 3 is rotatably connected between the upper and lower sidewalls of the box 2, a supporting plate 4 is uniformly and fixedly connected to the sidewall of the shaft 3, a first mounting groove 401 is formed on the lower surface of the supporting plate 4, a heating mechanism 8 is fixedly connected to the inside of the first mounting groove 401, the heating mechanism 8 includes a heating box 801 and an electric heating wire 802, the heating box 801 is fixedly embedded in the first mounting groove 401, the electric heating wire 802 is fixedly connected to the inside of the heating box 801, L-shaped clamping plates 803 are respectively and fixedly connected to the left and right sides of the supporting plate 4, the lower ends of the L-shaped clamping plates 803 are clamped to the lower surface of the heating mechanism 8, and then make the quartz crystal syntonizer temperature on backup pad 4 rise, through with backup pad 4 even fixed connection on axostylus axostyle 3, alright backup pad 4 rotates round axostylus axostyle 3 for quartz crystal syntonizer on backup pad 4 is when the coating film, and the area that magnetron target 501 can sweep is wider, and then also can carry out the coating film in making the gap of quartz crystal syntonizer, makes the coating film on quartz crystal syntonizer surface more complete.

As shown in fig. 1-2, the upper surface of the supporting plate 4 is provided with a second mounting groove 402, the second mounting groove 402 is internally and fixedly connected with a clamping mechanism 9, the clamping mechanism 9 comprises a spring 902 and a clamping plate 903, the side wall of the second mounting groove 402 is symmetrically provided with grooves 901, the inside of each groove 901 is fixedly connected with the spring 902, the tail end of the spring 902 extends out of the corresponding groove 901 and is fixedly connected with the clamping plate 903, the width of the clamping plate 903 is larger than that of the corresponding groove 901, one side surface of the clamping plate 903, far away from the spring 902, of the clamping plate 903 is fixedly connected with a clamping pad 904, the quartz crystal resonator can be placed in the second mounting groove 402 through the arranged second mounting groove 402 during film coating, the quartz crystal resonator can be clamped through the arranged spring 902 and the clamping plate 903, the quartz crystal resonator is prevented from shaking in the second mounting groove 402 when, the friction force between the quartz crystal resonator and the clamping plate 903 can be increased, and the stability of the quartz crystal resonator is enhanced.

Wherein as shown in fig. 1, fixedly connected with installation riser 5 on the inside left side wall of box 2, even fixedly connected with magnetic control target 501 on the right flank of installation riser 5, the upper surface right side fixedly connected with vacuum pump 7 of support frame 1, fixedly connected with vacuum tube 701 on the vacuum pump 7, the other end fixed connection of vacuum tube 701 is on the right side wall of box 2, can make to be in the vacuum state in the box 2 through vacuum pump 7 to carry out vacuum coating.

Wherein as shown in fig. 1, the position department fixedly connected with guard box 6 that the below of support frame 1 corresponds box 2, the lower extreme of axostylus axostyle 3 runs through the lower lateral wall of box 2 and support frame 1 and fixedly connected with first gear 601, the inside right side fixedly connected with motor 602 of guard box 6, the output fixedly connected with second gear 603 of motor 602, second gear 603 is connected with the meshing of first gear 601, motor 602 can drive second gear 603 when rotating and rotate, and then just can make first gear 601 drive axostylus axostyle 3 rotate, make backup pad 4 rotate.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The above are only preferred embodiments of the present invention, and the present invention is not limited thereto, and any modifications to the technical solutions described in the above embodiments, and equivalents of some technical features are included in the scope of the present invention.