阅读说明：本技术 沉积源蒸发设备 (Deposition source evaporation equipment ) 是由 安秉九 金京汉 车敏徹 朴在穆 赵源锡 郑基菜 赵渊衡 于 2020-02-24 设计创作，主要内容包括：公开了一种沉积源蒸发设备。该沉积源蒸发设备包括：坩埚组,用于容纳沉积源；喷射单元,位于坩埚组上；加热器,位于坩埚组中用于加热坩埚组以通过喷射单元蒸发沉积源；以及防热辐射板,围绕喷射单元以阻挡喷射单元的侧面的热辐射。坩埚单元和防热辐射板中的至少一个包括碳纤维复合材料。(Disclosed is a deposition source evaporation apparatus. The deposition source evaporation apparatus includes: a crucible set for accommodating a deposition source; the spraying unit is positioned on the crucible set; a heater positioned in the crucible set for heating the crucible set to evaporate the deposition source through the injection unit; and a heat radiation prevention plate surrounding the spray unit to block heat radiation of a side of the spray unit. At least one of the crucible unit and the heat radiation prevention plate includes a carbon fiber composite material.)

1. A deposition source evaporation apparatus, comprising:

a first crucible set for accommodating a deposition source;

the spraying unit is positioned on the first crucible group;

a heater in the first crucible set for heating the first crucible set to evaporate the deposition source by the injection unit; and

a heat radiation prevention plate surrounding the injection unit for blocking heat radiation of a side of the first crucible group,

wherein at least one of the first crucible set and the heat radiation prevention plate comprises a carbon fiber composite material.

2. The deposition source evaporation apparatus of claim 1, wherein the carbon fiber composite material comprises carbon fiber particles and a first carbon-based resin.

3. The deposition source evaporation apparatus of claim 2, wherein the carbon fiber particles comprise at least one of carbon fiber debris and carbon fiber powder.

4. The deposition source evaporation apparatus of claim 2, wherein an inner gap of the carbon fiber composite material is filled with a second carbon-based resin.

5. The deposition source evaporation apparatus according to claim 1, wherein the heat radiation prevention plate is a single body, and wherein a length of the single body is greater than a half of a length of the deposition source evaporation apparatus.

6. The deposition source evaporation apparatus according to claim 1,

wherein the first crucible set includes: an inner crucible for accommodating the deposition source; an outer crucible containing the inner crucible and configured to transfer heat from the heater to the inner crucible; a housing accommodating the outer crucible and the heater; a cooling jacket accommodating the housing; and a coolant circulation unit on the cooling jacket and

wherein at least one of the inner crucible, the outer crucible, and the shell comprises the carbon fiber composite.

7. The deposition source evaporation apparatus according to claim 6, wherein the inner crucible is a single body having a single accommodation space, and wherein a length of the single accommodation space is greater than half of a length of the deposition source evaporation apparatus.

8. The deposition source evaporation apparatus according to claim 6, wherein the first crucible group further includes a heat radiation plate on an inner wall of the casing, and wherein the heat radiation plate includes the carbon fiber composite material.

9. The deposition source evaporation apparatus according to claim 8, wherein the casing, the heat radiation plate, and the outer crucible are an integral body formed of the same material.

10. The deposition source evaporation apparatus according to claim 1, further comprising:

a first plurality of injection units located on the first crucible set and including the injection units;

a second crucible set; and

a second plurality of spray units located on the second crucible set and being a mirror image of the first plurality of spray units.

Technical Field

Background

In a process of manufacturing a thin film, such as a thin film of an organic light emitting display device, a deposition operation may be performed. In a deposition operation, a deposition source is evaporated to enable material to adhere to a substrate surface. A mask may be placed on the substrate and the vapor of the material may pass through one or more openings of the mask to form a desired pattern of the thin film on the substrate.

Disclosure of Invention

According to the embodiment, the temperature may be in the range of 1100 degrees celsius to 1300 degrees celsius during evaporation of the deposition source, and the evaporation apparatus may reliably and continuously perform evaporation at a high temperature for producing a satisfactory amount of thin film. Advantageously, the deposition quality can be optimized, and the production efficiency of the thin film can be optimized.

Drawings

Fig. 1 is a diagram illustrating a deposition operation using a deposition source evaporation apparatus according to an embodiment.

Fig. 2 is a perspective view of the deposition source evaporation apparatus shown in fig. 1 according to an embodiment.

Fig. 3 is a disassembled (or exploded) perspective view of the deposition source evaporation apparatus shown in fig. 2, according to an embodiment.

Fig. 4A is a flowchart of steps in a method of manufacturing the deposition source evaporation apparatus shown in fig. 2 according to an embodiment.

Fig. 4B is an image of carbon fiber chips and carbon fiber powder according to an example embodiment.

Fig. 5A and 5B are schematic views illustrating a vacuum evacuation operation and an immersion operation in the manufacture of a deposition source evaporation apparatus according to an embodiment.

Fig. 6 is a disassembled perspective view illustrating a deposition source evaporation apparatus according to an embodiment.

Fig. 7 is a perspective view illustrating a deposition source evaporation apparatus according to an embodiment.

Fig. 8 is a cross-sectional view illustrating the target substrate shown in fig. 1 according to an embodiment.

Embodiments may relate to a deposition source evaporation apparatus. The apparatus may be capable of performing a deposition operation at a high temperature for a long time.

According to one or more embodiments, a deposition source evaporation apparatus includes: a crucible unit accommodating the deposition source and having an injection unit on one side; a heater heating the crucible unit to evaporate the deposition source through the injection unit; and a heat radiation prevention plate that suppresses heat radiation through a side of the spray unit, wherein a material of any one of the crucible unit and the heat radiation prevention plate includes a carbon fiber composite material.

The carbon fiber composite material may include a material obtained by compressing and hardening a product of mixing carbon fiber particles with a first carbon-based resin.

The carbon fiber particles may include any of chopped chips or ground powder of carbon fibers.

The inner gap of the carbon fiber composite material may be filled with the second carbon-based resin by being impregnated with the second carbon-based resin and then hardened.

The heat radiation prevention plate may be a single body.

The crucible unit may include an inner crucible accommodating the deposition source, an outer crucible accommodating the inner crucible and heated by the heater, a housing accommodating the outer crucible and the heater, and a cooling jacket accommodating the housing and having a coolant circulation unit, the materials of the inner crucible, the outer crucible, and the housing including a carbon fiber composite material.

The inner crucible may be a single body having a single receiving space.

The inner wall of the case may be mounted with a heat radiation plate including a carbon fiber composite material.

The housing, the heat radiation plate and the outer crucible may be an integral body.

The deposition source evaporation apparatus may include a pair of crucible units in which the spray units are symmetrically arranged, and a pair of heaters and a pair of heat radiation prevention plates installed in the crucible units, respectively.