阅读说明：本技术 一种柔性公自转传送装置及带有该装置的镀膜机腔体 (Flexible revolution and rotation conveying device and coating machine cavity with same ) 是由 郭爱云 朱选敏 于 2020-04-05 设计创作，主要内容包括：本发明提供一种柔性公自转传送装置及带有该装置的镀膜机腔体,包括：定齿盘；柔性轨道,柔性轨道设于定齿盘的外环；多个自转轮盘,自转轮盘安装在柔性轨道与定齿盘之间,且通过齿轮与定齿盘啮合接触；驱动机构通过磁流体安装在真空腔体顶板上且通过链轮与自转轮盘上的链齿啮合接触；挂载杆,挂载杆连接在自转轮盘上。本发明的有益效果在于：采用链轮轨道设计方案,装置体积减小,方便在真空腔体内安装其他功能结构及装置；既可以实现单腔体的镀膜公自转运行,在单腔体中进出片挂载,也可以实现多腔体中单腔体的公自转运行,在多腔体间自动的工件交换；柔性轨道可进行变向满足生产中的不同需求；全程可进行自动化控制,操作简便。(The invention provides a flexible revolution and rotation conveying device and a coating machine cavity with the same, comprising: a fixed gear disc; the flexible track is arranged on the outer ring of the fixed fluted disc; the self-rotating wheel discs are arranged between the flexible tracks and the fixed gear disc and are in meshing contact with the fixed gear disc through gears; the driving mechanism is arranged on the top plate of the vacuum cavity through a magnetic fluid and is in meshed contact with the sprocket on the self-rotating wheel disc through a sprocket; and the mounting rod is connected to the self-rotating wheel disc. The invention has the beneficial effects that: by adopting the design scheme of the chain wheel track, the device has reduced volume and is convenient for installing other functional structures and devices in the vacuum cavity; the coating revolution and rotation operation of a single cavity can be realized, the loading of the film in and out of the single cavity can be realized, the revolution and rotation operation of the single cavity in multiple cavities can also be realized, and the automatic workpiece exchange among the multiple cavities can be realized; the flexible track can change the direction to meet different requirements in production; the whole process can be automatically controlled, and the operation is simple and convenient.)

1. A flexible revolution and rotation conveying device is characterized by comprising:

a fixed gear disc (1);

the flexible track (2) is arranged on the outer ring of the fixed fluted disc (1);

the self-rotating wheel discs (3) are installed between the flexible track (2) and the fixed gear disc (1) and are in contact with the fixed gear disc (1);

the driving mechanism (4) is connected with the self-rotating wheel disc (3), and the self-rotating wheel disc (3) moves along the flexible track (2) under the driving of the driving mechanism (4);

and

and the mounting rod (5) is connected to the self-rotating wheel disc (3).

2. A flexible revolution and rotation conveying device according to claim 1, wherein said fixed gear plate (1) comprises a fixed gear plate body (101) and a fixed wheel gear (102) arranged along the edge of said fixed gear plate body (101); the autorotation wheel disc (3) comprises an autorotation wheel disc body (301) and a autorotation wheel disc gear (302) arranged along the edge of the autorotation wheel disc body (301), and the autorotation wheel disc gear (302) is meshed with the fixed wheel gear (102).

3. The flexible revolution and rotation conveying device according to claim 1, wherein the flexible track (2) comprises a revolution track part (201) and a turning track part (202), the turning track part (202) is connected with a rotating bracket (203), and the rotating bracket (203) is connected with a direction-changing driving mechanism (204).

4. A flexible revolution and rotation transfer device according to claim 1, characterized in that said driving mechanism (4) comprises a power member (401) and a transmission member (402), said transmission member (402) comprises a mounting platform (4021), a pulley block (403) mounted on said mounting platform (4021) and cooperating with said flexible track (2), each of said mounting platform (4021) is mounted with one of said rotation wheel discs (3), and said power member (401) provides power for said pulley block (403) to move along said flexible track (2).

5. A flexible revolution and rotation transfer device according to claim 4, characterized in that the power component (401) comprises a motor group (4011), a power chain wheel (4012) connected with the motor group (4011) and a row of chain gear shafts (4013) arranged on the mounting base (4021) and meshed with the power chain wheel (4012).

6. A flexible revolution and rotation transfer device according to claim 4 or 5 characterised in that adjacent said mounting platforms (4021) are connected along said flexible track (2) by a moveable catch (404).

7. The flexible revolution and rotation conveying structure according to claim 1, wherein the rotation wheel disc (3) is provided with a hole, a bearing sleeve (303) is connected below the rotation wheel disc, a rotation shaft (304) is embedded in the bearing sleeve (303), and the carrying rod (5) is connected to the rotation shaft (304).

8. A flexible revolution and rotation transfer device according to claim 5, characterized in that said motor group (4011) comprises a motor mount (4011a), a motor (4011b) installed outside said motor mount (4011a), and a magnetic fluid (4011c) installed inside said motor mount (4011a) and connected with said motor chain wheel (4012) in vacuum sealing.

9. A single cavity of a film plating machine is characterized in that a single cavity (B) of the film plating machine comprises a cavity body (B1) and a cavity door, the cavity body (B1) comprises a cavity body top side (B1a) and a cavity body side (B1B) surrounding the cavity body top side (B1a), an opening (B2) is formed in the cavity body side (B1B), the cavity door is installed at the opening (B2) of the cavity body (B1), and the flexible revolution and rotation conveying device (A) and a signal detector for monitoring the flexible revolution and rotation upper conveying device are installed on the cavity body top side (B1 a).

10. The utility model provides a coating machine multi-chamber, its characterized in that, the coating machine multi-chamber is formed by splicing by coating machine list cavity (B) more than two or two and utilizes vacuum isolation valve (C), and every coating machine list cavity (B) includes: the flexible revolution and rotation conveying device comprises a cavity body (B1) and a cavity door, wherein the cavity body (B1) comprises a cavity body top side (B1a) and a cavity body side (B1B) surrounding the cavity body top side (B1a), the cavity body side (B1B) is symmetrically provided with two openings (B2), the cavity door is installed at the opening (B2) of the cavity body, and the cavity body top side (B1a) is provided with the flexible revolution and rotation conveying device (A) and a signal detector for monitoring the flexible revolution and rotation conveying device, wherein the flexible revolution and rotation conveying device (A) is defined by any one of claims 1-8.

Technical Field

The invention belongs to the technical field of coating, and particularly relates to a flexible revolution and rotation conveying device and a coating machine cavity with the same.

Background

Vacuum coating has been widely used in the field of life and production, particularly in the fields of decorative coating, optical coating, electronic product coating, architectural glass coating, and the like. During film coating, the substrate and the target material are placed in a vacuum chamber together, and through heating and other modes, the components on the surface of the target material are evaporated in the form of atomic groups or ions and are deposited on the surface of the substrate, and a film is formed through a film forming process.

When the decorative film and the electronic small accessory film are produced in batch, the workpiece rotates and rotates relative to the cathode in the vacuum cavity along with the workpiece frame, so that the uniform film forming and the mass production of the film are facilitated; meanwhile, the key points of production are that mass and rapid hanging and stable and smooth internal and external carrying of the hanging pieces in the vacuum cavity are carried out.

Revolution and rotation work rests are widely used in the field of vacuum coating and are used for improving the uniform type of coating and the loading capacity of a single cavity; in addition to single-cavity coating, the multi-cavity coating production line also uses revolution and rotation work rests to complete the coating process, and not only the revolution and rotation work rests also complete the work exchange in the multi-cavity coating production line, but also the revolution and rotation of the single cavity generally has two types of central power introduction and side power introduction, and the tool for revolution and rotation can be realized on coating equipment.

However, the conventional revolution and rotation workpiece racks are not beneficial to the installation of components in a vacuum cavity due to overlarge structures, such as a vacuum pumping device; in the installation of multi-chamber, for the current revolution and rotation work rest of cooperation passes through valve and access door, the span of the vacuum cavity push-pull valve of cooperation with it and the width of vacuum cavity access door all can be great, and then also can other functional module's arrangement.

Disclosure of Invention

The invention provides a flexible revolution and rotation conveying device and a coating machine cavity with the same, and aims to solve the technical problem that the installation of an integral coating machine is influenced due to the fact that the structure of an existing revolution and rotation workpiece frame is too large.

The specific technical scheme is as follows:

a flexible revolution and rotation conveying device is characterized by comprising:

a fixed gear disc;

the flexible track is arranged on the outer ring of the fixed fluted disc;

the self-rotating wheel discs are arranged between the flexible tracks and the fixed gear disc and are in contact with the fixed gear disc;

the driving mechanism is connected with the self-rotating wheel disc, and the self-rotating wheel disc moves along the flexible track under the driving of the driving mechanism;

and

and the hanging rod is connected to the self-rotating wheel disc.

Further, the fixed-toothed disc comprises a fixed-toothed disc body and a fixed-wheel gear arranged along the edge of the fixed-toothed disc body; the autorotation wheel disc comprises an autorotation wheel disc body and a autorotation wheel disc gear arranged along the edge of the autorotation wheel disc body, and the autorotation wheel disc gear is meshed with the fixed wheel gear.

Further, the flexible track comprises a revolution track part and a turning track part, the turning track part is connected with a rotating support, and the rotating support is connected with the turning driving mechanism.

Furthermore, the driving mechanism comprises a power part and a transmission part, the transmission part comprises an installation seat platform and a pulley block which is installed on the installation seat platform and matched with the flexible track, each installation seat platform is provided with one self-rotating wheel disc, and the power part provides power for the pulley block to enable the pulley block to move along the flexible track.

Further, the power part comprises a motor set, a power chain wheel of the motor set and a row of chain tooth shafts which are arranged on the mounting base platform and meshed with the power chain wheel.

Further, adjacent mounting base stations are connected along the flexible track by movable latches.

Further, set up the hole on the rotation wheel disc and the below is connected with the bearing housing, and the bearing housing is inlayed and is had the axis of rotation, the carry pole is connected on the axis of rotation.

Further, the motor group comprises a motor mounting seat, a power motor arranged outside the motor mounting seat and a magnetic fluid arranged inside the motor mounting seat and connected with the power chain wheel in a vacuum sealing mode.

The single cavity of the film coating machine is characterized in that the single cavity of the film coating machine comprises a cavity body and a cavity door, the cavity body comprises a cavity body top side and a cavity body side surface surrounding the cavity body top side, an opening is formed in the cavity body side surface, the cavity door is installed at the opening of the cavity body, and a signal detector which is formed by the flexible revolution and rotation conveying device and monitors the flexible revolution and rotation conveying device is installed on the cavity body top side.

The utility model provides a coating machine multi-chamber, its difference lies in, the coating machine multi-chamber utilizes the vacuum isolation valve to splice by two or more coating machine single chamber and forms, and every coating machine single chamber includes: the flexible revolution and rotation conveying device comprises a cavity body and a cavity door, wherein the cavity body comprises a cavity body top side and a cavity body side surface surrounding the cavity body top side, two openings are symmetrically formed in the cavity body side surface, the cavity door is installed at the opening of the cavity body, and the cavity body top side is provided with the flexible revolution and rotation conveying device and a signal detector for monitoring the flexible revolution and rotation conveying device.

Compared with the prior art, the invention has the beneficial effects that: (1) by adopting the design scheme of the chain wheel track, the device has small structural volume and is convenient for installing other functional structures and devices in the cavity; (2) the coating revolution and rotation operation of a single cavity can be realized, the loading of the film in and out of the single cavity can be realized, the revolution and rotation operation of the single cavity in multiple cavities can also be realized, and the automatic workpiece exchange among the multiple cavities can be realized; (3) the flexible track can change the direction to meet different requirements in production; (4) the whole process can be automatically controlled, and the operation is simple and convenient.

Drawings

FIG. 1 is an assembly view of a flexible revolution-rotation upper transfer device;

FIG. 2 is an assembled bottom view of the flexible revolution and rotation upper transfer device;

FIG. 3 is a sectional view taken along the line of FIG. 2A-A;

FIG. 4 is an installation diagram of the flexible revolution/rotation upper transfer device and the chamber;

FIG. 5 is a bottom view of the flexible revolution/rotation upper transfer device and the chamber;

FIG. 6 is a single chamber view of the coater of example 2;

FIG. 7 is a multi-chamber bottom view of the coater of example 3;

in the drawings, the components represented by the respective reference numerals are listed below:

the flexible revolution and rotation transmission device-A, a fixed gear disc-1, a fixed gear disc body-101, a fixed wheel gear-102, a flexible track-2, a revolution track part-201, a steering track part-202, a rotating bracket-203, a turning driving mechanism-204, a rotation wheel disc-3, a rotation wheel disc body-301, a rotation wheel disc gear-302, a bearing sleeve-303, a rotation shaft-304, a driving mechanism-4, a power part-401, a motor set-4011, a power chain wheel-4012, a chain gear shaft-4013, a motor mounting seat-4011 a, a power motor-4011 b, a magnetic fluid-4011 c, a transmission part-402, a mounting seat-4021, a pulley block-403, a sliding seat-4031, a V-shaped pulley assembly-4032 and a movable lock catch-404, the device comprises a hanging rod-5, a single cavity-B of a film coating machine, a cavity body-B1, an opening-B2, a top side-B1 a of the cavity body, a side surface-B1B of the cavity body, a detector mounting seat-B101 and a vacuum isolation valve-C.

Detailed Description

The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.