Vacuum flash frequency observation window

文档序号:1402967 发布日期:2020-03-06 浏览:10次 中文

阅读说明:本技术 一种真空闪频观察窗 (Vacuum flash frequency observation window ) 是由 王绪生 胡宗式 于 2019-12-23 设计创作,主要内容包括:本发明公开了一种真空闪频观察窗,包括:旋转圆盘、壳体、上盖、玻璃观察窗以及电机;旋转圆盘位于壳体内,且由上下两层圆盘围合而成,使上下两层圆盘之间形成空腔,并且上下两层圆盘均以圆心为中心,中心对称设置两条以上的直缝,并使上下两层圆盘上设置的直缝一一对应;玻璃观察窗固定在上盖的外侧,电机固定在上盖的外侧,且电机的主轴穿过上盖并伸入壳体内,主轴穿过旋转圆盘并与旋转圆盘固定连接,上盖与壳体的一侧固定连接,壳体的另一侧固定连接在真空室上。本发明的真空闪频观察窗可以阻挡喷溅物,方便操作人员观察真空室内的情况,且旋转圆盘缝隙的面积相对于旋转圆盘的面积较小,能透过的光线也大大减小,起到遮光的作用,方便了观察。(The invention discloses a vacuum flash frequency observation window, which comprises: the device comprises a rotating disc, a shell, an upper cover, a glass observation window and a motor; the rotating disc is positioned in the shell and is formed by enclosing an upper layer of disc and a lower layer of disc, a cavity is formed between the upper layer of disc and the lower layer of disc, the upper layer of disc and the lower layer of disc both take the circle center as the center, more than two straight seams are arranged in the center symmetrically, and the straight seams arranged on the upper layer of disc and the lower layer of disc are in one-to-one correspondence; the glass observation window is fixed on the outer side of the upper cover, the motor is fixed on the outer side of the upper cover, a main shaft of the motor penetrates through the upper cover and extends into the shell, the main shaft penetrates through the rotary disk and is fixedly connected with the rotary disk, the upper cover is fixedly connected with one side of the shell, and the other side of the shell is fixedly connected onto the vacuum chamber. The vacuum flash frequency observation window can block splashed objects, is convenient for operators to observe the conditions in the vacuum chamber, has smaller area of the gap of the rotating disk relative to the area of the rotating disk, can greatly reduce the transmitted light, plays a role in shading and is convenient to observe.)

1. A vacuum strobe viewing window, comprising: the device comprises a rotating disc, a shell, an upper cover, a glass observation window and a motor; wherein the content of the first and second substances,

the rotating disc is positioned in the shell and is formed by enclosing an upper layer of disc and a lower layer of disc, a cavity is formed between the upper layer of disc and the lower layer of disc, the upper layer of disc and the lower layer of disc both take the circle center as the center, more than two straight seams are arranged in the center in a symmetrical mode, and the straight seams arranged on the upper layer of disc and the lower layer of disc are in one-to-one correspondence;

the glass observation window is fixed on the outer side of the upper cover, the motor is fixed on the outer side of the upper cover, a main shaft of the motor penetrates through the upper cover and extends into the shell, the main shaft penetrates through the rotating disc and is fixedly connected with the rotating disc, the upper cover is fixedly connected with one side of the shell, and the other side of the shell is fixedly connected with the vacuum chamber.

2. The vacuum stroboscopic viewing window of claim 1, wherein the length of the straight slit is smaller than the radius of the rotating disk, and the width of the straight slit is 1-2 mm.

3. The vacuum stroboscopic viewing window of claim 1 or 2, wherein the distance between the upper and lower layers of discs is 2-10 mm.

4. The vacuum stroboscopic viewing window of claim 3 wherein the linear velocity of rotation of the rotating disk is greater than the velocity of the splatter passing through the straight slot of the rotating disk.

5. The vacuum stroboscopic viewing window of claim 4, wherein a camera is provided on the outside of the glass viewing window.

Technical Field

The invention belongs to the technical field of vacuum smelting, and particularly relates to a vacuum flash frequency observation window.

Background

In the fields of vacuum smelting, vacuum heat treatment, ion sputtering and the like, the condition in a vacuum chamber can be observed through a flash frequency observation window, metal particles can be sprayed out of the surface after metal is melted, meanwhile, gas or low-melting-point metal originally dissolved in the metal can be sprayed out, the sprayed materials can fly for a long distance in a vacuum state, and when the sprayed materials are sprayed onto the glass of a vacuum observation window, a film can be formed, the sight of an observer can be blocked, and the condition in the vacuum chamber can not be seen clearly by an operator.

Disclosure of Invention

In order to solve the problems in the prior art, the invention provides a vacuum stroboscopic observation window. The technical problem to be solved by the invention is realized by the following technical scheme:

a vacuum strobe viewing window comprising: the device comprises a rotating disc, a shell, an upper cover, a glass observation window and a motor; wherein the content of the first and second substances,

the rotating disc is positioned in the shell and is formed by enclosing an upper layer of disc and a lower layer of disc, a cavity is formed between the upper layer of disc and the lower layer of disc, the upper layer of disc and the lower layer of disc both take the circle center as the center, more than two straight seams are arranged in the center in a symmetrical mode, and the straight seams arranged on the upper layer of disc and the lower layer of disc are in one-to-one correspondence;

the glass observation window is fixed on the outer side of the upper cover, the motor is fixed on the outer side of the upper cover, a main shaft of the motor penetrates through the upper cover and extends into the shell, the main shaft penetrates through the rotating disc and is fixedly connected with the rotating disc, the upper cover is fixedly connected with one side of the shell, and the other side of the shell is fixedly connected with the vacuum chamber.

In one embodiment of the invention, the length of the straight slit is smaller than the radius of the rotating disc, and the width of the straight slit is 1-2 mm.

In one embodiment of the invention, the distance between the upper layer of disc and the lower layer of disc is 2-10 mm.

In one embodiment of the invention, the rotating disc rotates at a linear velocity greater than the velocity of the splatter passing through the straight slot of the rotating disc.

In one embodiment of the invention, a camera is arranged on the outer side of the glass observation window.

The invention has the beneficial effects that:

the vacuum flash frequency observation window can block splashed objects, so that an operator can conveniently observe the conditions in a vacuum chamber, the area of a gap of the rotating disc is smaller than that of the rotating disc, and the light which can penetrate through the gap is greatly reduced, so that the effect of shading is achieved, the operator does not need to wear sunglasses, and the observation is facilitated.

The present invention will be described in further detail with reference to the accompanying drawings and examples.

Drawings

FIG. 1 is a structural cross-sectional view of the present invention;

FIG. 2 is a top view of the structure of the present invention;

FIG. 3 is a schematic view of a rotating disk according to the present invention;

fig. 4 is a schematic diagram of the principle of the present invention.

Description of reference numerals:

1-rotating the disc; 2-a shell; 3-covering the cover; 4-glass observation window; 5, a motor; 6-a first flange; 7-a main shaft; 8-a first sealing ring; 9-a second flange; 10-moving a sealing ring; 11-a second sealing ring; 12-making a tube from aluminum; 13-camera.

Detailed Description

The present invention will be described in further detail with reference to specific examples, but the embodiments of the present invention are not limited thereto.

Referring to fig. 1, fig. 2 and fig. 3, an embodiment of the present invention provides a vacuum flash observation window, including: the device comprises a rotary disc 1, a shell 2, an upper cover 3, a glass observation window 4 and a motor 5; wherein the content of the first and second substances,

the rotating disc 1 is positioned in the shell 2 and is formed by enclosing an upper layer of disc and a lower layer of disc, a cavity is formed between the upper layer of disc and the lower layer of disc, the upper layer of disc and the lower layer of disc both use the circle center as the center, more than two straight slits are arranged in the center symmetry, and the straight slits arranged on the upper layer of disc and the lower layer of disc are in one-to-one correspondence.

Preferably, three straight slits are provided; the length of the straight seam is smaller than the radius of the rotating disc 1, the width of the straight seam is 1-2 mm, and the straight seam is arranged in a central symmetry mode so as to guarantee dynamic balance of the rotating disc 1.

Further, the linear speed of the rotating disc 1 is greater than the speed of the splashed objects passing through the straight slit of the rotating disc 1, so that the upper layer disc can block the splashed objects, and operators can observe the conditions in the vacuum chamber conveniently.

Further, the distance between the upper layer of disc and the lower layer of disc is 2-10 mm.

Further, the rotating disc 1 is made of stainless steel material, and the upper and lower layers of the rotating disc 1 are fixedly connected through an aluminum pipe 12.

In one embodiment, the size of the inner cavity of the shell 2 is phi 220mm multiplied by 25mm, the diameter of the rotating disk 1 is 210mm, the width of the straight slit is 1mm, the length of the straight slit is 40mm, the total thickness of the rotating disk 1 is about 7mm, the thickness of each layer of disks is 1-1.2 mm, and the distance between two layers of disks is about 5 mm.

The glass observation window 4 is pressed on the outer side of the upper cover 3 through a first flange 6, and the first flange 6 is connected with the upper cover 3; the motor 5 is fixedly arranged on the outer side of the upper cover 3, the main shaft 7 of the motor 5 penetrates through the upper cover 3 and extends into the shell 2, the main shaft 7 penetrates through the rotating disc 1 and is fixedly connected with the rotating disc 1, and when the main shaft 7 rotates, the rotating disc 1 is driven to rotate together.

In one embodiment, the diameter of the inner hole of the first flange 6 is 40mm, and the size of the glass observation window 4 is phi 60mm x 10 mm; the voltage of the motor 5 is 220V, the frequency is 50Hz, the power is 15W, and the diameter of the main shaft 7 is 8 mm.

One side fixed connection of upper cover 3 and casing 2, the thickness of upper cover 3 is 10mm, and upper cover 3 realizes sealedly through first sealing washer 8 and casing 2, and the opposite side of casing 2 passes through second flange 9 fixed connection on vacuum chamber, and the particular case in the vacuum chamber can be observed through glass observation window 4.

Further, a movable sealing ring 10 is arranged at the joint of the main shaft 7 and the upper cover 3, the movable sealing ring 10 ensures the vacuum degree in the vacuum chamber, and the movable sealing ring 10 is a rotary shaft lip-shaped sealing ring.

In one embodiment, the dynamic seal ring 10 has an inner diameter of 8mm, an outer diameter of 18mm and a thickness of 8 mm.

Further, the glass observation window 4 and the upper cover 3 are also sealed by the second gasket 11.

Further, a camera 13 is installed on the outer side of the glass observation window 4, and the camera 13 can transmit the condition in the vacuum chamber to an observer outside the operation chamber in real time.

The working principle of the invention is as follows:

referring to fig. 4, two horizontal lines in the figure represent a rotating disc 1 with an upper disc and a lower disc having a distance T of 2-10 mm, the rotating disc 1 is provided with a straight slit, the width of the straight slit is 1-2 mm, assuming that the rotating linear velocity of the rotating disc 1 is v, the sputtered object enters from the straight slit of the lower disc at a velocity u, at this time, if the rotating linear velocity of the rotating disc 1 is greater than the velocity of the sputtered object passing through the straight slit of the rotating disc 1, that is, the sputtered object enters from the straight slit of the lower disc, before the straight slit of the upper disc, the rotating disc 1 has rotated, the sputtered object cannot enter the straight slit of the upper disc and is directly sputtered onto the upper disc, so that the glass observation window 4 is not affected, and thus an observer can clearly observe the light penetrating through the straight slit, and further judge the working condition in the vacuum chamber.

The vacuum flash frequency observation window can block splashed objects, so that an operator can conveniently observe the conditions in a vacuum chamber, the area of a gap of the rotating disc is smaller than that of the rotating disc, and the light which can penetrate through the gap is greatly reduced, so that the effect of shading is achieved, the operator does not need to wear sunglasses, and the observation is facilitated.

In the description of the present invention, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

The foregoing is a more detailed description of the present invention that is presented in conjunction with specific embodiments, and the practice of the invention is not to be considered limited to those descriptions. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.

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