阅读说明：本技术 坩埚装置及具有其的蒸镀机 (Crucible device and evaporation plating machine with same ) 是由 璁稿悍 许康 于 2020-08-05 设计创作，主要内容包括：本发明揭示了一种坩埚装置和蒸镀机。坩埚装置包括坩埚,坩埚上设置有反应容器；坩埚装置还包括：旋转台,旋转台上设置有复数个原料容器,旋转台可绕其中心轴为转轴旋转,复数个原料容器围绕旋转台的中心轴圆周分布,原料容器上设置有补料口；上料机构,上料机构包括上料通道,上料通道的一端可选择地与补料口配合,上料通道的另一端与反应容器连通。蒸镀机包括蒸镀腔、设置于蒸镀腔内的电子枪和坩埚装置。本发明通过上料机构将旋转台上的原料引入反应容器内,使补充原料操作简单,提升了工作效率,补充原料时不需要打开蒸镀腔,进一步提升了补充原料的便捷程度,而且本发明可以向反应容器内填充不同材质的原料。(The invention discloses a crucible device and an evaporation machine. The crucible device comprises a crucible, and a reaction container is arranged on the crucible; the crucible apparatus further includes: the rotary table is provided with a plurality of raw material containers, the rotary table can rotate around a central shaft of the rotary table serving as a rotating shaft, the plurality of raw material containers are distributed around the circumference of the central shaft of the rotary table, and the raw material containers are provided with material supplementing ports; feed mechanism, feed mechanism include the feed channel, and the one end of feed channel is optionally with the feed supplement mouth cooperation, feed channel's the other end and reaction vessel intercommunication. The evaporation machine comprises an evaporation cavity, an electron gun and a crucible device, wherein the electron gun and the crucible device are arranged in the evaporation cavity. According to the invention, the raw materials on the rotary table are introduced into the reaction container through the feeding mechanism, so that the operation of supplementing the raw materials is simple, the working efficiency is improved, the evaporation cavity does not need to be opened when the raw materials are supplemented, the convenience degree of supplementing the raw materials is further improved, and the reaction container can be filled with the raw materials of different materials.)

1. A crucible device comprises a crucible, wherein a reaction container is arranged on the crucible;

characterized in that the crucible apparatus further comprises:

the rotary table is provided with a plurality of raw material containers, the rotary table can rotate around a central shaft of the rotary table serving as a rotating shaft, the raw material containers are distributed around the circumference of the central shaft of the rotary table, and the raw material containers are provided with material supplementing ports;

the feeding mechanism comprises a feeding channel, one end of the feeding channel is selectively matched with the material supplementing opening, and the other end of the feeding channel is communicated with the reaction container.

2. The crucible apparatus of claim 1, wherein a pusher is disposed within the source container, the pusher being affixed to an inner wall of the source container, the pusher being movable within the source container toward or away from the material replenishment port.

3. The crucible device as claimed in claim 2, further comprising a pushing driving assembly, wherein the pushing driving assembly comprises a movable block, the raw material container is provided with an opening at one side of the pushing member in the moving direction, and the movable block can pass through the opening and move close to or away from the feeding port.

4. The crucible apparatus of claim 1, wherein the feed mechanism comprises an upper assembly and a lower assembly, the upper assembly and the lower assembly being removably connected.

5. The crucible apparatus of claim 4, wherein the upper assembly member has an upper groove at a bottom thereof and a lower groove at a top thereof, the upper groove and the lower groove corresponding to each other, the upper groove and the lower groove cooperating to form the loading channel.

6. The crucible apparatus as recited in claim 1, wherein the replenishment port is provided at an outer periphery of the raw material container, a height of the replenishment port is higher than a height of the reaction container, and the charging passage is provided obliquely such that an end close to the raw material container is higher than an end far from the raw material container.

7. The crucible apparatus as claimed in claim 1, wherein the reaction container is movably mounted on the crucible in a longitudinal direction, the crucible apparatus further comprises a sensing mechanism disposed below the reaction container, the sensing mechanism comprises a support member, an elastic member, and a first photoelectric sensor, the support member is disposed between the elastic member and the reaction container, the support member is provided with a protrusion protruding in a transverse direction, and the first photoelectric sensor is capable of sensing a transverse distance between the first photoelectric sensor and the support member.

8. The crucible apparatus of claim 7, wherein the sensing mechanism further comprises a second photosensor that senses a lateral distance between the second photosensor and the support, and the second photosensor is lower than the first photosensor.

9. The crucible apparatus of claim 7, wherein the sensing mechanism is movable toward or away from the reaction vessel.

10. An evaporation plating machine comprises an evaporation plating cavity and an electron gun arranged in the evaporation plating cavity;

characterized in that the evaporation machine further comprises the crucible device of any one of claims 1 to 9, the crucible and the rotating table are arranged in the evaporation chamber, and an electron beam heating area of the electron gun corresponds to the position of the reaction container.

Technical Field

The invention relates to chip manufacturing equipment, in particular to a crucible device and an evaporation machine with the same.

Background

In the manufacturing process of the LED chip, materials are melted by an evaporator to form steam, and then the steam is plated on the semiconductor substrate. The evaporation machine comprises an evaporation cavity, a crucible and an electron gun, wherein the crucible and the electron gun are arranged in the evaporation cavity, a reaction cavity is arranged on the crucible, raw materials are contained in the reaction cavity, and the electron beams generated by the electron gun heat the raw materials in the reaction cavity to enable the raw materials to become steam. When the raw materials are not broken and lost, the raw materials need to be supplemented into the reaction cavity.

Because the evaporation coating cavity is closed in the evaporation coating process, when the reaction cavity is supplemented with raw materials, the evaporation coating reaction must be stopped, then the evaporation coating cavity is opened, and then the raw materials are poured into the reaction cavity. Therefore, the operation of replenishing the raw material is complicated, and at the same time, since the temperature of the crucible is high, there is a safety risk in the process of pouring the raw material into the reaction chamber, and an operator is easily scalded.

Disclosure of Invention

The invention aims to provide a crucible device convenient for material supplement and an evaporation machine with the same.

In order to achieve one of the above objects, an embodiment of the present invention provides a crucible apparatus, including a crucible, on which a reaction container is disposed;

the crucible apparatus further includes:

the rotary table is provided with a plurality of raw material containers, the rotary table can rotate around a central shaft of the rotary table serving as a rotating shaft, the raw material containers are distributed around the circumference of the central shaft of the rotary table, and the raw material containers are provided with material supplementing ports;

the feeding mechanism comprises a feeding channel, one end of the feeding channel is selectively matched with the material supplementing opening, and the other end of the feeding channel is communicated with the reaction container.

As a further improvement of an embodiment of the present invention, a pushing member is disposed in the raw material container, the pushing member is attached to an inner wall of the raw material container, and the pushing member is movable in the raw material container toward or away from the material replenishing port.

As a further improvement of an embodiment of the present invention, the crucible apparatus further includes a pushing driving assembly, the pushing driving assembly includes a movable block, an opening is disposed on one side of the raw material container in a moving direction of the pushing member, and the movable block can pass through the opening and move close to or away from the material replenishing port.

As a further improvement of an embodiment of the present invention, the feeding mechanism includes an upper assembly member and a lower assembly member, and the upper assembly member and the lower assembly member are detachably connected.

As a further improvement of an embodiment of the present invention, an upper groove is provided at the bottom of the upper assembly member, a lower groove is provided at the top of the lower assembly member, the upper groove and the lower groove correspond to each other, and the upper groove and the lower groove cooperate to form the feeding channel.

As a further improvement of an embodiment of the present invention, the replenishment port is disposed on an outer periphery of the raw material container, a height of the replenishment port is higher than a height of the reaction container, and the feeding passage is disposed obliquely, and an end close to the raw material container is higher than an end far from the raw material container.

As a further improvement of an embodiment of the present invention, the reaction vessel is movably mounted on the crucible, and the moving direction is a longitudinal direction, the crucible apparatus further includes an induction mechanism disposed below the reaction vessel, the induction mechanism includes a support member, an elastic member, and a first photoelectric sensor, the support member is disposed between the elastic member and the reaction vessel, the support member is provided with a protruding portion protruding in a lateral direction, and the first photoelectric sensor can sense a lateral distance between the first photoelectric sensor and the support member.

As a further improvement of an embodiment of the present invention, the sensing mechanism further includes a second photosensor that senses a lateral distance between the second photosensor and the support, and the second photosensor is lower than the first photosensor.

As a further improvement of an embodiment of the present invention, the sensing mechanism may be movable closer to or away from the reaction vessel.

In order to achieve one of the above objects, an embodiment of the present invention provides an evaporation machine, including an evaporation chamber and an electron gun disposed in the evaporation chamber;

the evaporation machine further comprises the crucible device, the crucible and the rotating table are arranged in the evaporation cavity, and an electron beam heating area of the electron gun corresponds to the position of the reaction container.

Compared with the prior art, the invention has the beneficial effects that: the raw materials on the rotating table are introduced into the reaction container through the feeding mechanism, so that the raw material supplementing operation is simple, and the working efficiency is improved. And the evaporation cavity does not need to be opened when the raw materials are supplemented, so that the convenience degree of the raw materials is further improved.

When the rotary table rotates, the positions of the raw material containers can be switched, so that the feeding channel can be matched with different raw material containers, and the rotary table has the function of filling the raw materials of different materials into the reaction container.

Drawings

FIG. 1 is a schematic view of a crucible apparatus according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a loading mechanism according to an embodiment of the present invention;

FIG. 3 is a schematic structural diagram of an evaporation apparatus according to an embodiment of the present invention;

10, a crucible device; 11. a rotating table; 12. a feeding mechanism; 121. a feeding channel; 122. an upper assembly member; 123. a lower assembly member; 13. a crucible; 14. a raw material container; 141. a material supplementing port; 142. pushing the material piece; 15. a reaction vessel; 16. a rotary table driving mechanism; 161. a first servo motor; 162. a first gear; 163. a second gear; 164. a third gear; 17. a crucible driving mechanism; 171. a second servo motor; 172. a fourth gear; 173. a fifth gear; 174. a sixth gear; 18. a pusher drive assembly; 181. a movable block; 182. a cylinder body; 19. an induction mechanism; 191. a support member; 192. an elastic member; 193. a first photosensor; 194. a protrusion; 195. a second photosensor; 20. evaporating and plating the cavity; 30. an electron gun.

Detailed Description

The present invention will be described in detail below with reference to specific embodiments shown in the drawings. These embodiments are not intended to limit the present invention, and structural, methodological, or functional changes made by those skilled in the art according to these embodiments are included in the scope of the present invention.

In the various drawings of the present invention, certain dimensions of structures or portions are exaggerated relative to other structures or portions for ease of illustration and, therefore, are used only to illustrate the basic structure of the subject matter of the present invention.

As shown in fig. 1, an embodiment of the present invention provides a crucible apparatus 10 including a rotating table 11, a feeding mechanism 12, and a crucible 13.

The rotary table 11 is provided with a plurality of material containers 14, the material containers 14 can be used for holding materials, and the material materials of different material containers 14 can be different. The rotating platform 11 can rotate around the central axis thereof as a rotating axis, a plurality of material containers 14 are distributed around the circumference of the central axis of the rotating platform 11, and the material containers 14 are provided with material supplementing ports 141.

A reaction vessel 15 is provided on the crucible 13, and raw materials to be reacted or being reacted are placed in the reaction vessel 15.

Referring to fig. 2, the feeding mechanism 12 includes a feeding passage 121, one end of the feeding passage 121 is selectively engaged with the replenishment port 141, and the other end of the feeding passage 121 communicates with the reaction vessel 15. In this embodiment, "selectively" means that the feeding passage 121 can communicate with the feeding ports 141 of different material containers 14.

In introducing the raw materials into reaction vessel 15 through feed mechanism 12, supply raw materials easy operation, relative manual addition raw materials simple operation to work efficiency has been promoted.

When the rotary table 11 rotates, the replenishment ports 141 of the different material containers 14 may cooperate with the feeding path 121 to introduce the materials in the different material containers 14 into the reaction container 15. Since the raw materials of different materials can be placed in different reaction vessels 15, the present embodiment can supply the raw materials of different materials to the reaction vessels 15, and the range of use of the crucible apparatus 10 is expanded.

Further, a turntable driving mechanism 16 is provided below the turntable 11. The turntable driving mechanism 16 is for driving the turntable 11 to rotate.

Preferably, the rotary table driving mechanism 16 includes a first servomotor 161, a first gear 162, a second gear 163, and a third gear 164. The output shaft of the first servo motor 161 is centrally connected to the first gear 162, the third gear 164 is fixedly mounted on the bottom of the turntable 11, the central axis of the third gear 164 coincides with the central axis of the turntable 11, and the second gear 163 is connected to the first gear 162 and the third gear 164. The torque can be finely adjusted by the first gear 162, the second gear 163, and the third gear 164. Compared with the case where the first servo motor 161 is directly connected to the rotary table 11, the rotary table 11 of the present embodiment has a stable rotation speed, and the situation where the material replenishing port 141 cannot be engaged with the material loading channel 121 due to the unstable rotation speed is avoided.

Specifically, the output shaft of the first servomotor 161 is disposed vertically, and the center of the first gear 162 is connected to the top end of the output shaft of the first servomotor 161, i.e., the first gear 162 is disposed laterally. The third gear 164 is also laterally disposed. The second gear 163 may be disposed horizontally or vertically, and the purpose of adjusting the torque may be achieved.

In one embodiment of the present invention, the crucible 13 is rotatable about its central axis as a rotation axis, so that the position of the reaction container 15 can be adjusted. The reaction vessel 15 has a feeding position and a deposition position. When the reaction vessel 15 reaches the feeding position, the reaction vessel 15 may communicate with the end of the feeding channel 121. When the reaction container 15 reaches the deposition position, the deposition operation can be performed in cooperation with the electron gun. With this arrangement, the collision between the electron gun and the feeding mechanism 12 and the rotary table 11 can be avoided, and the evaporation of the raw material in the raw material container 14 and the feeding mechanism 12 by the heat generated by the electron gun can be avoided.

Further, a crucible driving mechanism 17 is provided below the crucible 13. The crucible driving mechanism 17 functions to drive the crucible 13 to rotate.

Preferably, the crucible driving mechanism 17 includes a second servomotor 171, a fourth gear 172, a fifth gear 173, and a sixth gear 174. The output shaft of the second servomotor 171 is connected to the center of the fourth gear 172, the sixth gear 174 is fixedly mounted to the bottom of the crucible 13, the center axis of the sixth gear 174 is aligned with the center axis of the crucible 13, and the fifth gear 173 is connected to the fourth gear 172 and the sixth gear 174. The torque can be finely adjusted by the fourth gear 172, the fifth gear 173, and the sixth gear 174. Compared with the case where the second servomotor 171 is directly connected to the crucible 13, the crucible 13 of the present embodiment has a stable rotation speed, and the material replenishing port 141 cannot be fitted to the material loading passage 121 due to the unstable rotation speed.

Specifically, the output shaft of the second servomotor 171 is disposed vertically, and the center of the fourth gear 172 is connected to the top end of the output shaft of the second servomotor 171, i.e., the fourth gear 172 is disposed laterally. The sixth gear 174 is also disposed laterally. The fifth gear 173 may be disposed horizontally or vertically, and can achieve the purpose of adjusting the torque.

Preferably, the reaction vessels 15 are plural in number, and are circumferentially distributed around the central axis of the crucible 13. Different quantities of reaction vessels 15 can be used for holding different materials, so that the mixing of the materials of different materials during evaporation is avoided.

Preferably, a pushing member 142 is disposed inside the material container 14, the pushing member 142 is attached to an inner wall of the material container 14, and the pushing member 142 is movable within the material container 14 toward or away from the material replenishing port 141. The pushing member 142 is used to push the material in the material container 14 out of the feeding port 141 so that the material can enter the feeding mechanism 12.

The moving direction of the pushing member 142 may be horizontal or vertical.

Preferably, the crucible apparatus 10 further comprises a pushing driving assembly 18, the pushing driving assembly 18 comprises a movable block 181, the raw material container 14 is provided with an opening at one side of the pushing member 142 in the moving direction, and the movable block 181 can pass through the opening and move close to or far away from the feeding port 141. The movable block 181 may push the pushing member 142, so that the pushing member 142 moves.

In one embodiment of the present invention, the moving direction of the pushing member 142 is vertical, and the opening of the raw material container 14 is located at the bottom of the raw material container 14. The pushing driving assembly 18 is a cylinder, a cylinder body 182 thereof is located below the rotating platform 11, and the movable block 181 is a telescopic rod of the cylinder. The movable block 181 may move in a vertical direction. The turntable 11 is provided with a hole through which the movable block 181 passes.

Referring to fig. 2, preferably, the feed mechanism 12 includes an upper assembly 122 and a lower assembly 123. The upper assembly member 122 and the lower assembly member 123 are detachably connected, and particularly, the upper assembly member 122 and the lower assembly member 123 may be snapped or connected by screws. The bottom of the upper assembly part 122 is provided with an upper groove, the top of the lower assembly part 123 is provided with a lower groove, the upper groove corresponds to the lower groove, and the upper groove and the lower groove are matched to form a feeding channel 121. Therefore, the feed mechanism 12 is easy to disassemble and assemble, and the upper assembly 122 and the lower assembly 123 of the feed mechanism 12 can be separated, so that the feed channel 121 can be cleaned easily.

Preferably, the replenishment port 141 is provided on the outer periphery of the raw material container 14. In the present invention, the opposite side of the different material container 14 is inner and the opposite side is outer.

The height of the replenishment port 141 is higher than that of the reaction vessel 15, and the end of the charging passage 121 which is disposed obliquely and is close to the raw material vessel 14 is higher than the end which is far from the raw material vessel 14.

The raw material enters the feeding channel 121 through the feeding port 141, and because the feeding channel 121 is obliquely arranged, the raw material slides down under the action of self gravity, thereby entering the reaction vessel 15.

Preferably, the reaction vessel 15 is movably mounted on the crucible 13 with a moving direction being a longitudinal direction.

The crucible apparatus 10 further includes an induction mechanism 19 disposed below the reaction vessel 15. The sensing means 19 is used to detect whether the amount of raw material in the reaction vessel 15 is sufficient, so that the operator can easily determine whether the feeding operation is required.

Specifically, the sensing mechanism 19 includes a support 191, an elastic member 192, and a first photosensor 193. The support member 191 is disposed between the elastic member 192 and the reaction vessel 15, and the support member 191 is provided with a protrusion 194 protruding laterally. The first photosensor 193 may sense a lateral distance between the first photosensor 193 and the support 191.

Specifically, the support 191 is a bar having a height, and a lateral width thereof is equal except for the protrusion 194. The elastic member 192 is a longitudinally extensible member having a certain elasticity, such as a spring.

As the raw material in the reaction vessel 15 is gradually consumed, the pressure thereof against the supporting member 191 and the elastic member 192 is gradually reduced. At this time, the height of the elastic member 192 increases, the support 191 moves upward, the height of the protrusion 194 on the support 191 also increases, and when the protrusion 194 moves to a position corresponding to the first photosensor 193, the first photosensor 193 detects that the lateral distance between the first photosensor 193 and the support 191 decreases, indicating that the raw material in the reaction vessel 15 is insufficient and that the replenishing operation is required.

The reliability of the crucible apparatus 10 can be improved because the sensing mechanism 19 can prevent the sensor from being damaged by a high temperature during vapor deposition in the reaction container 15, as compared with the case where the pressure sensor is provided in the reaction container 15.

Preferably, the sensing mechanism 19 is provided below the reaction vessel 15 located at the deposition position to monitor whether or not the raw material inside the reaction vessel 15 is sufficient in real time during the deposition process.

Preferably, the sensing mechanism 19 further comprises a second photosensor 195. The second photosensor 195 can sense a lateral distance between the second photosensor 195 and the support 191, and the second photosensor 195 is lower than the first photosensor 193. The second photosensor 195 functions to detect whether the raw material in the reaction vessel 15 is sufficient after feeding.

The first photosensor 193 and the second photosensor 195 are both located at the side of the support 191, and the sensing areas of the two are facing the support 191.

Preferably, the sensing mechanism 19 is movable closer to or away from the reaction vessel 15. When the first photoelectric sensor 193 detects that the material feeding operation is required, the sensing mechanism 19 is far away from the reaction vessel 15, so that the crucible 13 can be prevented from impacting the sensing mechanism 19 during the rotation process, and the reliability of the crucible device 10 is improved.

Specifically, the elastic member 192 is mounted on a cylinder, and the sensing mechanism 19 is longitudinally movable by the cylinder to move the sensing mechanism 19 toward or away from the reaction vessel 15.

Referring to fig. 3, an embodiment of the present invention further provides an evaporation apparatus, including an evaporation chamber 20 and an electron gun 30 disposed in the evaporation chamber 20.

The evaporation machine further includes the crucible device 10, the crucible 13 and the rotary table 11 are disposed in the evaporation chamber 20, the electron beam heating region of the electron gun 30 corresponds to the position of the reaction container 15, and the electron gun 30 can heat the reaction container 15 to change the raw material in the reaction container 15 into vapor.

The working process of the evaporation machine in one embodiment of the invention is as follows:

(1) opening the evaporation cavity 20, and adding raw materials into the reaction container 15 and the raw material container 14;

(2) closing the evaporation chamber 20, starting the electron gun 30 to change the raw material in the reaction vessel 15 into steam for evaporation operation;

(3) when the first photosensor 193 senses the projection 194, indicating that the reaction container 15 is short of the raw material, the sensing mechanism 19 moves downward;

(4) the crucible 13 is rotated to move the reaction vessel 15 to the feeding position;

(5) the rotating platform 11 rotates to rotate the corresponding material container 14 to a position where the material replenishing port 141 can be matched with the feeding channel 121;

(6) the pushing member 142 moves in the raw material container 14 under the action of the pushing driving assembly 18 to push the raw material in the raw material container 14 to the material supplement port 141, and the raw material enters the feeding channel 121 from the material supplement port 141;

(7) the raw materials in the feeding channel 121 enter the reaction vessel 15 under the action of gravity;

(8) the crucible 13 is rotated to move the reaction container 15 to the deposition position;

(9) when the sensor 19 is lifted to the initial position and the second photosensor 195 does not detect the protrusion 194, it indicates that the amount of the material to be replenished is insufficient, and the replenishment operation needs to be performed again.

The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.