阅读说明：本技术 加热装置及具有其的共蒸发加热装置 (Heating device and co-evaporation heating device with same ) 是由 黄春泉 牙侯固 陈文锋 于 2019-03-26 设计创作，主要内容包括：本发明公开了一种加热装置,包括：底板、加热组件和散热部,所述散热部具有顶面和侧面,所述散热部的顶面和侧面与所述底板合围,形成散热腔体,所述加热组件包括发热部和接线端,所述发热部和所述接线端连接,所述发热部位于所述散热腔体,所述接线端伸出所述散热腔体。该加热装置可以将发热部散发的热量均匀传递,从而使得该加热装置能够提供分布均匀的热量,从而避免产生热传导不均匀造成的缺陷。(The invention discloses a heating device, comprising: the heating assembly comprises a heating part and a wiring terminal, the heating part is connected with the wiring terminal, the heating part is located in the heat dissipation cavity, and the wiring terminal extends out of the heat dissipation cavity. The heating device can evenly transfer the heat emitted by the heating part, so that the heating device can provide the heat which is evenly distributed, and the defect caused by uneven heat conduction is avoided.)

1. A heating device, comprising: the heating assembly comprises a heating part and a wiring terminal, the heating part is connected with the wiring terminal, the heating part is located in the heat dissipation cavity, and the wiring terminal extends out of the heat dissipation cavity.

2. The heating device of claim 1, wherein the heat generating portion comprises at least two rows of heating wires, the at least two rows of heating wires being connected to each other and arranged in parallel.

3. The heating apparatus of claim 1, further comprising a heat shield disposed on a surface of the base plate adjacent to the heating assembly.

4. The heating device of claim 1, further comprising a positioning member located in the heat dissipation cavity for fixing the heat generating portion to the bottom plate and connecting a top surface of the heat dissipation portion and the bottom plate.

5. The heating device of claim 4, further comprising a locking pin, wherein the locking pin is disposed at two ends of the positioning member for fastening the positioning member to the top surface of the heat dissipating part and the bottom plate.

6. The heating device of claim 1, wherein the top surface material of the heat dissipating portion is a carbon-carbon composite material.

7. The heating device of claim 1, wherein the number of terminals is at least two.

8. A co-evaporative heating apparatus comprising a housing and a heating apparatus as claimed in any one of claims 1 to 7, the heating apparatus being located within the housing.

9. A co-evaporation heating apparatus according to claim 8, comprising an evaporation source for an evaporation process, the evaporation source being located within the housing and being disposed opposite the heating apparatus.

Technical Field

The invention relates to the technical field of equipment manufacturing, in particular to a heating device and a co-evaporation heating device with the same.

Background

In modern industrial production, vacuum technology is more and more widely applied, vacuum equipment is required in production of a plurality of existing products, more and more heating equipment is required in vacuum, and the requirement on temperature control is higher and higher.

The co-evaporation equipment is one of the core devices for manufacturing the solar cell by applying the co-evaporation process. At present evaporation equipment altogether adopts is the resistance wire heating, and the majority uses the direct heat transfer of resistance wire heating to heating member, and this kind of heating method adopts direct heating to lead to heating member heating inhomogeneous on the one hand, and evaporation equipment altogether requires highly to heating member temperature homogeneity, and current heating method can't satisfy the technological requirement. On the other hand, due to the arrangement of the resistance wires, a part of the area may not be effectively heated, thereby causing process defects.

Disclosure of Invention

In order to solve the above technical problem, an aspect of the present invention provides a heating apparatus, including: the heating assembly comprises a heating part and a wiring terminal, the heating part is connected with the wiring terminal, the heating part is located in the heat dissipation cavity, and the wiring terminal extends out of the heat dissipation cavity.

According to the heating device, the bottom plate, the heating assembly and the radiating portion are arranged, the top surface and the side surface of the radiating portion and the bottom plate surround to form the radiating cavity, the heating assembly comprises the heating portion and the wiring end, the heating portion is connected with the wiring end, the heating portion is located in the radiating cavity, and the wiring end extends out of the radiating cavity. Therefore, the power supply can be connected through the wiring end, so that the heating part can radiate heat in the heat radiation cavity; the top surface and the side surface of the heat dissipation part have better heat conduction effect, and heat dissipated by the heat dissipation part can be uniformly transferred, so that the heating device can provide heat which is uniformly distributed, and the defect caused by nonuniform heat conduction is avoided.

Optionally, the heat generating portion includes at least two rows of heating wires, and the at least two rows of heating wires are connected and arranged in parallel.

Optionally, the heating device further comprises a heat insulation plate, wherein the heat insulation plate is arranged on the surface, close to the heating assembly, of the bottom plate.

Optionally, the heat dissipation device further comprises a positioning member, wherein the positioning member is located in the heat dissipation cavity, and is used for fixing the heat generation portion to the bottom plate and connecting the top surface of the heat dissipation portion and the bottom plate.

Optionally, the heat dissipation device further comprises bayonet locks, wherein the bayonet locks are arranged at two ends of the positioning piece and used for fastening the connection between the positioning piece and the top surface of the heat dissipation part and the bottom plate.

Optionally, the top surface material of the heat dissipation part is a carbon-carbon composite material.

Optionally, the number of terminals is at least two.

According to another aspect of the present invention, there is provided a co-evaporation heating apparatus comprising a housing and a heating apparatus as described above, the heating apparatus being located within the housing.

Optionally, an evaporation source for an evaporation process is included, the evaporation source being located within the housing and being disposed opposite the heating device.

Additional features and advantages of the invention will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

Drawings

The accompanying drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the example serve to explain the principles of the invention and not to limit the invention.

Fig. 1 is a schematic structural diagram of a heating device according to an embodiment of the present invention.

Fig. 2 is another schematic structural view of a heating device according to an embodiment of the invention.

Fig. 3 is another schematic structural view of a heating device according to an embodiment of the invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the drawings of the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

Unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features, or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

The heating device 100 according to the embodiment of the present invention is designed as shown in fig. 1, and includes a bottom plate 10, a heating element 20, and a heat dissipation part 30, where the heat dissipation part 30 has a top surface 31 and a side surface 32, the top surface 31 and the side surface 32 of the heat dissipation part 30 surround the bottom plate 10 to form a heat dissipation cavity 40, the heating element 20 includes a heating part 21 and a terminal 22, the heating part 21 is connected to the terminal 22, the heating part 21 is located in the heat dissipation cavity 40, and the terminal 22 extends out of the heat dissipation cavity 40.

According to the heating device 100 of the present invention, the bottom plate 10, the heating element 20 and the heat dissipating part 30 are arranged, the top surface 31 and the side surface 32 of the heat dissipating part 30 surround the bottom plate 10 to form the heat dissipating cavity 40, the heating element 20 comprises the heating part 21 and the terminal 22, the heating part 21 is connected with the terminal 22, the heating part 21 is located in the heat dissipating cavity 40, and the terminal 22 extends out of the heat dissipating cavity 40. Thus, the power supply can be switched on through the terminal 22, so that the heating part 21 radiates heat inside the heat radiation cavity 40; the top surface 31 and the side surface 32 of the heat dissipation part 30 have good heat conduction effect, and can uniformly transfer the heat emitted from the heat generating part 21, so that the heating device 100 can provide uniformly distributed heat, thereby avoiding the defect caused by non-uniform heat conduction.

In the embodiment of the present invention, the top surface 31 and the side surface 32 of the heat dissipation part 30 surround the bottom plate 10 to form the heat dissipation cavity 40. The heat dissipation cavity 40 is a rectangular parallelepiped, the top surface 31 of the heat dissipation portion 30 constitutes a top surface of the rectangular parallelepiped, the side surface 32 of the heat dissipation portion 30 constitutes a side surface of the rectangular parallelepiped, and the bottom plate 10 constitutes a floor of the rectangular parallelepiped. The heat dissipation cavity 40 formed by the top surface 31, the side surfaces 32 and the bottom plate 10 is used for accommodating the heat generating part 21. The heat generating unit 21 is used as a heat generating source of the heating device and is disposed in the heat dissipating cavity 40 to facilitate heat storage and transfer. The terminal 22 of the heating element 20 is disposed outside the heat dissipation chamber 40, so that the heating element 20 can be connected to a power supply, which is beneficial for supplying power to the heating device 100. The top surface 31 of the heat dissipation part 30 can absorb the heat emitted by the heating part 21, and then transfer the heat to the heating member to be directly opposite to the heat dissipation part 30, so that the heat dissipation part 30 avoids the heating part 21 from directly heating the heating member to be treated, and the heat dissipation part 30 can uniformly diffuse the heat emitted by the heating part 21 to the heating member to be treated, so that the heating device 100 can provide the heat with uniform distribution, and the problem of uneven heat conduction is avoided.

In some embodiments, the heat generating portion 21 includes at least two rows of heating wires 211, and the at least two rows of heating wires 211 are connected to each other and arranged in parallel. The heating wire 211 can be made of iron-chromium-aluminum or nickel-chromium electrothermal alloy as heating material of the heating device, and has the advantages of heating after electrification, good heating effect, high heating temperature, long service life, high surface load, good oxidation resistance and the like. At least two rows of heating wires are arranged in parallel, so that the heating area of the heating part 21 can be increased, and the heat radiating part 30 can uniformly heat the to-be-heated member.

In some embodiments, the heating apparatus 100 further comprises an insulation board 50, and the insulation board 50 is disposed on the surface of the base plate 10 adjacent to the heating assembly 20. The heat insulation plate 50 can block the heat emitted from the heat generating part 21 from being radiated to the side of the base plate 10. The heating member to be heated is disposed opposite to the heat dissipation portion 30 and far away from the base plate 10, so that the heat insulation plate 50 is disposed on the surface of the base plate 10 close to the heating assembly 20 to prevent heat loss and protect the base plate 10.

In some embodiments, the heating device 100 further includes a positioning member 60, and the positioning member 60 is located in the heat dissipation cavity 40, and is used for fixing the heat generating portion 21 to the bottom plate 10 and connecting the top surface 31 of the heat dissipating portion 30 and the bottom plate 10. The positioning member 60 plays a role in connection and fixation, and on one hand, the positioning member 60 can position and fix the heat generating portion 21, so as to prevent the heat generating portion 21 from falling off and shifting, thereby affecting the stability of the heating apparatus 100. On the other hand, the positioning member 60 can also fixedly connect the top surface 31 of the heat dissipating part 30 and the bottom plate 10, so that the heating device 100 has higher structural stability.

In some embodiments, the heating apparatus 100 further comprises a locking pin 70, wherein the locking pin 70 is disposed at two ends of the positioning member 60 for fastening the positioning member 60 to the top surface 31 of the heat dissipating part 30 and the bottom plate 10. The bayonet 70 is connected with the positioning piece 60 without falling off or loosening, and the connection stability is higher. Of course, other fixing means for connecting the positioning member 60, the top surface 31 of the heat dissipating part 30 and the base plate 10 may be used. The bayonet 70 is adopted for connection in the embodiment, and the advantages of convenient disassembly, maintenance and maintenance are also provided.

In some embodiments, the top surface 31 of the heat sink 30 is made of a carbon-carbon composite material. Carbon-carbon composites are carbon matrix composites reinforced with carbon fibers and fabrics thereof. The high-strength high-thermal-conductivity high-strength high-specific-modulus heat-insulating material has the advantages of low density, high strength, high specific modulus, high thermal conductivity, low expansion coefficient, high friction performance, high thermal shock resistance, high dimensional stability and the like. The top surface 31 made of the carbon-carbon composite material can uniformly diffuse the heat emitted from the heat generating part 21 to the member to be heated, so that the heating device 100 can provide uniformly distributed heat, thereby avoiding the problem of non-uniform heat conduction.

In addition, the terminals 22 are at least two, which facilitate connection of the positive and negative electrodes of the power supply to supply power to the heating device 100.

The embodiment of the invention also provides a co-evaporation heating device, which comprises a shell, an evaporation source for evaporation process and the heating device, wherein the heating device and the evaporation source are both positioned in the shell, and the evaporation source and the heating device are arranged oppositely. The workpiece to be processed is positioned between the evaporation source and the heating device. The evaporation source can carry out the evaporation process, and heating device can provide even being heated for waiting to add the work piece. The product adopting the co-evaporation heating device has good stability and high quality.

Although the embodiments of the present invention have been described above, the above description is only for the convenience of understanding the present invention, and is not intended to limit the present invention. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.