阅读说明：本技术 一种大面积分布的Ag@SiO2纳米粒子的制备方法及应用 (Ag @ SiO distributed in large area2Preparation method and application of nanoparticles ) 是由 张永军 王雅新 赵晓宇 温嘉红 于 2020-03-02 设计创作，主要内容包括：本发明涉及纳米材料技术领域,公开了一种大面积分布的Ag@SiO<Sub>2</Sub>纳米粒子的制备方法及应用。该制备方法包括以下步骤：清洗硅片；利用磁控溅射技术在硅片上溅射Ag；对溅射Ag后的硅片进行原位热处理,处理温度为200~250℃,时间为10~15min；利用磁控溅射技术在热处理后的硅片上共溅射Ag和SiO<Sub>2</Sub>,即获得大面积分布的Ag@SiO<Sub>2</Sub>纳米粒子。通过该制备方法,可直接获得大面积分布的Ag@SiO<Sub>2</Sub>纳米粒子,制备过程简单,所需时间短,能适应大规模生产；制得的Ag@SiO<Sub>2</Sub>纳米粒子作为SERS基底使用时,能提高SERS检测的重复性、准确性和灵敏度。(The invention relates to the technical field of nano materials, and discloses Ag @ SiO in large-area distribution 2 A preparation method and application of nano particles. The preparation method comprises the following steps: cleaning a silicon wafer; sputtering Ag on a silicon wafer by utilizing a magnetron sputtering technology; carrying out in-situ heat treatment on the silicon wafer subjected to Ag sputtering, wherein the treatment temperature is 200-250 ℃, and the treatment time is 10-15 min; co-sputtering Ag and SiO on the heat treated silicon wafer by using magnetron sputtering technology 2 Namely, the Ag @ SiO with large area distribution is obtained 2 Nanoparticles. By the preparation method, the Ag @ SiO with large area distribution can be directly obtained 2 The preparation process of the nano particles is simple, the required time is short, and the nano particles can adapt to large-scale production; prepared Ag @ SiO 2 When the nano particles are used as the SERS substrate, the repeatability, the accuracy and the sensitivity of SERS detection can be improved.)

1. Ag @ SiO distributed in large area₂The preparation method of the nano particles is characterized by comprising the following steps:

(1) cleaning a silicon wafer;

(2) sputtering Ag on a silicon wafer by utilizing a magnetron sputtering technology;

(3) carrying out in-situ heat treatment on the silicon wafer sputtered with Ag in the step (2), wherein the treatment temperature is 200-250 ℃, and the treatment time is 10-15 min;

(4) co-sputtering Ag and SiO on the silicon wafer after the heat treatment in the step (3) by utilizing a magnetron sputtering technology₂Namely, the Ag @ SiO with large area distribution is obtained₂Nanoparticles.

2. Large area distributed Ag @ SiO of claim 1₂The preparation method of the nano particles is characterized in that the specific steps of the step (1) are as follows:

(1.1) putting the silicon wafer into a mixed solution of ammonia water, hydrogen peroxide and deionized water in a volume ratio of 1 (2-4) to (6-10);

(1.2) heating the solution, and stopping heating after the solution is continuously boiled for 5-10 min;

and (1.3) after the solution is cooled to room temperature, ultrasonically cleaning the silicon wafer in deionized water and alcohol for 3-5 times in sequence, and drying the silicon wafer by nitrogen.

3. Large area distributed Ag @ SiO of claim 1₂The preparation method of the nano particles is characterized in that in the step (1), after the silicon wafer is cleaned, the surface of the silicon wafer is treated by utilizing a plasma etching technology.

4. A large area distributed Ag @ SiO as claimed in claim 3₂The preparation method of the nano particles is characterized in that in the step (1), the surface treatment is carried out under the working air pressure of 0.1-1 Torr, and the treatment time is 5-10 min.

5. A large area distributed Ag @ SiO as claimed in claim 3₂The preparation method of the nano particles is characterized by comprising the following steps:

carrying out the step (2) on the silicon wafer subjected to the surface treatment in the step (1) within 1 h; and/or

In the step (1), the silicon wafer after surface treatment is stored under the condition of vacuum or inert gas.

6. Large area distributed Ag @ SiO of claim 1₂The preparation method of the nano particles is characterized in that in the step (2), the thickness of the sputtered Ag is 5-10 nm.

7. Large area distributed Ag @ SiO of claim 1₂The preparation method of the nano particles is characterized in that in the step (4), Ag and SiO are co-sputtered₂The thickness of (a) is 50 to 70 nm.

8. Large area distributed Ag @ SiO of claim 1₂The preparation method of the nano particles is characterized in that in the step (4), Ag and SiO are co-sputtered₂The method comprises the following steps: in the sputtering region of the Ag target material, a plurality of SiO are adhered₂Small blocks; the plurality of SiO₂The small blocks are enclosed into a circle, each SiO₂The small blocks are evenly distributed on the ring.

9. The Ag @ SiO in large area distribution as claimed in claim 8₂The preparation method of the nano particles is characterized in that in the step (5), the SiO is₂The number of small blocks is 8.

10. Large area distribution Ag @ SiO prepared by the method of any one of claims 1to 10₂Application of nanoparticles in SERS detection.

Technical Field

The invention relates to the technical field of nano material preparation, in particular to Ag @ SiO in large-area distribution₂A preparation method and application of nano particles.

Background

The Surface-Enhanced Raman Scattering (SERS) effect refers to electromagnetic enhancement caused by excitation of a compound adsorbed on a roughened metal Surface due to Surface local plasmon polaritons, and Raman-Enhanced active sites formed by atomic clusters on the roughened Surface and molecules adsorbed thereon, and the Raman Scattering of a measured object generates a great enhancement effect due to the action of the electromagnetic enhancement and the atomic clusters and the molecules. It has high sensitivity and high resolution, is not affected by water, can provide rich molecular spectrum information, and is widely used in the fields of physics, biology and chemistry.

The SERS effect has special requirements on the surface morphology and dielectric constant of metal, so that only few nano-scale rough surfaces of metal or their nanostructures have high SERS effect, and the universality of substrate material and surface morphology is poor. The metal sol is a good Raman enhancement substrate material, but the metal sol is unstable and is easy to generate disordered agglomeration, so that an SERS signal becomes poor, quantitative analysis cannot be carried out, and the metal sol cannot avoid the interaction between a substrate and probe molecules. The core-shell structure can avoid the defects, and people wrap a layer of extremely thin and compact SiO on the high-activity noble metal particles₂Film or Al₂O₃The film basically solves the problem of poor universality of SERS substrate materials and surface appearance, can effectively avoid the aggregation of metal nanoparticles, and can prevent the interaction between a metal substrate and probe molecules. At present to SiO₂The study of chemical surfaces has become quite considerableIs cooked, and SiO₂Is inert and hydrophilic, can make some hydrophilic biological molecules adsorbed on its surface, and can use Raman means to observe the difference of conformation of biological molecules under different environments, also can adsorb several biological molecules on the external SiO of metal nano granules₂On the shell, the interaction between them was observed, and thus, Ag @ SiO₂Are commonly used as SERS substrates.

Preparation of Ag @ SiO at present₂The method of the nano-particles comprises the steps of preparing the Ag nano-particles by a chemical method, and then coating SiO on the surfaces of the Ag nano-particles by the chemical method₂. For example, Chinese patent publication No. CN103143721B discloses Ag @ SiO₂The preparation method of core-shell structure nano composite material adopts reversed-phase microemulsion method as template, and NaBH₄As a reducing agent, AgNO₃Is Ag precursor, tetraethyl orthosilicate (TEOS) is SiO₂Precursor, ammonia water as catalyst, continuous loading, Ag nano crystal generation and SiO₂The covering of the shell is completed in one reactor, and the method specifically comprises the following steps of (1) preparing reverse microemulsion as mother liquor by using a nonionic surfactant, an oil phase and a cosurfactant, wherein the mass ratio of the nonionic surfactant to the oil phase to the cosurfactant is =4: 5-10: 0-4, (2) putting the mother liquor obtained in the step (1) into a reaction bottle, adding a silver nitrate solution with the concentration of 0.1-0.2 mol/L, electromagnetically stirring for 5-10 min at the temperature of 20-25 ℃, adding a sodium borohydride solution with the concentration of 0.1-1.0 mol/L, electromagnetically stirring for 25-30 min at the temperature of 20-25 ℃, adding ammonia water with the concentration of 6.42-26.5 wt%, electromagnetically stirring for 5-8 min at the temperature of 20-25 ℃, adding ethyl orthosilicate, and electromagnetically stirring for 20-24 h at the temperature of 26 +/-1 ℃ to generate Ag SiO₂A core-shell structured nanocomposite; (3) adding acetone into the reaction system in the step (2) to separate phases, centrifuging for 5-10 min, ultrasonically cleaning the obtained solid with absolute ethyl alcohol, and drying the cleaned solid at the temperature of 55-65 ℃ to obtain Ag @ SiO₂A core-shell structure nanocomposite powder. Ag @ SiO prepared by the method₂The core-shell material has regular appearance and considerable material performance; and said Ag @ SiO₂Of core-shell materialsThe morphology and size can be conveniently adjusted by changing the process conditions. However, the chemical method has complex preparation process and is difficult to produce on a large scale; and the prepared Ag @ SiO₂When the nano particles are used as the SERS substrate, the nano particles need to be assembled to form an ordered structure, or Ag @ SiO is directly used₂The solution is used as an SERS substrate, the former process is complex, and Ag @ SiO₂The distribution uniformity of the nano particles is not ideal, so that the repeatability of SERS detection is poor; in the latter, because the nanoparticles are suspended in the solution and are distributed more unevenly, and the nanoparticles can move in the solution, stable "hot spots" are difficult to form among the nanoparticles, and the raman enhancement only comes from the long-range action of the electromagnetic field enhancement generated by the Ag nanoparticles wrapped in the shell, so that the problems of poor uniformity, repeatability and stability and small area of the hot spots exist.

Disclosure of Invention

In order to solve the technical problem, the invention provides Ag @ SiO distributed in a large area₂A method for preparing nanoparticles. By the preparation method, the Ag @ SiO with large area distribution can be directly obtained₂The preparation process of the nano particles is simple, the required time is short, and the nano particles can adapt to large-scale production; prepared Ag @ SiO₂When the nano particles are used as the SERS substrate, the repeatability, the accuracy and the sensitivity of SERS detection can be improved.

The specific technical scheme of the invention is as follows:

ag @ SiO distributed in large area₂The preparation method of the nano-particles comprises the following steps:

(1) cleaning a silicon wafer;

(2) sputtering Ag on a silicon wafer by utilizing a magnetron sputtering technology;

(3) carrying out in-situ heat treatment on the silicon wafer sputtered with Ag in the step (2), wherein the treatment temperature is 200-250 ℃, and the treatment time is 10-15 min;

(4) co-sputtering Ag and SiO on the silicon wafer after the heat treatment in the step (3) by utilizing a magnetron sputtering technology₂Namely, the Ag @ SiO with large area distribution is obtained₂Nanoparticles.

The invention utilizes magnetron sputtering technology to form a silicon waferCo-sputtering Ag and SiO₂Ag and SiO₂When deposited on a silicon wafer, SiO is automatically formed₂Coating Ag to obtain Ag @ SiO with large area distribution₂Nanoparticles. The magnetron sputtering technology establishes a magnetic field orthogonal to the electric field on the surface of the target material, and the compactness and uniformity of the formed film can be ensured by accurately controlling the size of the magnetic field and the electric field. Before co-sputtering, a layer of Ag is sputtered on a silicon wafer, and then in-situ heat treatment is carried out, wherein the two steps are aimed at leading the Ag @ SiO formed by subsequent co-sputtering₂The nano particles are stably attached to Ag sputtered on the silicon wafer before, are not easy to fall off, and the finally prepared Ag @ SiO with large area distribution₂The granular sensation of the nano particles is obvious and the nano particles are uniformly distributed; it was found during the course of the experiments that the absence of either of these two steps leads to the production of Ag @ SiO₂The nano particles are easy to fall off from the silicon wafer, the granular feeling is not obvious, and the distribution uniformity is poor.

Compared with the existing method for preparing Ag @ SiO by a chemical method₂As for the nano particles, most of the preparation process of the invention can be finished by a magnetron sputtering film coating machine without complex chemical reaction, and the invention can directly obtain ordered Ag @ SiO distributed in large area by utilizing the magnetron sputtering technology₂The nano particles can be used as the SERS substrate without assembling the nano particles, so the method has the advantages of simple preparation process, short required time and large-scale production. In addition, the Ag @ SiO prepared by the invention₂The nano particles are attached to the silicon chip and are not suspended in the solution, so that the nano particles are uniformly distributed, and the repeatability of SERS detection can be improved; and stable nanometer gaps are formed among the nano particles, and stable 'hot spots' can be formed, Raman enhancement not only comes from the electromagnetic enhancement long-range effect generated by the Ag nano particles wrapped in the shell, but also comes from the electromagnetic enhancement caused by surface plasma resonance between adjacent nano particles, so that the Raman enhancement method has the advantages of good stability and large hot spot area, and can improve the accuracy and the sensitivity of SERS detection. And, compared to the preparation of Ag @ SiO by a chemical process₂Nanoparticles, which are then assembled into ordered structures to serve as SERS substrates, are prepared by the present [email protected]₂The distribution of the nano particles is more uniform, and the repeatability of SERS detection is better.

Preferably, the specific steps of step (1) are as follows:

(1.1) putting the silicon wafer into a mixed solution of ammonia water, hydrogen peroxide and deionized water in a volume ratio of 1 (2-4) to (6-10);

(1.2) heating the solution, and stopping heating after the solution is continuously boiled for 5-10 min;

and (1.3) after the solution is cooled to room temperature, ultrasonically cleaning the silicon wafer in deionized water and alcohol for 3-5 times in sequence, and drying the silicon wafer by nitrogen.

Preferably, in the step (1), after the silicon wafer is cleaned, the silicon wafer is subjected to surface treatment by using a plasma etching technique.

Before sputtering, the surface of a silicon wafer is treated by utilizing a plasma etching technology, and the purpose is to enable Ag @ SiO₂The nano particles are more firmly attached, the granular sensation is more obvious, and the distribution is more uniform. Experiments show that the finally obtained Ag @ SiO can be treated without surface treatment on the silicon wafer₂The attachment stability, the granular sensation and the distribution uniformity of the nanoparticles are influenced, and the accuracy, the repeatability and the sensitivity of SERS detection are further influenced.

Preferably, in the step (1), the surface treatment is performed under a working pressure of 0.1to 1Torr for 5 to 10 min.

Preferably, the silicon wafer after the surface treatment in the step (1) is subjected to the step (2) within 1 h; and/or in the step (1), storing the silicon wafer after surface treatment under the vacuum or inert gas condition.

Experiments show that the surface-treated silicon wafer is exposed in the air for too long time and can also be used for finally obtaining Ag @ SiO₂The adhesion and stability degree, granular sensation and distribution uniformity of the nano particles are influenced, the influence can be avoided by storing the nano particles under the condition of vacuum or inert gas, and the influence on the surface of the silicon wafer caused by certain components in the air is suspected, so that the effect of surface treatment on the silicon wafer by using a plasma etching technology is weakened. Therefore, it is necessary to maintain the surface-treated silicon wafer under vacuum or inert gas conditionsAnd storing or carrying out subsequent steps within 1 h.

Preferably, in the step (2), the thickness of the sputtered Ag is 5-10 nm.

Preferably, in step (4), Ag and SiO are co-sputtered₂The thickness of (a) is 50 to 70 nm.

Preferably, in step (4), Ag and SiO are co-sputtered₂The method comprises the following steps: in the sputtering region of the Ag target material, a plurality of SiO are adhered₂Small blocks; the plurality of SiO₂The small blocks are enclosed into a circle, each SiO₂The small blocks are evenly distributed on the ring.

By this method, Ag and SiO can be realized₂Co-sputtering and automatic formation of SiO₂Structure of coating Ag. Several SiO₂The small blocks are enclosed into a circle, each SiO₂The small blocks are uniformly distributed on the ring, so that SiO can be generated₂And Ag was sputtered uniformly onto the silicon wafer.

Preferably, in the step (5), the SiO is₂The number of small blocks is 8.

Ag @ SiO with large area distribution prepared by the method₂Application of nanoparticles in SERS detection.

Compared with the prior art, the invention has the following advantages:

(1) can directly obtain Ag @ SiO distributed in large area₂The preparation process of the nano particles is simple, the required time is short, and the nano particles can adapt to large-scale production;

(2) prepared Ag @ SiO₂The nanoparticles are uniformly distributed, so that the repeatability of SERS detection is better;

(3) prepared Ag @ SiO₂Stable 'hot spots' can be formed among the nano particles, when the nano particles are used as the SERS substrate, the nano particles have the advantages of large hot spot area and good stability, and the accuracy and the sensitivity of SERS detection can be improved.

Drawings

FIG. 1 shows a large area distribution of Ag @ SiO prepared in example 1₂Nanoparticles;

FIG. 2 shows SiO in co-sputtering₂Relative positions of the small blocks on the Ag target material;

FIG. 3 is a comparative example1 prepared large-area distributed Ag @ SiO₂Nanoparticles;

FIG. 4 is a graph of the large area distribution of Ag @ SiO prepared in comparative example 2₂Nanoparticles.

The reference signs are: ag target 1, SiO₂And a small block 2.

Detailed Description

The present invention will be further described with reference to the following examples.