阅读说明：本技术 一种多模式调制弧源装置 (Multi-mode modulation arc source device ) 是由 郎文昌 朱豪威 胡晓忠 于 2020-05-15 设计创作，主要内容包括：本发明属于电弧离子镀技术关键部件阴极弧源装备领域,具体是指一种多模式调制弧源装置,包括弧头组件、引弧组件、安装板,弧头组件与引弧组件均固定在安装板上；弧头组件与安装板之间设有绝缘密封组件,弧头组件与安装板之间形成密封腔室；弧头组件包括阴极座、阴极盖,阴极座、阴极盖可拆卸安装组成阴极组件；阴极座远离阴极盖的一侧表面上设有靶材安装部,靶材安装部内连接有靶材；阴极座与阴极盖之间设有水冷内腔；阴极座及阴极盖上可分别装配不同模式的永磁体组,可有效控制靶面的磁场强度,提升弧光放电过程中弧斑的运动速度,从而可以有效的降低弧光放电过程中的大颗粒。(The invention belongs to the field of cathode arc source equipment of key components of an arc ion plating technology, and particularly relates to a multi-mode modulation arc source device which comprises an arc head component, an arc striking component and a mounting plate, wherein the arc head component and the arc striking component are fixed on the mounting plate; an insulating sealing assembly is arranged between the arc head assembly and the mounting plate, and a sealing cavity is formed between the arc head assembly and the mounting plate; the arc head assembly comprises a cathode seat and a cathode cover, and the cathode seat and the cathode cover are detachably mounted to form a cathode assembly; a target mounting part is arranged on the surface of one side of the cathode base, which is far away from the cathode cover, and a target is connected in the target mounting part; a water-cooling inner cavity is arranged between the cathode base and the cathode cover; the permanent magnet group that can assemble different modes on negative pole seat and the negative pole lid respectively can the effective control target surface's magnetic field intensity, promotes the rate of motion of arc spot among the arc discharge process to large granule among the reduction arc discharge process that can be effectual.)

1. A multi-mode modulated arc source device, characterized by: the arc head assembly comprises an arc head assembly (1), an arc striking assembly (2) and a mounting plate (3), wherein the arc head assembly (1) and the arc striking assembly (2) are fixed on the mounting plate (3);

an insulating sealing assembly is arranged between the arc head assembly (1) and the mounting plate (3), and a sealing cavity is formed between the arc head assembly (1) and the mounting plate (3) through the insulating sealing assembly;

the arc head assembly (1) comprises a cathode base (11) and a cathode cover (12), wherein the cathode base (11) and the cathode cover (12) are detachably mounted to form a cathode assembly; a target mounting part (111) is arranged on the surface of one side, away from the cathode cover (12), of the cathode base (11), and a target (15) is connected in the target mounting part (111);

a plurality of permanent magnet mounting holes (131) which are annularly arranged are formed between the cathode base (11) and the cathode cover (12), permanent magnets are detachably mounted in the permanent magnet mounting holes (131), and the permanent magnet mounting holes (131) are all located on the periphery of the projection position of the target mounting part (111);

one side surface of the cathode cover (12) far away from the cathode base (11) is detachably provided with a permanent magnet mounting piece (132), a permanent magnet is detachably mounted between the permanent magnet mounting piece (132) and the cathode cover (12), and the permanent magnet between the permanent magnet mounting piece (132) and the cathode cover (12) is located in the region of the projection position of the target mounting part (111).

2. The multi-mode modulated arc source device of claim 1, wherein: a water-cooling inner cavity (18) is arranged between the cathode base (11) and the cathode cover (12); a partition plate (181) is arranged in the water-cooling inner cavity (18), the partition plate (181) partitions the water-cooling inner cavity (18) to form a spiral water channel, and two ends of the water channel are close to the center of the cathode base (11); the cathode cover (12) comprises a cathode cover main body (124) and a water inlet pipe (121) and a water outlet pipe (122) which are arranged on the surface of one side, away from the cathode base (11), of the cathode cover main body (124), wherein the water inlet pipe (121) and the water outlet pipe (122) are arranged corresponding to the two ends of the water channel, and two through holes are formed in the cathode cover main body (124) to enable the water inlet pipe (121) and the water outlet pipe (122) to be communicated with the two ends of the water channel respectively.

3. The multi-mode modulated arc source device of claim 2, wherein: one side surface that negative pole seat (11) was kept away from in negative pole lid main part (124) is equipped with adapter sleeve (123), inlet tube (121) and outlet pipe (122) are located the inner chamber of adapter sleeve (123), be equipped with the mounting hole on mounting panel (3), the mounting hole is passed in adapter sleeve (123), permanent magnet installed part (132) cover is established outside adapter sleeve (123) and is located between negative pole lid main part (124) and mounting panel (3).

4. The multi-mode modulated arc source device of claim 3, wherein: the mounting plate (3) is provided with a mounting hole, the connecting sleeve (123) penetrates through the mounting hole, and the insulating and sealing assembly comprises an insulating plate (141), a sealing ring (142), a sealing sleeve (143) and a compression nut (144);

the insulating plate (141) and the sealing ring (142) are concentrically overlapped and arranged between the cathode assembly and the mounting plate (3);

the outer wall of the end part, far away from the cathode cover main body (124), of the connecting sleeve (123) is provided with threads, the sealing ring (142) is an L-shaped sealing element, the sealing ring (142) is sleeved outside the connecting sleeve (123) and is in threaded connection with the connecting sleeve (123) through a compression nut (144) to compress the sealing ring (142).

5. The multi-mode modulated arc source device of claim 1, wherein: still include shielding assembly, shielding assembly includes cathode washer (161), cathode washer (161) cover establish target (15) outer and with cathode assembly fixed connection, cathode washer (161) inboard suit target shield ring (163), outer loop suit cathode shield ring (164), keep away from one side fixed connection shielding clamp plate (162) of cathode assembly, shielding clamp plate (162) form limiting displacement to target shield ring (163) and cathode shield ring (164), shielding clamp plate (162), target shield ring (163), cathode shield ring (164) are insulating material and make.

6. A multimode modulating arc source device as claimed in any one of claims 1 to 5, characterized in that: one side of the mounting plate (3) provided with the sealing cavity is provided with a dust cover (19), and the dust cover (19) is sleeved outside the arc head assembly (1).

7. The multi-mode modulated arc source device of claim 6, wherein: the mounting plate (3) can be detachably provided with electromagnetic coils (17) with at least three sizes;

defining the radius of the target material as r₁The outer diameter of the dust cover is r₂；

At least one electromagnetic coil (17) having an outer diameter < r₁；

At least one electromagnetic coil (17) having an inner diameter > r₁And the outer diameter is less than or equal to r₂；

At least one electromagnetic coil (17) having an inner diameter greater than r₂。

8. The multi-mode modulated arc source device of claim 7, wherein: the electromagnetic coil (17) is loaded with controllable multi-waveform alternating current or linear adjustment programmable square wave current.

9. The multi-mode modulated arc source device of claim 7, wherein: arc ignition subassembly (2) are including drive assembly, arc ignition pole (21), arc ignition needle (22), bracket component, the bracket component is connected mounting panel (3) is for the opposite side of sealed cavity, drive assembly fixes on the bracket component, arc ignition pole (21) one end is connected with the bracket component, and the other end passes mounting panel (3) and connects arc ignition needle (22), drive assembly can drive arc ignition pole (21) along linear motion and can drive arc ignition pole (21) rotary motion.

10. The multi-mode modulated arc source device of claim 1, wherein: and a direct current power supply or a pulse arc power supply is loaded on the cathode, wherein the pulse arc power supply has the following specific parameters: the base current is adjustable at 20-100A, the peak current is adjustable at 100-1000A, the frequency is adjustable at 1-1kHZ, and the duty ratio is adjustable at 1-80%.

Technical Field

The invention belongs to the field of cathode arc source equipment of key components of an arc ion plating technology, and particularly relates to a multi-mode modulation arc source device.

Background

The arc ion plating technology is an advanced vacuum plating technology at present, and due to a series of advantages of simple structure, high ionization rate, high incident particle energy, good diffraction, realization of low-temperature deposition and the like, the arc ion plating technology is rapidly developed and widely applied, and shows great economic benefit and industrial application prospect. However, the large particle spray causes the surface pollution of the film, causes the roughness of the surface to be increased, reduces the gloss of the film, brings adverse effects on decoration and wear resistance application, seriously affects the quality of the film, causes the adhesion of a plating layer to be reduced, causes the peeling phenomenon to occur, and causes the plating layer to be seriously uneven. However, the characteristics of arc discharge cause the existence of large particles to be the obstacle of tool and die plating and also to be the bottleneck problem that the arc ion plating technology is deeply and widely applied.

The conventional arc source at the present stage cannot be well applied to materials with partial discharge abnormality, such as: graphite is used as a common conductive low-friction material, which is a base material for preparing superhard diamond-like carbon which is conductive and has certain frictional wear, but when the graphite target material is subjected to arc discharge, the resistance temperature coefficient is negative, the higher the temperature is, the lower the resistance is, the impedance of cathode and anode discharge plasma can be reduced, so that cathode arc spots are easy to stand still in the discharge process, and the defects of arc spot aggregation, low movement speed and obvious etching pits exist; the nitride and oxide of pure metal zirconium have bright metallic luster, and are surface coating materials with relatively common decoration and functionality (ceramic-based materials), but zirconium is different from common targets (chromium and titanium) in the arc discharge process, and is extremely sensitive to an electronic channel in the discharge process, and arc spots are easy to generate an arc running phenomenon in the discharge process, so that part of insulators are damaged and burnt.

At present, the measure for removing large particles which is more applied and has better effect is magnetic filtration, the adoption of the magnetic filtration technology effectively eliminates the pollution of the large particles, but the loss of plasma in the transmission process also greatly reduces the deposition rate, the highest transmission efficiency of the plasma is only 25 percent at present, which causes the waste of raw materials and the reduction of production efficiency, the advantage of arc ion plating is that the deposition rate is high, which is one of the reasons that the technology is widely applied in the industrial field, the outstanding advantage that the large particles cannot be lost for reducing partial large particles is also an important reason that the magnetic filtration technology cannot be industrialized.

The effective way for effectively utilizing the arc source target at the present stage is mainly to control the motion area of the arc spot through the change of a magnetic field by manually adjusting the distance between a single magnetic group and the surface of the target, and the mode is manual empirical operation, so that certain uncontrollable property exists and the operation is complicated; the other effective way is that the electromagnetic coil controls the movement of the arc spot of the arc target, but the output voltage and the frequency of the common electromagnetic coil are not adjustable, most of the common electromagnetic coil is only pulse output under a certain frequency, and the linear stepless adjustment of the output voltage and the frequency cannot be realized.

Disclosure of Invention

The invention aims to overcome the defects of the prior art and provide a multi-mode modulation arc source device.

The technical scheme adopted by the invention is as follows: a multi-mode modulation arc source device comprises an arc head component, an arc striking component and a mounting plate, wherein the arc head component and the arc striking component are fixed on the mounting plate;

an insulating sealing assembly is arranged between the arc head assembly and the mounting plate, and a sealing cavity is formed between the arc head assembly and the mounting plate through the insulating sealing assembly;

the arc head assembly comprises a cathode base and a cathode cover, and the cathode base and the cathode cover are detachably mounted to form a cathode assembly; a target mounting part is arranged on the surface of one side, away from the cathode cover, of the cathode base, and a target is connected in the target mounting part; a water-cooling inner cavity is arranged between the cathode base and the cathode cover;

a plurality of permanent magnet mounting holes which are annularly arranged are arranged between the cathode base and the cathode cover, permanent magnets are detachably mounted in the permanent magnet mounting holes, and the permanent magnet mounting holes are all positioned on the periphery of the target projection position;

the permanent magnet installation part is detachably installed on the surface of one side, away from the cathode base, of the cathode cover, the permanent magnet is detachably installed between the permanent magnet installation part and the cathode cover, and the permanent magnet between the permanent magnet installation part and the cathode cover is located in the area where the target projection position is located.

A partition plate is arranged in the water-cooling inner cavity, the partition plate divides the water-cooling inner cavity into spiral water channels, and two ends of each water channel are close to the center of the cathode base; the cathode cover comprises a cathode cover main body, and a water inlet pipe and a water outlet pipe which are arranged on one side surface of the cathode cover main body far away from the cathode seat, wherein the water inlet pipe and the water outlet pipe are arranged corresponding to two ends of the water channel, and the cathode cover main body is provided with two through holes so that the water inlet pipe and the water outlet pipe are respectively communicated with two ends of the water channel.

The utility model discloses a cathode structure, including cathode cover main part, inlet tube and outlet pipe, the one side surface that cathode base was kept away from to cathode cover main part is equipped with the adapter sleeve, inlet tube and outlet pipe are located the inner chamber of adapter sleeve, be equipped with the mounting hole on the mounting panel, the adapter sleeve passes the mounting hole, the permanent magnet installed part cover is established outside the adapter sleeve and is located between cathode cover main part and the mounting panel.

The insulating sealing component comprises an insulating plate, a sealing ring, a sealing sleeve and a compression nut;

the insulating plate and the sealing ring are concentrically overlapped and arranged between the cathode assembly and the mounting plate;

the end part outer wall of the connecting sleeve, which is far away from the cathode cover main body, is provided with threads, the sealing ring is an L-shaped sealing element, the sealing ring is sleeved outside the connecting sleeve and is connected with the connecting sleeve threads through a compression nut to compress the sealing ring.

Still include shielding assembly, shielding assembly includes the cathode packing ring, the cathode packing ring cover establish outside the target and with cathode assembly fixed connection, the inboard suit target shield ring of cathode packing ring, outer loop suit cathode shield ring, one side fixed connection shielding clamp plate of keeping away from cathode assembly, the shielding clamp plate forms limiting displacement to target shield ring and cathode shield ring, shielding clamp plate, target shield ring, cathode shield ring are insulating material and make.

One side of the mounting plate, which is provided with the sealing cavity, is provided with a dust cover, and the dust cover is sleeved outside the arc head assembly.

The mounting plate can be detachably provided with at least three sizes of electromagnetic coils;

defining the radius of the target material as r₁The outer diameter of the dust cover is r₂；

At least one electromagnetic coil with an outer diameter < r₁；

At least one electromagnetic coil having an inner diameter > r₁And the outer diameter is less than or equal to r₂；

At least one electromagnetic coil with inner diameter greater than r₂。

The electromagnetic coil is loaded with controllable multi-waveform alternating current or linearly adjusted and programmable square wave current.

The striking subassembly includes drive assembly, striking pole, striking needle, bracket component, the bracket component is connected the mounting panel is for sealed cavity's opposite side, drive assembly fixes on the bracket component, striking pole one end is connected with the bracket component, and the other end passes the mounting panel and connects the striking needle, drive assembly can drive the striking pole along linear motion and can drive striking pole rotary motion.

And a direct current power supply or a pulse arc power supply is loaded on the cathode, wherein the pulse arc power supply has the following specific parameters: the base current is adjustable at 20-100A, the peak current is adjustable at 100-1000A, the frequency is adjustable at 1-1kHZ, and the duty ratio is adjustable at 1-80%.

The invention has the following beneficial effects: the permanent magnet group that can assemble different modes on negative pole seat and the negative pole lid respectively can the effective control target surface's magnetic field intensity, promotes the rate of motion of arc spot among the arc discharge process to large granule among the reduction arc discharge process that can be effectual.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is within the scope of the present invention for those skilled in the art to obtain other drawings based on the drawings without inventive exercise.

FIG. 1 is a schematic structural view of an arc head assembly and an arc striking assembly mounted on a mounting plate;

FIG. 2 is a schematic structural view of a cathode assembly;

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;

FIG. 4 is a cross-sectional view taken along line B-B of FIG. 2;

FIG. 5 is a schematic structural view of a cathode base;

FIG. 6 is a cross-sectional view of the arc head assembly;

FIG. 7 is an enlarged view of A in FIG. 6;

FIG. 8 is a schematic structural view of an arc striking assembly;

FIG. 9 is an enlarged view of A in FIG. 8;

in fig. 10, (a) is a structure of the guide groove; (b) the structure is another structure of the guide groove;

FIG. 11 is an enlarged view of B in FIG. 8;

FIG. 12 is a schematic view of a structure (a) and a magnetic field simulation (b) of a permanent magnet placed laterally;

FIG. 13 is a schematic diagram of the structure of a center-enhanced magnetic field (a) and a magnetic field simulation (b); a magnetic field simulation schematic diagram of a longitudinally-placed permanent magnet;

FIG. 14 is a schematic view of the structure of the arc boosting magnetic field (a) and a schematic view of the simulation of the magnetic field (b);

FIG. 15 is a schematic of the coil current mode 1 output;

FIG. 16 is a schematic view of a stack of multiple sets of electromagnetic coils;

fig. 17 is a schematic view (a) of the structure of a longitudinally placed permanent magnet and a schematic view (b) of magnetic field simulation;

FIG. 18 is a schematic diagram of the structure of an electromagnetically enhanced magnetic field (a) and a schematic diagram of a magnetic field simulation (b);

FIG. 19 is a schematic of the coil current mode 2 output;

figure 20 is a schematic diagram of pulsed arc power supply output.

In the figure, the position of the upper end of the main shaft,

1, an arc head assembly; 11, a cathode base; 111, a target mounting portion; 12, a cathode cap; 121, a water inlet pipe; 122, water outlet pipe; 123, connecting sleeves; 124, a cathode cap body; 131, permanent magnet mounting holes; 132, a permanent magnet mount; 141, an insulating plate; 142, a sealing ring; 143, sealing sleeve; 144, a compression nut; 15, a target material; 161, a cathode gasket; 162, a shielding pressure plate; 163, target shield ring; 164, a cathode shield ring; 17, an electromagnetic coil; 18, water cooling the inner cavity; 181, a partition plate; 19, a dust cover;

2, an arc striking component; 21, an arc striking rod; 2101 bolt holes; 2102, an ignition pin mounting hole; 2103, a guide groove; 2104, a rotation guide groove; 2105, a power connection region; 2106, an insulating region; 22, an arc striking needle; 23, a linear driving device; 24, a guide post; 25, joint ball bearings; 26, a bracket; 261, a shaft shoulder; 27, sealing the sleeve; 2701, shoulder encircling; 28, a first oil seal; 29, a second oil seal; 210, fixing bolts; 211, a frame; 212, a target material;

and 3, mounting the plate.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail with reference to the accompanying drawings.

It should be noted that all expressions using "first" and "second" in the embodiments of the present invention are used for distinguishing two entities with the same name but different names or different parameters, and it should be noted that "first" and "second" are merely for convenience of description and should not be construed as limitations of the embodiments of the present invention, which are not described in any more detail in the following embodiments.

The terms of direction and position of the present invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "top", "bottom", "side", etc., refer to the direction and position of the attached drawings. Accordingly, the use of directional and positional terms is intended to illustrate and understand the present invention and is not intended to limit the scope of the present invention.

As shown in fig. 1, a multi-mode modulation arc source device comprises an arc head assembly 1, an arc striking assembly 2 and a mounting plate 3, wherein the arc head assembly 1 and the arc striking assembly 2 are both fixed on the mounting plate 3;

an insulating sealing assembly is arranged between the arc head assembly 1 and the mounting plate 3, and a sealing cavity is formed between the arc head assembly 1 and the mounting plate 3 through the insulating sealing assembly;

as shown in fig. 2-4, the arc head assembly 1 includes a cathode base 11 and a cathode cover 12, and the cathode base 11 and the cathode cover 12 are detachably mounted to form a cathode assembly; a target mounting part 111 is arranged on the surface of one side of the cathode base 11, which is far away from the cathode cover 12, and a target 15 is connected in the target mounting part 111; a water-cooling inner cavity 18 is arranged between the cathode base 11 and the cathode cover 12;

a plurality of permanent magnet mounting holes 131 which are annularly arranged are arranged between the cathode base 11 and the cathode cover 12, permanent magnets are detachably mounted in the permanent magnet mounting holes 131, and the permanent magnet mounting holes 131 are all positioned on the periphery of the projection position of the target 15;

a permanent magnet mounting piece 132 is detachably mounted on the surface of one side of the cathode cover 12 away from the cathode base 11, a permanent magnet is detachably mounted between the permanent magnet mounting piece 132 and the cathode cover 12, and the permanent magnet between the permanent magnet mounting piece 132 and the cathode cover 12 is located in the region where the target 15 is projected. The permanent magnet mounting member 132 is made of an insulating material, and may be made of: nylon, tetrafluoro, and polyphenyl ester, preferably tetrafluoro.

Permanent magnets in the transverse direction (the magnetic field direction is the radial direction of the target material) or the longitudinal direction (the magnetic field direction is perpendicular to the target surface) can be placed in the permanent magnet mounting holes 131, and annular magnetic shoes composed of a plurality of permanent magnets in the transverse direction (the magnetic field direction is the radial direction of the target material) can be placed on the permanent magnet mounting pieces 132, or a single permanent magnet in the longitudinal direction (the magnetic field direction is perpendicular to the target surface) can be placed, or annular magnetic shoes composed of a plurality of permanent magnets in the longitudinal direction (the magnetic field direction is perpendicular to the target surface). Mutually support and to form the magnetic field of multi-mode, the magnetic field intensity of effective control target surface promotes the velocity of motion of arc spot among the arc discharge process to large granule among the reduction arc discharge process that can be effectual.

In the figure, the target mounting portion 111 is a groove, and the target 15 is mounted in the target mounting portion 111 by a screw connection method.

A partition board 181 is arranged in the water-cooling inner cavity 18, the partition board 181 partitions the water-cooling inner cavity 18 into spiral water channels, and two ends of each water channel are close to the center of the cathode base 11; the cathode cover 12 includes a cathode cover main body 124, and an inlet tube 121 and an outlet tube 122 disposed on a side surface of the cathode cover main body 124 away from the cathode base 11, wherein the inlet tube 121 and the outlet tube 122 are disposed corresponding to two ends of the water channel, and two through holes are disposed on the cathode cover main body 124 to enable the inlet tube 121 and the outlet tube 122 to be respectively communicated with two ends of the water channel. The partition board 181 can realize high-speed flow of cooling water in the cathode in the water-cooling inner cavity 18, and the water-cooling heat dissipation effect is better.

As shown in fig. 5, in the drawing, a circular groove is provided on the back of the cathode base 11, when the cathode base is connected to the cathode cover 12, a water-cooling cavity 18 is formed in the inner space of the circular groove, the partition 181 protrudes from the bottom of the circular groove to partition the water-cooling cavity 18 formed by connecting the cathode cover 12 into a spiral water channel, and both ends of the water channel are located at the center of the water-cooling cavity 18, and water is fed and discharged through a water inlet pipe 121 and a water outlet pipe 122 provided on the cathode cover 12, and both ends of the water channel are located at the center of the water-cooling cavity 18, so that the water inlet pipe 121 and the water outlet. The permanent magnet mounting holes 131 are annularly arranged outside the circular groove.

The cathode base 11 is provided with a plurality of screw holes, and the screw holes are detachably mounted on the cathode cover main body 124 through bolts, so that the permanent magnets of the permanent magnet mounting holes 131 can be replaced.

As shown in fig. 3, a connecting sleeve 123 is disposed on a side surface of the cathode cover main body 124 away from the cathode base 11, the water inlet pipe 121 and the water outlet pipe 122 are located in an inner cavity of the connecting sleeve 123, a mounting hole is disposed on the mounting plate 3, the connecting sleeve 123 penetrates through the mounting hole, and the permanent magnet mounting member 132 is sleeved outside the connecting sleeve 123 and is located between the cathode cover main body 124 and the mounting plate 3.

The mounting plate 3 is provided with a mounting hole, the connecting sleeve 123 penetrates through the mounting hole, and the insulating and sealing assembly comprises an insulating plate 141, a sealing ring 142, a sealing sleeve 143 and a compression nut 144;

the insulating plate 141 and the sealing ring 142 are concentrically overlapped and arranged between the cathode assembly and the mounting plate 3;

the outer wall of the end portion, away from the cathode cover main body 124, of the connecting sleeve 123 is provided with a thread, the sealing ring 142 is an L-shaped sealing element, the sealing ring 142 is sleeved outside the connecting sleeve 123, and the sealing ring 142 is connected with the connecting sleeve 123 through a compression nut 144 in a threaded manner and is compressed. The insulating seal assembly consisting of the insulating plate 141, the seal ring 142, the seal sleeve 143 and the gland nut 144 enables the cathode assembly to be connected with the mounting plate more conveniently and has good sealing effect, the vacuum sealing of the whole assembly is realized, and when the gland nut 144 is screwed, the seal ring 142 and the seal sleeve 143 are extruded, so that the sealing effect is good. The provision of the insulating plate 141 ensures that the distance for the permanent magnet attachment 132 remains between the cathode cover body 124 and the mounting plate 3 when the compression nut 144 is tightened. The insulating plate 141 is a sealing structure insulator, and the material thereof includes nylon, polytetrafluoroethylene, polyphenyl ester, etc., preferably polyphenyl ester.

Still include shielding assembly, shielding assembly includes cathode washer 161, cathode washer 161 cover establish outside target 15 and with cathode assembly fixed connection, cathode washer 161 inboard suit target shield ring 163, outer loop suit cathode shield ring 164, keep away from one side fixed connection shielding clamp plate 162 of cathode assembly, shielding clamp plate 162 forms limiting displacement to target shield ring 163 and cathode shield ring 164, shielding clamp plate 162, target shield ring 163, cathode shield ring 164 are insulating material and make. The shielding pressing plate 162, the target shielding ring 163 and the cathode shielding ring 164 are wrapped by the cathodes completely, so that the cathodes can be completely shielded, complete isolation between the cathodes and the anodes is realized, abnormal discharge channels between the cathodes and the anodes are effectively reduced, arc leakage can be reduced, and particularly, the discharge stability is greatly improved for some abnormal discharge materials. Meanwhile, the motion stroke of electrons can be effectively improved by fully coating the cathode by the component formed by the insulating part, so that the ionization rate of arc discharge can be improved, and the coating quality can be improved; meanwhile, the arc running and short circuit phenomena caused by partial exposure of the anode in the arc discharge can be completely isolated (electrons always form an electronic path from the place with the minimum circuit impedance in an electronic circuit preferentially, when the anode or the cathode is partially exposed, the electronic path is possibly formed in the discharge process, so the arc running can be generated, the arc running is serious, and the target burning, the carbonization of an insulating part and the like can be generated). Specifically, the shield pressing plate 162, the target shield ring 163, and the cathode shield ring 164 are all ceramic insulators, which are high temperature resistant ceramics, and are made of silicon nitride, boron nitride, aluminum oxide, boron carbide, zirconium oxide, preferably aluminum oxide.

One side of the mounting plate 3, which is provided with the sealing cavity, is provided with a dust cover 19, and the dust cover 19 is sleeved outside the arc head assembly 1. In the figure, the dust cover 19 is fitted with a sealing ring, which can be either bolt-fastened or a bayonet combination, and in the figure, the bayonet combination is connected.

The mounting plate 3 can be detachably provided with at least three sizes of electromagnetic coils 17;

defining the radius of the target as r1 and the outer diameter of the dust cover as r 2;

at least one electromagnetic coil 17 having an outer diameter < r 1;

at least one electromagnetic coil 17 having an inner diameter > r1 and an outer diameter no greater than r 2;

at least one of the electromagnetic coils 17 has an inner diameter larger than r 2.

When the inner diameter of the electromagnetic coil is the outer diameter of the sealing sleeve and the outer diameter of the electromagnetic coil is smaller than the diameter of the target surface, the coil is a central magnetic shoe to enhance the magnetic field, so that the electromagnetic intensity of the central magnetic field can be effectively improved, the intensity of a horizontal magnetic field is further improved, and the magnetic field intensity in the vertical direction in front of the target surface is increased, thereby being beneficial to increasing the moving speed of arc spots on the one hand, and being beneficial to improving the ionization effect of electrons far away from the target surface and the plasma intensity on the other hand; when the inner diameter of the electromagnetic coil is larger than the diameter of the target surface and the outer diameter of the electromagnetic coil is smaller than or equal to the outer diameter of the dust cover, the electromagnetic coil can flatten the magnetic field, widen a discharge channel in the arc discharge process and improve the utilization rate of the target material; when the inner diameter of the electromagnetic coil is larger than the outer diameter of the dust cover, the magnetic field intensity in the sealed cavity can be enhanced by the magnetic field of the electromagnetic coil (the magnetic field can extend to the rotating frame), the diffraction path of electrons is effectively enhanced, and the plasma ionization rate in the space is improved. The subassembly that the permanent magnet formed and solenoid mutually support, effectively promote the target utilization ratio.

The electromagnetic coil 17 is loaded with controllable multi-waveform alternating current or linear adjustment programmable square wave current. Wherein the controllable multi-waveform alternating current: the voltage is set arbitrarily at +/-40 v, the duty ratio is adjustable at 1-80%, the frequency is 0.01-1kHZ adjustable direct current bias triangular wave, sawtooth wave, half sine wave, sine wave or other forms of alternating current, the amplitude of the alternating current voltage is adjustable arbitrarily, and the amplitude of the bias current voltage is adjustable. The linear regulation programmable control square wave current is the square wave current which can realize various linear output changes in a short term and has an ordered long-term period, and the linear regulation programmable control square wave current has two modes, wherein the mode 1 is the square wave current which has the frequency of 0.01-1kHZ, the voltage of +/-40 v, the duty ratio of 1-80% and the change period of each group of voltage of 1-30min and can realize the remote linear periodic regulation of the output voltage; mode 2 is an arbitrary voltage program that can be periodically operated, the voltage amplitude and the operation time of each segment can be arbitrarily set in a period, and a group of program streams are formed by setting different voltage amplitudes and operation times, and the program streams can be periodically operated. The voltage setting range is-60 v- +60v, and the running time precision is 0.001 s. And each group of the periods can be programmed with 0-1000 segments. The set of commands that can be set is 100 sets, each of which can be remembered and called separately. The multi-waveform alternating current can realize the change of the magnetic field intensity of the electromagnetic coil through the selection of different waveforms and output voltages, so as to improve or weaken the magnetic field intensity of the target surface, and further realize the change of the motion trail of the arc spots of the target surface; the linear programmable control square wave current has two mode currents which can be adjusted according to different targets, the mode 1 can be adopted for metal targets to effectively improve the utilization rate and the ionization rate of the targets, and the mode 2 can be used for partially discharging abnormal discharging materials (graphite and zirconium) to effectively improve the moving speed of arc spots, so that the efficient driving of the arc spots is realized, and the full-target-surface discharging is realized.

As shown in fig. 8-11, the arc striking assembly 2 includes a driving assembly, an arc striking rod 21, an arc striking needle 22, and a bracket assembly, the bracket assembly is connected to the other side of the mounting plate 3 relative to the sealed chamber, the driving assembly is fixed on the bracket assembly, one end of the arc striking rod 21 is connected to the bracket assembly, the other end of the arc striking rod 21 passes through the mounting plate 3 to be connected to the arc striking needle 22, and the driving assembly can drive the arc striking rod 21 to move along a straight line and drive the arc striking rod 21 to rotate.

At present, the commonly used arc striking devices are divided into two types, one type is an electric arc striking device for striking an arc by a coil, a magnetic field is generated by electrifying the coil to drive an arc striking needle to move, after the arc striking is successful, the coil is powered off, the arc striking needle is reset by a spring to realize the reciprocating motion of the arc striking, and the other type is that an air cylinder is adopted to drive the arc striking needle to reciprocate. The arc striking needle is placed at the front end of the target material and moves back and forth relative to the target material, namely the arc striking needle is always in front of the target material. Through the arrangement, the arc striking needle can effectively avoid the direct deposition of metal ions of target ionization, the thickness of a film layer deposited on the arc striking needle is reduced to a great extent, the conductivity of the arc striking needle is improved, the stability of discharge arc striking is increased, and the replacement frequency of the arc striking needle is reduced. The arc ignition needle is far away from the target surface, and the front of the target surface is not shielded, so that the deposition of a film layer on the target surface is facilitated.

Meanwhile, the limitation of the length of the arc striking needle of the conventional arc striking device is changed by the rotary linear compound driving (the conventional arc striking needle is too long, is easy to be heated and is enhanced in brittleness and easy to break, and the spiral arc striking does not have the problem), so that the electromagnetic coil on the cathode arc head can be set in a larger technical space, and different functions of the electromagnetic coil can be realized (the change of the inner diameter and the outer diameter of the coil can realize different functions of arc stabilization, particle reduction and enhancement ionization). The limit of the inner diameter of the electromagnetic coil is effectively reduced by combining the central water inlet and outlet design, so that the effective design size range of the electromagnetic coil is much larger than that of the conventional structure.

As shown in fig. 9, the driving assembly includes a linear driving device 23 and a guiding column 24 cooperating with the linear driving device 23, the arc striking rod 1 is provided with a guiding groove 2103, an end of the guiding column 24 is located in the guiding groove 2103, the linear driving device 23 drives the arc striking needle 22 to move along a straight line and the arc striking needle 22 is rotatable relative to the linear driving device 23, and the guiding groove 2103 is at least partially a rotary guiding groove 2104 (a spiral groove may be used). The arc starting rod 21 is driven to reciprocate in a straight line by the linear driving means 23, and at the same time, the arc starting rod 21 simultaneously rotates in a part of or all of the path thereof when the arc starting rod 21 moves in a straight line from one end to the other end due to the cooperation of the guide post 24 and the rotary guide groove 2104 in the guide groove 2103. The angle of rotation of the arc ignition column 21 by the rotation guide groove 2104 is set by practical requirements. The arc striking rod can rotate by 0-360 degrees, and the angle is 30-120 degrees in the figure.

The guide groove 2103 may have a structure as shown in fig. 10 (a), and is formed by engaging a linear guide portion and a rotary guide portion, wherein the linear portion is relatively closer to the arc guiding needle 22, and when the linear driving device 23 drives the arc guiding rod 21 in the target direction, the arc guiding needle 22 is first rotated to rotate to the vicinity of the target center, and then the linear arc guiding motion is performed.

The guide groove 2103 may be configured as a rotary guide groove 2104 as a whole as shown in fig. 10 (b), and the linear driving device 23 drives the arc striking rod 21 to perform linear reciprocating motion and to perform rotary motion, which is suitable for the arc striking device of the planar arc source.

In the figure, the linear driving device 23 is a cylinder assembly.

In the figure, the end of the guide post 24 is spherical or conical, and the inner wall of the groove is matched with the end of the guide post 24, so that better contact guiding and friction reduction are facilitated.

And the arc ignition rod 21 and the driving assembly are provided with an electric connection assembly which can make the arc ignition needle 22 close/open the current along with the linear reciprocating motion of the arc ignition rod 21.

At present, the striking needle is at the striking in-process, and the striking needle is placed before the negative pole target, short circuit in the twinkling of an eye as earthing terminal and negative pole, produces heavy current to arouse arc discharge, the striking needle does not have any influence in the cathodic stable discharge, but conventional striking needle is usually through protection resistance ground connection, at the in-process that discharges, the striking needle is as the positive pole, and a large amount of electrons receive the electric field influence, can bombard the front end of striking needle, and the front end is heated can accelerate the ageing of striking needle material, reduces practical life. At present, the following two treatment modes are mainly adopted for the heat aging of the absorbed electrons of the arc ignition needle: 1. hidden, hide behind the striking through elasticity subassembly with striking arc needle striking, the shortcoming structure is complicated, and is with high costs, poor stability. 2. The electric potential suspends, with striking needle electric potential suspension, installs delay switch additional on its circuit and cooperates PLC control to realize the electric potential suspension of striking needle, the shortcoming: the cost is high, the service life of the delay switch of the heavy current is limited, and the PLC control design is complex. The arrangement of the power connection assembly can realize that: when the arc ignition needle is close to the target center, switch on in the twinkling of an eye at the arc ignition contact, when the target was kept away from to the arc ignition needle, for the circuit separation, break-off current when realizing that the arc ignition needle keeps away from with the target, can make the suspension of arc ignition needle potential like this, combine the advantage of two kinds of processing methods among the prior art, can hide and can suspend by the potential, thereby avoid the ageing of arc ignition needle, very big reduction the heat among the arc discharge pile up and promote the life of arc ignition needle (arc ignition needle high temperature hardening is irreversible, can become fragile emergence fracture).

The guide post 24 is electrically connected, as shown in fig. 10, the guide slot 2103 includes an electrical connection region 2105 and an insulation region 2106, the electrical connection region 2105 is disposed at one end of the guide slot 2103, when the guide post 24 contacts the electrical connection region 2105, an electrical connection is formed between the guide post 24 and the arc ignition pin 22, and when the guide post 24 contacts the insulation region 2106, the current between the guide post 24 and the arc ignition pin 22 is cut off. In the figure, the electric connection structure of the guide post 24 is realized by connecting and fixing a connection lug of an electric connection lead with the guide post 24 through a connection bolt. The structure is simpler and more compact, and the guide post 24 not only plays a role of guiding the arc striking rod to rotate, but also serves as a conductive joint. The contact area 2105 is arranged at one end of the guide slot 2103, so that the guide pin 24 can contact the striking pin 22 only at the end of the guide slot 2103. Thus, the arc striking rod is ensured to be in a potential suspension state in a non-working state.

Electrode contacts can also be fixed on the drive assembly and the guide post 24 respectively, when the arc striking needle is close to the center of the target material, the two electrode contacts are closed, and when the arc striking needle is far away from the target material, the two electrode contacts are opened, but the structure is more complex compared with the structure. And the arc striking rod 21 rotates relative to the driving assembly, the abrasion between the electrode contact pieces is much larger than that of the conventional structure which only performs linear motion to realize closing/opening.

And a layer of insulating material is attached to the surface of the insulating area in the guide groove 2103. Specifically, a DLC film or any other non-conductive coating film layer may be formed on the surface of the insulating region. The surface treatment is carried out in the rotating groove of the arc striking rod, the surface coating is made of insulating coating materials, the end point of the groove is not treated, when the arc striking rod rotates to a final angle, the guide post is contacted with the end point (non-insulating position) of the groove, and therefore the grounding of the arc striking rod is achieved, the arc striking function is achieved, and meanwhile the arc striking rod is guaranteed to be in a potential suspension state in a non-working state.

As shown in fig. 9, the linear driving device 23 is connected to the arc striking rod 21 by an articulated ball bearing 25. The joint ball bearing is connected with the driving shaft and the arc striking rod of the linear driving device 23 through threads, so that the arc striking rod can do linear and rotary compound motion while the driving shaft does linear motion.

The drive assembly comprises a support 26, and the linear drive 23 and the guide column 24 are fixed on the support 26. Specifically, as shown in fig. 9, the bracket may be provided with a screw hole, and the guide post 24 may be screwed into the screw hole.

And an insulating sealing assembly is arranged on the arc striking rod 21 and is fixed on a support 26.

In the drawing, the insulating seal assembly includes a sealing sleeve 27, the sealing sleeve 27 is sleeved outside the arc ignition rod 21 and is fixedly connected with the support 26, the support 26 is provided with a raised shaft shoulder 2601, the shaft shoulder 2601 extends into the sealing sleeve 27, the inner wall of the sealing sleeve 27 is provided with a raised annular shoulder 2701, a first oil seal 28 and a second oil seal 29 are arranged between the shaft shoulder 2601 and the annular shoulder 2701, and the shaft shoulder 2601 and the first oil seal 28, the annular shoulder 2701 and the second oil seal 29 form a bidirectional shaft seal structure. Therefore, the shaft can keep a sealing state while moving axially or radially, and the requirement of rotary arc striking is met. The support 26 and the sealing sleeve 27 are shown as flanged connections, but other connection configurations may be used.

As shown in fig. 11, at least two arc ignition needle mounting holes 2102 adapted to the arc ignition needle 22 are formed in the end portion of the arc ignition rod 21 in the direction perpendicular to the axial direction, and bolt holes 2101 are formed in the axial direction, the bolt holes 2101 are communicated with all the arc ignition needle mounting holes 2102, and fixing bolts 210 are connected to the bolt holes 2101 in an internal thread manner. The position of the arc striking needle can be conveniently adjusted, and the arc striking needle is more practical and durable.

And a direct current power supply or a pulse arc power supply is loaded on the cathode, wherein the pulse arc power supply has the following specific parameters: the base current is adjustable at 20-100A, the peak current is adjustable at 100-1000A, the frequency is adjustable at 1-1kHZ, and the duty ratio is adjustable at 1-80%. The pulse arc is that a certain base value current is used as an arc stabilizing current, the peak current is a pulse strong current, a strong current can be instantly applied to the target surface, the strong current is applied to increase the magnetic field intensity of the target surface on the one hand, so that the bifurcation of arc spots on the target surface is caused, a split arc is formed, the generation of large particles is reduced, on the other hand, the superposition of the strong current is instantly carried out, the size of the arc stabilizing base value current can be greatly reduced (more than 45A of the direct-current power supply arc stabilizing current, and the pulse arc current 20A can also normally work), the generation of the large particles can be reduced, meanwhile, the electron concentration and collision are enhanced by the superposition of the strong current, the plasma intensity in the arc discharge process can be improved, and the ionization rate of a.

Arc sources that achieve different magnetic field patterns for the same compact structure are specifically described below for different embodiments: