PVD sample rotating stand and PVD equipment
阅读说明:本技术 Pvd样品转架和pvd设备 (PVD sample rotating stand and PVD equipment ) 是由 金伟特 钱聪 上官鹏鹏 王海峰 王利生 于 2019-10-28 设计创作,主要内容包括:本申请提供一种PVD样品转架和PVD设备。该PVD样品转架包括转动底盘(1)、转轴(2)和样品固定框架(3),多个转轴(2)沿转动底盘(1)的周侧设置,各转轴(2)均能够转动地设置在转动底盘(1)上,每个转轴(2)上沿周向设置有多个样品固定框架(3)。根据本申请的PVD样品转架,能够提高单次挂样数量,提高制样效率。(The application provides a PVD sample rotating stand and a PVD device. This PVD sample revolving rack includes rotating chassis (1), pivot (2) and sample fixed frame (3), and a plurality of pivots (2) set up along the week side that rotates chassis (1), and each pivot (2) homoenergetic sets up on rotating chassis (1) with rotating, is provided with a plurality of sample fixed frame (3) along circumference on every pivot (2). According to the PVD sample revolving rack of this application, can improve the single and hang a kind quantity, improve system appearance efficiency.)
1. The utility model provides a PVD sample revolving rack, its characterized in that is including rotating chassis (1), pivot (2) and sample fixed frame (3), and is a plurality of pivot (2) are followed the week side that rotates chassis (1) sets up, each pivot (2) homoenergetic sets up with rotating on the chassis (1), every be provided with a plurality ofly along circumference in pivot (2) sample fixed frame (3).
2. PVD sample carousel according to claim 1, wherein the spindle (2) is provided with a mounting seat (4), the sample holding frame (3) being detachably arranged on the mounting seat (4).
3. PVD sample rotating stand according to claim 2, characterized in that the mounting seat (4) is provided with a plurality of hanging holes (5) along the circumferential direction, the sample fixing frame (3) is provided with hooks (6), and the sample fixing frame (3) is hung in the hanging holes (5) through the hooks (6).
4. PVD sample rotating stand according to claim 3, characterized in that the cross section of the hook (6) is polygonal, or the cross section of the hook (6) is D-shaped, or the cross section of the hook (6) is oval, and the shape of the hanging hole (5) is adapted to the shape of the hook (6).
5. PVD sample rotating stand according to claim 3, characterized in that the hook (6) is a foolproof polygon, the hanging hole (5) comprises a guiding section (7) and a positioning section (8) along the installation direction of the hook (6), the cross section of the guiding section (7) decreases along the direction close to the positioning section (8), the shape of the positioning section (8) is adapted to the shape of the hook (6), and the cross section of the guiding section (7) is circular.
6. PVD sample carousel according to claim 5, wherein the positioning section (8) is a swivel structure, and wherein a generatrix of the positioning section (8) is a straight or curved line section.
7. PVD sample carousel according to claim 1, characterized in that the sample holding frame (3) is provided with connection holes (9) for connection with a sample; and/or the shape of the sample fixing frame (3) is square, Chinese character 'ri' or Chinese character 'tian'.
8. PVD sample carousel according to claim 3, wherein the mounting seat (4) comprises a plurality of laterally protruding arms (10), the hanging holes (5) being provided on the arms (10).
9. PVD sample rotating stand according to claim 1, characterized in that the bottom of the spindle (2) is provided with a support disc (11), the spindle (2) is rotatably arranged on the rotating chassis (1) through the support disc (11); and/or the spacing between the spindles (2) is greater than 2 times the maximum distance of the sample holding frame (3) from the central axis of the spindles (2).
10. PVD equipment comprising a PVD sample turret, characterized in that the PVD sample turret is a PVD sample turret according to any of claims 1 to 9.
Technical Field
The application relates to the technical field of bipolar plate surface modification, in particular to a PVD sample rotating stand and PVD equipment.
Background
With the aggravation of environmental pollution, the search and application of new environmentally-friendly energy sources become a focus of attention. The proton exchange membrane hydrogen-oxygen fuel cell can directly convert chemical energy into electric energy, and the process has no pollution to the environment, so the proton exchange membrane hydrogen-oxygen fuel cell becomes a hot point of research.
The fuel cell is mainly composed of bipolar plates, diffusion layers, membrane electrodes and other components. The bipolar plate is used as a key component of the fuel cell, and the development and the application of the fuel cell are greatly influenced by the factors such as the quality, the cost and the like. Nowadays, the industry mainly includes several types of metal bipolar plates, graphite bipolar plates and composite bipolar plates, wherein the metal bipolar plates have attracted attention because of their advantages of light weight, high strength, thin thickness and the like. In the application process, researchers find that the corrosion resistance of the metal bipolar plate can not meet the requirement, so that the corrosion resistance of the metal bipolar plate needs to be improved through a surface modification mode, and PVD is a very common surface modification mode.
At present, the PVD equipment which is commonly used has the advantages of small quantity and fixation of single-time hanging samples, inconvenient installation and low sample preparation efficiency.
Disclosure of Invention
Therefore, the technical problem that this application will be solved lies in providing a PVD sample revolving rack and PVD equipment, can improve the single and hang a kind quantity, improves system appearance efficiency.
In order to solve the problem, the application provides a PVD sample revolving rack, including rotating chassis, pivot and sample fixed frame, a plurality of pivots set up along the week side that rotates the chassis, and each pivot homoenergetic sets up on rotating the chassis with rotating, is provided with a plurality of sample fixed frames along circumference in every pivot.
Preferably, the rotating shaft is provided with a mounting seat, and the sample fixing frame is detachably arranged on the mounting seat.
Preferably, a plurality of hanging holes are formed in the mounting seat in the circumferential direction, a hook is arranged on the sample fixing frame, and the sample fixing frame is hung in the hanging holes through the hook.
Preferably, the cross section of the hook is polygonal, or the cross section of the hook is D-shaped, or the cross section of the hook is oval, and the shape of the hanging hole is matched with that of the hook.
Preferably, the couple is for preventing slow-witted polygon, and the mounting direction of hanging hole along the couple includes direction section and location section, and the direction section that the direction section is steadilyd decrease along being close to the location section, and the shape of location section and the shape looks adaptation of couple, the section of direction section are circular.
Preferably, the positioning section is a revolution structure, and a bus of the positioning section is a straight line section or a curved line section.
Preferably, the sample fixing frame is provided with a connecting hole for connecting with a sample; and/or the shape of the sample fixing frame is square, Chinese character 'ri' or Chinese character 'tian'.
Preferably, the mounting seat comprises a plurality of laterally protruding arms, and the hanging holes are arranged on the protruding arms.
Preferably, the bottom of the rotating shaft is provided with a supporting disk, and the rotating shaft is rotatably arranged on the rotating chassis through the supporting disk; and/or the spacing between the spindles is greater than 2 times the maximum distance of the sample holding frame from the central axis of the spindles.
According to another aspect of the present application, there is provided a PVD apparatus comprising a PVD sample carousel as described above.
The application provides a PVD sample revolving rack, including rotating chassis, pivot and sample fixed frame, a plurality of pivots set up along rotating chassis's week side, and each pivot homoenergetic sets up on rotating chassis with rotating, is provided with a plurality of sample fixed frames along circumference in every pivot. This PVD sample revolving rack is provided with a plurality of sample fixed frame along circumference including a plurality of pivots in every pivot, consequently when carrying out the PVD modification, can realize hanging the appearance through a plurality of sample fixed frame simultaneously and modify, can modify a plurality of samples simultaneously, and the single hangs a kind in large quantity, and system appearance is efficient.
Drawings
FIG. 1 is a schematic perspective view of a PVD sample turret according to an embodiment of the present disclosure;
FIG. 2 is a single turret assembly view of a PVD sample turret of an embodiment of the present application;
FIG. 3 is an exploded view of a single PVD sample turret according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural diagram of a mounting seat of a PVD sample turret according to an embodiment of the application;
FIG. 5 is a schematic side view of a first mount of a PVD sample carousel according to an embodiment of the present disclosure;
fig. 6 is a schematic side view of a second mount of a PVD sample turret according to an embodiment of the disclosure.
The reference numerals are represented as:
1. rotating the chassis; 2. a rotating shaft; 3. a sample holding frame; 4. a mounting seat; 5. hanging holes; 6. hooking; 7. a guide section; 8. a positioning section; 9. connecting holes; 10. a convex arm; 11. and (4) supporting the disc.
Detailed Description
Referring to fig. 1 to 6 in combination, according to an embodiment of the present application, a PVD sample rotating rack includes a rotating chassis 1, a plurality of rotating
This PVD sample revolving rack is provided with a plurality of sample fixed
The hanging sample is a hanging sample without being subjected to PVD surface modification, can be a small-size sample for experiments, and also can be a metal bipolar plate stamping finished product, and is hung on a
The rotating
Be provided with a plurality of hanging
In this embodiment, one side of sample fixed
The
The hook 6 can also be fixed in the hanging hole in a welding mode and the like, so that the fixed connection between the hook 6 and the rotating
In order to ensure the stability of the installation structure of the
The section of the hook 6 is polygonal, or the section of the hook 6 is D-shaped, or the section of the hook 6 is oval, and the shape of the
In this embodiment, couple 6's cross-section sets up to anti-rotation structure, and the shape and the couple 6 phase-match of hanging
Preferably, couple 6 is for preventing slow-witted polygon, and hanging
In the process of assembling the
Preferably, the
The
The shape of the
The mounting seat 4 comprises a plurality of laterally protruding
The bottom of
When the sample is modified, the sample can be vertically suspended in the PVD vacuum chamber, so that the part needing surface modification is parallel to the surface of the target, the utilization rate of the target is increased, and the effect of surface modification of the sample is improved. When the metal bipolar plate is modified by PVD equipment, the
The hook 6 can be welded on the
The mounting seat 4 is fixed on the
The
According to an embodiment of the application, the PVD apparatus comprises a PVD sample carousel, which is a PVD sample carousel as described above.
It is readily understood by a person skilled in the art that the advantageous ways described above can be freely combined, superimposed without conflict.
The present invention is not intended to be limited to the particular embodiments shown and described, but is to be accorded the widest scope consistent with the principles and novel features herein disclosed. The foregoing is only a preferred embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and variations can be made without departing from the technical principle of the present application, and these modifications and variations should also be considered as the protection scope of the present application.
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