Evaporation source and vacuum evaporation system
阅读说明:本技术 蒸发源及真空蒸镀系统 (Evaporation source and vacuum evaporation system ) 是由 邹清华 黄俊淞 于 2019-11-29 设计创作,主要内容包括:本申请公开了一种蒸发源及真空蒸镀系统,属于显示技术领域。该蒸发源包括:腔体,设置在腔体内的坩埚和驱动组件,以及加热组件;其中,坩埚为可伸缩结构,用于放置蒸镀材料;该腔体的一侧设置有出气孔,该驱动组件位于坩埚远离出气孔的一侧,驱动组件用于驱动坩埚朝靠近出气孔的一侧收缩;该加热组件用于加热蒸镀材料。由于本申请中坩埚为可伸缩结构,该驱动组件可以驱动坩埚朝靠近出气孔的一侧收缩。因此在坩埚内的蒸镀材料逐渐减少的过程中,该蒸镀材料与出气孔的距离能够始终保持在较小的范围内,无需增加加热温度即可确保蒸镀材料的沉积速率保持稳定,进而避免了温度过高影响在基板上形成的膜层的品质。(The application discloses evaporation source and vacuum evaporation system belongs to and shows technical field. This evaporation source includes: the crucible and the driving assembly are arranged in the cavity, and the heating assembly is arranged in the cavity; wherein, the crucible is a telescopic structure and is used for placing evaporation materials; an air outlet is formed in one side of the cavity, the driving assembly is located on one side, far away from the air outlet, of the crucible, and the driving assembly is used for driving the crucible to contract towards one side, close to the air outlet; the heating assembly is used for heating the evaporation material. Because the crucible is of a telescopic structure in the application, the driving assembly can drive the crucible to contract towards one side close to the air outlet hole. Therefore, in the process that the evaporation material in the crucible is gradually reduced, the distance between the evaporation material and the air outlet can be always kept in a small range, the deposition rate of the evaporation material can be kept stable without increasing the heating temperature, and the influence of overhigh temperature on the quality of a film layer formed on the substrate is avoided.)
1. An evaporation source, comprising: the crucible and the driving assembly are arranged in the cavity, and the heating assembly is arranged in the cavity;
the crucible is of a telescopic structure and is used for placing evaporation materials;
an air outlet is formed in one side of the cavity, the driving assembly is located on one side, far away from the air outlet, of the crucible, and the driving assembly is used for driving the crucible to contract towards one side, close to the air outlet;
the heating assembly is used for heating the evaporation material.
2. The evaporation source according to claim 1, wherein the crucible comprises: the elastic connecting pipe comprises a first plate body, a second plate body and an elastic connecting pipe, wherein the first plate body and the second plate body are arranged oppositely, and the elastic connecting pipe is connected between the first plate body and the second plate body;
the first plate body is positioned on one side of the elastic connecting pipe close to the air outlet, and a through hole is formed in the first plate body;
the driving assembly is connected with the second plate body and used for driving the second plate body to move towards one side close to the first plate body, so that the elastic connecting pipe contracts towards one side close to the first plate body.
3. The evaporation source according to claim 2, wherein the elastic connection pipe is made of a metal material.
4. The evaporation source according to claim 2, wherein the flexible connecting tube is corrugated.
5. The evaporation source according to any of claims 1 to 4, wherein the driving assembly comprises: the magnetic circuit comprises a first magnetic block, a second magnetic block and a first driving circuit, wherein the first magnetic block and the second magnetic block are oppositely arranged;
the first magnetic block and the second magnetic block are both positioned on one side of the crucible away from the air outlet, the first magnetic block is connected with the crucible, and the second magnetic block is connected with the other side of the cavity;
at least one of the first magnetic block and the second magnetic block is electrically connected with the first driving circuit, and the first driving circuit is used for supplying current to the magnetic block connected with the first driving circuit so as to drive the first magnetic block to move in a direction away from the second magnetic block.
6. The evaporation source according to any of claims 1 to 4, wherein the side of the crucible away from the gas outlet is made of a magnetic material; the drive assembly includes: a third magnetic block and a second drive circuit;
the third magnetic block is positioned on one side of the crucible, which is far away from the air outlet hole, and is connected with the other side of the cavity;
the second driving circuit is electrically connected with the third magnetic block and is used for supplying current to the third magnetic block so as to drive the crucible to move towards one side close to the gas outlet hole.
7. The evaporation source according to any of claims 1 to 4, wherein the driving assembly comprises: an elastic carrier;
one end of the elastic bearing piece is connected with one side, far away from the air outlet, of the crucible, and the other end of the elastic bearing piece is connected with the other side of the cavity.
8. The evaporation source according to claim 7, wherein the resilient carrier is a spring.
9. The evaporation source according to any of claims 1 to 4, wherein the heating assembly comprises: a plurality of heating members arranged in an axial direction of the cavity;
the heating temperature of a plurality of the heating members is reduced in sequence along the direction away from the air outlet.
10. The evaporation source according to claim 9, wherein each of the heating members is a heating wire.
11. A vacuum evaporation system, comprising: a vacuum chamber, a reticle and the evaporation source according to any one of claims 1 to 10;
the mask plate and the evaporation source are arranged in the vacuum chamber, and the mask plate is positioned on one side, provided with the air outlet, of the cavity in the evaporation source.
Technical Field
The disclosure relates to the technical field of display, in particular to an evaporation source and a vacuum evaporation system.
Background
When performing vacuum evaporation on a substrate, an evaporation source having an evaporation material placed thereon, a mask, and the substrate are generally placed in a vacuum chamber. And then, the evaporation source can vaporize the evaporation material, the vaporized evaporation material is deposited on the substrate through the hollow area of the mask plate, and a film layer is formed on the substrate.
Disclosure of Invention
The embodiment of the disclosure provides an evaporation source and a vacuum evaporation system, which can solve the problem that evaporation materials in a high-temperature state for a long time are easy to deteriorate after a heating wire increases the heating temperature, so that the quality of a film layer formed on a substrate is affected. The technical scheme is as follows:
in one aspect, there is provided an evaporation source comprising: the crucible and the driving assembly are arranged in the cavity, and the heating assembly is arranged in the cavity;
the crucible is of a telescopic structure and is used for placing evaporation materials;
an air outlet is formed in one side of the cavity, the driving assembly is located on one side, far away from the air outlet, of the crucible, and the driving assembly is used for driving the crucible to contract towards one side, close to the air outlet;
the heating assembly is used for heating the evaporation material.
Optionally, the crucible comprises: the elastic connecting pipe comprises a first plate body, a second plate body and an elastic connecting pipe, wherein the first plate body and the second plate body are arranged oppositely, and the elastic connecting pipe is connected between the first plate body and the second plate body;
the first plate body is positioned on one side of the elastic connecting pipe close to the air outlet, and a through hole is formed in the first plate body;
the driving assembly is connected with the second plate body and used for driving the second plate body to move towards one side close to the first plate body, so that the elastic connecting pipe contracts towards one side close to the first plate body.
Optionally, the elastic connecting pipe is made of a metal material.
Optionally, the elastic connecting pipe is corrugated.
Optionally, the driving assembly includes: the magnetic circuit comprises a first magnetic block, a second magnetic block and a first driving circuit, wherein the first magnetic block and the second magnetic block are oppositely arranged;
the first magnetic block and the second magnetic block are both positioned on one side of the crucible away from the air outlet, the first magnetic block is connected with the crucible, and the second magnetic block is connected with the other side of the cavity;
at least one of the first magnetic block and the second magnetic block is electrically connected with the first driving circuit, and the first driving circuit is used for supplying current to the magnetic block connected with the first driving circuit so as to drive the first magnetic block to move in a direction away from the second magnetic block.
Optionally, one side of the crucible, which is far away from the air outlet, is made of a magnetic material; the drive assembly includes: a third magnetic block and a second drive circuit;
the third magnetic block is positioned on one side of the crucible, which is far away from the air outlet hole, and is connected with the other side of the cavity;
the second driving circuit is electrically connected with the third magnetic block and is used for supplying current to the third magnetic block so as to drive the crucible to move towards one side close to the gas outlet hole.
Optionally, the driving assembly includes: an elastic carrier;
one end of the elastic bearing piece is connected with one side, far away from the air outlet, of the crucible, and the other end of the elastic bearing piece is connected with the other side of the cavity.
Optionally, the resilient carrier is a spring.
Optionally, the heating assembly comprises: a plurality of heating members arranged in an axial direction of the cavity;
the heating temperature of a plurality of the heating members is reduced in sequence along the direction away from the air outlet.
Optionally, each of the heating members is a heating wire.
In another aspect, a vacuum evaporation system is provided, comprising: a vacuum chamber, a reticle and an evaporation source as described in the above aspects; the mask plate and the evaporation source are arranged in the vacuum chamber, and the mask plate is positioned on one side, provided with the air outlet, of the cavity in the evaporation source.
The beneficial effects brought by the technical scheme provided by the embodiment of the disclosure at least comprise:
the embodiment of the disclosure provides an evaporation source and a vacuum evaporation system. An air outlet hole is formed in one side of the cavity, and the driving assembly is located on one side, far away from the air outlet hole, of the crucible. Because the crucible is of a telescopic structure, the driving assembly can drive the crucible to contract towards one side close to the air outlet hole. Therefore, in the process that the evaporation material in the crucible is gradually reduced, the distance between the top of the evaporation material and the air outlet is always kept in a smaller range, so that the situation that the evaporation material is deteriorated due to the fact that the distance between the evaporation material and the air outlet is gradually increased and the heating temperature of the heating assembly is increased is avoided, the quality of a film layer formed on the substrate is ensured, and the performance of the display device is further ensured.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present disclosure, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present disclosure, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic cross-sectional view of an evaporation source provided in an embodiment of the present disclosure;
fig. 2 is a schematic cross-sectional view of another evaporation source provided by an embodiment of the present disclosure;
FIG. 3 is a schematic cross-sectional view of a crucible provided by an embodiment of the present disclosure;
fig. 4 is a schematic cross-sectional view of another evaporation source provided by the embodiment of the present disclosure;
FIG. 5 is a schematic cross-sectional view of the crucible in the evaporation source shown in FIG. 4, shrinking toward a side near the gas outlet;
FIG. 6 is a schematic cross-sectional view of the crucible in the evaporation source shown in FIG. 4, shrinking toward a side close to the gas outlet;
fig. 7 is a schematic cross-sectional view of another evaporation source provided in an embodiment of the present disclosure;
fig. 8 is a schematic cross-sectional view of another evaporation source provided in an embodiment of the present disclosure;
fig. 9 is a schematic cross-sectional view of another evaporation source provided in an embodiment of the present disclosure;
FIG. 10 is a schematic cross-sectional view of the crucible in the evaporation source shown in FIG. 9, shrinking toward a side near the gas outlet;
FIG. 11 is a schematic cross-sectional view of the crucible in the evaporation source shown in FIG. 9, shrinking toward a side near the gas outlet;
fig. 12 is a schematic cross-sectional view of another evaporation source provided in an embodiment of the present disclosure;
fig. 13 is a schematic cross-sectional view of a vacuum evaporation system according to an embodiment of the present disclosure.
Detailed Description
To make the objects, technical solutions and advantages of the present disclosure more apparent, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings.
Fig. 1 is a schematic cross-sectional view of an evaporation source according to an embodiment of the present disclosure. As shown in fig. 1, the evaporation source may include a
The
The
In the embodiment of the present disclosure, since the
Fig. 2 is a schematic cross-sectional view of another evaporation source provided in an embodiment of the present disclosure. As shown in fig. 2, the
In summary, the embodiments of the present disclosure provide an evaporation source, which may include a cavity, a crucible and a driving assembly disposed in the cavity, and a heating assembly. An air outlet hole is formed in one side of the cavity, and the driving assembly is located on one side, far away from the air outlet hole, of the crucible. Because the crucible is of a telescopic structure, the driving assembly can drive the crucible to contract towards one side close to the air outlet hole. Therefore, in the process that the evaporation material in the crucible is gradually reduced, the distance between the evaporation material and the air outlet is always kept in a smaller range, so that the situation that the evaporation material is deteriorated due to the fact that the distance between the evaporation material and the air outlet is gradually increased and the heating temperature of the heating assembly is increased is avoided, the quality of a film layer formed on the substrate is ensured, and meanwhile, the performance of the display device is ensured.
Referring to fig. 1 and 3, the
The
The
Alternatively, the
In an alternative implementation manner of the embodiment of the present disclosure, referring to fig. 4, 5 and 6, the driving
The first
Alternatively, the first
Illustratively, referring to fig. 3 and 4, after a sufficient amount of
In another alternative implementation of the disclosed embodiment, referring to fig. 7, the side of the
In yet another alternative implementation of the disclosed embodiment, as shown in fig. 8, the driving
In yet another alternative implementation of the disclosed embodiment, referring to fig. 3, 9, 10 and 11, the driving
The first supporting
Illustratively, referring to fig. 9, when
In yet another alternative implementation of the disclosed embodiment, referring to fig. 3 and 12, the driving
Referring to fig. 4 to 12, the
Because the heating temperatures of the plurality of heating members 401 are sequentially reduced along the direction away from the
In summary, the embodiments of the present disclosure provide an evaporation source, which may include a cavity, a crucible and a driving assembly disposed in the cavity, and a heating assembly. An air outlet hole is formed in one side of the cavity, and the driving assembly is located on one side, far away from the air outlet hole, of the crucible. Because the crucible is of a telescopic structure, the driving assembly can drive the crucible to contract towards one side close to the air outlet hole. Consequently at the in-process that the coating by vaporization material in the crucible reduces gradually, this coating by vaporization material keeps in a less within range with the distance of venthole all the time to avoided because the distance crescent of coating by vaporization material and venthole makes heating element need increase heating temperature, and then lead to the coating by vaporization material to easily take place the condition about rotten, ensured the quality of the rete that forms on the base plate, and then ensured display device's performance.
Fig. 13 is a schematic cross-sectional view of a vacuum evaporation system according to an embodiment of the present disclosure. As shown in fig. 13, the vacuum evaporation system may include an
In the embodiment of the present disclosure, when a substrate to be evaporated is evaporated, the substrate to be evaporated is first placed in the
The above description is intended to be exemplary only and not to limit the present disclosure, and any modification, equivalent replacement, or improvement made without departing from the spirit and scope of the present disclosure is to be considered as the same as the present disclosure.
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